Plug-in valve and vacuum coating machine using the same

Abstract

The present application relates to a plug valve and a vacuum coating machine using the same, the plug valve comprising a valve cabin and a moving frame, a valve plate, a transmission assembly and a V-shaped guide rail arranged in the valve cabin; the valve cabin is connected with a coating cavity orifice on one side, the V-shaped guide rail is laid on the bottom of the valve cabin and extends from one side to the other side, the valve plate is suspended on the moving frame through the fulcrum in the middle of the two sides, the bottom of the moving frame is installed on the V-shaped guide rail through V-shaped rollers, the transmission assembly is driven by a motor and arranged in parallel with the V-shaped guide rail and connected with the moving frame through a flat key, the moving frame and the valve plate are inclined backward as a whole during the moving process, the upper end of the valve plate is supported on a limiting strip on the upper part of the rear side of the valve cabin through rollers, and when the moving frame and the valve plate move to the closed position, the valve plate is pressed and combined on the coating cavity orifice to realize sealing or separated from the orifice to return to the original position through a cylinder. The present application provides a solution for sealing the orifice of the vacuum coating machine, which not only has a simple sealing structure, but also has high sealing reliability.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of vacuum coating machine, in particular to a multi-chamber vacuum coating machine. BACKGROUND

[0002] The multi-chamber vacuum coating machine refers to a coating machine with two or more vacuum chambers connected in series. During the coating process, each chamber needs to be isolated by a valve plate. The present application aims to provide a solution for such valve plate. SUMMARY

[0003] The purpose of the present application is to provide a plug-in valve for sealing the chamber opening of a vacuum coating machine.

[0004] The purpose of the present application is achieved by the following technical solution: a plug-in valve comprising a valve chamber, a moving frame, a valve plate, a transmission assembly and a V-shaped guide rail arranged therein.

[0005] One side of the valve chamber is connected to the chamber opening of the coating chamber. The V-shaped guide rail is laid on the bottom of the valve chamber, extending from one side to the other. The valve plate is suspended by being supported on the moving frame through the fulcrum in the middle of its two sides. The bottom of the moving frame is installed on the V-shaped guide rail through V-shaped rollers. The transmission assembly is driven by a motor and arranged parallel to the V-shaped guide rail, and connected to the moving frame through a flat key to drive the moving frame and the valve plate to move between the two sides of the valve chamber and switch between the open and closed positions. During the movement, the moving frame and the valve plate are inclined backward as a whole, and the upper end of the valve plate rests on a limiting strip on the upper part of the rear side of the valve chamber through rollers. The valve chamber is distributed with several cylinders from top to bottom on both sides of the chamber opening of the coating chamber. The two sides of the valve plate are respectively distributed with several pressure ears. When the moving frame and the valve plate move to the closed position, the cylinders and the pressure ears form a matching structure one by one, so that the cylinders act to push or pull the valve plate to press it against the chamber opening of the coating chamber to achieve sealing or separate from the chamber opening to return to the original position.

[0006] When the plug-in valve is used for sealing and isolation between the chamber openings of two coating chambers connected in series in a multi-chamber vacuum coating machine, the valve chamber should be a closed structure, one side of which is inserted into the chamber openings of the two coating chambers to connect them in series.

[0007] The structure of the valve plate supported on the moving frame is as follows:

[0008] The moving frame is in the shape of a "Fang" character with the opening facing upwards. The upper ends of the vertical frames on both sides are respectively provided with a protrusion. The valve plate is located between the two vertical frames of the moving frame and is hung on the protrusions on both sides of the vertical frames through the U-shaped hooks with downward openings in the middle of its two sides. The contact surfaces of the protrusions and the hooks are rounded, and the fit between them has a certain allowance, so that the valve plate can swing forward and backward within a certain amplitude.

[0009] The movable frame is mounted on the V-shaped guide rail via V-shaped rollers mounted on the front of the bottom of the movable frame so that the center of gravity of the movable frame and the valve plate is moved backward.

[0010] The V-shaped guide rail is convex in the middle, and the corresponding V-shaped roller is concave in the middle.

[0011] The transmission assembly is a sprocket chain transmission assembly.

[0012] As a preferred solution, the valve plate has at least one pressure ear on each side of the upper portion and the matching structure with the cylinder is as follows:

[0013] The pressure ear is provided with a bayonet on the side facing the closing movement direction of the valve plate, and the front end of the output shaft of the cylinder forms an "I"-shaped latch. When the valve plate moves to the closed position, the bayonet of the pressure ear is just latched into the middle of the "I"-shaped latch of the cylinder, so that the cylinder can both push and pull the valve plate.

[0014] When the valve plate of the present invention needs to be opened after performing the closing action, it is necessary to first separate the valve plate from the coating cavity opening and return it to its original position to avoid wearing the sealing ring of the cavity opening. Therefore, the matching structure of the cylinder and the pressure ear in the present invention is required to be able to drive the valve plate to move in both the forward and backward directions.

[0015] Except for the two pressure ears on both sides of the upper part of the valve plate, the remaining ear pressures form a matching structure by means of the upper baffle and the cylinder output shaft that penetrates into the valve cabin from the rear side when the valve plate moves to the closed position. Although this structure can only push the valve plate to press it into the cavity mouth of the coating cavity, the advantage of this structure is that it is more convenient to process and debug.

[0016] When designing the matching structure of the above-mentioned pressure ear and the cylinder, the pressure ear on the side facing the closing movement direction of the valve plate can be designed to protrude less from the valve plate, and the cylinder matching it can be extended more. Correspondingly, the pressure ear on the other side of the valve plate can protrude more from the valve plate, and the cylinder matching it can be extended less. This can avoid the situation where the pressure ear and the cylinder conflict during the movement of the valve plate.

[0017] The present invention also provides a vacuum coating machine using the above-mentioned plug-in valve.

[0018] Beneficial effects:

[0019] The present invention provides a solution for sealing the cavity opening of a vacuum coating machine, particularly for isolating and sealing between two chambers in a multi-chamber vacuum coating machine connected in series. The solution not only has a simple sealing structure but also has high sealing reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 、 2 A top view of a gate valve according to a preferred embodiment of the present invention;

[0021] Figures 3-5 The side view of the flap valve according to the preferred embodiment of the present invention;

[0022] Figure 6 The rear view of the flap valve according to the preferred embodiment of the present invention;

[0023] Figures 7-9 It is a schematic diagram of the state change when the moving frame and the valve plate perform the closing action under the action of the air cylinder. Detailed implementation manners

[0024] The flap valve of this embodiment is used for sealing and isolating between the openings of two coating chambers connected in series as shown in Figures 1-6 . It includes a valve chamber 1 and a moving frame 21, a valve plate 22, a transmission component 3 and a V-shaped guide rail 4 arranged therein. The valve chamber 1 is a closed structure, and the openings of two coating chambers a and b are connected in series through its right side and are respectively butted with them. The V-shaped guide rail 4 is laid at the bottom of the valve chamber 1 and extends from the left side to the right side. The moving frame 21 is in an inverted U shape with an upward opening, and a convex block 211 is provided at the upper end of each of the vertical frames on both sides. The valve plate 22 is located between the two vertical frames of the moving frame 21 and is suspended by U-shaped hooks 221 with downward openings in the middle of both sides thereof hanging on the convex blocks 211 on both sides. The contact surface between the convex block 211 and the hook 221 is rounded, and there is a certain margin in the fit between the two, so that the valve plate 22 can swing forward and backward within a certain range. The front sides of both sides of the bottom of the moving frame 21 are respectively installed on the V-shaped guide rail 4 through a V-shaped roller 212. This method makes the overall center of gravity of the moving frame 21 and the valve plate 22 lean backward. The transmission component 3 adopts a sprocket chain transmission component, which is driven by a motor 5 and is arranged parallel to the V-shaped guide rail 4 behind it, and is connected to the moving frame 21 through a flat key 6. The flat key 6 here is composed of two toothed plates buckled up and down, which allows the transmission component 3 to drive the moving frame 21 and the valve plate 22 thereon to move between the left and right sides of the valve chamber 1, so that when switching between the open and closed positions, it allows them to have a certain displacement in the front and rear directions. During the movement, the moving frame 21 and the valve plate 22 are tilted backward as a whole, and the upper end of the valve plate 22 leans on a limiting strip 11 at the upper rear part of the valve chamber 1 through a roller 222 at its middle position. A number of air cylinders 7 are respectively distributed from top to bottom at the positions of both sides of the valve chamber 1 at the coating chamber opening, and a number of pressure ears 223 are respectively distributed corresponding to both sides of the valve plate 22. When the moving frame 21 and the valve plate 22 thereon move to the right closing position of the valve chamber 1, the air cylinders 7 and the pressure ears 223 just form a matching structure one by one, so that with the action of the air cylinders 7, the valve plate 22 is pressed against the front coating chamber opening ( Figure 1 , 2 where the reaction in is the upper coating chamber opening) to achieve sealing or retreat from the opening and return to the original position (make the valve plate 22 lean on the limiting strip 11 again).

[0025] For the matching structure of the cylinder 7 and the pressing ear 223, various design schemes can be formed. In this embodiment, Figure 1 、 2 As shown, the pressure ears 223 on both sides of the valve plate 22 are protruded backwards, and the whole is a protruding baffle, as shown in FIG. Figures 3-5 As shown. Figure 1 、 2 As shown, the output shaft of the cylinder 7 penetrates into the interior of the valve cabin 1 from the rear side of the valve cabin 1. When the valve plate 22 moves to the closed position, that is, Figure 2 Position, the output shaft of the cylinder 7 is just opposite to the baffle to form a structure that is easy to push and fit. The two pressing ears 223 on both sides of the upper part of the valve plate 22 are slightly different from the other pressing ears 223. The right side of the baffle of the two pressing ears 223 on both sides of the upper part of the valve plate 22 is respectively formed with a bayonet c, as shown in FIG. Figure 2 As shown, the output shaft design of the cylinder 7 that matches the two pressing ears 223 is also slightly special compared with other cylinders 7. The front end of the output shaft forms an "I"-shaped positioning, as shown in FIG. Figure 1 、 2 As shown, when the valve plate 22 moves to the closed position, the bayonet c of the two pressing ears 223 on both sides of the upper part of the valve plate 22 is just locked into the middle of the "I"-shaped position of the corresponding cylinder, thereby forming a structure that is convenient for pushing and pulling the valve plate 22.

[0026] In this embodiment, when the valve plate 22 needs to be opened after performing the closing action, it is necessary to first separate the valve plate 22 from the cavity opening a of the front coating cavity and lean back on the limit strip 11 to avoid wearing the sealing ring on the cavity opening a during the movement of the valve plate 22. Therefore, the two pressing ears 223 on the upper side and the cylinder 7 adopt a push-pull matching structure, while a simplified push-matching structure is adopted at other positions. This method can simplify the debugging between the cylinder 7 and the pressing ears 223 and their processing process.

[0027] In this embodiment, the cylinder 7 is mounted on the rear side of the valve compartment 1. In other embodiments, the cylinder 7 can also be mounted on the front side of the valve compartment 1. In this case, the coupling structure between the cylinder 7 and the pressure lug 223 needs to achieve a push-pull motion. Therefore, the pressure lug and cylinder can adopt the aforementioned bayonet and "I"-shaped locking structure. In this case, the right pressure lug of the valve plate 22 can be designed to be flush with the valve plate 22, while the left pressure lug can protrude forward.

[0028] from Figure 1 、 Figure 2It can also be seen that the two sides of the embodiment protrude the valve plate 22 to different degrees, and the right side of the valve plate 22 is obviously less protruding, and the left side is more protruding. Correspondingly, it can also be seen that the extension amount of the cylinder 7 matched with the right side of the pressure ear 223 is large, and the extension amount of the cylinder 7 matched with the left side of the pressure ear 223 is small. In this way, the problem that the right side of the pressure ear 223 of the valve plate 22 collides with the left side of the cylinder 7 of the cavity a during the movement of the valve plate 22 from left to right can be avoided. Of course, this is a solution under the condition that the positions of the two sides of the pressure ear 223 are symmetrical. In fact, the problem can also be solved by misaligning the installation positions of the two sides of the pressure ear 223 in the up-down direction. Even, the problem can be solved by limiting the position of the right side of the pressure ear 223 of the valve plate 22 and the left side of the cylinder 7 of the cavity a, that is, the right side of the pressure ear 223 of the valve plate 22 is always kept to the right side of the cylinder 7 of the cavity a, as shown in Figure 1 .

[0029] The action process of the plug-in valve of the embodiment is briefly introduced as follows:

[0030] 1) The motor 5 drives the chain wheel to rotate through the connecting shaft, the chain wheel drives the chain to move, and the chain drives the moving frame 21 and the valve plate 22 thereon to move together along the V-shaped guide rail 4 from the opening position on the left side of the valve chamber 1 to the closing position on the right side, and the top roller 222 of the valve plate 22 relies on the limiting strip 11 on the upper rear part of the valve chamber 1. The moving frame 21 and the valve plate 22 in this stage are controlled by the motor 5.

[0031] 2) After the moving frame 21 and the valve plate 22 thereon are controlled by the motor 5 to move to the closing position on the right side of the valve chamber 1, the pressure ears 223 on both sides of the valve plate 22 form a matching structure with the connecting heads on the front end of the output shaft of the cylinder 7, as shown in Figure 2 . The cylinder 7 acts on the pressure ears 223 through the connecting heads, drives the moving frame 21 and the valve plate 22 to move (since the bottom of the moving frame 21 is installed on the V-shaped guide rail 4 through the V-shaped roller 212, it can swing to a certain extent), and the state changes as shown in Figures 7-9 . Finally, the valve plate 22 is pressed on the cavity a to complete the sealing. The moving frame 21 and the valve plate 22 in this stage are controlled by the cylinder 7.

[0032] 3) During the opening of the valve plate 22, the valve plate 22 and the moving frame 21 are first retreated to the original position through the cooperation of the cylinder 7 and the pressure ear 223, and then the moving frame 21 and the valve plate 22 are controlled by the motor 5 through the chain wheel and chain transmission assembly to return to the closing position on the left side of the valve chamber 1 relying on the limiting strip 11.

[0033] The plug-in valve in the above embodiment is applied between two plated cavities in series. If it is applied to the plated cavity at the end of the vacuum plating machine, the requirement for the valve chamber 1 will be reduced, and it does not require a sealed structure. Correspondingly, the valve chamber 1 only needs to be connected to one plated cavity.

[0034] The above embodiments are only preferred embodiments of the present application and should not be considered as limiting the protection scope of the present application. Various equivalent modifications made by those skilled in the art to the above-described technical solutions without creative efforts should fall within the protection scope of the present application.

Claims

1. A plug valve, characterized in that The valve cabin is connected with the coating cavity, and the moving frame, valve plate, transmission assembly and V-shaped guide rail are arranged in the valve cabin. The valve cabin is connected with the coating cavity, and the moving frame, valve plate, transmission assembly and V-shaped guide rail are arranged in the valve cabin.

2. The flapper valve of claim 1, wherein, The valve cabin is connected with the coating cavity, and the moving frame, valve plate, transmission assembly and V-shaped guide rail are arranged in the valve cabin.

3. Plug valve according to claim 1 or 2, characterized in that The valve plate is supported on the moving frame. The moving frame is installed on the V-shaped guide rail through V-shaped rollers installed on the bottom of the moving frame.

4. The flapper valve of claim 3, wherein, The V-shaped guide rail is convex in the middle, and the V-shaped roller is concave in the middle.

5. The flapper valve of claim 4, wherein, The transmission assembly is a chain wheel and chain transmission assembly.

6. The flapper valve of claim 1, wherein, The pressing ear on the valve plate is formed with a bayonet on the side facing the closing direction of the valve plate.

7. The flapper valve of claim 5, wherein, The pressing ear on the valve plate is formed with a bayonet on the side facing the closing direction of the valve plate. The pressing ear on the valve plate is formed with a bayonet on the side facing the closing direction of the valve plate.

8. The flapper valve of claim 7, wherein, 10. A vacuum coating machine using the plug valve according to any one of claims 1-9.

9. The flapper valve of claim 8, wherein, ​ ​

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