Self-lubricating coating as well as air inlet structure and plasma processing device applied by self-lubricating coating

Abstract

The invention discloses a self-lubricating coating and an air inlet structure and a plasma processing device applying the self-lubricating coating, the self-lubricating coating is used in the air inlet structure of the plasma processing device, and the air inlet structure is provided with a main body structure and a moving structure which can move relatively. And the self-lubricating coating can be coated on the contact surface of the main body structure and the moving structure. The roughness of the self-lubricating coating is low, and the friction coefficient is small, so that the friction damage of the self-lubricating coating is small when the main body structure and the moving structure move relatively; the main component of the self-lubricating coating is carbon element, and particles generated by friction of the self-lubricating coating can be gasified in plasma. The self-lubricating coating for the gas inlet structure of the plasma treatment device can ensure that the working process of the gas inlet structure is stable, and particle pollution cannot be generated in the plasma treatment process.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma equipment, and in particular to a self-lubricating coating for an air intake structure of a plasma processing device, an air intake structure of a plasma processing device with the self-lubricating coating, and a plasma processing device. Background Art

[0002] With the development of electronic technology, the integration of chips is constantly improving. This requires that in the plasma processing of chip formation, it is necessary not only to strictly control the groove depth and line width of the integrated circuit chip unit formed, but also to improve the process uniformity of the surface of the processed silicon wafer.

[0003] Plasma processing devices mainly include capacitively coupled plasma (CCP) devices, inductively coupled plasma (ICP) devices, electron cyclotron resonance plasma (ECR) devices, etc. Among them, the process gas entering the reaction chamber generates plasma under the action of the induced electric field, and the plasma reacts physically and chemically with the wafer surface, thereby achieving the purpose of wafer processing. The process gas mainly flows into the reaction chamber through the air intake structure.

[0004] A moving structure is set in the nozzle of the air intake structure, and the direction of the gas can be controlled by the movement of the moving structure. At present, the nozzle is usually made of ceramic or quartz. The introduction of a moving structure in it will inevitably lead to friction and wear between the moving structure and the contact surface of the nozzle. The particles generated by the friction enter the subsequent process and cause particle contamination in the plasma treatment process (such as plasma etching process), which will affect the treatment effect of the plasma process. For example, the abrasive particles generated during the friction and wear process are brought into the plasma by the process gas, and fall on the surface of the wafer during the physical and chemical reaction between the plasma and the wafer surface to form defects, which will affect the treatment effect of the wafer. Summary of the invention

[0005] In view of this, the present invention provides a self-lubricating coating for an air intake structure of a plasma processing device to ensure the processing effect. The present invention also provides an air intake structure for a plasma processing device and a plasma processing device.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A self-lubricating coating for an air intake structure of a plasma processing device,

[0008] The air intake structure comprises a main structure and a moving structure capable of relative movement, and the self-lubricating coating can be coated on the contact surfaces of the main structure and the moving structure;

[0009] When the main structure and the moving structure move relative to each other, particles generated by friction in the self-lubricating coating can be gasified in the plasma.

[0010] Optionally, in the above self-lubricating coating, the surface roughness of the self-lubricating coating is ≤0.5 μm.

[0011] Optionally, in the above self-lubricating coating, the friction coefficient of the self-lubricating coating is ≤0.3.

[0012] Optionally, in the above self-lubricating coating, the component of the self-lubricating coating is organic matter.

[0013] Optionally, in the above self-lubricating coating, the self-lubricating coating is a Teflon coating, a polyparaben coating, a polyoxymethylene coating, a graphite coating or a diamond-like carbon coating.

[0014] Optionally, in the above self-lubricating coating, the self-lubricating coating is a composite coating;

[0015] The composite coating includes a Teflon coating and a diamond-like coating; or, the composite coating is a diamond-like coating with a composite structure, wherein the diamond-like coating includes a metal base layer, a transition layer and a diamond-like film layer arranged in sequence, and the diamond-like film layer can be in contact with gas.

[0016] The present invention also provides an air intake structure for a plasma processing device, comprising:

[0017] A main structure and a moving structure capable of relative movement; the main structure having a hollow cavity and a gas jet hole for conveying gas to a reaction chamber, the gas jetted from the gas jet hole being capable of forming plasma in the reaction chamber; the main structure having a first contact surface; the moving structure having a first moving component capable of moving in the hollow cavity, the first moving component being used to adjust the jet state of the gas jet hole; the first moving component having a second contact surface; during the movement of the moving structure in the hollow cavity, the first contact surface and the second contact surface are arranged correspondingly and move relative to each other;

[0018] As described in any of the above items, the self-lubricating coating can at least cover the first contact surface and / or the second contact surface, and the friction resistance of the self-lubricating coating is higher than the friction resistance of the main structure and the moving structure.

[0019] Optionally, in the above-mentioned air intake structure, the first contact surface has the self-lubricating coating.

[0020] Optionally, in the above-mentioned air intake structure, all contact surfaces of the hollow cavity that can contact the gas have the self-lubricating coating.

[0021] Optionally, in the above-mentioned air intake structure, the surface of the main structure is covered with the self-lubricating coating.

[0022] Optionally, in the above-mentioned air intake structure, the surface of the moving structure has the self-lubricating coating.

[0023] Optionally, in the above-mentioned air intake structure, the moving structure is made of ceramic, quartz, metal, Teflon, polyparahydroxybenzoate material, polyoxymethylene material or graphite material.

[0024] Optionally, in the above-mentioned air intake structure, the surface of the first moving part has the self-lubricating coating.

[0025] Optionally, in the above-mentioned air intake structure, all contact surfaces of the moving structure that can contact the gas have the self-lubricating coating.

[0026] Optionally, in the above-mentioned air intake structure, the moving structure is made of Teflon, polyparaben, polyoxymethylene or graphite material.

[0027] Optionally, the above-mentioned air intake structure further includes a bushing located between the inner wall of the hollow cavity and the moving structure;

[0028] The bushing has an avoidance hole correspondingly connected to the jet hole;

[0029] The contact surface of the bushing that can come into contact with the gas has the self-lubricating coating.

[0030] Optionally, in the above-mentioned air intake structure, the bushing is made of Teflon, polyparahydroxybenzoate, polyoxymethylene or graphite material;

[0031] Alternatively, the bushing is made of a hard material, and the surface of the bushing is covered with the self-lubricating coating.

[0032] Optionally, in the above-mentioned air intake structure, the hard material is metal, ceramic or quartz material.

[0033] Optionally, in the above-mentioned air intake structure, the bushing is relatively fixed to the hollow cavity, and the moving structure moves relatively to the bushing;

[0034] The bushing covers the first contact surface.

[0035] Optionally, in the above-mentioned air intake structure, the bushing covers a contact surface in the hollow cavity that can contact the gas.

[0036] The present invention also provides a plasma processing device, comprising a reaction chamber and an air intake structure, wherein the air intake structure is an air intake structure as described in any one of the above items;

[0037] The first moving component of the air intake structure adjusts the jet state of the jet hole of the air intake structure, and the gas ejected from the jet hole forms plasma in the reaction chamber. When the moving structure of the air intake structure moves in the hollow cavity, particles generated by friction are sprayed into the reaction chamber along with the gas and vaporized in the plasma.

[0038] It can be seen from the above technical solutions that the self-lubricating coating for the air intake structure of the plasma processing device provided by the present invention is applied to the air intake structure having a main structure and a moving structure that can move relative to each other. Among them, the self-lubricating coating can be applied to the contact surface of the main structure and the moving structure, that is, the self-lubricating coating covers the contact surface of the main structure and the moving structure. During the relative movement of the main structure and the moving structure, the self-lubricating coating maintains a very low friction coefficient on the basis of producing a lubricating effect on the relative movement of the main structure and the moving structure, so that the self-lubricating coating can significantly reduce or eliminate the friction loss generated by the main structure and the moving structure during the relative movement, and effectively protect the main structure and the moving structure material. In addition, the very small amount of particles inevitably generated by the self-lubricating coating due to the relative friction movement of the main structure and the moving structure can be gasified in the plasma in the process equipment (such as a reaction chamber) along with the gas of the air intake structure, so that the particles generated by the friction of the self-lubricating coating do not generate particle pollution when in contact with the plasma, and then in the process of the physical and chemical reaction between the plasma and the wafer surface, it will not affect the processing effect of the wafer, effectively ensuring the processing effect.

[0039] The present invention also provides an air intake structure for a plasma processing device and a plasma processing device. Since the above self-lubricating coating has a technical effect, the air intake structure and the plasma processing device having the above self-lubricating coating should also have the same technical effect, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0041] Figure 1 A schematic diagram of the installation structure of the air intake structure provided in an embodiment of the present invention;

[0042] Figure 2 A first structural schematic diagram of an air intake structure provided by an embodiment of the present invention;

[0043] Figure 3A second structural schematic diagram of the air intake structure provided by an embodiment of the present invention;

[0044] Figure 4 A third structural schematic diagram of the air intake structure provided by an embodiment of the present invention;

[0045] Figure 5 A fourth structural schematic diagram of an air intake structure provided by an embodiment of the present invention;

[0046] Figure 6 A fifth structural schematic diagram of an air intake structure provided by an embodiment of the present invention;

[0047] Figure 7 A sixth structural schematic diagram of an air intake structure provided by an embodiment of the present invention;

[0048] Figure 8 A seventh structural schematic diagram of an air intake structure provided by an embodiment of the present invention;

[0049] Fig. 9 A schematic diagram of the structure of a diamond-like coating provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0050] The invention discloses a self-lubricating coating for an air intake structure of a plasma processing device to ensure the processing effect. The invention also provides an air intake structure for a plasma processing device and a plasma processing device.

[0051] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] The embodiment of the present invention provides a self-lubricating coating for an air intake structure of a plasma processing device. The air intake structure has a main structure and a moving structure that can move relative to each other, and the self-lubricating coating can be applied on the contact surface of the main structure and the moving structure; particles generated by friction of the self-lubricating coating when the main structure and the moving structure move relative to each other can be vaporized in the plasma.

[0053] The self-lubricating coating provided by the embodiment of the present invention is applied to an air intake structure having a main structure and a moving structure capable of relative movement. Among them, the self-lubricating coating can be applied to the contact surface of the main structure and the moving structure, that is, the self-lubricating coating covers the contact surface of the main structure and the moving structure. In the process of relative movement of the main structure and the moving structure, the self-lubricating coating maintains a very low friction coefficient on the basis of producing a lubricating effect on the relative movement of the main structure and the moving structure, so that the self-lubricating coating can significantly reduce or eliminate the friction loss generated by the main structure and the moving structure during the relative movement, and effectively protect the main structure and the moving structure material. In addition, the very small amount of particles inevitably generated by the self-lubricating coating due to the relative friction movement of the main structure and the moving structure can be gasified in the plasma in the process equipment (such as a reaction chamber) along with the gas of the air intake structure, so that the particles generated by the friction of the self-lubricating coating do not generate particle contamination when in contact with the plasma, and then in the process of the physical and chemical reaction between the plasma and the wafer surface, it will not affect the processing effect of the wafer, effectively ensuring the processing effect.

[0054] Preferably, in order to improve the lubrication effect, the surface roughness of the self-lubricating coating is ≤0.5 μm.

[0055] Furthermore, in order to reduce friction loss, the friction coefficient of the self-lubricating coating is ≤0.3.

[0056] In order to ensure that the particles generated by the friction of the self-lubricating coating can be gasified in the plasma formed subsequently, the self-lubricating coating is composed of organic matter, which contains C elements and may contain H elements, O elements and F elements, all of which can be burned and gasified in the plasma.

[0057] Of course, the components of the self-lubricating coating may also be inorganic substances that can be burned and gasified in plasma, which is not specifically limited here and is within the scope of protection.

[0058] Preferably, the main component of the self-lubricating coating is carbon (C element). It is understandable that carbon can burn in plasma. It can be seen that when the self-lubricating coating whose main component is carbon is sprayed into the subsequent process equipment (such as a reaction chamber) along with the gas entering the intake structure, it burns in the formed plasma, so that the self-lubricating coating is gasified.

[0059] Specifically, the self-lubricating coating is a Teflon coating, a polyparaben coating, a polyoxymethylene coating, a graphite coating or a diamond like carbon (DLC) coating.

[0060] Among them, Teflon is polytetrafluoroethylene, which is composed of C element and F element, both of which can burn and gasify in plasma.

[0061] The friction coefficient of the diamond-like coating is in the range of 0.02 to 0.1. The friction coefficient of Teflon is in the range of 0.05 to 0.2. It is understandable that the main structure and the moving structure of the air intake structure are usually ceramic or quartz. The friction coefficient of ceramic is about 0.6, and the friction coefficient of quartz is about 0.7. By selecting a self-lubricating coating made of Teflon or diamond-like material, when it is applied to the contact surface of the main structure and the moving structure, the friction loss generated by the movement of the main structure and the moving structure can be effectively reduced.

[0062] In addition, since the particles formed by the diamond-like coating and Teflon easily form volatile gases when reacting with O2 and F-based plasma, the coating also has the characteristic of not generating particle contamination when in contact with plasma.

[0063] In the self-lubricating coating provided by the embodiment of the present invention, the self-lubricating coating is preferably a composite coating.

[0064] In one embodiment, the composite coating includes a Teflon coating and a diamond-like coating. That is, the Teflon coating and the diamond-like coating are superimposed to form a self-lubricating coating. Of course, the self-lubricating coating can also be set as a single-layer coating, which can be a Teflon coating or a diamond-like coating, which can achieve a lubricating effect and the particles generated by friction can be gasified in plasma.

[0065] In another embodiment, the composite coating is a diamond-like coating of a composite structure, and the diamond-like coating includes a metal base layer, a transition layer and a diamond-like film layer arranged in sequence, and the diamond-like film layer can be in contact with the gas.

[0066] like Fig. 9 As shown, the diamond-like coating includes a metal base layer 5-2, a transition layer 5-3 and a diamond-like film layer 5-4 arranged in sequence, and the diamond-like film layer can contact the gas. That is, the metal base layer 5-2 is in contact with the surface 20 of the intake structure (including the surface of the main structure and the surface of the moving structure) that needs to be covered with the diamond-like coating.

[0067] The diamond-like coating covers all surfaces of the first main body component 1, the moving structure 3, and the second main body component 2 exposed to the gas and their friction surfaces.

[0068] like Figure 1As shown, an embodiment of the present invention provides an intake structure for a plasma processing device, a main structure and a moving structure 2 that can move relative to each other; the main structure has a hollow cavity 21 and a gas injection hole 22 for conveying gas to a reaction chamber, and the gas ejected from the gas injection hole 22 can form plasma in the reaction chamber; the main structure has a first contact surface; the moving structure has a first moving component 31 that can move in the hollow cavity 21, and the first moving component 31 is used to adjust the injection state of the gas injection hole 22; the first moving component 31 has a second contact surface; during the movement of the moving structure 3 in the hollow cavity 21, the first contact surface and the second contact surface are correspondingly arranged and move relative to each other.

[0069] The air intake structure provided by the embodiment of the present invention further includes any one of the self-lubricating coatings described above, and the self-lubricating coating can at least cover the first contact surface and / or the second contact surface.

[0070] Since the above-mentioned self-lubricating coating has the above-mentioned technical effects, the air intake structure having the above-mentioned self-lubricating coating should also have the same technical effects, which will not be described in detail here.

[0071] Wherein, the gas mentioned above may be a plasma process gas.

[0072] Preferably, the friction resistance of the self-lubricating coating is higher than that of the main structure and the moving structure. When the self-lubricating coating covers the contact surface of the main structure and the moving structure, the total amount of particles generated by friction can be further reduced.

[0073] Of course, the friction resistance of the self-lubricating coating can also be made equal to or lower than the friction resistance of the main structure and the moving structure, so that the wear of the self-lubricating coating will not cause the wear of the main structure and the moving structure.

[0074] A self-lubricating coating may be provided on the main structure.

[0075] Specifically, the first contact surface of the main structure has the self-lubricating coating.

[0076] Furthermore, all contact surfaces of the hollow cavity 21 that can contact the gas have a self-lubricating coating.

[0077] Furthermore, the surface of the main structure is covered with a self-lubricating coating.

[0078] It is also possible to provide a self-lubricating coating on the moving structure.

[0079] Specifically, a self-lubricating coating may be provided on the surface of the moving structure.

[0080] Alternatively, the self-lubricating coating may be provided only on the surface of the first moving part.

[0081] It is also possible to provide a self-lubricating coating on all contact surfaces of the moving structure that are in contact with the gas.

[0082] It can be understood that in the air intake structure provided in the embodiment of the present invention, the main structure has a hollow cavity 21, an air inlet 11 for connecting to the air intake pipe and a jet hole 22 for supplying gas to the reaction chamber, and the main structure has a first contact surface; the moving structure 3 has a first moving component 31 that can move in the hollow cavity 21; the first moving component 31 is located between the air inlet 11 and the jet hole 22, and the first moving component 31 has a second contact surface and a gas channel 32; in the process of the moving structure 3 moving in the hollow cavity 21, the first contact surface and the second contact surface are correspondingly arranged and move relative to each other; when the moving structure 3 moves to a specific position in the hollow cavity 21, the gas channel 32 can be connected to the jet hole 22, and the gas transported by the air intake pipe 4 passes through the air inlet 11, the gas channel 32 and the jet hole 22 in sequence.

[0083] The first moving part 31 of the moving structure 3 moves in the hollow cavity 21. When the moving structure 3 moves to a specific position in the hollow cavity 21, the gas channel 32 can be connected with the jet hole 22, and the gas transported by the air intake pipe 4 passes through the air inlet 11, the gas channel 32 and the jet hole 22 in sequence. Since the friction resistance and corrosion resistance of the self-lubricating coating are higher than those of the main structure and the moving structure 3, by covering the first contact surface and / or the second contact surface with the self-lubricating coating, the first contact surface and / or the second contact surface are covered with the self-lubricating coating during the relative movement of the corresponding first contact surface and the second contact surface, which can effectively reduce the friction loss of the contact surface.

[0084] Furthermore, the main structure includes a first main body component 1 and a second main body component 2. The first main body component 1 has an air inlet 11 for connecting to the air inlet pipe 4; the second main body component 2 has a hollow cavity 21 and an air injection hole 22, the first main body component 1 is connected to the second main body component 2 and closes the hollow cavity 21, and the inner wall of the hollow cavity 21 has a first contact surface.

[0085] The first main body component 1 and the second main body component 2 can be connected by bolts. Since the main structure is set as a combined structure composed of the first main body component 1 and the second main body component 2, it is convenient to place the first moving component 31 in the hollow cavity 21, and it is also convenient to process the main structure.

[0086] Of course, the main structure may also be set as an integral structure, or the air inlet 11 , the hollow cavity 21 and the air injection hole 22 may all be set in the second main body component 2 , and the first main body component 1 only serves to close the hollow cavity 21 .

[0087] The second main body component 2 is an air intake nozzle, and the first main body component 1 is a sealing component.

[0088] The first main body component 1 and the motion structure 3 share a common rotational symmetry axis.

[0089] In order to facilitate the control of the gas direction, the first moving part 31 has at least one group of gas channels 32, and the second main body part 2 has multiple groups of jet holes 22, and the opening directions of the multiple groups of jet holes 22 are different; when the first moving part 31 moves to different specific positions in the hollow cavity 21, the gas channels 32 are connected to the corresponding jet holes 22 in the multiple groups of jet holes 22. The gas output and gas output pressure (total area of ​​the jet holes) of the multiple groups of jet holes 22 can also be different.

[0090] In order to facilitate the control of the movement of the first moving part 31, the moving gas structure also includes a second moving part 33 for driving the first moving part 31 to move, one end of the second moving part 33 is connected to the first moving part 31, and the other end of the second moving part 33 passes through the first main body part 1 in a direction away from the air injection hole 22. The driving end of an external driving device (such as a motor, a hydraulic cylinder or a cylinder) is connected to the part of the second moving part 33 that passes through the first main body part 1, so that the first moving part 31 can be driven to move in the hollow cavity 21.

[0091] Of course, the second moving component 33 can also pass through the second main body component 2 .

[0092] like Figure 2 As shown, in the first embodiment, the first contact surface has a self-lubricating coating 51. In this embodiment, the second contact surface contacts the self-lubricating coating 51 covering the first contact surface. Since the friction resistance of the self-lubricating coating is higher than that of the second main body component 2, the friction loss of the second main body component 2 and the friction loss of the first main body component 1 can be avoided during the contact and relative movement between the second contact surface of the moving structure and the self-lubricating coating 51.

[0093] In this embodiment, in order to control costs, the self-lubricating coating 51 is coated only on the first contact surface.

[0094] Furthermore, if Figure 3 As shown, in the second embodiment, the contact surface of the hollow cavity 21 that can contact with the gas has a self-lubricating coating 52. It can be understood that the contact surface of the hollow cavity 21 that can contact with the gas includes the first contact surface. Through the above arrangement, it can be ensured that during the contact and relative movement between the second contact surface of the moving structure and the self-lubricating coating 51, the friction loss of the second main body component 2 can be avoided, and the friction loss of the first main body component 1 can also be avoided.

[0095] The surface of the second main body component may also be covered with a self-lubricating coating, that is, the outer surface of the second main body component and its inner surface (the surface of the hollow cavity 21) are both covered with the self-lubricating coating.

[0096] It is also possible that the surface of the first body component is covered with a self-lubricating coating.

[0097] like Figure 4 As shown, in the third embodiment, the motion structure is made of hard material, and the second contact surface has a self-lubricating coating, specifically Figure 4 In this embodiment, the first contact surface is in contact with the first self-lubricating coating 53 covering the second contact surface. Since the friction resistance of the self-lubricating coating is higher than that of the second main body part 2, during the contact and relative movement between the first contact surface of the hollow cavity 21 and the first self-lubricating coating 53, the friction loss of the first moving part 31 and the friction loss of the second main body part 2 can be avoided.

[0098] Preferably, the motion structure is made of ceramic, quartz or metal materials. Of course, other hard materials can also be selected to make the motion structure.

[0099] Of course, the motion structure may also be made of non-hard materials such as Teflon, polyparaben, polyoxymethylene or graphite, etc. The details are not described one by one and are all within the scope of protection.

[0100] In this embodiment, the motion structure further includes a second motion component 33 for driving the first motion component 31 to move.

[0101] The surface of the first moving component 31 may also be provided with a self-lubricating coating. The second contact surface belongs to the surface of the first moving component 31 , that is, the surface of the first moving component 31 includes the second contact surface.

[0102] Furthermore, if Figure 4 As shown, in another embodiment, the other end of the second moving component 33 passes through the first main body component 1 in a direction away from the air injection hole, so the second moving component 33 has a surface that moves relative to the first main body component 1, and the surface is in contact with the first main body component 1. In order to further reduce friction loss, the contact surface of the second moving component of the moving structure that is used to contact the first main body component has a self-lubricating coating, specifically Figure 4 The second self-lubricating coating 54 in.

[0103] like Figure 5 As shown, in the fourth embodiment, all contact surfaces of the moving structure 3 that can contact the gas have a self-lubricating coating 55. Through the above arrangement, the operation of covering the moving structure 3 with the self-lubricating coating 55 is facilitated.

[0104] The motion structure 3 is made of Teflon, polyparaben, polyoxymethylene or graphite material, which can effectively avoid the wear of the main structure.

[0105] It is understandable that the material of the main structure is usually ceramic or quartz. The friction coefficient of ceramic is about 0.6, and the friction coefficient of quartz is about 0.7. When the motion structure 3 placed in the hollow cavity 21 of the main structure moves relative to the main structure, friction and wear will occur on the contact surface. The contact surface (first contact surface and second contact surface) of the motion structure 3 and the main structure is covered with a self-lubricating coating to reduce the friction coefficient of the contact surface, which can effectively reduce the friction and wear of the motion structure 3 and the main structure.

[0106] Among them, the friction coefficient of Teflon ranges from 0.05 to 0.2.

[0107] like Figure 6 As shown, in the fifth embodiment, the motion structure 3 is made of Teflon, polyparaben, polyoxymethylene or graphite. In order to reduce the friction loss of the motion structure 3,

[0108] The second moving component 33 of the moving structure 3 has a third contact surface, and the first main body component 1 of the main body structure has a fourth contact surface; the fourth contact surface has a self-lubricating coating 56 .

[0109] Of course, the third contact surface may also have a self-lubricating coating.

[0110] like Figure 7 As shown, in the sixth embodiment, the contact surface of the first main body component 1 that can contact with the gas has a self-lubricating coating, that is, Figure 7 The third self-lubricating coating 57 in the second moving part 33. In addition, the contact surface of the second moving part 33 that can contact with the gas also has a self-lubricating coating, that is, Figure 7 A fourth self-lubricating coating 58 is provided in the embodiment of the present invention.

[0111] Of course, only the third self-lubricating coating 57 or the fourth self-lubricating coating 58 may be provided, which will not be described one by one here and are all within the scope of protection.

[0112] For the convenience of processing, the surface of the first main body component of the main structure may also be covered with a self-lubricating coating. The fourth contact surface belongs to the surface of the first main body component, that is, the surface of the first main body component includes the fourth contact surface.

[0113] like Figure 8As shown, in the seventh embodiment, the air intake structure further includes a bushing 50 located between the inner wall of the hollow cavity 21 and the motion structure 3; the bushing 50 has an avoidance hole correspondingly connected to the jet hole 22. The gas passing through the gas channel 32 flows toward the jet hole 22 through the avoidance hole, that is, the bushing 50 does not affect the flow of gas through the gas channel 32 toward the jet hole 22.

[0114] The contact surface of the bushing 50 that can come into contact with the gas has a self-lubricating coating.

[0115] Preferably, the bushing 50 is made of Teflon.

[0116] Of course, the bushing 50 can also be made of hard material, and the surface of the bushing can be covered with a self-lubricating coating. The hard material can be metal, ceramic or quartz material. Of course, it can also be other materials, which are not specifically limited here and are all within the scope of protection.

[0117] In this embodiment, the bushing 50 is relatively fixed to the hollow cavity 21, and the moving structure 3 moves relatively to the bushing 50, that is, the bushing 50 contacts the inner wall of the hollow cavity 21. The bushing 50 covers the first contact surface, that is, the self-lubricating coating of the bushing 50 can at least cover the first contact surface.

[0118] Furthermore, the bushing 50 covers the contact surface in the hollow cavity 21 that can contact with the gas.

[0119] The self-lubricating coating provided in the embodiment of the present invention is a Teflon coating, a diamond-like coating or a molybdenum sulfide coating.

[0120] Due to the technical limitations such as the small diameter (usually about 1 mm or less) of the jet holes in the main structure and the gas channels in the moving structure and the complex structure, it is not easy to carry out surface coating protection by ordinary coating processes. Therefore, the self-lubricating coating can be coated on the surface of the workpiece (main structure or moving structure) by all-round coating processes, such as ion plating (Plasma Immersion Ion deposition) and ALD (Atomic Layer Deposition) processes, to play a good protective role. Through the above-mentioned processes, all-round coating is achieved on the surface of the workpiece, effectively solving the problem of effective protection of all-round surfaces of complex surfaces and holes, significantly reducing metal and particle pollution, and effectively improving the process stability of semiconductor equipment in different chip processing processes, thereby extending the service life of semiconductor equipment and further improving the production efficiency of semiconductor equipment processing and production chips.

[0121] The embodiment of the present invention further provides a plasma processing device, comprising a reaction chamber and any one of the above-mentioned air intake structures. The first moving part 31 of the air intake structure adjusts the jet state of the jet hole 22 of the air intake structure, and the gas ejected from the jet hole 22 forms plasma in the reaction chamber. When the moving structure of the air intake structure moves in the hollow cavity 21, particles generated by friction are ejected into the reaction chamber along with the gas and gasified in the plasma.

[0122] Since the above-mentioned air intake structure has the above-mentioned technical effects, the plasma processing device having the above-mentioned air intake structure should also have the same technical effects, which will not be described in detail here.

[0123] It can be understood that the particles generated by friction when the moving structure of the air intake structure moves in the hollow cavity 21 are particles generated by friction of the self-lubricating coating.

[0124] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0125] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A self-lubricating coating for an air intake structure of a plasma processing device, characterized in that: The air intake structure comprises a main structure and a moving structure capable of relative movement, and the self-lubricating coating can be coated on the contact surfaces of the main structure and the moving structure; When the main structure and the moving structure move relative to each other, particles generated by friction in the self-lubricating coating can be gasified in the plasma.

2. The self-lubricating coating according to claim 1, characterized in that The surface roughness of the self-lubricating coating is ≤0.5 μm.

3. The self-lubricating coating according to claim 1, characterized in that The friction coefficient of the self-lubricating coating is ≤0.

3.

4. The self-lubricating coating according to claim 1, characterized in that The self-lubricating coating is composed of organic matter.

5. The self-lubricating coating according to claim 4, characterized in that The self-lubricating coating is a Teflon coating, a polyparaben coating, a polyoxymethylene coating, a graphite coating or a diamond-like carbon coating.

6. The self-lubricating coating according to claim 4, characterized in that The self-lubricating coating is a composite coating; The composite coating includes a Teflon coating and a diamond-like coating; or, the composite coating is a diamond-like coating with a composite structure, wherein the diamond-like coating includes a metal base layer, a transition layer and a diamond-like film layer arranged in sequence, and the diamond-like film layer can be in contact with gas.

7. An air intake structure for a plasma processing device, characterized in that: include: A main structure and a moving structure capable of relative movement; the main structure having a hollow cavity and a gas jet hole for conveying gas to a reaction chamber, the gas jetted from the gas jet hole being capable of forming plasma in the reaction chamber; the main structure having a first contact surface; the moving structure having a first moving component capable of moving in the hollow cavity, the first moving component being used to adjust the jet state of the gas jet hole; the first moving component having a second contact surface; during the movement of the moving structure in the hollow cavity, the first contact surface and the second contact surface are arranged correspondingly and move relative to each other; The self-lubricating coating according to any one of claims 1 to 6, wherein the self-lubricating coating can at least cover the first contact surface and / or the second contact surface, and the friction resistance of the self-lubricating coating is higher than the friction resistance of the main structure and the moving structure.

8. The air intake structure according to claim 7, characterized in that: The first contact surface has the self-lubricating coating.

9. The air intake structure according to claim 8, characterized in that: The contact surfaces of the hollow cavity that can contact the gas all have the self-lubricating coating.

10. The air intake structure according to claim 9, characterized in that: The surface of the main structure is covered with the self-lubricating coating.

11. The air intake structure according to claim 7, characterized in that: The surface of the moving structure has the self-lubricating coating.

12. The air intake structure according to claim 11, characterized in that: The moving structure is made of ceramic, quartz, metal, Teflon, polyparaben, polyoxymethylene or graphite.

13. The air intake structure according to claim 7, characterized in that: The surface of the first moving part has the self-lubricating coating.

14. The air intake structure according to claim 7, characterized in that: The contact surfaces of the moving structure that can contact the gas all have the self-lubricating coating.

15. The air intake structure according to claim 7, characterized in that: The moving structure is made of Teflon, polyparaben, polyoxymethylene or graphite material.

16. The air intake structure according to claim 7, characterized in that: Also included is a bushing located between the inner wall of the hollow cavity and the moving structure; The bushing has an avoidance hole correspondingly connected to the jet hole; The contact surface of the bushing that can come into contact with the gas has the self-lubricating coating.

17. The air intake structure according to claim 16, characterized in that: The bushing is made of Teflon, polyparaben, polyoxymethylene or graphite material; Alternatively, the bushing is made of a hard material, and the surface of the bushing is covered with the self-lubricating coating.

18. The air intake structure according to claim 17, characterized in that: The hard material is metal, ceramic or quartz material.

19. The air intake structure according to claim 17, characterized in that: The bushing is relatively fixed to the hollow cavity, and the moving structure moves relatively to the bushing; The bushing covers the first contact surface.

20. The air intake structure according to claim 18, characterized in that: The bushing covers a contact surface in the hollow cavity that can contact the gas.

21. A plasma processing device, comprising a reaction chamber and an air intake structure, characterized in that: The air intake structure is the air intake structure according to any one of claims 7 to 20; The first moving component of the air intake structure adjusts the jet state of the jet hole of the air intake structure, and the gas ejected from the jet hole forms plasma in the reaction chamber. When the moving structure of the air intake structure moves in the hollow cavity, particles generated by friction are sprayed into the reaction chamber along with the gas and vaporized in the plasma.

Images