A bearing device

Abstract

The present invention relates to the field of semiconductor technology, and specifically to a bearing device, which includes a shell with a accommodating chamber provided therein; a main shaft, rotatably connected to the accommodating chamber, and the main shaft is provided with a first wind corridor for adsorbing chips; a first guide shaft, movably sleeved on the outer wall of the main shaft, the first guide shaft is limited by the shell along the axial direction of the main shaft, the first guide shaft includes a first inner cavity, a first outer cavity and a first guide hole, the first inner cavity is connected to the first outer cavity through the first guide hole, the shell is provided with a first channel, and the first channel is connected to the first outer cavity. The present application realizes the gradual adsorption of the chip, reduces the potential damage to the chip caused by the sudden pressure change, and improves the adsorption accuracy and positioning accuracy of the chip, thereby improving the product yield and production efficiency in the semiconductor manufacturing process.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a bearing device. Background Art

[0002] In the field of semiconductor manufacturing and packaging, the die bonder head, as a key process equipment, undertakes the important task of accurately picking up chips from the wafer and placing them in the specified position.

[0003] Due to the unreasonable design of the adsorption system of the die bonder head or insufficient manufacturing precision, there are differences in the adsorption force at different positions when adsorbing the chip. This uneven adsorption force can cause the chip to shift or tilt during the pick-up and placement process, thereby affecting the accuracy and positioning accuracy of the chip. In the high-speed, high-precision semiconductor manufacturing process, such a small deviation may lead to a decrease in product yield. Summary of the invention

[0004] The purpose of the present invention is to provide a bearing device to solve the problem of uneven adsorption force of the die bonding machine head on the chip in the prior art.

[0005] The technical solution of the present invention is: a bearing device, comprising: a shell, which is provided with a accommodating chamber; a main shaft, rotatably connected to the accommodating chamber, and the main shaft is provided with a first wind corridor for adsorbing chips; a first guide shaft, movably sleeved on the outer wall of the main shaft, the first guide shaft is limited by the shell along the axial direction of the main shaft, the first guide shaft includes a first inner cavity, a first outer cavity and a first guide hole, the first inner cavity is connected to the first outer cavity through the first guide hole, and the shell is provided with a first channel, and the first channel is connected to the first outer cavity.

[0006] Preferably, the first inner cavity and the first outer cavity are both annular chambers, and there are multiple first guide holes, which are distributed in a circular array around the axis of the first guide shaft, and all of the multiple first guide holes connect the first inner cavity and the first outer cavity.

[0007] Preferably, at least two first seals are embedded in the inner wall of the first guide shaft, the first seals abut against the outer wall of the main shaft, and the first inner cavity is located between the at least two first seals.

[0008] Preferably, the outer wall of the first guide shaft is provided with a plurality of first mounting grooves, the plurality of first mounting grooves are distributed along the axial direction of the first guide shaft, an annular first rolling element is rotatably connected in the first mounting groove, and the first rolling element is rollingly connected to the inner wall of the shell.

[0009] Preferably, the main shaft is provided with a second wind corridor, the shell is provided with a second channel, one end of the second wind corridor is connected to the second channel for generating negative pressure on the second wind corridor, the other end of the second wind corridor is adsorbed and connected to a suction nozzle, and the first wind corridor is connected to the inside of the suction nozzle for adsorbing the chip.

[0010] Preferably, the main shaft is movably sleeved with a second guide shaft, the second guide shaft is rotatably connected between the shell and the main shaft, the second guide shaft includes a second inner cavity and a second outer cavity that are connected to each other, the second inner cavity is connected to the second wind corridor, the shell is provided with a second channel, and the second channel is connected to the second wind corridor through the second inner cavity and the second outer cavity.

[0011] Preferably, the main shaft is sleeved with a first sleeve and a second sleeve along its axial direction, the first sleeve, the first guide shaft, the second guide shaft and the second sleeve are abutted in sequence along the axial direction of the main shaft, and the main shaft is rotatably connected to the shell through the first sleeve and the second sleeve.

[0012] Preferably, the first sleeve comprises a first inner sleeve and a first outer sleeve, the first inner sleeve has an interference fit with the main shaft, the first outer sleeve has an interference fit with the shell, the first inner sleeve is rotatably connected to the first outer sleeve, the second sleeve comprises a second inner sleeve and a second outer sleeve, the second inner sleeve has an interference fit with the main shaft, the second outer sleeve has an interference fit with the shell, the second inner sleeve is rotatably connected to the second outer sleeve, and the outer diameter of the first inner sleeve is smaller than the outer diameter of the second inner sleeve.

[0013] Compared with the prior art, the advantages of the present invention are:

[0014] The first channel can be connected to an external negative pressure machine for vacuuming. The first outer chamber serves as the starting point and buffer space for negative pressure transmission, and plays a role in smooth transition and pressure regulation. As the gas inside the first outer chamber is gradually extracted, its internal pressure is significantly reduced. This change immediately affects the adjacent first inner chamber, prompting the gas in the first inner chamber to be extracted in an orderly manner. Since the pressure change of the first inner chamber is more moderate than that of the first outer chamber, the chip is gradually adsorbed, reducing the potential damage to the chip caused by sudden pressure changes, and improving the adsorption accuracy and positioning accuracy of the chip, thereby improving the product yield and production efficiency in the semiconductor manufacturing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described below in conjunction with the accompanying drawings and embodiments:

[0016] Figure 1 It is a structural schematic diagram of a bearing device according to the present invention;

[0017] Figure 2A front view of a bearing device according to the present invention;

[0018] Figure 3 For the present invention Figure 2 A schematic cross-sectional view of the bearing device AA;

[0019] Figure 4 This is a schematic diagram of an axial cross-sectional structure of a bearing device according to the present invention;

[0020] Figure 5 It is an enlarged cross-sectional structural schematic diagram of the first guide shaft and the second guide shaft of the present invention;

[0021] Figure 6 For the present invention Figure 2 A schematic cross-sectional structural diagram of the bearing device BB.

[0022] Description of reference numerals:

[0023] 1. Shell; 11. First channel; 12. Second channel; 13. Accommodating chamber; 2. Suction nozzle; 3. Main shaft; 31. First air gallery; 32. Second air gallery; 4. First guide shaft; 41. First sealing member; 42. First inner cavity; 43. First outer cavity; 44. First guide hole; 45. First mounting groove; 46. First rolling member; 5. Second guide shaft; 51. Second sealing member; 52. Second inner cavity; 53. Second outer cavity; 54. Second guide hole; 55. Second mounting groove; 56. Second rolling member; 6. First bushing; 61. First inner sleeve; 62. First outer sleeve; 7. Second bushing; 71. Second inner sleeve; 72. Second outer sleeve; 8. Third bushing; 81. Third inner sleeve; 82. Third outer sleeve. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0025] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0026] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] like Figure 1 As shown, a bearing device includes a housing 1 and a spindle 3. The housing 1 is provided with a receiving chamber 13. The spindle 3 is rotatably connected to the receiving chamber 13. Both ends of the spindle 3 extend out of the housing 1. The top of the spindle 3 is used for transmission connection with a driving member, such as a motor, etc. The driving member drives the spindle 3 to rotate relative to the housing 1. The bottom of the spindle 3 is used for adsorbing chips.

[0028] like Figures 2 to 3 As shown, the main shaft 3 is provided with a first wind corridor 31. Specifically, one end of the first wind corridor 31 is connected to the bottom end face of the main shaft 3, and the other end of the first wind corridor 31 is connected to the side wall of the main shaft 3. Preferably, the first wind corridor 31 is an "L"-shaped channel. The main shaft 3 is sleeved with a first guide shaft 4, and the first guide shaft 4 is rotatably connected in the shell 1. The first guide shaft 4 is limited by the shell 1 along the axial direction of the main shaft 3. The axis of the first guide shaft 4 is coaxial with the axis of the main shaft 3, that is, the first guide shaft 4 is limited by the shell 1 in its own axial direction. When the first guide shaft 4 rotates, the first guide shaft 4 is prevented from shaking up and down along its own axial direction, and the overall structure is prevented from vibrating, thereby improving the stability of the overall structure.

[0029] The first guide shaft 4 is a hollow shaft. In the present embodiment, the inner wall of the first guide shaft 4 is clearance-fitted with the outer wall of the main shaft 3, that is, the main shaft 3 rotates relative to the first guide shaft 4, and the first guide shaft 4 rotates relative to the housing 1. In other embodiments, the inner wall of the first guide shaft 4 is transitionally fitted or interference fit with the outer wall of the main shaft 3, the first guide shaft 4 and the main shaft 3 are relatively stationary, and the main shaft 3 drives the first guide shaft 4 to rotate relative to the housing 1 at the same time.

[0030] Specifically, at least two first sealing grooves are formed on the inner wall of the first guide shaft 4, and the first sealing grooves are annular grooves. First sealing members 41 are provided in the first sealing grooves. In this embodiment, the first sealing members 41 are annular sealing rings, so as to seal the connection between the first guide shaft 4 and the main shaft 3.

[0031] The first guide shaft 4 is provided with a first inner cavity 42, a first outer cavity 43 and a first guide hole 44. Specifically, the first inner cavity 42 is a cavity formed by the first guide shaft 4 being recessed inwardly. The first inner cavity 42 is located between two first sealing grooves, that is, two sealing rings seal the first inner cavity 42.

[0032] The first air corridor 31 is connected to the first inner cavity 42, and the first inner cavity 42 and the first outer cavity 43 are connected through the first guide hole 44. In this embodiment, a plurality of first guide holes 44 are provided, and the axes of the first guide holes 44 are located in the same plane. The axes of the first guide holes 44 are all arranged along the radial direction of the first guide shaft 4, and the plurality of guide holes are distributed in an array around the axis of the first guide shaft 4. Specifically, the first outer cavity 43 is a cavity formed by the outer side wall of the first guide shaft 4 being recessed inward.

[0033] like Figure 4 and Figure 5 As shown, the housing 1 is provided with a first channel 11, which is connected to the outside of the housing 1 and the accommodating chamber 13 of the housing 1. Specifically, one end of the first channel 11 is used to connect to the negative pressure machine, and the other end is connected to the first outer chamber 43. The negative pressure machine first evacuates the first outer chamber 43 through the first channel 11. At the moment when the negative pressure machine is started and acts on the first outer chamber 43, the outer chamber quickly forms a negative pressure environment. Since the first outer chamber 43 has a certain space, the first outer chamber 43 serves as the first buffer space for generating negative pressure and as the starting point for negative pressure transmission, and it plays a primary role in smooth transition and pressure regulation.

[0034] As the gas inside the first outer cavity 43 is gradually extracted, its internal pressure is significantly reduced. This change immediately produces a chain reaction on the adjacent first inner cavity 42. During this process, the negative pressure effect of the first outer cavity 43 gradually penetrates and affects the first inner cavity 42, causing the gas in the first inner cavity 42 to be extracted in an orderly manner. However, the pressure change of the first inner cavity 42 is more moderate than that of the first outer cavity 43. Finally, the first wind corridor 31 is evacuated under the influence of the first inner cavity 42 to adsorb the chip. Through the above-mentioned gradual and uniform adsorption of the chip, not only the risk of chip damage caused by instantaneous high pressure is effectively avoided, but also the stability and reliability of the adsorption process are significantly improved. This design not only protects the integrity of the chip, but also optimizes the efficiency and safety of the entire adsorption process, and ensures the subsequent chip processing or packaging operations.

[0035] The outer wall of the first guide shaft 4 is provided with a plurality of first mounting grooves 45, which are annular grooves. A first rolling member 46 is provided in the first mounting groove 45, which is annular and can be movably arranged in the first mounting groove 45. When the first guide shaft 4 rotates relative to the housing 1, the outer wall of the first rolling member 46 is connected with the housing 1 by rolling. Preferably, the cross section of the first rolling member 46 is circular to reduce the contact area between the first rolling member 46 and the housing 1. Specifically, the first outer cavity 43 is located between the two rolling members, and the first guide shaft 4 does not rotate with the housing 1 completely through the two first rolling members 46. The part of the first guide shaft 4 close to the two ends is in clearance fit with the housing 1. This part of the first guide shaft 4 is connected with the housing 1 by sliding, which can ensure the vacuum state of the first outer cavity 43. On the one hand, the first rolling member 46 can reduce the sliding area between the first guide shaft 4 and the housing 1, significantly reduce the friction coefficient between the contact surfaces, not only can reduce the friction resistance, make the movement smoother, but also can reduce the wear of the contact surface, and at the same time make the first guide shaft 4 have higher movement accuracy and stability.

[0036] like Figure 5 and Figure 6 As shown, the main shaft 3 is provided with a second air corridor 32, one end of the second air corridor 32 is connected to the bottom end face of the main shaft 3, and the other end is connected to the side wall of the main shaft 3, and the openings of the first air corridor 31 and the second air corridor 32 on the side wall of the main shaft 3 are staggered along the axial direction of the main shaft 3. Preferably, the second air corridor 32 is "L"-shaped. The bottom of the main shaft 3 is detachably connected with a suction nozzle 2, and the end of the second air corridor 32 is used to adsorb the suction nozzle 2, and the first air corridor 31 is connected to the suction nozzle 2. When operating on chips of different types, the corresponding type of suction nozzle 2 can be replaced, and the vacuum adsorption method can ensure that the suction nozzle 2 will not fall off during the operation.

[0037] The main shaft 3 is sleeved with a second guide shaft 5, which is rotatably connected to the shell 1. The second guide shaft 5 and the first guide shaft 4 are distributed along the axis of the main shaft 3. Specifically, the bottom end face of the first guide shaft 4 abuts against the top end face of the second guide shaft 5. The first guide shaft 4 and the second guide shaft 5 are jointly restricted in the shell 1 along the axial direction of the main shaft 3, and the axis of the second guide shaft 5 is coaxially arranged with the axis of the first guide shaft 4.

[0038] The second guide shaft 5 is an annular structure, and the second guide shaft 5 is clearance-fitted with the shell 1. In the present embodiment, the inner wall of the second guide shaft 5 is clearance-fitted with the outer wall of the main shaft 3, that is, the main shaft 3 rotates relative to the second guide shaft 5. In other embodiments, the inner wall of the second guide shaft 5 is transitionally fitted or interference fit with the outer wall of the main shaft 3, and the second guide shaft 5 and the first guide shaft 4 are both relatively stationary with the main shaft 3, and the main shaft 3 drives the second guide shaft 5 to rotate relative to the shell 1 at the same time.

[0039] Specifically, at least two second sealing grooves are formed on the inner wall of the second guide shaft 5 , and the second sealing grooves are annular grooves, and second sealing members 51 are provided in the second sealing grooves. In this embodiment, the second sealing member 51 is an annular sealing ring, so as to seal the connection between the second guide shaft 5 and the main shaft 3 .

[0040] The second guide shaft 5 is provided with a second inner cavity 52, a second outer cavity 53 and a second guide hole 54. Specifically, the second inner cavity 52 is a cavity formed by the second guide shaft 5 being recessed inwardly. The second inner cavity 52 is located between two second sealing grooves, that is, two sealing rings seal the second inner cavity 52.

[0041] The second air corridor 32 is connected to the second inner cavity 52, and the second inner cavity 52 and the second outer cavity 53 are connected through the second guide hole 54. In this embodiment, a plurality of second guide holes 54 are provided, and the axes of the second guide holes 54 are located in the same plane. The axes of the second guide holes 54 are all arranged along the radial direction of the second guide shaft 5, and the plurality of second guide holes 54 are distributed in a circumferential array around the axis of the second guide shaft 5. Specifically, the second outer cavity 53 is a cavity formed by the inward depression of the outer side wall of the second guide shaft 5.

[0042] The housing 1 is provided with a second channel 12, which communicates with the outside of the housing 1 and the accommodating chamber 13 of the housing 1. Specifically, one end of the second channel 12 is used to communicate with the negative pressure machine, and the other end is communicated with the second outer chamber 53. The negative pressure machine first evacuates the second outer chamber 53 through the second channel 12.

[0043] like Figure 4 As shown, the main shaft 3 is sleeved with a first sleeve 6, a second sleeve 7 and a third sleeve 8, and the first guide shaft 4 and the second guide shaft 5 are located between the first sleeve 6 and the second sleeve 7, that is, in the axial direction of the main shaft 3, the first sleeve 6, the first guide shaft 4, the second guide shaft 5, the second sleeve 7 and the third sleeve 8 are abutted in sequence, the top end face of the first sleeve 6 abuts against the top inner wall of the housing 1, and the bottom end face of the third sleeve 8 abuts against the bottom inner wall of the housing 1. Specifically, the first sleeve 6 includes a first inner sleeve 61 and a first outer sleeve 62, the inner wall of the first inner sleeve 61 is interference fit with the outer wall of the main shaft 3, the outer wall of the first outer sleeve 62 is interference fit with the side wall of the housing 1, and the first inner sleeve 61 is rotatably connected with the first outer sleeve 62. The second sleeve 7 includes a second inner sleeve 71 and a second outer sleeve 72, the inner wall of the second inner sleeve 71 is interference fit with the outer wall of the main shaft 3, the outer wall of the second outer sleeve 72 is interference fit with the side wall of the housing 1, and the second inner sleeve 71 is rotatably connected with the second outer sleeve 72. The third sleeve 8 includes a third inner sleeve 81 and a third outer sleeve 82. The inner wall of the third inner sleeve 81 is interference fit with the outer wall of the main shaft 3, and the outer wall of the third outer sleeve 82 is interference fit with the side wall of the shell 1. The third inner sleeve 81 is rotatably connected to the third outer sleeve 82.

[0044] The outer diameters of the first inner sleeve 61, the second inner sleeve 71 and the third inner sleeve 81 are all different, which will produce different deformations and stress distributions. Such differential deformation and stress distributions help to disperse the vibration and impact force generated by the main shaft 3 during rotation, thereby improving the stability of the overall structure.

[0045] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the scope of protection of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the present invention.

Claims

1. A bearing device, characterized in that: include: A housing (1) having a receiving chamber (13) therein; A main shaft (3) is rotatably connected to the accommodating chamber (13), and the main shaft (3) is provided with a first wind gallery (31) for adsorbing chips; A first guide shaft (4) is movably sleeved on the outer wall of the main shaft (3); the first guide shaft (4) is limited by the shell (1) along the axial direction of the main shaft (3); the first guide shaft (4) comprises a first inner cavity (42), a first outer cavity (43) and a first guide hole (44); the first inner cavity (42) is connected to the first outer cavity (43) through the first guide hole (44); the shell (1) is provided with a first channel (11); the first channel (11) is connected to the first outer cavity (43).

2. A bearing device according to claim 1, characterized in that: The first inner cavity (42) and the first outer cavity (43) are both annular cavities, and the first guide holes (44) are multiple, and the multiple first guide holes (44) are distributed in a circular array around the axis of the first guide shaft (4), and the multiple first guide holes (44) are all connected to the first inner cavity (42) and the first outer cavity (43).

3. A bearing device according to claim 2, characterized in that: At least two first sealing members (41) are embedded in the inner wall of the first guide shaft (4), the first sealing members (41) abut against the outer wall of the main shaft (3), and the first inner cavity (42) is located between the at least two first sealing members (41).

4. A bearing device according to claim 1, characterized in that: The outer wall of the first guide shaft (4) is provided with a plurality of first mounting grooves (45), the plurality of first mounting grooves (45) being distributed along the axial direction of the first guide shaft (4), an annular first rolling element (46) being rotatably connected in the first mounting groove (45), the first rolling element (46) being rollingly connected to the inner wall of the housing (1).

5. A bearing device according to claim 1, characterized in that: The main shaft (3) is provided with a second air corridor (32), the housing (1) is provided with a second channel (12), one end of the second air corridor (32) is connected to the second channel (12) for generating negative pressure on the second air corridor (32), the other end of the second air corridor (32) is adsorbedly connected to a suction nozzle (2), and the first air corridor (31) is connected to the inside of the suction nozzle (2) for adsorbing chips.

6. A bearing device according to claim 5, characterized in that: The main shaft (3) is movably sleeved with a second guide shaft (5), the second guide shaft (5) is rotatably connected between the shell (1) and the main shaft (3), the second guide shaft (5) includes a second inner cavity (52) and a second outer cavity (53) which are connected to each other, the second inner cavity (52) is connected to the second air corridor (32), the shell (1) is provided with a second channel (12), and the second channel (12) is connected to the second air corridor (32) through the second inner cavity (52) and the second outer cavity (53).

7. A bearing device according to claim 6, characterized in that: The main shaft (3) is sleeved with a first shaft sleeve (6) and a second shaft sleeve (7) along its axial direction; the first shaft sleeve (6), the first guide shaft (4), the second guide shaft (5) and the second shaft sleeve (7) are abutted in sequence along the axial direction of the main shaft (3); the main shaft (3) is rotatably connected to the housing (1) via the first shaft sleeve (6) and the second shaft sleeve (7).

8. A bearing device according to claim 7, characterized in that: The first shaft sleeve (6) comprises a first inner sleeve (61) and a first outer sleeve (62); the first inner sleeve (61) is interference fit with the main shaft (3); the first outer sleeve (62) is interference fit with the housing (1); the first inner sleeve (61) and the first outer sleeve (62) are rotatably connected; the second shaft sleeve (7) comprises a second inner sleeve (71) and a second outer sleeve (72); the second inner sleeve (71) and the main shaft (3) are interference fit; the second outer sleeve (72) and the housing (1) are interference fit; the second inner sleeve (71) and the second outer sleeve (72) are rotatably connected; the outer diameter of the first inner sleeve (61) is smaller than the outer diameter of the second inner sleeve (71).

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