Vacuum gate valve capable of being quickly closed

Abstract

The invention relates to a vacuum gate valve capable of being rapidly closed. The vacuum gate valve comprises a valve body, a valve rod, a valve plate and at least one rolling type abutting assembly. The valve chamber of the valve body and the valve plate have unilateral taper. The rolling type abutting assembly is arranged on the non-sealing face of the valve plate, and in the process that the valve plate conducts axial displacement motion from the opening position to the closing position, the valve plate continuously abuts against the second valve seat on the valve body in a rolling mode through the rolling type abutting assembly arranged on the non-sealing face of the valve plate till the sealing face of the valve plate completely closes the first valve seat. Thus, the first valve opening is closed. The vacuum gate valve can bear the impact of quick closing, can be closed indeed, and is free of the doubt of jamming or leakage.

Description

Technical Field

[0001] The present invention relates to a vacuum gate valve, in particular to a vacuum gate valve which can be closed quickly. Background Art

[0002] In semiconductor processing equipment, vacuum gate valves are often used to open or close the opening of vacuum chambers. Depending on the process or vacuum system requirements, individual vacuum chambers may have different internal pressures, resulting in pressure differences between vacuum chambers. Generally, this pressure difference can reach one atmosphere, and the pressure differential thrust applied to the valve plate is proportional to the effective area of ​​the valve plate. For example, the pressure differential thrust on a valve plate with an effective area of ​​one square meter will exceed 10,000 kilograms. Therefore, when closing the valve plate and bearing negative pressure, a considerable pressure differential thrust must be overcome. In addition, vacuum gate valves are generally used in conjunction with valve bodies connecting two vacuum chambers, and the sealing ring between the valve plate and the valve seat surface of the valve body makes the two airtight. When opening the vacuum gate valve, the valve plate must first move horizontally to separate from the valve seat surface of the valve body, and then the valve plate must move longitudinally to complete the opening to avoid wear of the sealing ring during longitudinal movement. Similarly, when closing the valve plate, the valve plate must first move longitudinally, reach the relative position of the valve seat surface of the valve body where it extends laterally, and then move laterally to make the valve plate and the valve seat surface of the valve body fit airtightly to complete the closing.

[0003] However, when vacuum gate valves are used in demanding pump isolation applications or applications with high process by-product content, vacuum gate valves must be able to close quickly and reliably in a short period of time, and must avoid jamming or leakage concerns. Therefore, the sealing ring of traditional vacuum gate valves is prone to considerable friction during the opening or closing process, which is not only prone to particle contamination, but also prone to abnormal deformation of the sealing ring, thus reducing reliability and service life. Summary of the invention

[0004] In view of this, one or more objects of the present invention is to provide a vacuum gate valve that can be quickly closed to solve the above-mentioned problems of the conventional technology.

[0005] To achieve the aforementioned purpose, the present invention provides a vacuum gate valve that can be quickly closed, comprising: a valve body, the valve body being provided with a first valve seat and a second valve seat respectively located at opposite sides of a valve chamber of the valve body, the valve chamber of the valve body having a single-sided taper between an inner surface of the first valve seat and an inner surface of the second valve seat, the first valve seat being located on a first valve opening of the valve body; a valve stem, the valve stem performing an axial displacement movement along an axial direction in the valve chamber of the valve body; a valve plate, the two sides of the valve plate being respectively a sealing surface and a non-sealing surface, the valve plate having the same single-sided taper as that of the valve chamber of the valve body, wherein the valve plate is connected to a first end of the valve stem, and the valve plate is opened in an open position in the valve chamber by the valve stem. The axial displacement movement is performed between a position and a closed position, so that the sealing surface of the valve plate correspondingly separates from the first valve seat of the valve body to open the first valve opening or abuts against the first valve seat of the valve body to close the first valve opening; and at least one rolling abutting assembly is provided on the non-sealing surface of the valve plate, wherein during the axial displacement movement of the valve plate from the open position to the closed position, when the valve plate is a certain distance away from the closed position, the valve plate continuously rolls against the second valve seat of the valve body by means of the rolling abutting assembly provided on the non-sealing surface of the valve plate until the sealing surface of the valve plate completely closes the first valve seat located on the first valve opening.

[0006] As mentioned above, the vacuum gate valve capable of rapid closing according to the present invention has one or more advantages or technical effects:

[0007] (1) It can withstand the impact of rapid closing, the closing time can be less than about 0.5 seconds, and it can be closed securely without any concerns about jamming or leakage.

[0008] (2) The valve body and valve plate of the present invention have a single-sided taper, and the rolling abutment assembly is protruded on the non-sealing surface of the valve plate, and the protruding height is not limited by the height of the sealing ring, so the flexibility is higher.

[0009] (3) Even if the present invention omits the rolling abutment assembly protruding from the sealing surface of the valve plate, it is still possible to avoid abnormal deformation of the sealing ring caused by the valve plate sealing the first valve seat. Therefore, it is possible to reduce manufacturing costs and complexity and increase reliability and service life.

[0010] (4) The valve plate of the present invention uses a rolling abutment assembly to roll against the second valve seat of the valve body, rather than using a slider to slide and frictionally abut against the second valve seat of the valve body. This can effectively reduce friction and avoid jamming or leakage.

[0011] (5) The driving cylinder of the present invention adopts a flat pneumatic cylinder, which can prevent the valve stem from twisting or rotating during the axial displacement movement. Therefore, there is no need to use a bellows, and the manufacturing cost and installation space can be reduced.

[0012] (6) The rolling abutment components of the present invention can not only roll independently, but also roll in a linked manner, thereby allowing the sealing surface of the valve plate to symmetrically and evenly abut the first valve seat on the first valve opening, thereby effectively avoiding abnormal deformation of the sealing ring.

[0013] In order to enable you to have a further understanding and recognition of the technical features and technical effects of the present invention, preferred embodiments and detailed descriptions are provided as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional schematic diagram of the vacuum gate valve that can be quickly closed according to the present invention.

[0015] Figure 2 It is a cross-sectional schematic diagram of the vacuum gate valve capable of rapid closing according to the present invention, wherein the valve plate is located in an open position.

[0016] Figure 3 It is a cross-sectional schematic diagram of the vacuum gate valve capable of rapid closing according to the present invention, wherein the valve plate is in a closed position.

[0017] Figure 4 It is a partial three-dimensional exploded schematic diagram of the vacuum gate valve that can be quickly closed according to the present invention, which shows a valve plate with a sealing surface of the first embodiment, and the valve plate and the valve stem are detachably combined.

[0018] Figure 5 It is a partial three-dimensional schematic diagram of the vacuum gate valve that can be quickly closed according to the present invention, which shows a valve plate with a sealing surface of the second embodiment.

[0019] Figure 6 It is a partial three-dimensional schematic diagram of the vacuum gate valve capable of rapid closing according to the present invention, showing the valve plate having the non-sealing surface of the first and second embodiments.

[0020] Figure 7 It is a three-dimensional exploded schematic diagram of the valve plate of the vacuum gate valve that can be quickly closed according to the present invention, which shows the valve plate with a sealing surface of the first embodiment.

[0021] Figure 8 It is a side view schematic diagram of the valve plate of the vacuum gate valve capable of rapid closing according to the present invention, showing the valve plate having a sealing surface in a second embodiment.

[0022] Description of reference numerals:

[0023] 10: Valve body

[0024] 11a: Top wall

[0025] 12a: First valve seat

[0026] 12b: Second valve seat

[0027] 13: Perforation

[0028] 14: Valve chamber

[0029] 16a: First valve opening

[0030] 16b: Second valve opening

[0031] 30: Valve stem

[0032] 32: First End

[0033] 34: Second End

[0034] 36: Washer

[0035] 50: Valve plate

[0036] 51: Groove

[0037] 52a: Sealing surface

[0038] 52b: Non-sealed surface

[0039] 53: Bolt

[0040] 70: Rolling stop assembly

[0041] 72: Crossbar

[0042] 80: Driving cylinder

[0043] 82a: First ventilation port

[0044] 82b: Second ventilation port

[0045] 84: Position sensor

[0046] 90: Sealing ring

[0047] 100: Vacuum gate valve

[0048] C: Close position

[0049] O: On position

[0050] X, Y, Z: Axis

[0051] I-I': Hatch line

[0052] α: Inclination angle DETAILED DESCRIPTION

[0053] In order to facilitate understanding of the technical features, contents and advantages of the present invention and the effects that can be achieved, the present invention is hereby described in detail in the form of embodiments in conjunction with the drawings. The drawings used therein are only for illustration and auxiliary description purposes, and may not be the actual proportions and precise configurations after the implementation of the present invention. Therefore, the proportions and configurations of the attached drawings should not be interpreted or limited to the scope of rights of the present invention in actual implementation. In addition, for ease of understanding, the same elements in the following embodiments are described with the same symbols.

[0054] In addition, the words used throughout the specification and claims generally have the ordinary meaning of each word used in this field, in the content disclosed herein, and in the specific content, unless otherwise noted. Certain words used to describe the present invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in the description of the present invention.

[0055] The use of “first”, “second”, “third”, etc. in this document does not specifically refer to the order or sequence, nor is it used to limit the present invention. It is only used to distinguish components or operations described with the same technical terms.

[0056] Secondly, the words "include", "including", "have", "contain" and the like used in this article are open terms, which mean including but not limited to.

[0057] The present invention proposes a vacuum gate valve that can be closed quickly, which can withstand the impact of rapid closing, the closing time can be less than about 0.5 seconds, and it can be closed reliably without the worry of being stuck or leaking. The vacuum gate valve that can be closed quickly of the present invention is suitable for demanding pump isolation applications or applications with high content of process by-products. Moreover, when the vacuum gate valve is in the closed state, the pressure difference that can be withstood by both sides of the gate in the closed position can reach about 1.2 bar. Please refer to Figures 1 to 8 ,in Figure 3 For along Figure 1 The schematic cross-sectional view obtained by the I-I' section line, Figure 2 The viewing direction is the same as Figure 3 The vacuum gate valve 100 capable of rapid closing of the present invention comprises a valve body 10 , a valve stem 30 , a valve plate 50 and a rolling abutment assembly 70 .

[0058] The valve body 10 of the vacuum gate valve 100 of the present invention is provided with a first valve seat 12a and a second valve seat 12b, which are respectively located on opposite sides of the valve chamber 14 of the valve body 10. The first valve seat 12a is located on the first valve opening 16a of the valve body 10, and the second valve seat 12b is located on the second valve opening 16b of the valve body 10. The valve chamber 14 is surrounded by a plurality of cavity walls (e.g., the front wall, the rear wall, the left wall, the right wall, the bottom wall and the top wall) of the valve body 10. The first valve seat 12a and the second valve seat 12b are, for example, respectively located on the front wall and the rear wall of the valve body 10, and the position of the first valve seat 12a corresponds to the second valve seat 12b. The valve chamber 14 of the valve body 10 of the present invention has a single-sided taper between the inner surface of the first valve seat 12a and the inner surface of the second valve seat 12b. The present invention takes the valve body 10 integrally provided with the first valve seat 12a and the second valve seat 12b as an example, but the present invention is not limited thereto. The first valve seat 12a and the second valve seat 12b are not limited to being fixedly or detachably connected to opposite sides of the valve body 10.

[0059] The vacuum gate valve capable of rapid closing of the present invention further comprises a drive cylinder 80 for driving the valve stem 30 to perform axial displacement movement along the axial direction Y in the valve chamber 14 of the valve body 10. If the present invention adopts a flat pneumatic cylinder as the drive cylinder 80, the installation space can be reduced. The flat pneumatic cylinder, for example, has a first vent port 82a and a second vent port 82b, and can supply gas or exhaust gas accordingly to make the piston of the flat pneumatic cylinder perform longitudinal displacement. In addition, a position sensor 84, such as a reed switch, can be selectively provided to indicate the position of the piston. Since the shape of the piston of the flat pneumatic cylinder is not circular, but is, for example, rectangular or elliptical, it can have anti-twist and non-rotation characteristics. For example, the piston of the flat pneumatic cylinder is connected to the second end 34, such as the top end, of the valve stem 30, so that the above-mentioned axial displacement movement becomes a non-rotational axial displacement movement. The first end 32 and the second end 34 of the valve stem 30 are respectively located at opposite ends of the valve stem 30. In addition, since the valve stem 30 will not twist or rotate during the axial displacement movement, the present invention does not need to use a bellows to be sleeved on the outer side of the valve stem 30 to maintain the airtight effect. The present invention only uses a gasket 36 to allow the valve stem 30 to remain in close contact with the valve body 10 during the axial displacement movement. In detail, the top wall 11a of the valve body 10 of the present invention has a through hole 13, and further includes a gasket 36 located in the through hole 13. Therefore, the valve stem 30 of the present invention can be airtightly and movably passed through the through hole 13 of the top wall 11a of the valve body 10, so it can remain in close contact with the top wall 11a during the axial displacement movement.

[0060] The two sides of the valve plate 50 of the vacuum gate valve 100 of the present invention are respectively a sealing surface 52a and a non-sealing surface 52b. The valve plate 50 has a single-sided taper, and the single-sided taper of the valve plate 50 is the same as the single-sided taper of the valve chamber 14 of the valve body 10. The valve plate 50 is fixedly or detachably connected to the first end 32 of the valve stem 30, such as the bottom end. Moreover, the valve plate 50 can be detachably connected to the first end 32 of the valve stem 30, for example, by means of a slot and a bolt 53. The valve plate 50 performs the above-mentioned axial displacement movement between the open position O and the closed position C in the valve chamber 14 by the valve stem 30, so that the sealing surface 52a of the valve plate 50 is correspondingly separated from the first valve seat 12a of the valve body 10 to open the first valve opening 16a or abuts against the first valve seat 12a of the valve body 10 to close the first valve opening 16a.

[0061] The vacuum gate valve 100 of the present invention has at least one rolling abutment assembly 70 disposed on the non-sealing surface 52b of the valve plate 50, wherein the rolling abutment assembly 70 protrudes from the non-sealing surface 52b of the valve plate 50 by approximately a height. The number of rolling abutment assemblies 70 is not limited to one or more. For example, the number of rolling abutment assemblies 70 may be, for example, 4, and they may be symmetrically arranged on the non-sealing surface 52b of the valve plate 50. That is, the 4 rolling abutment assemblies 70 are all disposed on the non-sealing surface 52b of the valve plate 50, and are respectively located above, below, left and right of the non-sealing surface 52b. The rolling abutment assembly 70 may, for example, be selected from the group consisting of balls and rollers. In addition, if Figure 6 and Figure 7 As shown, the rolling abutting components 70 of the present invention can be independently rolled or linked. For example, the rolling abutting components 70 can be paired, such as two on the left and right to form a group, and each two rolling abutting components 70 are linked to the two ends of a cross bar 72, and the cross bar 72 is embedded in the groove 51 of the valve plate 50, so that the rolling abutting components 70 can protrude from the non-sealing surface 52b of the valve plate 50 and achieve the effect of synchronous rolling, and help to make the sealing surface 52a of the valve plate 50 symmetrically and evenly abut the first valve seat 12a on the first valve opening 16a. Alternatively, the present invention can also achieve the rolling effect by placing a ball or a roller in a groove body with a perforation, and then embedding the groove body into the groove 51 of the valve plate 50. Since the present invention adopts a valve body 10 and a valve plate 50 with a single-sided taper, and the rolling abutment assembly 70 is protruded on the non-sealing surface 52b of the valve plate 50, therefore, in the present invention, the height of the rolling abutment assembly 70 protruding from the non-sealing surface 52b of the valve plate 50 will not be limited by the height of the sealing ring 90, that is, the above-mentioned protruding height is not limited to being greater than, equal to or less than the height of the sealing ring 90. As long as the valve plate 50 and the first valve seat 12a of the valve body 10 can be tightly fitted with each other by the sealing ring 90 to close the first valve opening 16a, any protruding height can be applied to the present invention, so it is more flexible.

[0062] In addition, in the vacuum gate valve 100 capable of rapid closing of the present invention, the valve plate 50 further selectively has a sealing ring 90 located on the sealing surface 52a, or the valve body 10 further selectively has a sealing ring 90 located on the inner surface of the first valve seat 12a. The sealing ring 90 is, for example, an O-ring, and the setting position of the sealing ring 90 corresponds to the first valve opening 16a. When the valve plate 50 moves from the open position O to the closed position C, the valve plate 50 and the first valve seat 12a of the valve body 10 are closely fitted to each other by the sealing ring 90 to close the first valve opening 16a. During the process of the valve plate 50 performing the above-mentioned axial displacement movement from the open position O to the closed position C, when the valve plate 50 is a certain distance away from the closed position C (for example, when the valve plate 50 is close to the closed position C), the valve plate 50 continuously rolls against the second valve seat 12b of the valve body 10 by means of the rolling abutting assembly 70 disposed on the non-sealing surface 52b of the valve plate 50, until the sealing surface 52a of the valve plate 50 completely closes the first valve seat 12a located on the first valve opening 16a. It can be seen from this that when the sealing surface 52a of the valve plate 50 or the first valve seat 12a of the valve body 10 is provided with a sealing ring 90 and when the valve plate 50 is about to reach the closed position C, the present invention can not only quickly and surely close the valve without the concern of being stuck or leaking, but also effectively reduce the deformation degree of the sealing ring 90 to avoid abnormal deformation.

[0063] In the first embodiment of the vacuum gate valve 100 of the present invention, the rolling abutting assembly 70 is only provided on the non-sealing surface 52b of the valve plate 50, so as to continuously roll and contact the second valve seat 12b of the valve body 10 until the sealing surface 52a of the valve plate 50 completely closes the first valve seat 12a located on the first valve opening 16a. In the second embodiment of the vacuum gate valve of the present invention, the rolling abutting assembly 70 is respectively provided on the non-sealing surface 52b and the sealing surface 52a of the valve plate 50, so as to make the rolling abutting assembly 70 continuously roll and contact the first valve seat 12a and the second valve seat 12b of the valve body 10 until the sealing surface 52a of the valve plate 50 completely closes the first valve seat 12a located on the first valve opening 16a.

[0064] Only one of the inner surface of the first valve seat 12a and the inner surface of the second valve seat 12b presents an inclination angle α with the longitudinal plane (e.g., YZ plane), and the other of the inner surface of the first valve seat 12a and the inner surface of the second valve seat 12b is parallel to the longitudinal plane (e.g., YZ plane). In addition, only one of the sealing surface 52a and the non-sealing surface 52b of the valve plate 50 presents the inclination angle α with the longitudinal plane (e.g., YZ plane), and the other of the sealing surface 52a and the non-sealing surface 52b is parallel to the longitudinal plane (e.g., YZ plane). The range of the inclination angle α is less than or equal to 90 degrees and greater than 0 degrees.

[0065] For example, in one embodiment, the sealing surface 52a of the valve plate 50 is inclined at an angle α to a longitudinal plane (e.g., YZ plane), and the non-sealing surface 52b of the valve plate 50 is parallel to the longitudinal plane (e.g., YZ plane), thereby forming a single-sided taper, wherein the rolling abutting assembly 70 is disposed on the non-sealing surface 52b of the valve plate 50. A contact surface formed by continuous rolling contact between the rolling abutting assembly 70 and the inner surface of the second valve seat 12b of the valve body 10 is parallel to the non-sealing surface 52b of the valve plate 50.

[0066] For example, in another embodiment, the non-sealing surface 52b of the valve plate 50 is inclined at an angle α to a longitudinal plane (e.g., YZ plane), and the sealing surface 52a of the valve plate 50 is parallel to the longitudinal plane (e.g., YZ plane) to form a single-sided taper, and the rolling abutting assembly 70 is disposed on the non-sealing surface 52b of the valve plate 50. A contact surface formed by continuous rolling contact between the rolling abutting assembly 70 and the inner surface of the second valve seat 12b of the valve body 10 is parallel to the non-sealing surface 52b of the valve plate 50.

[0067] In summary, the vacuum gate valve capable of rapid closing of the present invention has the following advantages:

[0068] (1) It can withstand the impact of rapid closing, the closing time can be less than about 0.5 seconds, and it can be closed securely without any concerns about jamming or leakage.

[0069] (2) The valve body and valve plate of the present invention have a single-sided taper, and the rolling abutment assembly is protruded on the non-sealing surface of the valve plate, and the protruding height is not limited by the height of the sealing ring, so the flexibility is higher.

[0070] (3) Even if the present invention omits the rolling abutment assembly protruding from the sealing surface of the valve plate, it is still possible to avoid abnormal deformation of the sealing ring caused by the valve plate sealing the first valve seat. Therefore, it is possible to reduce manufacturing costs and complexity and increase reliability and service life.

[0071] (4) The valve plate of the present invention uses a rolling abutment assembly to roll against the second valve seat of the valve body, rather than using a slider to slide and frictionally abut against the second valve seat of the valve body. This can effectively reduce friction and avoid jamming or leakage.

[0072] (5) The driving cylinder of the present invention adopts a flat pneumatic cylinder, which can prevent the valve stem from twisting or rotating during the axial displacement movement. Therefore, there is no need to use a bellows, and the manufacturing cost and installation space can be reduced.

[0073] (6) The rolling abutment components of the present invention can not only roll independently, but also roll in a linked manner, thereby allowing the sealing surface of the valve plate to symmetrically and evenly abut the first valve seat on the first valve opening, thereby effectively avoiding abnormal deformation of the sealing ring.

[0074] The above description is for illustrative purposes only and is not intended to be limiting. Any equivalent modifications or changes made thereto without departing from the spirit and scope of the present invention shall be included in the appended claims.

Claims

1. A vacuum gate valve capable of rapid closing, characterized in that: At least: A valve body, the valve body is provided with a first valve seat and a second valve seat respectively located at opposite sides of a valve chamber of the valve body, the valve chamber of the valve body has a single-sided taper between an inner surface of the first valve seat and an inner surface of the second valve seat, and the first valve seat is located on a first valve opening of the valve body; A valve stem, the valve stem performs an axial displacement movement along an axial direction in the valve chamber of the valve body; a valve plate, the two sides of the valve plate are respectively a sealing surface and a non-sealing surface, the valve plate has the same single-sided taper as the valve chamber of the valve body, wherein the valve plate is connected to a first end of the valve stem, and the valve plate is axially displaced between an open position and a closed position in the valve chamber by the valve stem, so that the sealing surface of the valve plate is correspondingly separated from the first valve seat of the valve body to open the first valve opening or abuts against the first valve seat of the valve body to close the first valve opening; and At least one rolling abutment assembly is arranged on the non-sealing surface of the valve plate, wherein during the axial displacement movement of the valve plate from the open position to the closed position, when the valve plate is a certain distance away from the closed position, the valve plate continuously rolls against the second valve seat of the valve body by means of the rolling abutment assembly arranged on the non-sealing surface of the valve plate until the sealing surface of the valve plate completely closes the first valve seat located on the first valve opening.

2. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The rolling abutment assembly is only arranged on the non-sealing surface of the valve plate, so as to continuously roll and contact the second valve seat of the valve body until the sealing surface of the valve plate completely closes the first valve seat located on the first valve opening.

3. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The rolling abutment assembly is respectively arranged on the non-sealing surface and the sealing surface of the valve plate, so that the rolling abutment assembly arranged on the non-sealing surface of the valve plate continuously rolls in contact with the second valve seat of the valve body until the sealing surface of the valve plate completely closes the first valve seat located on the first valve opening.

4. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The valve plate further has a sealing ring located on the sealing surface, or the valve body further has the sealing ring located on the inner surface of the first valve seat, wherein when the valve plate moves to the closed position, the sealing surface of the valve plate and the first valve seat of the valve body are tightly fitted to each other through the sealing ring to close the first valve opening.

5. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The sealing surface of the valve plate forms an inclination angle with a longitudinal plane, and the non-sealing surface of the valve plate is parallel to the longitudinal plane, thereby forming the single-sided taper.

6. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The non-sealing surface of the valve plate forms an inclination angle with a longitudinal plane, and the sealing surface of the valve plate is parallel to the longitudinal plane, thereby forming the single-sided taper.

7. The vacuum gate valve capable of rapid closing as claimed in claim 5 or 6, characterized in that: Only one of the inner surface of the first valve seat and the inner surface of the second valve seat is inclined at the longitudinal plane, and the other of the inner surface of the first valve seat and the inner surface of the second valve seat is parallel to the longitudinal plane.

8. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: Only one of the sealing surface and the non-sealing surface of the valve plate forms an inclination angle with a longitudinal plane, and the other of the sealing surface and the non-sealing surface is parallel to the longitudinal plane.

9. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: A contact surface formed by continuous rolling contact between the rolling abutting component and the second valve seat of the valve body is parallel to the non-sealing surface of the valve plate.

10. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The valve body further comprises a top wall with a through hole, the valve stem passes through the through hole and is kept in close contact with the top wall only by a gasket during the axial displacement movement.

11. The vacuum gate valve capable of rapid closing according to claim 1 or 10, characterized in that: The invention also comprises a driving cylinder for driving the valve stem to perform the axial displacement movement along the axial direction in the valve chamber.

12. The vacuum gate valve capable of rapid closing as claimed in claim 11, characterized in that: The driving cylinder is a flat pneumatic cylinder, a piston of which is connected to a second end of the valve stem, so that the axial displacement motion becomes a non-rotating axial displacement motion.

13. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The valve body further has a second valve opening. The second valve seat is located on the second valve opening of the valve body and corresponds to the first valve seat in position.

14. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: There are plural rolling abutment components, each of which is independently and rollingly arranged on the non-sealing surface of the valve plate.

15. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The number of the rolling abutting components is plural, and they are linked and rollingly arranged on the non-sealing surface of the valve plate.

16. The vacuum gate valve capable of rapid closing as claimed in claim 1, characterized in that: The number of the rolling abutting components is plural and they are symmetrically arranged on the non-sealing surface of the valve plate.

17. The vacuum gate valve capable of rapid closing according to claim 1, 14, 15 or 16, characterized in that: The rolling abutment component is selected from the group consisting of balls and rollers.

Images