Furnace nose air tightness detection method and system applied to aluminum-silicon plating process

Abstract

The invention relates to the technical field of gas tightness detection of furnace noses, in particular to a furnace nose gas tightness detection method and system applied to an aluminum-silicon plating process, and the method comprises the steps: obtaining the gas pressure, hydrogen content and oxygen content of a gas outlet of a furnace nose at each moment in each period, and the temperature of the interior of the furnace nose at each moment in each period; the external air pressure at each moment in each period in the air outside the furnace nose is measured; the relative air pressure difference of each period is determined; determining the air pressure deviation value of each period; determining a relative trend quantity of each period; determining an air pressure influence factor of each period; determining the hydrogen stability of each period; the gas fluctuation degree of each period is determined, the leakage coefficient of each period is determined, and the gas tightness of the furnace nose is detected. According to the invention, the air tightness condition of the furnace nose can be monitored in real time, the accuracy of detecting the air tightness of the furnace nose is improved, and the product quality and the production efficiency can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of air tightness detection of furnace noses, and specifically to an air tightness detection method and system for furnace noses applied to aluminum silicon plating processes. Background Art

[0002] With the continuous development of semiconductor technology, the aluminum-silicon (Al-Si) process plays an increasingly important role in integrated circuit manufacturing. The aluminum-silicon process is mainly used for the formation of metal interconnection layers. The aluminum-silicon plate has good heat resistance, heat reflectivity, and corrosion resistance, which can improve the conductivity and reliability of the chip. In the production process of aluminum-silicon, the performance of the annealing furnace and its connecting component, the furnace nose, is crucial. The furnace nose is a key component connecting the annealing furnace and the exhaust system. When the furnace nose is in operation, its internal temperature will cause the flange inside the furnace nose to be thermally deformed, thereby affecting the sealing of the furnace nose, which in turn directly affects the quality and efficiency of the aluminum-silicon process. With the continuous improvement of the performance requirements for semiconductor devices, ensuring the airtightness of the furnace nose has become a key link in improving the yield and production efficiency of the production line.

[0003] At present, the traditional method of testing the air tightness of the furnace nose determines whether there is a leak by detecting the change in gas pressure. However, the gas pressure in the furnace nose is greatly affected by temperature, and the internal temperature of the furnace nose is not fixed when it is working, which makes the gas pressure keep changing, thus affecting the accuracy of the air tightness test. Secondly, the traditional detection method often requires suspending the working state of the furnace nose for air tightness testing, which affects the continuity and efficiency of the production line, and thus cannot meet the modern semiconductor manufacturing industry's demand for high-quality and high-efficiency production. Summary of the invention

[0004] In order to solve the above technical problems, a furnace nose air tightness detection method and system applied to aluminum silicon plating process are provided to solve the existing problems.

[0005] The solution to the technical problem of this application is to provide a method and system for detecting the air tightness of a furnace nose used in an aluminum silicon plating process, including the following steps: In a first aspect, an embodiment of the present application provides a method for detecting the air tightness of a furnace nose applied to an aluminum silicon plating process, the method comprising the following steps: Obtain the gas pressure, hydrogen content and oxygen content at the gas outlet of the furnace nose at each moment of each cycle, the temperature inside the furnace nose at each moment of each cycle, and the external air pressure in the air outside the furnace nose at each moment of each cycle; Determine the relative pressure difference of each cycle according to the difference between the gas pressure and the external pressure at different times in each cycle; analyze the deviation of the gas pressure at all times in each cycle, and determine the pressure deviation of each cycle in combination with the relative pressure difference; According to the change trend of the gas pressure at all times in each cycle, combined with the gas pressure deviation, the relative trend amount of each cycle is determined; the correlation between the gas pressure and temperature at all times in each cycle is analyzed, and combined with the relative trend amount, the gas pressure influence factor of each cycle is determined; Analyze the changes in hydrogen content between different moments in each cycle to determine the hydrogen stability of each cycle; determine the gas fluctuation of each cycle based on the discreteness of the oxygen content at all moments in each cycle and the hydrogen stability, and determine the leakage coefficient of each cycle in combination with the gas pressure influencing factor to detect the air tightness of the furnace nose.

[0006] Preferably, determining the relative air pressure difference in each cycle comprises: The difference between the gas pressure and the external air pressure at the first moment in each cycle is recorded as the initial air pressure difference; The difference between the gas pressure at the last moment of each cycle and the external air pressure is recorded as the final air pressure difference; The difference between the final air pressure difference and the initial air pressure difference is taken as the relative air pressure difference of each cycle.

[0007] Preferably, determining the air pressure deviation amount in each cycle includes: Calculate the average deviation of gas pressure at all times within each cycle; The product of the average deviation and the relative air pressure difference is calculated and recorded as the first product. The calculation result of the exponential function with the natural constant as the base and the first product as the exponent is used as the air pressure deviation amount of each cycle.

[0008] Preferably, determining the relative trend amount of each period includes: Decompose the gas pressure at all times in each cycle to obtain a trend sequence; combine the position number of each element in the trend sequence with its elements to form a two-dimensional array; Performing linear fitting on all the two-dimensional arrays in the trend sequence to obtain the slope of the fitting line; The product of the absolute value of the slope and the air pressure deviation is taken as the relative trend value of each cycle.

[0009] Preferably, determining the air pressure impact factor of each cycle includes: Calculate the correlation between gas pressure and temperature at all times in each cycle; The ratio of the relative trend quantity to the correlation degree is used as the air pressure influence factor of each period.

[0010] Preferably, determining the hydrogen stability of each cycle comprises: Calculate the ratio of the hydrogen content at each moment in each cycle to that at the adjacent moment, and record it as the relative content ratio; The average of the relative content ratios at all times in each cycle is calculated as the hydrogen stability of each cycle.

[0011] Preferably, determining the gas fluctuation degree of each cycle includes: Calculate the discrete degree of oxygen content at all times in each cycle; The ratio of the discrete degree to the hydrogen stability is taken as the gas fluctuation degree of each cycle.

[0012] Preferably, the leakage coefficient of each cycle is the product of the gas pressure influence factor and the gas fluctuation degree.

[0013] Preferably, the detection of the air tightness of the furnace nose includes: Calculate the average of the leakage coefficients of multiple cycles before each cycle and record it as the evaluation factor; If the leakage coefficient of a period is greater than the evaluation factor, the air tightness of the furnace nose is poor, otherwise, the air tightness of the furnace nose is good.

[0014] In the second aspect, an embodiment of the present application also provides a furnace nose air tightness detection system applied to the aluminum silicon plating process, comprising a memory, a processor, and a computer program stored in the memory and running on the processor, wherein the processor implements any one of the steps of the furnace nose air tightness detection method applied to the aluminum silicon plating process when executing the computer program.

[0015] This application has at least the following beneficial effects: The present application determines the relative air pressure difference of each cycle according to the difference change between the gas pressure and the external pressure at different times in each cycle; analyzes the deviation of the gas pressure at all times in each cycle, and determines the air pressure deviation of each cycle in combination with the relative air pressure difference. The beneficial effect is that it takes into account the difference in air pressure inside and outside the furnace nose and the distribution fluctuation of the gas pressure in the furnace nose, which is beneficial to enhance the sensitivity of gas leakage detection by increasing the influence of the change in gas pressure; determines the relative trend of each cycle according to the change trend of the gas pressure at all times in each cycle and in combination with the air pressure deviation; analyzes the correlation between the gas pressure and temperature at all times in each cycle and determines the air pressure influence factor of each cycle in combination with the relative trend. The beneficial effect is that it takes into account the change trend of the gas pressure and the influence of the gas pressure fluctuation by temperature change to reflect the gas pressure in the furnace nose. Fluctuation degree; analyzing the changes in hydrogen content between different moments in each cycle to determine the hydrogen stability of each cycle; determining the gas fluctuation degree of each cycle according to the discreteness of the oxygen content at all moments in each cycle and the hydrogen stability, and determining the leakage coefficient of each cycle in combination with the air pressure influencing factor, and testing the air tightness of the furnace nose. Its beneficial effect is that it takes into account the changing trends of the oxygen content and hydrogen content inside the furnace nose under different pressure states to reflect the gas leakage of the furnace nose. By real-time monitoring of the changes in the operating data of the furnace nose, there is no need to suspend the furnace nose, thereby ensuring the continuity and efficiency of production, so that the furnace nose can be tested for air tightness in time during production, the air tightness of the furnace nose can be monitored in real time, and the furnace nose can be repaired in time, thereby improving the accuracy of the air tightness detection of the furnace nose, which can improve product quality and production efficiency, and help reduce the maintenance cost of the furnace nose. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process of the present application is further described in detail below in conjunction with the accompanying drawings.

[0017] Figure 1 A flow chart of the steps of the method for detecting the air tightness of the furnace nose applied to the aluminum silicon plating process provided in the embodiment of the present application; Figure 2 A flowchart of the steps of the method for obtaining the air pressure influence factor of each cycle provided in an embodiment of the present application; Figure 3 A flowchart of the steps of a method for obtaining a leakage coefficient for each cycle provided in an embodiment of the present application. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of this application more clear, the following is a further detailed description of the furnace nose air tightness detection method and system for aluminum silicon plating process proposed in this application in combination with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain this application and are not used to limit this application.

[0019] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0020] See also Figure 1 , which shows a flow chart of the steps of a method for detecting the air tightness of a furnace nose applied to an aluminum silicon plating process provided by an embodiment of the present application, the method comprising the following steps: Step 1, obtain the gas pressure, hydrogen content and oxygen content at the gas outlet of the furnace nose at each moment of each cycle, the temperature inside the furnace nose at each moment of each cycle, and the external air pressure in the air outside the furnace nose at each moment of each cycle.

[0021] The high temperature inside the furnace nose will cause the flange inside the furnace nose to be thermally deformed, thereby affecting the air tightness of the furnace nose. By adding a combined sealing gasket between the flanges inside the furnace nose, the sealing compensation between the flanges can be increased, thereby reducing the maintenance cost of the furnace nose. The present application adds a combined sealing gasket to the flange of the furnace nose head. The combined sealing gasket is made of copper alloy as the main material and is processed by high-temperature resistant silicon fiber board. In this embodiment, the thickness of the copper alloy plate is 1.5mm, the thickness of the silicon fiber board is 6mm, the thickness of the combined sealing gasket is 23mm, the total weight of the combined sealing gasket is 22kg / pc, and the preload force of the fastening bolt is 400N.m (M16). Copper alloy has good high temperature resistance and good flexibility. When the flange of the furnace nose head is deformed, the combined sealing gasket adapts to the space that needs to be compensated according to the different positions of the deformation, so that the combined sealing gasket can be tightly attached to the flange surface, thereby ensuring the air tightness inside the furnace nose. However, due to the long-term operation of the furnace nose, the deformation of the flange may cause the fit between the flange and the combined sealing gasket to gradually deteriorate. When air leakage occurs in the furnace nose, the furnace nose needs to be repaired in time to ensure that the air tightness in the furnace nose is always in good condition.

[0022] Based on the above analysis, in order to detect the air tightness inside the furnace nose, a pressure sensor, a hydrogen detector and an oxygen analyzer are installed at the gas outlet of the furnace nose to collect the gas pressure, hydrogen content and oxygen content of the furnace nose respectively; a thermocouple is installed inside the furnace nose to collect the temperature inside the furnace nose. At the same time, the atmospheric pressure in the air outside the furnace nose is measured by a barometer. The collection time interval is t, and the collection period is T. According to the collection time sequence, the gas pressure, hydrogen content and oxygen content at the gas outlet of the furnace nose at each moment in each cycle, the temperature inside the furnace nose at each moment in each cycle, and the external air pressure in the air outside the furnace nose at each moment in each cycle are obtained.

[0023] Preferably, in this embodiment, the collection time interval is 1 second and the collection cycle is 10 minutes. As other implementation modes, the implementer can set them according to the actual situation.

[0024] At this point, the gas pressure, hydrogen content and oxygen content at the gas outlet of the furnace nose at each moment in each cycle, the temperature inside the furnace nose at each moment in each cycle, and the external air pressure in the air outside the furnace nose at each moment in each cycle are obtained.

[0025] Step 2, determining the relative air pressure difference of each cycle according to the difference change between the gas pressure and the external pressure at different times in each cycle; analyzing the deviation of the gas pressure at all times in each cycle, and determining the air pressure deviation of each cycle in combination with the relative air pressure difference; determining the relative trend of each cycle according to the change trend of the gas pressure at all times in each cycle, and determining the air pressure influence factor of each cycle in combination with the air pressure deviation; analyzing the correlation between the gas pressure and temperature at all times in each cycle, and determining the air pressure influence factor of each cycle in combination with the relative trend.

[0026] In the aluminum silicon plating process, the air tightness of the furnace nose has a great influence on the product quality. If there is a leak in the furnace nose, that is, the air tightness is poor, the inside of the furnace nose will exchange with the outside air, which will increase the oxygen content in the furnace nose. The oxides generated by the oxidation reaction between oxygen and metal substances will affect the purity and uniformity of the aluminum silicon coating. Therefore, when testing the air tightness of the furnace nose, the air tightness of the furnace nose is often judged based on the fluctuation of gas pressure. However, in addition to the gas pressure fluctuation caused by leakage, the gas pressure will also be affected by many factors. For example, when testing the gas pressure, the gas is very sensitive to temperature changes. As the temperature rises, the gas molecules move more violently, the density will decrease, and the gas pressure will increase; conversely, as the temperature decreases, the density will increase and the gas pressure will decrease; that is, there is a positive correlation between gas pressure and temperature.

[0027] Secondly, due to the low gas density, strong permeability and good fluidity, it shows high volatility in the furnace nose. The more violent the gas fluctuation is, the more difficult it is for the gas pressure to stabilize. At this time, there is no trend change in the fluctuation of gas pressure, that is, the gas pressure fluctuates irregularly around a pressure value, and the fluctuation amplitude is small.

[0028] Further, the step flow chart of the method for obtaining the air pressure influence factor of each cycle provided in the embodiment of the present application is as follows: Figure 2 shown.

[0029] Based on the above analysis, the gas pressure fluctuations and the changes in gas pressure and temperature inside the furnace nose are analyzed to determine the gas pressure influencing factor to reflect the fluctuation characteristics of the gas pressure inside the furnace nose, specifically: The trend decomposition algorithm is used to decompose the gas pressure at all times in each cycle, and the trend sequence is obtained in chronological order; Preferably, in this embodiment, an STL decomposition algorithm (Seasonal and Trend decomposition using Loess) is adopted, wherein the STL decomposition algorithm is a well-known technology and will not be described in detail herein.

[0030] The position number of each element in the trend sequence and its elements form a two-dimensional array; Performing linear fitting on all two-dimensional arrays in the trend sequence to obtain the slope of the fitting line; Preferably, in this embodiment, the least square method is used for linear fitting, wherein the least square method is a well-known technology and will not be described in detail here.

[0031] Calculate the correlation between gas pressure and temperature at all times in each cycle; Preferably, in this embodiment, the Pearson correlation coefficient between the gas pressure and the temperature at all times in each cycle is calculated, wherein the Pearson correlation coefficient is a well-known technology and will not be described in detail here. As other implementation methods, the implementer may adopt other methods of the prior art, such as the Spearman correlation coefficient, cosine similarity, etc., and this embodiment does not impose any special restrictions on this.

[0032] The difference between the gas pressure and the external air pressure at the first moment in each cycle is recorded as the initial air pressure difference; The difference between the gas pressure at the last moment of each cycle and the external air pressure is recorded as the final air pressure difference; Preferably, in this embodiment, the difference between the gas pressure at the first moment in each cycle and the external air pressure is recorded as the initial air pressure difference; the difference between the gas pressure at the last moment in each cycle and the external air pressure is recorded as the final air pressure difference.

[0033] The difference between the final air pressure difference and the initial air pressure difference is used as the relative air pressure difference in each cycle; Preferably, in this embodiment, the absolute value of the difference between the final air pressure difference and the initial air pressure difference is used as the relative air pressure difference of each cycle.

[0034] Calculate the average deviation of gas pressure at all times within each cycle; It should be noted that the calculation of the average deviation is a well-known technique, and the specific calculation method is: ,in, represents the mean deviation, Indicates data, represents the mean of all data, Indicates the number of all data.

[0035] Calculate the product of the average deviation and the relative air pressure difference, record it as the first product, and use the calculation result of the exponential function with the natural constant as the base and the first product as the exponent as the air pressure deviation of each cycle; The product of the absolute value of the slope and the air pressure deviation is used as the relative trend value of each cycle; The ratio of the relative trend quantity to the correlation degree is used as the air pressure influence factor of each period; Preferably, in this embodiment, the calculation formula of the air pressure influence factor of each cycle is: ,in, For the The pressure influence factor of each cycle is For the The average deviation of the gas pressure at all times in a cycle, For the The initial pressure difference of the cycle, For the The pressure difference at the end of a cycle is For the The absolute value of the slope of the fitted straight line for the period, For the The correlation between the cycles, To preset a value greater than to avoid the denominator being 0, the value range is In this embodiment, The value is 1. As other implementation methods, the implementer can set it according to the actual situation. is an exponential function with a natural constant as base; secondly, is the relative pressure difference, is the first product, is the air pressure deviation, is the relative trend quantity.

[0036] It should be noted that the purpose of the exponential function is to increase the impact of gas pressure fluctuations. Since when a leak occurs, it is mainly caused by changes in gas pressure fluctuations, increasing the impact of gas pressure fluctuations is more conducive to enhancing the sensitivity of gas leak detection. The greater the correlation, the greater the impact of temperature changes on the gas pressure in the furnace nose. If the temperature changes in the furnace nose are relatively stable and there is no gas leakage in the furnace nose, the gas pressure fluctuations are small and the mean , relative pressure difference, and absolute value of slope The average value is small, the correlation is large, and the obtained air pressure influence factor is small, which means that the air tightness of the furnace nose is good; if the temperature in the furnace nose changes greatly, the movement of gas molecules will be obviously different, and the gas pressure fluctuation will be large, then the average value is , relative pressure difference, and absolute value of slope However, when the temperature in the furnace nose changes greatly, leakage in the furnace nose will cause a significant change in gas pressure, and drastic temperature changes will further aggravate this change, resulting in more drastic pressure fluctuations. At this time, the gas pressure fluctuation caused by leakage in the furnace nose is more drastic than that caused by no leakage in the furnace nose. Therefore, the greater the gas pressure influence factor, the worse the air tightness of the furnace nose; secondly, if the correlation is smaller, it means that the gas pressure in the furnace nose is less affected by temperature changes. If the mean , relative pressure difference, and absolute value of slope If the gas pressure is larger, it means that the gas pressure fluctuates more. If the gas pressure influence factor is larger, it means that the gas pressure fluctuation in the furnace nose is not caused by temperature, but is most likely due to the poor air tightness in the furnace nose. By analyzing the ratio of the gas pressure fluctuation and the correlation degree, the influence of temperature on the gas pressure can be eliminated. Therefore, the gas pressure influence factor can reflect the change of gas pressure.

[0037] At this point, the air pressure influence factor of each cycle is obtained.

[0038] Step 3, analyze the change of hydrogen content between different moments in each cycle to determine the hydrogen stability of each cycle; determine the gas fluctuation of each cycle according to the discreteness of oxygen content at all moments in each cycle and the hydrogen stability, and determine the leakage coefficient of each cycle in combination with the air pressure influencing factor to detect the air tightness of the furnace nose.

[0039] Furthermore, the air tightness of the furnace nose is further tested in combination with the changes in the hydrogen content and oxygen content in the furnace nose. When the furnace nose is working, a mixture of nitrogen and hydrogen will be filled into the furnace nose as a protective gas to prevent oxidation of the aluminum-coated silicon surface. At the same time, in a high temperature environment, hydrogen will also undergo a reduction reaction with the already generated oxides, thereby ensuring the quality of the aluminum-coated silicon. Under normal circumstances, when there is no leakage in the furnace nose, if hydrogen does not undergo a reduction reaction with the oxide, the hydrogen content is basically stable or has small fluctuations; if hydrogen undergoes a reduction reaction with the oxide, the hydrogen content will decrease, but because the consumption of chemical substances by chemical reactions is relatively stable, the reduction in hydrogen content per unit time is also relatively stable.

[0040] Secondly, when testing the air tightness of the furnace nose, since the oxygen content in the furnace nose is low, when there is a leak in the furnace nose, the furnace nose exchanges gas with the outside world, which will increase the oxygen content in the furnace nose, so as to determine whether there is a leak by monitoring the change in oxygen content. However, since the furnace nose needs to be filled with protective gas and the temperature in the furnace nose may make the gas pressure higher, the furnace nose may exist in two states: positive pressure and negative pressure.

[0041] Among them, when the furnace nose is in a positive pressure state, the gas pressure inside the furnace nose is greater than the external air pressure outside the furnace nose. Therefore, when a leak occurs, the pressure difference between the inside and the outside will cause the furnace nose to discharge protective gas, that is, hydrogen, which will cause the hydrogen content in the furnace nose to be greatly reduced, and as the gas is discharged, the air pressure inside the furnace nose gradually decreases, the gas flow rate slows down, and the hydrogen content discharged per unit time gradually decreases; when the furnace nose is in a negative pressure state, the gas pressure inside the furnace nose is less than the external air pressure outside the furnace nose. Therefore, when a leak occurs, outside air will enter the furnace nose, causing the oxygen content in the furnace nose to increase. At the same time, oxygen and hydrogen will react chemically at high temperature, which will consume a certain amount of hydrogen, so that the hydrogen content will decrease and the amount of reduction in hydrogen content per unit time is relatively stable.

[0042] Further, the step flow chart of the method for obtaining the leakage coefficient of each cycle provided in the embodiment of the present application is as follows: Figure 3 shown.

[0043] Based on the above analysis, the leakage coefficient is determined by analyzing the changes in hydrogen and oxygen to reflect the possibility of gas leakage in the furnace nose, specifically: Calculate the discrete degree of oxygen content at all times in each cycle; Preferably, in this embodiment, the variance of the oxygen content at all times in each cycle is calculated. As other implementations, the implementer may adopt other methods of the prior art, such as standard deviation, coefficient of variation, etc. This embodiment does not impose any special limitation on this.

[0044] Calculate the ratio of the hydrogen content at each moment in each cycle to the previous moment, and record it as the relative content ratio; Calculating the average of the relative content ratios at all times in each cycle as the hydrogen stability of each cycle; The ratio of the discrete degree to the hydrogen stability is used as the gas fluctuation degree of each cycle; The product of the gas pressure influence factor and the gas fluctuation degree is used as the leakage coefficient of each cycle; Preferably, in this embodiment, the calculation formula for hydrogen stability in each cycle is: ,in, For the The hydrogen stability of the cycle, For the The number of all moments in a cycle, For the In the cycle The hydrogen content at the time, For the In the cycle The hydrogen content at the time; secondly, is the relative content ratio.

[0045] It should be noted that, when there is no obvious air leakage in the furnace nose and the temperature change is small, it is the first phenomenon; when there is no obvious air leakage in the furnace nose and the temperature change is large, it is the second phenomenon; when there is air leakage in the furnace nose under positive pressure, it is the third phenomenon; when there is air leakage in the furnace nose under negative pressure, it is the fourth phenomenon.

[0046] Therefore, in the first phenomenon, the gas pressure fluctuation in the furnace nose is small, the gas pressure influence factor is small, the oxygen content changes small, and the discrete degree is small. The hydrogen in the furnace nose is mainly used for reduction reaction, so the hydrogen content consumed per unit time is relatively constant, and the consumption of hydrogen participating in the reaction within a certain period of time is relatively small. Approximately equal to , the relative content ratio is approximately close to 1, the hydrogen stability is relatively large, the result of hydrogen stability is also approximately 1, and the leakage coefficient is smaller; secondly, when the furnace nose is in the second and third phenomena, the air pressure influence factor will increase, and the discrete degree is small, but compared with the second phenomenon, the gas pressure in the furnace nose in the third phenomenon is greater than the external air pressure, so the protective gas hydrogen will be discharged to the outside. As the hydrogen is discharged, the hydrogen content decreases, that is, ,so is smaller, so that the hydrogen stability is smaller, and the resulting leakage coefficient is larger than that in the second phenomenon; when the furnace nose is in the fourth phenomenon, the gas pressure in the furnace nose will fluctuate greatly, so that the air pressure influence factor is larger, the hydrogen content consumed per unit time is relatively constant, the hydrogen stability is larger, and the result of the hydrogen stability is approximately 1. Relative to the second phenomenon, in the fourth phenomenon, since the gas pressure in the furnace nose is lower than the external air pressure, air will enter the furnace nose, so that the oxygen content changes greatly, that is, the degree of discreteness is larger, and the resulting leakage coefficient is larger than that in the second phenomenon. Therefore, the larger the leakage coefficient, the greater the possibility of gas leakage in the furnace nose, and the worse the air tightness of the furnace nose.

[0047] Based on the above analysis, the leakage coefficient in the historical period is analyzed to detect the air tightness of the furnace nose, specifically: Calculate the average of the leakage coefficients of multiple cycles before each cycle and record it as the evaluation factor; Preferably, in this embodiment, the average value of the leakage coefficients of the 10 cycles before each cycle is calculated and recorded as the evaluation factor.

[0048] If the leakage coefficient of a period is greater than the evaluation factor, the air tightness of the furnace nose is poor, otherwise, the air tightness of the furnace nose is good.

[0049] It should be noted that when there is no leakage in the furnace nose, the leakage coefficient is relatively small; when there is a leak in the furnace nose, whether it is a leak in a positive pressure state or a leak in a negative pressure state, the leakage coefficient is large; by using the monitoring data during the operation of the furnace nose to detect the air tightness of the furnace nose, it not only takes into account the changes in gas pressure in the furnace nose, but also takes into account the influence of temperature on the gas pressure, as well as performing air tightness tests under different pressure states, thereby enhancing the accuracy and efficiency of the furnace nose air tightness test.

[0050] Based on the same inventive concept as the above method, an embodiment of the present application also provides a furnace nose air tightness detection system applied to an aluminum-silicon plating process, comprising a memory, a processor, and a computer program stored in the memory and running on the processor, wherein the processor implements the steps of any one of the above-mentioned furnace nose air tightness detection methods applied to an aluminum-silicon plating process when executing the computer program.

[0051] It should be understood that although Figure 1 The steps in the flowchart are shown in sequence as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order restriction for the execution of these steps, and these steps can be executed in other orders. Moreover, Figure 1At least part of the steps may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the sub-steps or stages of other steps.

[0052] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the present application. It should be pointed out that, for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present application without departing from the content of the technical solution of the present application, shall fall within the protection scope of the technical solution of the present application.

Claims

1. A method for detecting the air tightness of a furnace nose used in an aluminum silicon plating process, characterized in that: The method comprises the following steps: Obtain the gas pressure, hydrogen content and oxygen content at the gas outlet of the furnace nose at each moment of each cycle, the temperature inside the furnace nose at each moment of each cycle, and the external air pressure in the air outside the furnace nose at each moment of each cycle; Determine the relative pressure difference of each cycle according to the difference between the gas pressure and the external pressure at different times in each cycle; analyze the deviation of the gas pressure at all times in each cycle, and determine the pressure deviation of each cycle in combination with the relative pressure difference; According to the change trend of the gas pressure at all times in each cycle, combined with the gas pressure deviation, the relative trend amount of each cycle is determined; the correlation between the gas pressure and temperature at all times in each cycle is analyzed, and combined with the relative trend amount, the gas pressure influence factor of each cycle is determined; Analyze the changes in hydrogen content between different moments in each cycle to determine the hydrogen stability of each cycle; determine the gas fluctuation of each cycle based on the discreteness of the oxygen content at all moments in each cycle and the hydrogen stability, and determine the leakage coefficient of each cycle in combination with the gas pressure influencing factor to detect the air tightness of the furnace nose.

2. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the relative air pressure difference in each cycle includes: The difference between the gas pressure and the external air pressure at the first moment in each cycle is recorded as the initial air pressure difference; The difference between the gas pressure at the last moment of each cycle and the external air pressure is recorded as the final air pressure difference; The difference between the final air pressure difference and the initial air pressure difference is taken as the relative air pressure difference of each cycle.

3. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the air pressure deviation amount in each cycle includes: Calculate the average deviation of gas pressure at all times within each cycle; The product of the average deviation and the relative air pressure difference is calculated and recorded as the first product. The calculation result of the exponential function with the natural constant as the base and the first product as the exponent is used as the air pressure deviation amount of each cycle.

4. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the relative trend amount of each period includes: Decompose the gas pressure at all times in each cycle to obtain a trend sequence; combine the position number of each element in the trend sequence with its elements to form a two-dimensional array; Performing linear fitting on all the two-dimensional arrays in the trend sequence to obtain the slope of the fitting line; The product of the absolute value of the slope and the air pressure deviation is taken as the relative trend value of each cycle.

5. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the air pressure influence factor of each cycle includes: Calculate the correlation between gas pressure and temperature at all times in each cycle; The ratio of the relative trend quantity to the correlation degree is used as the air pressure influence factor of each period.

6. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the hydrogen stability of each cycle includes: Calculate the ratio of the hydrogen content at each moment in each cycle to that at the adjacent moment, and record it as the relative content ratio; The average of the relative content ratios at all times in each cycle is calculated as the hydrogen stability of each cycle.

7. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: Determining the gas fluctuation degree of each cycle includes: Calculate the discrete degree of oxygen content at all times in each cycle; The ratio of the discrete degree to the hydrogen stability is taken as the gas fluctuation degree of each cycle.

8. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: The leakage coefficient of each cycle is the product of the gas pressure influence factor and the gas fluctuation degree.

9. The method for detecting the air tightness of the furnace nose used in the aluminum silicon plating process according to claim 1, characterized in that: The gas tightness detection of the furnace nose includes: Calculate the average of the leakage coefficients of multiple cycles before each cycle and record it as the evaluation factor; If the leakage coefficient of a period is greater than the evaluation factor, the air tightness of the furnace nose is poor, otherwise, the air tightness of the furnace nose is good.

10. A furnace nose air tightness detection system applied to aluminum silicon plating process, comprising a memory, a processor, and a computer program stored in the memory and running on the processor, characterized in that: When the processor executes the computer program, the steps of the method for detecting the air tightness of the furnace nose applied to the aluminum silicon plating process as described in any one of claims 1-9 are implemented.

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