Conveying device and conveying method

Abstract

The invention provides a conveying device capable of safely and efficiently conveying a cryopump. A conveyance device (10) is provided with: a carriage (12) having front wheels (26) and rear wheels (28); a mast (14) extending in the height direction from the front side of the carriage (12); a lifting part (16) supported by the mast (14) and having a variable height; a guide rail (18) that extends forward from the lifting unit (16); an arm part (20) supported by the guide rail (18) and capable of sliding in the front-back direction; a loading table (22) that is provided to the tip (46) of the arm (20) and holds the cryopump (70); and a counterweight (24) provided on the rear side of the carriage (12).

Description

[0001] This application claims priority based on Japanese Patent Application No. 2023-179649 filed on October 18, 2023. The entire contents of the Japanese Patent Application are incorporated herein by reference. Technical Field

[0002] The present invention relates to a transport device and a transport method for transporting a cryogenic pump. Background Art

[0003] Cryopumps are used in vacuum processing devices that require high vacuum to provide high vacuum in a vacuum container. An example of a vacuum processing device is a semiconductor manufacturing device for processing semiconductor wafers. For example, a cryopump is installed on the side wall of a vacuum processing chamber in which semiconductor wafers are processed.

[0004] Patent Document 1: Japanese Patent Publication No. 2022-83523

[0005] In recent years, along with the increase in the size of semiconductor wafers, the vacuum processing chambers that accommodate semiconductor wafers have also tended to be larger. Since various equipment for processing semiconductor wafers is arranged around the vacuum processing chamber, the space available for installing the cryopump is limited, for example, it is sometimes installed at a high place on the upper part of the vacuum processing chamber. In addition, as the vacuum processing chamber becomes larger, a large cryopump with higher exhaust performance is sometimes used. In the case of installing a large and heavy cryopump at a high place, it is not easy to safely and efficiently perform the operation of loading and unloading the cryopump for maintenance. For example, it takes a lot of labor to assemble temporary scaffolding using the limited space around the vacuum processing chamber. In addition, if the maintenance operation time is prolonged by assembling the scaffolding, the stop time of the semiconductor manufacturing equipment will be prolonged, thus resulting in reduced productivity. Summary of the invention

[0006] One of the exemplary purposes of one embodiment of the present invention is to provide a technique for safely and efficiently transporting a cryopump.

[0007] One embodiment of the present invention is a transport device for transporting a cryopump. The transport device comprises: a trolley having front wheels and rear wheels; a mast extending from the front side of the trolley in the height direction; a lifting part supported by the mast and having a variable height; a guide rail extending forward from the lifting part; an arm supported by the guide rail and capable of sliding in the front-rear direction; a loading platform provided at the front end of the arm and holding the cryopump; and a counterweight provided at the rear side of the trolley.

[0008] Another embodiment of the present invention is a method for transporting a cryopump using the transport device of one embodiment. The transport method includes the following steps: keeping the cryopump on a cargo platform; moving the trolley; changing the height of the lifting part; sliding the arm; and removing the cryopump from the cargo platform.

[0009] Furthermore, any combination of the above-mentioned constituent elements or embodiments in which constituent elements or expressions of the present invention are mutually replaced in the form of methods, apparatuses, systems, etc. may also be practiced as additional embodiments of the present invention.

[0010] According to one embodiment of the present invention, a cryopump can be transported safely and efficiently. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a side view schematically showing the structure of the transport device according to the embodiment.

[0012] Figure 2 It is a plan view schematically showing the structure of the transport device according to the embodiment.

[0013] Figure 3 It is a front view schematically showing the structure of the cargo bed.

[0014] Figure 4 It is a side view schematically showing a configuration example of a vacuum processing apparatus.

[0015] Figure 5 It is a plan view schematically showing the process of attaching and detaching the cryopump to and from the vacuum processing chamber.

[0016] Figure 6 This is a flowchart showing an example of the conveying method according to the embodiment.

[0017] In the figure: 10-transportation device, 12-trolley, 14-mast, 16-lifting part, 18-guide rail, 20-arm, 22-cargo platform, 24-counterweight, 26-front wheel, 28-rear wheel, 60-fixing device, 70-cryogenic pump. DETAILED DESCRIPTION

[0018] The following is a detailed description of the embodiments of the present invention. In addition, the structures described below are illustrative and do not limit the scope of the present invention in any way. In addition, in the description of the drawings, the same elements are marked with the same symbols, and repeated descriptions are appropriately omitted. In addition, in the drawings referenced in the following description, the size and thickness of each component are appropriately set for the convenience of description, which does not necessarily represent the actual size and ratio.

[0019] Figure 1 It is a side view schematically showing the structure of the transport device 10 according to the embodiment. Figure 2 1 is a top view schematically showing the structure of a transport device 10 according to an embodiment. The transport device 10 is used to transport Figure 1 A cryopump 70 is shown. Figure 2 : shows a state where the cryopump 70 is removed.

[0020] The cryopump 70 includes a cryopanel container 72, a connection container 74, and a refrigerator 76. The cryopanel container 72 is a portion that accommodates a cryopanel cooled to an ultra-low temperature (e.g., 10K to 20K), and is a portion that is mounted on a vacuum processing device via a flange 78. The cryopanel container 72 is a cylindrical vacuum container. The connection container 74 is a vacuum container that is provided at a side of the cryopanel container 72 and connects the cryopanel container 72 and the refrigerator 76. The refrigerator 76 cools the cryopanel provided inside the cryopanel container 72 via the connection container 74.

[0021] The weight of the cryopump 70 depends on the size and performance, but is, for example, about 20 kg to 100 kg. Therefore, it is not preferable for a person to move or raise and lower the cryopump 70 by directly holding it with their hands from the viewpoint of safety and efficiency.

[0022] The transport device 10 is a device for moving and lifting a heavy object (i.e., a cryopump 70), i.e., a so-called power lift. The transport device 10 is configured, for example, to hold a cryopanel container 72 of the cryopump 70. The transport device 10 includes a carriage 12, a mast 14, a lifting unit 16, a guide rail 18, an arm 20, a loading platform 22, and a counterweight 24.

[0023] The vehicle 12 includes front wheels 26 and rear wheels 28 for traveling on the ground G. In the present embodiment, the direction A from the rear wheels 28 toward the front wheels 26 is sometimes referred to as the front, and the direction B from the front wheels 26 toward the rear wheels 28 is sometimes referred to as the rear. The height direction H is a direction perpendicular to the ground G on which the vehicle 12 travels.

[0024] The mast 14 is provided at the front side of the carriage 12. A lifting handle 30 for moving the lifting unit 16 in the height direction H along the mast 14 is provided at the front side of the carriage 12. Here, the front side of the carriage 12 refers to a position closer to the front wheels 26 than the rear wheels 28. If the lifting handle 30 is manually operated, the height of the lifting unit 16 can be adjusted.

[0025] A steering handle 32 for operating the direction of the rear wheel 28 is provided on the rear side of the trolley 12. The rear wheel 28 is moved by operating the steering handle 32, and the direction of the trolley 12 can be changed, for example, with the front wheel 26 as the center. A counterweight 24 is provided on the rear side of the trolley 12. The weight of the counterweight 24 is, for example, greater than 200 kg and less than 1000 kg, for example, greater than 300 kg and less than 800 kg. The counterweight 24 is arranged between the front wheel 26 and the rear wheel 28, and is provided at a position close to the rear wheel 28 (that is, a position away from the front wheel 26). Here, the rear side of the trolley 12 refers to a position closer to the rear wheel 28 than the front wheel 26.

[0026] The mast 14 is supported by the trolley 12 and extends from the trolley 12 in the height direction H. Figure 2 As shown, a pair of masts 14 can be provided on the left and right sides of the trolley 12. The mast 14 can also be configured to be able to slide in the front-to-back direction relative to the trolley 12. The mast 14 can be configured to be able to adjust the position in the front-to-back direction between the front end of the trolley 12 (for example, the position of the front wheel 26) and the vicinity of the center of the trolley 12, or can be configured to be able to fix the position in the front-to-back direction by a brake (not shown). The height of the mast 14 (for example, the height h from the ground G) is, for example, greater than 2m and less than 3m, for example, about 2.5m.

[0027] The lifting unit 16 is supported by the mast 14 and is movable in the height direction H along the mast 14 to change its height. The lifting unit 16 is, for example, raised and lowered by a hydraulic pump (not shown) operated by manually operating a lifting handle 30. The lifting unit 16 may also be raised and lowered by an electric hydraulic pump or an electric motor.

[0028] The guide rail 18 is supported by the lifting part 16 and extends straight forward from the lifting part 16. The guide rail 18 supports the arm part 20 so that the arm part 20 can slide in the front-rear direction. The length L0 of the guide rail 18 in the front-rear direction (refer to Figure 2 ) is, for example, 0.5 m to 1.5 m, for example, 0.7 m to 1.0 m. The end of the guide rail 18 is fixed to the lifting part 16. If the height of the lifting part 16 is changed, the height h2 of the guide rail 18 will also change.

[0029] Regarding the guide rail 18, for example, the entire guide rail 18 may be located further forward than the front wheel 26. As a result, there is no structure in contact with the ground G for supporting the transport device 10 between the ground G and the guide rail 18, and a freely usable space S is formed. The height h2 of the guide rail 18 can be adjusted in a range of, for example, 0.2 m to 2.5 m according to the height of the lifting unit 16.

[0030] The arm 20 is supported by the guide rail 18 and is slidable in the front-rear direction along the guide rail 18. The arm 20 may be a multi-jointed arm. Figure 1 and Figure 2 In the example shown, the arm 20 includes a first arm member 34, a second arm member 36, and a third arm member 38. The first arm member 34 and the second arm member 36 are rotatably connected together via a first joint 40. The second arm member 36 and the third arm member 38 are rotatably connected together via a second joint 42. The arm 20 may include two arm members or may include four or more arm members. The arm 20 may also be a structure without joints.

[0031] The first arm member 34 is a portion supported by the guide rail 18. The length L1 of the first arm member 34 is, for example, not less than 0.5 m and not more than 1.5 m, and, for example, not less than 0.7 m and not more than 1.0 m. The length L1 of the first arm member 34 is, for example, the same as the length L0 of the guide rail 18. Thus, almost the entire first arm member 34 can be accommodated inside the guide rail 18, so that the distance from the lifting part 16 to the front end of the first arm member 34 (for example, the first joint 40) can be made the same as the length L0 of the guide rail 18. Furthermore, almost the entire first arm member 34 can be pulled out to the outside of the guide rail 18, so that the distance from the lifting part 16 to the front end of the first arm member 34 (for example, the first joint 40) can be made about twice the length L0 of the guide rail 18. The position of the first arm member 34 relative to the guide rail 18 can be fixed using the fixing pin 44.

[0032] The second arm member 36 is mounted on the front end portion of the first arm member 34. The length L2 of the second arm member 36 is, for example, shorter than the length L1 of the first arm member 34. The length L2 of the second arm member 36 is, for example, greater than 0.2 m and less than 1.0 m, for example, greater than 0.3 m and less than 0.7 m. The second arm member 36 is configured to be mounted on the first arm member 34 via the first joint 40 so as to be rotatable relative to the first arm member 34. The first joint 40 is configured to be rotatable around an axis extending in the height direction. Thus, the second arm member 36 can rotate in the left-right direction relative to the front end portion of the first arm member 34.

[0033] The third arm member 38 is mounted on the front end portion of the second arm member 36. The length L3 of the third arm member 38 is, for example, shorter than the length L2 of the second arm member 36. The length L3 of the third arm member 38 is, for example, greater than 0.1 m and less than 0.7 m, for example, greater than 0.2 m and less than 0.5 m. The third arm member 38 is configured to be mounted on the second arm member 36 via the second joint 42 so as to be rotatable relative to the second arm member 36. The second joint 42 is configured to be rotatable around an axis extending in the height direction. Thus, the third arm member 38 can rotate in the left-right direction relative to the front end portion of the second arm member 36.

[0034] The first joint 40 may include a sliding spacer disposed between the first arm member 34 and the second arm member 36 and used to make the second arm member 36 rotate smoothly relative to the first arm member 34. Similarly, the second joint 42 may include a sliding spacer disposed between the second arm member 36 and the third arm member 38 and used to make the third arm member 38 rotate smoothly relative to the second arm member 36. That is, the sliding spacer may be provided between the two arm members connected by the joint. As the sliding spacer, for example, a resin spacer made of fluororesin or the like may be used.

[0035] The cargo platform 22 is configured to be provided at the front end portion 46 of the arm 20 (for example, the front end portion of the third arm member 38) and to hold the cryopump 70. The cargo platform 22 is fixed to the front end portion 46 in a manner that does not rotate relative to the front end portion 46 of the arm 20, for example. The cargo platform 22 may also be rotatably mounted to the front end portion 46 of the arm 20 via a joint or the like. The cargo platform 22 may rotate relative to the front end portion 46 of the arm 20 around an axis in the height direction H, or around an axis in the horizontal direction (for example, the front-rear direction).

[0036] Figure 3 1 is a front view schematically showing the structure of the cargo platform 22, and is a view when viewed from the direction (front-rear direction) in which the front end portion 46 of the arm portion 20 extends. The cargo platform 22 has a concave inner surface 48, and the concave inner surface 48 is used to receive the side surface of the cylindrical cryopanel container 72. A protective member 50 may be provided at a portion of the inner surface 48 of the cargo platform 22 that can contact the cryopump 70. The protective member 50 is made of a resin plate such as fluororesin, for example.

[0037] A gripping handle 54 is provided on the outer surface 52 of the cargo platform 22 for the user to grip in order to adjust the position or direction of the cargo platform 22. For example, a pair of gripping handles 54 may be provided on the left and right sides of the cargo platform 22. A through hole 56 is provided between the outer surface 52 of the cargo platform 22 and the gripping handle 54. For example, a fixing device 60 such as a fastening belt for fixing the cryopump 70 to the cargo platform 22 may be passed through the through hole 56 (see Figure 1 In this case, the grip handle 54 can function as a locking portion for locking the fixing device 60. In addition, a notch can be provided instead of the through hole 56.

[0038] The transport device 10 may also include an outrigger (not shown) that can extend to the side of the trolley 12. The outrigger may be arranged to extend to the side from the front of the trolley 12 (e.g., a position near the front wheel 26). The outrigger may also be arranged to extend to the side from the mast 14. The outrigger is, for example, configured to be stored when the trolley 12 is moving, and to extend and contact the ground G to support the trolley 12 when the trolley 12 is stopped and the arm 20 is operated. The outrigger can reduce the risk of the transport device 10 tipping over in the left or right direction.

[0039] The transport device 10 can hold the cryopump 70 at a position away from the trolley 12 and the mast 14 in the forward direction by means of the guide rail 18 and the arm 20 extending forward from the lifting part 16. When the arm 20 is pulled out to the maximum from the guide rail 18, the distance from the mast 14 to the cargo platform 22 is, for example, greater than 1.5 m and less than 5 m, for example, greater than 2 m and less than 4 m. The transport device 10 slides the arm 20 relative to the guide rail 18, thereby adjusting the position of the cargo platform 22 in the front-to-back direction. The transport device 10 rotates the first joint 40 and the second joint 42, thereby adjusting the position of the cargo platform 22 in the left-right direction and the direction of the cargo platform 22 relative to the guide rail 18. The transport device 10 changes the height of the lifting part 16, thereby adjusting the height position of the cargo platform 22.

[0040] Next, a method of using the transport device 10 will be described. The transport device 10 can be used, for example, to transport the cryopump 70 to be removed from or installed in a vacuum processing apparatus. An example of a vacuum processing apparatus is an ion implantation apparatus for irradiating a semiconductor wafer with an ion beam.

[0041] Figure 4 It is a side view schematically showing a configuration example of the vacuum processing apparatus 100 . Figure 4 The vacuum processing apparatus 100 shown is an ion implantation apparatus and includes an ion beam generating apparatus 110 , a vacuum processing chamber 112 , a wafer conveying apparatus 114 , a loading port 116 , and an outer shell 118 .

[0042] The ion beam generating device 110 generates an ion beam and transports the generated ion beam to the vacuum processing chamber 112 along the beam line 120. The vacuum processing chamber 112 is a vacuum container that maintains a high vacuum, and an ion implantation process of irradiating the wafer W with an ion beam is performed inside the vacuum processing chamber 112. A cryopump 70 is installed on the side wall of the vacuum processing chamber 112. The wafer conveying device 114 conveys the wafer W along the conveying line 122 between the vacuum processing chamber 112 and the loading port 116. The loading port 116 receives a container (for example, FOUP) for storing the wafer W. The outer shell 118 is provided on the periphery of the ion beam generating device 110, the vacuum processing chamber 112, and the wafer conveying device 114, and surrounds them. The outer shell 118 is provided with a radiation shielding material such as lead for shielding the radiation generated near the beam line 120.

[0043] In the vacuum processing apparatus 100, the height h3 of the beam line 120 and the conveying line 122 related to the processing of the wafer W is usually set to about 1m to 1.5m in consideration of the convenience of the user. At this time, various devices constituting the ion beam generating device 110 or the wafer conveying device 114 adjacent to the vacuum processing chamber 112 occupy a height position of about 1m to 1.5m. As a result, there is almost no remaining space at a height of about 1m to 1.5m where operations are easy to perform, and the cryopump 70 is usually installed in the upper part of the vacuum processing chamber 112 where the space is relatively ample. The height h4 at which the cryopump 70 is set is, for example, about 2m to 2.5m. The transport device 10 facilitates the transport of the cryopump 70 set at such a high place.

[0044] Figure 5 1 is a top view schematically showing the process of attaching and detaching the cryopump 70 to and from the vacuum processing chamber 112, and is viewed from above. Figure 4 The vacuum processing apparatus 100 shown. First, the door 124 constituting a part of the outer shell 118 is opened to ensure a work port 126 for entering the inner side of the outer shell 118. Next, the transport device 10 is moved to the vicinity of the work port 126, and the arm 20 and the guide rail 18 are inserted into the inner side of the outer shell 118 through the work port 126. There is a rail 128 for supporting the door 124 at the bottom of the work port 126, so it is difficult for the trolley 12 to enter the inner side of the outer shell 118. Next, the position and direction of the arm 20 are adjusted, and the cargo platform 22 is arranged directly below the cryopump 70 (for example, the cryopanel container 72).

[0045] exist Figure 5 In the example shown, the cryopump 70 located directly above the wafer conveyor 114 is to be disassembled. Figure 4 As shown, the space 130 between the wafer conveyor 114 and the cryopump 70 is narrow, and there may be only a gap of, for example, less than 1 m or less than 0.5 m. In addition, since the wafer conveyor 114 is located directly below the cryopump 70, it is difficult to assemble the scaffolding directly below the cryopump 70. If the height of the lifting portion 16 is adjusted by the transport device 10 and the arm 20 is slid and extended from the guide rail 18, the cargo platform 22 can be arranged in such a confined space 130. There is a freely usable space S below the guide rail 18 (see Figure 1 ), so the trolley 12 can be brought close to the working port 126, and the cargo platform 22 can be inserted to a position away from the working port 126.

[0046] Next, the cryopump 70 is removed from the vacuum processing chamber 112, and the removed cryopump 70 is held by the cargo stage 22. The cryopump 70 can be firmly fixed to the cargo stage 22 using a fixing device 60 such as a tightening band. Alternatively, the cryopump 70 can be fixed to the cargo stage 22 before the cryopump 70 is removed from the vacuum processing chamber 112. In this case, the cryopump 70 can be removed from the vacuum processing chamber 112 while being fixed to the cargo stage 22.

[0047] Next, by adjusting the position and direction of the arm 20, the cryopump 70 can be carried inside the outer shell 118. For example, by storing the arm 20 inside the guide rail 18, the cargo platform 22 can be brought close to the trolley 12. Thereafter, by moving the trolley 12 backward, the arm 20 can be pulled out through the work opening 126, thereby carrying the cryopump 70 outside the outer shell 118. By lowering the height of the lifting unit 16 outside the outer shell 118, the height of the cargo platform 22 can be lowered, so that the cryopump 70 can be safely unloaded from the cargo platform 22.

[0048] In addition, when installing the cryopump 70 in the vacuum processing chamber 112, the reverse procedure of the above-mentioned removal of the cryopump 70 can be used. The cryopump 70 can be held by the cargo platform 22 outside the outer shell 118, and the cryopump 70 can be transported to the inner side of the outer shell 118 by the transport device 10, and the cryopump 70 can be removed from the cargo platform 22, and then installed in the vacuum processing chamber 112.

[0049] Figure 6 1 is a flowchart showing an example of a transport method according to an embodiment. The transport method using the transport device 10 includes: a step (S10) of holding the cryopump 70 on the cargo platform 22; a step (S12) of moving the trolley 12; a step (S14) of changing the height of the lifting part 16; a step (S16) of sliding the arm 20; and a step (S18) of removing the cryopump 70 from the cargo platform 22. The order of the moving step (S12), the height changing step (S14), and the sliding step (S16) is not particularly limited, and these steps may be performed in different orders, or may be performed multiple times in any order.

[0050] When the arm 20 is a multi-joint arm, the transport method may further include the step of rotating a joint (e.g., the first joint 40 or the second joint 42) to adjust the position and direction of the cargo platform 22. The step of rotating the joint may be performed any number of times at any time between step S10 and step S18.

[0051] In the above embodiment, the case where the transport device 10 is used to transport the cryopump 70 provided in the vacuum processing chamber of the ion implantation apparatus is described. The transport device 10 can be used to transport a cryopump provided outside the vacuum processing chamber, and can also be used to transport a cryopump provided on the ion beam generating device 110 or the wafer conveying device 114. The transport device 10 can also be used to transport a cryopump provided on any vacuum processing apparatus other than the ion implantation apparatus. The transport device 10 can be used to transport any equipment other than the cryopump, and can also be used to transport any equipment constituting the vacuum processing apparatus.

[0052] The present invention is described above by way of embodiments. The present invention is not limited to the above embodiments, and those skilled in the art should understand that the present invention can be subjected to various design changes and various modifications, and such modifications are also within the scope of the present invention.

Claims

1. A transport device for transporting a cryopump, characterized in that: have: A trolley having front wheels and rear wheels; a mast extending from the front side of the trolley in a height direction; A lifting part, supported by the mast and having a variable height; A guide rail extending forward from the lifting portion; an arm portion supported by the guide rail and capable of sliding in a front-rear direction; a cargo platform disposed at the front end of the arm and holding the cryopump; and A counterweight is arranged on the rear side of the trolley.

2. The transport device according to claim 1, characterized in that: The arm is a multi-joint arm.

3. The transport device according to claim 2, characterized in that: The arm portion includes a sliding pad provided between two arm members connected by a joint.

4. The transport device according to claim 1, characterized in that: The cargo platform is rotatable relative to the front end portion of the arm.

5. The transport device according to claim 1, characterized in that: The cargo platform includes a locking portion that locks a fixing tool for fixing the cryopump to the cargo platform.

6. The transport device according to claim 1, characterized in that: The loading platform has a concave shape for receiving a side surface of a cylindrical vacuum container included in the cryopump.

7. The transport device according to claim 1, characterized in that: The guide rail may be arranged at a position further forward than the front wheel.

8. The transport device according to claim 1, characterized in that: The vehicle further includes an outrigger that can extend laterally from the vehicle.

9. A method for transporting a cryopump using the transport device according to any one of claims 1 to 8, characterized in that: Including the following processes: maintaining the cryogenic pump on the cargo platform; Making the trolley move; Changing the height of the lifting part; sliding the arm; and The cryopump is unloaded from the cargo platform.

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