Laminated piezoelectric ceramic displacement and output force test tool and test method
By designing a laminated piezoelectric ceramic testing system including output force and displacement testing tooling, the problem of the inability to accurately detect the output force and displacement of the laminated piezoelectric ceramics in the prior art is solved, and a high-precision detection effect is achieved.
Patent Information
- Application Number
- CN202411983908.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-04-08
- Estimated Expiration
- 2044-12-31
AI Technical Summary
The prior art lacks tooling that can accurately detect the output force and displacement of stacked piezoelectric ceramics at the same time, and the existing output force detection tooling is not accurate enough to obtain accurate output force measurements.
A stacked piezoelectric ceramic displacement and output force testing tooling is designed, including output force testing tooling and displacement testing tooling. The output force test tool detects the output force through a force sensor. The force sensor consists of a laminated piezoelectric ceramic and a strain gauge sensor in a sensor with the same material as the laminated piezoelectric ceramic to be tested. The strain gauge sensor is attached to the ceramic surface to detect deformation. Displacement testing tooling uses a laser interferometer probe to detect displacement.
The simultaneous detection of output force and displacement of stacked piezoelectric ceramics is achieved. The design of the force sensor ensures the accuracy of output force measurement, and the use of laser interferometer improves the accuracy and stability of displacement detection.
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Figure CN119779405A_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of piezoelectric ceramic detection, and in particular relates to a stacked piezoelectric ceramic displacement and output force testing tool and a testing method. Background Art
[0002] Laminated piezoelectric ceramics are a special type of piezoelectric material, which is composed of multiple piezoelectric ceramic sheets stacked together and has good electromechanical coupling performance. Applying pressure on the surface of piezoelectric materials can generate electric charges, which is called the positive piezoelectric effect, also known as the generator or sensor effect, which converts mechanical energy into electrical energy. Conversely, when a certain voltage is applied, the inverse piezoelectric effect can change the length of such materials. This actuator effect converts electrical energy into mechanical energy. Using this characteristic, the displacement and output force of piezoelectric ceramics are measured. Laminated piezoelectric ceramics adopt a multi-layer structure, and each layer of piezoelectric ceramic sheets has a certain prestress. This structure can increase the stiffness and sensitivity of piezoelectric ceramics, so that it can also generate a large displacement and output force under a small external force. However, there is no tooling for simultaneously detecting the output force and displacement of laminated piezoelectric ceramics, and the current tooling for output force detection of laminated piezoelectric ceramics is not accurate enough to obtain accurate output force. Summary of the invention
[0003] In view of this, in order to solve the problem that there is currently no tooling for simultaneously performing output force detection and displacement detection on stacked piezoelectric ceramics, and that the current tooling for output force detection on stacked piezoelectric ceramics is not accurate enough to obtain accurate output force, the present invention proposes a stacked piezoelectric ceramic displacement and output force testing tooling and a testing method.
[0004] To achieve the above object, the present invention adopts the following technical solutions:
[0005] A stacked piezoelectric ceramic displacement and output force testing tool, comprising:
[0006] marble platform;
[0007] Output force testing tooling, the output force testing tooling is fixedly arranged on a marble platform, the output force testing tooling includes a base plate, four columns, an upper pressing plate, a lower pressing plate, a locking structure and a force sensor, the four columns are spaced and fixedly arranged on the base plate, the four columns are slidably penetrated through the upper pressing plate and the lower pressing plate, the upper pressing plate is located above the lower pressing plate, the laminated piezoelectric ceramic to be tested is located between the base plate and the lower pressing plate, the force sensor is located between the upper pressing plate and the lower pressing plate, and the locking structure can lock the relative position of the upper pressing plate and the column; the force sensor includes a laminated piezoelectric ceramic used in the sensor and a strain gauge sensor, the laminated piezoelectric ceramic used in the sensor is made of the same material as the laminated piezoelectric ceramic to be tested, the strain gauge sensor is attached to the surface of the laminated piezoelectric ceramic used in the sensor, and the output force generated by the laminated piezoelectric ceramic to be tested can be transmitted to the strain gauge sensor through the laminated piezoelectric ceramic used in the sensor;
[0008] The displacement test fixture is fixedly arranged on a marble platform. The displacement test fixture comprises a laser interferometer probe and a bracket for supporting the laser interferometer probe. The laser interferometer probe can detect the displacement of the laminated piezoelectric ceramic to be tested.
[0009] As a preferred solution of the above-mentioned laminated piezoelectric ceramic displacement and output force testing tooling, the bracket includes a base, a vertical guide rail and a clamp, the base is fixedly set on the marble platform, the vertical guide rail is fixed on the base, the vertical guide rail extends along the vertical direction, the clamp is slidably set on the vertical guide rail, and the clamp clamps the laser interferometer probe.
[0010] As a preferred solution for the above-mentioned laminated piezoelectric ceramic displacement and output force testing tooling, the locking structure includes two locking nuts, and the upper ends of the two columns located at diagonal positions are provided with external threads, the locking nuts are screwed to the external threads, and the locking nuts abut against the top of the upper pressure plate.
[0011] As a preferred solution of the above-mentioned laminated piezoelectric ceramic displacement and output force testing tool, the laminated piezoelectric ceramic displacement and output force testing tool also includes a sealed cabinet, the sealed cabinet is provided with a marble platform, and the output force testing tool and the displacement testing tool are both located in the sealed cabinet.
[0012] As a preferred solution of the above-mentioned laminated piezoelectric ceramic displacement and output force testing tool, the laminated piezoelectric ceramic displacement and output force testing tool also includes an air floating platform, which adopts an air-damping mud vibration isolation system and is arranged between the ground and the marble platform.
[0013] As a preferred solution of the above-mentioned laminated piezoelectric ceramic displacement and output force testing fixture, the laminated piezoelectric ceramic displacement and output force testing fixture also includes two first high-density mass blocks, two ends of one of the first high-density mass blocks are respectively abutted against the laminated piezoelectric ceramic to be tested and the lower pressure plate, and are located below the laser interferometer probe, and two ends of the other first high-density mass block are respectively abutted against the base plate and the laminated piezoelectric ceramic to be tested.
[0014] As a preferred solution of the above-mentioned laminated piezoelectric ceramic displacement and output force testing fixture, the laminated piezoelectric ceramic displacement and output force testing fixture also includes two second high-density mass blocks, wherein the two ends of one second high-density mass block are respectively abutted against the force sensor and the upper pressure plate, and the two ends of the other second high-density mass block are respectively abutted against the force sensor and the lower pressure plate.
[0015] As a preferred solution of the above-mentioned laminated piezoelectric ceramic displacement and output force testing tool, the laminated piezoelectric ceramic displacement and output force testing tool also includes two first linear guides and two second linear guides, the first linear guides and the second linear guides are both cylindrical, the two first linear guides are respectively mounted on two columns located at diagonal positions, the first linear guides are located between the columns and the lower pressure plate, the two second linear guides are respectively mounted on two columns located at diagonal positions, and the second linear guides are located between the columns and the upper pressure plate.
[0016] As a preferred solution of the above-mentioned laminated piezoelectric ceramic displacement and output force testing tool, the laminated piezoelectric ceramic displacement and output force testing tool also includes a computer, the computer is set on the marble platform, and the strain gauge sensor and the laser interferometer probe are both connected to the computer.
[0017] The present invention also provides a method for testing the displacement and output force of laminated piezoelectric ceramics, using the above-mentioned laminated piezoelectric ceramic displacement and output force testing tool, comprising:
[0018] Apply voltage to the stacked piezoelectric ceramic to be tested;
[0019] The laminated piezoelectric ceramic in the sensor, which is made of the same material as the laminated piezoelectric ceramic to be measured, deforms under the interaction of the downward prestress of the upper pressing plate and the upward stress output by the electrical signal of the laminated piezoelectric ceramic to be measured;
[0020] The strain gauge sensor obtains the output force information of the laminated piezoelectric ceramic to be measured through the deformation of the laminated piezoelectric ceramic in the sensor.
[0021] Compared with the prior art, the present invention provides a laminated piezoelectric ceramic displacement and output force test fixture and test method with the following beneficial effects:
[0022] 1. The present invention provides a stacked piezoelectric ceramic displacement and output force test fixture and a test method. In the stacked piezoelectric ceramic displacement and output force test fixture, the force sensor is composed of a stacked piezoelectric ceramic for sensor with the same material as the stacked piezoelectric ceramic to be tested and a strain gauge sensor. The strain gauge of the strain gauge sensor is attached to the ceramic surface. After the stacked piezoelectric ceramic to be tested is input with voltage, the pressure generated by the stacked piezoelectric ceramic to be tested acts on the surface of the stacked piezoelectric ceramic for sensor, and the stacked piezoelectric ceramic for sensor produces a slight deformation, and the strain gauge is deformed accordingly, so that the information of the output force of the stacked piezoelectric ceramic to be tested is obtained through the strain gauge sensor. The stacked piezoelectric ceramic for sensor used in the force sensor and the stacked piezoelectric ceramic to be tested are of the same material, and the deformation of the two is consistent under the same pressure, so the measured value is closest to the true value. The stacked piezoelectric ceramic displacement and output force test fixture has sufficient accuracy in measuring the output force of the stacked piezoelectric ceramic to be tested to ensure the accuracy of the measured output force.
[0023] 2. The present invention provides a stacked piezoelectric ceramic displacement and output force test fixture and a test method. The stacked piezoelectric ceramic displacement and output force test fixture is also provided with a displacement test fixture, and the displacement of the stacked piezoelectric ceramic to be tested is detected by a laser interferometer probe. The laser interferometer is a high-precision, non-contact, real-time, multi-functional and highly stable measuring instrument. Therefore, the stacked piezoelectric ceramic displacement and output force test fixture can simultaneously detect the displacement and output force of the stacked piezoelectric ceramic to be tested.
[0024] 3. The present invention provides a stacked piezoelectric ceramic displacement and output force testing tool and a testing method. The stacked piezoelectric ceramic displacement and output force testing tool can slide the upper pressure plate up and down before the locking structure locks the upper pressure plate. After the upper pressure plate applies a set preload force to the force sensor, the position of the upper pressure plate is locked by the locking structure. The stacked piezoelectric ceramics of different sizes and shapes can be measured, and different preload forces can be applied. The tool is suitable for different stacked piezoelectric ceramics and different measurement requirements.
[0025] 4. The present invention provides a stacked piezoelectric ceramic displacement and output force test fixture and a test method. In the stacked piezoelectric ceramic displacement and output force test fixture, the output force test fixture and the displacement test fixture are set on a marble platform. The marble platform has a large density, a low thermal expansion coefficient and an extremely high hardness. It is not easily changed by environmental factors and has good vibration reduction and vibration absorption performance. The output force test fixture and the displacement test fixture are both located in a sealed cabinet. The sealed cabinet can reduce the interference of the external environment on the test data and reduce measurement errors. The air floating platform adopts an air-blocking mud vibration isolation system, and the air floating platform is set between the ground and the marble platform. The air floating platform has a shock-absorbing effect to prevent the vibration of the road surface caused by people walking or other reasons from being transmitted to the marble platform. The stability and reliability of the stacked piezoelectric ceramic displacement and output force test fixture are improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:
[0027] Figure 1 It is a structural schematic diagram of an output force test fixture, a displacement test fixture and a marble platform of a stacked piezoelectric ceramic displacement and output force test fixture provided by a specific embodiment of the present invention;
[0028] Figure 2 It is a structural schematic diagram of a stacked piezoelectric ceramic displacement and output force testing tool provided in a specific embodiment of the present invention;
[0029] Figure 3 It is a structural schematic diagram of an output force testing tool of a stacked piezoelectric ceramic displacement and output force testing tool provided by a specific embodiment of the present invention;
[0030] Figure 4 It is an exploded schematic diagram of an output force testing tool of a stacked piezoelectric ceramic displacement and output force testing tool provided by a specific embodiment of the present invention;
[0031] Figure 5 It is a schematic diagram of an exploded view of a displacement test fixture of a laminated piezoelectric ceramic displacement and output force test fixture provided by a specific embodiment of the present invention.
[0032] In the figure:
[0033] 1. Marble platform;
[0034] 2. The laminated piezoelectric ceramics to be tested;
[0035] 31. Bottom plate; 32. Column; 33. Lower pressure plate; 34. Upper pressure plate; 35. Force sensor; 36. Locking nut; 37. Second high-density mass block; 38. First high-density mass block; 39. Second linear guide rail; 30. First linear guide rail;
[0036] 41. Laser interferometer probe; 42. Fixture; 43. Vertical guide rail; 44. Base;
[0037] 5. Sealed cabinet;
[0038] 6. Air flotation platform;
[0039] 7. Computer. DETAILED DESCRIPTION
[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely explain the technical solutions in the embodiments of the present invention. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict, and the described embodiments are only part of the embodiments of the present invention, not all of the embodiments.
[0041] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0042] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0043] In the description of this embodiment, the terms "upper", "lower", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.
[0044] See also Figure 1-5The present invention provides a stacked piezoelectric ceramic displacement and output force test fixture and a test method, wherein the stacked piezoelectric ceramic displacement and output force test fixture comprises a marble platform 1, an output force test fixture and a displacement test fixture, wherein the output force test fixture is fixedly arranged on the marble platform 1, the output force test fixture comprises a bottom plate 31, four columns 32, an upper pressing plate 34, a lower pressing plate 33, a locking structure and a force sensor 35, wherein the four columns 32 are arranged at intervals and are all fixedly arranged on the bottom plate 31, the four columns 32 are all slidably penetrated through the upper pressing plate 34 and the lower pressing plate 33, the upper pressing plate 34 is located above the lower pressing plate 33, the stacked piezoelectric ceramic 2 to be tested is located between the bottom plate 31 and the lower pressing plate 33, and the force sensor 35 is fixedly arranged on the bottom plate 31. 5 is located between the upper pressing plate 34 and the lower pressing plate 33, and the locking structure can lock the relative position of the upper pressing plate 34 and the column 32; the force sensor 35 includes a laminated piezoelectric ceramic for sensor and a strain gauge sensor, the laminated piezoelectric ceramic for sensor and the laminated piezoelectric ceramic 2 to be tested are made of the same material, the strain gauge sensor is attached to the surface of the laminated piezoelectric ceramic for sensor, and the output force generated by the laminated piezoelectric ceramic 2 to be tested can be transmitted to the strain gauge sensor through the laminated piezoelectric ceramic for sensor; the displacement test fixture is fixedly set on the marble platform 1, and the displacement test fixture includes a laser interferometer probe 41 and a bracket for supporting the laser interferometer probe 41, and the laser interferometer probe 41 can detect the displacement of the laminated piezoelectric ceramic 2 to be tested.
[0045] In the stacked piezoelectric ceramic displacement and output force test fixture, the force sensor 35 is composed of a stacked piezoelectric ceramic for use in the sensor, which is the same material as the stacked piezoelectric ceramic 2 to be tested, and a strain gauge sensor. The strain gauge of the strain gauge sensor is attached to the ceramic surface. After the voltage is input to the stacked piezoelectric ceramic 2 to be tested, the pressure generated by the stacked piezoelectric ceramic 2 to be tested acts on the surface of the stacked piezoelectric ceramic for use in the sensor, and the stacked piezoelectric ceramic for use in the sensor produces a slight deformation, and the strain gauge is deformed accordingly, so that the information of the output force of the stacked piezoelectric ceramic 2 to be tested is obtained through the strain gauge sensor. The stacked piezoelectric ceramic for use in the sensor used in the force sensor 35 is the same material as the stacked piezoelectric ceramic 2 to be tested, and the deformation of the two is consistent under the same pressure, so the measured value is closest to the true value. The stacked piezoelectric ceramic displacement and output force test fixture has sufficient accuracy in measuring the output force of the stacked piezoelectric ceramic 2 to be tested, so as to ensure the accuracy of the measured output force.
[0046] The stacked piezoelectric ceramic displacement and output force test fixture is also provided with a displacement test fixture, which detects the displacement of the stacked piezoelectric ceramic 2 to be tested by a laser interferometer probe 41. The laser interferometer is a high-precision, non-contact, real-time, multi-functional and highly stable measuring instrument. Thus, the stacked piezoelectric ceramic displacement and output force test fixture can simultaneously detect the displacement and output force of the stacked piezoelectric ceramic 2 to be tested.
[0047] The stacked piezoelectric ceramic displacement and output force test fixture has four columns 32 fixedly arranged on the bottom plate 31. The four columns 32 are distributed at the four corners of the rectangle in this embodiment. The upper pressing plate 34 and the lower pressing plate 33 are both sleeved on the four columns 32. It can be understood that the four columns 32 are located at the four corners of the upper pressing plate 34 and the four corners of the lower pressing plate 33, which can improve stability and reliability. Before the locking structure locks the upper pressing plate 34, the upper pressing plate 34 can slide up and down. After the upper pressing plate 34 applies a set preload to the force sensor 35, the position of the upper pressing plate 34 is locked by the locking structure. It can measure stacked piezoelectric ceramics of different sizes and shapes, and can also apply different preloads. It is suitable for different stacked piezoelectric ceramics and different measurement requirements. Moreover, the output force test fixture and the displacement test fixture are arranged on a marble platform 1. The marble platform 1 has a large density, a low thermal expansion coefficient and an extremely high hardness, is not easily changed by environmental factors, and has good vibration reduction and vibration absorption performance, which can further improve the stability and reliability of the displacement and output force test fixture of the laminated piezoelectric ceramic.
[0048] Optionally, the locking structure includes two locking nuts 36. The upper ends of the two columns 32 at the diagonal positions are both provided with external threads. The locking nuts 36 are screwed with the external threads, and the locking nuts 36 abut against the upper surface of the upper pressing plate 34. When the upper pressing plate 34 moves down to the target position, the pressure of the upper pressing plate 34 on the force sensor 35 reaches the set pre-tightening force, and the locking nuts 36 are rotated until they abut against the upper pressing plate 34, thereby fixing the relative position of the upper pressing plate 34 and the column 32.
[0049] Optionally, the stacked piezoelectric ceramic displacement and output force test tool further includes a sealed cabinet 5, the sealed cabinet 5 is provided with a marble platform 1, and the output force test tool and the displacement test tool are both located in the sealed cabinet 5. The sealed cabinet 5 can reduce the interference of the external environment on the test data and reduce the measurement error. In this embodiment, the sealed cabinet 5 is made of aluminum plate material.
[0050] Optionally, the stacked piezoelectric ceramic displacement and output force test tool further includes an air-floating platform 6, which adopts an air-damping mud vibration isolation system and is arranged between the ground and the marble platform 1. The air-floating platform 6 has a shock-absorbing effect to prevent the vibration of the road surface caused by people walking or other reasons from being transmitted to the marble platform 1.
[0051] Optionally, the stacked piezoelectric ceramic displacement and output force testing tool also includes two first high-density mass blocks 38, two ends of one of the first high-density mass blocks 38 are respectively abutted against the stacked piezoelectric ceramic 2 to be tested and the lower pressure plate 33, and are located below the laser interferometer probe 41, and two ends of the other first high-density mass block 38 are respectively abutted against the base plate 31 and the stacked piezoelectric ceramic 2 to be tested.
[0052] Optionally, the stacked piezoelectric ceramic displacement and output force test fixture further includes two second high-density mass blocks 37, two ends of one second high-density mass block 37 respectively abut against the force sensor 35 and the upper pressing plate 34, and two ends of the other second high-density mass block 37 respectively abut against the force sensor 35 and the lower pressing plate 33. The first high-density mass block 38 and the second high-density mass block 37 have high densities and can accurately transmit the deformation of the stacked piezoelectric ceramic 2 to be tested to the stacked piezoelectric ceramic in the sensor.
[0053] Optionally, the bracket includes a base 44, a vertical guide rail 43 and a clamp 42, the base 44 is fixedly arranged on the marble platform 1, the vertical guide rail 43 is fixedly arranged on the base 44, the vertical guide rail 43 extends in the vertical direction, the clamp 42 is slidably arranged on the vertical guide rail 43, and the clamp 42 clamps the laser interferometer probe 41. By sliding the clamp 42 on the vertical guide rail 43, the distance between the laser interferometer probe 41 and the first high-density mass block 38 can be adjusted, and the displacement of the laminated piezoelectric ceramic 2 to be measured can be obtained by detecting the displacement of the first high-density mass block 38.
[0054] Optionally, the stacked piezoelectric ceramic displacement and output force test fixture further includes two first linear guides 30 and two second linear guides 39, the first linear guides 30 and the second linear guides 39 are both cylindrical, the two first linear guides 30 are respectively sleeved on the two columns 32 located at the diagonal position, the first linear guides 30 are located between the columns 32 and the lower pressing plate 33, the two second linear guides 39 are respectively sleeved on the two columns 32 located at the diagonal position, and the second linear guides 39 are located between the columns 32 and the upper pressing plate 34. It can be understood that the lower pressing plate 33 and the upper pressing plate 34 slide on the outer walls of the first linear guide 30 and the second linear guide 39 respectively, which can ensure that the upper pressing plate 34 and the lower pressing plate 33 slide up and down along a straight line.
[0055] Optionally, the stacked piezoelectric ceramic displacement and output force testing tool further includes a computer 7 , which is disposed on the marble platform 1 , and the strain gauge sensor and the laser interferometer probe 41 are both connected to the computer 7 .
[0056] In this embodiment, the upright column 32 , the bottom plate 31 , the upper pressing plate 34 and the lower pressing plate 33 are made of carbon steel.
[0057] The present invention also provides a method for testing the displacement and output force of laminated piezoelectric ceramics, using the above-mentioned laminated piezoelectric ceramic displacement and output force testing tool, comprising:
[0058] A voltage is applied to the laminated piezoelectric ceramic 2 to be tested; the laminated piezoelectric ceramic in the sensor, which is made of the same material as the laminated piezoelectric ceramic 2 to be tested, is deformed under the interaction of the downward prestress of the upper pressure plate 34 and the upward stress output by the electrical signal of the laminated piezoelectric ceramic 2 to be tested; the strain gauge sensor obtains the output force information of the laminated piezoelectric ceramic 2 to be tested through the deformation of the laminated piezoelectric ceramic in the sensor.
[0059] The force sensor 35 is composed of a piezoelectric ceramic in the sensor which is made of the same material as the piezoelectric ceramic 2 to be tested and a strain gauge sensor. The pressure acts directly on the surface of the piezoelectric ceramic in the sensor which is made of the same material as the piezoelectric ceramic 2 to be tested, producing a small deformation. The strain gauge is attached to the ceramic surface and connected to form a Wheatstone bridge (closed bridge). Due to the piezoresistance effect of the varistor, the bridge generates a highly linear voltage signal which is proportional to the pressure and proportional to the excitation voltage. The output force of the piezoelectric ceramic 2 to be tested can be obtained according to the calibrated voltage-output force relationship table. The voltage-output force relationship table is obtained by conducting multiple test calibrations. The standard voltage signal is calibrated to 2.0 / 3.0 / 3.3mV, etc. according to the different pressure ranges. Through weight calibration, the sensor has high temperature stability and time stability. The sensor has its own temperature compensation of 0-70°C and can be in direct contact with most media.
[0060] Obviously, the embodiments of the present invention disclosed above are only used to help illustrate the present invention. The embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. According to the content of this specification, many modifications and changes can be made. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. It is not necessary and impossible to exhaustively list all the embodiments here.
Claims
1. A stacked piezoelectric ceramic displacement and output force testing tool, characterized in that: include: Marble platform (1); The output force testing tool is fixedly arranged on a marble platform (1), and comprises a bottom plate (31), four columns (32), an upper pressing plate (34), a lower pressing plate (33), a locking structure and a force sensor (35). The four columns (32) are arranged at intervals and are all fixedly arranged on the bottom plate (31). The four columns (32) are all slidably arranged on the upper pressing plate (34) and the lower pressing plate (33). The upper pressing plate (34) is located above the lower pressing plate (33). The laminated piezoelectric ceramic (2) to be tested is located between the bottom plate (31) and the lower pressing plate ( 33), the force sensor (35) is located between the upper pressing plate (34) and the lower pressing plate (33), and the locking structure can lock the relative position of the upper pressing plate (34) and the column (32); the force sensor (35) includes a laminated piezoelectric ceramic used in the sensor and a strain gauge sensor, the laminated piezoelectric ceramic used in the sensor is made of the same material as the laminated piezoelectric ceramic (2) to be measured, the strain gauge sensor is attached to the surface of the laminated piezoelectric ceramic used in the sensor, and the output force generated by the laminated piezoelectric ceramic (2) to be measured can be transmitted to the strain gauge sensor through the laminated piezoelectric ceramic used in the sensor; A displacement test fixture is fixedly arranged on a marble platform (1), and comprises a laser interferometer probe (41) and a bracket for supporting the laser interferometer probe (41). The laser interferometer probe (41) can detect the displacement of the laminated piezoelectric ceramic (2) to be tested.
2. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: The bracket comprises a base (44), a vertical guide rail (43) and a clamp (42); the base (44) is fixedly arranged on the marble platform (1); the vertical guide rail (43) is fixedly arranged on the base (44); the vertical guide rail (43) extends in a vertical direction; the clamp (42) is slidably arranged on the vertical guide rail (43); and the clamp (42) clamps the laser interferometer probe (41).
3. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: The locking structure comprises two locking nuts (36). The upper ends of the two upright posts (32) at diagonal positions are both provided with external threads. The locking nuts (36) are screwed to the external threads. The locking nuts (36) abut against the upper surface of the upper pressing plate (34).
4. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: It also comprises a sealed cabinet (5), the sealed cabinet (5) being provided with a marble platform (1), and the output force testing tool and the displacement testing tool are both located in the sealed cabinet (5).
5. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: It also comprises an air-floating platform (6), which adopts an air-blocking mud vibration isolation system. The air-floating platform (6) is arranged between the ground and the marble platform (1).
6. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: It also includes two first high-density mass blocks (38), two ends of one of the first high-density mass blocks (38) respectively abutting against the laminated piezoelectric ceramic (2) to be measured and the lower pressing plate (33), and is located below the laser interferometer probe (41), and two ends of the other first high-density mass block (38) respectively abutting against the bottom plate (31) and the laminated piezoelectric ceramic (2) to be measured.
7. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: It also includes two second high-density mass blocks (37), wherein two ends of one second high-density mass block (37) are respectively in contact with the force sensor (35) and the upper pressing plate (34), and two ends of the other second high-density mass block (37) are respectively in contact with the force sensor (35) and the lower pressing plate (33).
8. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: The invention also comprises two first linear guide rails (30) and two second linear guide rails (39), wherein the first linear guide rails (30) and the second linear guide rails (39) are both cylindrical, and the two first linear guide rails (30) are respectively sleeved on two columns (32) located at diagonal positions, and the first linear guide rails (30) are located between the columns (32) and the lower pressing plate (33), and the two second linear guide rails (39) are respectively sleeved on the two columns (32) located at diagonal positions, and the second linear guide rails (39) are located between the columns (32) and the upper pressing plate (34).
9. The stacked piezoelectric ceramic displacement and output force testing tool according to claim 1, characterized in that: It also includes a computer (7), which is arranged on the marble platform (1), and the strain gauge sensor and the laser interferometer probe (41) are both connected to the computer (7).
10. A method for testing displacement and output force of laminated piezoelectric ceramics, characterized in that: The stacked piezoelectric ceramic displacement and output force testing tool according to any one of claims 1 to 9 comprises: Applying a voltage to the stacked piezoelectric ceramic (2) to be tested; The laminated piezoelectric ceramic in the sensor, which is made of the same material as the laminated piezoelectric ceramic (2) to be tested, deforms under the interaction of the downward prestress of the upper pressing plate (34) and the upward stress outputted by the electrical signal of the laminated piezoelectric ceramic (2) to be tested; The strain gauge sensor obtains output force information of the laminated piezoelectric ceramic (2) to be measured through the deformation of the laminated piezoelectric ceramic in the sensor.
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