A single-side dual-circuit low-temperature high-pressure rotary joint module

Abstract

The present application relates to the technical field of semiconductor manufacturing and testing, and in particular to a single-side dual-circuit low-temperature and high-pressure rotary joint module, which includes a rotary joint, a rotary drive unit, and a test module; the test module is used to hold the chip to be tested, and the test module has a refrigerant inlet pipe for receiving refrigerant and a refrigerant outlet pipe for discharging refrigerant; the rotary drive unit is used to drive the test module to rotate a specific angle; the rotary joint is used to form a complete refrigerant circuit with the refrigerant inlet pipe and the refrigerant outlet pipe. The present application has a simplified structure, which avoids the damage and leakage of the pipeline caused by the long-term retraction and pulling of the traditional disc retractable tube, and prolongs the service life of the system.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor manufacturing and testing, and in particular to a single-side dual-circuit low-temperature and high-pressure rotary joint module. Background Art

[0002] Rotary joint modules play an important role in modern industry, especially in applications that require high temperature differences and complex motion environments. For example, in the field of semiconductor manufacturing and testing, in order to ensure that the chip can work normally in extreme environments, it is usually necessary to place it in a low-temperature environment for performance testing. This not only involves the refrigeration system, but also requires ensuring that the refrigerant pipeline can stably and reliably transmit the refrigerant during the entire test process without affecting the normal operation of the equipment. However, traditional refrigerant transmission methods have many shortcomings, especially in terms of reliability after long-term use, which puts higher requirements on the accuracy and stability of the test results.

[0003] In the related technology, in order to realize the rotation test of the chip in a low temperature environment, a common method is to use a disc retractable tube. Specifically, this design arranges the refrigerant pipeline on a freely rotating disc, and uses the rotation of the disc to adapt to the needs of different positions. Although the above method can meet the refrigerant transmission needs in a low temperature environment to a certain extent, there are still obvious defects. The first is that the refrigerant pipeline is prone to hardening after long-term use, which leads to leakage at the moving end and joints, thereby affecting the cooling ability of the system. Secondly, due to the long refrigerant pipeline, the anti-frost and heat preservation design is difficult to fully cover, which is easy to cause local temperature fluctuations, thereby affecting the accuracy of the test results. Summary of the invention

[0004] In order to overcome the above technical problems, the present application provides a single-side dual-circuit low-temperature and high-pressure rotary joint module.

[0005] The present application provides a single-side dual-circuit low-temperature high-pressure rotary joint module that adopts the following technical solution: A single-sided double-circuit low-temperature and high-pressure rotary joint module, comprising a rotary joint, a rotary drive unit and a test module; the test module is used to hold a chip to be tested, and the test module has a refrigerant inlet pipe for receiving a refrigerant and a refrigerant outlet pipe for discharging the refrigerant; the rotary drive unit comprises a power source and a hollow transmission shaft, the power source is installed and fixed by a fixing frame, the power source is drivingly connected to the hollow transmission shaft to drive the hollow transmission shaft to rotate around its own axis, the hollow transmission shaft is fixedly connected to the test module, the refrigerant inlet pipe and the refrigerant outlet pipe are both parallel to the hollow transmission shaft, the refrigerant inlet pipe and the refrigerant outlet pipe are arranged in the hollow transmission shaft, and the refrigerant outlet pipe and the hollow shaft Coaxially arranged; the rotary joint includes an intake joint and an exhaust joint, the intake joint includes an intake fixed part and an intake rotating part, the intake rotating part can be rotatably connected to the intake fixed part around the central axis of the intake fixed part, the intake rotating part is provided with an intake dynamic joint for connecting to the refrigerant inlet pipe, the intake fixed part is provided with an intake static joint for connecting to the refrigerant gas source pipe, the exhaust joint includes an exhaust fixed part and an exhaust rotating part, the exhaust rotating part can be rotatably connected to the exhaust fixed part around its own axis, the exhaust rotating part is provided with an exhaust dynamic joint for connecting to the refrigerant outlet pipe, and the exhaust fixed part is provided with an exhaust static joint for connecting to the refrigerant return pipe.

[0006] By adopting the above technical solution, the stable operation of the rotary joint in a low-temperature and high-pressure environment is achieved, and the risk of refrigerant leakage is effectively reduced. Specifically, by setting the refrigerant inlet pipe and the refrigerant outlet pipe inside the hollow transmission shaft and keeping them coaxial, the structure of the entire system is more compact and the influence of external interference is reduced. At the same time, the design of the rotary joint makes the flow of refrigerant smoother during the transmission process, further improving the reliability and efficiency of the system. In addition, the design can also effectively prevent the refrigerant pipeline from being damaged due to retraction and pulling after long-term use, thereby extending the service life of the equipment.

[0007] Optionally, the air intake fixed part and the air intake rotating part are rotatably connected via a bearing, the air intake fixed part is at least partially arranged in the air intake rotating part, a plurality of sealing rings are arranged between the air intake fixed part and the air intake rotating part, the air intake fixed part is coaxially arranged with the hollow transmission shaft, a static air intake passage is arranged in the air intake fixed part, a revolving air intake passage and an autorotating air intake passage are arranged in the air intake rotating part, one end of the static air intake passage is connected to the air intake static joint, one end of the autorotating air intake passage is connected to the static air intake passage, and the other end is connected to the revolving air intake passage, and the end of the revolving air intake passage away from the autorotating air intake passage is connected to the air intake dynamic joint.

[0008] By adopting the above technical solution, on the one hand, the rotational connection between the fixed air intake part and the rotating air intake part is realized, and on the other hand, the effective transmission of the refrigerant in a low temperature and high pressure environment is ensured. The design of the multi-segment sealing ring significantly improves the sealing performance and reduces the risk of refrigerant leakage. The design of the static air intake channel, the revolution air intake channel and the rotation air intake channel ensures that along the path of the refrigerant flow, the upstream components are arranged in the downstream components, thereby ensuring the smooth flow of the refrigerant between different paths, reducing the risk of leakage, and improving the stability and reliability of the system.

[0009] Optionally, the exhaust fixed part and the exhaust rotating part are rotatably connected via a bearing, the exhaust rotating part is at least partially arranged in the exhaust fixed part, a plurality of sealing rings are arranged between the exhaust fixed part and the exhaust rotating part, the exhaust rotating part is coaxially arranged with the hollow transmission shaft, a static exhaust channel is arranged in the exhaust fixed part, a self-rotating exhaust channel is arranged in the exhaust rotating part, one end of the static exhaust channel is connected to the exhaust static joint, one end of the self-rotating exhaust channel is connected to the static exhaust channel, and the other end is connected to the exhaust dynamic joint.

[0010] By adopting the above technical solution, on the one hand, the rotational connection between the exhaust fixed part and the exhaust rotating part is realized, and on the other hand, the effective transmission of the refrigerant in a low temperature and high pressure environment is ensured. The design of the multi-segment sealing ring significantly improves the sealing performance and reduces the risk of refrigerant leakage. The design of the static exhaust channel and the self-exhaust air intake channel ensures that along the path of the refrigerant flow, the upstream components are inserted into the downstream components, thereby ensuring the smooth flow of the refrigerant between different paths, reducing the risk of leakage, and improving the stability and reliability of the system.

[0011] Optionally, the rotary joint also includes a drying box, which is fixedly connected to the fixed frame, and the rotary joint is arranged in the drying box. The drying box is provided with an air source fixing hole for the refrigerant air source pipe to pass through and a return flow fixing hole for the refrigerant return pipe to pass through.

[0012] By adopting the above technical solution, the drying box effectively prevents external moisture from entering, ensures that the internal components are not damp, and improves the service life and working stability of the equipment.

[0013] Optionally, sealing sleeves are provided at both the air source fixing hole and the return flow fixing hole.

[0014] By adopting the above technical solution, it is possible to further prevent external moisture from entering the drying box, ensure the dryness of the internal environment, thereby better protecting the rotary joint from moisture and improving the reliability and stability of the system.

[0015] Optionally, a fixed ring and a fixed plate are provided in the drying box, the fixed ring is connected to the fixed plate via a static guide rod, the fixed plate is fixedly connected to the drying box, and the air intake fixing part is fixedly connected to the drying box via the fixed plate.

[0016] By adopting the above technical solution, a stable structural support can be formed inside the drying box to ensure a firm connection between the air intake fixing part and the drying box. The design of the fixing ring and the fixing plate can effectively reduce the impact of vibration during rotation on the air intake fixing part, thereby improving the stability and reliability of the system.

[0017] Optionally, the power source is a hollow shaft motor, and the output shaft of the hollow shaft motor is coaxially arranged with the hollow transmission shaft.

[0018] By adopting the above technical solution, the power source is selected as a hollow shaft motor, so that the output shaft of the motor can be directly coaxially arranged with the hollow transmission shaft, which simplifies the mechanical structure, reduces intermediate transmission links, and improves the transmission efficiency and reliability of the system.

[0019] Optionally, a rotating disk is provided in the drying box, and the rotating disk is connected to the output shaft of the hollow shaft motor through a revolving guide rod. The rotating disk is sleeved in the fixed ring and supported by the fixed ring for rotation, the exhaust rotating part is connected to the rotating disk, and the intake rotating part is connected to the rotating disk through a connecting piece.

[0020] By adopting the above technical solution, the design of the rotating disk enables the intake rotating part and the exhaust rotating part to work synchronously and coordinately, thereby improving the overall performance and test accuracy of the system. In addition, the rotating disk can reduce the force applied to the refrigerant inlet pipe and the refrigerant outlet pipe during the rotation process, thereby reducing the risk of rupture of the refrigerant inlet pipe and the refrigerant outlet pipe.

[0021] Optionally, a support frame is further included, and the test module is connected to the support frame so as to be rotatable around the axial direction of the hollow transmission shaft.

[0022] By adopting the above technical solution, the test module can rotate more stably around the axial direction of the hollow transmission shaft, thereby improving the mechanical stability of the entire device.

[0023] In summary, the present application includes at least one of the following beneficial technical effects: 1. The single-side double-circuit design simplifies the structure, avoids the damage and leakage of the traditional disc retractable tube caused by long-term retraction and pulling, and extends the service life of the system; 2. The whole system relies on the hollow motor for actuation, which reduces the setting of the transmission structure, reduces the length of the follow-up refrigeration pipeline, reduces the potential leakage risk area, and improves the reliability and stability of the system; 3. The anti-frost and heat preservation design is concentrated in a smaller range, which is easier to implement and maintain, effectively preventing the temperature fluctuation of the refrigerant during the transmission process and ensuring the accuracy of the test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of a single-sided dual-circuit low-temperature and high-pressure rotary joint module provided in an embodiment of the present application.

[0025] Figure 2 It is a schematic diagram of the structure of the single-sided double-circuit refrigerant inlet pipe, refrigerant outlet pipe and rotary joint provided in an embodiment of the present application. In order to show the internal structure, the upper half of the drying box is not shown.

[0026] Figure 3 It is a structural schematic diagram from another angle of the refrigerant inlet pipe, refrigerant outlet and pipe rotary joint of the single-sided double-circuit provided in an embodiment of the present application.

[0027] Figure 4 It is a schematic diagram of the internal structure of the air intake connector provided in an embodiment of the present application.

[0028] Figure 5 It is a schematic diagram of the internal structure of the exhaust joint provided in an embodiment of the present application.

[0029] Description of the reference numerals: 1-test module; 101-refrigerant outlet pipe; 102-refrigerant inlet pipe; 2-power source; 3-hollow transmission shaft; 4-fixed frame; 5-support frame; 6-intake joint; 601-intake fixed part; 6011-intake static joint; 6012-static inlet channel; 602-intake rotating part; 6021-intake dynamic joint; 6022-revolutionary inlet channel; 6023-rotational inlet channel; 603-connector; 7- Exhaust joint; 701-exhaust fixed part; 7011-exhaust static joint; 7012-static exhaust channel; 702-exhaust rotating part; 7021-exhaust dynamic joint; 7022-rotation exhaust channel; 703-fixed sleeve; 8-bearing; 9-sealing ring; 10-drying box; 1001-air source fixing hole; 1002-reflux fixing hole; 11-fixing ring; 12-fixing disk; 13-static guide rod; 14-rotating disk; 15-revolution guide rod. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1-5 This application is described in further detail.

[0031] The embodiment of the present application discloses a single-side dual-circuit low-temperature and high-pressure rotary joint module.

[0032] like Figure 1-Figure 3As shown, the low-temperature and high-pressure rotary joint module of the single-side double circuit includes a rotary joint, a rotary drive unit and a test module 1. The test module 1 is used to hold the chip to be tested, and has a refrigerant inlet pipe 102 for receiving refrigerant and a refrigerant outlet pipe 101 for discharging refrigerant. The rotary drive unit includes a power source 2 and a hollow transmission shaft 3, the power source 2 is fixed by a fixing frame 4, the power source 2 is drivingly connected to the hollow transmission shaft 3 to drive the hollow transmission shaft 3 to rotate around its own axis, the hollow transmission shaft 3 is fixedly connected to the test module 1, the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 are parallel to the hollow transmission shaft, the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 are arranged in the hollow transmission shaft 3, and the refrigerant outlet pipe 101 is coaxially arranged with the hollow shaft.

[0033] The rotary joint includes an air intake joint 6 and an air exhaust joint 7. The air intake joint 6 includes an air intake fixed portion 601 and an air intake rotating portion 602. The air intake rotating portion 602 can be rotatably connected to the air intake fixed portion 601 around the central axis of the air intake fixed portion 601. The air intake rotating portion 602 is provided with an air intake dynamic joint 6021 for connecting to the refrigerant inlet pipe 102, and the air intake fixed portion 601 is provided with an air intake static joint 6011 for connecting to the refrigerant gas source pipe. The exhaust joint 7 includes an exhaust fixed portion 701 and an exhaust rotating portion 702. The exhaust rotating portion 702 can be rotatably connected to the exhaust fixed portion 701 around its own axis. The exhaust rotating portion 702 is provided with an exhaust dynamic joint 7021 for connecting to the refrigerant outlet pipe 101, and the exhaust fixed portion 701 is provided with an exhaust static joint 7011 for connecting to the refrigerant return pipe. It can be understood that the joints in this embodiment are all high-pressure and low-temperature resistant joints that can withstand at least 300 psi and -75°C.

[0034] like Figure 2-Figure 4 As shown, specifically, the air intake fixed part 601 and the air intake rotating part 602 are rotatably connected through the bearing 8, a part of the air intake fixed part 601 is arranged in the air intake rotating part 602, and a three-layer sealing ring 9 is arranged between the air intake fixed part 601 and the air intake rotating part 602. The air intake fixed part 601 is coaxially arranged with the hollow transmission shaft 3, a static air intake passage 6012 is arranged in the air intake fixed part 601, and a revolution air intake passage 6022 and an autorotation air intake passage 6023 are arranged in the air intake rotating part 602. One end of the static air intake passage 6012 is connected to the air intake static joint 6011, one end of the autorotation air intake passage 6023 is connected to the static air intake passage 6012, and the other end is connected to the revolution air intake passage 6022, and one end of the revolution air intake passage 6022 away from the autorotation air intake passage 6023 is connected to the air intake dynamic joint 6021.

[0035] In the actual working process, under the action of the power source 2, the hollow transmission shaft 3 rotates around its own axis, driving the test module 1 to rotate. Since the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 are parallel to the hollow transmission shaft, the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 are arranged in the hollow transmission shaft 3, and the refrigerant inlet pipe 102 is not coaxially arranged with the hollow shaft, so the refrigerant inlet pipe 102 revolves around the axis of the hollow transmission shaft 3, and since the air intake fixed part 601 is coaxially arranged with the hollow transmission shaft 3, the refrigerant inlet pipe 102 revolves around the axis of the air intake fixed part 601. Further, the air intake rotating part 602 can rotate around the central axis of the air intake fixed part 601 and be connected thereto. The air intake rotating part 602 is provided with an air intake dynamic joint 6021, which is used to connect with the refrigerant inlet pipe 102. Under the premise that the refrigerant inlet pipe 102 revolves around the axis of the air intake fixed part 601, the air intake rotating part 602 rotates around the axis of the air intake fixed part 601 under the action of the refrigerant inlet pipe 102. The air intake fixed part 601 is provided with an air intake static joint 6011, which is used to connect with the refrigerant gas source pipe. A part of the air intake fixed part 601 is arranged in the air intake rotating part 602, and three layers of sealing rings 9 are arranged between the two. A static air intake channel 6012 is arranged in the air intake fixed part 601, and a revolving air intake channel 6022 and a rotating air intake channel 6023 are arranged in the air intake rotating part 602. One end of the static air inlet channel 6012 is connected to the air inlet static joint 6011, one end of the rotation air inlet channel 6023 is connected to the static air inlet channel 6012, and the other end is connected to the orbital air inlet channel 6022, and one end of the orbital air inlet channel 6022 away from the rotation air inlet channel 6023 is connected to the air inlet dynamic joint 6021. In this embodiment, the static air inlet channel 6012 is coaxially arranged with the air inlet fixing part 601, and the air source fixing hole 1001 is arranged at one end of the drying box 10. Then, during the process of the air intake rotating part 602 rotating around the axis of the air intake fixed part 601, the rotating air intake channel 6023 also rotates around the axis of the static air intake channel 6012, and during this process, it remains connected with the static air intake channel 6012. The revolving air intake channel 6022 revolves around the axis of the static air intake channel 6012, and during this process, it remains connected with the rotating air intake channel 6023, thereby ensuring that the refrigerant can pass through the air intake fixed part 601 and the air intake rotating part 602, and finally reach the test module 1, thereby realizing the supply of refrigerant and cooling of the chip.

[0036] like Figure 2 , Figure 3 and Figure 5As shown, specifically, the exhaust fixed part 701 and the exhaust rotating part 702 are rotatably connected via a bearing 8, the exhaust rotating part 702 is at least partially disposed in the exhaust fixed part 701, a three-layer sealing ring 9 is disposed between the exhaust fixed part 701 and the exhaust rotating part 702, the exhaust rotating part 702 is coaxially disposed with the hollow transmission shaft 3, a static exhaust channel 7012 is disposed in the exhaust fixed part 701, a self-rotating exhaust channel 7022 is disposed in the exhaust rotating part 702, one end of the static exhaust channel 7012 is connected to the exhaust static joint 7011, one end of the self-rotating exhaust channel 7022 is connected to the static exhaust channel 7012, and the other end is connected to the exhaust dynamic joint 7021.

[0037] In the actual working process, under the action of the power source 2, the hollow transmission shaft 3 rotates around its own axis, driving the test module 1 to rotate. Since the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 are parallel to the hollow transmission shaft, the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 are arranged in the hollow transmission shaft 3, and the refrigerant outlet pipe 101 is coaxially arranged with the hollow shaft, so the refrigerant outlet pipe 101 rotates around the axis of the hollow transmission shaft 3, and since the exhaust rotating part 702 is coaxially arranged with the hollow transmission shaft 3, the refrigerant outlet pipe 101 rotates around the axis of the exhaust rotating part 702. Further, the exhaust rotating part 702 can rotate around its own central axis and be connected to the exhaust fixed part 701. The exhaust rotating part 702 is provided with an exhaust dynamic joint 7021 for connecting with the refrigerant outlet pipe 101. Under the premise that the refrigerant outlet pipe 101 rotates around the axis of the exhaust rotating part 702, the exhaust rotating part 702 rotates around its own axis under the action of the refrigerant outlet pipe 101. The exhaust fixed part 701 is provided with an exhaust static joint 7011 for connecting with the refrigerant return pipe. A part of the exhaust rotating part 702 is arranged in the exhaust fixed part 701, and three layers of sealing rings 9 are arranged between the two. A static exhaust channel 7012 is arranged in the exhaust fixed part 701, and a self-rotating exhaust channel 7022 is arranged in the exhaust rotating part 702. One end of the static exhaust channel 7012 is connected to the exhaust static joint 7011, one end of the self-rotating exhaust channel 7022 is connected to the static exhaust channel 7012, and the other end is connected to the exhaust dynamic joint 7021. In this embodiment, the static exhaust channel 7012 is stationary and is arranged at an angle with the self-rotating exhaust channel 7022, and the reflux fixing hole 1002 is arranged on the side wall of the drying box 10. The self-rotating exhaust channel 7022 is arranged coaxially with the exhaust rotating part 702, so when the exhaust rotating part 702 rotates around its own axis, the self-rotating exhaust channel 7022 also rotates around its own axis, and in this process, it remains connected with the static exhaust channel 7012, thereby ensuring that the refrigerant can pass through the exhaust fixing part 701 and the exhaust rotating part 702, and finally leave the test module 1, so as to realize the discharge of the refrigerant and the pressure reduction of the chip.

[0038] like Figure 2 and Figure 3As shown, in order to improve the anti-frost and heat preservation effect of the system, the rotary joint can also include a drying box 10, the drying box 10 is fixedly connected to the fixing frame 4, the rotary joint is arranged in the drying box 10, and the drying box 10 is provided with a gas source fixing hole 1001 for the refrigerant gas source pipe to pass through and a return fixing hole 1002 for the refrigerant return pipe to pass through. Fluorine rubber sealing sleeves are provided at the gas source fixing hole 1001 and the return fixing hole 1002, and the hollow transmission shaft 3 can be coated with a nylon insulation layer. The drying box 10 effectively prevents external moisture from entering, ensures that the internal components will not be frosted and cracked after being damp, and improves the service life and working stability of the equipment.

[0039] like Figure 2 and Figure 3 As shown, a fixed ring 11 and a fixed disk 12 are provided in the drying box 10, the fixed ring 11 is connected to the fixed disk 12 through a static guide rod 13, the fixed disk 12 is fixedly connected to the drying box 10, the air intake fixed part 601 is fixedly connected to the drying box 10 through the fixed disk 12, the exhaust fixed part 701 can be fixedly connected to the drying box 10 through a fixed sleeve 703, and the exhaust static joint 7011 is arranged in the fixed sleeve 703. The power source 2 is a hollow shaft motor, and the output shaft of the hollow shaft motor is coaxially arranged with the hollow transmission shaft 3. A rotating disk 14 is provided in the drying box 10, and the rotating disk 14 is connected to the output shaft of the hollow shaft motor through a revolution guide rod 15. The rotating disk 14 is sleeved in the fixed ring 11 and supported and rotated by the fixed ring 11. The exhaust rotating part 702 is connected to the rotating disk 14, and the air intake rotating part 602 is connected to the rotating disk 14 through a connector 603. During the actual test, the test module 1 will only rotate a specific angle under the action of the hollow transmission shaft 3 and will not rotate continuously or 360°. Therefore, there is no need to worry about the fixed sleeve 703 obstructing the movement path of the connector 603 and the refrigerant inlet pipe 102.

[0040] The design of the rotating disk 14 enables the intake rotating part 602 and the exhaust rotating part 702 to work synchronously and coordinately, thereby improving the overall performance and test accuracy of the system. In addition, the rotating disk 14 can reduce the force applied to the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 during the rotation process, thereby reducing the risk of the refrigerant inlet pipe 102 and the refrigerant outlet pipe 101 being broken.

[0041] The implementation principle of a single-side dual-circuit low-temperature high-pressure rotary joint module in the embodiment of the present application is as follows: The entire test process is divided into the following steps: S1, preparation stage: Place the chip to be tested in the test module 1, and ensure that the chip is in close contact with the test module 1. Connect the refrigerant gas source pipe and the refrigerant return pipe to the air inlet static joint 6011 and the exhaust static joint 7011, and check whether there is leakage at all connections.

[0042] S2, startup phase: turn on the refrigeration compressor to allow the refrigerant to flow into the refrigerant inlet pipe 102, gradually reducing the temperature in the test module 1 to -40°C. During this process, the temperature change of the test module 1 is continuously monitored to ultimately ensure that the temperature at the test module 1 is stable within the range of -70~-75°C.

[0043] S3, test phase: start the hollow shaft motor to rotate the test module 1 by +90°, 0°, -90°, -180°, a total of 270°. After each rotation, stop the motor, wait for 1 minute, and observe the chip status and test results. Repeat the above rotation until the predetermined number of tests are completed.

[0044] S4, end stage: turn off the refrigeration compressor and gradually restore the temperature in the test module 1 to room temperature. Disconnect the refrigerant gas source pipe and the refrigerant return pipe, take out the chip, and perform data analysis and evaluation.

[0045] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A single-side double-circuit low-temperature high-pressure rotary joint module, characterized in that: It comprises a rotary joint, a rotary drive unit and a test module (1); The test module (1) is used to hold the chip to be tested, and the test module (1) has a refrigerant inlet pipe (102) for receiving refrigerant and a refrigerant outlet pipe (101) for discharging refrigerant; The rotary drive unit comprises a power source (2) and a hollow transmission shaft (3), the power source (2) is installed and fixed by a fixing frame (4), the power source (2) is drivingly connected to the hollow transmission shaft (3) to drive the hollow transmission shaft (3) to rotate around its own axis, the hollow transmission shaft (3) is fixedly connected to the test module (1), the refrigerant inlet pipe (102) and the refrigerant outlet pipe (101) are both parallel to the hollow transmission shaft, the refrigerant inlet pipe (102) and the refrigerant outlet pipe (101) are arranged in the hollow transmission shaft (3), and the refrigerant outlet pipe (101) is coaxially arranged with the hollow shaft; The rotary joint comprises an air intake joint (6) and an air exhaust joint (7); the air intake joint (6) comprises an air intake fixed portion (601) and an air intake rotating portion (602); the air intake rotating portion (602) is rotatably connected to the air intake fixed portion (601) around the central axis of the air intake fixed portion (601); the air intake rotating portion (602) is provided with an air intake dynamic joint (6021) for connecting to the refrigerant inlet pipe (102); the air intake fixed portion (601) is provided with an air intake static joint (6011) for connecting to the refrigerant gas source pipe; The exhaust joint (7) includes an exhaust fixed part (701) and an exhaust rotating part (702), and the exhaust rotating part (702) is rotatably connected to the exhaust fixed part (701) around its own axis. The exhaust rotating part (702) is provided with an exhaust dynamic joint (7021) for connecting to the refrigerant outlet pipe (101), and the exhaust fixed part (701) is provided with an exhaust static joint (7011) for connecting to the refrigerant return pipe.

2. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 1 is characterized in that: The air intake fixed part (601) and the air intake rotating part (602) are rotatably connected via a bearing (8); the air intake fixed part (601) is at least partially disposed in the air intake rotating part (602); and a plurality of sealing rings (9) are disposed between the air intake fixed part (601) and the air intake rotating part (602). The air intake fixed part (601) is coaxially arranged with the hollow transmission shaft (3); a static air intake passage (6012) is provided in the air intake fixed part (601); a revolving air intake passage (6022) and an autorotating air intake passage (6023) are provided in the air intake rotating part (602); one end of the static air intake passage (6012) is connected to the air intake static joint (6011); one end of the autorotating air intake passage (6023) is connected to the static air intake passage (6012), and the other end is connected to the revolving air intake passage (6022); one end of the revolving air intake passage (6022) away from the autorotating air intake passage (6023) is connected to the air intake dynamic joint (6021).

3. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 1, characterized in that: The exhaust fixed part (701) and the exhaust rotating part (702) are rotatably connected via a bearing (8); the exhaust rotating part (702) is at least partially disposed in the exhaust fixed part (701); and a plurality of sealing rings (9) are disposed between the exhaust fixed part (701) and the exhaust rotating part (702). The exhaust rotating part (702) is coaxially arranged with the hollow transmission shaft (3); a static exhaust channel (7012) is provided in the exhaust fixed part (701); a self-rotating exhaust channel (7022) is provided in the exhaust rotating part (702); one end of the static exhaust channel (7012) is connected to the exhaust static joint (7011); one end of the self-rotating exhaust channel (7022) is connected to the static exhaust channel (7012), and the other end is connected to the exhaust dynamic joint (7021).

4. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 1, characterized in that: The rotary joint also includes a drying box (10), the drying box (10) is fixedly connected to the fixed frame (4), the rotary joint is arranged in the drying box (10), and the drying box (10) is provided with an air source fixing hole (1001) for the refrigerant air source pipe to pass through and a return flow fixing hole (1002) for the refrigerant return pipe to pass through.

5. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 4, characterized in that: The gas source fixing hole (1001) and the return flow fixing hole (1002) are both provided with sealing sleeves.

6. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 4, characterized in that: A fixing ring (11) and a fixing plate (12) are provided in the drying box (10); the fixing ring (11) is connected to the fixing plate (12) via a static guide rod (13); the fixing plate (12) is fixedly connected to the drying box (10); and the air intake fixing portion (601) is fixedly connected to the drying box (10) via the fixing plate (12).

7. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 6, characterized in that: The power source (2) is a hollow shaft motor, and the output shaft of the hollow shaft motor is coaxially arranged with the hollow transmission shaft (3).

8. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 7, characterized in that: A rotating disk (14) is provided in the drying box (10), and the rotating disk (14) is connected to the output shaft of the hollow shaft motor via a revolving guide rod (15). The rotating disk (14) is sleeved in the fixing ring (11) and supported for rotation by the fixing ring (11). The exhaust rotating part (702) is connected to the rotating disk (14), and the intake rotating part (602) is connected to the rotating disk (14) via a connecting piece (603).

9. The single-side double-circuit low-temperature and high-pressure rotary joint module according to claim 1, characterized in that: It also comprises a support frame (5), and the test module (1) is connected to the support frame (5) so as to be rotatable around the axial direction of the hollow transmission shaft (3).

Images