Vacuum roll-to-roll plasma cleaning machine and inductive automatic control method thereof

Abstract

The application discloses a vacuum roll-to-roll plasma cleaning machine and an induction automatic control method thereof, and relates to the field of vacuum roll-to-roll plasma cleaning machines. The vacuum roll-to-roll plasma cleaning machine and the induction automatic control method thereof comprise a plasma cleaning machine, a vacuum chamber, a transmission rod, a connecting frame, an adjusting unit and a transmission unit. The vacuum roll-to-roll plasma cleaning machine and the induction automatic control method thereof move the first extrusion shaft to extrude the roll-shaped material attached to the surface of the first extrusion shaft, tighten the roll-shaped material, ensure that the roll-shaped material is in a tension state in the vacuum chamber, avoid the occurrence of the relaxation or folding of the roll-shaped material in the vacuum chamber, move the displacement seat and the tension shaft, adjust the length of the roll-shaped material in the vacuum chamber, change the time length of the roll-shaped material in the vacuum chamber, change the cleaning effect, and achieve the purpose of quickly changing the cleaning effect.

Description

Technical Field

[0001] This invention relates to the field of vacuum roll-to-roll plasma cleaning machine technology, specifically to a vacuum roll-to-roll plasma cleaning machine and its induction automatic control method. Background Technology

[0002] Vacuum roll-to-roll plasma cleaners are a type of efficient and environmentally friendly surface treatment equipment.

[0003] Vacuum roll-to-roll plasma cleaning machines utilize plasma technology. The roll material to be cleaned is placed in a vacuum chamber, and plasma is generated through heating and gas injection. The high-energy ions and active particles in the plasma then undergo physical and chemical reactions with the material surface, thereby removing surface impurities, improving surface roughness and hydrophilicity, etc.

[0004] In existing technologies, rolled materials are transported to a plasma cleaner via transmission rollers. Plasma is generated through heating and gas injection to clean the rolled materials. However, during the transport of the rolled materials, it is impossible to effectively ensure that the rolled materials remain taut for an extended period, leading to slack or folding, which affects the cleaning effect. Furthermore, when the rolled materials are not thoroughly cleaned, existing technologies cannot quickly and directly change the cleaning effect by altering the activity of the plasma cleaner; a certain period of observation is required. Therefore, we propose a vacuum roll-to-roll plasma cleaner and its inductive automatic control method. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a vacuum roll-to-roll plasma cleaner and its inductive automatic control method. This solves the problem that during the conveying of roll materials, it is impossible to effectively ensure that the roll materials remain taut for a long time, which can lead to slack or folding and affect the cleaning effect. Furthermore, when the roll materials are not thoroughly cleaned, changing the activity of the plasma cleaner cannot quickly and intuitively change the cleaning effect.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a vacuum roll-to-roll plasma cleaner and its induction automatic control method, comprising a machine body, characterized in that the machine body is provided with:

[0007] The vacuum chamber, located in the middle of the machine body, creates a vacuum environment for the rolled material;

[0008] The drive rod, corresponding to the feed port of the vacuum chamber and connected to the drive mechanism in the plasma cleaner, is used to feed the rolled material.

[0009] A connecting frame, spanning the middle of the vacuum chamber, is used to transfer rolled materials within the vacuum chamber;

[0010] The vacuum chamber is equipped with:

[0011] An adjustment unit, located in the middle of the connecting frame and extending along the feed inlet of the vacuum chamber, is used to tighten the rolled material;

[0012] The transmission unit is mounted on the adjustment unit and works with the adjustment unit to tighten the rolled material and wind it up along the direction of the connecting frame.

[0013] Preferably, the vacuum chamber is fixedly connected to the plasma cleaner, and sealed doors are rotatably connected to both sides of the vacuum chamber. The sealed doors on both sides are respectively provided with a feed port and a discharge port for feeding and discharging rolled materials. The transmission rod is rotatably connected to the plasma cleaner and is connected to the drive mechanism in the plasma cleaner.

[0014] Preferably, the connecting frame is connected to an upper rotating shaft and a lower rotating shaft, which are connected to the drive mechanism in the plasma cleaner. The rotation of the upper and lower rotating shafts drives the roll material to be conveyed.

[0015] Preferably, the adjustment unit includes:

[0016] Connecting seats are located on both sides of the vacuum chamber;

[0017] A two-way lead screw is rotatably connected to the inner wall of the connecting seat;

[0018] The movable seat is slidably connected to the inner wall of the connecting seat, and is moved by a two-way lead screw;

[0019] The first extrusion shaft is rotatably connected between the corresponding moving seats and moves along the connecting seat with the moving seats to tighten the rolled material and ensure a better cleaning effect in the vacuum chamber.

[0020] Preferably, two adjusting seats are slidably connected to the inner wall of the connecting seat. The two adjusting seats are threadedly connected to a bidirectional lead screw. The bidirectional lead screw is used to adjust the position of the two adjusting seats. A spring is provided between the adjusting seats and the moving seat. Through the adjusting seats and the spring, a thrust is generated on the moving seat, which cooperates with the first extrusion shaft to extrude the rolled material.

[0021] Preferably, the adjusting unit is connected to the transmission unit, and the transmission unit includes:

[0022] The second extrusion shaft is used to extrude rolled materials.

[0023] The push rod is rotatably connected to the corresponding first extrusion shaft and is used to move in coordination with the movement of the first extrusion shaft.

[0024] Preferably, the end of the push rod away from the first extrusion shaft is rotatably connected to the second extrusion shaft, so that when the position of the first extrusion shaft is adjusted, the position of the second extrusion shaft is adjusted in conjunction with it to quickly tighten the rolled material.

[0025] Preferably, the connecting frame is provided with an adjustment unit, which is used to adjust the length of the rolled material in the vacuum chamber. The adjustment unit includes:

[0026] Displacement seat;

[0027] The tension shaft is rotatably connected to the displacement seat and is used to adjust the length of the rolled material in the vacuum chamber;

[0028] The adjusting screw is rotatably connected in the connecting bracket and is used to adjust the height of the displacement seat and the tensioning shaft;

[0029] A threaded sleeve is slidably connected to the inner wall of the connecting frame. The threaded sleeve is threadedly connected to the adjusting screw, which in turn adjusts the position of the displacement seat and the tensioning shaft.

[0030] Preferably, a sliding rod is fixedly connected to the bottom end face of the displacement seat, and a fixed sleeve is slidably connected to the inner wall of the sliding rod, and the fixed sleeve is fixedly connected to the inner wall of the connecting frame.

[0031] The automatic control method for vacuum roll-to-roll plasma cleaners includes the following control methods:

[0032] S1: The control system of a vacuum roll-to-roll plasma cleaner typically uses a PLC as its core. The PLC automatic control has complete control and protection functions, which can ensure the stable operation of the equipment. Combined with the touch screen operation interface on the plasma cleaner, the PLC can achieve precise control of the cleaning process through preset programs and logic, including plasma generation, gas injection, temperature adjustment and vacuum maintenance.

[0033] S2: The vacuum roll-to-roll plasma cleaner uses multiple sensors to detect the closure of the vacuum door. The sensors include inductive proximity sensors, microswitches, and photoelectric sensors. The position and status of the vacuum door are detected in real time by the above sensors and the signals are transmitted to the control system. The control system determines whether the vacuum door is closed based on the sensor signals and issues an alarm or stops the cleaning process when necessary.

[0034] S3: Employs proportional, integral, and derivative control algorithms to precisely control the vacuum level. The proportional element adjusts the output proportionally according to the magnitude of the current error. When the error is large, the proportional element will generate a large adjustment amount to quickly reduce the error, and when the error is small, the adjustment amount will decrease accordingly.

[0035] The role of the integral element is to eliminate the steady-state error generated by pure proportional control. By performing integral control on the error, past error information is accumulated, and the output is adjusted accordingly to gradually eliminate the error.

[0036] The role of the differential element is to reflect the trend of error change and adjust the error in advance according to the trend. By calculating the rate of change of error and adjusting the output accordingly, the further change of error can be suppressed.

[0037] When the vacuum level of the cavity is outside the set range, the PID controller automatically adjusts the speed of the vacuum pump motor according to the magnitude and rate of change of the deviation, so that the vacuum level quickly returns to the set range.

[0038] S4: In the vacuum roll-to-roll plasma cleaner, the injection of process gas is achieved by using a high-precision electronic mass flow meter and advanced gas pipelines and valves. Through preset programs and logic, the control system can adjust the flow rate and ratio of process gas in real time to ensure the stability and consistency of the cleaning process.

[0039] S5: The system uses sensors to monitor the state of the plasma, including plasma density and temperature. When the plasma state changes, the control system automatically adjusts the gas injection and heating parameters to maintain plasma stability.

[0040] This invention discloses a vacuum roll-to-roll plasma cleaner and its induction-based automatic control method, which has the following beneficial effects:

[0041] 1. The vacuum roll-to-roll plasma cleaner and its automatic control method utilize a bidirectional lead screw to drive an adjusting seat to move in opposite directions. When the adjusting seat moves in the opposite direction, it compresses a spring, which in turn generates a thrust on the moving seat due to the spring's rebound. At this time, the moving seat drives the first extrusion shaft to extrude the roll material adhered to its surface, tightening the roll material and ensuring that it remains taut in the vacuum chamber. This prevents the roll material from becoming loose or folded during long-term transport, thus improving the cleaning effect.

[0042] 2. The vacuum roll-to-roll plasma cleaner and its automatic control method: After the roll material passes through the upper rotating shaft, it passes through the tension shaft and fits against the lower end of the tension shaft. When the drive mechanism in the connecting frame drives the adjusting screw to rotate, the threaded sleeve slides along the inner wall of the connecting frame, causing the displacement seat and the tension shaft to move, changing the position of the tension shaft, thereby adjusting the length of the roll material in the vacuum chamber, thus changing the time the roll material spends in the vacuum chamber, and thus changing its cleaning effect, achieving rapid changes in the cleaning effect. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0045] Figure 2 This is a schematic diagram of the connecting frame structure of the present invention;

[0046] Figure 3 This is a schematic diagram of the structure of the present invention from another perspective;

[0047] Figure 4 This is a schematic diagram of the connection structure between the adjustment unit and the transmission unit of the present invention;

[0048] Figure 5 This is a schematic diagram of the adjustment unit and transmission unit of the present invention;

[0049] Figure 6 This is a schematic diagram of the adjustment unit structure of the present invention.

[0050] In the diagram: 1. Plasma cleaner; 2. Vacuum chamber; 201. Sealed door; 3. Transmission rod; 4. Connecting frame; 401. Upper rotating shaft; 402. Lower rotating shaft; 5. Adjustment unit; 501. Connecting seat; 502. Bidirectional lead screw; 503. Moving seat; 504. First extrusion shaft; 505. Adjustment seat; 506. Spring; 6. Transmission unit; 601. Second extrusion shaft; 602. Push rod; 7. Positioning unit; 701. Displacement seat; 702. Tensioning shaft; 703. Adjusting lead screw; 704. Threaded sleeve; 705. Fixed sleeve; 706. Sliding rod. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are described clearly and completely. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0052] This application provides a vacuum roll-to-roll plasma cleaner and its automatic control method, which solves the problem that during the conveying of roll materials, it is impossible to effectively ensure that the roll materials remain taut for a long time, resulting in slack or folding, which affects the cleaning effect. Furthermore, when the roll materials are not thoroughly cleaned, changing the activity in the plasma cleaner 1 cannot quickly and intuitively change the cleaning effect. The solution is to rotate the bidirectional lead screw 502 to drive the adjusting seat 505 to move in opposite directions. When the adjusting seat 505 moves in the opposite direction, it compresses the spring 506, causing the spring 506 to rebound and push the moving seat 503. The moving seat 503 then drives the first extrusion shaft 504 to compress the roll material adhered to its surface, thus tightening the roll material. This ensures that the roll material remains taut in the vacuum chamber 2, preventing slack or folding during long-term conveying and improving the cleaning effect.

[0053] After the rolled material passes through the upper rotating shaft 401, it passes through the tension shaft 702 and fits against the lower end of the tension shaft 702. When the drive mechanism in the connecting frame 4 drives the adjusting screw 703 to rotate, the threaded sleeve 704 slides along the inner wall of the connecting frame 4, causing the displacement seat 701 and the tension shaft 702 to move, changing the position of the tension shaft 702, thereby adjusting the length of the rolled material in the vacuum chamber 2, thereby changing the time the rolled material spends in the vacuum chamber 2, and thus changing its cleaning effect, achieving a rapid change in the cleaning effect.

[0054] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0055] This invention discloses a vacuum roll-to-roll plasma cleaning machine and its induction automatic control method.

[0056] Example 1:

[0057] According to the appendix Figure 1-6 As shown, it includes a body 1, characterized in that the body 1 is provided with:

[0058] Vacuum chamber 2, located in the middle of body 1, creates a vacuum environment for the rolled material;

[0059] The transmission rod 3 corresponds to the feed port of the vacuum chamber 2 and is connected to the drive mechanism in the plasma cleaner 1, and is used to feed the rolled material;

[0060] Connecting frame 4, spanning the middle of vacuum chamber 2, is used to transfer rolled materials within vacuum chamber 2;

[0061] Vacuum chamber 2 is equipped with:

[0062] Adjustment unit 5, located in the middle of connecting frame 4 and extending along the feed inlet of vacuum chamber 2, is used to tighten the rolled material;

[0063] The transmission unit 6 is mounted on the adjustment unit 5 and works in conjunction with the adjustment unit 5 to tighten the rolled material and to wind the rolled material along the direction of the connecting frame 4.

[0064] Vacuum chamber 2 is fixedly connected to plasma cleaner 1. Sealing doors 201 are rotatably connected to both sides of vacuum chamber 2. The sealing doors 201 on both sides are respectively provided with inlet and outlet for feeding and discharging roll material. Transmission rod 3 is rotatably connected to plasma cleaner 1 and is connected to the drive mechanism in plasma cleaner 1. The drive mechanism drives transmission rod 3 to rotate. Under the rotation of transmission rod 3, the transmission rod 3 drives the roll material to rotate, feeding the roll material through the inlet. It is then conveyed in conjunction with the upper rotating shaft 401 and lower rotating shaft 402 in connecting frame 4 for cleaning.

[0065] The connecting frame 4 is connected by an upper rotating shaft 401 and a lower rotating shaft 402. The upper rotating shaft 401 and the lower rotating shaft 402 are connected to the drive mechanism in the plasma cleaner 1. The rotation of the upper rotating shaft 401 and the lower rotating shaft 402 drives the roll material to be conveyed. Specifically, the roll material is sent into the vacuum chamber 2. At this time, the roll material first contacts the first extrusion shaft 504 in the adjustment unit 5 on one side. Then, the roll material passes downward through the lower rotating shaft 402 and adheres to the bottom of the lower rotating shaft 402. Then, it passes upward through the upper rotating shaft 401 and adheres to the surface of the upper rotating shaft 401. Under the action of the adjustment unit 5, the roll material is tightly adhered to the surface of the upper rotating shaft 401 and the lower rotating shaft 402, which facilitates the upper rotating shaft 401 and the lower rotating shaft 402 to drive the roll material to be conveyed.

[0066] Adjustment unit 5 includes:

[0067] Connecting seats 501 are located on both sides of vacuum chamber 2;

[0068] The bidirectional lead screw 502 is rotatably connected to the inner wall of the connecting seat 501;

[0069] The movable seat 503 is slidably connected to the inner wall of the connecting seat 501, and is moved by the bidirectional lead screw 502;

[0070] The first extrusion shaft 504 is rotatably connected between the corresponding moving seats 503 and moves along with the moving seats 503 on the connecting seat 501 to tighten the rolled material and ensure a better cleaning effect in the vacuum chamber 2.

[0071] Two adjusting seats 505 are slidably connected to the inner wall of the connecting seat 501. The two adjusting seats 505 are threadedly connected to the bidirectional lead screw 502. The bidirectional lead screw 502 is used to adjust the position of the two adjusting seats 505. A spring 506 is provided between the adjusting seat 505 and the moving seat 503. The two ends of the spring 506 are fixedly connected to the moving seat 503 and the adjusting seat 505 respectively. The spring 506 is sleeved on the outer peripheral wall of the bidirectional lead screw 502. Through the adjusting seat 505 and the spring 506, a thrust is generated on the moving seat 503, which cooperates with the first extrusion shaft 504 to extrude the rolled material.

[0072] It is particularly important to emphasize that by rotating the bidirectional lead screw 502, the adjusting seat 505 can be moved in opposite directions. When the adjusting seat 505 moves in the opposite direction, it presses against the spring 506, which in turn generates a thrust on the moving seat 503 under the rebound of the spring 506. At this time, the moving seat 503 drives the first extrusion shaft 504 to extrude the roll material attached to its surface, thus tightening the roll material.

[0073] Furthermore, this ensures that the rolled material remains taut in the vacuum chamber 2, preventing it from loosening or folding during prolonged transport and thus improving its cleaning effect.

[0074] The adjusting unit 5 is connected to the transmission unit 6, and the transmission unit 6 includes:

[0075] The second extrusion shaft 601 is used to extrude rolled materials.

[0076] The push rod 602 is rotatably connected to the corresponding first extrusion shaft 504 and is used to move in coordination with the movement of the first extrusion shaft 504.

[0077] The end of the push rod 602 away from the first extrusion shaft 504 is rotatably connected to the second extrusion shaft 601. When adjusting the position of the first extrusion shaft 504, it is used to adjust the position of the second extrusion shaft 601 to quickly tighten the rolled material.

[0078] It is particularly important to emphasize that when the rolled material is attached to the outer wall of the first extrusion shaft 504, the first extrusion shaft 504 moves under the extrusion of the rolled material, causing the first extrusion shaft 504 to compress the spring 506. At the same time, the movement of the first extrusion shaft 504 drives the push rod 602 to rotate, pushing the second extrusion shaft 601 to move upward, thereby causing the push rod 602 to push the rolled material upward, quickly straightening the rolled material.

[0079] Furthermore, the simultaneous movement of the push rod 602 drives the first extrusion shaft 504 on the other side to move, causing the two first extrusion shafts 504 to move towards each other, compressing the spring 506, thereby ensuring the pressure of the two first extrusion shafts 504 on the rolled material and tightening the rolled material.

[0080] Example 2:

[0081] The connecting frame 4 is equipped with an adjustment unit 7, which is used to adjust the length of the rolled material in the vacuum chamber 2. The adjustment unit 7 includes:

[0082] Displacement seat 701;

[0083] The tension shaft 702 is rotatably connected to the displacement seat 701 and is used to adjust the length of the rolled material in the vacuum chamber 2.

[0084] The adjusting screw 703 is rotatably connected in the connecting bracket 4 and is used to adjust the height of the displacement seat 701 and the tensioning shaft 702.

[0085] The threaded sleeve 704 is slidably connected to the inner wall of the connecting frame 4. The threaded sleeve 704 is threadedly connected to the adjusting screw 703, and the adjusting screw 703 is used to adjust the position of the displacement seat 701 and the tensioning shaft 702.

[0086] Specifically, after the rolled material passes through the upper rotating shaft 401, it passes through the tension shaft 702 and fits against the lower end of the tension shaft 702. When the drive mechanism in the connecting frame 4 drives the adjusting screw 703 to rotate, the threaded sleeve 704 slides along the inner wall of the connecting frame 4, causing the displacement seat 701 and the tension shaft 702 to move, changing the position of the tension shaft 702, thereby adjusting the length of the rolled material in the vacuum chamber 2, thereby changing the duration of the rolled material in the vacuum chamber 2, and thus changing its cleaning effect, achieving a rapid change in the cleaning effect.

[0087] A sliding rod 706 is fixedly connected to the bottom end face of the displacement seat 701. A fixed sleeve 705 is slidably connected to the inner wall of the sliding rod 706. The fixed sleeve 705 is fixedly connected to the inner wall of the connecting frame 4. Furthermore, when the displacement seat 701 moves, the sliding rod 706 slides on the inner wall of the fixed sleeve 705, making the movement of the displacement seat 701 more stable.

[0088] The automatic control method for vacuum roll-to-roll plasma cleaners includes the following control methods:

[0089] S1: The control system of a vacuum roll-to-roll plasma cleaner typically uses a PLC as its core. The PLC automatic control has complete control and protection functions, which can ensure the stable operation of the equipment. Combined with the touch screen operation interface on the plasma cleaner 1, the PLC can achieve precise control of the cleaning process through preset programs and logic, including plasma generation, gas injection, temperature adjustment and vacuum maintenance.

[0090] S2: The vacuum roll-to-roll plasma cleaner uses multiple sensors to detect the closure of the vacuum door. The sensors include inductive proximity sensors, microswitches, and photoelectric sensors. The position and status of the vacuum door are detected in real time by the above sensors and the signals are transmitted to the control system. The control system determines whether the vacuum door is closed based on the sensor signals and issues an alarm or stops the cleaning process when necessary.

[0091] S3: Employs proportional, integral, and derivative control algorithms to precisely control the vacuum level. The proportional element adjusts the output proportionally according to the magnitude of the current error. When the error is large, the proportional element will generate a large adjustment amount to quickly reduce the error, and when the error is small, the adjustment amount will decrease accordingly.

[0092] The role of the integral element is to eliminate the steady-state error generated by pure proportional control. By performing integral control on the error, past error information is accumulated, and the output is adjusted accordingly to gradually eliminate the error.

[0093] The role of the differential element is to reflect the trend of error change and adjust the error in advance according to the trend. By calculating the rate of change of error and adjusting the output accordingly, the further change of error can be suppressed.

[0094] When the vacuum level of the cavity is outside the set range, the PID controller automatically adjusts the speed of the vacuum pump motor according to the magnitude and rate of change of the deviation, so that the vacuum level quickly returns to the set range.

[0095] S4: In the vacuum roll-to-roll plasma cleaner, the injection of process gas is achieved by using a high-precision electronic mass flow meter and advanced gas pipelines and valves. Through preset programs and logic, the control system can adjust the flow rate and ratio of process gas in real time to ensure the stability and consistency of the cleaning process.

[0096] S5: The system uses sensors to monitor the state of the plasma, including plasma density and temperature. When the plasma state changes, the control system automatically adjusts the gas injection and heating parameters to maintain plasma stability.

[0097] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum roll-to-roll plasma cleaner, comprising a body (1), characterized in that, The body (1) is provided with: Vacuum chamber (2), located in the middle of body (1), creates a vacuum environment for the rolled material; The transmission rod (3) corresponds to the feed port of the vacuum chamber (2) and is connected to the drive mechanism in the plasma cleaner for feeding the rolled material; A connecting frame (4) spans across the middle of the vacuum chamber (2) and is used to transfer rolled materials within the vacuum chamber (2); The vacuum chamber (2) is equipped with: The adjustment unit (5) is located in the middle of the connecting frame (4) and extends along the feed port of the vacuum chamber (2) to tighten the rolled material; The transmission unit (6) is set on the adjustment unit (5) and works with the adjustment unit (5) to tighten the rolled material and wind up the rolled material along the direction of the connecting frame (4); The adjustment unit (5) includes: Connecting seats (501) are provided on both sides of the vacuum chamber (2); A two-way lead screw (502) is rotatably connected to the inner wall of the connecting seat (501); The movable seat (503) is slidably connected to the inner wall of the connecting seat (501), and is driven to move by the bidirectional lead screw (502); The first extrusion shaft (504) is rotatably connected between the corresponding moving seats (503) and moves on the connecting seat (501) along with the moving seats (503) to tighten the rolled material and ensure that it has a better cleaning effect in the vacuum chamber (2). Two adjusting seats (505) are slidably connected to the inner wall of the connecting seat (501). The two adjusting seats (505) are threadedly connected to the bidirectional lead screw (502). The bidirectional lead screw (502) is used to adjust the position of the two adjusting seats (505). A spring (506) is provided between the adjusting seat (505) and the moving seat (503). Through the adjusting seat (505) and the spring (506), a thrust is generated on the moving seat (503), which cooperates with the first extrusion shaft (504) to extrude the rolled material. The adjusting unit (5) is connected to the transmission unit (6), and the transmission unit (6) includes: The second extrusion shaft (601) is used to extrude rolled materials; The push rod (602) is rotatably connected to the corresponding first extrusion shaft (504) and is used to move in coordination with the movement of the first extrusion shaft (504); The end of the push rod (602) away from the first extrusion shaft (504) is rotatably connected to the second extrusion shaft (601). When adjusting the position of the first extrusion shaft (504), it is used to adjust the position of the second extrusion shaft (601) to quickly tighten the rolled material.

2. The vacuum roll-to-roll plasma cleaner according to claim 1, characterized in that, The vacuum chamber (2) is rotatably connected to two sides of a sealing door (201), and the sealing door (201) is provided with an inlet and an outlet respectively.

3. The vacuum roll-to-roll plasma cleaner according to claim 1, characterized in that, The connecting frame (4) is connected by an upper rotating shaft (401) and a lower rotating shaft (402). The upper rotating shaft (401) and the lower rotating shaft (402) are connected to the drive mechanism in the plasma cleaner. The upper rotating shaft (401) and the lower rotating shaft (402) rotate to drive the roll material to be conveyed.

4. The vacuum roll-to-roll plasma cleaner according to claim 1, characterized in that, The connecting frame (4) is provided with an adjustment unit (7), which is used to adjust the length of the rolled material in the vacuum chamber (2). The adjustment unit (7) includes: Displacement seat (701); The tensioning shaft (702) is rotatably connected to the displacement seat (701) and is used to adjust the length of the rolled material in the vacuum chamber (2); The adjusting screw (703) is rotatably connected in the connecting frame (4) and is used to adjust the height of the displacement seat (701) and the tensioning shaft (702); The threaded sleeve (704) is slidably connected to the inner wall of the connecting frame (4). The threaded sleeve (704) is threadedly connected to the adjusting screw (703) and cooperates with the adjusting screw (703) to adjust the position of the displacement seat (701) and the tensioning shaft (702).

5. The vacuum roll-to-roll plasma cleaner according to claim 4, characterized in that, A sliding rod (706) is fixedly connected to the bottom end face of the displacement seat (701), and a fixed sleeve (705) is slidably connected to the inner wall of the sliding rod (706). The fixed sleeve (705) is fixedly connected to the inner wall of the connecting frame (4).

6. An automatic control method for a vacuum roll-to-roll plasma cleaner, based on the vacuum roll-to-roll plasma cleaner according to any one of claims 1-5, characterized in that, Including the following control methods: S1: The control system of a vacuum roll-to-roll plasma cleaner typically uses a PLC as its core. The PLC automatic control has complete control and protection functions, which can ensure the stable operation of the equipment. Combined with the touch screen operation interface on the plasma cleaner, the PLC can achieve precise control of the cleaning process through preset programs and logic, including plasma generation, gas injection, temperature adjustment and vacuum maintenance. S2: The vacuum roll-to-roll plasma cleaner uses multiple sensors to detect the closure of the vacuum door. The sensors include inductive proximity sensors, microswitches, and photoelectric sensors. The position and status of the vacuum door are detected in real time by the above sensors and the signals are transmitted to the control system. The control system determines whether the vacuum door is closed based on the sensor signals and issues an alarm or stops the cleaning process when necessary. S3: Employs proportional, integral, and derivative control algorithms to precisely control the vacuum level. The proportional element adjusts the output proportionally according to the magnitude of the current error. When the error is large, the proportional element will generate a large adjustment amount to quickly reduce the error, and when the error is small, the adjustment amount will decrease accordingly. The role of the integral element is to eliminate the steady-state error generated by pure proportional control. By performing integral control on the error, past error information is accumulated, and the output is adjusted accordingly to gradually eliminate the error. The role of the differential element is to reflect the trend of error change and adjust the error in advance according to the trend. By calculating the rate of change of error and adjusting the output accordingly, the further change of error can be suppressed. When the vacuum level of the cavity is outside the set range, the PID controller automatically adjusts the speed of the vacuum pump motor according to the magnitude and rate of change of the deviation, so that the vacuum level quickly returns to the set range. S4: In the vacuum roll-to-roll plasma cleaner, the injection of process gas is achieved by using a high-precision electronic mass flow meter and advanced gas pipelines and valves. Through preset programs and logic, the control system can adjust the flow rate and ratio of process gas in real time to ensure the stability and consistency of the cleaning process. S5: The plasma state is monitored by sensors, including plasma density and temperature. When the plasma state changes, the control system automatically adjusts the gas injection and heating parameters to maintain plasma stability.

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