Counting and weighing method of different-size flower basket compatible feeding system

Abstract

The invention discloses a counting and weighing method of a feeding system compatible with baskets of different sizes. The counting and weighing method comprises the steps that S1, a silicon wafer counting mechanism identifies and counts silicon wafers in a plurality of baskets at the first end of a feeding platform; s2, a flower basket lifting and transverse moving mechanism lifts and moves a plurality of flower baskets at the first end of the feeding platform to the second end of the feeding platform; and S3, the silicon wafer weighing mechanism weighs the plurality of flower baskets at the second end of the feeding platform. According to the invention, the silicon wafer counting mechanism and the silicon wafer weighing mechanism are designed, the silicon wafer counting mechanism counts the fed silicon wafers, and the silicon wafer state in each follow-up silicon wafer processing process, such as the state of silicon wafer fragments, can be reflected in time by comparing the number of the fed silicon wafers. And the silicon wafer weighing mechanism is used for weighing the flower baskets and the counted silicon wafers, so that the silicon wafer flower baskets in subsequent processes such as a spin-drying process can be reasonably distributed according to weighing data so as to be compatible with the feeding of the silicon wafer flower baskets with different sizes.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor manufacturing, and in particular relates to a counting and weighing method for a compatible feeding system of flower baskets of different sizes. Background Art

[0002] Wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. Because of its round shape, it is called a round wafer. Silicon wafers are the carriers used in the production of integrated circuits. Generally speaking, silicon wafers refer to single-crystal silicon wafers. Single-crystal silicon wafers are pulled and refined from ordinary silicon sand, and then made into single-crystal silicon rods through a series of measures such as dissolution, purification, and distillation. After the single-crystal silicon rods are polished and sliced, they become silicon wafers. In the production and processing of silicon wafers, it is usually necessary to clean and dry the silicon wafers. When cleaning and drying silicon wafers, first place the silicon wafers in a basket, then put them into the cleaning solution according to the process ratio to clean the silicon wafers, and then spin dry the cleaned silicon wafers and put them in an oven to bake and dry.

[0003] However, in the prior art, silicon wafers have a variety of different specifications and sizes, such as 5 inches, 6 inches, 8 inches and 12 inches, etc. Silicon wafers of different specifications and sizes are placed in silicon wafer baskets of corresponding sizes for cleaning and placed in a spin-drying device for spin-drying. The current operating method is that silicon wafer baskets of the same specifications and numbers are placed in the spin-drying device, so that the spin-drying device automatically reaches a balanced state during the spin-drying process. Therefore, the feeding system of the spin-drying device feeds silicon wafer baskets of the same size and specifications each time. This process is not compatible with silicon wafers and baskets of different sizes, has great limitations, and reduces the overall production efficiency of generating silicon wafers of different sizes at the same time. Summary of the invention

[0004] The present invention aims to solve the technical problem that the existing flower basket feeding system is not compatible with feeding flower baskets of other sizes, and aims to provide a counting and weighing method for a feeding system compatible with flower baskets of different sizes.

[0005] The counting and weighing method of the compatible feeding system of flower baskets of different sizes of the present invention comprises the following steps:

[0006] Step S1, a silicon wafer counting mechanism identifies and counts the silicon wafers in a plurality of baskets at a first end of a feeding platform;

[0007] Step S2, the flower basket lifting and transverse movement mechanism lifts and moves a plurality of flower baskets at the first end of the feeding platform to the second end of the feeding platform;

[0008] Step S3, the silicon wafer weighing mechanism weighs the plurality of flower baskets at the second end of the feeding platform respectively.

[0009] Preferably, step S1 specifically includes:

[0010] The counting sensor of the silicon wafer counting mechanism moves from the starting position of the previous flower basket to the counting position of the current flower basket, then counts the silicon wafers in the current flower basket, and finally returns to the starting position of the current flower basket;

[0011] Repeat the above step S1 until all the flower baskets at the first end of the feeding platform are counted.

[0012] Preferably, step S1 specifically includes:

[0013] In step S11, the X-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the previous flower basket in the X direction or in the X reverse direction to the starting position of the current flower basket;

[0014] In step S12, the Z-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the current flower basket along the Z-direction to the counting position of the current flower basket;

[0015] In step S13, the counting sensor counts the silicon wafers in the current flower basket;

[0016] In step S14, the Z-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move in the reverse direction of the Z direction from the counting position of the current flower basket to the starting position of the current flower basket;

[0017] Substeps S11 to S14 are repeated until all the flower baskets at the first end of the feeding platform are counted.

[0018] Preferably,

[0019] Before step S1, a preparatory step S1A is also included: the Y-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the first avoidance position at the first end of the feeding platform along the Y-direction to the starting position of the first flower basket;

[0020] After step S1, a resetting step S1B is also included: the Y-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move in the Y-direction reverse direction from the starting position of the last flower basket to the second avoidance position.

[0021] Preferably, the resetting step S1B further comprises: the X-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move along the X-direction or in the reverse direction of the X-direction to the first avoidance position.

[0022] Preferably,

[0023] The counting position of the current flower basket is the position where the counting sensor docks with the silicon wafer in the current flower basket for counting;

[0024] The starting position of the current flower basket and the counting position of the current flower basket are in the same Z direction.

[0025] Preferably, the first avoidance position and the second avoidance position are positions where the counting sensor is located at the first end of the feeding platform and does not interfere with the flower basket lifting and transverse movement mechanism when receiving a plurality of flower baskets at the first end of the feeding platform.

[0026] Preferably, step S2 comprises:

[0027] In step S21, the flower basket lifting and transverse movement mechanism moves from the second end of the feeding platform to the first end and is located directly below the flower basket at the first end;

[0028] In step S22, the lifting cylinder of the flower basket lifting and lateral movement mechanism drives the flower basket lifting frame to rise and lift the first end flower basket;

[0029] In step S23, the flower basket lifting and transverse movement mechanism lifts the flower basket and moves the flower basket along the flower basket moving groove from the first end of the feeding platform to the flower basket supporting plate at the second end of the feeding platform.

[0030] Preferably, step S3 specifically includes: the lifting cylinder of the flower basket lifting and transverse movement mechanism drives the flower basket lifting frame to descend, and after the flower basket is completely separated from the second end of the feeding platform, the silicon wafer weighing mechanism weighs the flower basket.

[0031] Preferably, the flower baskets of different sizes are selected from one or more of a 5-inch flower basket, a 6-inch flower basket, an 8-inch flower basket and a 12-inch flower basket.

[0032] Another object of the present invention is to provide a feeding system compatible with flower baskets of different sizes, the feeding system compatible with flower baskets of different sizes comprising:

[0033] A feeding platform having a first end for feeding flower baskets of different sizes and a second end for feeding flower baskets of different sizes;

[0034] A silicon wafer counting mechanism capable of counting the silicon wafers fed into the basket at the first end, disposed at the first end of the feeding platform;

[0035] A silicon wafer weighing mechanism capable of weighing the flower basket fed at the second end is arranged at the second end of the feeding platform.

[0036] Preferably, the compatible feeding system for flower baskets of different sizes further comprises a flower basket lifting and transverse movement mechanism capable of transversely moving flower baskets of different sizes from the first end to the second end.

[0037] Preferably,

[0038] The first end of the feeding platform has a plurality of first supporting rack cavities for supporting flower baskets of different sizes;

[0039] The second end of the feeding platform has a plurality of second supporting rack cavities for supporting flower baskets of different sizes;

[0040] The feeding platform also has a plurality of basket transfer grooves for connecting the corresponding first lifting frame cavity with the second lifting frame cavity;

[0041] The flower basket lifting frame of the flower basket lifting and transverse movement mechanism passes through the corresponding first lifting frame cavity, the flower basket moving groove and the second lifting frame cavity to transversely move flower baskets of different sizes from the first end to the second end.

[0042] Preferably, the middle part of the feeding platform is also provided with a plurality of temporary storage cavities for lifting racks, and the temporary storage cavities for lifting racks are located in the middle part of the corresponding flower basket transfer grooves.

[0043] Preferably, the silicon wafer counting mechanism comprises:

[0044] A counting sensor connected to the target flower basket in a manner capable of counting the number of silicon wafers in the target flower basket;

[0045] A multi-directional moving driving mechanism is located near the first end of the feeding platform and is drivingly connected to the counting sensor, and can move the counting sensor along multiple different directions to the target basket at the first end to count the number of silicon wafers in the target basket.

[0046] Preferably, the multi-directional driving mechanism comprises:

[0047] A Y-direction driving member is located below the first end of the feeding platform, and the counting sensor is directly fixed on the Y-direction driving member to drive the counting sensor to move back and forth in the Y direction between the Z-direction starting position and the avoidance position of the target flower basket;

[0048] A Z-direction driving member is located below the first end of the feeding platform and is directly disposed under the Y-direction driving member, so that the Z-direction driving member drives the counting sensor and the Y-direction driving member to move along the Z direction to the target flower basket;

[0049] The X-direction driving member is located below the first end of the feeding platform and is fixedly connected to the Z-direction driving member, so that the X-direction driving member drives the counting sensor, the Z-direction driving member and the Y-direction driving member to move along the X-direction to the Z-direction of the target flower basket.

[0050] Preferably,

[0051] The Y-direction driving member is a cylinder slide that can slide upward in the Y direction, and the counting sensor is fixed on the top of the cylinder slide;

[0052] The X-direction driving member is a rodless cylinder that moves in the X-direction and has a support plate that can move in the X-direction, thereby driving the Z-direction driving member and the counting sensor to move along the X-direction to the Z-direction of the target basket;

[0053] The Z-direction driving member comprises:

[0054] A Z-direction plate, on which the cylinder slide for upward sliding in Y direction is mounted;

[0055] The Z-direction driving cylinder, the Z-direction plate is mounted on the piston of the Z-direction driving cylinder, so that the Z-direction driving cylinder drives the Z-direction plate and the counting sensor to move along the Z-direction, and the Z-direction driving cylinder is also fixedly connected to a support plate movable in the X-direction.

[0056] Preferably, the silicon wafer weighing mechanism comprises:

[0057] M support plate cavities provided at the second end of the feeding platform;

[0058] M flower basket supporting plates capable of carrying flower baskets, wherein the middle parts of the flower basket supporting plates respectively have the second supporting frame cavities, and the flower basket supporting plates are arranged in the corresponding supporting plate cavities;

[0059] M groups of weighing sensor assemblies, one end of each group of weighing sensor assemblies is fixed under the feeding platform close to the corresponding pallet cavity, and the other end is fixed under the corresponding flower basket pallet. Each group of weighing sensor assemblies can weigh the flower basket on the corresponding flower basket pallet; preferably, each group of weighing sensor assemblies consists of two weighing sensors, and the two weighing sensors are symmetrically arranged under the flower basket pallet.

[0060] Preferably,

[0061] The starting position is in the same Z direction as the counting position when the counting sensor is connected to the silicon wafer in the current flower basket for counting;

[0062] The avoidance position is a position where the counting sensor is located at the first end of the feeding platform and does not interfere with the flower basket lifting and transverse movement mechanism when receiving a plurality of flower baskets at the first end of the feeding platform.

[0063] Preferably, the flower basket lifting and transverse movement mechanism comprises:

[0064] The flower basket lifting frame;

[0065] A lifting cylinder is located under the feeding platform, and the flower basket lifting frame is installed on the piston rod of the lifting cylinder;

[0066] A transverse horizontal guide rail fixedly arranged below one side of the feeding platform is arranged parallel to the flower basket shifting groove, and the lifting cylinder is slidably arranged on the transverse horizontal guide rail through a cylinder mounting seat;

[0067] The servo motor is drivingly connected to the cylinder mounting seat to drive the flower basket lifting frame and the lifting cylinder to move along the flower basket moving groove under the guide limit of the transverse horizontal guide rail.

[0068] The positive and progressive effects of the present invention are:

[0069] 1) The compatible feeding system for flower baskets of different sizes of the present invention is designed with a silicon wafer counting mechanism and a silicon wafer weighing mechanism, wherein the silicon wafer counting mechanism counts the fed silicon wafers and can timely reflect the status of the silicon wafers in the subsequent silicon wafer processing processes by comparing the number of fed silicon wafers, such as the status of silicon wafer fragments. The silicon wafer weighing mechanism weighs the flower baskets and the counted silicon wafers. On the one hand, it can better reasonably allocate the subsequent silicon wafer flower baskets in the spin-drying process, such as the spin-drying process, based on the weighing data, so that the silicon wafer flower baskets of different sizes can be compatible with various program operations such as the spin-drying process in the same program. BRIEF DESCRIPTION OF THE DRAWINGS

[0070] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0071] Figure 2 for Figure 1 Schematic diagram from another angle;

[0072] Figure 3A It is a schematic diagram of the upper surface structure of the feeding platform of the present invention;

[0073] Figure 3B It is a schematic diagram of the lower surface structure of the feeding platform of the present invention;

[0074] Figure 4A It is a structural schematic diagram of the silicon wafer counting mechanism of the present invention;

[0075] Figure 4B It is a schematic diagram of another angle of the silicon wafer counting mechanism of the present invention;

[0076] Figure 5A It is a schematic diagram of the flower basket lifting and transverse movement mechanism of the present invention;

[0077] Figure 5B for Figure 5A Schematic diagram from another angle;

[0078] Figure 6 It is a schematic diagram of the counting and weighing method of the compatible feeding system for flower baskets of different sizes of the present invention;

[0079] Figure 7 for Figure 6 Detailed flowchart of the method shown. DETAILED DESCRIPTION

[0080] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0081] It should be noted that, in the description of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features, and cannot be understood as limiting the specific scope of protection of the present invention.

[0082] like Figure 1 and Figure 2 As shown, the compatible feeding system for flower baskets of different sizes of the present invention comprises a feeding platform 10, a silicon wafer counting mechanism 20, a silicon wafer weighing mechanism 30, a flower basket lifting and lateral movement mechanism 40, and a plurality of flower baskets 50 of different sizes or the same size placed in parallel and spaced apart on the feeding platform 10. The feeding platform 10 also has a first end 11 and a second end 12 for carrying the flower baskets 50 of different sizes for feeding, and the silicon wafer counting mechanism 20 is installed at the first end 11 of the feeding platform 10 so as to count the silicon wafers in the flower baskets 50 of different sizes or the same size carried on the first end 11; the silicon wafer weighing mechanism 30 is installed at the second end 12 of the feeding platform 10 so as to weigh the flower baskets 50 of different sizes or the same size and silicon wafers carried on the second end 12; and the flower basket lifting and lateral movement mechanism 40 can move back and forth between the first end 11 and the second end 12 of the feeding platform 10 so as to lateral move the flower baskets 50 of different sizes or the same size carried on the first end 11 to the second end 12. That is, in this example, continue as Figure 1 and Figure 2 As shown, the silicon wafer counting mechanism 20 first counts the silicon wafers in the target baskets 50 fed on the first end 11 of the feeding platform, and after all the baskets 50 are counted, the basket lifting and transverse movement mechanism 40 lifts the baskets 50 and transversely moves them from the first end 11 to the second end 12, and finally the silicon wafer weighing mechanism 30 installed at the second end weighs the baskets 50. The baskets 50 of different sizes are selected from one or more of a 5-inch basket, a 6-inch basket, an 8-inch basket and a 12-inch basket.

[0083] like Figure 3AAs shown, the first end 11 of the feeding platform 10 has a plurality of first lifting rack cavities 111, and each of the four corners of the first lifting rack cavity 111 has support limit blocks 311 for supporting the four corners of the flower basket 50, so as to limit the flower baskets 50 of different sizes or the same size at corresponding positions. The silicon wafer counting mechanism 20 is arranged below the first end 11 of the feeding platform 10, and includes a counting sensor 21 and a multi-directional moving driving mechanism for driving the counting sensor 21 to move and connect with the counting of silicon wafers in the flower basket 50, wherein the counting sensor 21 has a plurality of parallel and spaced counting induction sheets, so as to connect with the plurality of silicon wafers in the flower basket 50 for one-to-one counting. The multi-directional driving member includes a Y-direction driving member 22, an X-direction driving member 23 and a Z-direction driving member 24, wherein the X-direction driving member 23 is used to drive the counting sensor 21 to move in the X direction to the Z direction of the target basket 50, the Y-direction driving member 22 is used to drive the counting sensor 21 to move to the Z-direction projection of the target basket 50 and align with the silicon wafers in the target basket 50, and the Z-direction driving member 24 is used to drive the counting sensor 21 to move in the Z direction to a position where a counting connection is established with the silicon wafers in the target basket 50 to calculate the number of silicon wafers in the target basket 50. In this example, Figure 4A and Figure 4B As shown, the Y-axis driving member 22, the X-axis driving member 23 and the Z-axis driving member 24 are all installed below the first end 11 of the feeding platform 10, and the counting sensor 21 is directly fixed on the Y-axis driving member 22. The Y-axis driving member 22 is a cylinder slide that can slide in the Y direction, and the counting sensor 21 is fixed on the top of the cylinder slide to drive the counting sensor 21 to move back and forth between the starting position in the Z direction and the avoidance position of the target flower basket, that is, in the Y direction. The starting position of the counting sensor 21 is the Z-axis projection position under the corresponding target flower basket, that is, the position aligned with the silicon wafer in the target flower basket in the Z direction, and the avoidance position is a position on the same Y axis as the starting position and does not interfere with the flower basket lifting and transverse movement mechanism 40 that moves the flower basket back and forth. In addition, continue as Figure 4A and Figure 4BAs shown, the X-direction driving member 23 is a rodless cylinder that moves in the X-direction, and has a support plate 231 that can move in the X-direction; the Z-direction driving member 24 has a Z-direction plate 241, a Z-direction driving cylinder 242, and two support rods 243. The Y-direction driving member 22 is fixedly mounted on the Z-direction plate 241, and the Z-direction plate 241 is relatively fixedly mounted on the piston of the Z-direction driving cylinder 242 and the two support rods 243 that are spaced apart on both sides of the piston, and one side of the Z-direction driving cylinder 242 is also fixedly mounted on the support plate 231 of the X-direction driving member 23. That is, the rodless cylinder in the X direction drives the support plate 231 to move, and can further drive the Z direction drive member 24, the Y direction cylinder slide and the counting sensor 21 to move along the X direction to the Z direction below the corresponding target flower basket 50; then the counting sensor 21 is driven by the Y direction cylinder slide to move along the Y direction to the starting position aligned with the silicon wafer in the target flower basket 50; finally, the Z direction drive member 24 drives the counting sensor 21 to move along the Z direction to establish a counting connection with the silicon wafer. Of course, it is also possible to drive along the Y direction first, then along the X direction, and finally along the Z direction, as long as the counting sensor can finally establish a counting connection with the silicon wafer in the target flower basket. In this example, relative to the target flower basket, it is preferred that the X direction is a relatively horizontal left and right movement, the Y direction is a relative front and back movement, and the Z direction is a relative up and down movement.

[0084] Continue as Figure 3A and Figure 3B As shown, the feeding platform 10 also has M flower basket shifting grooves 13, M support plate cavities 14 and a lifting frame temporary storage cavity 15, wherein the lifting frame temporary storage cavity 15 is located in the middle of the flower basket shifting groove 13, and the support plate cavity 14 is located at the second end 12 of the feeding platform 10, and the M support plate cavities 14 form a large plate cavity. In this example, M=2. In addition, the first end 11 of the feeding platform 10 also has a first lifting frame cavity 111, and the second end 12 also has a second lifting frame cavity 121, wherein the second lifting frame cavity 121 is also located in the support plate cavity 14. The two ends of each flower basket shifting groove 13 are connected to the corresponding first lifting frame cavity 111 and the second lifting frame cavity 121 respectively. That is, the flower basket lifting frame 41 of the flower basket lifting and transverse movement mechanism 40 moves the flower baskets 50 of different sizes or the same size from the first end 11 of the feeding platform 10 to the second end 12 of the feeding platform 10 along the corresponding first lifting frame cavity 111, the flower basket moving groove 13 and the second lifting frame cavity 121. Figure 5A and Figure 5BAs shown, the flower basket lifting and transverse movement mechanism 40 includes a flower basket lifting frame 41, a lifting cylinder 42, a transverse horizontal guide rail 43 and a servo motor 44. The lifting cylinder 42 is installed below the feeding platform 10, and the transverse horizontal guide rail 43 is also fixedly installed below one side of the feeding platform 10. The flower basket lifting frame 41 is also installed on the piston rod of the lifting cylinder 42, and the lifting cylinder 42 is slidably installed on the transverse horizontal guide rail 43 through a cylinder mounting seat 421, and the cylinder mounting seat 421 is also connected to the servo motor 44. That is, driven by the servo motor 44, the cylinder mounting seat 421 can move horizontally along the horizontal guide rail 43, and then drive the lifting cylinder 42 and the flower basket lifting frame 41 installed on the piston rod of the lifting cylinder 42 to move horizontally along the horizontal guide rail 43. Furthermore, the flower basket lifting frame 41 is also driven by the lifting cylinder 42, and driven by the piston rod of the lifting cylinder 42 to perform lifting and lowering movements to realize the lifting and lowering of the flower basket 50.

[0085] In summary, the flower basket lifting frame 41 can be driven by the lifting cylinder 42 to be lifted and lowered in the first lifting frame cavity 111 and the second lifting frame cavity 121, so as to lift a plurality of flower baskets on the first lifting frame cavity 111 at the first end 11 of the feeding platform away from the feeding platform 10. At the same time, the flower basket lifting frame 41 can also be driven by the servo motor 44 to move the plurality of flower baskets lifted on the first lifting frame cavity 111 horizontally to the second lifting frame cavity 121, and finally drive the flower basket lifting frame 41 to descend again to place the above flower baskets in the second lifting frame cavity 121, so that the silicon wafer weighing mechanism 30 can weigh the moved flower baskets 50.

[0086] Continue as Figure 3A to Figure 3BAs shown, the silicon wafer weighing mechanism 30 is arranged at the second end 13 of the feeding platform 10, and has M groups of weighing sensor assemblies and M flower basket pallets 31 of the same number as the corresponding pallet cavity 14, wherein the flower basket pallet 31 is installed in the corresponding pallet cavity 14 for carrying the moved flower basket 50, and a horizontal gap is formed between the flower basket pallet 31 and the feeding platform 10, so that the flower basket pallet 31 can be relatively independent of the feeding platform 10 and fully bear the weight of the flower basket 50 placed on it. In this example, M=2. The second lifting frame cavity 121 is also arranged in the middle of the corresponding flower basket pallet 31, so that when the flower basket lifting frame 41 of the flower basket lifting and lateral movement mechanism 40 lifts the flower basket and lateral moves it to the second lifting frame cavity 121, the flower basket 50 is also located above the flower basket pallet 31. A group of weighing sensor assemblies is installed under each flower basket pallet 31, and each group of weighing sensor assemblies has two weighing sensors 32. The two weighing sensors 32 are symmetrically arranged diagonally under the corresponding flower basket supporting plate 31, and one end of each weighing sensor 32 is fixed under the corresponding flower basket supporting plate 31, and the other end is fixed under the feeding platform 10 near the corresponding supporting plate cavity 14, so as to perform inductive weighing on the flower basket 50 transferred to the flower basket supporting plate 31. Figure 3A As shown, at the four corners of each flower basket supporting plate 31 there are support limit blocks 311 for supporting the four corners of the flower basket 50 , so as to better limit the displaced flower basket 50 on the corresponding flower basket supporting plate 31 .

[0087] Continue as Figure 6 and Figure 7 As shown, another object of the present invention is to provide a counting and weighing method for a compatible feeding system for flower baskets of different sizes, comprising the following steps:

[0088] Preparatory step S1A: the Y-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the first avoidance position at the first end of the feeding platform along the Y-direction to the starting position of the first flower basket;

[0089] Step S1, the silicon wafer counting mechanism identifies and counts the silicon wafers in the plurality of baskets at the first end of the feeding platform, specifically comprising: the counting sensor of the silicon wafer counting mechanism moves from the starting position of the previous basket to the counting position of the current basket, then counts the silicon wafers in the current basket, and finally returns to the starting position of the current basket;

[0090] And step S1 is further divided into the following sub-steps:

[0091] In step S11, the X-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the previous flower basket in the X direction or in the X reverse direction to the starting position of the current flower basket;

[0092] In step S12, the Z-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the current flower basket along the Z-direction to the counting position of the current flower basket;

[0093] In step S13, the counting sensor counts the silicon wafers in the current flower basket;

[0094] In step S14, the Z-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move in the reverse direction of the Z direction from the counting position of the current flower basket to the starting position of the current flower basket;

[0095] Substeps S11 to S14 are repeated until all the flower baskets at the first end of the feeding platform are counted.

[0096] Reset step S1B: the Y-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the last flower basket in the Y-direction reverse direction to the second avoidance position; or the reset step S1B further includes: the X-direction driving member of the silicon wafer counting mechanism continues to drive the counting sensor to continue to move in the X-direction or in the X-direction reverse direction to the first avoidance position.

[0097] The counting position of the current flower basket is the position where the counting sensor and the silicon wafer in the current flower basket are docked and counted;

[0098] The starting position of the current flower basket and the counting position of the current flower basket are in the same Z direction;

[0099] The first avoidance position and the second avoidance position are positions where the counting sensor is located at the first end of the feeding platform and does not interfere with the flower basket lifting and transverse movement mechanism when receiving a plurality of flower baskets at the first end of the feeding platform.

[0100] Step S2: the flower basket lifting and transverse movement mechanism lifts and moves a plurality of flower baskets at the first end of the feeding platform to the second end of the feeding platform.

[0101] Wherein step S2 further comprises the following sub-steps:

[0102] In step S21, the flower basket lifting and transverse movement mechanism moves from the second end of the feeding platform to the first end and is located directly below the flower basket at the first end;

[0103] In step S22, the lifting cylinder of the flower basket lifting and lateral movement mechanism drives the flower basket lifting frame to rise and lift the first end flower basket;

[0104] In step S23, the flower basket lifting and transverse movement mechanism lifts the flower basket and moves the flower basket along the flower basket moving groove from the first end of the feeding platform to the flower basket supporting plate at the second end of the feeding platform.

[0105] Step S3, the silicon wafer weighing mechanism weighs the plurality of flower baskets at the second end of the feeding platform respectively.

[0106] Among them, step S3 specifically includes the lifting cylinder of the flower basket lifting and transverse movement mechanism driving the flower basket lifting frame to descend, and after the flower basket at the second end of the feeding platform is completely separated, the silicon wafer weighing mechanism weighs the flower basket.

[0107] The present invention is described in detail above in conjunction with the embodiments of the accompanying drawings. A person skilled in the art can make various variations of the present invention according to the above description. Therefore, some details in the embodiments should not be construed as limiting the present invention, and the present invention shall be protected by the scope defined by the attached claims.

Claims

1. A counting and weighing method for a compatible feeding system for flower baskets of different sizes, characterized in that The method comprises: Step S1, a silicon wafer counting mechanism identifies and counts the silicon wafers in a plurality of baskets at a first end of a feeding platform; Step S2, the flower basket lifting and transverse movement mechanism lifts and moves a plurality of flower baskets at the first end of the feeding platform to the second end of the feeding platform; Step S3, the silicon wafer weighing mechanism weighs the plurality of flower baskets at the second end of the feeding platform respectively.

2. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 1, characterized in that Step S1 specifically includes: The counting sensor of the silicon wafer counting mechanism moves from the starting position of the previous flower basket to the counting position of the current flower basket, then counts the silicon wafers in the current flower basket, and finally returns to the starting position of the current flower basket; Repeat the above step S1 until all the flower baskets at the first end of the feeding platform are counted.

3. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 2, characterized in that: Step S1 specifically includes: In step S11, the X-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the previous flower basket in the X direction or in the X reverse direction to the starting position of the current flower basket; In step S12, the Z-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the starting position of the current flower basket along the Z-direction to the counting position of the current flower basket; In step S13, the counting sensor counts the silicon wafers in the current flower basket; In step S14, the Z-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move in the reverse direction of the Z direction from the counting position of the current flower basket to the starting position of the current flower basket; Substeps S11 to S14 are repeated until all the flower baskets at the first end of the feeding platform are counted.

4. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 2, characterized in that: Before step S1, a preparatory step S1A is also included: the Y-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move from the first avoidance position at the first end of the feeding platform along the Y-direction to the starting position of the first flower basket; After step S1, a resetting step S1B is also included: the Y-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move in the Y-direction reverse direction from the starting position of the last flower basket to the second avoidance position.

5. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 4, characterized in that: The resetting step S1B further includes: the X-direction driving member of the silicon wafer counting mechanism drives the counting sensor to move along the X-direction or the reverse direction of the X-direction to a first avoidance position.

6. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 2, characterized in that: The counting position of the current flower basket is the position where the counting sensor docks with the silicon wafer in the current flower basket for counting; The starting position of the current flower basket and the counting position of the current flower basket are in the same Z direction.

7. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 4, characterized in that: The first avoidance position and the second avoidance position are positions where the counting sensor is located at the first end of the feeding platform and does not interfere with the flower basket lifting and transverse movement mechanism when receiving a plurality of flower baskets at the first end of the feeding platform.

8. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 1, characterized in that Step S2 includes: In step S21, the flower basket lifting and transverse movement mechanism moves from the second end of the feeding platform to the first end and is located directly below the flower basket at the first end; In step S22, the lifting cylinder of the flower basket lifting and lateral movement mechanism drives the flower basket lifting frame to rise and lift the first end flower basket; In step S23, the flower basket lifting and transverse movement mechanism lifts the flower basket and moves the flower basket along the flower basket moving groove from the first end of the feeding platform to the flower basket supporting plate at the second end of the feeding platform.

9. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 1, characterized in that Step S3 specifically includes: the lifting cylinder of the flower basket lifting and transverse movement mechanism drives the flower basket lifting frame to descend, and after the flower basket at the second end of the feeding platform is completely separated, the silicon wafer weighing mechanism weighs the flower basket.

10. The counting and weighing method for a compatible feeding system for flower baskets of different sizes as claimed in claim 1, characterized in that The flower baskets of different sizes are selected from one or more of a 5-inch flower basket, a 6-inch flower basket, an 8-inch flower basket and a 12-inch flower basket.

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