Vacuum gate valve sealing structure and manufacturing method thereof

Abstract

The present invention relates to the field of semiconductors, and discloses a vacuum gate valve sealing structure and a manufacturing method thereof, wherein the vacuum gate valve sealing structure comprises a metal base and a groove formed on the metal base, a sealing ring is arranged in the groove, and extensions are formed on both sides of the sealing ring; a fixed connection through hole is uniformly formed on the extension along the length direction of the groove; a metal connector passes through the fixed connection through hole, and the lower part is fixedly connected to the metal base at the bottom wall of the groove, and the upper part is used to apply pressure toward the metal base to the extension; the plane where the top wall of the metal connector is located is lower than or equal to the plane where the groove opening is located, and the sealing ring at least partially protrudes from the plane where the groove opening is located, and the protruding part of the sealing ring is higher than the plane where the top wall of the metal connector is located. The sealing ring of the present invention is not easy to fall off, has a long service life, is not easy to debond during production and molding, has a high yield, and can reduce production costs.

Description

Technical Field

[0001] The present invention relates to the field of semiconductors, and in particular to a vacuum gate valve sealing structure for semiconductor equipment and a manufacturing method thereof. Background Art

[0002] During the semiconductor manufacturing process, many manufacturing processes require a clean and high vacuum environment, such as photolithography, thin film deposition, ion implantation, ion plating, or plasma etching. High vacuum manufacturing processes need to ensure the vacuum level, so the production environment needs to be sealed. Among the above processes that require a high vacuum environment, some processes use corrosive gases or active gases, such as ion implantation, ion plating, or plasma etching. These processes that use corrosive gases or active gases have more stringent requirements for the sealing of the production environment.

[0003] In the semiconductor production process, the workpiece entrance and exit require a gate valve that can be opened and closed, and the gate valve needs to have a sealing function. In the prior art, the design of the gate valve is to design a groove (dovetail groove, etc.) on a metal base such as an aluminum plate or a stainless steel plate, and then design a fluororubber or perfluoroether material sealing ring to be installed on the metal base to form a combined gate valve. Since the sealing ring is very easy to fall off from the metal base during use, it is improved into an integrated gate valve. The integrated gate valve design is to bond the metal base with the fluororubber or perfluoroether sealing ring to form an integrated gate valve.

[0004] As mentioned above, due to the strict requirements of semiconductor production for vacuum environment, most of the sealing rings used in semiconductor production are made of perfluoroether material. However, due to the inherent characteristics of perfluoroether material, there is no adhesive specifically suitable for bonding perfluoroether material and metal material in the prior art. The bonding strength of perfluoroether glue used in the prior art with metal base parts is poor, and the gate valve will be frequently opened and closed during use, which can easily cause the perfluoroether sealing ring to fall off from the metal base part, resulting in a short service life of the vacuum gate valve and high cost.

[0005] Moreover, in the actual production of semiconductors, the vacuum gate valve of semiconductor equipment is a consumable. Due to the high production cost of semiconductor devices, the vacuum gate valve is not replaced until there is a risk of failure. Instead, it is actively replaced after the vacuum gate valve has been used for a period of time, even if it has not failed. In this case, the service life of the vacuum gate valve will have a significant impact on the cost of semiconductor production. In addition, vacuum gate valves are currently mainly produced by foreign manufacturers, with high procurement costs, and domestic alternatives are urgently needed.

[0006] In order to prevent the perfluoroether sealing ring from falling off the metal base and extend the service life of the vacuum gate valve, the mainstream solutions adopted by the existing technology include: 1. The combined gate valve is formed by structural design, refer to Figure 1As shown. A groove is designed on the metal base, and then a corresponding sealing ring is designed, such as the sealing ring is fixed by the groove, and then the two monomers are combined to form a combined gate valve. However, this solution is not ideal because it is a split combination. No matter what material the sealing ring is made of, the product is easy to debond during production and molding, the finished product yield is low, and it is very easy to fall off during use, and the life is short.

[0007] 2. Through structural design, an integrated gate valve is formed, and the sealing ring is bonded to the metal base with glue. Due to the diversity of semiconductor wafer types, sizes, manufacturing methods, etc., different equipment is used, and the corresponding gate valves are also different. Different gate valves have different grooves for bonding the sealing ring. The three most common groove types are: double-sided groove, single-sided groove, and edgeless groove. Figures 2 to 4 However, this solution is not ideal because there is no suitable glue for perfluoroether material, the bonding strength is poor, it is easy to fall off during use, and the service life is short. Therefore, a vacuum gate valve sealing structure is urgently needed to improve the above problems. Summary of the invention

[0008] A series of simplified concepts are introduced in the Summary of the Invention, which are all simplifications of the prior art in the field, and will be further described in detail in the Detailed Description of the Invention. The Summary of the Invention of the present invention does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the scope of protection of the claimed technical solution.

[0009] The technical problem to be solved by the present invention is to provide a sealing structure in which a metal base part and a sealing ring are firmly connected and not easily separated, and the service life of a vacuum gate valve of a semiconductor device can be prolonged.

[0010] In order to solve the above technical problems, the present invention provides a vacuum gate valve sealing structure, which has a metal base and a groove formed on the metal base, and a sealing ring is arranged in the groove; Extensions are formed on both sides of the sealing ring; The fixed connection through holes are uniformly formed on the extension portion along the length direction of the groove; A metal connector, which passes through the fixed connection through hole, has a lower portion fixedly connected to the metal base at the bottom wall of the groove, and an upper portion used to apply pressure to the extension portion toward the metal base; The plane where the top wall of the metal connector is located is lower than or equal to the plane where the groove opening is located, the sealing ring at least partially protrudes from the plane where the groove opening is located, and the protruding part of the sealing ring is higher than the plane where the top wall of the metal connector is located.

[0011] Preferably, the vacuum gate valve sealing structure is further improved so that the distance between the plane where the top wall of the extension portion is located and the plane where the groove opening is located is greater than 1 mm.

[0012] Preferably, the vacuum gate valve sealing structure is further improved so that the middle position of the sealing ring protrudes out of the plane where the groove opening is located.

[0013] Preferably, the vacuum gate valve sealing structure is further improved, a sub-groove is formed on the bottom wall of the sealing ring, the length direction of the sub-groove is preferably not perpendicular to the length direction of the groove, and the number of the sub-grooves can be more than one.

[0014] Preferably, the vacuum gate valve sealing structure is further improved, and the fixed connection through hole is formed as a variable diameter hole with a large hole diameter at the upper part and a small hole diameter at the lower part, such as a tapered hole.

[0015] Preferably, the vacuum gate valve sealing structure is further improved, the shape of the upper end of the metal connector is adapted to the shape of the fixed connection through hole, and the upper end of the metal connector fills the fixed connection through hole.

[0016] Preferably, the vacuum gate valve sealing structure is further improved, and the metal connector is connected to the metal base member at the bottom wall of the groove by threaded fixing, snap fixing or interference fixing.

[0017] In order to solve the above technical problems, the present invention provides a method for manufacturing a vacuum gate valve sealing structure, which is used to manufacture any of the above vacuum gate valve sealing structures, comprising the following steps: S1, providing an upper mold, wherein the upper mold is formed into a molding cavity mold of a sealing ring shape and size; Providing a middle mold, wherein the middle mold is formed into a molding cavity mold for accommodating a metal base member; Providing a lower die, the lower die is used to support the middle die; Providing a metal base member and a metal connecting member; the metal base member and the metal connecting member can be manufactured by a machining process in the prior art; S2, place the middle mold on the lower mold and put the specified rubber material into the groove; S3, cover the upper mold and enter the vulcanization molding equipment for vulcanization molding; S4, removing the upper die, the middle die and the lower die; S5, connecting and fixing the metal connecting piece and the metal base piece.

[0018] The present invention designs extensions on both sides of the sealing ring to form a "wing"-shaped sealing ring, and passes through the sealing ring through a metal connector to fix the sealing ring and the metal base member. The metal connector presses and fixes the sealing ring in the groove. Generally speaking, the above structural design of the present invention can at least achieve the following technical effects: 1. The metal connector of the present invention can pass through the sealing ring to fix the sealing ring in the groove, and can firmly fix the sealing ring even without glue, thereby solving the technical problems of the prior art that the sealing ring is easy to fall off, has a short service life, and has poor bonding strength.

[0019] 2. The metal connector of the present invention can be connected and fixed to the metal base by means of threads, buckles or interference fit, is easy to manufacture, is not easy to debond during production and molding, and has a high yield. The present invention can directly replace the sealing ring after it is corroded and damaged, without replacing the gate valve, thereby reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings of the present invention are intended to illustrate the general characteristics of the methods, structures and / or materials used in specific exemplary embodiments of the present invention, and to supplement the description in the specification. However, the drawings of the present invention are schematic diagrams not drawn to scale, and thus may not accurately reflect the precise structure or performance characteristics of any given embodiment, and the drawings of the present invention should not be interpreted as limiting or restricting the range of values ​​or properties covered by the exemplary embodiments of the present invention. The present invention is further described in detail below in conjunction with the drawings and specific embodiments: Figure 1 The utility model is a cross-sectional schematic diagram of the existing combined gate valve sealing structure.

[0021] Figure 2 The utility model is a cross-sectional schematic diagram of an existing double-sided groove arrangement sealing ring.

[0022] Figure 3 The utility model is a cross-sectional schematic diagram of a sealing ring arranged in a single-side groove.

[0023] Figure 4 The utility model is a cross-sectional schematic diagram of an existing sealing ring arranged in a borderless groove.

[0024] Figure 5 This is a partial view of the second embodiment of the present invention. Figure 1 , which shows the situation where the plane where the top wall of the sealing ring extension is located is lower than the plane where the groove opening is located for the double-sided groove.

[0025] Figure 6 This is a partial view of the second embodiment of the present invention. Figure 2 , which shows the situation where the plane where the top wall of the sealing ring extension part is located, the plane where the top wall of the metal connecting part is located, and the plane where the groove opening is located are the same plane for the double-sided groove.

[0026] Figure 7 This is a partial view of the second embodiment of the present invention. Figure 3 , which shows the situation where the plane where the top wall of the sealing ring extension part and the plane where the top wall of the metal connecting part are located are in the same plane for a borderless groove.

[0027] Figure 8This is a partial view of the second embodiment of the present invention. Figure 4 , which shows the situation where the plane where the top wall of the sealing ring extension part is located and the plane where the top wall of the metal connecting part is located are different planes for a borderless groove.

[0028] Description of reference numerals: Metal base 1; Groove 2; Sealing ring 3; Extension 4; Fixed connection through hole 5; Metal connector 6; Sub-groove 7. DETAILED DESCRIPTION

[0029] The following is an explanation of the embodiments of the present invention by specific specific embodiments, and those skilled in the art can fully understand other advantages and technical effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through different specific embodiments, and the details in this specification can also be applied based on different viewpoints, and various modifications or changes can be made without deviating from the general design concept of the invention. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. The following exemplary embodiments of the present invention can be implemented in a variety of different forms and should not be interpreted as being limited to the specific embodiments described here. It should be understood that these embodiments are provided to make the disclosure of the present invention thorough and complete, and to fully convey the technical solutions of these exemplary specific embodiments to those skilled in the art. It should be understood that when an element is referred to as "connected" or "coupled" to another element, the element can be directly connected or coupled to another element, or there can be an intermediate element. The difference is that when an element is referred to as "directly connected" or "directly coupled" to another element, there is no intermediate element. In all the drawings, the same reference numerals always represent the same elements.

[0030] In the first embodiment, the present invention provides a vacuum gate valve sealing structure, which comprises a metal base 1 and a groove 2 formed on the metal base 1, and a sealing ring 3 is arranged in the groove 2; Extension portions 4 are formed on both sides of the sealing ring 3; The fixed connection through holes 5 are uniformly formed on the extension portion 4 along the length direction of the groove 2; It passes through the fixed connection through hole 5, and its lower part is fixedly connected to the metal base member 1 at the bottom wall of the groove 2, and its upper part is used to apply pressure to the extension portion 4 toward the metal base member 1; The plane where the top wall of the metal connector 6 is located is lower than or equal to the plane where the groove 2 opening is located, the sealing ring 3 at least partially protrudes from the plane where the groove 2 opening is located, and the protruding part of the sealing ring 3 is higher than the plane where the top wall of the metal connector 6 is located.

[0031] Preferably, the distance between the plane where the top wall of the extension portion 4 is located and the plane where the opening of the groove 2 is located is greater than 1 mm.

[0032] Preferably, the middle position of the sealing ring 3 protrudes out of the plane where the opening of the groove 2 is located.

[0033] In the second embodiment, the present invention provides a vacuum gate valve sealing structure, which is a further improvement on the above-mentioned first embodiment, and the same parts are not repeated here; A sub-groove 7 is formed on the bottom wall of the sealing ring 3 , and the sub-groove 7 is preferably a rectangular groove or a dovetail groove arranged along the length direction of the groove 2 .

[0034] Preferably, the second embodiment is further improved, and the fixed connection through hole 5 is formed as a variable diameter hole with a large hole diameter at the upper part and a small hole diameter at the lower part, such as a tapered hole.

[0035] The shape of the upper end of the metal connecting member 6 is adapted to the shape of the fixed connecting through hole 5 , and the upper end of the metal connecting member 6 fills up the fixed connecting through hole 5 .

[0036] Optionally, the metal connector 6 is connected to the metal base 1 at the bottom wall of the groove 2 by threaded fixing, snap-fit ​​fixing or interference fixing.

[0037] refer to Figure 5 As shown, the second embodiment of the present invention is used for a double-sided groove, the plane where the top wall of the sealing ring extension portion is located is lower than the plane where the groove opening is located, and the plane where the top wall of the metal connector is located is the same plane as the plane where the top wall of the sealing ring extension portion is located.

[0038] refer to Figure 6 As shown, the second embodiment of the present invention is used for a double-sided groove, in which the plane where the top wall of the sealing ring extension portion is located, the plane where the top wall of the metal connector is located and the plane where the groove opening is located are the same plane, and the top of the metal connector is formed as a cover portion, which is pressed on the top wall of the sealing ring extension portion, and the plane where the top wall of the cover portion is located is the plane where the top wall of the metal connector is located.

[0039] refer to Figure 7 As shown, the second embodiment of the present invention is used for a borderless groove, and the plane where the top wall of the sealing ring extension portion and the plane where the top wall of the metal connecting member are located are in the same plane.

[0040] refer to Figure 8 As shown, the second embodiment of the present invention is used for a borderless groove, the plane where the top wall of the sealing ring extension portion is located and the plane where the top wall of the metal connecting piece is located are different planes, the top of the metal connecting piece is formed as a cover portion, the cover portion is pressed on the top wall of the sealing ring extension portion and the plane where the top wall of the cover portion is located is lower than the plane where the highest position of the sealing ring is located.

[0041] In a third embodiment, the present invention provides a method for manufacturing a vacuum gate valve sealing structure, which is used to manufacture the vacuum gate valve sealing structure described in any one of the first embodiment or the second embodiment, comprising the following steps: S1, providing an upper mold, the upper mold is formed into a molding cavity mold of the shape and size of the sealing ring 3; Providing a middle mold, wherein the middle mold is formed into a molding cavity mold for accommodating the metal base member 1; Providing a lower die, the lower die is used to support the middle die; A metal base member 1 and a metal connecting member 6 are provided; the metal base member 1 and the metal connecting member 6 can be manufactured by using existing machining processes; S2, placing the middle mold on the lower mold and putting the specified rubber material into groove 2; S3, cover the upper mold and enter the vulcanization molding equipment for vulcanization molding; S4, removing the upper die, the middle die and the lower die; S5, connecting and fixing the metal connecting member 6 and the metal base member 1.

[0042] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present invention belongs. It will also be understood that, unless expressly defined herein, terms such as those defined in general dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and not interpreted in an ideal or overly formal sense.

[0043] The present invention has been described in detail above through specific implementation modes and embodiments, but these do not constitute limitations of the present invention. Without departing from the principles of the present invention, those skilled in the art may also make many variations and improvements, which should also be regarded as the protection scope of the present invention.

Claims

1. A vacuum gate valve sealing structure, comprising a metal base (1) and a groove (2) formed on the metal base (1), a sealing ring (3) arranged in the groove (2), characterized in that: Extension portions (4) are formed on both sides of the sealing ring (3); The fixed connection through holes (5) are evenly formed on the extension portion (4) along the length direction of the groove (2); A metal connecting piece (6) passing through the fixed connecting through hole (5), the lower part of which is fixedly connected to the metal base piece (1) at the bottom wall of the groove (2), and the upper part of which is used to apply pressure to the extension part (4) toward the metal base piece (1); The plane where the top wall of the metal connector (6) is located is lower than or is flush with the plane where the opening of the groove (2) is located, the sealing ring (3) at least partially protrudes from the plane where the opening of the groove (2) is located, and the protruding part of the sealing ring (3) is higher than the plane where the top wall of the metal connector (6) is located.

2. The vacuum door valve sealing structure according to claim 1, characterized in that: The distance between the plane where the top wall of the extension portion (4) is located and the plane where the opening of the groove (2) is located is greater than 1 mm.

3. The vacuum door valve sealing structure according to claim 1, characterized in that: The middle position of the sealing ring (3) protrudes from the plane where the opening of the groove (2) is located.

4. The vacuum door valve sealing structure according to claim 1, characterized in that: A sub-groove (7) is formed on the bottom wall of the sealing ring (3).

5. The vacuum door valve sealing structure according to claim 1, characterized in that: The fixed connection through hole (5) is formed as a variable diameter hole with a large hole diameter at the upper portion and a small hole diameter at the lower portion.

6. The vacuum door valve sealing structure according to claim 5, characterized in that: The shape of the upper end of the metal connecting piece (6) is adapted to the shape of the fixed connecting through hole (5), and the upper end of the metal connecting piece (6) fills the fixed connecting through hole (5).

7. The vacuum door valve sealing structure according to claim 5, characterized in that: The metal connecting piece (6) is connected to the metal base piece (1) at the bottom wall of the groove (2) by means of threaded fixing, snap-fit ​​fixing or interference fixing.

8. A method for manufacturing a vacuum door valve sealing structure, used for manufacturing the vacuum door valve sealing structure according to any one of claims 1 to 7, characterized in that: The following steps are involved: S1, providing an upper mold, wherein the upper mold is formed into a molding cavity mold in the shape and size of the sealing ring (3); Providing a middle mold, wherein the middle mold is formed into a molding cavity mold for accommodating a metal base member (1); Providing a lower die, the lower die is used to support the middle die; Providing a metal base member (1) and a metal connecting member (6); S2, placing the middle mold on the lower mold, and placing the specified rubber material into the groove (2); S3, cover the upper mold and enter the vulcanization molding equipment for vulcanization molding; S4, removing the upper die, the middle die and the lower die; S5, connecting and fixing the metal connecting member (6) and the metal base member (1).

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