Electrostatic chuck heating apparatus

Abstract

The application relates to an electrostatic chuck heating device, which comprises a bottom plate, a supporting plate arranged on the ground of the bottom plate, a supporting ring arranged on the supporting plate, inner ring supporting plates symmetrically arranged on the inner ring surface of the supporting ring, an inner ring arranged between the two inner ring supporting plates, and at least two heating strips arranged on the inner wall of the supporting ring and used for heating the inner ring to ensure the temperature consistency in the inner ring; the inner ring supporting plates not only enhance the structural stability of the supporting ring, but also provide necessary support for the installation of the inner ring; in order to heat the inner ring, the heating strips are arranged on the inner wall of the supporting ring; the heating strips can quickly generate heat and transfer the heat to the inner ring, so that the heat can be uniformly distributed in the inner space of the inner ring.

Description

Technical Field

[0001] This invention belongs to the field of electrostatic chuck technology and relates to an electrostatic chuck heating device. Background Technology

[0002] An electrostatic chuck is a general term for an ultra-clean sheet carrier and gripping and handling device suitable for atmospheric or vacuum environments. The electrostatic adsorption technology used in electrostatic chucks is an advantageous technology that replaces traditional mechanical clamping and vacuum adsorption methods, and it has wide applications in semiconductors, panel displays, optics and other fields.

[0003] For example, a Chinese patent application with application number 202223055512.7 discloses a heating mechanism for an electrostatic chuck, including a placement plate and an electrostatic chuck body. A fixing component is disposed on the outside of the placement plate, and a heating component is disposed on the outside of the placement plate. The fixing component includes a servo motor fixedly installed at the bottom of the placement plate, a threaded rotating rod fixedly connected to the output shaft of the servo motor, and a fixing clamp plate threadedly connected to the outside of the threaded rotating rod. The heating component includes a mounting plate fixedly installed at the top of the placement plate, a limiting plate fixedly connected to the top of the placement plate, an installation opening inside the limiting plate, a mounting frame fixedly connected to the inner wall of the installation opening, and a fan fixedly connected inside the mounting frame. Although this technical solution can heat the electrostatic chuck, it only heats the bottom surface, resulting in uneven heating of the electrostatic chuck and poor heating effect, thus limiting the effectiveness of this technical solution. Summary of the Invention

[0004] The purpose of this invention is to provide an electrostatic chuck heating device that can solve the problems mentioned in the background art.

[0005] According to the technical solution provided by the present invention: an electrostatic chuck heating device includes a base plate, a support plate is provided on the ground of the base plate, a support ring is installed on the support plate, inner ring support plates are symmetrically provided on the inner ring surface of the support ring, an inner ring is provided between the two inner ring support plates, and at least two heating strips are provided on the inner wall of the support ring for heating the inner ring to ensure that the temperature inside the inner ring is uniform.

[0006] Preferably, a horizontal plate is symmetrically arranged above the base plate, and each horizontal plate has two first circular holes and two second circular holes; every two first circular holes and two second circular holes distributed vertically are arranged in a stepped manner, and an electrostatic chuck is provided on the second circular hole.

[0007] Preferably, a cover plate is fitted in the middle of the horizontal plate, a supporting circular plate is provided at one end of the horizontal plate that is far apart from each other, a connecting plate is provided between the supporting circular plate and the cover plate, and a second connecting block is provided on each connecting plate. The second connecting block located at the bottom is slidably connected to the bottom plate through a sliding plate.

[0008] Preferably, two grooves are provided on the base plate, and a slide plate is slidably provided in each groove. The upper end of the slide plate is connected to the second connecting block below.

[0009] Preferably, the outer walls at both ends of the supporting ring are provided with first connecting blocks, and a telescopic tube is provided between the first connecting block and the second connecting block. Both the first connecting block and the second connecting block have through holes to communicate with the telescopic tube. A connecting cover is provided on the upper horizontal plate, and the connecting cover communicates with the second connecting block to allow the heat flow inside the supporting ring to enter and flow out through the connecting cover.

[0010] Preferably, a motor is mounted on the base plate, and a gear is sleeved on the output end of the motor. Two racks mesh with the outer side of the gear, and the two racks move relative to each other under the drive of the gear. Each rack is provided with a connecting plate, which has an L-shaped structure, and the end away from the rack is connected to the second connecting block below.

[0011] Preferably, the supporting ring is provided with two upper cylinders, which are connected to the inner ring. The upper end of each upper cylinder is hinged with an upper cover plate, and the upper cover plate is provided with a pull plate.

[0012] Preferably, the supporting ring is provided with two lower cylinders, which are positioned opposite to the upper cylinder and communicate with the inner ring.

[0013] Preferably, the base plate is provided with two cylinders, the output end of the cylinder is provided with a circular plate, the upper end of the circular plate is provided with a push rod, the upper end of the push rod is provided with a push plate, the push plate is used to push the electrostatic chuck upward and push it out of the upper cylinder.

[0014] The positive and progressive effects of this application are as follows:

[0015] The electrostatic chuck heating device provided in this embodiment of the invention has the following advantages:

[0016] 1. The inner ring support plate not only enhances the structural stability of the supporting ring, but also provides the necessary support for the installation of the inner ring. In order to heat the inner ring, heating strips are installed on the inner wall of the supporting ring. The heating strips can quickly generate heat and transfer it to the inner ring to ensure that the heat can be evenly distributed in the internal space of the inner ring. During the heating process, the heat generated by the heating strips will be quickly transferred to the inner ring, so that the temperature inside the entire inner ring reaches a uniform level. This design not only improves the heating efficiency, but also ensures that the heated object is heated evenly, thereby improving its performance and quality. Attached Figure Description

[0017] Figure 1 This is a perspective view of the present invention.

[0018] Figure 2 This is a cross-sectional view of the present invention.

[0019] Figure 3 yes Figure 1 The front view.

[0020] Figure 4 yes Figure 1 Side view.

[0021] Figure 5 yes Figure 1 Top view.

[0022] In the diagram: base plate 1; slide groove 11; support plate 2; support ring 21; lower cylinder 22; upper cylinder 23; upper cover plate 24; pull plate 25; inner ring support plate 26; inner ring 27; heating strip 28; support circular plate 3; connecting plate 31; cover plate 32; horizontal plate 33; first circular hole 34; second circular hole 35; first connecting block 4; telescopic tube 41; second connecting block 42; connecting cover 43; motor 5; gear 51; rack 52; connecting plate 53; slide plate 54; cylinder 6; circular plate 61; push rod 62; push plate 63. Detailed Implementation

[0023] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0024] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0025] like Figure 1-5 As shown, the present invention is an electrostatic chuck heating device, including a base plate 1, a support plate 2 on the ground of the base plate 1, a support ring 21 installed on the support plate 2, inner ring support plates 26 symmetrically arranged on the inner ring surface of the support ring 21, an inner ring 27 between the two inner ring support plates 26, and at least two heating strips 28 are also provided on the inner wall of the support ring 21 for heating the inner ring 27 to ensure that the temperature inside the inner ring 27 is uniform.

[0026] The two inner ring support plates 26 not only enhance the structural stability of the supporting ring 21, but also provide the necessary support for the installation of the inner ring 27. In order to heat the inner ring 27, heating strips 28 are installed on the inner wall of the supporting ring 21. The heating strips can quickly generate heat and transfer it to the inner ring 27 to ensure that the heat can be evenly distributed in the internal space of the inner ring 27.

[0027] During the heating process, the heat generated by the heating strip 28 is quickly transferred to the inner ring 27, making the temperature inside the entire inner ring 27 uniform. This design not only improves heating efficiency, but also ensures that the heated object is heated evenly, thereby improving its performance and quality.

[0028] Preferably, the bottom plate 1 is provided with symmetrical horizontal plates 33 above it, and each horizontal plate 33 has two first circular holes 34 and two second circular holes 35. The two first circular holes 34 and two second circular holes 35 distributed vertically are arranged in a stepped manner, and an electrostatic chuck is provided on the second circular hole 35.

[0029] Preferably, a cover plate 32 is fitted in the middle of the horizontal plate 33, and a supporting circular plate 3 is provided at one end of the horizontal plate 33 that is far apart from each other. A connecting plate 31 is provided between the supporting circular plate 3 and the cover plate 32. A second connecting block 42 is provided on each connecting plate 31. The second connecting block 42 located at the bottom is slidably connected to the bottom plate 1 through a sliding plate 54. The supporting circular plate 3 and the cover plate 32 are provided to form a sealed state at both ends of the supporting ring 21, thereby ensuring its internal temperature.

[0030] Preferably, two grooves 11 are provided on the base plate 1, and a slide plate 54 is slidably provided in each groove 11. The upper end of the slide plate 54 is connected to the second connecting block 42 below.

[0031] In this embodiment, the outer walls at both ends of the supporting ring 21 are provided with first connecting blocks 4, and a fan is installed inside the first connecting block 4. The main purpose is to use the suction force of the fan to effectively absorb the heat flow accumulated inside the supporting ring 21. A telescopic tube 41 is provided between the first connecting block 4 and the second connecting block 42 to ensure that the heat flow can flow smoothly between the first connecting block 4 and the second connecting block 42. Both the first connecting block 4 and the second connecting block 42 have through holes inside. These through holes are tightly connected to the telescopic tube 41 to form a complete heat flow channel. A connecting cover 43 is provided on the horizontal plate 33 located above. The connecting cover 43 communicates with the second connecting block 42, so that the heat flow inside the supporting ring 21 can pass through the second connecting block 42 and smoothly enter the connecting cover 43. By absorbing the heat flow through the fan, the heat flow flows from the first connecting block 4, the telescopic tube 41 and the second connecting block 42, and flows out from the connecting cover 43, thereby facilitating the preheating of the electrostatic chuck.

[0032] When the fan starts, it generates a strong suction force, drawing the heat flow inside the support ring 21 through the first connecting block 4, and then through the telescopic tube 41 to the second connecting block 42. Finally, this heat flow flows out from the connecting cover 43, forming a complete heat flow cycle. This process not only effectively maintains the temperature inside the support ring 21, but also provides a preheating environment for the electrostatic chuck, improving its working efficiency and performance.

[0033] In this embodiment, a motor 5 is installed on the base plate 1. A gear 51 is sleeved on the output end of the motor 5. Two racks 52 mesh on the outer side of the gear 51. The two racks 52 move relative to each other under the drive of the gear 51. A connecting plate 53 is provided on each rack 52. The connecting plate 53 has an L-shaped structure, and the end away from the rack 52 is connected to the second connecting block 42 below. Driven by the motor 5, the gear 51 is rotated, so that the two racks 52 move synchronously relative to each other, thereby driving the two horizontal plates 33 to move synchronously and move into the inner ring 27 to heat the electrostatic chuck.

[0034] In this embodiment, the supporting ring 21 is provided with two upper cylinders 23, the lower end of the upper cylinder 23 extends to the inner ring 27, so that the upper cylinder 23 communicates with the inner ring 27, and the upper end of each upper cylinder 23 is hinged with an upper cover plate 24, and the upper cover plate 24 is provided with a pull plate 25.

[0035] The supporting ring 21 is provided with two lower cylinders 22, which are opposite to the upper cylinder 23 and are distributed vertically. The upper end of the lower cylinder 22 extends to the inner ring 27 and communicates with the inner ring 27. The length of the lower cylinder 22 is greater than the length of the upper cylinder 23.

[0036] Two cylinders 6 are provided on the base plate 1. A circular plate 61 is provided at the output end of the cylinder 6. A push rod 62 is provided at the upper end of the circular plate 61. A push plate 63 is provided at the upper end of the push rod 62. The push plate 63 pushes the electrostatic chuck upward and pushes it out of the upper cylinder 23.

[0037] After the electrostatic chuck in the inner ring 27 completes its heating process, the upper cover 24 is first opened using the pull plate 25. Then, the cylinder 6 pushes the connected circular plate 61 upwards. Since the circular plate 61 is connected to the push rod 62, the push rod 62 also moves upwards synchronously with the circular plate 61. As the circular plate 61 and push rod 62 continue to rise, the push plate 63 also moves steadily forward until it passes through the opening of the first circular hole 34 and contacts the lower end of the electrostatic chuck. Under the pushing force of the push plate 63, the electrostatic chuck is steadily pushed upwards. Finally, when the circular plate 61 rises to a point where it is tightly fitted against the outer wall of the inner ring 27, the electrostatic chuck has been completely pushed out of the upper cylinder 23 and is at a height convenient for subsequent operations. This process not only greatly improves work efficiency but also ensures the safety and stability of the entire operation, while also facilitating the removal of the heated electrostatic chuck.

[0038] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. An electrostatic chuck heating device, characterized in that, Includes a base plate (1), on which a support plate (2) is provided, and a support ring (21) is installed on the support plate (2). Inner ring support plates (26) are symmetrically provided on the inner ring surface of the support ring (21), and an inner ring (27) is provided between the two inner ring support plates (26). At least two heating strips (28) are also provided on the inner wall of the support ring (21) for heating the inner ring (27) to ensure that the temperature inside the inner ring (27) is consistent. The bottom plate (1) is symmetrically provided with horizontal plates (33) above it. Each horizontal plate (33) has two first round holes (34) and two second round holes (35). The two first round holes (34) and two second round holes (35) distributed vertically are arranged in a stepped manner. An electrostatic chuck is provided on the second round hole (35). A cover plate (32) is fitted in the middle of the horizontal plate (33), and a support circular plate (3) is provided at one end of the horizontal plate (33) that is far apart from each other. A connecting plate (31) is provided between the support circular plate (3) and the cover plate (32). A second connecting block (42) is provided on each of the connecting plates (31). The second connecting block (42) located at the bottom is slidably connected to the bottom plate (1) through a sliding plate (54). The outer walls of both ends of the supporting ring (21) are provided with first connecting blocks (4), and a telescopic tube (41) is provided between the first connecting block (4) and the second connecting block (42). Both the first connecting block (4) and the second connecting block (42) have through holes to communicate with the telescopic tube (41). A connecting cover (43) is provided on the connecting plate (31) located above. The connecting cover (43) communicates with the second connecting block (42) so that the heat flow in the supporting ring (21) can enter the connecting cover (43) and flow out from it.

2. The electrostatic chuck heating device as described in claim 1, characterized in that: Two grooves (11) are provided on the base plate (1), and a sliding plate (54) is slidably provided in each groove (11). The upper end of the sliding plate (54) is connected to the second connecting block (42) below.

3. The electrostatic chuck heating device as described in claim 2, characterized in that: A motor (5) is installed on the base plate (1). A gear (51) is sleeved on the output end of the motor (5). Two racks (52) mesh on the outer side of the gear (51). The two racks (52) move relative to each other under the drive of the gear (51). A connecting plate (53) is provided on each rack (52). The connecting plate (53) has an L-shaped structure, and the end away from the rack (52) is connected to the second connecting block (42) below.

4. The electrostatic chuck heating device as described in claim 1, characterized in that: The supporting ring (21) is provided with two upper cylinders (23), which are connected to the inner ring (27). The upper end of each upper cylinder (23) is hinged with an upper cover plate (24), and the upper cover plate (24) is provided with a pull plate (25).

5. The electrostatic chuck heating device as described in claim 4, characterized in that: The supporting ring (21) is provided with two lower cylinders (22), which are opposite to the upper cylinder (23) and communicate with the inner ring (27).

6. The electrostatic chuck heating device as described in claim 5, characterized in that: Two cylinders (6) are provided on the base plate (1). The output end of the cylinder (6) is provided with a circular plate (61). The upper end of the circular plate (61) is provided with a push rod (62). The upper end of the push rod (62) is provided with a push plate (63). The push plate (63) pushes the electrostatic chuck upward and pushes it out from the upper cylinder (23).

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