Hot-pressing oscillation sintering furnace for sintering large-size silicon carbide boat

Abstract

The invention relates to the technical field of hot-pressing oscillation sintering furnaces, in particular to a hot-pressing oscillation sintering furnace for sintering a large-size silicon carbide boat. A feeding pipe is arranged at the top end of the outer wall of the box body and communicates with the box body. One side of the outer wall of the box body is fixedly connected with a hot-pressing oscillation sintering furnace body through a square plate; first through grooves are formed in two opposite sides of the outer wall of the box body; a motor drives a rotating shaft to rotate, the rotating shaft drives a reciprocating rotating rod to rotate through a first chain wheel and a first chain, the reciprocating rotating rod is matched with a reciprocating hole in a screening plate, rotation of the reciprocating rotating rod drives the screening plate to do reciprocating motion, silicon carbide powder on the screening plate is screened, and the device has the screening function; and through the anti-blocking mixing assembly, the device not only has a screening function, but also has a mixing function, and the screening function and the mixing function are realized through a single motor, so that the energy consumption is reduced, and the cost is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of hot pressing oscillating sintering furnaces, in particular to a hot pressing oscillating sintering furnace for sintering large-sized silicon carbide crystal boats. Background Art

[0002] A large-size silicon carbide crystal boat refers to a growth boat made of silicon carbide (SiC) material and used to carry large-size wafers or crystals. It has excellent high-temperature stability, corrosion resistance, load-bearing capacity, and excellent physical and chemical properties, such as high melting point, high hardness, good chemical stability, high-temperature stability and good thermal conductivity. It is widely used in semiconductor materials, solar cells, LED cells and other fields. The hot pressing oscillation sintering furnace is an advanced equipment specially used for sintering large-size silicon carbide crystal boats.

[0003] In the prior art, the required silicon carbide powder needs to be screened, stirred and mixed before sintering a large-sized silicon carbide wafer boat, so that the production of a large-sized silicon carbide wafer boat requires the cooperation of multiple equipment, which makes the production of a large-sized silicon carbide wafer boat more complicated. The use of multiple equipment also leads to more energy consumption, resulting in an increase in the production cost of the large-sized silicon carbide wafer boat and a reduction in market competitiveness. Summary of the invention

[0004] The purpose of the present invention is to solve the problem that the required silicon carbide powder needs to be screened, stirred and mixed before sintering a large-sized silicon carbide crystal boat, so that the production of a large-sized silicon carbide crystal boat requires the cooperation of multiple equipment, thereby making the production of a large-sized silicon carbide crystal boat more complicated, and the use of multiple equipment also leads to more energy consumption, resulting in increased production costs of large-sized silicon carbide crystal boats and reduced market competitiveness. A hot pressing oscillation sintering furnace for sintering large-sized silicon carbide crystal boats is proposed.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] A hot pressing oscillating sintering furnace for sintering large-sized silicon carbide crystal boats, comprising a box body; a feed pipe is arranged at the top of the outer wall of the box body, and the feed pipe is connected to the box body; a hot pressing oscillating sintering furnace body is fixedly connected to one side of the outer wall of the box body through a square plate; first through grooves are provided on opposite sides of the outer wall of the box body; a pair of sieve plates are slidably connected to the inner side walls of the first through grooves; a reciprocating hole is provided on one side of the outer wall of the sieve plate; a reciprocating rotating rod is rotatably connected to one side of the outer wall of the box body through a first connecting rod, and the reciprocating rotating rod and the reciprocating hole matching; a motor is fixedly connected to one side of the outer wall of the box body through a fixed block; a rotating shaft is provided at the output end of the motor; the outer side wall of the rotating shaft and one end of the outer wall of the reciprocating rod are fixedly connected to a first sprocket, and a pair of first sprockets are connected by a first chain; a partition is fixedly connected to the inner side wall of the box body; an anti-blocking mixing component is provided at the top of the outer wall of the screening plate through a rotating rod; a discharge pipe is fixedly connected to the bottom end of the outer wall of the partition, and the discharge pipe is communicated with the partition, and a valve is provided in the discharge pipe; a placement through groove is opened on one side of the outer wall of the box body.

[0007] As a preferred embodiment of the present invention, the anti-blocking mixing assembly includes a mixing element and a first rack; the two ends of the outer wall of the first rack are respectively fixed to the opposite sides of the inner wall of the box body; the bottom end of the outer wall of the rotating rod is rotatably connected to the top end of the outer wall of the screening plate; a group of anti-blocking plates are fixed to the outer side wall of the rotating rod; the top end of the outer wall of the rotating rod is fixed to the first gear, and the first gear and the first rack are meshed with each other.

[0008] As a preferred embodiment of the present invention, the mixing element includes a first rotating rod; the bottom ends of the outer walls of a pair of the first rotating rods are rotatably connected to the top end of the outer wall of the partition; a group of mixing plates are fixedly connected to the outer side walls of a pair of the first rotating rods; a second gear is fixedly connected to the top end of the outer walls of a pair of the first rotating rods; the bottom end of the outer wall of the rotating rod passes through the screening plate; second through grooves are provided on opposite sides of the outer wall of the box body; the bottom end of the outer wall of the rotating rod is rotatably connected to a connecting plate; a second rack is fixedly connected to one side of the outer wall of the connecting plate, and one side of the outer wall of the second rack is slidably connected to the inner side walls of a pair of second through grooves; the second rack is meshed with a pair of second gears.

[0009] As a preferred embodiment of the present invention, the outer wall of the rotating rod is sleeved with a third bevel gear, and the top end of the outer wall of the third bevel gear is fixedly connected to the bottom end of the outer wall of the screening plate; the rotating rod passes through the outer wall of one end of the screening plate and is rotatably connected to a pair of second rotating rods; the outer walls of a pair of the second rotating rods are fixedly connected to a fourth bevel gear; a pair of the fourth bevel gears are meshed with the third bevel gear; the outer wall of the second rotating rod is fixedly connected to a group of first soft rods; and a knocking ball is fixedly connected to one end of the outer wall of the first soft rod.

[0010] As a preferred embodiment of the present invention, a pair of third rotating rods are rotatably connected to the top end of the outer wall of the partition; a group of auxiliary plates are fixedly connected to the outer side walls of the pair of third rotating rods, and the two groups of auxiliary plates are matched with the two groups of mixing plates; a pair of third rotating rods and the outer side walls of the first rotating rod are fixedly connected to third sprockets, and a group of third sprockets are connected by a pair of third chains.

[0011] As a preferred embodiment of the present invention, a group of square blocks are fixedly connected to the inner wall of the box; a group of square blocks are fixedly connected to the bottom ends of the outer walls of each second soft rod; a group of impact balls are fixedly connected to the bottom ends of the outer walls of each second soft rod; a group of impact balls are respectively matched with two groups of auxiliary plates and a mixing plate.

[0012] As a preferred embodiment of the present invention, a placement plate is fixedly connected to the inner side wall of the hot pressing oscillation sintering furnace body; a circular through groove is opened on one side of the outer wall of the hot pressing oscillation sintering furnace body; a circular plate is rotatably connected to the inner side wall of the circular through groove; a first round rod is fixedly connected to one side of the outer wall of the circular plate; a fifth sprocket is fixedly connected to one end of the outer wall of the first round rod and the rotating shaft, and a pair of fifth sprockets are connected by a fifth chain; a slide plate is fixedly connected to one side of the outer wall of the circular plate located in the hot pressing oscillation sintering furnace body; a pair of inclined plates are provided on one side of the outer wall of the slide plate; a second round rod is fixedly connected to one end of the outer wall of a pair of the inclined plates; a group of fifth soft rods are fixedly connected to the outer side walls of a pair of the second round rods; a vibration ball is fixedly connected to one end of the outer wall of the fifth soft rod, and the vibration ball matches the placement plate.

[0013] As a preferred embodiment of the present invention, a first threaded rod is threadedly connected to one side of the outer wall of the circular plate, and one end of the outer wall of the first threaded rod passes through the circular plate; the first threaded rod passes through one end of the outer wall of the circular plate and is rotatably connected to an annular plate; one end of the outer walls of a pair of inclined plates are both slidably connected to one side of the outer wall of the slide plate; the outer walls of a pair of inclined plates are both slidably connected to the outer side wall of the annular plate on opposite sides; a guide rod is fixedly connected to one end of the outer wall of the annular plate, and one end of the outer wall of the guide rod passes through the circular plate.

[0014] As a preferred embodiment of the present invention, a first block is fixedly connected to the top of the outer wall of the placing plate; a bidirectional threaded rod 1 is rotatably connected to one side of the outer wall of the first block; a first clamping plate and a second clamping plate are threadedly connected to the outer wall of the bidirectional threaded rod 1; the bottom ends of the outer walls of the first clamping plate and the second clamping plate are in contact with the top of the outer wall of the placing plate, and the first clamping plate and the second clamping plate are symmetrical about the center line of the placing plate.

[0015] As a preferred embodiment of the present invention, a second block is fixedly connected to the top of the outer wall of the first clamping plate; a two-way threaded rod 2 is rotatably connected to one side of the outer wall of the second block; a pair of clamping plates are threadedly connected to the outer wall of the two-way threaded rod 2, and the bottom ends of the outer walls of the pair of clamping plates are in contact with the top of the outer wall of the first clamping plate.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. When the screening plate reciprocates, the reciprocating motion of the screening plate drives the rotating rod and the first gear on the rotating rod to reciprocate. Since the first gear is meshed with the first rack and the first rack is in a fixed state, the first gear rotates when the first gear reciprocates, so that the first gear drives the rotating rod to rotate, and the rotating rod drives a group of anti-blocking plates to rotate. The rotation of the anti-blocking plates drives the silicon carbide powder accumulated on the screening plate to move, thereby avoiding the blockage of the screening plate by the silicon carbide powder. The rotation of the anti-blocking plates also accelerates the screening of the silicon carbide powder, so that the screening efficiency of the device is further improved.

[0018] 2. When the rotating rod reciprocates, the second rack will be driven to reciprocate through the connecting plate. Since the second rack is limited by the second through groove, the movement direction of the second rack is fixed. Since the second rack is meshed with a pair of second gears, the movement of the second rack drives the second gear to rotate, and the second gear drives the first rotating rod to rotate, and the first rotating rod drives the mixing plate to rotate, and the mixing plate drives the silicon carbide powder to mix. The device not only has screening function, but also has mixing function, and it is realized by a single motor, thereby reducing energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0020] Figure 1 It is the main structure diagram of the present invention;

[0021] Figure 2 It is a partial structural diagram of the main body of the present invention;

[0022] Figure 3 It is an exploded structural diagram of the screening plate and the reciprocating rod of the present invention;

[0023] Figure 4 It is a structural diagram of the rotating rod, the anti-blocking plate, the knocking ball and the second rack of the present invention;

[0024] Figure 5 The structure diagram of the mixing plate, auxiliary plate and impact ball of the present invention;

[0025] Figure 6 It is a structural diagram of the box of the present invention;

[0026] Figure 7 It is a structural diagram of the motor, the rotating shaft and the hot pressing oscillation sintering furnace body of the present invention;

[0027] Figure 8 It is the internal structure diagram of the hot pressing oscillating sintering furnace body of the present invention;

[0028] Fig. 9 It is a structural diagram of the circular plate, the vibrating ball and the first threaded rod of the present invention;

[0029] Fig.10 It is an exploded structural diagram of the hot pressing oscillating sintering furnace body and the circular plate of the present invention;

[0030] In the figure: 1, box body; 2, feed pipe; 3, hot pressing oscillation sintering furnace body; 4, first through slot; 5, screening plate; 6, reciprocating hole; 7, reciprocating rod; 8, motor; 9, rotating shaft; 10, first sprocket; 11, first chain; 12, partition; 13, rotating rod; 14, discharge pipe; 15, placement through slot; 16, first rack; 17, anti-blocking plate; 18, first gear; 19, first rotating rod; 20, mixing plate; 21, second gear; 22, second through slot; 23, connecting plate; 24, second rack; 25, third bevel gear; 26, second rotating rod; 27, fourth bevel gear; 28, first soft rod; 29, knocking ball ; 30. The third rotating rod; 31. The auxiliary plate; 32. The third sprocket; 33. The third chain; 34. The square block; 35. The second soft rod; 36. The impact ball; 37. The placement plate; 38. The circular through groove; 39. The circular plate; 40. The first round rod; 41. The fifth sprocket; 42. The fifth chain; 43. The slide plate; 44. The inclined plate; 45. The second round rod; 46. The fifth soft rod; 47. The vibrating ball; 48. The first threaded rod; 49. The annular plate; 50. The guide rod; 51. The first square block; 52. The two-way threaded rod one; 53. The first clamping plate; 54. The second clamping plate; 55. The second square block; 56. The two-way threaded rod two; 57. The clamping plate. DETAILED DESCRIPTION

[0031] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Embodiment 1:

[0033] See also Figure 1-Figure 10As shown, a hot pressing oscillating sintering furnace for sintering large-sized silicon carbide crystal boats comprises a box body 1; a feed pipe 2 is arranged at the top of the outer wall of the box body 1, and the feed pipe 2 is connected to the box body 1; a hot pressing oscillating sintering furnace body 3 is fixedly connected to one side of the outer wall of the box body 1 through a square plate; first through grooves 4 are provided on opposite sides of the outer wall of the box body 1; a pair of sieve plates 5 are slidably connected to the inner side walls of the first through grooves 4; a reciprocating hole 6 is provided on one side of the outer wall of the sieve plate 5; and a first connecting rod is rotated on one side of the outer wall of the box body 1. A reciprocating rod 7 is dynamically connected to the housing 1, and the reciprocating rod 7 matches the reciprocating hole 6; a motor 8 is fixedly connected to one side of the outer wall of the housing 1 through a fixed block; a rotating shaft 9 is provided at the output end of the motor 8; a first sprocket 10 is fixedly connected to the outer wall of the rotating shaft 9 and one end of the outer wall of the reciprocating rod 7, and a pair of first sprockets 10 are connected by a first chain 11; a partition 12 is fixedly connected to the inner wall of the housing 1; an anti-blocking mixing component is provided at the top of the outer wall of the screening plate 5 through a rotating rod 13; the bottom end of the outer wall of the partition 12 is fixedly connected to the outer wall of the screening plate 5; A discharge pipe 14 is connected, and the discharge pipe 14 is connected to the partition 12, and a valve is arranged in the discharge pipe 14; a placement slot 15 is opened on one side of the outer wall of the box body 1, and the required silicon carbide powder is poured from the feed pipe 2 into the box body 1, and the required silicon carbide powder falls onto the screening plate 5 in the box body 1. At this time, the motor 8 drives the rotating shaft 9 to rotate, because the outer side wall of the rotating shaft 9 and one end of the outer wall of the reciprocating rotating rod 7 are fixedly connected with the first sprocket 10, and a pair of first sprockets 10 are connected by the first chain 11. The connection allows the rotating shaft 9 to drive the reciprocating rod 7 to rotate through the first sprocket 10 and the first chain 11. Since the reciprocating rod 7 matches the reciprocating hole 6 on the screening plate 5, the rotation of the reciprocating rod 7 drives the screening plate 5 to reciprocate, and the silicon carbide powder on the screening plate 5 is screened, so that the device has a screening function, and through the anti-blocking mixing component, the device not only has a screening function, but also has a mixing function, and it is realized by a single motor 8, thereby reducing energy consumption and reducing costs.

[0034] The anti-blocking mixing assembly includes a mixing element and a first rack 16; the two ends of the outer wall of the first rack 16 are respectively fixedly connected to the opposite sides of the inner wall of the box body 1; the bottom end of the outer wall of the rotating rod 13 is rotatably connected to the top end of the outer wall of the screening plate 5; a group of anti-blocking plates 17 are fixedly connected to the outer wall of the rotating rod 13; the top end of the outer wall of the rotating rod 13 is fixedly connected to the first gear 18, and the first gear 18 and the first rack 16 are meshed with each other. When the screening plate 5 reciprocates, the reciprocating motion of the screening plate 5 drives the rotating rod 13 and the first gear 18 on the rotating rod 13 to reciprocate. Because the first gear 18 and the first rack 16 are meshed with each other, and the first rack 16 is in a fixed state, the first gear 18 is rotated when the first gear 18 reciprocates, so that the first gear 18 drives the rotating rod 13 to rotate, and the rotating rod 13 drives a group of anti-blocking plates 17 to rotate, so that the rotation of the anti-blocking plate 17 drives the silicon carbide powder accumulated on the screening plate 5 to move, thereby avoiding the blockage of the screening plate 5 caused by the silicon carbide powder, and the rotation of the anti-blocking plate 17 also accelerates the screening of the silicon carbide powder, so that the screening efficiency of the present device is further improved.

[0035] The mixing element includes a first rotating rod 19; the outer wall bottom ends of a pair of first rotating rods 19 are rotatably connected to the outer wall top end of the partition 12; a group of mixing plates 20 are fixedly connected to the outer wall of the pair of first rotating rods 19; the outer wall top ends of the pair of first rotating rods 19 are fixedly connected to the second gear 21; the outer wall bottom end of the rotating rod 13 passes through the screening plate 5; the outer wall of the box body 1 is provided with a second through groove 22 on opposite sides; the outer wall bottom end of the rotating rod 13 is rotatably connected to a connecting plate 23; a second rack 24 is fixedly connected to one side of the outer wall of the connecting plate 23, and one side of the outer wall of the second rack 24 is slidably connected to the inner side wall of a pair of second through grooves 22; the second rack 24 is meshed with a pair of second gears 21, and when the silicon carbide powder is screened, the silicon carbide powder will It falls from the screening plate 5 until it falls onto the partition 12. When the silicon carbide powder falls onto the partition 12, the reciprocating motion of the rotating rod 13 drives the second rack 24 to reciprocate through the connecting plate 23. Since the second rack 24 is limited by the second through groove 22, the movement direction of the second rack 24 is fixed. Since the second rack 24 is meshed with a pair of second gears 21, the movement of the second rack 24 drives the second gear 21 to rotate, and the second gear 21 drives the first rotating rod 19 to rotate, and the first rotating rod 19 drives the mixing plate 20 to rotate, and the mixing plate 20 drives the silicon carbide powder to mix. The device not only has a screening function, but also has a mixing function, and is realized by a single motor 8, thereby reducing energy consumption.

[0036] A placing plate 37 is fixedly connected to the inner wall of the hot pressing oscillation sintering furnace body 3; a circular through groove 38 is provided on one side of the outer wall of the hot pressing oscillation sintering furnace body 3; a circular plate 39 is rotatably connected to the inner wall of the circular through groove 38; a first round rod 40 is fixedly connected to one side of the outer wall of the circular plate 39; a fifth sprocket 41 is fixedly connected to one end of the outer wall of the first round rod 40 and the rotating shaft 9, and a pair of fifth sprockets 41 are connected by a fifth chain 42; a slide plate 43 is fixedly connected to one side of the outer wall of the circular plate 39 located in the hot pressing oscillation sintering furnace body 3; a pair of inclined plates 44 are provided on one side of the outer wall of the slide plate 43; a second round rod 45 is fixedly connected to one end of the outer wall of the pair of inclined plates 44; a group of fifth soft rods 46 are fixedly connected to the outer side walls of the pair of second round rods 45; a vibration ball 47 is fixedly connected to one end of the outer wall of the fifth soft rod 46, and the vibration ball 47 is connected to the The placement plate 37 is matched. When the large-sized silicon carbide crystal boat is sintered, because the first round rod 40 and one end of the outer wall of the rotating shaft 9 are fixedly connected with the fifth sprocket 41, and a pair of fifth sprockets 41 are connected by the fifth chain 42, the rotating shaft 9 drives the first round rod 40 to rotate through the fifth sprocket 41 and the fifth chain 42, and the first round rod 40 drives the circular plate 39 to rotate, and the circular plate 39 drives the slide plate 43, the inclined plate 44, the second round rod 45, the fifth soft rod 46, and the vibration ball 47 to rotate, so that the vibration ball 47 hits the placement plate 37 during vibration, and the placement plate 37 transmits the vibration to the mold, so that the large-sized silicon carbide crystal boat has sufficient oscillation force during sintering, so that the device can independently increase the independent oscillation force, thereby increasing the upper limit of the oscillation force, making the device more flexible and practical.

[0037] The outer wall of the rotating rod 13 is sleeved with a third bevel gear 25, and the top of the outer wall of the third bevel gear 25 is fixedly connected to the bottom of the outer wall of the screening plate 5; the rotating rod 13 passes through the outer wall of one end of the screening plate 5 and is rotatably connected to a pair of second rotating rods 26; the outer walls of the pair of second rotating rods 26 are both fixedly connected to fourth bevel gears 27; the pair of fourth bevel gears 27 are both meshed with the third bevel gear 25; the outer wall of the second rotating rod 26 is fixedly connected to a group of first soft rods 28; one end of the outer wall of the first soft rod 28 is fixedly connected to a knocking ball 29. When the rotating rod 13 During rotation, a pair of second rotating rods 26 on the rotating rod 13 and the fourth bevel gear 27 on the second rotating rod 26 rotate accordingly. Since the pair of fourth bevel gears 27 are meshed with the third bevel gear 25, when the fourth bevel gear 27 rotates, the third bevel gear 25 rotates by itself, so that the fourth bevel gear 27 drives the second rotating rod 26 to rotate by itself, and the second rotating rod 26 drives the first soft rod 28 and the knocking ball 29 to rotate, so that the knocking ball 29 knocks on the screening plate 5 to generate vibration, so that the vibration force further improves the screening efficiency and effect of the screening plate 5.

[0038] A pair of third rotating rods 30 are rotatably connected to the top of the outer wall of the partition 12; a group of auxiliary plates 31 are fixedly connected to the outer side walls of the pair of third rotating rods 30, and the two groups of auxiliary plates 31 match the two groups of mixing plates 20; a pair of third rotating rods 30 and the outer side walls of the first rotating rod 19 are fixedly connected to the third sprocket 32, and a group of third sprockets 32 are connected by a pair of third chains 33. When the pair of first rotating rods 19 rotate, the pair of third rotating rods 30 and the outer side walls of the first rotating rod 19 are fixedly connected to the third sprocket 32, and a group of third sprockets 32 are connected by a pair of third chains 33, so that the pair of first rotating rods 19 drive the pair of third rotating rods 30 to rotate through the group of third sprockets 32 and the pair of third chains 33, so that the pair of third rotating rods 30 drive the two groups of auxiliary plates 31 to rotate, so that the two groups of auxiliary plates 31 cooperate with the two groups of mixing plates 20 to work, so that the mixing efficiency and mixing effect of silicon carbide powder are further improved.

[0039] A first threaded rod 48 is threadedly connected to one side of the outer wall of the circular plate 39, and one end of the outer wall of the first threaded rod 48 passes through the circular plate 39; the first threaded rod 48 passes through the outer wall of the circular plate 39 and is rotatably connected to the annular plate 49 at one end; one end of the outer wall of a pair of inclined plates 44 is slidably connected to one side of the outer wall of the slide plate 43; the outer walls of the pair of inclined plates 44 are slidably connected to the outer side wall of the annular plate 49 at the opposite sides; a guide rod 50 is fixedly connected to one end of the outer wall of the annular plate 49, and one end of the outer wall of the guide rod 50 passes through the circular plate 39. By rotating the first threaded rod 48, the first threaded rod 48 is rotated to rotate. The rotation of the threaded rod 48 causes the first threaded rod 48 to drive the annular plate 49 to move. Since the annular plate 49 is limited by the guide rod 50, the annular plate 49 can only move but not rotate at this time. When the annular plate 49 moves, the movement of the annular plate 49 will cause the inclined plate 44 to rise or fall, so that the inclined plate 44 drives the vibration ball 47 to rise or fall, so that the device can adjust the vibration intensity of the vibration ball 47 by rotating the first threaded rod 48, and adjust the vibration frequency of the vibration ball 47 by the speed of the motor 8, so that the device can be more accurate when sintering large-sized silicon carbide crystal boats.

[0040] A group of square blocks 34 are fixedly connected to the inner wall of the box body 1; a second soft rod 35 is fixedly connected to the bottom end of the outer wall of a group of square blocks 34; an impact ball 36 is fixedly connected to the bottom end of the outer wall of the second soft rod 35; a group of impact balls 36 are matched with two groups of auxiliary plates 31 and mixing plates 20 respectively, when the two groups of auxiliary plates 31 and mixing plates 20 rotate, the two groups of auxiliary plates 31 and mixing plates 20 will encounter the impact balls 36 when rotating, when the two groups of auxiliary plates 31 and mixing plates 20 encounter the impact balls 36, the two groups of auxiliary plates 31 and mixing plates 20 will vibrate, so that the vibration force is transmitted to the silicon carbide powder being mixed through the two groups of auxiliary plates 31 and mixing plates 20, so that the vibration disperses the silicon carbide powder, so that the silicon carbide powder can be better mixed and the mixing of the silicon carbide powder is more uniform.

[0041] Embodiment 2:

[0042] See also Figure 8 As shown, a first block 51 is fixedly connected to the top of the outer wall of the placement plate 37; a bidirectional threaded rod 52 is rotatably connected to one side of the outer wall of the first block 51; a first clamping plate 53 and a second clamping plate 54 are threadedly connected to the outer wall of the bidirectional threaded rod 52; the bottom ends of the outer walls of the first clamping plate 53 and the second clamping plate 54 are in contact with the top of the outer wall of the placement plate 37, and the first clamping plate 53 and the second clamping plate 54 are symmetrical about the center line of the placement plate 37. When the mold is placed in the hot pressing oscillation sintering furnace body 3, the bidirectional threaded rod 52 is rotated to drive the first clamping plate 53 and the second clamping plate 54 to move toward the center, so that the first clamping plate 53 and the second clamping plate 54 clamp the mold and fix it, so that the mold is more stable during sintering, thereby reducing the probability of errors during sintering of large-sized silicon carbide crystal boats.

[0043] A second block 55 is fixedly connected to the top of the outer wall of the first clamping plate 53; a two-way threaded rod 56 is rotatably connected to one side of the outer wall of the second block 55; a pair of clamping plates 57 are threadedly connected to the outer wall of the two-way threaded rod 56, and the bottom ends of the outer walls of the pair of clamping plates 57 are in contact with the top of the outer wall of the first clamping plate 53. When the first clamping plate 53 and the second clamping plate 54 clamp the fixed mold, the two-way threaded rod 56 is rotated to drive the pair of clamping plates 57 to clamp the fixed mold. At this time, the four sides of the mold are fixed, so that the stability of the mold is further improved.

[0044] When the present invention is in use, the required silicon carbide powder is poured into the box body 1 from the feed pipe 2, and the required silicon carbide powder falls onto the screening plate 5 in the box body 1. At this time, the motor 8 drives the rotating shaft 9 to rotate. Since the outer wall of the rotating shaft 9 and one end of the outer wall of the reciprocating rotating rod 7 are fixedly connected with the first sprocket 10, and a pair of first sprockets 10 are connected by a first chain 11, the rotating shaft 9 drives the reciprocating rotating rod 7 to rotate through the first sprocket 10 and the first chain 11. Since the reciprocating rotating rod 7 matches the reciprocating hole 6 on the screening plate 5, the rotation of the reciprocating rotating rod 7 drives the screening plate 5 to reciprocate, and the silicon carbide powder on the screening plate 5 is screened, so that the device has a screening function.

[0045] When the screening plate 5 reciprocates, the reciprocating motion of the screening plate 5 drives the rotating rod 13 and the first gear 18 on the rotating rod 13 to reciprocate. Since the first gear 18 is meshed with the first rack 16 and the first rack 16 is in a fixed state, the first gear 18 rotates through the first gear 18 when the first gear 18 reciprocates, so that the first gear 18 drives the rotating rod 13 to rotate, and the rotating rod 13 drives a group of anti-blocking plates 17 to rotate. The rotation of the anti-blocking plates 17 drives the silicon carbide powder accumulated on the screening plate 5 to move, thereby avoiding the blockage of the screening plate 5 caused by the silicon carbide powder. The rotation of the anti-blocking plates 17 also accelerates the screening of the silicon carbide powder, so that the screening efficiency of the present device is further improved.

[0046] When the rotating rod 13 rotates, a pair of second rotating rods 26 on the rotating rod 13 and the fourth bevel gear 27 on the second rotating rod 26 rotate accordingly. Since the pair of fourth bevel gears 27 are meshed with the third bevel gear 25, the fourth bevel gear 27 rotates through the third bevel gear 25, so that the fourth bevel gear 27 drives the second rotating rod 26 to rotate, and the second rotating rod 26 drives the first soft rod 28 and the knocking ball 29 to rotate, so that the knocking ball 29 knocks on the screening plate 5 to generate vibration, so that the vibration force further improves the screening efficiency and effect of the screening plate 5.

[0047] After the silicon carbide powder is screened, the silicon carbide powder will fall from the screening plate 5 until it falls onto the partition 12. When the silicon carbide powder falls onto the partition 12, the reciprocating motion of the rotating rod 13 will drive the second rack 24 to reciprocate through the connecting plate 23. Since the second rack 24 is limited by the second through groove 22, the movement direction of the second rack 24 is fixed. Since the second rack 24 is meshed with a pair of second gears 21, the movement of the second rack 24 drives the second gear 21 to rotate, and the second gear 21 drives the first rotating rod 19 to rotate, and the first rotating rod 19 drives the mixing plate 20 to rotate, and the mixing plate 20 drives the silicon carbide powder to mix, so that the device not only has a screening function, but also has a mixing function, and is realized by a single motor 8, thereby reducing energy consumption.

[0048] When the pair of first rotating rods 19 rotate, the outer side walls of the pair of third rotating rods 30 and the first rotating rod 19 are fixedly connected with the third sprocket 32, and a group of third sprockets 32 are connected by a pair of third chains 33, so that the pair of first rotating rods 19 drive the pair of third rotating rods 30 to rotate through a group of third sprockets 32 and a pair of third chains 33, and the pair of third rotating rods 30 drive the two groups of auxiliary plates 31 to rotate, so that the two groups of auxiliary plates 31 cooperate with the two groups of mixing plates 20 to work, so that the mixing efficiency and mixing effect of silicon carbide powder are further improved.

[0049] When the two groups of auxiliary plates 31 and the mixing plates 20 rotate, they will encounter the impact ball 36. When the two groups of auxiliary plates 31 and the mixing plates 20 encounter the impact ball 36, the two groups of auxiliary plates 31 and the mixing plates 20 will vibrate, so that the vibration force is transmitted to the silicon carbide powder being mixed through the two groups of auxiliary plates 31 and the mixing plates 20, so that the vibration disperses the silicon carbide powder, so that the silicon carbide powder can be better mixed and the mixing of the silicon carbide powder can be more uniform.

[0050] When the silicon carbide powder is mixed, the mold is placed under the discharge pipe 14 from the placement slot 15 on the box body 1, and then the valve at the discharge pipe 14 is opened to allow the mixed silicon carbide powder to fall into the mold, and then the mold is placed in the hot pressing oscillation sintering furnace body 3.

[0051] When the mold is placed in the hot pressing oscillation sintering furnace body 3, the bidirectional threaded rod 52 is rotated to drive the first clamping plate 53 and the second clamping plate 54 to move toward the center, so that the first clamping plate 53 and the second clamping plate 54 clamp the mold and fix it, making the mold more stable during sintering, thereby reducing the probability of errors during sintering of large-sized silicon carbide crystal boats.

[0052] When the first clamping plate 53 and the second clamping plate 54 clamp the fixed mold, the bidirectional threaded rod 56 is rotated to drive a pair of clamping plates 57 to clamp the fixed mold. At this time, the four sides of the mold are fixed, so that the stability of the mold is further improved.

[0053] When a large-sized silicon carbide crystal boat is sintered, since the first round rod 40 and one end of the outer wall of the rotating shaft 9 are fixedly connected with the fifth sprocket 41, and a pair of fifth sprockets 41 are connected by the fifth chain 42, the rotating shaft 9 drives the first round rod 40 to rotate through the fifth sprocket 41 and the fifth chain 42, and the first round rod 40 drives the circular plate 39 to rotate, and the circular plate 39 drives the slide plate 43, the inclined plate 44, the second round rod 45, the fifth soft rod 46, and the vibration ball 47 to rotate, so that the vibration ball 47 hits the placement plate 37 during vibration, and the placement plate 37 transmits the vibration to the mold, so that the large-sized silicon carbide crystal boat has sufficient oscillation force during sintering, so that the device can independently increase the independent oscillation force, thereby increasing the upper limit of the oscillation force, making the device more flexible and practical.

[0054] By rotating the first threaded rod 48, the rotation of the first threaded rod 48 causes the first threaded rod 48 to drive the annular plate 49 to move. Since the annular plate 49 is limited by the guide rod 50, the annular plate 49 can only move but not rotate at this time. When the annular plate 49 moves, the movement of the annular plate 49 will cause the inclined plate 44 to rise or fall, so that the inclined plate 44 drives the vibration ball 47 to rise or fall, so that the device can adjust the vibration intensity of the vibration ball 47 by rotating the first threaded rod 48, and adjust the vibration frequency of the vibration ball 47 by the rotation speed of the motor 8, so that the device can be more accurate when sintering large-sized silicon carbide crystal boats.

[0055] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A hot pressing oscillating sintering furnace for sintering large-sized silicon carbide wafer boats, comprising a box (1); a feed pipe (2) is arranged at the top of the outer wall of the box (1), and the feed pipe (2) is connected to the box (1); a hot pressing oscillating sintering furnace body (3) is fixedly connected to one side of the outer wall of the box (1) through a square plate; characterized in that: The outer wall of the box body (1) is provided with first through slots (4) on opposite sides; a pair of inner side walls of the first through slots (4) are slidably connected to a screening plate (5); a reciprocating hole (6) is provided on one side of the outer wall of the screening plate (5); a reciprocating rotating rod (7) is rotatably connected to one side of the outer wall of the box body (1) via a first connecting rod, and the reciprocating rotating rod (7) matches the reciprocating hole (6); a motor (8) is fixedly connected to one side of the outer wall of the box body (1) via a fixing block; a rotating shaft (9) is provided at the output end of the motor (8); the outer side of the rotating shaft (9) A first sprocket (10) is fixedly connected to one end of the outer wall of the reciprocating rod (7), and the pair of first sprockets (10) are connected by a first chain (11); a partition (12) is fixedly connected to the inner wall of the box body (1); an anti-blocking mixing component is provided at the top end of the outer wall of the screening plate (5) through a rotating rod (13); a discharge pipe (14) is fixedly connected to the bottom end of the outer wall of the partition (12), and the discharge pipe (14) is connected to the partition (12), and a valve is provided in the discharge pipe (14); a placement groove (15) is opened on one side of the outer wall of the box body (1).

2. The hot pressing oscillating sintering furnace for sintering large-size silicon carbide wafer boats according to claim 1, characterized in that: The anti-blocking mixing assembly comprises a mixing element and a first rack (16); the two ends of the outer wall of the first rack (16) are respectively fixedly connected to the opposite sides of the inner wall of the box body (1); the bottom end of the outer wall of the rotating rod (13) is rotatably connected to the top end of the outer wall of the screening plate (5); a group of anti-blocking plates (17) are fixedly connected to the outer wall of the rotating rod (13); the top end of the outer wall of the rotating rod (13) is fixedly connected to a first gear (18), and the first gear (18) and the first rack (16) are meshed with each other.

3. The hot pressing oscillating sintering furnace for sintering large-size silicon carbide wafer boats according to claim 2, characterized in that: The mixing element comprises a first rotating rod (19); the bottom ends of the outer walls of a pair of the first rotating rods (19) are both rotatably connected to the top ends of the outer walls of the partition (12); the outer walls of the pair of the first rotating rods (19) are both fixedly connected to a group of mixing plates (20); the top ends of the outer walls of the pair of the first rotating rods (19) are both fixedly connected to a second gear (21); the bottom ends of the outer walls of the rotating rods (13) penetrate the screening plate (5); second through grooves (22) are provided on opposite sides of the outer wall of the box body (1); the bottom ends of the outer walls of the rotating rods (13) are rotatably connected to a connecting plate (23); a second rack (24) is fixedly connected to one side of the outer wall of the connecting plate (23), and one side of the outer wall of the second rack (24) is slidably connected to the inner side walls of the pair of second through grooves (22); the second rack (24) and the pair of second gears (21) are meshed with each other.

4. The hot pressing oscillating sintering furnace for sintering large-sized silicon carbide wafer boats according to claim 3, characterized in that: The outer wall of the rotating rod (13) is sleeved with a third bevel gear (25), and the top end of the outer wall of the third bevel gear (25) is fixedly connected to the bottom end of the outer wall of the screening plate (5); the rotating rod (13) passes through the outer wall of one end of the screening plate (5) and is rotatably connected to a pair of second rotating rods (26); the outer walls of the pair of second rotating rods (26) are both fixedly connected to fourth bevel gears (27); the pair of fourth bevel gears (27) are both meshed with the third bevel gear (25); the outer wall of the second rotating rod (26) is fixedly connected to a group of first soft rods (28); and one end of the outer wall of the first soft rod (28) is fixedly connected to a knocking ball (29).

5. The hot pressing oscillating sintering furnace for sintering large-sized silicon carbide wafer boats according to claim 3, characterized in that: A pair of third rotating rods (30) are rotatably connected to the top of the outer wall of the partition (12); a group of auxiliary plates (31) are fixedly connected to the outer side walls of the pair of third rotating rods (30), and the two groups of auxiliary plates (31) match the two groups of mixing plates (20); a third sprocket (32) is fixedly connected to the outer side walls of the pair of third rotating rods (30) and the first rotating rod (19), and the group of third sprockets (32) are connected by a pair of third chains (33).

6. The hot pressing oscillating sintering furnace for sintering large-sized silicon carbide wafer boats according to claim 5, characterized in that: A group of square blocks (34) are fixedly connected to the inner side wall of the box body (1); a second soft rod (35) is fixedly connected to the bottom end of the outer wall of a group of square blocks (34); a collision ball (36) is fixedly connected to the bottom end of the outer wall of the second soft rod (35); a group of collision balls (36) are matched with two groups of auxiliary plates (31) and a mixing plate (20) respectively.

7. The hot pressing oscillating sintering furnace for sintering large-size silicon carbide wafer boats according to claim 1, characterized in that: A placement plate (37) is fixedly connected to the inner side wall of the hot pressing oscillating sintering furnace body (3); a circular through groove (38) is provided on one side of the outer wall of the hot pressing oscillating sintering furnace body (3); a circular plate (39) is rotatably connected to the inner side wall of the circular through groove (38); a first round rod (40) is fixedly connected to one side of the outer wall of the circular plate (39); a fifth sprocket (41) is fixedly connected to one end of the outer wall of the first round rod (40) and the rotating shaft (9), and a pair of fifth sprockets (41) are connected to each other through a fifth chain (42). The circular plate (39) is located inside the hot pressing oscillation sintering furnace body (3), and a slide plate (43) is fixedly connected to one side of the outer wall thereof; a pair of inclined plates (44) are provided on one side of the outer wall thereof; a second round rod (45) is fixedly connected to one end of the outer wall of the pair of inclined plates (44); a group of fifth soft rods (46) are fixedly connected to the outer side wall of the pair of second round rods (45); a vibration ball (47) is fixedly connected to one end of the outer wall of the fifth soft rod (46), and the vibration ball (47) matches the placement plate (37).

8. The hot pressing oscillating sintering furnace for sintering large-sized silicon carbide wafer boats according to claim 7, characterized in that: One side of the outer wall of the circular plate (39) is threadedly connected to a first threaded rod (48), and one end of the outer wall of the first threaded rod (48) passes through the circular plate (39); one end of the outer wall of the first threaded rod (48) passes through the circular plate (39) and is rotatably connected to an annular plate (49); one end of the outer wall of a pair of inclined plates (44) is slidably connected to one side of the outer wall of the slide plate (43); the outer walls of the pair of inclined plates (44) are slidably connected to the outer side wall of the annular plate (49) on opposite sides; one end of the outer wall of the annular plate (49) is fixedly connected to a guide rod (50), and one end of the outer wall of the guide rod (50) passes through the circular plate (39).

9. The hot pressing oscillating sintering furnace for sintering large-sized silicon carbide wafer boats according to claim 7, characterized in that: A first block (51) is fixedly connected to the top of the outer wall of the placement plate (37); a bidirectional threaded rod (52) is rotatably connected to one side of the outer wall of the first block (51); a first clamping plate (53) and a second clamping plate (54) are threadedly connected to the outer wall of the bidirectional threaded rod (52); the bottom ends of the outer walls of the first clamping plate (53) and the second clamping plate (54) are in contact with the top of the outer wall of the placement plate (37), and the first clamping plate (53) and the second clamping plate (54) are symmetrical about the center line of the placement plate (37).

10. The hot pressing oscillating sintering furnace for sintering large-sized silicon carbide wafer boats according to claim 9, characterized in that: A second block (55) is fixedly connected to the top of the outer wall of the first clamping plate (53); a bidirectional threaded rod (56) is rotatably connected to one side of the outer wall of the second block (55); a pair of clamping plates (57) are threadedly connected to the outer wall of the bidirectional threaded rod (56), and the bottom ends of the outer walls of the pair of clamping plates (57) are in contact with the top of the outer wall of the first clamping plate (53).

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