Spray gun device and silane coating preparation system

Abstract

The invention discloses a spray gun device which comprises a spray gun main body and a scraping mechanism, a central flow channel is arranged in the spray gun main body, and the central flow channel is communicated with an external gas source so as to realize preparation of a deposition layer; the scraping mechanism comprises a scraper, the scraper is rotatably connected with the spray gun body, and the scraper is located at one end of an outlet of the center flow channel so as to scrape sediments at the outlet of the center flow channel. The spray gun body conveys materials through the center flow channel, and the materials are ignited to prepare sediments. Meanwhile, the scraping mechanism is arranged, the scraper is arranged at the outlet end of the center flow channel, in the preparation process, the scraper rotates, sediment at the outlet of the center flow channel can be scraped, the situation that the sediment influences material conveying of the center flow channel is avoided, and normal work of the spray gun device is guaranteed. The invention further provides a silane coating preparation system which comprises the spray gun device, and the preparation efficiency and the preparation quality of the silane coating are guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor material preparation equipment and its supporting facilities, and in particular to a spray gun device and a silane coating preparation system. Background Art

[0002] In the preparation process of high-purity germanium materials, in order to isolate impurities in the quartz device from entering the molten germanium material, a silicon dioxide coating of a certain thickness is deposited on the surface of the quartz device by fumigation.

[0003] The fumigation process refers to igniting silane in an oxygen-sufficient environment. The white smoke of silicon dioxide produced will be ejected with the hot air flow of the combustion and hit the wall of the quartz material. Since the temperature of the surface of the quartz device is relatively low, silicon dioxide will be deposited on the surface of the quartz device. Due to the fast deposition speed, the structure of the silicon dioxide film is a loose structure.

[0004] The silane spray gun currently used has a three-layer casing structure, through which silane, oxygen and argon are passed from the inside to the outside. Argon is used as a protective gas, which can prevent flashback in the pipeline on the one hand, and ensure the spray direction of the flame on the other hand.

[0005] During the use of the current spray gun, silica will partially deposit on the end face of the central nozzle. As the use time increases, the silica deposits will gradually extend to the center of the nozzle, causing a decrease in the silane flow rate and eventually blocking the silane nozzle, affecting the normal operation of the spray gun. Summary of the invention

[0006] The purpose of the present invention is to provide a spray gun device and a silane coating preparation system to solve the problems existing in the above-mentioned related technologies, avoid clogging of the spray gun, ensure the normal flow of materials, and improve the working reliability of the silane coating preparation system.

[0007] To achieve the above object, the present invention provides the following solutions:

[0008] The present invention provides a spray gun device, comprising:

[0009] A spray gun body, wherein the spray gun body has a central flow channel therein, and the central flow channel is connected to an external gas source to achieve the preparation of the deposition layer;

[0010] A scraping mechanism, wherein the scraping mechanism comprises a scraper, wherein the scraper is rotatably connected to the spray gun body and is located at one end of the outlet of the central flow channel; the projection of the outlet of the central flow channel on the end face of the spray gun body is located within the projection area of ​​the scraper's rotation coverage area on the end face of the spray gun body, so as to scrape off the deposits at the outlet of the central flow channel.

[0011] Preferably, the spray gun body includes a central nozzle, a second layer nozzle and an outer layer nozzle which are stacked in sequence from the inside to the outside, the inner cavity of the central nozzle forms the central flow channel, the gap between the central nozzle and the second layer nozzle forms the second layer flow channel, the gap between the second layer nozzle and the outer layer nozzle forms the outer layer flow channel, and the central flow channel, the second layer flow channel and the outer layer flow channel are respectively connected to an external gas source.

[0012] Preferably, the scraping mechanism further comprises a driving shaft, the driving shaft is rotatably connected to the outer layer nozzle, and the scraper is connected to the driving shaft.

[0013] Preferably, the scraper is detachably connected to the driving shaft.

[0014] Preferably, the connection position between the scraper and the driving shaft can be adjusted, and the adjustment direction is parallel to the axial direction of the central nozzle.

[0015] Preferably, the scraper has a mounting ring, and the mounting ring is sleeved on the outside of the driving shaft.

[0016] Preferably, a wind wheel is connected to the driving shaft, and an air outlet is provided on the outer nozzle, and the air outlet is arranged directly opposite to the wind wheel to drive the wind wheel and the driving shaft to rotate.

[0017] Preferably, the scraping mechanism also includes a bearing seat, which is fixed on the outer nozzle, and the driving shaft can rotatably pass through the bearing seat, and a bearing is arranged between the driving shaft and the bearing seat; the number of the bearing seats is two groups, and the two bearing seats are arranged on both sides of the wind wheel, and the scraper is arranged at one end of the driving shaft close to the outlet of the central nozzle.

[0018] Preferably, the spray gun body also includes a first air inlet pipe and a second air inlet pipe, the first air inlet pipe is connected to the second layer nozzle, and the first air inlet pipe is connected to the second layer flow channel; the second air inlet pipe is connected to the outer layer nozzle, and the second air inlet pipe is connected to the outer layer flow channel.

[0019] The present invention also provides a silane coating preparation system, comprising the above-mentioned spray gun device.

[0020] Compared with the related art, the present invention has achieved the following technical effects: the spray gun device of the present invention includes a spray gun body and a scraping mechanism, wherein the spray gun body has a central flow channel inside, and the central flow channel is connected to an external gas source to achieve the preparation of a deposition layer; the scraping mechanism includes a scraper, which is rotatably connected to the spray gun body and is located at one end of the outlet of the central flow channel; the projection of the outlet of the central flow channel on the end face of the spray gun body is located within the projection area of ​​the scraper rotation coverage area on the end face of the spray gun body to scrape off the deposits at the outlet of the central flow channel.

[0021] In the spray gun device of the present invention, the spray gun body uses the central flow channel to transport materials and ignites the materials to prepare sediments. The present invention also provides a scraping mechanism, and a scraper is provided at the outlet end of the central flow channel. During the preparation process, the scraper rotates to scrape off the sediment at the outlet of the central flow channel, thereby preventing the sediment from affecting the transport of materials by the central flow channel and ensuring the normal operation of the spray gun device.

[0022] The present invention also provides a silane coating preparation system, including the above-mentioned spray gun device, which uses a scraping mechanism to scrape off the sediment at the outlet of the central flow channel to avoid blockage of the central flow channel and ensure the preparation efficiency and preparation quality of the silane coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a front view schematic diagram of the spray gun device disclosed in the embodiment of the present invention;

[0025] Figure 2 A schematic side view of a spray gun device disclosed in an embodiment of the present invention;

[0026] Figure 3 for Figure 2 Schematic diagram of the cross-section structure along the AA direction;

[0027] Figure 4 It is a schematic front view of a spray gun device disclosed in an embodiment of the present invention.

[0028] In the figure: 100, spray gun device;

[0029] 1. Spray gun body; 2. Scraper; 3. Central flow channel; 4. Central nozzle; 5. Second layer nozzle; 6. Second layer flow channel; 7. Outer layer nozzle; 8. Outer layer flow channel; 9. Driving shaft; 10. Mounting ring; 11. Wind wheel; 12. Air outlet; 13. Bearing seat; 14. First air inlet pipe; 15. Second air inlet pipe. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] The purpose of the present invention is to provide a spray gun device and a silane coating preparation system to solve the problems existing in the above-mentioned related technologies, avoid clogging of the spray gun, ensure the normal flow of materials, and improve the working reliability of the silane coating preparation system.

[0032] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] Embodiment 1

[0034] This embodiment provides a spray gun device 100, please refer to Figure 1-Figure 4 , including a spray gun body 1 and a scraping mechanism, wherein the spray gun body 1 has a central flow channel 3 inside, and the central flow channel 3 is connected to an external gas source to achieve the preparation of a deposition layer; the scraping mechanism includes a scraper 2, which is rotatably connected to the spray gun body 1 and is located at one end of the outlet of the central flow channel 3; the projection of the outlet of the central flow channel 3 on the end surface of the spray gun body 1 is located within the projection area of ​​the rotation coverage area of ​​the scraper 2 on the end surface of the spray gun body 1, so as to scrape off the deposits at the outlet of the central flow channel 3.

[0035] In the spray gun device 100 of the present invention, the spray gun body 1 uses the central flow channel 3 to transport materials and ignite the materials to prepare sediments. The present invention also provides a scraping mechanism, and a scraper 2 is provided at the outlet end of the central flow channel 3. During the preparation process, the scraper 2 rotates to scrape off the sediment at the outlet of the central flow channel 3, so as to prevent the sediment from affecting the transport of materials by the central flow channel 3 and ensure the normal operation of the spray gun device 100.

[0036] It needs to be explained here that the projection of the outlet of the central flow channel 3 on the end face of the spray gun body 1 is located within the projection area of ​​the scraper 2 rotation coverage area on the end face of the spray gun body 1, specifically, it means that the reciprocating motion of the scraper 2 can cover the sediment range at the outlet of the central flow channel 3, so as to scrape off the sediment and prevent the material transported by the central flow channel 3 from being affected by the sediment.

[0037] In this specific embodiment, the spray gun body 1 includes a central nozzle 4, a second nozzle 5 and an outer nozzle 7 which are stacked from the inside to the outside. The inner cavity of the central nozzle 4 forms a central flow channel 3. The gap between the central nozzle 4 and the second nozzle 5 forms a second flow channel 6. The gap between the second nozzle 5 and the outer nozzle 7 forms an outer flow channel 8. The central flow channel 3, the second flow channel 6 and the outer flow channel 8 are respectively connected to the external gas source. In this specific embodiment, the spray gun body 1 is used for silane coating deposition as an example. The spray gun body 1 adopts a three-layer sleeve structure. Silane is introduced into the central nozzle 4, oxygen is introduced into the second flow channel 6 as a combustion-supporting gas, and a protective gas is introduced into the outer flow channel 8. On the one hand, it can prevent backfire in the pipeline, and on the other hand, it can ensure the spray direction of the flame. In this embodiment, argon is used as the protective gas. In practical applications, the structure of the spray gun body 1 can select different structures according to the specific preparation of the coating to meet different production and preparation requirements. Different combustion-supporting gases and protective gases can also be introduced according to specific working conditions to improve the flexibility and adaptability of the spray gun device 100. The length of the scraper 2 exceeds the lower bottom surface of the central nozzle 4, ensuring that the scraper 2 can scrape off the sediment at the outlet of the central nozzle 4 when rotating.

[0038] Specifically, the scraping mechanism also includes a driving shaft 9, which is rotatably connected to the outer nozzle 7, and the scraper 2 is connected to the driving shaft 9. The driving shaft 9 is used to drive the scraper 2 to rotate, and at the same time, a stable installation foundation is provided for the scraper 2 to ensure the normal operation of the scraper 2. In practical applications, the rotation speed and rotation cycle of the scraper 2 can be controlled by controlling the rotation speed of the driving shaft 9. It should be explained here that the scraper 2 can be set to rotate periodically, which ensures the normal operation of the spray gun body 1 while extending the service life of the scraping mechanism.

[0039] In practical applications, the scraper 2 and the driving shaft 9 can be connected in a detachable manner, which is convenient for maintenance and replacement of the scraper 2, is beneficial to improving the working efficiency of the scraper 2, and ensures that the scraper 2 can scrape off the deposits on the end surface of the spray gun body 1.

[0040] In other specific embodiments that can be realized by the present invention, the connection position of the scraper 2 and the driving shaft 9 can be adjusted, and the adjustment direction is parallel to the axial direction of the central nozzle 4. The connection position of the scraper 2 and the driving shaft 9 is adjusted to achieve the purpose of adjusting the distance between the scraper 2 and the end face of the spray gun body 1. The distance between the scraper 2 and the end face of the spray gun body 1 can be adjusted according to the specific type of deposits to ensure that the scraper 2 can scrape off the deposits, thereby further improving the working reliability and flexible adaptability of the scraping mechanism.

[0041] In this specific embodiment, the scraper 2 has a mounting ring 10, which is sleeved on the outside of the drive shaft 9 to ensure the firmness of the connection between the scraper 2 and the drive shaft 9, and to facilitate the adjustment of the relative position of the scraper 2 and the drive shaft 9 to meet different production conditions. In practical applications, a locking element can be provided between the mounting ring 10 and the drive shaft 9 to fix the relative position of the scraper 2 and the drive shaft 9, for example, a locking screw is used to fix the relative position of the mounting ring 10 and the drive shaft 9 to ensure the structural stability of the scraper 2.

[0042] More specifically, a wind wheel 11 is connected to the driving shaft 9, and an air outlet 12 is provided on the outer layer nozzle 7, and the air outlet 12 is arranged opposite to the wind wheel 11 to drive the wind wheel 11 and the driving shaft 9 to rotate. The present invention utilizes the protective gas discharged from the outer layer flow channel 8 to drive the driving shaft 9 to rotate, and part of the protective gas in the outer layer flow channel 8 is discharged from the air outlet 12, and the air outlet 12 is arranged opposite to the wind wheel 11, blowing the wind wheel 11 to rotate, and then utilizing the wind wheel 11 to drive the driving shaft 9 and the scraper 2 to rotate, and using the protective gas as the power source, the structure is simple and the operation is reliable. In other specific embodiments that can be realized by the present invention, a separate power source can also be provided to drive the driving shaft 9 to rotate, and the movement mode of the scraper 2 can be adjusted at the same time, for example, the scraper 2 is provided as a double-sided blade structure, and the power source is used to drive the scraper 2 to swing back and forth to scrape off the sediment at the outlet of the central nozzle 4.

[0043] In order to further improve the working reliability of the scraping mechanism, the scraping mechanism also includes a bearing seat 13, the bearing seat 13 is fixed on the outer nozzle 7, the driving shaft 9 can rotatably pass through the bearing seat 13, and a bearing is arranged between the driving shaft 9 and the bearing seat 13 to ensure the smooth rotation of the driving shaft 9 and the scraper 2, thereby improving the working reliability of the spray gun device 100. In this specific embodiment, the number of the bearing seats 13 is two groups, and the two bearing seats 13 are arranged on both sides of the wind wheel 11 to improve the uniformity of the force of the driving shaft 9. The scraper 2 is arranged at one end of the driving shaft 9 close to the outlet of the central nozzle 4, thereby improving the convenience of disassembly, assembly and adjustment of the scraper 2.

[0044] It should also be noted that the spray gun body 1 also includes a first air inlet pipe 14 and a second air inlet pipe 15. The first air inlet pipe 14 is connected to the second-layer nozzle 5, and the first air inlet pipe 14 is connected to the second-layer flow channel 6; the second air inlet pipe 15 is connected to the outer-layer nozzle 7, and the second air inlet pipe 15 is connected to the outer-layer flow channel 8, to ensure the smooth delivery of the combustion-supporting gas and the protective gas.

[0045] The spray gun device 100 of the present invention has a scraper 2 disposed at the nozzle of the spray gun body 1. The scraper 2 is driven to rotate by argon gas flow to periodically scrape off the silicon dioxide deposits on the end surface of the central nozzle 4.

[0046] Embodiment 2

[0047] The present embodiment provides a silane coating preparation system, including the above-mentioned spray gun device 100. The spray gun device 100 uses a scraping mechanism to scrape off the sediment at the outlet of the central flow channel 3 to avoid blockage of the central flow channel 3, thereby improving the working reliability of the silane coating preparation system and ensuring the preparation efficiency and preparation quality of the silane coating.

[0048] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A spray gun device, characterized in that: include: A spray gun body, wherein the spray gun body has a central flow channel therein, and the central flow channel is connected to an external gas source to achieve the preparation of the deposition layer; A scraping mechanism, wherein the scraping mechanism comprises a scraper, wherein the scraper is rotatably connected to the spray gun body and is located at one end of the outlet of the central flow channel; the projection of the outlet of the central flow channel on the end face of the spray gun body is located within the projection area of ​​the scraper's rotation coverage area on the end face of the spray gun body, so as to scrape off the deposits at the outlet of the central flow channel.

2. The spray gun device according to claim 1, characterized in that: The spray gun body includes a central nozzle, a second-layer nozzle and an outer-layer nozzle which are stacked in sequence from the inside to the outside. The inner cavity of the central nozzle forms the central flow channel. The gap between the central nozzle and the second-layer nozzle forms the second-layer flow channel. The gap between the second-layer nozzle and the outer-layer nozzle forms the outer-layer flow channel. The central flow channel, the second-layer flow channel and the outer-layer flow channel are respectively connected to an external gas source.

3. The spray gun device according to claim 2, characterized in that: The scraping mechanism also includes a driving shaft, which is rotatably connected to the outer layer nozzle, and the scraper is connected to the driving shaft.

4. The spray gun device according to claim 3, characterized in that: The scraper is detachably connected to the driving shaft.

5. The spray gun device according to claim 3, characterized in that: The connection position between the scraper and the driving shaft can be adjusted, and the adjustment direction is parallel to the axial direction of the central nozzle.

6. The spray gun device according to claim 3, characterized in that: The scraper has a mounting ring, and the mounting ring is sleeved on the outside of the driving shaft.

7. The spray gun device according to claim 3, characterized in that: The driving shaft is connected with a wind wheel, and the outer nozzle is provided with an air outlet, which is arranged opposite to the wind wheel to drive the wind wheel and the driving shaft to rotate.

8. The spray gun device according to claim 7, characterized in that: The scraping mechanism also includes a bearing seat, which is fixed on the outer nozzle, and the driving shaft can rotatably pass through the bearing seat, and a bearing is arranged between the driving shaft and the bearing seat; the number of the bearing seats is two groups, and the two bearing seats are arranged on both sides of the wind wheel, and the scraper is arranged at one end of the driving shaft close to the outlet of the central nozzle.

9. The spray gun device according to claim 2, characterized in that: The spray gun body also includes a first air inlet pipe and a second air inlet pipe, wherein the first air inlet pipe is connected to the second layer nozzle and communicates with the second layer flow channel; the second air inlet pipe is connected to the outer layer nozzle and communicates with the outer layer flow channel.

10. A silane coating preparation system, characterized in that: A spray gun device comprising any one of claims 1-9.

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