Electron beam welding cooling assembly and cooling method

Abstract

The invention belongs to the technical field of electron beam welding, and discloses an electron beam welding cooling assembly and a cooling method.The electron beam welding cooling assembly comprises a cooling tool and an air supply mechanism, the cooling tool is annularly arranged on the periphery of a welding piece, and air inlet holes are formed in the outer circle of the cooling tool in the circumferential direction of the cooling tool; the inner ring of the cooling tool is provided with an air outlet hole, the air outlet hole faces the welding piece, the cooling tool is provided with an air cavity, the air cavity is communicated with the air inlet hole and the air outlet hole, the air supply mechanism is communicated with the air inlet hole, the air supply mechanism supplies continuous compressed air to the air cavity of the cooling tool through the air inlet hole, and finally the compressed air is sprayed out through the air outlet hole. The air outlet holes face the periphery of the welding part, so that the welding part can be cooled, stress deformation caused by thermal stress after the semiconductor part is welded is improved, the tool can be operated by one person, the two hands of the person can be liberated during cooling, and the working efficiency of the person and the productivity of the semiconductor part are improved.

Description

Technical Field

[0001] The invention relates to the technical field of electron beam welding, and in particular to an electron beam welding cooling component and a cooling method. Background Art

[0002] Electron beam welding technology uses a high-energy electron beam as a processing heat source, bombarding the metal at the joint of the weld with a high-energy density electron beam to make it melt quickly and achieve the purpose of welding.

[0003] In the semiconductor field, the cooling equipment for welding is used to cool the chamber of the welded parts. This method is very expensive and has a high cost-effectiveness for large semiconductor welded parts. However, as the welding chamber increases, the time and cost of this solution will increase greatly, reducing work efficiency and the productivity of semiconductor parts. In addition, the cooling effect is poor, and the thermal stress of the semiconductor welded parts after welding is not improved, resulting in stress deformation.

[0004] Therefore, there is an urgent need for an electron beam welding cooling assembly and a cooling method to solve the above problems. Summary of the invention

[0005] According to one aspect of the present invention, the present invention provides an electron beam welding cooling assembly for cooling welded parts, improving stress deformation caused by thermal stress after welding of semiconductor components, and improving the work efficiency of personnel and the productivity of semiconductor components.

[0006] In order to solve the above problems existing in the prior art, the present invention adopts the following technical solutions:

[0007] An electron beam welding cooling assembly, comprising:

[0008] A cooling tool, the cooling tool is arranged around the outer circumference of the weldment, along the circumferential direction of the cooling tool, the outer ring of the cooling tool is provided with an air inlet hole, the inner ring of the cooling tool is provided with an air outlet hole, the air outlet hole faces the weldment, the cooling tool has an air cavity, and the air cavity is connected to the air inlet hole and the air outlet hole;

[0009] An air supply mechanism is connected to the air inlet and is used to provide cooling gas.

[0010] Preferably, the cooling tooling includes a shell and an air guide plate, the shell has the air cavity, the air guide plate is located in the air cavity, the shell has a top wall and a bottom wall, along the central axis direction of the shell, one end of the air guide plate is fixedly connected to the bottom wall, and the other end of the air guide plate is spaced apart from the top wall.

[0011] Preferably, the air guide plate is an annular structure.

[0012] Preferably, the shell is an annular structure.

[0013] Preferably, there are a plurality of the air outlet holes, and the plurality of the air outlet holes are arranged at intervals along the circumferential direction of the shell.

[0014] Preferably, the cooling tool is made of aluminum material.

[0015] Preferably, the gas supply mechanism comprises a gas tank and a gas valve, the gas tank having a sealed cavity for containing compressed gas, the gas inlet end of the gas valve being connected to the gas outlet end of the gas tank, and the gas outlet end of the gas valve being connected to the gas inlet hole.

[0016] Preferably, the electron beam welding cooling assembly further comprises a timer, wherein the timer is communicatively connected with the gas valve, and the timer is used for opening or closing the gas valve at a fixed time.

[0017] According to another aspect of the present invention, the present invention also provides a cooling method for an electron beam welding cooling assembly. By implementing the electron beam welding cooling assembly as described above, the cooling method for the electron beam welding cooling assembly comprises:

[0018] S100: placing the cooling tool ring on the outer periphery of the weldment;

[0019] S200: Under the action of the air supply mechanism, the cooling tool cools the weldment.

[0020] Preferably, the cooling method of the electron beam welding cooling assembly S200 specifically includes:

[0021] S201: The timer opens the gas valve at a fixed time, so that the gas storage tank can provide cooling gas to the air cavity of the cooling tooling;

[0022] S202: The cooling tool cools the weldment;

[0023] S203: The timer closes the gas valve at a fixed time, and the gas storage tank stops supplying gas.

[0024] The beneficial effects of the present invention are:

[0025] The present invention provides an electron beam welding cooling assembly, wherein a cooling fixture is arranged around the periphery of the weldment, and an air inlet is provided on the outer ring of the cooling fixture along the circumferential direction of the cooling fixture, and an air outlet is provided on the inner ring of the cooling fixture, and the air outlet faces the weldment, and the cooling fixture has an air cavity, and the air cavity is connected to the air inlet and the air outlet, and an air supply mechanism is connected to the air inlet, and the air supply mechanism is used to provide cooling gas. The air inlet of the cooling fixture is connected to the air supply interface of the air supply mechanism, and the air supply mechanism provides a continuous flow of compressed air to the air cavity of the cooling fixture through the air inlet, and finally sprays it through the air outlet, and the air outlet faces the periphery of the weldment, so that the weldment can be cooled. The stress deformation caused by the thermal stress after welding of semiconductor components is improved, and the fixture can be operated by one person, and the hands of the personnel can be freed during cooling, thereby improving the work efficiency of the personnel and the productivity of semiconductor components.

[0026] The present invention provides a cooling method for an electron beam welding cooling assembly. Through the implementation of the electron beam welding cooling assembly, a cooling tool is placed in a ring around the periphery of the weldment. Under the action of an air supply mechanism, the cooling tool cools the weldment, thereby improving stress deformation caused by thermal stress after welding of semiconductor components. In addition, the tool can be operated by one person, and the operator's hands can be freed during cooling, thereby improving the operator's work efficiency and the productivity of semiconductor components. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 A schematic diagram of the structure of an electron beam welding cooling assembly provided in an embodiment of the present invention;

[0028] Figure 2 A cross-sectional view of an electron beam welding cooling assembly provided by an embodiment of the present invention;

[0029] Figure 3 A schematic diagram of a process flow of an electron beam welding cooling assembly provided by an embodiment of the present invention;

[0030] Figure 4 A flow chart of a cooling method for an electron beam welding cooling assembly provided in an embodiment of the present invention.

[0031] Reference numerals:

[0032] 1. Cooling tooling; 11. Air inlet; 12. Air outlet; 13. Air cavity;

[0033] 2. Gas supply mechanism; 21. Gas storage tank; 22. Gas valve;

[0034] 3. Shell; 31. Top wall; 32. Bottom wall;

[0035] 4. Wind deflector;

[0036] 5. Timer. DETAILED DESCRIPTION

[0037] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0038] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0040] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0041] like Figure 1-Figure 3As shown, in this embodiment, the electron beam welding cooling assembly includes a cooling fixture 1 and an air supply mechanism 2. The cooling fixture 1 is arranged around the periphery of the weldment, and along the circumferential direction of the cooling fixture 1, the outer ring of the cooling fixture 1 is provided with an air inlet 11, and the inner ring of the cooling fixture 1 is provided with an air outlet 12, and the air outlet 12 faces the weldment. The cooling fixture 1 has an air cavity 13, and the air cavity 13 is connected to the air inlet 11 and the air outlet 12. The air supply mechanism 2 is connected to the air inlet 11, and the air supply mechanism 2 is used to provide cooling gas. Specifically, the processing process of the cooling fixture 1 is as follows: a 33mm thick annular cooling fixture 1 is machined using a CNC lathe to ensure a smooth appearance, an outer diameter of 774mm, and an inner diameter of 726mm. Then, a 5mm diameter air outlet 12 and a 10mm diameter air inlet 11 are machined using a four-axis milling machine, and the processing is completed. After the joints of semiconductor parts are welded by electron beam welding, they become welded parts. The cooling tool 1 is placed on the periphery of the welded parts. The air inlet 11 of the cooling tool 1 is connected to the air supply interface of the air supply mechanism 2. The air supply mechanism 2 provides a continuous flow of compressed air to the air cavity 13 of the cooling tool 1 through the air inlet 11, and finally sprays out through the air outlet 12. The air outlet 12 faces the periphery of the welded parts, so that the welded parts can be cooled. The stress deformation caused by the thermal stress after welding of semiconductor parts is improved, and the tool can be operated by one person, and the hands of the personnel can be freed during cooling, thereby improving the work efficiency of the personnel and the productivity of semiconductor parts.

[0042] Further, refer to Figure 1-Figure 2 The cooling fixture 1 includes a shell 3 and an air guide plate 4. The shell 3 has an air cavity 13. The air guide plate 4 is located in the air cavity 13. The shell 3 has a top wall 31 and a bottom wall 32. Along the central axis direction of the shell 3, one end of the air guide plate 4 is fixedly connected to the bottom wall 32, and the other end of the air guide plate 4 is spaced apart from the top wall 31. Specifically, the cooling fixture 1 is made of aluminum material. The air guide plate 4 and the shell 3 are both annular structures, so that the cooling fixture 1 can be arranged around the outer periphery of the welded part along its circumferential direction. There are multiple air outlet holes 12, and multiple air outlet holes 12 are spaced apart along the circumferential direction of the shell 3. Cooling air is introduced from the air inlet 11. Under the action of the air guide plate 4, the cooling air flows rapidly along the outer periphery of the side of the air guide plate 4 close to the air inlet 11. Then, the cooling air flows from the gap between the air guide plate 4 and the top wall 31 to the inner periphery of the side of the air guide plate 4 close to the air outlet 12, and flows along the air guide plate 4 to the air outlet 12 to spray out the cooling air. The air guide plate 4 has a good guiding effect, which can prevent uneven cooling of the periphery of the weldment due to different air outputs between the air outlets 12 of the cooling fixture 1.

[0043] Further, refer to Figure 1-Figure 3The gas supply mechanism 2 includes a gas tank 21 and a gas valve 22. The gas tank 21 has a sealed cavity for containing compressed gas. The gas inlet end of the gas valve 22 is connected to the gas outlet end of the gas tank 21, and the gas outlet end of the gas valve 22 is connected to the gas inlet hole 11. Specifically, the gas tank 21 stores compressed gas in a sealed manner. The switch of the gas valve 22 is used to control whether the compressed gas enters the gas cavity 13 of the cooling fixture 1. When the gas valve 22 is opened, the compressed gas in the gas tank 21 enters the cooling fixture 1 and cools the weldment through the gas outlet hole 12. After the cooling is completed, the gas valve 22 is closed, and the compressed gas in the gas tank 21 stops supplying gas to the cooling fixture 1.

[0044] Further, refer to Figure 3 The electron beam welding cooling assembly also includes a timer 5, which is in communication with the gas valve 22, and is used to time the opening or closing of the gas valve 22. Specifically, the timer 5 can be set with different fixed time periods to control the timing of opening and closing of the gas valve 22. On the premise of ensuring that the weldment is completely cooled, the timer 5 controls the gas valve 22 to close in time, so that the gas storage tank 21 stops supplying gas, thereby avoiding waste of compressed air.

[0045] This embodiment also provides a cooling method for an electron beam welding cooling assembly, such as Figure 4 As shown, through the implementation of the above-mentioned electron beam welding cooling assembly, the cooling method of the electron beam welding cooling assembly includes:

[0046] S100: The cooling tool 1 is placed around the periphery of the weldment.

[0047] After the joints of semiconductor parts are welded by electron beam welding, a welded part is formed. The cooling tool 1 is placed on the periphery of the welded part, and the air inlet 11 of the cooling tool 1 is connected to the air supply interface of the air supply mechanism 2 .

[0048] S200: Under the action of the air supply mechanism 2, the cooling tool 1 cools the weldment.

[0049] S200 specifically includes:

[0050] S201 : the timer 5 opens the gas valve 22 at a fixed time, so that the gas storage tank 21 can provide cooling gas to the air cavity 13 of the cooling tooling 1 .

[0051] When the welded part after electron beam welding needs to be cooled, the timer 5 opens the gas valve 22 at the set time, and the compressed gas in the gas storage tank 21 enters the gas cavity 13 of the cooling tool 1.

[0052] S202: Cooling tool 1 cools the weldment.

[0053] The air storage tank 21 provides a continuous supply of compressed air to the air cavity 13 of the cooling tool 1 through the air inlet 11 , and the air outlet 12 faces the surface of the weldment, and then the weldment is cooled through the air outlet 12 .

[0054] S203: The timer 5 closes the gas valve 22 at a fixed time, and the gas storage tank 21 stops supplying gas.

[0055] Under the premise of ensuring that the weldment is completely cooled, the timer 5 controls the air valve 22 to close in time, so that the air storage tank 21 stops supplying air, thereby avoiding the waste of compressed air.

[0056] The cooling method of the electron beam welding cooling assembly provided in this embodiment, through the implementation of the electron beam welding cooling assembly, the cooling tool 1 is placed in a ring around the outer periphery of the weldment, and under the action of the air supply mechanism 2, the cooling tool 1 cools the weldment, thereby improving the stress deformation caused by the thermal stress after the welding of the semiconductor components. In addition, the tool can be operated by one person, and the operator's hands can be freed during cooling, thereby improving the operator's work efficiency and the productivity of semiconductor components.

[0057] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. An electron beam welding cooling assembly, characterized in that: include: A cooling tool (1), the cooling tool (1) being arranged around the outer circumference of the weldment, an air inlet hole (11) being provided on the outer ring of the cooling tool (1) along the circumferential direction of the cooling tool (1), an air outlet hole (12) being provided on the inner ring of the cooling tool (1), the air outlet hole (12) facing the weldment, the cooling tool (1) having an air cavity (13), the air cavity (13) being connected to the air inlet hole (11) and the air outlet hole (12); An air supply mechanism (2), the air supply mechanism (2) being connected to the air inlet (11), and the air supply mechanism (2) being used to provide cooling gas.

2. The electron beam welding cooling assembly according to claim 1, characterized in that: The cooling tool (1) comprises a shell (3) and an air guide plate (4), the shell (3) having the air cavity (13), the air guide plate (4) being located in the air cavity (13), the shell (3) having a top wall (31) and a bottom wall (32), one end of the air guide plate (4) being fixedly connected to the bottom wall (32) along the central axis direction of the shell (3), and the other end of the air guide plate (4) being spaced apart from the top wall (31).

3. The electron beam welding cooling assembly according to claim 2, characterized in that: The air guide plate (4) is in an annular structure.

4. The electron beam welding cooling assembly according to claim 2, characterized in that: The shell (3) is an annular structure.

5. The electron beam welding cooling assembly according to claim 4, characterized in that: There are a plurality of air outlet holes (12), and the plurality of air outlet holes (12) are arranged at intervals along the circumferential direction of the shell (3).

6. The electron beam welding cooling assembly according to claim 1, characterized in that: The cooling tool (1) is made of aluminum material.

7. The electron beam welding cooling assembly according to claim 1, characterized in that: The gas supply mechanism (2) comprises a gas storage tank (21) and a gas valve (22); the gas storage tank (21) has a sealed cavity, the sealed cavity is used to contain compressed gas, the gas inlet end of the gas valve (22) is connected to the gas outlet end of the gas storage tank (21), and the gas outlet end of the gas valve (22) is connected to the gas inlet hole (11).

8. The electron beam welding cooling assembly according to claim 7, characterized in that: The electron beam welding cooling assembly further comprises a timer (5), wherein the timer (5) is communicatively connected with the gas valve (22), and the timer (5) is used to regularly open or close the gas valve (22).

9. A cooling method for an electron beam welding cooling assembly, characterized in that: By implementing the electron beam welding cooling assembly according to any one of claims 1 to 8, the cooling method of the electron beam welding cooling assembly comprises: S100: placing the cooling tool (1) around the periphery of the weldment; S200: Under the action of the air supply mechanism (2), the cooling tool (1) cools the weldment.

10. The cooling method of the electron beam welding cooling assembly according to claim 9, characterized in that: The gas supply mechanism (2) comprises a gas storage tank (21) and a gas valve (22), the gas storage tank (21) having a sealed cavity, the sealed cavity being used to contain compressed gas, the gas inlet end of the gas valve (22) being connected to the gas outlet end of the gas storage tank (21), the gas outlet end of the gas valve (22) being connected to the gas inlet hole (11), the electron beam welding cooling assembly further comprising a timer (5), the timer (5) being communicatively connected to the gas valve (22), the timer (5) being used to regularly open or close the gas valve (22); The cooling method of the electron beam welding cooling assembly S200 specifically includes: S201: the timer (5) opens the gas valve (22) at a fixed time, so that the gas storage tank (21) can provide cooling gas to the gas cavity (13) of the cooling tool (1); S202: the cooling tool (1) cools the weldment; S203: The timer (5) closes the gas valve (22) at a fixed time, and the gas storage tank (21) stops supplying gas.

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