A method for preparing YOF coating of vacuum chamber

Abstract

The present invention provides a method for preparing a YOF coating for a vacuum cavity, which belongs to the technical field of coating processing, and comprises the following steps: providing a spare part mother material and a coating powder; performing roughness treatment on the spare part mother material to obtain the treated spare part mother material; adjusting equipment parameters; spraying the treated spare part mother material with the coating powder to obtain the YOF coating. The present invention provides a method for preparing a YOF coating for a vacuum cavity, which provides a more plasma-resistant coating material by controlling equipment parameters such as the gas introduced and the spraying of the treated spare part mother material with the coating powder, thereby minimizing the probability of the vacuum cavity being energized, effectively preventing the etching of the inner wall of the cavity and other components by plasma, and extending the service life of the vacuum cavity components.

Description

Technical Field

[0001] The invention relates to the technical field of coating processing, and in particular to a method for preparing a YOF coating of a vacuum cavity. Background Art

[0002] In the semiconductor industry, plasma etching is a key technology for producing highly integrated products. This process is usually carried out in a fluorinated hydrocarbon plasma environment, but this environment is highly corrosive and reactive to various equipment parts in the chamber, which can easily lead to corrosion of parts and produce contaminant particles. These contaminant particles will fall on the wafer, causing defects, resulting in significant yield losses.

[0003] In order to resist the etching effect of plasma, yttrium oxide (Y2O3) and aluminum oxide (Al2O3) are commonly used as coating materials in the industry to protect equipment parts. However, the performance of these materials is limited when facing highly corrosive plasmas such as fluorinated hydrocarbons. In particular, when Y2O3 interacts with corrosive gases such as fluorocarbons (such as CF4, CHF3, C4F6 and C2F6), its YO bond structure is easily decomposed, causing the coating to degrade. This degradation not only weakens the protective effect of the coating, but may also lead to the generation of more contaminant particles, further affecting the production efficiency and product quality of semiconductors.

[0004] In view of the above problems, the industry urgently needs a coating material that is more resistant to plasma to minimize the probability of power-on in the vacuum chamber, effectively prevent plasma from etching the inner wall of the chamber and other components, and extend the service life of the vacuum chamber components. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention aims to provide a method for preparing YOF coating for a vacuum chamber. By controlling equipment parameters such as the gas introduced and the spraying of coating powder on the treated spare parts base material, a more plasma-resistant coating material is provided, which minimizes the probability of power-on of the vacuum chamber, effectively prevents plasma from etching the inner wall of the chamber and other components, and extends the service life of the vacuum chamber components.

[0006] The present invention provides a method for preparing a vacuum cavity YOF coating, comprising the following steps:

[0007] Provide spare parts base material and coating powder;

[0008] Performing roughness treatment on the spare part base material to obtain the treated spare part base material;

[0009] Adjust equipment parameters;

[0010] The treated spare part base material is sprayed with coating powder to obtain a YOF coating.

[0011] As a further improvement of the present invention, the spare part matrix includes a ceramic matrix and a metal matrix.

[0012] As a further improvement of the present invention, the coating powder comprises YOF, the particle size is 20 to 50 μm, and the preparation method comprises: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing, and packaging processes.

[0013] As a further improvement of the present invention, the roughness treatment of the spare part base material includes cleaning, sandblasting and preheating the spare part base material.

[0014] As a further improvement of the present invention, the cleaning operation includes: cleaning the spare part base material by chemical immersion and physical grinding cleaning.

[0015] As a further improvement of the present invention, the sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.4-0.7 MPa, the particle size is 36-120 meshes, and the surface roughness Ra is 3-8 μm.

[0016] As a further improvement of the present invention, the preheating temperature of the preheating operation is 35-60°C.

[0017] As a further improvement of the present invention, the equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0018] As a further improvement of the present invention, the flow rate of the gas Ar is 30-45NLPM, the flow rate of the gas H2 is 5-9NLPM, the voltage of the spraying operation is 70-80V, the current of the spraying operation is 500-700A, the spraying speed is 5000-8000mm / s, and the spraying distance is 10-14mm.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] The present invention provides a method for preparing a YOF coating for a vacuum chamber. By controlling equipment parameters such as the gas introduced and the spraying of the coating powder on the treated spare part base material, a coating material with higher plasma resistance is provided, which minimizes the probability of power-on of the vacuum chamber, effectively prevents plasma from etching the inner wall of the chamber and other components, and prolongs the service life of the vacuum chamber components. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A flow chart of a method for preparing a YOF coating for a vacuum cavity disclosed in an embodiment of the present invention;

[0022] Figure 2 This is a microscopic comparison of the pores of the YOF coating and the Y2O3 coating;

[0023] Figure 3 This is a scanning electron microscope micrograph of a vacuum chamber YOF coating disclosed in Example 2 of the present invention;

[0024] Figure 4 This is a scanning electron microscope micrograph of a vacuum chamber Y2O3 coating disclosed in Comparative Example 1 of the present invention. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the present invention will combine the accompanying drawings to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments, wherein steps S1, S2... in the embodiments described in the present invention do not limit the only execution steps of the present invention; the basic principles of the present invention defined in the description of the present invention can be applied to other implementation schemes, variant schemes, improved schemes, equivalent schemes and other technical schemes that do not deviate from the spirit and scope of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0026] According to the research of the present invention, yttrium oxyfluoride (YOF) is a compound generated by the reaction of Y2O3 and fluorine plasma. Compared with yttrium oxide (Y2O3) and aluminum oxide (Al2O3), it has higher chemical stability and corrosion resistance, and can better resist the erosion of fluorinated hydrocarbon plasma, so it is more suitable as a coating material for vacuum chambers. Before coating, YO is combined with F to react to generate YOF, which can prevent the powder coating from reacting with F particles after entering the vacuum chamber, thereby ensuring the stability and durability of the coating. Therefore, YOF can minimize the probability of power-on of the vacuum chamber, effectively prevent plasma from etching the inner wall of the chamber and other components, and extend the service life of the vacuum chamber components.

[0027] According to the above research, the present invention controls equipment parameters such as argon flow rate, hydrogen flow rate, spraying distance, spraying speed, etc., and finally provides a method for preparing YOF coating in a vacuum cavity accordingly.

[0028] like Figure 1 As shown, the present invention provides a method for preparing a YOF coating in a vacuum cavity, comprising the following steps:

[0029] S1: Provide spare parts base material and coating powder;

[0030] Preferably, the coating powder comprises YOF, the particle size is 20 to 50 μm, and the preparation method comprises: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing, packaging and other processes.

[0031] Preferably, the spare part base material includes a ceramic base material and a metal base material.

[0032] S2: performing roughness treatment on the spare part base material to obtain the treated spare part base material;

[0033] Preferably, the roughness treatment of the spare part base material includes cleaning, sandblasting and preheating the spare part base material.

[0034] Preferably, the cleaning operation includes: cleaning the spare part base material by chemical immersion and physical grinding cleaning.

[0035] Preferably, the sandblasting particles used in the sandblasting operation are composed of industrial alumina, the sandblasting pressure is 0.4-0.7 MPa, the particle size is 36-120 mesh, and the surface roughness Ra is 3-8 μm.

[0036] Preferably, the preheating temperature of the preheating operation is 35-60°C.

[0037] S3: Adjust equipment parameters;

[0038] Preferably, the equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, the spraying distance, etc.

[0039] Preferably, the flow rate of the Ar gas is 30-45 NLPM, the flow rate of the H2 gas is 5-9 NLPM, the voltage of the spraying operation is 70-80 V, the current of the spraying operation is 500-700 A, the spraying speed is 5000-8000 mm / s, and the spraying distance is 10-14 mm.

[0040] S4: Use coating powder to spray the processed spare part base material to obtain YOF coating.

[0041] Preferably, the coating has a thickness of 250±20 μm, a porosity of <2.0%, and a surface roughness of <2.0 μm.

[0042] The following is specifically described by examples:

[0043] Example 1

[0044] S1: Provide aluminum blocks and coating powder;

[0045] The coating powder comprises YOF, the particle size is 20 μm, and the preparation method comprises: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation,

[0046] Demagnetization, degumming, screening, mixing and packaging processes.

[0047] S2: performing roughness treatment on the aluminum block to obtain a treated aluminum block;

[0048] The roughness treatment of the aluminum block includes cleaning, sandblasting and preheating the aluminum block.

[0049] The cleaning operation includes: cleaning the aluminum block by grinding and high-pressure cleaning.

[0050] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 120 mesh, and the surface roughness Ra is 3 to 4 μm.

[0051] Wherein, the preheating temperature of the preheating operation is 35-40°C.

[0052] S3: Adjust equipment parameters;

[0053] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0054] Wherein, the flow rate of the gas Ar is 30NLPM, and the flow rate of the gas H2 is 5NLPM.

[0055] The voltage of the spraying operation is 70V, the current is 500A, the spraying speed is 5000mm / s, and the spraying distance is 10mm.

[0056] S4: spraying the treated aluminum block with coating powder to obtain a YOF coating.

[0057] Example 2

[0058] S1: Provide aluminum blocks and coating powder;

[0059] The coating powder comprises YOF, the particle size is 40 μm, and the preparation method comprises: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation,

[0060] Demagnetization, degumming, screening, mixing and packaging processes.

[0061] S2: performing roughness treatment on the aluminum block to obtain a treated aluminum block;

[0062] The roughness treatment of the aluminum block includes cleaning, sandblasting and preheating the aluminum block.

[0063] The cleaning operation includes: cleaning the aluminum block by grinding and high-pressure cleaning.

[0064] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 4 to 5 μm.

[0065] Wherein, the preheating temperature of the preheating operation is 40-50°C.

[0066] S3: Adjust equipment parameters;

[0067] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0068] Wherein, the flow rate of the gas Ar is 35NLPM, and the flow rate of the gas H2 is 6NLPM.

[0069] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 6500mm / s, and the spraying distance is 11mm.

[0070] S4: spraying the treated aluminum block with coating powder to obtain a YOF coating.

[0071] Example 3

[0072] S1: Provide aluminum blocks and coating powder;

[0073] The coating powder comprises YOF, the particle size is 50 μm, and the preparation method comprises the following steps: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing, and packaging.

[0074] S2: performing roughness treatment on the aluminum block to obtain a treated aluminum block;

[0075] The roughness treatment of the aluminum block includes cleaning, sandblasting and preheating the aluminum block.

[0076] The cleaning operation includes: cleaning the aluminum block by grinding and high-pressure cleaning.

[0077] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.7 MPa, the particle size is 36 mesh, and the surface roughness Ra is 6 to 8 μm.

[0078] Wherein, the preheating temperature of the preheating operation is 50-60°C.

[0079] S3: Adjust equipment parameters;

[0080] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0081] Wherein, the flow rate of the gas Ar is 45NLPM, and the flow rate of the gas H2 is 9NLPM.

[0082] The voltage of the spraying operation is 80V, the current is 700A, the spraying speed is 8000mm / s, and the spraying distance is 13mm.

[0083] S4: spraying the treated aluminum block with coating powder to obtain a YOF coating.

[0084] Example 4

[0085] S1: Provide ceramic blocks and coating powder;

[0086] The coating powder comprises YOF, the particle size is 20 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0087] S2: performing roughness treatment on the ceramic block to obtain a treated ceramic block;

[0088] The roughness treatment of the ceramic block includes cleaning, sandblasting and preheating the ceramic block.

[0089] Wherein, the cleaning operation includes: cleaning the ceramic block by grinding and high-pressure cleaning.

[0090] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.4 MPa, the particle size is 60 mesh, and the surface roughness Ra is 4 to 5 μm.

[0091] Wherein, the preheating temperature of the preheating operation is 35-40°C.

[0092] S3: Adjust equipment parameters;

[0093] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0094] Wherein, the flow rate of the gas Ar is 35NLPM, and the flow rate of the gas H2 is 6NLPM.

[0095] The voltage of the spraying operation is 70V, the current is 550A, the spraying speed is 6000mm / s, and the spraying distance is 10mm.

[0096] S4: spraying the treated ceramic block with coating powder to obtain a YOF coating.

[0097] Example 5

[0098] S1: Provide ceramic blocks and coating powder;

[0099] The coating powder comprises YOF, the particle size is 40 μm, and the preparation method comprises: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation,

[0100] Demagnetization, degumming, screening, mixing and packaging processes.

[0101] S2: performing roughness treatment on the ceramic block to obtain a treated ceramic block;

[0102] The roughness treatment of the ceramic block includes cleaning, sandblasting and preheating the ceramic block.

[0103] Wherein, the cleaning operation includes: cleaning the ceramic block by grinding and high-pressure cleaning.

[0104] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 60 mesh, and the surface roughness Ra is 5 to 7 μm.

[0105] Wherein, the preheating temperature of the preheating operation is 40-50°C.

[0106] S3: Adjust equipment parameters;

[0107] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0108] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 8NLPM.

[0109] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 12mm.

[0110] S4: spraying the treated ceramic block with coating powder to obtain a YOF coating.

[0111] Example 6

[0112] S1: Provide ceramic blocks and coating powder;

[0113] The coating powder comprises YOF, the particle size is 50 μm, and the preparation method comprises the following steps: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing, and packaging.

[0114] S2: performing roughness treatment on the ceramic block to obtain a treated ceramic block;

[0115] The roughness treatment of the ceramic block includes cleaning, sandblasting and preheating the ceramic block.

[0116] Wherein, the cleaning operation includes: cleaning the ceramic block by grinding and high-pressure cleaning.

[0117] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 5 to 6 μm.

[0118] Wherein, the preheating temperature of the preheating operation is 50-60°C.

[0119] S3: Adjust equipment parameters;

[0120] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0121] Wherein, the flow rate of the gas Ar is 45NLPM, and the flow rate of the gas H2 is 9NLPM.

[0122] The voltage of the spraying operation is 80V, the current is 700A, the spraying speed is 8000mm / s, and the spraying distance is 14nn.

[0123] S4: spraying the treated ceramic block with coating powder to obtain a YOF coating.

[0124] Comparative Example 1

[0125] S1: Provide aluminum blocks and coating powder;

[0126] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0127] S2: performing roughness treatment on the aluminum block to obtain a treated aluminum block;

[0128] The roughness treatment of the aluminum block includes cleaning, sandblasting and preheating the aluminum block.

[0129] The cleaning operation includes: cleaning the aluminum block by grinding and high-pressure cleaning.

[0130] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 80 mesh, and the surface roughness Ra is 4 to 5 μm.

[0131] Wherein, the preheating temperature of the preheating operation is 40-50°C.

[0132] S3: Adjust equipment parameters;

[0133] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0134] Wherein, the flow rate of the gas Ar is 35NLPM, and the flow rate of the gas H2 is 6NLPM.

[0135] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 6500mm / s, and the spraying distance is 11mm.

[0136] S4: spraying the treated aluminum block with coating powder to obtain a coating.

[0137] Comparative Example 2

[0138] S1: Provide ceramic blocks and coating powder;

[0139] The coating powder comprises Y2O3, the particle size is 40 μm, and the preparation method comprises the steps of yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal treatment, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

[0140] S2: performing roughness treatment on the ceramic block to obtain a treated ceramic block;

[0141] The roughness treatment of the ceramic block includes cleaning, sandblasting and preheating the ceramic block.

[0142] Wherein, the cleaning operation includes: cleaning the ceramic block by grinding and high-pressure cleaning.

[0143] The sandblasting particles used in the sandblasting operation are composed of industrial aluminum oxide, the sandblasting pressure is 0.6 MPa, the particle size is 60 mesh, and the surface roughness Ra is 5 to 7 μm.

[0144] Wherein, the preheating temperature of the preheating operation is 40-50°C.

[0145] S3: Adjust equipment parameters;

[0146] The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

[0147] Wherein, the flow rate of the gas Ar is 40NLPM, and the flow rate of the gas H2 is 8NLPM.

[0148] The voltage of the spraying operation is 75V, the current is 600A, the spraying speed is 7000mm / s, and the spraying distance is 12mm.

[0149] S4: spraying the treated ceramic block with coating powder to obtain a coating.

[0150] The etching rate of the coatings obtained in the above examples and comparative examples was tested, and the test results are shown in Table 1:

[0151] Table 1:

[0152] Example / Comparative Example Etching rate Example 1 13.4nm / min Example 2 10.3nm / min Example 3 12.7nm / min Example 4 13.9nm / min Example 5 9.9nm / min Example 6 13.2nm / min Comparative Example 1 21.6nm / min Comparative Example 2 19.8nm / min

[0153] As can be seen from Table 1, the etching rates of Examples 1-6 using YOF coatings are significantly lower than the etching rates of Comparative Examples 1 and 2 using Y2O3 coatings. Among them, the difference between Example 2 of the present invention and Comparative Example 1 is only that the composition of the coating powder used in the aluminum block is different. As can be seen from Table 1, the etching rate of Example 2 using YOF coating is significantly lower than the etching rate of Comparative Example 1 using Y2O3 coating; the difference between Example 4 of the present invention and Comparative Example 2 is only that the composition of the coating powder used in the ceramic block is different. As can be seen from Table 1, the etching rate of Example 4 using YOF coating is significantly lower than the etching rate of Comparative Example 2 using Y2O3 coating. Therefore, the YOF coating provided by the present invention has higher chemical stability and corrosion resistance than the Y2O3 coating, can better resist the erosion of fluorinated hydrocarbon plasma, and is more suitable as a coating material for a vacuum cavity.

[0154] In addition, from the perspective of coating pores, Figure 3 and Figure 4 It can be seen that the pore area of ​​Example 2 using the YOF coating is significantly smaller than the pore area of ​​Comparative Example 1 using the Y2O3 coating. At the same time, the present invention tests the porosity of the YOF coating and the Y2O3 coating, and the test results are as follows: Figure 2 As shown in Table 2:

[0155] Table 2:

[0156]

[0157]

[0158] Figure 2 The upper layer is YOF coating, and the lower layer is Y2O3 coating. Figure 2 As shown in Table 2, compared with the Y2O3 coating, the YOF coating has a lower porosity and can better resist the erosion of fluorinated hydrocarbon plasma, effectively preventing the plasma from etching the inner wall of the cavity and other components.

[0159] The present invention provides a method for preparing a YOF coating for a vacuum chamber. By controlling equipment parameters such as the gas introduced and the spraying of the coating powder on the treated spare part base material, a coating material with higher plasma resistance is provided, which minimizes the probability of power-on of the vacuum chamber, effectively prevents plasma from etching the inner wall of the chamber and other components, and prolongs the service life of the vacuum chamber components.

Claims

1. A method for preparing a YOF coating for a vacuum chamber, characterized in that: The following steps are involved: Provide spare parts base material and coating powder; Performing roughness treatment on the spare part base material to obtain the treated spare part base material; Adjust equipment parameters; The treated spare part base material is sprayed with coating powder to obtain a YOF coating.

2. The method for preparing a YOF coating for a vacuum chamber according to claim 1, characterized in that: The spare parts base material includes a ceramic base material and a metal base material.

3. The method for preparing a YOF coating for a vacuum chamber according to claim 1, characterized in that: The coating powder comprises YOF, the particle size is 20-50 μm, and the preparation method comprises the following steps: yttrium nitrate dissolution, filtration, ammonia precipitation, filter pressing, hydrothermal, drying, calcination, grinding, surface modification, granulation, demagnetization, degumming, screening, mixing and packaging.

4. The method for preparing a YOF coating for a vacuum chamber according to claim 1, characterized in that: The roughness treatment of the spare part base material includes cleaning, sandblasting and preheating the spare part base material.

5. The method for preparing a YOF coating for a vacuum chamber according to claim 4, characterized in that: The cleaning operation includes: cleaning the spare part base material by chemical immersion and physical grinding cleaning.

6. The method for preparing a YOF coating for a vacuum chamber according to claim 4, characterized in that: The sandblasting particles used in the sandblasting operation are industrial aluminum oxide, the sandblasting pressure is 0.4-0.7 MPa, the particle size is 36-120 meshes, and the surface roughness Ra is 3-8 μm.

7. The method for preparing a YOF coating for a vacuum chamber according to claim 4, characterized in that: The preheating temperature of the preheating operation is 35-60°C.

8. The method for preparing a YOF coating for a vacuum chamber according to claim 1, characterized in that: The equipment parameters include the flow rate of the introduced gas Ar and gas H2, the voltage of the spraying operation, the current of the spraying operation, the spraying speed, and the spraying distance.

9. The method for preparing a YOF coating for a vacuum chamber according to claim 8, characterized in that: The flow rate of the Ar gas is 30-45 NLPM, the flow rate of the H2 gas is 5-9 NLPM, the voltage of the spraying operation is 70-80 V, the current of the spraying operation is 500-700 A, the spraying speed is 5000-8000 mm / s, and the spraying distance is 10-14 mm.

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