Vacuum gate valve sealing structure and manufacturing method thereof

Abstract

The present invention relates to the field of semiconductors, and discloses a vacuum gate valve sealing structure and a manufacturing method thereof, wherein the vacuum gate valve sealing structure comprises a metal base and a groove formed on the metal base, wherein a sealing ring is arranged in the groove, and further comprises: at least one first sub-groove formed in the groove, wherein the sealing ring fills the groove and the first sub-groove, and the sealing ring partially protrudes out of the groove opening. The present invention designs and adds sub-grooves in the groove of the metal base, and the sub-grooves may be one or more, and the groove and the sub-grooves are combined to form a groove-in-groove structure. The present invention increases the stability of the sealing ring after bonding to the metal base through the physical shape of the sub-groove, thereby solving the technical problems of the prior art that the sealing ring is easy to fall off, has a short service life, and has poor bonding strength. In addition, the vacuum gate valve sealing structure provided by the present invention is easy to manufacture, is not easy to debond during production and molding, and has a high yield.

Description

Technical Field

[0001] The present invention relates to the field of semiconductors, and in particular to a vacuum gate valve sealing structure for semiconductor equipment and a manufacturing method thereof. Background Art

[0002] During the semiconductor manufacturing process, many manufacturing processes require a clean and high vacuum environment, such as photolithography, thin film deposition, ion implantation, ion plating, or plasma etching. High vacuum manufacturing processes need to ensure the vacuum level, so the production environment needs to be sealed. Among the above processes that require a high vacuum environment, some processes use corrosive gases or active gases, such as ion implantation, ion plating, or plasma etching. These processes that use corrosive gases or active gases have more stringent requirements for the sealing of the production environment.

[0003] In the semiconductor production process, the workpiece entrance and exit require a gate valve that can be opened and closed, and the gate valve needs to have a sealing function. In the prior art, the design of the gate valve is to design a groove (dovetail groove, etc.) on a metal base such as an aluminum plate or a stainless steel plate, and then design a fluororubber or perfluoroether material sealing ring to be installed on the metal base to form a combined gate valve. Since the sealing ring is very easy to fall off from the metal base during use, it is improved into an integrated gate valve. The integrated gate valve design is to bond the metal base with the fluororubber or perfluoroether sealing ring to form an integrated gate valve.

[0004] As mentioned above, due to the strict requirements of semiconductor production for vacuum environment, most of the sealing rings used in semiconductor production are made of perfluoroether material. However, due to the inherent characteristics of perfluoroether material, there is no adhesive specifically suitable for bonding perfluoroether material and metal material in the prior art. The bonding strength of perfluoroether glue used in the prior art with metal base parts is poor, and the gate valve will be frequently opened and closed during use, which can easily cause the perfluoroether sealing ring to fall off from the metal base part, resulting in a short service life of the vacuum gate valve and high cost.

[0005] Moreover, in the actual production of semiconductors, the vacuum gate valve of semiconductor equipment is a consumable. Due to the high production cost of semiconductor devices, the vacuum gate valve is not replaced until there is a risk of failure. Instead, it is actively replaced after the vacuum gate valve has been used for a period of time, even if it has not failed. In this case, the service life of the vacuum gate valve will have a significant impact on the cost of semiconductor production. In addition, vacuum gate valves are currently mainly produced by foreign manufacturers, with high procurement costs, and domestic alternatives are urgently needed.

[0006] In order to prevent the perfluoroether sealing ring from falling off the metal base and extend the service life of the vacuum gate valve, the mainstream solutions adopted by the existing technology include: 1. The combined gate valve is formed by structural design, refer to Figure 1As shown. A groove is designed on the metal base, and then a corresponding sealing ring is designed, such as the sealing ring is fixed by the groove, and then the two monomers are combined to form a combined gate valve. However, this solution is not ideal because it is a split combination. No matter what material the sealing ring is made of, the product is easy to debond during production and molding, the finished product yield is low, and it is very easy to fall off during use, and the life is short.

[0007] 2. Through structural design, an integrated gate valve is formed, and the sealing ring is bonded to the metal base with glue. Due to the diversity of semiconductor wafer types, sizes, manufacturing methods, etc., different equipment is used, and the corresponding gate valves are also different. Different gate valves have different grooves for bonding the sealing ring. The three most common groove types are: double-sided groove, single-sided groove, and edgeless groove. Figures 2 to 4 However, this solution is not ideal because there is no suitable glue for perfluoroether material, the bonding strength is poor, it is easy to fall off during use, and the service life is short. Therefore, a vacuum gate valve sealing structure is urgently needed to improve the above problems. Summary of the invention

[0008] A series of simplified concepts are introduced in the Summary of the Invention, which are all simplifications of the prior art in the field, and will be further described in detail in the Detailed Description of the Invention. The Summary of the Invention of the present invention does not mean to attempt to define the key features and essential technical features of the claimed technical solution, nor does it mean to attempt to determine the scope of protection of the claimed technical solution.

[0009] The technical problem to be solved by the present invention is to provide a sealing structure in which a metal base part and a sealing ring are firmly connected and not easily separated, and the service life of a vacuum gate valve can be prolonged.

[0010] In order to solve the above technical problems, the present invention provides a vacuum gate valve sealing structure, which has a metal base and a groove formed on the metal base, and a sealing ring is arranged in the groove, and also includes: At least one first sub-groove is formed in the groove, the sealing ring fills the groove and the first sub-groove, and the sealing ring partially protrudes from the groove opening. The direction of the first sub-groove is not limited, and can be parallel to the groove length direction or non-parallel to the groove length direction, and the number of first sub-grooves is not limited.

[0011] Preferably, the vacuum gate valve sealing structure is further improved, and the first sub-groove is formed on the bottom wall of the groove.

[0012] Preferably, the vacuum valve sealing structure is further improved, the opening size of the first sub-groove is smaller than the opening size of the vacuum valve sealing groove by more than 1 mm, and the depth of the first sub-groove is more than 1 mm.

[0013] Preferably, the vacuum gate valve sealing structure is further improved, and the first sub-groove is a rectangular groove or a dovetail groove.

[0014] Preferably, the vacuum valve sealing structure is further improved, further comprising: at least one second sub-groove is formed on the side wall of the groove, and the sealing ring also fills the second sub-groove. The direction of the second sub-groove is not limited, and can be parallel to the groove length direction or non-parallel to the groove length direction, and the number of the second sub-grooves is not limited.

[0015] Preferably, the vacuum gate valve sealing structure is further improved, and the opening size of the second sub-groove is smaller than the opening size of the vacuum gate valve sealing groove and the depth of the vacuum gate valve sealing groove.

[0016] Preferably, the vacuum gate valve sealing structure is further improved, and the wall thickness of the vacuum gate valve sealing structure above the upper side wall of the second sub-groove is greater than 0.8 mm.

[0017] Preferably, the vacuum door valve sealing structure is further improved, and a glue layer is formed on the inner surface of the vacuum door valve sealing structure.

[0018] In order to solve the above technical problems, the present invention provides a method for manufacturing a vacuum gate valve sealing structure, which is used to manufacture any of the above vacuum gate valve sealing structures, comprising the following steps: S1, grooves are formed on the metal substrate; S2, forming at least one first sub-groove on the bottom wall of the groove; and / or, forming at least one second sub-groove on the side wall of the groove; S3, providing an upper mold, wherein the upper mold is formed into a molding cavity mold of a sealing ring shape and size; Providing a middle mold, wherein the middle mold is formed into a molding cavity mold for accommodating a metal base member; Providing a lower die, the lower die is used to support the middle die; S4, placing the middle mold on the lower mold, applying glue in the groove and then putting the specified glue; S5, cover the upper mold and enter the vulcanization molding equipment for vulcanization molding; S6, remove the upper die, middle die and lower die.

[0019] Preferably, the method for manufacturing the vacuum door valve sealing structure is further improved, and further comprises the following steps: When executing step S4, the inner surface of the groove is sandblasted, then coated with glue, and then the specified glue is put in. It should be noted that the inner surface of the first sub-groove and the second sub-groove is essentially part of the inner surface of the groove.

[0020] Sub-grooves are designed to be added to the grooves of the metal base. The sub-grooves may be one or more. The grooves and sub-grooves are combined to form a groove-in-groove structure. The sub-grooves are designed inside the grooves, so that the appearance and size of the sealing ring after bonding to the metal base will not change. The sub-grooves increase the bonding area between the sealing ring and the metal base, and will also increase the bonding strength between the sealing ring and the metal base at the same time; the physical shape of the sub-grooves increases the stability of the sealing ring after bonding to the metal base, thereby solving the technical problems of the prior art that the sealing ring is easy to fall off, has a short service life, and has poor bonding strength. In addition, the vacuum gate valve sealing structure provided by the present invention is easy to manufacture, is not easy to debond during production and molding, and has a high yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings of the present invention are intended to illustrate the general characteristics of the methods, structures and / or materials used in specific exemplary embodiments of the present invention, and to supplement the description in the specification. However, the drawings of the present invention are schematic diagrams not drawn to scale, and thus may not accurately reflect the precise structure or performance characteristics of any given embodiment, and the drawings of the present invention should not be interpreted as limiting or restricting the range of values ​​or properties covered by the exemplary embodiments of the present invention. The present invention is further described in detail below in conjunction with the drawings and specific embodiments: Figure 1 The utility model is a cross-sectional schematic diagram of the existing combined gate valve sealing structure.

[0022] Figure 2 The utility model is a cross-sectional schematic diagram of an existing double-sided groove arrangement sealing ring.

[0023] Figure 3 The utility model is a cross-sectional schematic diagram of a sealing ring arranged in a single-side groove.

[0024] Figure 4 The utility model is a cross-sectional schematic diagram of an existing sealing ring arranged in a borderless groove.

[0025] Figure 5 The first embodiment of the present invention is a cross-sectional view Figure 1 , which shows that the first embodiment of the present invention is applied to the double-sided groove situation.

[0026] Figure 6 The first embodiment of the present invention is a cross-sectional view Figure 2 , which shows that the first embodiment of the present invention is applied to a single-sided groove situation.

[0027] Figure 7 The first embodiment of the present invention is a cross-sectional view Figure 3 , which shows that the first embodiment of the present invention is applied to the case of a borderless groove.

[0028] Figure 8 The second embodiment of the present invention is a cross-sectional view Figure 1 , which shows that the second embodiment of the present invention is applied to the double-sided groove situation.

[0029] Fig. 9 The second embodiment of the present invention is a cross-sectional view Figure 2 , which shows that the second embodiment of the present invention is applied to a single-sided groove situation.

[0030] Fig.10 The third embodiment of the present invention is a cross-sectional view Figure 1 , which shows that the third embodiment of the present invention is applied to the double-sided groove case, and the two second sub-grooves are symmetrically arranged.

[0031] Fig.11 The third embodiment of the present invention is a cross-sectional view Figure 2 , which shows that the third embodiment of the present invention is applied to the double-sided groove case, and the two second sub-grooves are arranged asymmetrically.

[0032] Fig.12 The third embodiment of the present invention is a cross-sectional view Figure 3 , which shows that the third embodiment of the present invention is applied to a single-sided groove situation.

[0033] Fig.13 The third embodiment of the present invention is a cross-sectional view Figure 4 , which shows that the third embodiment of the present invention is applied to a single-sided groove, and the first sub-groove is connected to the second sub-groove.

[0034] Description of reference numerals: Metal base 1; Groove 2; Sealing ring 3; First sub-groove 4; Second sub-groove 5; The vacuum gate valve sealing structure wall thickness A is above the upper side wall of the second sub-groove. DETAILED DESCRIPTION

[0035] The following is an explanation of the embodiments of the present invention by specific specific embodiments, and those skilled in the art can fully understand other advantages and technical effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through different specific embodiments, and the details in this specification can also be applied based on different viewpoints, and various modifications or changes can be made without deviating from the general design concept of the invention. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. The following exemplary embodiments of the present invention can be implemented in a variety of different forms and should not be interpreted as being limited to the specific embodiments described here. It should be understood that these embodiments are provided to make the disclosure of the present invention thorough and complete, and to fully convey the technical solutions of these exemplary specific embodiments to those skilled in the art. It should be understood that when an element is referred to as "connected" or "coupled" to another element, the element can be directly connected or coupled to another element, or there can be an intermediate element. The difference is that when an element is referred to as "directly connected" or "directly coupled" to another element, there is no intermediate element. In all the drawings, the same reference numerals always represent the same elements.

[0036] In the first embodiment, the present invention provides a vacuum gate valve sealing structure, which comprises a metal base 1 and a groove 2 formed on the metal base 1, a sealing ring 3 is arranged in the groove 2, and further comprises: At least one first sub-groove 4 is formed on the bottom wall of the groove 2, the sealing ring 3 fills the groove 2 and the first sub-groove 4, and the sealing ring 3 partially protrudes from the opening of the groove 2; it should be noted that the direction of the first sub-groove 4 is not limited, and can be parallel to the length direction of the groove 2 or non-parallel to the length direction of the groove 2, and the number of first sub-grooves 4 is not limited. When there are more than two first sub-grooves 4, they can be arranged in parallel or staggered; the cross-sectional shape and size of each first sub-groove 4 can be the same or different; from the perspective of manufacturing process, cost and the balance between technical effects, it is recommended to set a first sub-groove 4 along the length direction of the groove 2.

[0037] The opening size of the first sub-groove 4 is more than 1 mm smaller than the opening size of the vacuum valve sealing groove, and the depth of the first sub-groove 4 is more than 1 mm. The first embodiment forms a stepped groove in the bottom wall of the groove 2 composed of the groove 2 and the sub-groove 4. The structure provided by the first embodiment can be applied to double-sided grooves, single-sided grooves and grooves without edges. Figure 5 , Figure 6 and Figure 7 shown.

[0038] In a second embodiment, the present invention provides a vacuum gate valve sealing structure, which comprises a metal base 1 and a groove 2 formed on the metal base 1, a sealing ring 3 is arranged in the groove 2, and further comprises: At least one second sub-groove 5 is formed on the side wall of the groove 2, and the sealing ring 3 fills the second sub-groove 5; it should be noted that when there is one second sub-groove 5, it can be on the side wall on any side, close to the opening of the groove 2, or close to the bottom wall of the groove 2; it should be noted that the direction of the second sub-groove 5 is not limited, and it can be parallel to the length direction of the groove 2 or non-parallel to the length direction of the groove 2, and the number of second sub-grooves 5 is not limited. When there are more than two second sub-grooves 5, they can be symmetrically formed on the two side walls of the groove 2, or they can be asymmetrical, close to the opening of the groove 2, or close to the bottom wall of the groove 2; the second sub-grooves 5 located on the same side wall can be arranged in parallel or staggered, and the cross-sectional shapes and sizes of each second sub-groove 5 can be the same or different; from the perspective of manufacturing process, cost, and the balance between technical effects, it is recommended to set a second sub-groove 5 along the length direction of the groove 2.

[0039] The opening size of the second sub-groove 5 is smaller than the opening size of the vacuum valve sealing groove and the depth of the vacuum valve sealing groove.

[0040] The second sub-groove 5 is a rectangular groove or a dovetail groove.

[0041] The structure provided in the second embodiment is applicable to double-sided grooves and single-sided grooves, but cannot be applied to edgeless grooves. Figure 8 and Fig. 9 shown.

[0042] In addition, it should also be understood that, although the terms "first", "second", etc. may be used here to describe different elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish an element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of exemplary embodiments of the present invention, the first element, component, region, layer or part discussed below may also be referred to as the second element, component, region, layer or part.

[0043] In a third embodiment, the present invention provides a vacuum gate valve sealing structure, comprising a metal base 1 and a groove 2 formed on the metal base 1, a sealing ring 3 is arranged in the groove 2, and further comprising: At least one first sub-groove 4 is formed on the bottom wall of the groove 2, the sealing ring 3 fills the groove 2 and the first sub-groove 4, and the sealing ring 3 partially protrudes from the opening of the groove 2; it should be noted that the direction of the first sub-groove 4 is not limited, and can be parallel to the length direction of the groove 2 or non-parallel to the length direction of the groove 2, and the number of first sub-grooves 4 is not limited. When there are more than two first sub-grooves 4, they can be arranged in parallel or staggered; the cross-sectional shape and size of each first sub-groove 4 can be the same or different; from the perspective of manufacturing process, cost and the balance between technical effects, it is recommended to set a first sub-groove 4 along the length direction of the groove 2.

[0044] At least one second sub-groove 5 is formed on the side wall of the groove 2, and the sealing ring 3 also fills the second sub-groove 5; it should be noted that when there is one second sub-groove 5, it can be on the side wall on any side, can be close to the opening of the groove 2, and can also be close to the bottom wall of the groove 2; It should be noted that the direction of the second sub-grooves 5 is not limited, and can be parallel to the length direction of the groove 2 or non-parallel to the length direction of the groove 2, and the number of second sub-grooves 5 is not limited. When there are two or more second sub-grooves 5, they can be symmetrically formed on the two side walls of the groove 2, or asymmetrically, and can be close to the opening of the groove 2 or close to the bottom wall of the groove 2; the second sub-grooves 5 located on the same side wall can be arranged in parallel or staggered, and the cross-sectional shapes and sizes of each second sub-groove 5 can be the same or different; from the perspective of manufacturing process, cost and the balance between technical effects, it is recommended to set a second sub-groove 5 along the length direction of the groove 2.

[0045] In addition, the cross-sectional shape and size of each first sub-groove 4 and each second sub-groove 5 may be the same or different, the cross-sectional shape and size of each first sub-groove 4 may be the same or different, and the cross-sectional shape and size of each second sub-groove 5 may be the same or different.

[0046] The first sub-groove 4 is formed on the bottom wall of the groove 2. The opening size of the first sub-groove 4 is smaller than the opening size of the vacuum valve sealing groove by more than 1 mm, and the depth of the first sub-groove 4 is more than 1 mm. In the first embodiment, a stepped groove-in-groove composed of the groove 2 and the sub-groove 4 is formed on the bottom wall of the groove 2. This structure can be applied to double-sided grooves, single-sided grooves and edgeless grooves; The opening size of the second sub-groove 5 is smaller than the opening size of the vacuum valve sealing groove and the depth of the vacuum valve sealing groove.

[0047] refer to Fig.10 , which shows the case where the third embodiment is applied to a double-sided groove, with a first sub-groove 4 and two second sub-grooves 5 symmetrically formed on both side walls of the groove 2; refer to Fig.11, which shows the case where the third embodiment is applied to a double-sided groove, and has a first sub-groove 4 and two second sub-grooves 5 which are asymmetrically formed on the two side walls of the groove 2; refer to Fig.12 , which shows the case where the third embodiment is applied to a single-sided groove, having a first sub-groove 4 and a second sub-groove 5; refer to Fig.13 As shown, the third embodiment is applied to a single-sided groove, which has a first sub-groove 4 and a second sub-groove 5, and the first sub-groove 4 and the second sub-groove 5 are connected together; The structure provided in the third embodiment is applicable to double-sided grooves and single-sided grooves, but cannot be applied to borderless grooves.

[0048] It should be further explained that, in order to ensure the strength of the groove, the wall thickness A of the vacuum gate valve sealing structure above the upper side wall of the second sub-groove 5 in each embodiment is greater than 0.8 mm.

[0049] Optionally, the first embodiment, the second embodiment or the third embodiment described above is further improved, and a glue layer is formed on the inner surface of the vacuum gate valve sealing structure, and the inner surface includes the inner surfaces of the groove 2, the first sub-groove 4 and the second sub-groove 5.

[0050] In a fourth embodiment, the present invention provides a method for manufacturing a vacuum gate valve sealing structure, which is used to manufacture the vacuum gate valve sealing structure described in any one of the above embodiments, comprising the following steps: S1, a groove 2 is formed on a metal substrate 1; S2, forming at least one first sub-groove 4 on the bottom wall of the groove 2; and / or, forming at least one second sub-groove 5 on the side wall of the groove 2; S3, providing an upper mold, wherein the upper mold is formed into a molding cavity mold of a sealing ring shape and size; Providing a middle mold, wherein the middle mold is formed into a molding cavity mold for accommodating a metal base member; Providing a lower die, the lower die is used to support the middle die; S4, placing the middle mold on the lower mold, applying glue in the groove and then putting the specified glue; S5, cover the upper mold and enter the vulcanization molding equipment for vulcanization molding; S6, remove the upper die, middle die and lower die.

[0051] Further improving the fourth embodiment, the following steps are also included: When executing step S4, the inner surfaces of the groove 2, the first sub-groove 4 and the second sub-groove 5 are sandblasted, then coated with glue, and then a specified glue material is placed.

[0052] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present invention belongs. It will also be understood that, unless expressly defined herein, terms such as those defined in general dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and not interpreted in an ideal or overly formal sense.

[0053] The present invention has been described in detail above through specific implementation modes and embodiments, but these do not constitute limitations of the present invention. Without departing from the principles of the present invention, those skilled in the art may also make many variations and improvements, which should also be regarded as the protection scope of the present invention.

Claims

1. A vacuum gate valve sealing structure, comprising a metal base (1) and a groove (2) formed on the metal base (1), a sealing ring (3) arranged in the groove (2), characterized in that: Also includes: At least one first sub-groove (4) is formed in the groove (2); the sealing ring (3) fills the groove (2) and the first sub-groove (4), and the sealing ring (3) partially protrudes from the opening of the groove (2).

2. The vacuum door valve sealing structure according to claim 1, characterized in that: The first sub-groove (4) is formed on the bottom wall of the groove (2).

3. The vacuum door valve sealing structure according to claim 2, characterized in that: The opening size of the first sub-groove (4) is smaller than the opening size of the vacuum valve sealing groove by more than 1 mm, and the depth of the first sub-groove (4) is more than 1 mm.

4. The vacuum door valve sealing structure according to claim 2, characterized in that: The first sub-groove (4) is a rectangular groove or a dovetail groove.

5. The vacuum door valve sealing structure according to claim 2, characterized in that: It also includes: at least one second sub-groove (5) formed on the side wall of the groove (2), and the sealing ring (3) also fills the second sub-groove (5).

6. The vacuum door valve sealing structure according to claim 5, characterized in that: The opening size of the second sub-groove (5) is smaller than the opening size of the vacuum valve sealing groove and the depth of the vacuum valve sealing groove.

7. The vacuum door valve sealing structure according to claim 5, characterized in that: The wall thickness of the vacuum gate valve sealing structure above the upper side wall of the second sub-groove (5) is greater than 0.8 mm.

8. The vacuum door valve sealing structure according to any one of claims 1 to 7, characterized in that: A glue layer is formed on the inner surface of the vacuum door valve sealing structure.

9. A method for manufacturing a vacuum door valve sealing structure, used for manufacturing the vacuum door valve sealing structure according to any one of claims 1 to 8, characterized in that: The following steps are involved: S1, forming a groove (2) on a metal base member (1); S2, forming at least one first sub-groove (4) on the bottom wall of the groove (2); and / or forming at least one second sub-groove (5) on the side wall of the groove (2); S3, providing an upper mold, wherein the upper mold is formed into a molding cavity mold of a sealing ring shape and size; Providing a middle mold, wherein the middle mold is formed into a molding cavity mold for accommodating a metal base member; Providing a lower die, the lower die is used to support the middle die; S4, placing the middle mold on the lower mold, applying glue in the groove and then putting the specified glue; S5, cover the upper mold and enter the vulcanization molding equipment for vulcanization molding; S6, remove the upper die, middle die and lower die.

10. The method for manufacturing a vacuum door valve sealing structure according to claim 9, characterized in that: The following steps are also included: When executing step S4, the inner surfaces of the groove (2), the first sub-groove (4) and the second sub-groove (5) are sandblasted, then coated with glue, and then a specified glue material is placed.

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