Position relation detection system

Abstract

A positional relationship detection system (50) is provided with a measurement unit (51) for measuring a positional relationship, a recording unit (52) for recording measurement data obtained by the measurement unit in time series, and a calculation unit (53). The calculation unit acquires, on the basis of the measurement data recorded in the recording unit, target time-series data, which is time-series data for a specific amount to be detected indicating the positional relationship. The calculation unit specifies a first peak and a second peak, which are two of a plurality of peaks of an object vibration, which is a vibration of a detection object amount represented in the object time-series data. The calculation unit finds, as a stationary detection target amount, the average value of the detection target amounts included in the target time-series data between the first peak and the second peak, which is the detection target amount after the target vibration has disappeared.

Description

Technical Field

[0001] The present invention relates to a position relationship detection system, which detects the relative position relationship between a holding portion and a transfer object portion in a conveying device, wherein the conveying device comprises a conveying device that holds a conveying object by the holding portion and conveys the conveying object, and a transfer object portion that transfers the conveying object by the conveying device. Background Art

[0002] An example of the positional relationship detection system described above is disclosed in Japanese Patent Gazette No. 6146537 (Patent Document 1). In the following description of the background technology, the reference numerals in Patent Document 1 are cited in parentheses. The conveying equipment described in Patent Document 1 comprises: a ceiling traveling vehicle (10) that holds and conveys a conveying object by means of a holding portion (15); and a loading port (3) that transfers the conveying object by means of the ceiling traveling vehicle (10). Furthermore, the positional relationship detection system described in Patent Document 1 is configured to detect the relative positional relationship between the holding portion (15) and the loading port (3) using a teaching unit (20) mounted on the ceiling traveling vehicle (10). Specifically, when the teaching unit (20) is arranged above the loading port (3), the actual position of the holding portion (15) when the reference position of the loading port (3) is taken as the origin, and the rotation angle and inclination angle of the holding portion (15) relative to the reference plane of the loading port (3) are detected as detection object quantities representing the above-mentioned positional relationship.

[0003] Patent document 1: Japanese Patent No. 6146537.

[0004] However, the detection target quantity indicating the relative positional relationship between the holding portion and the transfer target portion (the loading port in Patent Document 1) may vibrate. Figure 6 As described, when the teaching unit above the loading port shakes, the detection target volume vibrates. According to Patent Document 1, when the detection target volume vibrates like this, the detection target volume can be accurately obtained by obtaining the center value of the amplitude of the detection target volume.

[0005] Patent document 1 does not disclose a method for obtaining the central value of the amplitude of the detection object quantity, but for example, it is considered to obtain the central value of the amplitude of the detection object quantity by obtaining the time average value of the detection object quantity. However, the time average value may be different depending on the time range for obtaining the average value. Therefore, sometimes it is impossible to obtain the central value of the amplitude of the detection object quantity with high accuracy by only obtaining the time average value of the detection object quantity (in other words, the detection object quantity after the vibration of the detection object quantity disappears, that is, the static detection object quantity). Summary of the invention

[0006] Therefore, it is desired to realize a technology that can easily improve the accuracy of the derived stationary detection target quantity even when the detection target quantity representing the relative positional relationship between the holding portion and the transfer target site vibrates.

[0007] The position relationship detection system disclosed in the present invention detects the relative position relationship between a holding portion and a transfer target portion in a conveying device, wherein the conveying device includes a conveying device and the transfer target portion, wherein the conveying device holds a conveying target object and conveys the conveying target object through the holding portion, and the transfer target portion transfers the conveying target object through the conveying device, and the position relationship detection system includes a measuring portion, a recording portion, and a computing portion, wherein the measuring portion measures the position relationship, the recording portion records the measurement data obtained by the measuring portion in a time series, and the computing portion obtains time series data of a specific detection target quantity representing the position relationship, namely, object time series data, based on the measurement data recorded in the recording portion, and specifies two of a plurality of peaks of vibration of the detection target quantity, namely, a first peak and a second peak, of the object vibration, which are shown in the object time series data, and obtains an average value of the detection target quantity included in the object time series data between the first peak and the second peak as the detection target quantity after the object vibration disappears, namely, the stationary detection target quantity.

[0008] Effects of the Invention

[0009] According to this configuration, when the time average value of the detection object amount is calculated as the detection object amount after the vibration of the detection object amount disappears, that is, the static detection object amount, the average value is calculated using the object time series data between the first peak and the second peak as the object. Therefore, the number of data that swings to the positive side relative to the center value of the amplitude and the number of data that swings to the negative side relative to the center value of the amplitude contained in the object time series data as the object for which the average value is calculated can be made equal (the same or approximately the same), thereby easily suppressing the deviation of the average value of the detection object amount to the positive side or the negative side relative to the center value of the amplitude. Therefore, it is easy to improve the accuracy of the static detection object amount derived by the calculation unit.

[0010] Further features and advantages of the positional relationship detection system will become apparent from the following description of the embodiments described with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a figure which shows the conveyance equipment according to an embodiment.

[0012] Figure 2 It is a figure which shows the conveyance apparatus according to an embodiment.

[0013] Figure 3is a block diagram showing a positional relationship detection system according to an embodiment.

[0014] Figure 4 It is a diagram showing a detection unit and a detected unit according to an embodiment.

[0015] Figure 5 It is a diagram showing a detection unit and a detected unit according to an embodiment.

[0016] Figure 6 It is a perspective view showing a detected unit according to the embodiment.

[0017] Figure 7 This is a diagram to explain the X-direction distance, Y-direction distance, and Z-axis rotation angle.

[0018] Figure 8 This is a diagram for explaining the distance in the Z direction and the tilt angle in the X direction.

[0019] Fig. 9 This is a diagram for explaining the distance in the Z direction and the inclination angle in the Y direction.

[0020] Fig.10 This is a diagram showing an example of time series data of the number of detection objects.

[0021] Fig.11 This is a diagram showing another example of time series data of the number of detection objects. DETAILED DESCRIPTION

[0022] The embodiment of the position relationship detection system is described with reference to the accompanying drawings. Figure 3 As shown, the positional relationship detection system 50 includes a measuring unit 51, a recording unit 52, and a computing unit 53. In this embodiment, the positional relationship detection system 50 includes a detection unit 60 (see Figure 4 , Figure 5 ) is provided with these measuring unit 51, recording unit 52 and computing unit 53. Different from this configuration, it is also possible to form a configuration in which the measuring unit 51, recording unit 52 and computing unit 53 are separately provided on a plurality of hardware. For example, it is possible to form a configuration in which the measuring unit 51 and the recording unit 52 are provided on the detection unit 60, and the computing unit 53 is provided on the conveying device 1 described later (refer to Figure 1 , Figure 2 In this case, for example, by controlling the control unit 30 (refer to Figure 2 ) to realize the function of the operation unit 53.

[0023] Position relationship detection system 50 is used to Figure 1The conveying device 100 is exemplified. The conveying device 100 includes: a conveying device 1 that holds a conveying object 2 by a holding portion 10 and conveys the conveying object 2; and a transfer object portion 6 that transfers the conveying object 2 by the conveying device 1. The position relationship detection system 50 detects the relative position relationship between the holding portion 10 and the transfer object portion 6 in the conveying device 100. The conveying object 2 is, for example, a front opening unified pod (FOUP) for storing semiconductor wafers. In addition, the transfer object portion 6 is, for example, a loading port of a processing device 5 that processes the conveying object 2 (or the storage object stored in the conveying object 2), a storage port or a storage conveyor for storing the conveying object 2, or a storage shelf for temporarily storing the conveying object 2. The storage shelf is, for example, arranged at a position Z1 above the loading port of the processing device 5.

[0024] Hereinafter, the direction along the up-down direction (vertical direction) is referred to as the Z direction, a direction orthogonal to the Z direction is referred to as the X direction, and a direction orthogonal to both the Z direction and the X direction is referred to as the Y direction. Furthermore, one side of the X direction is referred to as the X direction first side X1, and the other side of the X direction is referred to as the X direction second side X2. In addition, one side of the Y direction is referred to as the Y direction first side Y1, and the other side of the Y direction is referred to as the Y direction second side Y2. In addition, in this specification, "along a direction" is not limited to a method parallel to the direction, but also includes a method slightly inclined relative to the direction.

[0025] Figure 1 and Figure 2 The conveying device 1 of the present embodiment shown is configured as follows. The conveying device 1 includes a traveling portion 41 that travels along a travel path and a main body portion 44 connected to the traveling portion 41. The main body portion 44 is supported by the traveling portion 41 in a state where it is arranged at the lower side Z2 relative to the traveling portion 41. The conveying object 2 is conveyed by the conveying device 1 in a state where it is accommodated in the main body portion 44 (specifically, the internal space of the cover portion 45 of the main body portion 44).

[0026] The travel path of the travel unit 41 is formed by the rail 4. The travel unit 41 has wheels 43 that rotate on the travel surface (here, the upper surface) of the rail 4, and the wheels 43 are rotated and driven by a travel drive motor 42 (for example, an electric motor such as a servo motor), so that the travel unit 41 travels along the rail 4. Here, the rail 4 is suspended from the ceiling 3, and the travel path is formed along the ceiling 3. That is, the conveying device 1 is a ceiling conveying vehicle.

[0027] The conveying device 1 is configured to transfer the conveying object 2 to the transfer target location 6 by lowering the holding portion 10 (specifically, the holding portion 10 holding the conveying object 2) toward the transfer target location 6. Figure 4 and Figure 5 As shown, the transfer target portion 6 is provided with a positioning mechanism 7 that engages with the lower portion of the transport target 2 to position the transport target 2, and the transport target 2 transferred from the holding portion 10 to the transfer target portion 6 is arranged at the transfer target portion 6 in a state of being positioned by the positioning mechanism 7. Figure 1 The positioning mechanism 7 is omitted.

[0028] exist Figure 4 and Figure 5 In the example shown, the positioning mechanism 7 is configured to engage with the bottom of the lower portion of the conveyed object 2 to position the conveyed object 2. Specifically, the positioning mechanism 7 includes a moving pin that engages with a recessed portion (e.g., a groove-shaped recessed portion) not shown in the figure formed at the bottom of the conveyed object 2, and is configured to engage the moving pin with the recessed portion to position the conveyed object 2. The configuration of the positioning mechanism 7 is not limited to this, and for example, the positioning mechanism 7 may be configured to engage with the outer edge of the lower portion of the conveyed object 2 to position the conveyed object 2.

[0029] The conveying device 1 includes a lifting device 20 for lifting the holding portion 10. Although the structure of the lifting device 20 is not limited to this, the lifting device 20 of this embodiment is configured as follows. Figure 2 As shown, the lifting device 20 includes a rotating body 21 (for example, a cylindrical member), a wound member 22 (for example, a belt or a wire) that is wound around and unwound freely on the rotating body 21, and a lifting drive motor 23 (for example, an electric motor such as a servo motor) that rotationally drives the rotating body 21. The lifting device 20 is configured to lift the holding portion 10 by winding and unwinding the wound member 22 driven by the rotation of the rotating body 21, while the holding portion 10 is suspended by the wound member 22. Specifically, the lifting device 20 raises the holding portion 10 by winding the wound member 22, and lowers the holding portion 10 by unwinding the wound member 22.

[0030] When the conveying device 1 is traveling along the travel path, the holding portion 10 is arranged at the travel height. Here, the travel height is the height at which the conveying object 2 held by the holding portion 10 is stored in the main body 44 (see Figure 2 When the object 2 is transferred between the holding unit 10 and the transfer target portion 6, the holding unit 10 is arranged at the transfer height. The transfer height is the height corresponding to the transfer target portion 6 (see Figure 1 ) is set according to the height of the transfer object part 6.

[0031] like Figure 1 and Figure 2As shown, the holding portion 10 is configured to hold the conveying object 2 from the upper side Z1. Specifically, the holding portion 10 supports the flange portion 2a formed on the upper portion of the conveying object 2 via the supporting member 11, thereby holding the conveying object 2. The conveying device 1 includes a holding drive motor (for example, an electric motor such as a servo motor) not shown in the figure for driving the holding portion 10, and the holding drive motor drives the holding portion 10 to perform a holding action of holding the conveying object 2 and a holding release action of releasing the holding of the conveying object 2. Figure 2 In the example shown, the holding drive motor is configured to move the pair of support members 11 closer to each other and further away from each other. The holding operation of the holding unit 10 is performed by moving the pair of support members 11 closer to each other, and the holding release operation of the holding unit 10 is performed by moving the pair of support members 11 further away from each other. The holding operation and the holding release operation are performed in a state where the holding unit 10 is arranged at a transfer height.

[0032] Although not shown in the figure, the conveying device 1 may also include an adjustment device for adjusting at least one of the horizontal position of the holding portion 10, the rotation position of the holding portion 10 around the vertical axis along the Z direction, and the inclination angle of the holding portion 10 relative to the horizontal plane. For example, the adjustment device may be configured to include one or both of a moving device for moving the holding portion 10 in the width direction and a rotating device for rotating the holding portion 10 around the vertical axis. Here, the width direction is a horizontal direction orthogonal to the travel direction of the conveying device 1. Figure 1 and Figure 2 In the example shown, the X direction is the traveling direction, and the Y direction is the width direction.

[0033] The moving device is configured, for example, to move the lifting device 20 in the width direction, thereby moving the holding portion 10 supported by the lifting device 20 in the width direction. The rotating device is configured, for example, to rotate the lifting device 20 around the vertical axis, thereby rotating the holding portion 10 supported by the lifting device 20 around the vertical axis. When the transfer target portion 6 is arranged at a position deviated from the travel path of the conveyor device 1 in a plan view (viewed in the Z direction), the conveyor device 1 moves the holding portion 10 in the width direction to a position overlapping with the transfer target portion 6 in a plan view by the above-mentioned moving device, and then lowers the holding portion 10 toward the transfer target portion 6, thereby transferring the conveyed object 2 to the transfer target portion 6.

[0034] like Figure 2As shown, the conveying device 1 includes a control unit 30 for controlling the operation of the conveying device 1. The control unit 30 controls the travel drive motor 42 so that the travel unit 41 performs a travel operation of traveling along a travel path. In addition, the control unit 30 controls the lifting drive motor 23 so that the lifting device 20 performs a lifting operation of lifting and lowering the holding unit 10. The lifting operation includes a lifting operation of raising the holding unit 10 and a lowering operation of lowering the holding unit 10. In addition, the control unit 30 controls the holding drive motor (not shown) so that the holding unit 10 performs a holding operation and a holding release operation. The control unit 30 includes, for example, a CPU and other computing devices and peripheral circuits such as a memory. The various functions of the control unit 30 are realized through the cooperation of these hardware and the program executed on the hardware such as the computing device.

[0035] When the object 2 to be transported is transferred between the holding unit 10 and the transfer target location 6, the control unit 30 causes the travel unit 41 to perform a travel operation to move the transport device 1 to a target stop position corresponding to the transfer target location 6, while the holding unit 10 is arranged at the travel height. The target stop position is set at a position corresponding to the transfer target location 6 in the travel direction (in the direction of travel). Figure 1 and Figure 2 In the example shown, the control unit 30 controls the lifting device 20 to lower the holding portion 10 holding the object 2 from the travel height to the transfer height, and then controls the lifting device 20 to release the holding of the object 2. Thereafter, the lifting device 20 controls the lifting device 20 to raise the holding portion 10 not holding the object 2 from the transfer height to the travel height. In addition, in the case of transferring the object 2 from the transfer target portion 6 to the holding portion 10, the control unit 30 controls the lifting device 20 to lower the holding portion 10 not holding the object 2 from the travel height to the transfer height, and then controls the lifting device 20 to raise the holding portion 10 not holding the object 2 from the transfer height to the travel height.

[0036] The target stop position at which the conveying device 1 stops when transferring the conveying object 2 between the holding portion 10 and the transfer target portion 6 and the target movement amount at which the holding portion 10 moves when transferring the conveying object 2 between the holding portion 10 and the transfer target portion 6 are set so as to be able to appropriately transfer the conveying object 2. The control unit 30 obtains the set values ​​of the target stop position and the target movement amount by referring to a storage device (for example, a storage device provided on the conveying device 1) and the like, and causes the conveying device 1 to perform a transfer operation of the conveying object 2. The target movement amount of the holding portion 10 includes, for example, a target lifting amount of the holding portion 10 by the lifting device 20 and an adjustment amount of the holding portion 10 by the above-mentioned adjustment device (for example, a target movement amount of the holding portion 10 by the moving device, a target rotation amount of the holding portion 10 by the rotating device).

[0037] The above-mentioned target stop position and target motion amount are set when the conveying device 100 is introduced. In addition, in order to avoid the inability to properly transfer the conveying object 2 due to changes over the years, the target stop position and the target motion amount are generally adjusted and updated through regular inspections, etc. The setting and updating of the target stop position and the target motion amount can be performed based on the detection result of the relative position relationship between the holding part 10 and the transfer object part 6 by the position relationship detection system 50. That is, the position relationship detection system 50 can know the offset between the position of the holding part 10 and the target position (the ideal position for transferring the conveying object 2 to the transfer object part 6), and the target stop position and the target motion amount are adjusted to reduce the offset. The following is a description of the structure of the position relationship detection system 50 of this embodiment.

[0038] As described above, the positional relationship detection system 50 includes a measuring unit 51, a recording unit 52, and a computing unit 53. The recording unit 52 records the measurement data obtained by the measuring unit 51 in a time series. The recording unit 52 includes a storage medium (e.g., a flash memory) that can store and rewrite information. The measurement data is recorded in the recording unit 52 by the computing unit 53. The computing unit 53 includes a computing unit such as a CPU and peripheral circuits such as a memory. The functions of the computing unit 53 are realized by the cooperation of these hardware and the program executed on the hardware such as the computing unit.

[0039] The measuring unit 51 measures the relative positional relationship between the holding unit 10 and the transfer target portion 6 (hereinafter, sometimes referred to as "positional relationship"). The position where the holding unit 10 is arranged when the conveying target 2 is transferred between the holding unit 10 and the transfer target portion 6 (in this embodiment, the position where the holding unit 10 performs a holding action and a holding release action) is referred to as the "transfer position", and the measurement of the positional relationship by the measuring unit 51 is performed, for example, when the holding unit 10 is arranged at a position corresponding to the transfer position (the transfer position, or a position set based on the transfer position and different from the transfer position). In this embodiment, the conveying device 1 is located at the above-mentioned target stop position, and the measuring unit 51 measures the positional relationship when the holding unit 10 is located at a target height set according to the height of the transfer target portion 6 (the above-mentioned transfer height, or a height set based on the transfer height and different from the transfer height). The target height is, for example, a height Z1 higher than the set height relative to the transfer height.

[0040] like Figure 4 and Figure 5 As shown, in this embodiment, the position relationship detection system 50 includes a detection unit 60 and a detected unit 70. The measuring unit 51, the recording unit 52 and the computing unit 53 are provided on the detection unit 60. One of the detection unit 60 and the detected unit 70 is held on the holding unit 10 instead of the transport object 2, and the other of the detection unit 60 and the detected unit 70 is arranged on the transfer object portion 6. The one of the detection unit 60 and the detected unit 70 held on the holding unit 10 is configured to have a weight and a center of gravity position equal to those of the transport object 2, for example. Here, "equal" only needs to be equal to the extent of performing the same function, and may not be completely the same.

[0041] like Figure 4 and Figure 5 As shown in the embodiment, the detection unit 60 is held by the holding part 10, and the detection unit 70 is arranged at the transfer target part 6. Specifically, the holding part 10 holds the detection unit 60 by supporting the supported part 60a formed on the upper part of the detection unit 60 by the supporting member 11. The shape of the supported part 60a is formed to be, for example, to be aligned with the flange part 2a of the conveying target 2 (see Figure 2 ) corresponding to the shape. The detection unit 70 is arranged at the transfer target portion 6 in a state where it is positioned by the positioning mechanism 7. Figure 4 and Figure 5 In the illustrated example, the detection unit 70 is positioned relative to the transfer target site 6 by engaging a moving pin included in the positioning mechanism 7 with a recessed portion (not shown) formed on the bottom of the detection unit 70 .

[0042] The measuring unit 51 measures the relative positional relationship between the detecting unit 60 and the detected unit 70 , thereby measuring the relative positional relationship between the holding unit 10 holding the detecting unit 60 and the transfer target site 6 where the detected unit 70 is arranged. Figure 4 The diagram shows a state in which the holding portion 10 holding the detection unit 60 is lowered while the detection unit 70 is arranged on the transfer target site 6 . Figure 5 The state in which the holding unit 10 holding the detection unit 60 is lowered to the above-mentioned target height is shown, and in this state, the measuring unit 51 measures the positional relationship. Figure 5 As shown, the target height is set at a height at which the detecting unit 60 and the detected unit 70 are not in contact.

[0043] like Figure 6 As shown, the detection unit 70 includes a plate-shaped portion 73 formed in a plate shape and two wall portions (a first wall portion 71 and a second wall portion 72) provided on the upper surface (the surface on the upper side Z1) of the plate-shaped portion 73. The recessed portion for engaging the above-mentioned moving pin is formed on the lower surface (the surface on the lower side Z2) of the plate-shaped portion 73. The first wall portion 71 is arranged on the portion of the plate-shaped portion 73 on the first side X1 in the X direction, and the second wall portion 72 is arranged on the portion of the plate-shaped portion 73 on the second side X2 in the X direction.

[0044] Here, the reference plane of the transfer target part 6 is set as the "target reference plane S2". The target reference plane S2 is a plane (plane) set with the transfer target part 6 as a reference. For example, the upper surface of the transfer target part 6 (the loading surface on which the transport object 2 is loaded) can be set as the target reference plane S2. If the plane is set with the transfer target part 6 as a reference, a plane away from the transfer target part 6 or a virtual plane can also be set as the target reference plane S2. Figure 6 to Figure 9 Although the transfer target portion 6 is omitted, in this embodiment, Figure 6 to Figure 9 As shown in FIG. 1 , the upper surface (an example of a surface away from the transfer target site 6 ) of the detection target unit 70 disposed on the transfer target site 6 is set as the target reference plane S2 . The target reference plane S2 is set as a horizontal plane in terms of design.

[0045] In addition, the reference surface of the holding portion 10 is set as the "holding reference surface S1". The holding reference surface S1 is a surface (plane) set with the holding portion 10 as a reference. If it is a surface set with the holding portion 10 as a reference, a surface away from the holding portion 10 or a virtual surface can also be set as the holding reference surface S1. Figure 8 and Fig. 9 Although the holding portion 10 is omitted, in this embodiment, Figure 8 and Fig. 9As shown in FIG. 1 , the upper surface (an example of a surface away from the holding portion 10 ) of the supported portion 60 a held by the holding portion 10 is set as a holding reference surface S1 . The holding reference surface S1 is set as a horizontal surface in terms of design.

[0046] In addition, the reference position of the holding portion 10 is set to "holding reference position C1", and the reference position of the transfer object part 6 is set to "object reference position C2". The holding reference position C1 is a position set with the holding portion 10 as a reference. If the position is set with the holding portion 10 as a reference, a position away from the holding portion 10 or a virtual position can also be used as the holding reference position C1. The object reference position C2 is a position set with the transfer object part 6 as a reference. If the position is set with the transfer object part 6 as a reference, a position away from the transfer object part 6 or a virtual position can also be used as the object reference position C2. In this embodiment, Figure 8 and Fig. 9 As shown, the position on the holding reference plane S1 is referred to as the holding reference position C1, and the position on the target reference plane S2 is referred to as the target reference position C2.

[0047] The holding reference plane S1 and the target reference plane S2 are set so that the reference plane S1 and the target reference plane S2 are kept parallel to each other when the relative positional relationship between the holding portion 10 and the transfer target portion 6 is ideal. In addition, the holding reference position C1 and the target reference position C2 are set so that the reference position C1 and the target reference position C2 overlap when viewed from above when the relative positional relationship between the holding portion 10 and the transfer target portion 6 is ideal.

[0048] like Figure 4 and Figure 5 As shown, in this embodiment, the detection unit 60 (specifically, the measuring unit 51) includes a distance sensor (for example, a laser rangefinder) that measures the distance to the measurement object as a sensor that measures the relative positional relationship between the holding unit 10 and the transfer target portion 6. Specifically, the detection unit 60 includes six distance sensors, namely, a first sensor 61, a second sensor 62, a third sensor 63, a fourth sensor 64, a fifth sensor 65, and a sixth sensor 66.

[0049] Figure 6 Schematically represents the measurement object of each distance sensor (61-66). Figure 6As shown, the first sensor 61 measures the distance in the X direction to the surface of the second wall portion 72 perpendicular to the X direction. The second sensor 62 measures the distance in the Y direction to the surface of the first wall portion 71 perpendicular to the Y direction, and the third sensor 63 measures the distance in the Y direction to the surface of the second wall portion 72 perpendicular to the Y direction. The second sensor 62 and the third sensor 63 are arranged at different positions in the X direction. The fourth sensor 64, the fifth sensor 65, and the sixth sensor 66 measure the distance in the Z direction to the upper surface of the plate-like portion 73, which is the target reference plane S2. The fourth sensor 64, the fifth sensor 65, and the sixth sensor 66 are arranged at different positions on the surface perpendicular to the Z direction.

[0050] Figure 6 This indicates that the relative positional relationship between the holding unit 10 and the transfer target portion 6 is in an ideal state. In this ideal state, the distance measured by the second sensor 62 and the distance measured by the third sensor 63 are equal to each other. In addition, in this ideal state, the distance measured by the fourth sensor 64, the distance measured by the fifth sensor 65, and the distance measured by the sixth sensor 66 are equal to each other.

[0051] The calculation unit 53 obtains an index indicating the relative positional relationship between the holding unit 10 and the transfer target portion 6 based on the measurement results of each distance sensor (61 to 66), specifically, by calculation (geometric calculation) based on the measurement results of each distance sensor (61 to 66). Specifically, the calculation unit 53 obtains at least one of the X-direction distance ΔX, the Y-direction distance ΔY, the Z-direction distance ΔZ, the Z-axis rotation angle θZ, the X-direction inclination angle θX, and the Y-direction inclination angle θY as an index indicating the relative positional relationship between the holding unit 10 and the transfer target portion 6. In addition, since the calculation method for obtaining these indices is obvious to those skilled in the art, the detailed description is omitted.

[0052] Figure 7 to Figure 9 This indicates that the relative positional relationship between the holding portion 10 and the transfer target portion 6 deviates from the ideal state. Figure 7 As shown in FIG. 1 , the X-direction distance ΔX is the distance in the X direction between the holding reference position C1 and the target reference position C2, the Y-direction distance ΔY is the distance in the Y direction between the holding reference position C1 and the target reference position C2, and the Z-axis rotation angle θZ is the rotation angle of the holding portion 10 and the transfer target portion 6 around the reference axis A along the Z direction. Here, the axis passing through the target reference position C2 along the Z direction is set as the reference axis A. In addition, as Figure 8 and Fig. 9As shown, the Z-direction distance ΔZ is the distance in the Z-direction between the holding reference position C1 and the object reference position C2, the X-direction inclination angle θX is the slope of the holding reference plane S1 and the object reference plane S2 in the X-direction (in other words, the rotation angle around the axis along the Y-direction), and the Y-direction inclination angle θY is the slope of the holding reference plane S1 and the object reference plane S2 in the Y-direction (in other words, the rotation angle around the axis along the X-direction).

[0053] The above-mentioned teaching can be performed based on the index indicating the relative positional relationship between the holding unit 10 and the transfer target portion 6 obtained in this way. For example, the detection result (calculation result) of the index indicating the relative positional relationship between the holding unit 10 and the transfer target portion 6 is sent from the detection unit 60 to the conveying device 1 (specifically, the control unit 30) to perform teaching.

[0054] However, vibration may occur in the index indicating the relative positional relationship between the holding portion 10 and the transfer object portion 6. In the present embodiment, the measuring portion 51 performs measurement in a state where the holding portion 10 holding the detection unit 60 is lowered to the above-mentioned target height by unwinding the wound member 22. Therefore, due to the shaking of the holding portion 10 during measurement by the measuring portion 51, the detection result of the detection unit 60 may vibrate. The positional relationship detection system 50 of the present embodiment has the following configuration, and even when the index indicating the relative positional relationship between the holding portion 10 and the transfer object portion 6 vibrates, the center value of the amplitude of the vibration (i.e., the value after the vibration disappears) can be obtained with high accuracy.

[0055] Hereinafter, the average value between the first peak P1 and the second peak P2 obtained as described below among the indicators representing the relative positional relationship between the holding portion 10 and the transfer object portion 6 is referred to as the "detection object amount". In the present embodiment, the detection object amount is at least one of the X-direction distance ΔX, the Y-direction distance ΔY, the Z-direction distance ΔZ, the Z-axis rotation angle θZ, the X-direction inclination angle θX, and the Y-direction inclination angle θY. For indicators other than the detection object amount, the average value can be obtained by another method, such as obtaining the average value of the entire period from the start of measurement to the end of measurement. In addition, for example, in the case where the measurement is performed using the measuring portion 51 in a state where the detection unit 60 is not shaking, such as in the case where the measurement portion 51 is calibrated in a state where the detection unit 60 and the detected unit 70 are placed on a calibration cart, the average value of the entire period from the start of measurement to the end of measurement can also be obtained for the detection object amount.

[0056] Fig.10Represents time series data from the start to the end of measurement of a detection object quantity. The recording unit 52 records the measurement data obtained by the measuring unit 51 in a time series (for example, a plurality of measurement data obtained at a certain time interval). In the present embodiment, the recording unit 52 records continuous measurement data (for example, continuous measurement data at a certain time interval) for a predetermined set period. The recording unit 52 records, for example, all measurement data within the set period. The set period is, for example, a period from the start of measurement to a predetermined measurement time (for example, Fig.10 In the example shown, it is the period from the start of measurement to the end of measurement).

[0057] The calculation unit 53 obtains the time series data of the specific detection object quantity representing the positional relationship, that is, the object time series data, based on the measurement data recorded in the recording unit 52. In the present embodiment, the calculation unit 53 obtains the time series data (geometric calculation) based on the measurement data recorded in the recording unit 52. Fig.10 The computing unit 53 performs calculations based on the measurement data recorded in the recording unit 52 in real time, for example, and displays the obtained value of the detection object amount on the display unit 67 (see Figure 4 , Figure 5 ). Fig.10 In the example shown, the detection target amount vibrates so as to form valley peaks at time t1 , time t3 , time t5 , and time t7 , and to form mountain peaks at time t2 , time t4 , and time t6 .

[0058] The calculation unit 53 specifies two of the multiple peaks of the vibration of the detection object quantity, that is, the object vibration, namely, the first peak P1 and the second peak P2. The first peak P1 and the second peak P2 may both be mountain peaks or valley peaks. Fig.10 In the example shown, both the first peak P1 and the second peak P2 are valley peaks. Furthermore, the operation unit 53 obtains the average value of the detection object quantity included in the object time series data between the first peak P1 and the second peak P2 as the detection object quantity after the object vibration disappears, that is, the stationary detection object quantity. The operation unit 53, for example, obtains the average value of all detection object quantities included in the object time series data between the first peak P1 and the second peak P2 as the stationary detection object quantity. The stationary detection object quantity obtained by the operation unit 53 is displayed on the display unit 67, for example. Fig.10 In the example shown, the period from time t1 corresponding to the first peak P1 to time t7 corresponding to the second peak P2 is set as the average calculation period for finding the average value of the detection object quantity. The average value of the detection object quantity is found by, for example, dividing the sum of the values ​​of N detection object quantities included in the object time series data by N.

[0059] exist Fig.10In the example shown, the number of valley peaks is greater than the number of mountain peaks. Fig.10 In the example shown, assuming that the average value of the amount of detection object included in the object time series data for the entire period from the start of measurement to the end of measurement is calculated, the average value of the amount of detection object becomes a value that is biased toward the negative side relative to the center value of the amplitude of the amount of detection object. In contrast, by calculating the average value of the amount of detection object included in the object time series data between the first peak P1 and the second peak P2 as described above, the number of data that swings toward the positive side relative to the center value of the amplitude and the number of data that swings toward the negative side relative to the center value of the amplitude can be made equal (the same or approximately the same). As a result, it is easy to suppress the deviation of the average value of the amount of detection object to the positive side or the negative side relative to the center value of the amplitude to be smaller, and as a result, it is easy to improve the accuracy of the static amount of detection object derived by the calculation unit 53.

[0060] However, if the distance from the distance sensor provided by the measuring unit 51 to the object to be measured is outside the range of distances that the distance sensor can measure, there is a situation where the measuring unit 51 cannot normally measure the positional relationship. In this case, the value of the detection object quantity derived by the operation unit 53 may become a value outside the assumed detection range (i.e., an abnormal value). In view of this, for example, the operation unit 53 can be configured to use all values ​​of the detection object quantity contained in the object time series data between the first peak P1 and the second peak P2, except for the value determined to be an abnormal value based on a predetermined judgment condition, for the calculation of the average value. The judgment condition is, for example, set to a condition in which the value within the assumed detection range is determined to be a normal value, and the value outside the detection range is determined to be an abnormal value. In addition, it can also be configured so that, with respect to the detection object quantity exceeding the assumed detection range, the upper limit value of the detection range is used as the value of the detection object quantity, and with respect to the detection object quantity below the assumed detection range, the lower limit value of the detection range is used as the value of the detection object quantity, and the average value is calculated. Furthermore, it is also possible to configure such that, regarding the detection target amount determined as an abnormal value, an estimated value based on interpolation or the like is used as the value of the detection target amount, and an average value is calculated.

[0061] From the viewpoint of improving the accuracy of the stationary detection object quantity derived by the calculation unit 53, it is preferable that one or more peaks are included between the first peak P1 and the second peak P2 (in Fig.10 In order to ensure that the number of peaks included between the first peak P1 and the second peak P2 is large, for example, the operation unit 53 can specify the first peak in the object time series data of a set period (for example, the period from the start of measurement to the end of measurement) as the first peak P1, and the last peak as the second peak P2 (see Fig.10). In addition, the first peak P1 and the second peak P2 may be adjacent peaks. In this case, one of the first peak P1 and the second peak P2 is a mountain peak, and the other of the first peak P1 and the second peak P2 is a valley peak.

[0062] In the present embodiment, after the holding unit 10 is lowered from the travel height to the target height set according to the height of the transfer target portion 6, the measurement by the measuring unit 51 is performed. In this case, generally, the amount of descent of the transport object 2 to the transfer target portion 6 is reduced, and the period of vibration of the holding unit 10 when the transfer target portion 6 is the object of measurement is shortened accordingly. If the period of vibration of the holding unit 10 is shortened, the period of vibration of the detection target amount is also shortened, so that the number of peaks included in the vibration of the detection target amount can be appropriately ensured, and the measurement time of the positional relationship by the measuring unit 51 can be suppressed to be short. In view of this, for example, it can be configured that the lifting device 20 reduces the amount of descent of the transport object 2 to the transfer target portion 6 (in other words, the lifting device 20 reduces the amount of descent of the holding unit 10 to the transfer target portion 6) and the measurement time of the positional relationship by the measuring unit 51 is set to be shorter accordingly. In this case, for example, the measurement time when the storage rack (another example of the transfer target location 6) disposed at a position Z1 above the load port is measured is set shorter than the measurement time when the load port (an example of the transfer target location 6) of the processing device 5 is measured. The measurement time of the positional relationship by the measuring unit 51 is set, for example, so that the measurement time is continuously or stepwise shortened as the above-mentioned descending amount decreases.

[0063] Fig.11 The solid line represents Fig.10 The target time series data shown is target time series data having a shorter cycle than the vibration of the detection target quantity. Fig.11 Indicated by dotted line Fig.10 The object shown is time series data. Fig.11 In the example shown, the period of vibration of the detection target quantity represented by the solid line is half the period of vibration of the detection target quantity represented by the dotted line. In this case, even if the measurement time (the time from the start of measurement to the end of measurement) of the positional relationship by the measuring unit 51 is set to Fig.10 The measurement time is half of that in the previous example, and the number of peaks contained in the vibration of the detected object is ensured to be the same as that in the previous example. Fig.10 About the same.

[0064] [Other implementation methods]

[0065] (1) In the above-mentioned embodiment, the measurement unit 51 is described as an example in which the measurement unit 51 includes a distance sensor as a sensor for measuring the positional relationship. However, the present disclosure is not limited to such a configuration, and the measurement unit 51 may include a sensor other than the distance sensor (e.g., a camera) as a sensor for measuring the positional relationship.

[0066] (2) In the above-mentioned embodiment, the configuration in which the positioning mechanism 7 engaging with the lower portion of the transport object 2 to position the transport object 2 is provided on the transfer target portion 6 is described as an example. However, the present disclosure is not limited to such a configuration, and the positioning mechanism 7 may be not provided on the transfer target portion 6. In addition, a mechanism for positioning the transport object 2 in a form different from the positioning mechanism 7 may be provided on the transfer target portion 6.

[0067] (3) In the above-mentioned embodiment, the structure in which the holding part 10 holds the conveying object 2 from the upper side Z1 is described as an example. However, the present disclosure is not limited to such a structure, and for example, the structure can also be such that the conveying object 2 is supported by the holding part 10 from the lower side Z2, thereby holding the conveying object 2. In this case, for example, the conveying device 1 can also be configured to include an advancing and retreating device that advances and retreats the holding part 10 in the horizontal direction (extends or retracts), and the conveying object 2 is transferred to the transfer object part 6 by lowering the holding part 10 in the extended state toward the transfer object part 6.

[0068] (4) In the above-mentioned embodiment, the structure of a ceiling transport vehicle in which the transport device 1 travels along a travel path formed along the ceiling 3 is described as an example. However, the present disclosure is not limited to such a structure, and the transport device 1 may be a stacking crane or other rail transport vehicle, or a trackless transport vehicle such as an AGV (Automated Guided Vehicle) or an AMR (Autonomous Mobile Robot). In the case where the transport device 1 is a trackless transport vehicle, the transport device 1 travels along a virtually formed travel path instead of a physically formed travel path such as a track. For example, a plurality of detected objects such as QR codes and RF (Radio Frequency) tags are provided on the ground, and the travel path is virtually formed in the form of connecting the plurality of detected objects. It can also be configured such that such detected objects are not provided on the ground, but the travel path is virtually formed by a route calculated based on the recognition results of the surrounding environment.

[0069] (5) In addition, the configurations disclosed in the above-mentioned embodiments may be combined with the configurations disclosed in other embodiments (including combinations between the embodiments described as other embodiments) as long as no contradiction occurs. With regard to other configurations, the embodiments disclosed in this specification are merely examples in all aspects. Therefore, various changes may be appropriately made without departing from the scope of the present disclosure.

[0070] [Summary of this embodiment]

[0071] The following is a summary of the embodiments of the positional relationship detection system described above.

[0072] A positional relationship detection system detects a relative positional relationship between a holding portion and a transfer target portion in a conveying device, wherein the conveying device includes a conveying device and the transfer target portion, wherein the conveying device holds a conveying target object through a holding portion and conveys the conveying target object, and the transfer target portion transfers the conveying target object through the conveying device, and wherein the positional relationship detection system includes a measuring portion, a recording portion, and a computing portion, wherein the measuring portion measures the positional relationship, the recording portion records measurement data obtained by the measuring portion in a time series, and the computing portion obtains time series data of a specific detection target quantity representing the positional relationship, namely, object time series data, based on the measurement data recorded in the recording portion, and specifies two of a plurality of peaks of vibration of the detection target quantity represented in the object time series data, namely, a first peak and a second peak, and obtains an average value of the detection target quantity included in the object time series data between the first peak and the second peak as the detection target quantity after the object vibration disappears, namely, the stationary detection target quantity.

[0073] According to this configuration, when the time average value of the detection object amount is calculated as the detection object amount after the vibration of the detection object amount disappears, that is, the static detection object amount, the average value is calculated using the object time series data between the first peak and the second peak as the object. Therefore, the number of data that swings to the positive side relative to the center value of the amplitude and the number of data that swings to the negative side relative to the center value of the amplitude contained in the object time series data as the object for which the average value is calculated can be made equal (the same or approximately the same), thereby easily suppressing the deviation of the average value of the detection object amount to the positive side or negative side relative to the center value of the amplitude. Therefore, it is easy to improve the accuracy of the static detection object amount derived by the calculation unit.

[0074] Preferably, the conveying device is configured to transfer the conveying object to the transfer object portion by lowering the holding portion toward the transfer object portion, a direction along the up-down direction is set as the Z direction, a direction orthogonal to the Z direction is set as the X direction, a direction orthogonal to both the Z direction and the X direction is set as the Y direction, the detection object quantity is at least one of the X-direction distance, the Y-direction distance, the Z-direction distance, the Z-axis rotation angle, the X-direction inclination angle, and the Y-direction inclination angle, the X-direction distance is a reference position of the holding portion, i.e., a holding reference position, and a reference position of the transfer object portion, i.e., The X-direction distance is the distance between the holding reference position and the object reference position in the Y direction, the Y-direction distance is the distance between the holding reference position and the object reference position in the Z direction, the Z-axis rotation angle is the rotation angle of the holding portion and the transfer object portion around the reference axis along the Z direction, the X-direction inclination angle is the slope of the reference plane of the holding portion, i.e., the holding reference plane, and the reference plane of the transfer object portion, i.e., the object reference plane, in the X direction, and the Y-direction inclination angle is the slope of the holding reference plane and the object reference plane in the Y direction.

[0075] According to this configuration, when the transport device is configured to transfer the transport object to the transfer target location by lowering the holding unit toward the transfer target location, it is easy to obtain useful data indicating the relative positional relationship between the holding unit and the transfer target location with high accuracy.

[0076] In the above-mentioned structure, it is preferred that the conveying device includes a lifting device for lifting the holding part, and the lifting device is configured to include a rotating body, a wound component that is freely wound on and released on the rotating body, and a lifting drive motor that rotationally drives the rotating body. In a state where the holding part is suspended by the wound component, the winding and releasing of the wound component driven by the rotation of the rotating body are used to lift the holding part, and a positioning mechanism is provided at the transfer object portion for engaging with the lower part of the conveying object to position the conveying object.

[0077] As described in this configuration, when the holding part is raised or lowered while the holding part is suspended, the vibration of the holding part is likely to increase as the holding part is raised or lowered. For example, when the measuring part performs measurement after the holding part is lowered to a target height set according to the height of the transfer object part, the vibration of the holding part is likely to increase at the time point when the holding part reaches the target height. In this case, if the measurement of the measuring part is performed after the vibration of the holding part subsides, the time required for the measurement increases, and therefore, the detection efficiency of the relative positional relationship between the holding part and the transfer object part deteriorates. In this regard, according to the technology disclosed in the present invention, even in a state where the detection object amount vibrates due to the vibration of the holding part, the static detection object amount can be obtained with high accuracy. Therefore, the technology disclosed in the present invention is preferably applied to a configuration in which the holding part is raised or lowered while the holding part is suspended.

[0078] In the above configuration, it is preferable that the time for measuring the positional relationship by the measuring unit is set shorter as the amount of descent of the transport object to the transfer target location by the lifting device decreases.

[0079] For example, when the measuring unit performs measurement after the holding unit is lowered to a target height set according to the height of the transfer object portion, generally, the amount of descent of the transport object to the transfer object portion is reduced and the period of vibration of the holding unit when the transfer object portion is the object of measurement is shortened accordingly. If the period of vibration of the holding unit is shortened, the period of vibration of the detection object quantity is also shortened, so the number of peaks included in the object vibration can be appropriately ensured, and the measurement time of the positional relationship by the measuring unit can be suppressed to be shorter. In view of this, according to the present configuration, since the amount of descent of the transport object to the transfer object portion is reduced and the measurement time of the positional relationship by the measuring unit is set to be shorter accordingly, the time required for measurement by the measuring unit can be suppressed to be shorter within the range in which the first peak and the second peak can be appropriately identified, and the time for obtaining the static detection object quantity can be shortened.

[0080] In the positional relationship detection system of each of the above-mentioned structures, it is preferred that the recording unit records the continuous measurement data of a predetermined set period, and the calculation unit specifies the front peak in the object time series data of the set period as the first peak, and specifies the back peak as the second peak.

[0081] According to this configuration, the average value of the detection target amount can be obtained by making the most of the measurement data recorded in the recording unit. Therefore, it is easy to further improve the accuracy of the stationary detection target amount derived by the calculation unit.

[0082] Preferably, the calculation unit uses all values ​​of the detection target amount included in the target time series data between the first peak and the second peak, except for values ​​determined to be abnormal values ​​based on a predetermined determination condition, for calculation of the average value.

[0083] According to this configuration, since abnormal values ​​are removed from the values ​​of the detection object quantity contained in the object time series data between the first peak and the second peak, and all values ​​except the abnormal values ​​are used for calculating the average value, it is easy to further improve the accuracy of the stationary detection object quantity derived by the calculation unit.

[0084] The positional relationship detection system disclosed in the present invention only needs to achieve at least one of the above-mentioned effects.

[0085] Description of Reference Numerals

[0086] 1: Conveying device

[0087] 2: Transport object

[0088] 6: Transfer target area

[0089] 7: Positioning mechanism

[0090] 10: Maintaining part

[0091] 20: Lifting device

[0092] 21: Rotating body

[0093] 22: Winding parts

[0094] 23: Lifting drive motor

[0095] 50: Position relationship detection system

[0096] 51: Measurement Department

[0097] 52: Records Department

[0098] 53: Operation Department

[0099] 100: Conveying equipment

[0100] A: Reference axis

[0101] C1: Maintain reference position

[0102] C2: Object reference position

[0103] P1: First Peak

[0104] P2: Second Peak

[0105] S1: Maintain the reference surface

[0106] S2: Object plane

[0107] X: X direction

[0108] Y: Y direction

[0109] Z: Z direction

[0110] ΔX: distance in X direction

[0111] ΔY: Distance in Y direction

[0112] ΔZ: Distance in Z direction

[0113] θX: X-direction tilt angle

[0114] θY: Y-direction tilt angle

[0115] θZ: Z-axis rotation angle.

Claims

1. A position relationship detection system, which detects the relative position relationship between a holding portion and a transfer target portion in a conveying device, wherein the conveying device comprises a conveying device and the transfer target portion, wherein the conveying device holds a conveying target object by the holding portion and conveys the conveying target object, and the transfer target portion transfers the conveying target object by the conveying device. The positional relationship detection system includes a measuring unit, a recording unit, and a computing unit. The measuring unit measures the positional relationship, and the recording unit records measurement data obtained by the measuring unit in time series. The computing unit acquires object time series data, which is time series data of a specific detection object amount indicating the positional relationship, based on the measurement data recorded in the recording unit. identifying two of a plurality of peaks of the vibration of the detection target quantity, namely, the target vibration, which are represented in the target time series data, namely, a first peak and a second peak; The average value of the detection object amount included in the target time series data between the first peak and the second peak is obtained as the detection object amount after the target vibration disappears, that is, the stationary detection object amount.

2. The position relationship detection system according to claim 1, wherein: The transport device is configured to transfer the transport object to the transfer target location by lowering the holding portion toward the transfer target location, A direction along the up-down direction is defined as a Z direction, a direction perpendicular to the Z direction is defined as an X direction, and a direction perpendicular to both the Z direction and the X direction is defined as a Y direction. The detection object quantity is at least one of the X-direction distance, the Y-direction distance, the Z-direction distance, the Z-axis rotation angle, the X-direction tilt angle, and the Y-direction tilt angle. The X-direction distance is the distance in the X-direction between the reference position of the holding portion, i.e., the holding reference position, and the reference position of the transfer target portion, i.e., the target reference position. The Y-direction distance is the distance between the holding reference position and the object reference position in the Y-direction. The Z direction distance is the distance between the holding reference position and the object reference position in the Z direction. The Z-axis rotation angle is a rotation angle of the holding portion and the transfer target portion around a reference axis along the Z direction. The X-direction inclination angle is the slope of the reference plane of the holding portion, i.e., the holding reference plane, and the reference plane of the transfer target portion, i.e., the target reference plane, in the X-direction. The Y-direction inclination angle is a slope between the holding reference plane and the object reference plane in the Y direction.

3. The position relationship detection system according to claim 2, wherein: The conveying device includes a lifting device for lifting the holding portion. The lifting device is configured to include a rotating body, a wound member that is wound around and unwound freely, and a lifting drive motor that drives the rotating body to rotate. In a state where the holding portion is suspended by the wound member, the holding portion is lifted and lowered by winding and unwinding the wound member driven by the rotation of the rotating body. The transfer target portion is provided with a positioning mechanism that engages with a lower portion of the transport target to position the transport target.

4. The positional relationship detection system according to any one of claims 1 to 3, wherein: The recording unit records the continuous measurement data for a predetermined setting period. The calculation unit specifies the first peak in the target time series data in the set period as the first peak, and specifies the last peak as the second peak.

5. The positional relationship detection system according to any one of claims 1 to 3, wherein: The calculation unit uses all values ​​of the detection target amount included in the target time series data between the first peak and the second peak, except for values ​​determined to be abnormal values ​​based on a predetermined determination condition, for calculation of the average value.

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