Discrete optical chessboard structure of double F-P cavity coupling

Abstract

The invention relates to a discrete optical chessboard structure with double F-P cavity couplings, which belongs to the field of optical elements, and adopts a metal layer and a substrate, and the substrate adopts a silicon dioxide layer or a double-layer sandwich structure; the first silicon layer, the middle interlayer and the second silicon layer are sequentially arranged on one side of the metal layer, and the irregular chessboard distribution structure is arranged on the metal surface. According to the super-surface unit, the symmetrical design of a traditional super-surface unit is broken through, a complex and efficient optical function unit is constructed through discrete optical units, the super-surface unit has high flexibility, and due to the fact that all the optical units are independent, flexible size adjustment and optimization are conducted according to different requirements. No matter optical signals are transmitted, processed or detected, specific functions can be achieved by changing the optical units in the chessboard structure, and the application range of the metasurface functional device is expanded. By accurately adjusting the parameters, the influence of the structure on the characteristics of reflection, transmission, scattering and the like of terahertz waves can be researched.

Description

Technical Field

[0001] The invention relates to the field of optical elements, and in particular to a discrete optical chessboard structure of a double FP cavity coupling. Background Art

[0002] In recent years, terahertz communication technology has developed rapidly, but the lack of high-performance core devices has limited its development to a certain extent. Terahertz modulators are the core components of terahertz communication systems, and the improvement of their performance plays a vital role in the development of terahertz communication. In view of the problems of low modulation depth and low modulation rate faced by domestic and foreign research on terahertz modulators, through theoretical analysis, design simulation, processing testing and experimental research, a systematic study of terahertz metasurface modulators based on metal localized surface plasmons was conducted, and a high-performance terahertz modulator was realized.

[0003] Electromagnetic waves in the terahertz band have a series of special characteristics, such as high penetration through non-polar substances, non-ionizing radiation with low photon energy, and unique "fingerprint" spectrum. This makes terahertz technology show great potential in the fields of communication, security inspection and material detection.

[0004] On the other hand, in the field of modern communications, functional devices play a vital role. Modulators can adjust certain characteristics of signals to achieve effective encoding and transmission of signals; filters can filter out signals of specific frequencies, reduce interference, and ensure the accuracy and stability of communications; absorbers can absorb unnecessary signals or energy to optimize the performance of the entire communication system. These functional devices are like the cornerstones and beams of the communication building, supporting the efficient operation of the huge and complex communication network.

[0005] However, these existing functional devices have many limitations. Traditional modulators, filters and absorbers often rely on specific materials and complex structural combinations, which not only makes them larger in size and difficult to meet the development trend of miniaturization and integration of modern communication equipment, but also has obvious deficiencies in functional flexibility and controllability. For example, when responding to multi-band and multi-functional requirements, the design and manufacture of traditional devices face huge challenges and require a lot of manpower, material resources and time costs. Summary of the invention

[0006] The present invention aims to solve the above technical problems and provides a discrete optical chessboard structure of dual FP cavity coupling.

[0007] In order to solve the above technical problems, the technical solution provided by the present invention is:

[0008] A dual FP cavity coupled discrete optical chessboard structure comprises a metal layer, one side of the metal layer is provided with a substrate;

[0009] The substrate may be a silicon dioxide layer or a double-layer sandwich structure;

[0010] The double-layer sandwich structure comprises a first silicon layer, an intermediate sandwich layer and a second silicon layer which are sequentially arranged on one side of the metal layer;

[0011] The metal layer is made of gold or aluminum.

[0012] Preferably, the thickness of the first silicon layer is 180-210 um.

[0013] Preferably, the middle interlayer is made of PI material.

[0014] Preferably, the thickness of the intermediate layer is 8-12 um.

[0015] Preferably, the thickness of the second silicon layer is 180-210 um.

[0016] Preferably, the thickness of the silicon dioxide layer is 180-210 um.

[0017] Preferably, the thickness of the metal layer made of gold is 0.02 um, and the thickness of the metal layer made of aluminum is 0.2 um.

[0018] Preferably, a first space, a second space and a third space are formed on the metal layer made of gold.

[0019] Preferably, the metal layer made of aluminum material is composed of multiple groups of 5*5um cube stickers.

[0020] After adopting the above structure, the present invention has the following advantages:

[0021] The present invention uses a metal layer and a substrate, wherein the substrate is a silicon dioxide layer or a double-layer sandwich structure; the double-layer sandwich structure is sequentially arranged on a first silicon layer, an intermediate sandwich layer, and a second silicon layer on one side of the metal layer, and the present invention arranges and combines the structures to break the continuous design of the traditional optical system and construct a complex and efficient optical function through discrete optical units.

[0022] The present invention is highly flexible. Since each optical unit is independent, it can be flexibly adjusted and combined according to different needs. Whether it is transmission, processing or detection of optical signals, specific functions can be achieved by changing the optical units in the chessboard structure, which greatly expands the design flexibility of the optical system. By accurately adjusting these parameters, we can study the influence of the structure on the reflection, transmission, scattering and other characteristics of electromagnetic waves.

[0023] The present invention can collect the transmission intensity of electromagnetic waves in the terahertz band. By comparing the characteristic absorption intensity diagram of the relevant material, it can be judged whether the medium contains the material.

[0024] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present invention will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 It is a structural diagram of embodiment 1 of the present invention.

[0027] Figure 2 It is a structural diagram of embodiment 2 of the present invention.

[0028] Figure 3 1 is a reflection intensity diagram of the first embodiment of the present invention.

[0029] Figure 4 It is a transmission intensity diagram of the first embodiment of the present invention.

[0030] As shown in the figure: 1. Metal layer; 2. Substrate; 3. First silicon layer; 4. Intermediate layer; 5. Second silicon layer; 6. First space; 7. Second space; 8. Third space. DETAILED DESCRIPTION

[0031] Specific embodiments of the present invention will now be mentioned in detail. Although the present invention is described in conjunction with these specific embodiments, it should be appreciated that it is not intended to limit the present invention to these specific embodiments. On the contrary, these embodiments are intended to cover substitutions, changes or equivalent embodiments that may be included in the spirit and scope of the invention defined by the claims. In the following description, a large number of specific details are set forth in order to provide a comprehensive understanding of the present invention. The present invention can be implemented without some or all of these specific details. In other cases, in order not to make the present invention unnecessarily obscure, well-known process operations are not described in detail.

[0032] When used in conjunction with "including," "methods comprising," or similar language in this specification and the appended claims, the singular forms "a," "an," and "the" include plural references unless the context clearly dictates otherwise. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

[0033] The present invention is further described in detail below in conjunction with the full text.

[0034] In conjunction with the accompanying drawings, a dual FP cavity coupled discrete optical chessboard structure includes a metal layer 1, and a substrate 2 is provided on one side of the metal layer 1;

[0035] The substrate 2 may be a silicon dioxide layer or a double-layer sandwich structure;

[0036] The double-layer sandwich structure comprises a first silicon layer 3, an intermediate interlayer 4 and a second silicon layer 5 which are sequentially arranged on one side of the metal layer 2;

[0037] The metal layer 1 is made of gold or aluminum.

[0038] The thickness of the first silicon layer 3 is 180-210 um.

[0039] The middle interlayer 4 is made of PI material.

[0040] The thickness of the intermediate layer 4 is 8-12 um.

[0041] The thickness of the second silicon layer 5 is 180-210 um.

[0042] The thickness of the silicon dioxide layer is 180-210 um.

[0043] The thickness of the metal layer 1 made of gold is 0.02 um, and the thickness of the metal layer 1 made of aluminum is 0.2 um.

[0044] A first space 6, a second space 7 and a third space 8 are formed on the metal layer 1 made of gold.

[0045] The metal layer 1 made of aluminum material is composed of multiple groups of 5*5um cube stickers.

[0046] The present invention adopts a discrete optical chessboard structure, which is a structure that arranges and combines optical elements in a chessboard-like layout. It breaks the continuous design of traditional optical systems and constructs complex and efficient optical functions through discrete optical units.

[0047] The present invention is highly flexible. Since each optical unit is independent, it can be flexibly adjusted and combined according to different needs. Whether it is transmission, processing or detection of optical signals, specific functions can be achieved by changing the optical units in the chessboard structure, which greatly expands the application range of the optical system. By accurately adjusting these parameters, we can study the influence of the structure on the reflection, transmission, scattering and other characteristics of electromagnetic waves.

[0048] The present invention can collect the transmission intensity of electromagnetic waves in the terahertz band. By comparing the transmission intensity diagram of related materials, it can be determined whether the medium contains such material.

[0049] The present invention utilizes the multi-beam interference characteristics of the FP cavity and the phase modulation capability of the chessboard grating to achieve specific optical functions.

[0050] The present invention can form a dual FP cavity coupled discrete optical chessboard structure. In this structure, the fine transmission spectrum of the FP cavity is combined with the phase modulation capability of the chessboard grating to achieve more complex optical functions. By adjusting the reflectivity of the FP cavity and the set cavity length, as well as the phase structure of the chessboard grating, a resonant mode can be generated at a specific wavelength, and uniform beam splitting can be achieved through the chessboard grating.

[0051] It can also be applied to the design of highly sensitive sensors. For example, a sensor based on a dual-hole fiber parallel dual FP interferometer has high sensitivity. By combining the FP cavity with a chessboard grating, the stability and accuracy of the sensor can be further improved.

[0052] Compared with the traditional optical structure, the dual FP cavity coupled discrete optical chessboard structure of the present invention has the following significant advantages:

[0053] Low power consumption: Semiconductor superlattice optical bistable devices, especially optimized FP cavity optical bistable devices, have attracted widespread attention due to their low power consumption characteristics.

[0054] Small Size: These devices are easy to integrate into more complex systems due to their small size.

[0055] Easy integration: Due to their small size and low power consumption, these devices can be more easily integrated into other optical systems, thereby improving the overall performance and reliability of the system.

[0056] Reflective optical bistable: Compared with traditional transmissive optical bistable, reflective optical bistable has more advantages in some applications. For example, in optical bistable devices, reflective optical bistable is superior to transmissive optical bistable.

[0057] Based on reflective spatial light modulator: Using reflective spatial light modulator, the wavefront phase correction of laser can be achieved, and the beam deflection control capability is verified. This method is suitable for non-mechanical high-speed and precise beam control.

[0058] Utilizing the principle of metasurface phase control: Traditional phase-type optical elements mostly use curved surfaces, and use the characteristic that thickness varies with space to adjust the wavefront of electromagnetic waves. For binary optical devices, discrete depth steps are used to achieve phase control. This method can be used to accurately control the phase modulation capability of chessboard gratings.

[0059] Embodiment 1:

[0060] like Figure 1 As shown, a discrete optical chessboard structure of a dual FP cavity coupling of the present invention includes a metal layer 1, and the whole object is composed of 90um*120um*410.02um. The metal layer 1 is made of gold, and the substrate 2 adopts a double-layer sandwich structure; the double-layer sandwich structure includes a first silicon layer 3, an intermediate interlayer 4 and a second silicon layer 5 which are sequentially arranged on one side of the metal layer 2, the thickness of the first silicon layer 3 is 200um, the intermediate interlayer 4 is made of PI material and has a thickness of 10um, the thickness of the second silicon layer 5 is 200um, the thickness of the metal layer 1 made of gold material is 0.02um, the first space 6 is 10*20um, the second space 7 is 10*10um, the upper end of the third space 8 is 30um*20um and the lower end is a space with 10um*10um reserved in the middle.

[0061] Embodiment 2:

[0062] like Figure 2 As shown, a discrete optical chessboard structure includes a metal layer 1, the metal layer 1 is made of aluminum, and a substrate 2 is provided on one side of the metal layer 1; the substrate 2 is a silicon dioxide layer, the silicon dioxide layer has a thickness of 200um, a length of 120um, and a width of 90um, the metal layer 1 made of aluminum has a thickness of 0.2um, and the metal layer 1 made of aluminum is composed of multiple groups of 5*5um cubes.

[0063] Test experiment:

[0064] Reflection and transmission intensity experimental tests were conducted on the structures of Example 1 and Example 2.

[0065] Prepare the experimental environment: First, enter the laboratory and turn on the exhaust equipment to ensure the safety and cleanliness of the experimental environment, and build a terahertz spectroscopy system, which usually includes components such as light source, nonlinear crystal, focusing mirror, modulator, PC control terminal, laser, bias power supply and amplifier.

[0066] Set up the experimental setup:

[0067] Fix the metasurface device on the fixture and place it in the sample test area. Adjust the height and position of the optical rod so that the terahertz wave is incident vertically on the metasurface device. After fixing each test system, test the transmission spectrum of the metasurface device under THz wave irradiation. In order to reduce the influence of water vapor in the air, the experiment is carried out in a dry nitrogen (N2) environment at room temperature. In addition to testing the transmission spectrum of the modulator when the incident electric field is in the vertical direction.

[0068] The femtosecond laser generated by the laser is divided into pump light and detection light through a fiber beam splitter. The pump light is connected to the fiber-coupled generation photoconductive antenna through a fiber jumper to excite the photoconductive antenna to generate terahertz waves. The detection light is connected to the fiber delay line through a fiber jumper, and the fiber delay line is connected to the fiber-coupled detection photoconductive antenna through a fiber jumper to detect terahertz waves. The terahertz wave generated by the generation photoconductive antenna is focused onto the detection photoconductive antenna after passing through four off-axis parabolic mirrors. The delay between the pump light and the detection light is changed by an electrically controlled translation stage. The time domain waveform can be obtained by measuring the change of the signal output by the detection photoconductive antenna with time delay, and the terahertz spectrum can be obtained by fast Fourier transforming the obtained time domain waveform.

[0069] For the reflection curve, the S11 parameter can be calculated by finite element simulation to obtain the reflection coefficient size and intensity.

[0070] For the transmission curve, the S21 parameter can be calculated using finite element simulation to obtain the transmission coefficient size and intensity.

[0071] Feedback control unit is used to adjust the stability and performance indicators of the system.

[0072] Result analysis:

[0073] Analyze the reflection and transmission intensity data to calculate the reflectivity and transmittance. The reflectivity R is the ratio of the reflected light intensity to the incident light intensity, and the transmittance T is the ratio of the transmitted light intensity to the incident light intensity.

[0074] Evaluate the optical properties of your samples based on reflection and transmission data from finite element simulations.

[0075] Get as Figure 3-Figure 4 The reflection and transmission intensity simulation curves of the structure of the first embodiment shown can effectively design various functional devices such as filters or modulators in the working band by observing the resonance characteristics and intensity values ​​of the curves and comparing them with the frequency working range.

[0076] The present invention has a high degree of flexibility. Since each optical unit is independent, it can be flexibly adjusted and combined according to different needs. Whether it is transmission, processing or detection of optical signals, specific functions can be achieved by changing the optical units in the chessboard structure, which greatly expands the application range of the optical system. By accurately adjusting these parameters, the influence of the structure on the reflection, transmission, scattering and other characteristics of electromagnetic waves can be studied.

[0077] The present invention and its embodiments are described above, and such description is not restrictive. What is shown in the full text is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In short, if ordinary technicians in the field are inspired by it, without departing from the purpose of the invention, they can design a structure and embodiment similar to the technical solution without creativity, which should belong to the protection scope of the present invention.

Claims

1. A discrete optical chessboard structure of dual FP cavity coupling, characterized in that: It comprises a metal layer (1), wherein a substrate (2) is provided on one side of the metal layer (1); The substrate (2) may be a silicon dioxide layer or a double-layer sandwich structure; The double-layer sandwich structure comprises a first silicon layer (3), an intermediate sandwich layer (4) and a second silicon layer (5) which are sequentially arranged on one side of the metal layer (2); The metal layer (1) is made of gold or aluminum.

2. The discrete optical chessboard structure of dual FP cavity coupling according to claim 1, characterized in that: The thickness of the first silicon layer (3) is 180-210 um.

3. The discrete optical chessboard structure of dual FP cavity coupling according to claim 1, characterized in that: The intermediate layer (4) is made of PI material.

4. The discrete optical chessboard structure of dual FP cavity coupling according to claim 3, characterized in that: The thickness of the intermediate layer (4) is 8-12 um.

5. The discrete optical chessboard structure of dual FP cavity coupling according to claim 1, characterized in that: The thickness of the second silicon layer (5) is 180-210 um.

6. The discrete optical chessboard structure of dual FP cavity coupling according to claim 1, characterized in that: The thickness of the silicon dioxide layer is 180-210 um.

7. The discrete optical chessboard structure of dual FP cavity coupling according to claim 1, characterized in that: The thickness of the metal layer (1) made of gold is 0.02 um, and the thickness of the metal layer (1) made of aluminum is 0.2 um.

8. The discrete optical chessboard structure of dual FP cavity coupling according to claim 7, characterized in that: A first space (6), a second space (7) and a third space (8) are formed on a metal layer (1) made of gold.

9. The discrete optical chessboard structure of dual FP cavity coupling according to claim 1, characterized in that: The metal layer (1) made of aluminum material is composed of a plurality of groups of 5*5um cube stickers.

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