Lifting device and crystal ingot feeding and discharging machining system

Abstract

The invention provides a lifting device and a crystal ingot feeding and discharging machining system, belongs to the technical field of crystal ingot conveying, and solves the problem that the tightness of a crystal ingot conveying belt cannot be detected in time in the prior art. The lifting device comprises a base plate, a conveying mechanism and a first sensor. Wherein the conveying mechanism comprises a plurality of conveying wheels and a driving part, the conveying wheels are arranged on the base plate respectively, the conveying wheels are used for conveying the conveying belt, the conveying wheels have the moving freedom degree of radial movement, the conveying wheels can move in the radial direction under the pressing effect of the conveying belt, and the driving part acts on the conveying wheels to drive the conveying wheels to rotate and convey the conveying belt. The first sensor is a distance sensor, the distance sensor is provided with a detection end, and the detection end is arranged on the conveying wheel or the moving path of the conveying wheel to detect the moving distance of the conveying wheel. The distance sensor is used for detecting the position change of the conveying wheel, the moving distance of the conveying wheel can be calculated, and therefore the tightness degree of the conveying belt can be monitored in real time with high precision.

Description

Technical Field

[0001] The present application belongs to the technical field of ingot conveying, and specifically, relates to a lifting device and an ingot loading and unloading processing system. Background Art

[0002] The transportation of ingot carriers is a routine step in the semiconductor processing industry, and an automated material handling system is generally used. Overhead cranes are the core part of the handling system, and are used for direct transportation of ingot carriers from process machine to process machine, from process machine to buffer area, from buffer area to process machine, and even for cross-area transportation. Overhead cranes are deployed on aerial tracks, and process machines are installed on the ground, so the overhead crane needs to descend to grab the ingot carrier of the process machine, and then rise to the inside of the overhead crane for transportation. Therefore, the lifting device is an important component of the overhead crane, and the ingot carrier is generally driven by multiple sets of conveyor belts.

[0003] However, after the existing lifting device has been used for a period of time, its conveyor belt tends to become loose, and the tightness of each conveyor belt is inconsistent, which reduces the synchronization rate of the conveying and lifting, and easily leads to the ingot carrier's docking accuracy and failure. At present, the tightness of the conveyor belt is generally determined by the operator's naked eye observation of the ingot carrier's tilt. The detection accuracy is low, it is easy to make misjudgments, and it is not easy to stop the machine in time for adjustment. In addition, when the ingot carrier encounters an obstacle during the lifting process, it will shake or tilt, and the overhead crane lacks perception, which affects the smooth transportation of the ingot.

[0004] Based on the above content, the technical problem of the present application is that the conveyor belt tightness detection accuracy of the existing lifting device is low. Summary of the invention

[0005] The purpose of this application is to address the above-mentioned problems existing in the prior art and to propose a lifting device and a crystal ingot loading and unloading processing system, which solves the problem of low accuracy in detecting the tightness of the conveyor belt of the lifting device in the prior art and improves the accuracy in detecting the tightness of the conveyor belt of the lifting device.

[0006] The objective of the present application can be achieved through the following technical solutions: a lifting device, comprising: a base plate; a conveying mechanism, the conveying mechanism comprising: a conveying wheel, the conveying wheel being multiple and respectively arranged on the base plate, the conveying wheel being used to convey a conveyor belt, the conveying wheel having radial freedom of movement, and the conveying wheel being able to move radially by the pressure of the conveyor belt; a driving member, the driving member acting on the conveying wheel to drive the conveying wheel to rotate and convey the conveyor belt; and a first sensor, the first sensor being a distance sensor, the distance sensor having a detection end, the detection end being arranged on the conveying wheel or on the moving path of the conveying wheel to detect the moving distance of the conveying wheel.

[0007] In the above-mentioned lifting device, a mounting seat is provided on the base plate, and a guide hole is opened in the mounting seat. The rotation center of the conveying wheel is connected to a rotating shaft, and the rotating shaft is at least partially located in the guide hole, and the rotating shaft has the freedom of movement radially in the guide hole; the detection end acts on the rotating shaft to detect the moving distance of the rotating shaft.

[0008] In the above-mentioned lifting device, the inner wall of the guide hole includes an upper hole wall, a lower hole wall and two side hole walls, the gap between the two side hole walls is larger than the outer diameter of the rotating shaft, and the upper hole wall and the lower hole wall are at least coupled with the outer ring portion of the rotating shaft to limit the vertical movement of the rotating shaft.

[0009] In the above-mentioned lifting device, the rotating shaft includes: a first shaft body, the first shaft body is fixedly connected to the conveying wheel; a second shaft body, the second shaft body is axially connected to the first shaft body, the second shaft body and the first shaft body have a relative rotational freedom, the upper surface of the outer ring of the second shaft body is coupled to the upper hole wall, and the lower surface of the outer ring of the second shaft body is coupled to the lower hole wall.

[0010] The lifting device further comprises an elastic reset member, which is arranged on the mounting seat and is connected to the second shaft in a radial direction so that the second shaft always has a tendency to move in the radial direction.

[0011] In the above-mentioned lifting device, the conveying mechanism also includes a rotating wheel, and the rotating wheel includes: a first wheel body, the first wheel body is arranged on the base plate, the first wheel body is provided with a first cavity, and the first cavity is used to store the conveyor belt; a second wheel body, the second wheel body is coaxially connected to the first wheel body, and the second wheel body is provided with a second cavity, and the second cavity is used to store the conveyor belt; wherein, two conveying wheels are provided on the side of the first wheel body away from the second wheel body to convert the conveying direction of the conveyor belt, and one conveying wheel is provided on the side of the second wheel body away from the first wheel body, and the first wheel body and the second wheel body can be respectively connected to different conveying wheels through the conveyor belt.

[0012] In the above-mentioned lifting device, the conveying mechanism has multiple groups, and the rotating wheels of adjacent conveying mechanisms are coaxially connected through a rotating shaft. The driving member acts on the rotating shaft to drive the adjacent conveying mechanisms to synchronously convey the conveyor belts.

[0013] In the above-mentioned lifting device, there are a plurality of first sensors, and they act on a plurality of the conveying wheels respectively. The first sensor is electrically connected or communicatively connected to the driving member.

[0014] Another object of the present application is to provide a crystal ingot loading and unloading processing system, comprising: a ceiling rail; an overhead crane, wherein the overhead crane is multiple and respectively arranged on the ceiling rail, the overhead crane comprising: the lifting device as described above, the lifting device being slidably arranged on the ceiling rail; a clamping device, the clamping device being connected to the lifting device through a conveyor belt, the clamping device being used to clamp the crystal ingot; crystal ingot loading and unloading equipment, the crystal ingot loading and unloading equipment being arranged below the ceiling rail, the crystal ingot loading and unloading equipment comprising: a storage device, the storage device being used to store a plurality of crystal ingots; a transfer device, the transfer device being used to dock with the overhead crane for loading and unloading; a manipulator, the manipulator being arranged between the storage device and the transfer device, the manipulator being used to transfer the crystal ingot from the storage device to the transfer device; and crystal ingot processing equipment, the crystal ingot processing equipment being arranged below the ceiling rail, the crystal ingot processing equipment conveying the crystal ingot through the overhead crane.

[0015] In the above-mentioned ingot loading and unloading processing system, the clamping device includes: a clamping jaw, which is connected to the lifting device through a conveyor belt; a second sensor, which acts on the clamping jaw to detect whether the ingot enters the clamping range of the clamping jaw, and the second sensor is also electrically or communicatively connected to the lifting device.

[0016] In the above-mentioned ingot loading and unloading processing system, the material storage device includes: a limiting area, which is multiple and is used to accommodate the ingot respectively; a third sensor, which acts on the limiting area to detect whether the ingot is accommodated, and the third sensor is also electrically or communicatively connected to the manipulator.

[0017] In the above-mentioned ingot loading and unloading processing system, the transfer device includes a docking mechanism, which includes: a lifting plate, which has freedom of movement in the vertical direction and is used to place the ingot; a limit block, which is multiple and arranged around the lifting plate to limit the ingot; and a lifting member, which acts on the lifting plate to drive the lifting plate to protrude from the limit block.

[0018] In the above-mentioned ingot loading and unloading processing system, the docking mechanism also includes a fourth sensor, which is arranged on the limit block, and the fourth sensor is facing above the lifting plate to detect the position of the clamping device, and the fourth sensor is communicatively connected with the clamping device.

[0019] In the above-mentioned ingot loading and unloading processing system, the transfer device also includes a loading mechanism, which includes: a limit plate, which is used to place the ingot; a fifth sensor, which faces the limit plate to detect whether there is an ingot, and the fifth sensor is communicatively connected with the lifting device and the clamping device.

[0020] In the above-mentioned ingot loading and unloading processing system, the robot includes: an X-axis horizontal module, a Z-axis vertical module, a Y-axis telescopic module and a Z-axis rotation module; wherein the Z-axis rotation module is provided with a clamping arm, the clamping arm is used to clamp the ingot, and the clamping arm is also provided with a sixth sensor, the sixth sensor acts on the clamping arm to detect whether the ingot enters the clamping range of the clamping arm, and the sixth sensor is electrically connected or communicatively connected to the clamping arm.

[0021] Compared with the prior art, this application has the following beneficial effects: 1. The lifting device of the present application uses a distance sensor to detect the position change of the conveying wheel, and can calculate the moving distance of the conveying wheel, so that the tightness of the conveyor belt can be calculated in real time, which improves the detection efficiency and has high detection accuracy. If the conveyor belt on one or some conveying wheels is not tight, the operator can further inspect the lifting device or adjust the conveyor belt to ensure that all conveyor belts are in the best working state, the tightness of each conveyor belt is consistent, and the transmission synchronization rate is effectively improved; 2. The lifting device of the present application provides a guide hole for the rotating shaft of the conveying wheel. When the conveying wheel is subjected to the pressure of the conveyor belt, the rotating shaft can move along the inner wall of the guide hole, thereby converting the detection of the tightness of the conveyor belt into the detection of the distance of the set moving direction of the rotating shaft, simplifying the detection difficulty and improving the detection accuracy; 3. The lifting device of the present application divides the rotating shaft into a first shaft body and a second shaft body, so that the first shaft body rotates synchronously with the conveying wheel, and the second shaft body is inserted into the guide hole and is limited by the upper hole wall and the lower hole wall without rotating. The relative rotation of the first shaft body and the second shaft body is used to ensure that the rotation of the conveying wheel will not be interfered, thereby achieving radial movement of the conveying wheel while still maintaining high conveying accuracy and conveying efficiency; 4. The lifting device of the present application is connected to the second shaft body by setting an elastic reset member. When the conveying wheel is subjected to the pressure of the tightened conveyor belt, the second shaft body of the conveying wheel squeezes the elastic reset member to make it contract, overcomes the elastic force of the elastic reset member and moves radially. When the conveyor belt is relaxed, the pressure on the conveying wheel is reduced to the left and right, so that the elastic force of the elastic reset member is sufficient to push the second shaft body to reset, thereby automatically resetting the conveying wheel to the initial state for detection; 5. The lifting device of the present application detects multiple conveying wheels respectively through multiple distance sensors to obtain different degrees of tightness of the conveyor belts and the height difference of each conveyor belt, and then feeds this information back to the driving part through electrical signals or communication signals. The driving part can perform operations such as stopping or slowing down, which is convenient for operators to maintain and adjust the lifting device; 6. The ingot loading and unloading processing system of the present application utilizes the high synchronization rate conveyor belt lifting of the lifting device, which can ensure that the clamping device is horizontal when clamping the ingot, has high docking accuracy, and is not easy to be clamped off or loosened to damage the ingot. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the lifting device of the present application; Figure 2 It is a front view structural schematic diagram of the lifting device of the present application; Figure 3 It is a schematic diagram of the structure of one of the mounting bases in this application; Figure 4 This is a schematic diagram of the structure of the lifting device of the present application when the conveying wheel is under pressure. Figure 1 ; Figure 5 yes Figure 4 The structure shown is a schematic diagram of the structure of the hidden mounting seat; Figure 6 This is a schematic diagram of the structure of the lifting device of the present application when the conveying wheel is under pressure. Figure 2 ; Figure 7 yes Figure 6 The structure shown is a schematic diagram of the structure of the hidden mounting seat; Figure 8 This is a schematic diagram of the structure of the rotating wheel of the present application from the first perspective; Fig. 9 is a structural schematic diagram of the rotating wheel of the present application from a second viewing angle; Fig.10 It is a structural schematic diagram of the ingot loading and unloading processing system of the present application; Fig.11 It is a structural schematic diagram of the ingot loading and unloading equipment of the present application; Fig.12 It is a structural schematic diagram of the overhead travelling crane of the present application; Fig.13 It is a structural schematic diagram of the clamping device of the present application; Fig.14 It is a structural schematic diagram of the storage device of the present application; Fig.15 It is a schematic diagram of the structure of the transfer device of this application; Fig.16 It is a structural schematic diagram of the manipulator of the present application; In the figure, 1000, ingot loading and unloading processing system; 1100, overhead rail; 1200, overhead crane; 100, lifting device; 110, substrate; 120, conveying mechanism; 121, conveying wheel; 122, driving member; 123, rotating shaft; 1231, first shaft body; 1232, second shaft body; 124, rotating wheel; 1241, first wheel body; 12411, first through hole; 12412, first cavity; 1242, second wheel body; 12421, second through hole; 12422, second cavity; S, conveyor belt; 125, rotating shaft; 130, first sensor; 131, detection end; 140, mounting seat; 141, guide hole; 1411, upper hole wall; 1412, lower hole wall; 1413, Side hole wall; 142, elastic reset member; 200, clamping device; 210, clamping claw; 220, second sensor; 1300, ingot loading and unloading equipment; 300, storage device; 310, limit area; 320, third sensor; 400, transfer device; 410, docking mechanism; 411, lifting plate; 412, limit block; 413, lifting member; 414, fourth sensor; 420, unloading mechanism; 421, limit plate; 422, fifth sensor; 500, manipulator; 510, X-axis horizontal module; 520, Z-axis vertical module; 530, Y-axis telescopic module; 540, Z-axis rotation module; 550, clamping arm; 560, sixth sensor; 1400, ingot processing equipment; J, ingot. DETAILED DESCRIPTION

[0023] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0024] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0026] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only embodiment.

[0029] Please refer to the attached drawings in the instruction manual. Figure 1 and Figure 2The lifting device 100 of the present application includes a base plate 110, a conveying mechanism 120 and a first sensor 130. The conveying mechanism 120 includes a conveying wheel 121 and a driving member 122. The conveying wheel 121 is multiple and is respectively arranged on the base plate 110. The conveying wheel 121 is used to convey the conveyor belt S. The conveying wheel 121 has a radial movement freedom. The conveying wheel 121 can move radially due to the pressure of the conveyor belt S. The driving member 122 acts on the conveying wheel 121 to drive the conveying wheel 121 to rotate and convey the conveyor belt S. The first sensor 130 is a distance sensor. The first sensor 130 has a detection end 131. The detection end 131 is arranged on the conveying wheel 121 or on the moving path of the conveying wheel 121 to detect the moving distance of the conveying wheel 121. It can be understood that by setting up multiple conveying wheels 121, multiple conveying belts S can be transported simultaneously. The conveying belts S can be used to connect the loads. The conveying belts S can move vertically as the conveying wheels 121 rotate clockwise or counterclockwise, thereby achieving the lifting of the loads. Regarding the detection principle and function of the first sensor 130: Since the conveying wheel 121 is configured to be able to move radially, preferably with the freedom of movement in the horizontal direction, and the radial movement distance of the conveying wheel 121 is related to the tightness or relaxation of the conveyor belt S, when the conveyor belt S carries a heavy object, it will compress the conveying wheel 121 to move radially. By using the first sensor 130 to detect the position change of the conveying wheel 121, the movement distance of the conveying wheel 121 can be calculated, so that the tightness of the conveyor belt S can be calculated in real time, which improves the detection efficiency and has high detection accuracy. If the conveyor belt S on one or some conveying wheels 121 is not tight, the operator can further inspect the lifting device 100 or adjust the conveyor belt S to ensure that all conveyor belts S are in the best working state, the tightness of each conveyor belt S is consistent, and the conveying synchronization rate is effectively improved.

[0030] Continue to refer to Figure 1 and Figure 2 In some embodiments, a mounting seat 140 is provided on the substrate 110, and a guide hole 141 is opened in the mounting seat 140. A rotating shaft 123 is connected to the rotation center of the conveying wheel 121. The rotating shaft 123 is at least partially located in the guide hole 141, and the rotating shaft 123 has the freedom of movement to move radially in the guide hole 141; the detection end 131 acts on the rotating shaft 123 to detect the moving distance of the rotating shaft 123. It can be understood that the guide hole 141 can guide the movement of the rotating shaft 123. When the conveying wheel 121 is subjected to the pressure of the conveying belt S, the rotating shaft 123 of the conveying wheel 121 can move along the inner wall of the guide hole 141. The guiding direction of the guide hole 141 to the rotating shaft 123 is preferably horizontal, so as to ensure that the rotating shaft 123 can easily move leftward or rightward.

[0031] See also Figure 3In some embodiments, the inner wall of the guide hole 141 includes an upper hole wall 1411, a lower hole wall 1412, and two side hole walls 1413. The gap between the two side hole walls 1413 is larger than the outer diameter of the rotating shaft 123. The upper hole wall 1411 and the lower hole wall 1412 are at least coupled with the outer ring of the rotating shaft 123 to limit the vertical movement of the rotating shaft 123. Exemplarily, the upper hole wall 1411 and the lower hole wall 1412 can be planes, and the upper hole wall 1411, the lower hole wall 1412 and the outer ring of the rotating shaft 123 are clearance-matched, and the rotating shaft 123 is allowed to move along the upper hole wall 1411 and the lower hole wall 1412. The gap between the two side hole walls 1413 is configured to be larger than the outer diameter of the rotating shaft 123, so as to allow the rotating shaft 123 to have space to move. Preferably, the two side hole walls 1413 may be configured to be arc-shaped, and the cross-section of the entire guide hole 141 may be waist-shaped, so as to prevent the shaft 123 from being damaged by being moved by force and coming into conflict with the side hole walls 1413 .

[0032] In some embodiments, reference may be made to Figure 5 or Figure 7 The rotating shaft 123 includes a first shaft body 1231 and a second shaft body 1232. The first shaft body 1231 is fixedly connected to the conveying wheel 121. The second shaft body 1232 is axially connected to the first shaft body 1231. The second shaft body 1232 and the first shaft body 1231 have a rotational freedom of relative rotation. Figure 4 or Figure 6 , the upper surface of the outer ring of the second shaft body 1232 is coupled with the upper hole wall 1411, and the lower surface of the outer ring of the second shaft body 1232 is coupled with the lower hole wall 1412. It can be understood that by dividing the rotating shaft 123 into the first shaft body 1231 and the second shaft body 1232, the first shaft body 1231 and the conveying wheel 121 rotate synchronously, and the second shaft body 1232 is inserted into the guide hole 141 and is limited by the upper hole wall 1411 and the lower hole wall 1412 without rotating. Through the relative rotation of the first shaft body 1231 and the second shaft body 1232, it is ensured that the rotation of the conveying wheel 121 will not be interfered, so that the radial movement of the conveying wheel 121 is achieved while still maintaining high conveying accuracy and conveying efficiency.

[0033] In some embodiments, an elastic reset member 142 is also included, and the elastic reset member 142 is arranged on the mounting seat 140, and the elastic reset member 142 is connected to the second shaft body 1232 in the radial direction, so that the second shaft body 1232 always has a tendency to move in the radial direction. It is understandable that by setting the elastic reset member 142 to be connected to the second shaft body 1232, when the conveying wheel 121 is subjected to the pressure of the tightened conveyor belt S, the second shaft body 1232 of the conveying wheel 121 squeezes the elastic reset member 142 to shrink it, overcomes the elastic force of the elastic reset member 142 and moves radially, and when the conveyor belt S is relaxed, the pressure on the conveying wheel 121 is reduced left and right, so that the elastic force of the elastic reset member 142 is sufficient to push the second shaft body 1232 to reset. Exemplarily, the elastic reset member 142 is a spring. Specifically, a reset hole (not shown) is also provided on the mounting seat 140, and the elastic reset member 142 is arranged in the reset hole, so as to assist the elastic reset member 142 to telescopically guide along the reset hole.

[0034] See also Figure 8 and Fig. 9 In some embodiments, the conveying mechanism 120 also includes a rotating wheel 124, and the rotating wheel 124 includes a first wheel body 1241 and a second wheel body 1242. The first wheel body 1241 is arranged on the substrate 110, and a first cavity 12412 is provided in the first wheel body 1241, and the first cavity 12412 is used to store the conveyor belt S. The second wheel body 1242 is coaxially connected to the first wheel body 1241, and a second cavity 12422 is provided in the second wheel body 1242, and the second cavity 12422 is used to store the conveyor belt S; wherein, two conveying wheels 121 are provided on the side of the first wheel body 1241 away from the second wheel body 1242 to convert the conveying direction of the conveyor belt S, and a conveying wheel 121 is provided on the side of the second wheel body 1242 away from the first wheel body 1241, and the first wheel body 1241 and the second wheel body 1242 can be respectively connected to different conveying wheels 121 through the conveyor belt S. Specifically, the first wheel body 1241 is provided with a first through hole 12411, which is communicated with the first cavity 12412 to input or output the conveyor belt S, and the second wheel body 1242 is provided with a second through hole 12421, which is communicated with the second cavity 12422 to input or output the conveyor belt S, and the second through hole 12421 and the first through hole 12411 are symmetrically arranged with respect to the central axis of the rotating wheel 124, so that the conveyor belt S transported by the two is transmitted counterclockwise and clockwise respectively. It can be understood that by dividing the rotating wheel 124 into two parts, namely the first wheel body 1241 and the second wheel body 1242, when the rotating wheel 124 is driven to rotate, the first wheel body 1241 and the second wheel body 1242 transport the conveyor belt S in different rotation directions, so that the lifting heights of the conveyor belts S of the two are kept aligned, rather than one side is higher and the other side is lower.

[0035] In some embodiments, the conveying mechanism 120 has multiple groups, and the rotating wheels 124 of adjacent conveying mechanisms 120 are coaxially connected through a rotating shaft 125, and the driving member 122 acts on the rotating shaft 125 to drive the adjacent conveying mechanisms 120 to synchronously convey the conveyor belt S. It can be understood that by coaxially driving the rotating wheels 124, the corresponding conveying wheels 121 are indirectly driven to rotate at the same time, thereby ensuring that the conveyor belts S on multiple conveying wheels 121 can be synchronously conveyed, thereby improving the synchronization rate.

[0036] In some embodiments, there are multiple first sensors 130, and they act on multiple conveying wheels 121 respectively. The first sensors 130 are electrically connected or communicatively connected to the driving member 122. It can be understood that multiple first sensors 130 are used to detect multiple conveying wheels 121 respectively, so as to obtain different tightness of the conveyor belts S and the height difference of each conveyor belt S, and then this information is fed back to the driving member 122 through electrical signals or communication signals. The driving member 122 can perform operations such as stopping or slowing down, which is convenient for operators to maintain and adjust the lifting device 100.

[0037] The working principle of the lifting device 100 of the present application is as follows: The driving member 122 drives the rotating shaft 125 to rotate clockwise or counterclockwise, and the rotating shaft 125 drives the rotating wheels 124 coaxially connected thereto to rotate synchronously. The rotating wheels rotate to transport the conveyor belt S to the conveyor wheel 121. The conveyor wheel 121 is a driven wheel. The conveyor wheel 121 rotates to transport the conveyor belt S upward or downward. The end of the conveyor belt S can be connected to a crystal ingot J carrier, such as a clamping device 200, so that after clamping the crystal ingot J, the conveyor belt S is lifted and lowered for transportation. During the transportation process, since the conveyor belt S presses against the conveyor wheel 121, the first sensor 130 is used to detect the moving distance of the rotating shaft 123 of the conveyor wheel 121 in real time, and the tightness of the conveyor belt S is calculated based on the detection result. When the conveyor belt S is loose, the elastic reset member 142 can drive the rotating shaft 123 to reset. When the conveyor belt S is tight, the rotating shaft 123 can be moved by the pressure of the conveyor belt S to overcome the elastic effect of the elastic reset member 142.

[0038] See also Fig.10 The ingot loading and unloading processing system 1000 of the present application includes: a ceiling rail 1100, a crane 1200, an ingot loading and unloading device 1300 and an ingot processing device 1400. Fig.11The ingot loading and unloading equipment 1300 is arranged below the overhead rail 1100. The ingot loading and unloading equipment 1300 includes a storage device 300, a transfer device 400 and a manipulator 500. The storage device 300 is used to store a plurality of ingots J. The transfer device 400 is used to dock with the overhead crane 1200 for loading and unloading. The manipulator 500 is arranged between the storage device 300 and the transfer device 400. The manipulator 500 is used to transfer the ingot J from the storage device 300 to the transfer device 400. There are multiple overhead cranes 1200, which are arranged on the overhead rail 1100, respectively. Fig.12 The overhead crane 1200 includes a lifting device 100 and a clamping device 200. The lifting device 100 is slidably disposed on the overhead rail 1100. The clamping device 200 is connected to the lifting device 100 through a conveyor belt S. The clamping device 200 is used to clamp the crystal ingot J. The crystal ingot processing equipment 1400 is disposed below the overhead rail 1100. The crystal ingot processing equipment 1400 conveys the crystal ingot J through the overhead crane 1200.

[0039] Exemplarily, the storage device 300 can be used as a warehouse to centrally store multiple crystal ingots J. When processing and loading materials, the manipulator 500 can carry them and transport the crystal ingots J in the storage device 300 to the transfer device 400. The transfer device 400 can supply materials to the overhead crane 1200 and can also accept the unloading of materials by the overhead crane 1200. The transfer device 400 can be divided into two areas, one of which can be used as a loading docking point for raw materials, and the other area can be used as a temporary storage point for unloading bad materials after processing. The bad materials can be transported to the processing station for processing manually or by robots. The crystal ingot processing equipment 1400 can process the crystal ingot J, including various processes, such as polishing, grinding, thinning, cutting, etc. In each process of processing the crystal ingot J, the overhead crane 1200 slides on the overhead rail 1100 for transportation. It can be understood that the lifting of the conveyor belt S with a high synchronization rate by the lifting device 100 of the present application can ensure that the clamping device 200 is horizontal when clamping the crystal ingot J, has high docking accuracy, and is not prone to damage to the crystal ingot J due to deviation or disengagement.

[0040] See also Fig.13In some embodiments, the clamping device 200 includes a clamping jaw 210 and a second sensor 220. The clamping jaw 210 is connected to the lifting device 100 through a conveyor belt S. The second sensor 220 acts on the clamping jaw 210 to detect whether the ingot J is in place. The second sensor 220 is also electrically connected or communicatively connected to the lifting device 100. Exemplarily, the second sensor 220 is a photoelectric sensor, which is embedded in the clamping jaw 210. The photoelectric sensor is used to detect the position of the ingot J, so as to clamp or release it in time. When clamping, the lifting device 100 performs lifting and transportation. In some embodiments, the second sensor 220 also includes a force feedback sensor (not shown), which uses the force feedback sensor to feedback whether the clamping jaw 210 clamps the ingot J, so as to prevent the ingot J from falling off and being damaged during lifting.

[0041] See also Fig.14 In some embodiments, the storage device 300 includes a limiting area 310 and a third sensor 320. There are multiple limiting areas 310 and they are used to accommodate the ingot J respectively. The third sensor 320 acts on the limiting area 310 to detect whether the ingot J is accommodated. The third sensor 320 is also electrically connected or communicatively connected to the manipulator 500. Exemplarily, the limiting area 310 is used to limit the ingot J, which is convenient for the subsequent handling by the manipulator 500, and the third sensor 320 is set to detect whether the ingot J is stored in the limiting area 310, so as to ensure that the manipulator 500 effectively performs the material extraction operation. Among them, the third sensor 320 is a photoelectric sensor, which faces the limiting area 310, so as to detect the storage status of the limiting area 310 in real time.

[0042] See also Fig.15 In some embodiments, the transfer device 400 includes a docking mechanism 410, which includes a lifting plate 411, a stopper 412, and a lifting member 413. The lifting plate 411 has a vertical degree of freedom of movement and is used to place the ingot J. The stopper 412 is multiple and is arranged around the lifting plate 411 to limit the position of the ingot J. The lifting member 413 acts on the lifting plate 411 to drive the lifting plate 411 to protrude from the stopper 412. It can be understood that the lifting member 413 can be a cylinder or an electric cylinder. The lifting plate 411 has a docking state and a static state. In the static state, the upper surface of the lifting plate 411 is lower than each stopper 412, and the stopper 412 limits the ingot J on the lifting plate 411. In the docking state, the lifting member 413 drives the lifting plate 411 to rise, so that the ingot J at least partially protrudes from the stopper 421, which facilitates the gripper 210 to grab the ingot J.

[0043] In some embodiments, the docking mechanism 410 further includes a fourth sensor 414, which is disposed on the limit block 412 and faces the top of the lifting plate 411 to detect whether the clamping device 200 is in place, and the fourth sensor 414 is in communication with the clamping device 200. Exemplarily, the fourth sensor 414 is a photoelectric sensor, which detects whether the position of the clamping device 200 reaches the set position by using the photoelectric sensor, thereby feeding back to the clamping device 200 for timely clamping.

[0044] Continue to refer to Fig.15 In some embodiments, the transfer device 400 further includes a material unloading mechanism 420, which includes a limit plate 421 and a fifth sensor 422. The limit plate 421 is used to place the ingot J. The fifth sensor 422 faces the limit plate 421 to detect whether the ingot J exists. The fifth sensor 422 is connected to the lifting device 100 and the clamping device 200 for communication. It can be understood that the ingot J is limited by the limit plate 421, and the fifth sensor 422 is a photoelectric sensor. The photoelectric sensor is used to detect whether the ingot J is placed on the limit plate 421. If the detection result is no, the lifting device 100 can be used to transport the ingot J with processing defects to the limit plate 421, and the clamping claw 210 of the clamping device 200 is released to place the ingot J. After the ingot J is placed on the limit plate 421, it can be transported and unloaded by humans or robots.

[0045] See also Fig.16 In some embodiments, the manipulator 500 includes an X-axis horizontal module 510, a Z-axis vertical module 520, a Y-axis telescopic module 530, and a Z-axis rotation module 540; wherein, the Z-axis rotation module 540 is provided with a clamping arm 550, the clamping arm 550 is used to clamp the crystal ingot J, and the clamping arm 550 is also provided with a sixth sensor 560, the sixth sensor 560 acts on the clamping arm 550 to detect whether the crystal ingot J enters the clamping range of the clamping arm 550, and the sixth sensor 560 is electrically connected or communicatively connected with the clamping arm 550. It can be understood that the manipulator 500 of the present application has four-axis motion degrees of freedom, and the sixth sensor 560 is a photoelectric sensor, which uses the photoelectric sensor to detect whether the crystal ingot J is in place, so as to facilitate the clamping arm 550 to clamp in time, and the manipulator 500 can quickly and accurately carry the crystal ingot J.

[0046] Working principle of the ingot loading and unloading processing system 1000 of the present application: Multiple ingots J are transported manually or by robots and placed in the storage device 300 of the ingot loading and unloading equipment 1300 at one time. The limit area 310 of the storage device 300 limits the position of the ingot J, and the third sensor 320 can detect the signal of the ingot J being placed. When there is no ingot J on the lifting plate 411 of the docking mechanism 410 of the transfer device 400, the manipulator 500 will move the ingot J from the storage device 300 to the lifting plate 411 according to the first-in-first-out principle. The overhead crane 1200 runs on the overhead rail 1100 and interacts with the ingot loading and unloading equipment 1300 and the ingot processing equipment 1400 in real time. When any ingot processing equipment 1400 requests to load, the overhead crane 1200 receives the instruction, interacts with the ingot loading and unloading equipment 1300, and the overhead crane 1200 runs to the top of the designated lifting plate 411. The lifting member 413 lifts the crystal ingot J and protrudes above the limit block 412, which is convenient for clamping the crystal ingot J. At the same time, the lifting device 100 of the overhead crane 1200 transports the clamping device 200 to descend to a set height. The fourth sensor 414 detects that the clamping device 200 is in place, and the jaws 210 are closed to clamp the crystal ingot J. The conveying device drives the clamping device 200 to rise to the top, and the overhead crane 1200 moves to just above the crystal ingot processing equipment 1400, and then lowers the clamping device 200 to the set height, releases the jaws 210 to release the crystal ingot J, and the crystal ingot processing equipment 1400 starts processing after obtaining the crystal ingot J. When a defective ingot J is produced by the ingot processing equipment 1400, the ingot processing equipment 1400 returns the ingot J to the equipment docking port, and the ingot processing equipment 1400 calls the overhead crane 1200 to transport it. After obtaining the information, the overhead crane 1200 runs to the equipment docking port and stops. The overhead crane 1200 releases the clamping device 200, and the clamping claw 210 closes to clamp the defective ingot J. The clamping device 200 rises to the top. The overhead crane 1200 interacts with the ingot loading and unloading equipment 1300, and the fifth sensor 422 obtains the information of the idle limit plate 421. The overhead crane 1200 moves to the top of the idle limit plate 421 and releases the ingot J to the limit plate 421. Manual or robot regularly comes to the ingot loading and unloading equipment 1300 to take away the defective ingot J and replenish the raw material ingot J.

[0047] Beneficial effects: The lifting device 100 of the present application uses a distance sensor to detect the position change of the conveying wheel 121, and can calculate the moving distance of the conveying wheel 121, so that the tightness of the conveying belt S can be calculated in real time, which improves the detection efficiency and has high detection accuracy. If the conveying belt S on one or some conveying wheels 121 is not tight, the operator can further inspect the lifting device 100 or adjust the conveying belt S to ensure that all conveying belts S are in the best working state, and the tightness of each conveying belt S is consistent, which effectively improves the transmission synchronization rate. ; By providing a guide hole 141 for the rotating shaft 123 of the conveying wheel 121, when the conveying wheel 121 is subjected to the pressure of the conveying belt S, the rotating shaft 123 can move along the inner wall of the guide hole 141, thereby converting the detection of the tightness of the conveying belt S into the detection of the distance of the set moving direction of the rotating shaft 123, simplifying the detection difficulty and improving the detection accuracy; by dividing the rotating shaft 123 into a first shaft body 1231 and a second shaft body 1232, the first shaft body 1231 rotates synchronously with the conveying wheel 121, and the second shaft body 1232 is inserted into the guide hole 141 and is held by the upper hole wall 1 411 and the lower hole wall 1412 are limited but not rotated, and the relative rotation of the first shaft body 1231 and the second shaft body 1232 is used to ensure that the rotation of the conveying wheel 121 will not be interfered, so that the radial movement of the conveying wheel 121 is achieved while maintaining high conveying accuracy and efficiency; by setting an elastic reset member 142 connected to the second shaft body 1232, when the conveying wheel 121 is subjected to the pressure of the tightened conveyor belt S, the second shaft body 1232 of the conveying wheel 121 squeezes the elastic reset member 142 to make it contract, overcomes the elastic force of the elastic reset member 142 and moves radially, When the conveyor belt S is loose, the pressure on the conveyor wheel 121 is reduced, so that the elastic force of the elastic reset member 142 is sufficient to push the second shaft 1232 to reset, thereby automatically resetting the conveyor wheel 121 to the initial state for detection; multiple distance sensors are used to detect multiple conveyor wheels 121 respectively, so as to obtain different tightness of the conveyor belt S and the height difference of each conveyor belt S, and then this information is fed back to the driving member 122 through electrical signals or communication signals. The driving member 122 can perform operations such as stopping or slowing down, which is convenient for operators to maintain and adjust the lifting device 100; The ingot loading and unloading processing system 1000 of the present application utilizes the high-synchronization rate conveyor belt S of the lifting device 100 to lift and lower, which can ensure that the clamping device 200 is horizontal when clamping the ingot J, has high docking accuracy, and is not easy to be clamped off or loose to damage the ingot J.

[0048] The specific embodiments described herein are merely examples of the spirit of the present application. A person skilled in the art of the present application may make various modifications or additions to the specific embodiments described or replace them in a similar manner, but this will not deviate from the spirit of the present application or exceed the scope defined by the attached claims.

Claims

1. A lifting device (100), characterized in that: include: substrate(110); A conveying mechanism (120), wherein the conveying mechanism (120) comprises: A conveying wheel (121), wherein the conveying wheel (121) is multiple and respectively arranged on the substrate (110), the conveying wheel (121) is used to convey the conveyor belt (S), the conveying wheel (121) has a radial movement freedom, and the conveying wheel (121) can move radially due to the pressure of the conveyor belt (S); a driving member (122), the driving member (122) acting on the conveying wheel (121) to drive the conveying wheel (121) to rotate and convey the conveyor belt (S); and A first sensor (130), wherein the first sensor (130) is a distance sensor, and the distance sensor has a detection end (131), and the detection end (131) is arranged on the conveying wheel (121) or on the moving path of the conveying wheel (121) to detect the moving distance of the conveying wheel (121).

2. The lifting device (100) according to claim 1, characterized in that: The base plate (110) is provided with a mounting seat (140), the mounting seat (140) is provided with a guide hole (141), the rotation center of the conveying wheel (121) is connected to a rotating shaft (123), the rotating shaft (123) is at least partially located in the guiding hole (141), and the rotating shaft (123) has the freedom of movement of radial movement in the guiding hole (141); the detection end (131) acts on the rotating shaft (123) to detect the moving distance of the rotating shaft (123).

3. The lifting device (100) according to claim 2, characterized in that: The inner wall of the guide hole (141) includes an upper hole wall (1411), a lower hole wall (1412) and two side hole walls (1413), the gap between the two side hole walls (1413) is larger than the outer diameter of the rotating shaft (123), and the upper hole wall (1411) and the lower hole wall (1412) are at least coupled with the outer ring portion of the rotating shaft (123) to limit the vertical movement of the rotating shaft (123).

4. The lifting device (100) according to claim 3, characterized in that: The rotating shaft (123) comprises: A first shaft (1231), wherein the first shaft (1231) and the conveying wheel (121) are fixedly connected; A second shaft body (1232), the second shaft body (1232) and the first shaft body (1231) are axially connected, the second shaft body (1232) and the first shaft body (1231) have a rotational freedom of relative rotation, the upper surface of the outer ring of the second shaft body (1232) is coupled to the upper hole wall (1411), and the lower surface of the outer ring of the second shaft body (1232) is coupled to the lower hole wall (1412).

5. The lifting device (100) according to claim 4, characterized in that: It also includes an elastic reset member (142), which is arranged on the mounting seat (140), and the elastic reset member (142) is connected to the second shaft body (1232) in a radial direction, so that the second shaft body (1232) always has a tendency to move in the radial direction.

6. The lifting device (100) according to claim 1, characterized in that: The conveying mechanism (120) further includes a rotating wheel (124), and the rotating wheel (124) includes: A first wheel body (1241), wherein the first wheel body (1241) is disposed on the base plate (110), wherein a first cavity (12412) is disposed in the first wheel body (1241), and the first cavity (12412) is used for storing a conveyor belt (S); A second wheel body (1242), wherein the second wheel body (1242) is coaxially connected to the first wheel body (1241), and a second cavity (12422) is provided in the second wheel body (1242), and the second cavity (12422) is used for storing the conveyor belt (S); Wherein, two conveying wheels (121) are provided on the side of the first wheel body (1241) facing away from the second wheel body (1242) to convert the conveying direction of the conveyor belt (S); one conveying wheel (121) is provided on the side of the second wheel body (1242) facing away from the first wheel body (1241); and the first wheel body (1241) and the second wheel body (1242) can be connected to different conveying wheels (121) via the conveyor belt (S), respectively.

7. The lifting device (100) according to claim 6, characterized in that: The conveying mechanism (120) has multiple groups, and the rotating wheels (124) of adjacent conveying mechanisms (120) are coaxially connected through a rotating shaft (125). The driving member (122) acts on the rotating shaft (125) to drive the adjacent conveying mechanisms (120) to synchronously convey the conveyor belts (S).

8. The lifting device (100) according to claim 1, characterized in that: There are a plurality of first sensors (130), which act on a plurality of conveying wheels (121) respectively. The first sensors (130) are electrically connected or communicatively connected to the driving member (122).

9. A crystal ingot loading and unloading processing system (1000), characterized in that: include: Skytrack (1100); A crane (1200), wherein the crane (1200) is multiple and is respectively arranged on the overhead rail (1100), and the crane (1200) comprises: The lifting device (100) according to any one of claims 1 to 8, wherein the lifting device (100) is slidably arranged on the ceiling rail (1100); A clamping device (200), the clamping device (200) being connected to the lifting device (100) via a conveyor belt (S), and the clamping device (200) being used for clamping a crystal ingot (J); A crystal ingot (J) loading and unloading device (1300), wherein the crystal ingot (J) loading and unloading device (1300) is arranged below the ceiling rail (1100), and the crystal ingot (J) loading and unloading device (1300) comprises: A storage device (300), the storage device (300) being used to store a plurality of crystal ingots (J); A transfer device (400), the transfer device (400) is used to dock with the overhead traveling crane (1200) to load and unload materials; and a robot (500), the robot (500) being disposed between the storage device (300) and the transfer device (400), the robot (500) being used to transfer the crystal ingot (J) from the storage device (300) to the transfer device (400); and A crystal ingot processing device (1400) is disposed below the overhead rail (1100), and the crystal ingot processing device (1400) transports the crystal ingot (J) via the overhead crane (1200).

10. The ingot loading and unloading processing system (1000) according to claim 9, characterized in that: The clamping device (200) comprises: A clamping claw (210), wherein the clamping claw (210) is connected to the lifting device (100) via a conveyor belt (S); A second sensor (220), the second sensor (220) acts on the clamp (210) to detect whether the ingot (J) enters the clamping range of the clamp (210), and the second sensor (220) is also electrically connected or communicatively connected to the lifting device (100).

11. The ingot loading and unloading processing system (1000) according to claim 9, characterized in that: The material storage device (300) comprises: A plurality of limiting areas (310) each for accommodating a crystal ingot (J); A third sensor (320), the third sensor (320) acts on the limiting area (310) to detect whether a crystal ingot (J) is accommodated, and the third sensor (320) is also electrically connected or communicatively connected to the robot (500).

12. The ingot loading and unloading processing system (1000) according to claim 9, characterized in that: The transfer device (400) comprises a docking mechanism (410), and the docking mechanism (410) comprises: A lifting plate (411), the lifting plate (411) having a vertical degree of freedom of movement, the lifting plate (411) being used to place a crystal ingot (J); a limiting block (412), the limiting blocks (412) being multiple and arranged around the lifting plate (411) to limit the position of the crystal ingot (J); and A lifting member (413), wherein the lifting member (413) acts on the lifting plate (411) to drive the lifting plate (411) to protrude from the limiting block (412).

13. The ingot loading and unloading processing system (1000) according to claim 12, characterized in that: The docking mechanism (410) further comprises a fourth sensor (414), wherein the fourth sensor (414) is arranged on the limit block (412), and the fourth sensor (414) faces above the lifting plate (411) to detect the position of the clamping device (200), and the fourth sensor (414) is communicatively connected with the clamping device (200).

14. The ingot loading and unloading processing system (1000) according to claim 9, characterized in that: The transfer device (400) further includes a material unloading mechanism (420), and the material unloading mechanism (420) includes: A limiting plate (421), wherein the limiting plate (421) is used to place the crystal ingot (J); A fifth sensor (422), the fifth sensor (422) faces the limiting plate (421) to detect whether there is a crystal ingot (J) on the limiting plate (421), and the fifth sensor (422) is communicatively connected with the lifting device (100) and the clamping device (200).

15. The ingot loading and unloading processing system (1000) according to claim 9, characterized in that: The robot (500) comprises: an X-axis horizontal module (510), a Z-axis vertical module (520), a Y-axis telescopic module (530) and a Z-axis rotation module (540); In which, the Z-axis rotation module (540) is provided with a clamping arm (550), and the clamping arm (550) is used to clamp the crystal ingot (J), and the clamping arm (550) is also provided with a sixth sensor (560), and the sixth sensor (560) acts on the clamping arm (550) to detect whether the crystal ingot (J) enters the clamping range of the clamping arm (550), and the sixth sensor (560) is electrically connected or communicatively connected to the clamping arm (550).

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