Fixture Automatic Replacement Storage Bin and Method for a Substrate Detection Device

Abstract

The present invention discloses a jig automatic replacement storage bin and method for a substrate detection device, including a storage rack and an automatic material transfer mechanism. The storage rack is provided with a plurality of storage compartments, and a single jig is placed in each storage compartment; the automatic material transfer mechanism is used to transfer the jig between the storage rack and the detection device body; the automatic material transfer mechanism includes independently driven first and second material transfer racks, and insertion posts matching the jacks on the jig are respectively provided on the first and second material transfer racks, and the insertion posts perform segmented material transfer or feeding of the jig. In the present invention, multiple models of jigs can be stored on the storage rack, and each jig is stored separately; the automatic material transfer mechanism that can be translated and lifted is used to transfer the jig between the storage rack and the detection device body, and the steps of replacing the jig such as taking, storing, and installing can be automatically realized, greatly improving the jig replacement efficiency, without manual participation, and saving labor costs.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate detection, and particularly relates to a jig automatic replacement storage bin and method for a substrate detection device. Background Art

[0002] Before the circuit board leaves the factory, electrical detection such as short circuit and open circuit of the integrated circuit needs to be carried out. During the detection, the substrate is fixed on the positioning mechanism, and the detection jig on the detection device moves above the substrate, and the probes on the detection jig are in contact with the contacts on the substrate for electrical detection. The substrates have various specifications and different sizes, and different types of detection jigs need to be matched.

[0003] At present, the replacement of the jig on the substrate detection device is manually operated. It is necessary to remove the original jig on the detection device and then reinstall the new jig. The whole process is relatively cumbersome, and omissions and errors may occur during the jig switching, affecting the subsequent detection results of the substrate. Summary of the Invention

[0004] In order to solve the above problems, the present invention provides a jig automatic replacement storage bin and method for a substrate detection device, which can automatically replace the jig without manual operation, saving labor costs.

[0005] Therefore, the technical solution of the present invention is: a jig automatic replacement storage bin for a substrate detection device, comprising:

[0006] A storage rack, on which a plurality of storage compartments are provided, and a single jig is placed in each storage compartment;

[0007] An automatic material transfer mechanism for transferring the jig between the storage rack and the detection device body;

[0008] The automatic material transfer mechanism includes independently driven first and second material transfer racks. Plug posts matching the jacks on the jig are respectively provided on the first and second material transfer racks, and the plug posts perform segmented material transfer or feeding of the jig.

[0009] On the basis of the above solution and as a preferred solution of the above solution: the automatic material transfer mechanism is installed on a transverse movement module, and a longitudinal movement module for driving the overall lifting of the first and second material transfer racks is provided on the automatic material transfer mechanism, which can drive the first and second material transfer racks to move to a position opposite to any storage compartment.

[0010] On the basis of the above solution and as a preferred solution of the above solution: independent translation mechanisms are provided on both the first and second material transfer racks, and both can perform independent translation; a lifting mechanism is provided below the plug post, which can drive the plug post to insert into or pull out of the jack.

[0011] On the basis of the above solution and as a preferred solution of the above solution: a first insertion post is provided on the first material transfer rack, a second insertion post is provided on the second material transfer rack, and two rows of front and rear insertion holes are provided on the jig, and there are three position states: the first insertion post is inserted into the front insertion hole alone, the first insertion post is inserted into the rear insertion hole and the second insertion post is inserted into the front insertion hole, and the second insertion post is inserted into the rear insertion hole alone.

[0012] On the basis of the above solution and as a preferred solution of the above solution: a blocking cylinder and a pair of photoelectric sensors are provided at the inlet and outlet of each storage bin. The blocking cylinder is used to limit the jig, and the pair of photoelectric sensors are used to sense the jig; a scanner is provided at the inlet of each storage bin for obtaining the jig model.

[0013] On the basis of the above solution and as a preferred solution of the above solution: it further includes a sheet metal bin body, which is wrapped outside the storage rack and the automatic material transfer mechanism, and a material transfer port for the first material transfer rack and the second material transfer rack to move is provided on the sheet metal bin body.

[0014] Another technical solution of the present invention is: a method for automatically replacing the jig of a substrate detection device, using the above storage bin, including the following steps:

[0015] Place the jigs in the respective storage bins of the storage rack and record the corresponding models of the jigs;

[0016] The automatic material transfer mechanism takes out the jig of the corresponding model from the storage bin and sends the jig to the jig installation position of the detection device body;

[0017] Or,

[0018] The automatic material transfer mechanism first takes out the jig from the detection device body, puts it into the corresponding storage bin, then takes another jig from the storage bin, and then sends the other jig to the jig installation position of the detection device body.

[0019] On the basis of the above solution and as a preferred solution of the above solution: the automatic material transfer mechanism takes the jig from the storage bin or the detection device body, and the steps are as follows:

[0020] The near material transfer rack close to the jig moves below the jig, and the insertion post on the near material transfer rack is inserted into the first insertion hole of the jig nearby and pulls the jig;

[0021] After the near material transfer rack pulls the jig out for half a stroke, the insertion post on the near material transfer rack moves down and disengages from the jig;

[0022] Both the near material transfer rack and the far material transfer rack far from the jig move towards the jig side. The insertion post of the near material transfer rack is inserted into the second insertion hole of the jig, and after the insertion post of the far material transfer rack is inserted into the first insertion hole of the jig, the jig is completely moved onto the automatic material transfer mechanism.

[0023] On the basis of the above scheme and as a preferred scheme of the above scheme: the automatic material transfer mechanism places the jig into the jig installation position of the material storage grid or the detection device body, and the steps are as follows:

[0024] The near material transfer rack and the far material transfer rack send the jig to the material storage grid or the jig installation position of the detection device body;

[0025] After the jig is sent back halfway, the pins on the near material transfer rack and the far material transfer rack move down and detach from the jig;

[0026] The plug post of the remote material transfer rack is moved to the bottom of the second plug hole of the jig and inserted, and the jig is completely pushed into the jig installation position of the material storage grid or the detection device body.

[0027] On the basis of the above solution and as a preferred solution of the above solution: the steps of storing the jig in the storage rack are as follows:

[0028] Put the jig into the material storage grid entrance. After the entrance sensor senses the jig, the entrance blocking cylinder opens and the jig is pushed into the material storage grid.

[0029] After the jig is pushed in, the sensor at the exit of the material storage grid senses the jig, and the blocking cylinder at the entrance is closed, and the jig is stored in the material storage grid;

[0030] When taking out the jig, select the specification of the jig, then the blocking cylinder at the outlet of the corresponding storage grid will open, and the jig will be taken out from the outlet.

[0031] Compared with the prior art, the present invention has the following beneficial effects:

[0032] The jig storage bin of the present invention is arranged on one side of the substrate detection device body, and the storage rack can store multiple types of jigs, and each jig is stored separately; the jig is transferred between the storage rack and the detection device body by using an automatic material transfer mechanism that can be translated and lifted, and the steps of replacing the jig, such as taking, storing, and installing, can be automatically realized, thereby greatly improving the efficiency of jig replacement, eliminating the need for manual intervention, and saving labor costs.

[0033] The present invention utilizes two independently translatable material transfer racks to carry out segmented pick-up and placement of jigs. When taking a jig, the nearby material transfer rack is first used to pull the jig. After half of the jig is pulled out, the two moving racks cooperate to completely move the jig to the automatic material transfer mechanism. At the same time, when placing a jig, the two moving racks cooperate to push the jig to the corresponding equipment. After half of the jig is pushed in, the remaining part of the jig is completely pushed in by a single material transfer rack, so that the displacement of large-sized jigs is achieved with a minimized structure, simplifying the equipment structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a structural schematic diagram of the present invention;

[0035] Figure 2 is the structural side view of the present invention;

[0036] Figure 3 is the structural schematic diagram of the storage rack of the present invention;

[0037] Figure 4 is the structural schematic diagram of the 3-grid storage rack of the present invention;

[0038] Figure 5 is the cooperation schematic diagram of the storage rack and the jig of the present invention;

[0039] Figure 6 is the structural schematic diagram of the automatic material transfer mechanism of the present invention;

[0040] Figure 7 is the structural top view of the automatic material transfer mechanism of the present invention;

[0041] Figure 8 is the schematic diagram of the automatic material transfer mechanism picking and placing the jig on the storage rack of the present invention;

[0042] Figure 9 is the schematic diagram of the automatic material transfer mechanism picking and placing the jig on the detection device body of the present invention.

[0043] In the figure, the markings are: storage rack 1, storage compartment 11, first pair of light sensors 12, first blocking cylinder 13, second pair of light sensors 14, second blocking cylinder 15, scanner 16, automatic material transfer mechanism 2, material transfer assembly 21, longitudinal movement module 22, first material transfer rack 211, second material transfer rack 212, first translation mechanism 213, second translation mechanism 214, first insertion post 215, second insertion post 216, second lifting cylinder 217, jig 3, first insertion hole 31, second insertion hole 32, transverse movement module 4, detection device body 5. Detailed implementation manners

[0044] In the description of the present invention, it should be noted that for orientation terms, if there are terms such as "center", "horizontal (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., the orientation and position relationships indicated are based on the orientation or position relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and should not be construed as limiting the specific protection scope of the present invention.

[0045] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the definition of "first" and "second" features can explicitly or implicitly include one or more of the features. In the description of the present invention, "several" and "a number" mean two or more, unless otherwise clearly and specifically defined.

[0046] See the attached drawings. The jig automatic replacement storage bin of the substrate detection device described in this embodiment includes a sheet metal bin body (not shown in the figure), a material storage rack 1 and an automatic material transfer mechanism 2. The sheet metal bin body is composed of a sheet metal panel, which is covered on the outside of the material storage rack 1 and the automatic material transfer mechanism 2, so that the jig 3 is stored in a dust-free environment; the sheet metal bin body is provided with a material transfer port that is connected to the substrate detection device.

[0047] The material storage rack 1 is provided with a plurality of storage grids 11 distributed in rows and columns, for example, a 9-grid storage rack arranged in 3*3. Each storage grid 11 is an independent fixture storage area, and a fixture 3 can be placed separately. The side of the material storage rack 1 facing away from the automatic material moving mechanism 2 is the entrance, and the side facing the automatic material moving mechanism 2 is the exit. A first matching sensor 12 and a first blocking cylinder 13 are provided at the entrance of each material storage grid 11, and a second matching sensor 14 and a second blocking cylinder 15 are provided at the exit of each material storage grid 11. The first matching sensor 12 and the second matching sensor 14 are used to sense whether the fixture is in place, and the first blocking cylinder 13 and the second blocking cylinder 15 are used to limit the fixture 3. When the fixture 3 is placed or taken, the blocking cylinder on the corresponding side is opened.

[0048] A scanner 16 is provided at the entrance of each material storage grid 11. In the initial state, when the jigs 3 are manually placed, the scanner 16 can scan each jig 3 to identify the jig model.

[0049] The automatic material moving mechanism 2 is arranged between the material storage rack 1 and the detection device body 5, and is used to transfer the jig 3 between the material storage rack 1 and the detection device body 5. The automatic material moving mechanism 2 is installed on the lateral moving module 4, and the lateral moving module 4 can select the existing horizontal linear motion module or other translation track mechanism, so that the automatic material moving mechanism 2 can move horizontally relative to the material storage rack 1, relative to the horizontal position of each material storage grid 11.

[0050] A material moving assembly 21 and a longitudinal moving module 22 for driving the material moving assembly 21 to rise and fall are provided above the automatic material moving mechanism 2. The longitudinal moving module 22 can select an existing vertical linear motion module, or a conventional servo motor can drive the lead screw to rotate through a transmission shaft and a transmission wheel group. Active blocks that cooperate with the lead screw thread are provided at both ends of the material moving assembly. The material moving assembly 21 is driven to rise and fall by rotating the lead screw, which is relative to the height of each storage grid 11 in the longitudinal direction.

[0051] The material transfer assembly 21 includes an independently driven first material transfer rack 211 and a second material transfer rack 212. An independent first translation mechanism 213 is provided on the first material transfer rack 211, which can make the first material transfer rack 211 move horizontally. Similarly, an independent second translation mechanism 214 is provided on the second material transfer rack 212, which can make the second material transfer rack 212 move horizontally. The first material transfer rack 211 is placed below the second material transfer rack 212, and the two can be separated or overlapped and closed.

[0052] One end of the first material transfer rack 211 away from the second material transfer rack 212 is provided with a first insertion post 215, and a first lifting cylinder for driving the first insertion post 215 to move up and down. After the first insertion post 215 is driven to insert upward into the insertion hole of the jig, the jig 3 can be driven to move. At the same time, one end of the second material transfer rack 212 away from the first material transfer rack 211 is provided with a second insertion post 216, and a second lifting cylinder 217 for driving the second insertion post 216 to move up and down. After the second insertion post 216 is driven to insert upward into the insertion hole of the jig 3, the jig can be driven to move.

[0053] On both sides of all the jigs 3, there is a row of insertion holes. Taking the orientation of the jigs placed in the storage grid 11 as the standard, at this time, there is a row of first insertion holes 31 on the side of the jig 3 close to the first material transfer rack 211, and a row of second insertion holes 32 on the far side. The first insertion post 215, the second insertion post 216, the first insertion hole 31, and the second insertion hole 32 have three position states:

[0054] The first state: The first insertion post 215 is inserted into the first insertion hole 31 alone, pulling the jig 3 out of the storage grid 11 by half, or pushing the jig 3 completely into the storage grid 11.

[0055] The second state: The first insertion post 215 is inserted into the second insertion hole 32 and the second insertion post 216 is inserted into the first insertion hole 31, pulling the jig 3 out of the storage grid 11 completely, or sending the jig 3 into the jig installation position of the detection device body 5 and sending it out by half.

[0056] The third state: The second insertion post 216 is inserted into the second insertion hole 32 alone, sending the jig 3 completely into the jig installation position of the detection device body 5, or pulling out half of the jig 3 from the jig installation position of the detection device body 5.

[0057] Specifically, the method for automatically replacing the jig of the substrate detection device includes the following steps:

[0058] In the initial state, the operator sequentially stores the jigs 3 in each storage grid 11 of the storage rack 1 and records the corresponding model of the jigs.

[0059] The steps for storing the jigs on the storage rack are as follows:

[0060] S1.1. Manually place the fixture 3 at the inlet of the storage bin 11. After the first pair of light sensors 12 at the inlet senses the fixture 3, the first blocking cylinder 13 at the inlet opens, and the fixture 3 is pushed into the storage bin 11. At the same time, the scanner 16 at the inlet can scan the fixture to identify the fixture model and store the record for convenient fixture retrieval.

[0061] S1.2. After the fixture 3 is pushed in, when the second pair of light sensors 14 at the outlet of the storage bin 11 senses the fixture 3, the first blocking cylinder 13 at the inlet closes. At this time, both the first blocking cylinder 13 and the second blocking cylinder 15 at the inlet and outlet are in the closed state, so that the fixture 3 is stored in the storage bin 11.

[0062] There are multiple situations during the automatic replacement and installation of the fixture:

[0063] The first situation: When the fixture installation position of the detection device body 5 is empty and the fixture is automatically installed:

[0064] a1. Take out the corresponding type of fixture 3 from the storage bin 11. The specific steps are as follows:

[0065] a1.1. Select the specification of the fixture. The transfer component 21 moves to a position opposite to the corresponding storage bin 11, and the second blocking cylinder 15 at the outlet of the storage bin opens.

[0066] a1.2. At this time, the nearby transfer rack close to the fixture side is the first transfer rack 211. Therefore, the first transfer rack 211 moves below the fixture 3, so that the first insertion post 215 on the first transfer rack 211 can be inserted into the first insertion hole 31 of the fixture 3 nearby. At this time, the first transfer rack 211 retracts, pulling the fixture 3 out of the storage bin 11. Since the fixture 3 is relatively long, the first transfer rack 211 can only pull out half of the fixture.

[0067] a1.3. After the first transfer rack 211 pulls the fixture out for half of the stroke, the first insertion post 215 on the first transfer rack 211 moves downward, so that the first insertion post 215 disengages from the first insertion hole 31 of the fixture.

[0068] a1.4. Both the first transfer rack 211 and the second transfer rack 212 move towards the fixture side. The first insertion post 215 of the first transfer rack 211 moves below and inserts into the second insertion hole 32 of the fixture 3, and the second insertion post 216 of the second transfer rack 212 moves below and inserts into the first insertion hole 31 of the fixture 3.

[0069] a1.5. The first transfer rack 211 and the second transfer rack 212 translate synchronously to take the fixture 3 out of the storage bin 11 and move it completely onto the transfer component 21.

[0070] a2. Send the jig into the jig installation position of the detection device body 5. The specific steps are as follows:

[0071] a2.1. The material transfer component 21 moves to a position opposite to the jig installation position of the detection device body 5.

[0072] a2.2. The first material transfer rack 211 and the second material transfer rack 212 translate synchronously towards the detection device body 5 to send the jig 3 towards the jig installation position.

[0073] a2.3. After the first material transfer rack 211 and the second material transfer rack 212 send the jig 3 back halfway, since the first material transfer rack is relatively far from the detection device body 5 and the stroke is insufficient, the first insertion post 215 and the second insertion post 216 on the first material transfer rack 211 and the second material transfer rack 212 move down simultaneously. The first insertion post 215 leaves the second jack 32, and the second insertion post 216 leaves the first jack 31.

[0074] a2.4. The second material transfer rack 212 moves away from the detection device body 5 so that the second insertion post 216 moves below the second jack 32 and inserts into the second jack 32.

[0075] a2.5. The second material transfer rack 212 moves towards the detection device body 5. After completely pushing the jig 3 into the jig installation position, it disengages from the jig to complete the automatic installation operation of the jig.

[0076] The second case: When there is an old jig in the jig installation position of the detection device body 5 and a new jig needs to be replaced:

[0077] b1. Remove the old jig on the jig installation position. The specific steps are as follows:

[0078] b1.1. At this time, the second material transfer rack 212 is the near material transfer rack close to the old jig. Therefore, the second material transfer rack 212 moves below the jig 3 so that the second insertion post 216 on the second material transfer rack 212 can be inserted into the second jack 32 of the jig 3 nearby. At this time, the second material transfer rack 212 retracts and pulls the jig 3 out of the jig installation position. Since the jig is relatively long, the second material transfer rack 212 can only pull out half of the jig 3.

[0079] b1.2. After the second material transfer rack 212 pulls the jig 3 out halfway, the second insertion post 216 on the second material transfer rack 212 moves down so that the second insertion post 216 disengages from the second jack 32 of the jig.

[0080] b1.3. Both the first material transfer rack 211 and the second material transfer rack 212 move towards the jig 3. The first insertion post 215 of the first material transfer rack 212 moves to be inserted into the second jack 32 of the jig 3, and the second insertion post 216 of the second material transfer rack 212 moves to be inserted into the first jack 31 of the jig 3.

[0081] b1.4. The first material transfer rack 211 and the second material transfer rack 212 are translated synchronously to take out the fixture 3 from the fixture installation position and completely move it onto the material transfer assembly 21.

[0082] b2. Place the removed fixture back into the corresponding storage bin 11. The specific steps are as follows:

[0083] b2.1. The material transfer assembly 21 moves to one side of the storage bin 11 corresponding to the fixture, with their positions opposite, and at this time, the second blocking cylinder 15 at the outlet of the storage bin 11 is opened.

[0084] b2.2. The first material transfer rack 211 and the second material transfer rack 212 are translated synchronously towards the storage bin 11 to send the fixture 3 towards the storage bin 11.

[0085] b2.3. After the first material transfer rack 211 and the second material transfer rack 212 have sent the fixture 3 back halfway, since the second material transfer rack 212 is relatively far from the storage bin 11 and the stroke is insufficient, the first insertion post 215 and the second insertion post 216 on the first material transfer rack 211 and the second material transfer rack 212 move down simultaneously. The first insertion post 215 leaves the second jack 32, and the second insertion post 216 leaves the first jack 31.

[0086] b2.4. The first material transfer rack 211 moves away from the storage bin 11 so that the first insertion post 215 moves below the first jack 31 and inserts into the first jack 31.

[0087] b2.5. The first material transfer rack 211 moves towards the storage bin 11. After completely pushing the fixture 3 into the storage bin 11, the first insertion post 215 disengages from the first jack 31 of the fixture 3, completing the automatic storage operation of the fixture 3. At this time, it has returned to the state where the fixture installation position of the detection device body is empty and in the automatic fixture installation state, and the above steps can be used for the automatic fixture installation operation.

[0088] The above is only the preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions within the idea of the present invention belong to the protection scope of the present invention. It should be noted that for those of ordinary skill in the art in this technical field, several improvements and refinements made without departing from the principle of the present invention should also be regarded as within the protection scope of the present invention.

Claims

1. A fixture automatic replacement storage bin for a substrate inspection device, characterized in that: include: A material storage rack, which is provided with a plurality of material storage grids, each of which is provided with a single fixture; Automatic material transfer mechanism, used to transfer the jig between the material storage rack and the detection device body; The automatic material moving mechanism comprises a first material moving rack and a second material moving rack which are independently driven. The first material moving rack and the second material moving rack are respectively provided with plug-in columns which match the plug-in holes on the jig. The plug-in columns perform segmented material moving or feeding on the jig. The first material moving rack is provided with a first plug pin, the second material moving rack is provided with a second plug pin, and the fixture is provided with two rows of front and rear sockets, and there are three position states: the first plug pin is inserted into the front socket alone, the first plug pin is inserted into the rear socket and the second plug pin is inserted into the front socket, and the second plug pin is inserted into the rear socket alone.

2. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: The automatic material moving mechanism is installed on the transverse moving module, and the automatic material moving mechanism is provided with a longitudinal moving module that drives the first material moving rack and the second material moving rack to rise and fall as a whole, and can drive the first material moving rack and the second material moving rack to move to a position opposite to any material storage grid.

3. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: The first material moving rack and the second material moving rack are both provided with independent translation mechanisms, and both can be independently translated; a lifting mechanism is provided under the plug post, which can drive the plug post to be inserted into the plug hole or pulled out from the plug hole.

4. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: A blocking cylinder and a beam sensor are provided at the inlet and outlet of each material storage grid. The blocking cylinder is used to limit the position of the fixture, and the beam sensor is used to sense the fixture. A scanner is provided at the inlet of each material storage grid to obtain the fixture model.

5. The automatic fixture replacement storage bin of a substrate inspection device according to claim 1, characterized in that: It also includes a sheet metal warehouse body, which covers the outer side of the material storage rack and the automatic material moving mechanism, and is provided with a material moving opening for the first material moving rack and the second material moving rack to move.

6. A method for automatically replacing a fixture of a substrate inspection device, characterized in that: Using the storage bin according to any one of claims 1 to 5 comprises the following steps: Store the jigs in the storage compartments of the storage rack and record the corresponding models of the jigs; The automatic material transfer mechanism takes out the jig of the corresponding model from the material storage grid and sends the jig to the jig installation position of the detection device body; or, The automatic material transfer mechanism first removes the jig from the detection device body, puts it into the corresponding material storage grid, then takes another jig from the material storage grid, and then sends the other jig to the jig installation position of the detection device body.

7. The automatic fixture replacement method of a substrate inspection device according to claim 6, characterized in that: The automatic material transfer mechanism takes the jig from the material storage grid or the detection device body, and the steps are as follows: The near material moving rack close to one side of the jig is moved to the bottom of the jig, the plug post on the near material moving rack is inserted into the first plug hole of the jig, and the jig is pulled out; After the near material moving rack pulls the fixture out halfway, the plug post on the near material moving rack moves down and detaches from the fixture; The near material moving rack and the far material moving rack far away from the jig both move toward one side of the jig, the plug post of the near material moving rack is inserted into the second plug hole of the jig, and the plug post of the far material moving rack is inserted into the first plug hole of the jig, and then the jig is completely moved to the automatic material moving mechanism.

8. The method for automatically replacing a jig of a substrate inspection device according to claim 6, characterized in that: The automatic material transfer mechanism places the jig into the material storage grid or the jig installation position of the detection device body, and the steps are as follows: The near material transfer rack and the far material transfer rack send the jig to the material storage grid or the jig installation position of the detection device body; After the jig is sent back halfway, the pins on the near material transfer rack and the far material transfer rack move down and detach from the jig; The plug post of the remote material transfer rack is moved to the bottom of the second plug hole of the jig and inserted, and the jig is completely pushed into the jig installation position of the material storage grid or the detection device body.

9. The method for automatically replacing a jig of a substrate inspection device according to claim 6, characterized in that: To store the jig in the storage rack, follow these steps: Put the jig into the material storage grid entrance. After the entrance sensor senses the jig, the entrance blocking cylinder opens and the jig is pushed into the material storage grid. After the jig is pushed in, the sensor at the exit of the material storage grid senses the jig, and the blocking cylinder at the entrance is closed, and the jig is stored in the material storage grid; When taking out the jig, select the specification of the jig, then the blocking cylinder at the outlet of the corresponding storage grid will open, and the jig will be taken out from the outlet.

Images