An online swing device for a magnetic yoke assembly for magnetron sputtering

Abstract

The invention discloses an online swing device of a yoke assembly for magnetron sputtering, wherein the yoke assembly is connected to a shell assembly, the shell assembly and the yoke assembly are located in a target material, and include a swing assembly; a first terminal assembly and a second terminal assembly are respectively arranged at two ends of the shell assembly and are coaxial with the swing axis of a magnetic rod, and the shell assembly is rotatably connected to a frame through the first terminal assembly and the second terminal assembly; the yoke assembly is connected to the shell assembly, and the swing assembly drives the yoke assembly to swing along its rotation axis, and during the forward or reverse rotation of the swing motor, the shell body will rotate in the opposite direction relative to the axis of the joint body, and by controlling the rotation angle and the rotation amplitude, the magnetic rod is driven to swing along its rotation axis, thereby realizing the swing of the yoke assembly, so as to achieve a more uniform distribution of the magnetic field of the curved surface product and improve the uniformity of the product coating surface.

Description

Technical Field

[0001] The invention belongs to the technical field of magnetron sputtering, and in particular relates to an online swinging device of a magnetic yoke assembly for magnetron sputtering. Background Art

[0002] Physical vapor deposition using sputtering has become a standard technique for customizing the properties of, for example, glass sheets or other rigid or flexible materials. "Sputtering" refers to the ballistic ejection of atoms of the coating material from a sputtering target using positively charged ions, which are accelerated by an electric field directed toward the negatively charged sputtering target (usually argon ions). Positive ions are formed by impact ionization in the low-pressure gas phase. The ejected atoms impact the substrate to be coated, where a dense, well-adhered coating is formed. The disadvantage is that the magnetron must be turned on, so the vacuum must be removed to allow adjustment, and the vacuum must be reapplied after the adjustment is completed. This is very time-consuming. One of the process problems faced is that a magnetic field generator must be included in the sputtering target. The magnetic field generator, which is oriented to point to the substrate to be coated, is usually kept stationary while the cylindrical sputtering target rotates in front of it. High-performance permanent magnets based on iron-neodymium-boron (Fe-Nd-B) alloys or cobalt-samarium (Co-Sm) alloys are used to generate the magnetic field. Because the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic induction intensity of this component (in Tesla) usually decreases at least with the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the sputtering target surface. The distance between the sputtering target surface and the magnetic field generator must therefore be well controlled, otherwise the plasma will show local intensity variations, which in turn can lead to uneven coating profiles on the substrate. Nowadays, with the advancement of current industrial design and the pursuit of more product differentiation, the demand for curved and cambered products is gradually increasing. Since the position of the magnetic field generator relative to the sputtering target surface is very sensitive, in order to make the surfaces of curved and cambered products obtain uniform coatings, it is necessary to obtain uniform magnetic field distribution on the entire cambered surface. Summary of the invention

[0003] The purpose of the present invention is to provide an online oscillating device for a yoke assembly for magnetron sputtering, which is intended to realize the swinging of the magnetic rod within a certain range and a certain amplitude, so as to solve the problem that the surface of curved and arc-shaped products can obtain a uniform magnetic field distribution, and then obtain a uniform coating.

[0004] To solve the above technical problems, the purpose of the present invention is achieved as follows: An online swinging device of a yoke assembly for magnetron sputtering, wherein the yoke assembly is connected to a shell assembly, the shell assembly and the yoke assembly are located in a target material, and include a swinging assembly; the first terminal assembly and the second terminal assembly are respectively arranged at two ends of the shell assembly and are coaxial with the swinging axis of the magnetic rod, the shell assembly is rotatably connected to a frame via the first terminal assembly and the second terminal assembly; the yoke assembly is connected to the shell assembly, and the swinging assembly drives the yoke assembly to swing along its rotation axis.

[0005] On the basis of the above scheme and as a preferred scheme of the above scheme: the swing component includes a swing motor, the output end of the swing motor is coaxial with the axis of the first terminal component, the swing motor is fixedly mounted on the housing component, and the output end of the swing motor is restricted in rotation by the frame.

[0006] On the basis of the above scheme and as a preferred scheme of the above scheme: the first terminal component includes a joint body, a pin head interface is provided at the front end of the joint body, and the output end of the swing motor is transmission-connected to the joint body; it also includes a driving component, the driving component includes a spacer sleeve, the spacer sleeve is fixedly connected to the frame, and a central support fixing pin is provided on the spacer sleeve, and the central support fixing pin is inserted into the pin head interface.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: it also includes a fixing pin, which is fixed to the rear end of the joint body and inserted into the flange hole of the output flange of the swing assembly.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: the driving shaft of the swing component is a hollow structure and extends to the rear end of the swing motor to form a cable channel c at the front and rear ends of the swing motor.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: the first terminal assembly also includes a contact assembly including a first contact, a second contact and a contact assembly, the contact assembly includes a plurality of movable contacts arranged on the end surface of the first contact and a plurality of static contacts arranged on the end surface of the second contact; an elastic assembly presses the first contact toward the second contact to keep the first contact in contact with the second contact; the cable channel c is connected to the rear end of the second contact.

[0010] Compared with the prior art, the present invention has the following outstanding and beneficial technical effects: when the output flange of the swing assembly rotates, the pin head interface will be driven to rotate with it. However, since the spacer sleeve will limit the rotation of the joint body through the cooperation of the central support fixing pin and the pin head interface, the reaction force generated by the joint body will act on the swing motor through the output flange. Since the swing motor is fixed to the outer shell through the motor fixing seat, the outer shell will be driven to twist around the axis of the output flange under the action of the reaction force, thereby driving the entire magnetic rod to rotate, that is, achieving swing. Then, during the forward or reverse rotation of the swing motor, the outer shell will rotate in the opposite direction relative to the axis of the joint body. By controlling the rotation angle and the rotation amplitude, the magnetic rod can be driven to swing along its rotation axis, thereby achieving the swing of the yoke assembly, so as to achieve a more uniform distribution of the magnetic field of the curved surface product and improve the uniformity of the product coating surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is the overall structural front view of the present invention; Figure 2 It is a right view of the overall structure of the present invention; Figure 3 It is a left view of the overall structure of the present invention; Figure 4 It is the overall structure disassembly diagram of the present invention; Figure 5 It is a schematic diagram of the installation structure of the internal components of this housing assembly; Figure 6 Schematic diagram of the target material installation status; Figure 7 yes Figure 6 A partial enlarged view of the middle part; Figure 8 is a disassembled diagram of the first terminal assembly; Fig. 9 is a schematic diagram of the swing assembly structure; Fig.10 It is a schematic diagram of the fixed column structure; Fig.11 It is a cross-sectional view of the swing assembly structure; Fig.12 yes Fig.11 A partial enlarged view of point Ⅻ in the middle. DETAILED DESCRIPTION

[0012] In order to make the purpose, technical solution and advantages of this application clearer, the technical solution in the embodiment will be clearly and completely described below in conjunction with the drawings in the embodiment. Obviously, the described embodiment is only a part of the embodiment of this application, not all embodiments. Based on the given embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0013] In the description of the present application, it should be understood that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0014] In the description of this application, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0015] Combination Figure 1-12As shown, the present invention discloses an online swinging adjustable magnetic bar for magnetron sputtering, including a shell component 10, a yoke component 20 and an adjustment component 50; wherein the shell component 10 includes a shell body 11 and an upper cover plate group 12, the shell body 11 is hollow to form a receiving chamber 111, and an opening is provided at its upper end, the opening connects the receiving chamber 111 with the outside; the upper cover plate group 12 includes a plurality of upper cover plates, and after the adjustment component 50 and other components are installed in the receiving chamber, the upper cover plate is fixedly installed at the opening of the shell body 11, the receiving chamber 111 is closed, and the opening is closed by the upper cover plate group. By providing the upper opening, it is convenient to install the adjustment component, energy storage component, swing component, etc. in the receiving chamber, and the opening is closed by the upper cover plate group, so that it is isolated from the outside during the magnetron sputtering process, and water or other media are prevented from entering the receiving chamber, causing equipment damage. The yoke assembly 20 is located below the housing assembly 10; it includes a support plate 21 and a magnetic rod body, and the magnetic rod body is fixedly mounted on the support plate 21; of course, a magnet accommodating cavity can also be provided on the support plate 21, and a plurality of magnets are arranged in the magnet accommodating cavity according to the magnetic field requirements, and then the magnet accommodating cavity is closed to form the yoke assembly in sequence. The adjustment assembly 50 has multiple and independently controlled components, which are arranged along the length direction of the yoke assembly 20 and are arranged in the accommodating chamber 111; the output end of each adjustment assembly 50 reciprocates vertically to the yoke assembly 20, and all pass through the side wall of the accommodating chamber 111 to the side where the yoke assembly 20 is located, and are hinged with the yoke assembly 20, and the yoke assembly is partially pushed outward or pulled inward through the output end of the adjustment assembly 50, so that the yoke assembly 20 will be elastically deformed within its elastic deformation range or within the range that the strength and shape can withstand. Since the magnetic field component parallel to the surface of the sputtering target determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic induction intensity of this component (in Tesla) usually decreases at least with the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the surface of the sputtering target. In the actual test process, the deformation of the magnetic bar within 4mm can fully meet the actual use requirements, thereby driving the yoke assembly 20 to partially or completely change the distance from the sputtering target surface. By setting a plurality of adjustment components, the adjustment component and the yoke component have a plurality of connection points, and the output end of the adjustment component is actuated, driving the yoke assembly at the corresponding point to partially change the distance to the sputtering target surface, thereby adjusting the local magnetic field strength, and achieving real-time online control of the coating thickness on the sputtering target surface, so that the coating thickness of the coating product tends to be consistent, which is used to improve the quality of the coating product without removing the vacuum, and can significantly improve the production efficiency.

[0016] For one application scenario of magnetron sputtering, the yoke assembly needs to swing within a certain range so that the magnetic field of magnetron sputtering can cover a larger range. At the same time, the position of the magnetic rod can be adjusted according to the actual coating thickness requirements, thereby adjusting the distribution of the magnetic field and changing the coating distribution. Then, in this embodiment, in order to realize the swing of the magnetic rod, a swing assembly 80, a driving assembly 90, a first terminal assembly 30 and a second terminal assembly 40 are arranged in the accommodating chamber 111; the first terminal assembly 30 and the second terminal assembly 40 are respectively arranged at the two ends of the housing assembly 10. See for details. Figure 9-12 As shown, the swing assembly 80 in this embodiment includes a swing motor 81, an output flange 82 and a motor fixing seat 83. The output flange 82 is fixedly mounted on the output shaft of the swing motor 81, and a flange hole is opened on the output flange 82. The output flange 82 is coaxial with the axis of the first terminal assembly 30. The motor fixing seat 83 fixes the swing motor 81 on the outer shell 10. The driving assembly 90 is fixedly mounted on the machine body, and includes a driving end 91, a spacer sleeve 92, a protective pipe 93, a driving member 94 and a transmission belt 95. The driving end 91 is fixedly connected to one end of the driving member 94 adjacent to the magnetic rod. The spacer sleeve 92 is inserted into the driving member 94, and the protective pipe 93 is inserted into the spacer sleeve 92. Preferably, a support block 933 is provided between the protective pipe 93 and the inner hole of the spacer sleeve 92. Both ends of the target 100 are clamped on the driving end 91, and a sealing ring 911 is provided between the driving end 91 and the target 100, so that a coolant channel a is formed between the target 100, the driving end 91 and the outer shell 11 of the magnetic rod. A fluid channel is provided on the support plate 31, so that a coolant channel b is formed between the fluid channel, the spacer sleeve 92 and the protective pipe 93. For details, see Figure 6 The coolant flows in the direction indicated by the arrow in the middle. Finally, the coolant enters the coolant channel a through the interface provided on the driving component 90 from the external pipeline, and then flows back to the external cooling device through the coolant channel b via another reflux interface on the driving component 90, so as to cool the target material 100. The end of the protective pipe 93 near the magnetic rod is provided with a terminal 931. Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7As shown, the first terminal assembly 30 in this embodiment includes a first mounting plate 31, a fixing pin 32, an outer sleeve 33, a connector body 34, a bearing 36 and a sealing assembly 37. The connector body 34 is hollow and is sleeved on the outside of the outer sleeve 33. The end head 931 extends into the outer sleeve 33. The contact assembly 35 is located in the outer sleeve 33, wherein sealing rings are provided between the outer sleeve 33 and the connector body 34 and between the end head 931 and the inner wall of the outer sleeve 33. Of course, considering the positioning of the sealing ring, in this embodiment, annular grooves are preferably provided on the inner wall of the connector body 34 and the inner wall of the outer sleeve 33, and the O-ring is embedded in the annular groove; thereby, multiple seals are formed between the connector body 34, the outer sleeve 33 and the end head 931 to prevent water vapor from entering the interior of the outer shell during use. In order to realize the swing assembly driving the magnetic rod to swing, the fixing pin 32 in this embodiment is fixedly arranged at the rear end of the joint body 34, and the fixing pin 32 is inserted into the flange hole of the output flange 82 of the swing assembly 80. The joint body 34 is provided with a sealing assembly 36 and a bearing 37 on the rear end of the joint body 34, so that the outer shell can rotate relative to the joint body 34 and maintain a reliable seal; and the front end of the joint body 34 is provided with a pin head interface 341, and the spacer sleeve 92 is provided with a central support fixing pin 921. After the first terminal assembly 30 is engaged with the socket of the driving assembly 90, the central support fixing pin 921 is inserted into the pin head interface 341. Therefore, due to the fixation of the spacer sleeve 92, the swing motor 81 is fixed to the outer shell through the motor fixing seat 83, so when the output flange 82 of the swing assembly 80 rotates When the swing motor 81 is rotated, the pin head interface 341 will be driven to rotate with it. However, since the spacer sleeve 92 will limit the rotation of the joint body 34 through the cooperation of the central support fixing pin 921 and the pin head interface 341, the reaction force generated by the joint body 34 will act on the swing motor 81 through the output flange 82. Since the swing motor 81 is fixed to the outer shell through the motor fixing seat 83, the outer shell will be driven to twist around the axis of the output flange 82 under the action of the reaction force, thereby driving the entire magnetic rod to rotate, that is, achieving swing. Then, during the forward or reverse rotation of the swing motor 81, the outer shell will rotate in the opposite direction relative to the axis of the joint body 34. By controlling the rotation angle and the rotation amplitude, the magnetic rod can be driven to swing along its rotation axis.

[0017] See Figure 6-7As shown, the present embodiment further includes a contact assembly 35, the contact assembly 35 includes a first contact 351, a second contact 352 and a contact assembly 353, the contact assembly 353 includes a plurality of movable contacts 353a arranged on the end surface of the first contact 351 and a plurality of stationary contacts 353b arranged on the end surface of the second contact 352. A first contact accommodating cavity 9311 is provided on the end 931, the first contact 351 is movably arranged in the first contact accommodating cavity 9311, the movable contact 353a of the first contact 351 and the stationary contact 353b of the second contact 352 correspond to each other and contact each other; a spring 354 is arranged in the first contact accommodating cavity 9311, the spring 354 contacts one end of the first contact 351 away from the movable contact 353a, keeps the first contact 351 pressed toward the direction of the second contact 352, so that the movable contact 353a and the stationary contact 353b keep in contact. The static contact 353b is connected to the main control component 60 through a wire; the moving contact 353a is connected to the external power supply through a wire 110; it should be noted that each moving contact 353a preferably includes a contact terminal and a terminal compression spring, and a receiving hole is opened on the end face of the first contact 351, and the terminal compression spring and the contact terminal are received in the receiving hole. Of course, it is preferred that the static contact 353b on the second contact 352 is a conductive metal material distributed on the end face of the second contact 352, which is annular or fan-shaped and has a planar structure and is distributed on the end face of the second contact 352. It can be a sheet of metal fixed on the second contact 352, or it can be embedded in the end face of the second contact 352 and flush with the end face of the second contact 352. During the use of the entire magnetron sputtering system, there will be rotation and a certain degree of overall deformation. Through such a structural setting, the first contact 351 and the second contact 352 can always maintain good contact through the elastic push of the terminal compression spring on the contact terminal, thereby ensuring that it can supply power stably, thereby improving the operating stability of the entire device.

[0018] Of course, in order to control the swing component 80 and the adjustment component 50 and process and execute the external control signal or feed back the execution result to the host computer, this embodiment also includes a main control component 60 arranged in the accommodating chamber 111; in this embodiment, the first terminal component 30 is preferably a water inlet power supply connector component, and the second terminal component 40 is an optical fiber communication connector component; the first terminal component 30 connects the external power supply to the main control component 60, and the control signal is transmitted to the main control component 60 via the second terminal component 40 and the internal optical fiber, and the main control component 60 analyzes and processes the signal to control the swing component 80 and the adjustment component 50 to make adaptive actions. Figure 4As shown, the second terminal assembly 40 includes a second mounting plate, a second connector body and an optical fiber assembly 41. The second connector body is fixedly mounted on the second mounting plate. The optical fiber assembly can be a photoelectric conversion assembly or an optical path guiding assembly, which is used to transmit the optical signal to the main control assembly 60 in time, which is fixedly mounted in the second connector body. The second mounting plate is fixedly mounted on one end of the outer shell. Of course, the second mounting plate and or the second connector body and the mounting position of the outer shell have necessary seals to make them completely sealed after installation. At the same time, the optical fiber assembly and the second connector body also have necessary seals. Since the entire magnetic rod is in a state of motion, the second terminal assembly is coaxial with the swing axis of the magnetic rod, which means that the external optical fiber communication end and the signal receiving end of the second terminal assembly are also located on the same axis. Therefore, no matter how the magnetic rod swings, the optical signal can be reliably transmitted, and compared with the traditional cable communication method, it avoids the problem of signal failure caused by cable twisting or fatigue damage during the activity of the magnetic rod. Therefore, after the optical signal transmitted to the main control component 60 through the second terminal component 40 is analyzed and processed by the main control component 60, the control and adjustment component 50 drives the magnetic yoke component at the corresponding point to locally change the distance to the sputtering target surface to get closer or farther away, thereby adjusting the local magnetic field strength to achieve real-time online control of the coating thickness on the sputtering target surface; it also includes controlling the swing component 80 so that it drives the magnetic yoke assembly to swing a certain angle according to the required angle to achieve adjustment of the magnetic field distribution range.

[0019] Of course, in the present embodiment, in order to realize communication with the main control component 60 more reliably and in multiple modes, the present embodiment further realizes charging by adaptively increasing the number and size of the moving contact 353a of the first contact 351 and the static contact 353b of the second contact 352 and adjusting the size, and adaptively selecting the size of the first contact 351 and the second contact 352, and on the one hand, realizing charging, and on the other hand, realizing data communication through the RS485 communication interface through the increased contacts, and then realizing water and electricity through the first terminal component 30 to supply power and charge the inside of the magnetic rod, realizing RS485 data communication, realizing data communication with the main control component 60 inside the adjustable magnetic rod, and then realizing the communication control of the adjustable magnetic rod by the second terminal component 40 and the first terminal component 30 in a two-choice or synchronous communication mode, thereby realizing reliable control of the magnetic rod, and at the same time, it can also improve the compatibility of the data and communication modes of the adjustable magnetic rod.

[0020] It also includes an energy storage component 70, which supplies power to the swing component 80, the main control component 60 and the adjustment component 50; the energy storage component 70 is arranged in the accommodating chamber 111. Since the entire adjustable magnetic rod is located in the cylindrical target material during use, the volume and size of the adjustable magnetic rod are greatly limited, so the installation of the energy storage component 70 also puts forward higher requirements. If a whole lithium battery is used for installation, it is obviously difficult to achieve; for this reason, the energy storage component 70 is preferably a plurality of lithium battery packs in this embodiment, which are arranged between adjacent adjustment components 50, and of course, can also be in other vacant spaces in the accommodating space. Through this small volume dispersion method, the design requirements of energy storage are met, and the requirements for installation space are reduced. The energy storage component 70 is connected to the main control component 60, and on the one hand, it supplies power to the main control component 60. Therefore, through the energy storage component built into the shell component, it can maintain continuous and stable power supply to the adjustment component and the swing component, ensuring the stability and reliability of the operation of the entire device. On the other hand, since the swing component and the adjustment component consume the power of the energy storage component during the magnetron sputtering process, if the power is too low, it may be difficult to maintain reliable operation. Therefore, during the operation of magnetron sputtering and / or the interval of magnetron sputtering, the external power supply can supply power to the main control component 60 through the first terminal component 30, and can also charge the energy storage component 70 through the main control component 60, and perform battery management and protection for its charging and discharging. The energy storage component 70 is continuously or intermittently charged by the external power supply, and its power is replenished in time, so that the energy storage component 70 is stable within the power range required by the design, ensuring the smooth operation of the entire system.

[0021] Therefore, by setting up the energy storage component 70, the main control component 60, the first terminal component 30 and the second terminal component 40, the energy storage component 70 provides electric energy to the swing component and the adjustment component 60, the energy storage component 70 is charged through the first terminal component 30 and the main control component 60, and the first terminal component 30 and / or the second terminal component 40 realize optical fiber communication with the main control component 60, thereby improving the reliability and stability of the entire magnetic rod control.

[0022] In addition, the driving shaft 821 of the swing assembly 80 is a hollow structure and extends toward the rear end 811 of the swing motor 81 to form a cable channel c at the front and rear ends of the swing motor 81, and the cable channel c is connected to the rear end of the second contact 352; thus, the cable led out from the second contact 352 of the first terminal assembly 30 can be directly inserted into the outer shell assembly through the cable channel c, so that it can be connected to the main control assembly 60 and / or the energy storage assembly 70 with the shortest path, thereby avoiding the problem of long cable paths, large energy and signal losses on the cables, and susceptibility to interference caused by the need for the cables to bypass various devices through the gaps. At the same time, it can also better protect the cables, avoid the problem of cable damage that may be caused by the movement of various active parts in the outer shell assembly, and reduce the difficulty of wiring.

[0023] The above embodiments are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An online oscillating device for a yoke assembly for magnetron sputtering, wherein the yoke assembly (20) is connected to a housing assembly (10), the housing assembly (10) and the yoke assembly (20) are located inside a target material (100), characterized in that: The invention comprises a swing assembly (80) fixedly arranged in the housing assembly (10), wherein the housing assembly (10) is rotatably connected to a frame; the yoke assembly (20) is arranged outside the housing assembly (10), and the swing assembly (80) drives the housing assembly (10) to swing along its rotation axis, thereby driving the yoke assembly (20) to swing along the rotation axis of the housing assembly (10).

2. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 1, characterized in that: The swing assembly (80) comprises a swing motor (81), the swing motor (81) being fixedly mounted on the housing assembly (10), and the output end of the swing motor (81) being restricted in rotation by the frame.

3. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 2, characterized in that: The invention also comprises a first terminal assembly (30), wherein the first terminal assembly (30) is fixedly mounted on one end of the housing assembly (10) and is coaxial with the rotation axis thereof; the housing assembly (10) is movably connected to the frame via the first terminal assembly (30); the output end of the swing motor (81) is coaxial with the axis of the first terminal assembly (30), and the output end of the swing motor (81) is connected to the first terminal assembly (30), and is connected to the frame via the first terminal assembly (30), thereby limiting the rotation of the output end of the swing motor (81).

4. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 3, characterized in that: The first terminal assembly (30) comprises a joint body (34), and the output end of the swing motor (81) is drivingly connected to the joint body (34); the joint body (34) is connected to the frame.

5. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 4, characterized in that: It also comprises a fixing pin (32), the fixing pin (32) being fixedly arranged at the rear end of the joint body (34), and the fixing pin (32) being inserted into a flange hole of an output flange (82) of the swing assembly (80).

6. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 4, characterized in that: The invention also comprises a driving assembly (90), wherein the driving assembly (90) comprises a spacer sleeve (92), wherein the spacer sleeve (92) is fixedly connected to the frame, and a central supporting fixing pin (921) is provided on the spacer sleeve (92), and a pin head interface (341) is provided at the front end of the joint body (34), and the central supporting fixing pin (921) is inserted into the pin head interface (341).

7. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 3, characterized in that: The driving shaft (821) of the swing assembly (80) is a hollow structure and extends toward the rear end (811) of the swing motor (81) to form a cable channel c at the front and rear ends of the swing motor (81).

8. The on-line swing device of a magnetic yoke assembly for magnetron sputtering according to claim 7, characterized in that: The first terminal assembly (30) further comprises a contact assembly (35) comprising a first contact (351), a second contact (352) and a contact assembly (353); the contact assembly (353) comprising a plurality of movable contacts (353a) arranged on an end surface of the first contact (351) and a plurality of stationary contacts (352) arranged on an end surface of the second contact (352); an elastic assembly presses the first contact (351) toward the second contact (352) so that the first contact (351) and the second contact (352) maintain contact; and the cable channel c is connected to the rear end of the second contact (352).

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