Uniaxial out-of-plane MEMS gyroscope

Abstract

The invention relates to a uniaxial out-of-plane MEMS gyroscope, which comprises a substrate, an anchor point unit, a motion unit and an electrode unit, the motion unit comprises four driving frames, the four driving frames are arranged in an array along an x direction and a y direction, and the driving frames have degrees of freedom of linear motion along the x direction; two mass blocks arranged in the x direction are arranged between the two driving frames arranged in the x direction, the mass blocks are connected with the adjacent driving frames in the x direction through first decoupling beams, a detection frame is arranged between the two mass blocks arranged in the x direction, and the detection frame has the freedom degree of swinging around the y direction. The detection frame is connected with two adjacent mass blocks in the x direction through a second decoupling beam, and the electrode unit comprises a driving mode excitation electrode and a sensitive mode detection electrode. The two-stage decoupling mode is adopted to realize the decoupling of the motion of the driving frame and the motion of the detection frame, so that the quadrature error of the gyroscope can be reduced from the structural level, the zero offset index of the gyroscope is further reduced, and a foundation is laid for realizing the high-performance uniaxial out-of-plane MEMS gyroscope.

Description

Technical Field

[0001] The present invention relates to the field of detection technology, and in particular to a single-axis out-of-plane MEMS gyroscope. Background Art

[0002] MEMS gyroscopes, or micromechanical gyroscopes, have been widely used in drones, automotive electronics, industrial production, aerospace, and other fields due to their small size, low cost, low power consumption, and high integration. With the development of related application fields and the gradual improvement of detection requirements, the market demand for small-volume, high-precision, and high-stability gyroscopes is becoming increasingly urgent.

[0003] At present, typical MEMS gyroscopes are mainly capacitive resonant gyroscopes, whose basic principle is to obtain the angular velocity by measuring the energy conversion amplitude between different resonant modes caused by the Coriolis force. The mainstream MEMS micromechanical gyroscopes include wired vibration type and ring vibration type. Among them, the wire vibration type gyroscope structure has the characteristics of high sensitivity with a large Coriolis sensitive mass ratio and easy decoupling of the drive and detection modal motion. In order to achieve the high precision of the wire vibration gyroscope, a larger overall structure volume is required, which makes it more sensitive to external interference (acceleration, vibration, shock or temperature); the ring vibration gyroscope is small in size and has good symmetry. It has inherent immunity to external environmental interference (acceleration, vibration, shock, temperature), but because its circular characteristic pattern is easily affected by processing errors, it actually presents an elliptical shape, which is very easy to cause drive sensitive modal frequency offset and orthogonal coupling error, which leads to low gyroscope output accuracy and poor bandwidth adaptability. Summary of the invention

[0004] To this end, the present invention provides a single-axis out-of-plane MEMS gyroscope, which has the large Coriolis mass advantage of a linear vibration structure, can achieve high mechanical sensitivity of the MEMS gyroscope, reduce structural orthogonal error through a secondary decoupling working mode, and reduce the sensitivity of the structure to external interference.

[0005] In order to solve the above technical problems, the present invention provides a single-axis out-of-plane MEMS gyroscope, comprising: substrate; An anchor point unit, the anchor point unit is fixed on the substrate, and the anchor point unit includes a first anchor point and a second anchor point; A motion unit, comprising four drive frames, the four drive frames are arranged in an array along the x-direction and the y-direction, the drive frames are connected to the first anchor point through a first spring beam, the drive frames have the freedom of linear motion along the x-direction, two mass blocks arranged along the x-direction are arranged between the two drive frames arranged along the x-direction, the mass blocks are connected to the adjacent drive frames along the x-direction through a first decoupling beam, a detection frame is arranged between the two mass blocks arranged along the x-direction, the detection frame is connected to the second anchor point through a second spring beam, the detection frame has the freedom of swinging around the y-direction, and the detection frame is connected to the adjacent two mass blocks along the x-direction through a second decoupling beam; The electrode unit is fixed on the substrate and includes a driving mode excitation electrode and a sensitive mode detection electrode. The driving mode excitation electrode is used to drive the driving frame to move linearly along the x direction, and the sensitive mode detection electrode is used to detect the out-of-plane swing displacement of the detection frame around the y direction.

[0006] Further, the driving frame is concave-shaped, and the driving frame has a first groove, the first groove has a first notch, a first groove wall located on the side of the first notch, and a first groove bottom facing the first notch, the two first notches arranged along the x direction are opposite, the first anchor point is arranged inside the first groove, the first spring beam is connected to the first groove wall, the mass block is embedded in the first groove, and the first decoupling beam is located in the first groove and connected to the first groove wall.

[0007] Further, the first groove wall is L-shaped, including a main body and an extension portion, the main body extends along the x-direction and is connected to the first groove bottom, the extension portion extends along the y-direction, one end of the extension portion is connected to an end of the main body away from the first groove bottom, the other ends of the two extension portions of the same driving frame are between the first notch, the first spring beam is located in the first groove and connected to the main body, the first decoupling beam is located in the first groove and connected to the extension portion, and the extension portion is connected to the adjacent extension portions along the x-direction through the first coupling beam.

[0008] Furthermore, the anchor point unit further includes a third anchor point, and the extension portion is further connected to the third anchor point via a third spring beam.

[0009] Furthermore, the mass block is concave-shaped, and the mass block has a second groove, the second groove has a second notch, a second groove wall located on the side of the second notch, and a second groove bottom facing the second notch, the two second notches arranged along the x direction are opposite, the first decoupling beam is located outside the second groove and connected to the second groove bottom, the detection frame is embedded in the second groove, and the second decoupling beam is located in the second groove and connected to the second groove wall.

[0010] Furthermore, the second slot walls are connected to the adjacent second slot walls along the x direction through a second coupling beam.

[0011] Furthermore, the detection frame is I-shaped, the detection frame has two third grooves, the third groove has a third notch, the two third notches of the same detection frame are respectively facing the positive direction of the Y-axis and the negative direction of the Y-axis, and part of the second coupling beam extends into the third groove.

[0012] Furthermore, the anchor point unit also includes a fourth anchor point, and the side of the second groove bottom away from the center of the gyroscope is connected to the fourth anchor point through a fourth spring beam, the mass block has the freedom of linear movement along the x direction and swinging around the y direction, and the side of the second groove bottom close to the center of the gyroscope is connected to the second groove bottom adjacent to the y direction through a third coupling beam.

[0013] Furthermore, the second slot wall near the outer edge of the gyroscope is connected to the second slot wall adjacent to the gyroscope in the x direction through a fourth coupling beam, and the second slot wall near the center of the gyroscope is connected to the second slot wall adjacent to the y direction through a fifth coupling beam.

[0014] Furthermore, the anchor point unit also includes a fifth anchor point, and a coupling lever is provided on the side of the two driving frames arranged along the y direction away from the center of the gyroscope, and the coupling lever is connected to the fifth anchor point through a fifth spring beam. The coupling lever has the freedom to swing around the Z-axis direction, and the two ends of the coupling lever are respectively connected to the two adjacent driving frames along the y direction through a third decoupling beam.

[0015] The above technical solution of the present invention has the following advantages over the prior art: the single-axis out-of-plane MEMS gyroscope described in the present invention, on the one hand, adopts a two-level decoupling method to achieve decoupling of the drive frame movement and the detection frame movement, which can reduce the gyroscope orthogonal error from the structural level, further reduce the zero bias index of the gyroscope, and lay the foundation for realizing a high-performance gyroscope; on the other hand, under the driving resonance state, the mass block moves linearly, which can provide a larger driving displacement (>10um) than the traditional structure. The large driving displacement can improve the signal-to-noise ratio of the gyroscope and enhance the mechanical sensitivity, thereby compensating for the problem of reduced effective detection area and reduced mechanical sensitivity due to the two-level decoupling structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings.

[0017] Figure 1 It is a schematic structural diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 1 of the present invention; Figure 2 Schematic diagram of the driving mode of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention; Figure 3 Schematic diagram of the sensitive mode of the single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention; Figure 4 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention; Figure 5 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention; Figure 6 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in the first embodiment of the present invention; Figure 7 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in the second embodiment of the present invention; Figure 8 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in the second embodiment of the present invention; Fig. 9 It is a structural schematic diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 3 of the present invention; Fig.10 Schematic diagram of the driving mode of the single-axis out-of-plane MEMS gyroscope in the third embodiment of the present invention; Fig.11 Schematic diagram of sensitive modes of a single-axis out-of-plane MEMS gyroscope in Embodiment 3 of the present invention; Fig.12 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 3 of the present invention; Fig.13 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 3 of the present invention; Fig.14 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 3 of the present invention; Fig.15 Schematic diagram of the structure of a single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention; Fig.16 Schematic diagram of the driving mode of the single-axis out-of-plane MEMS gyroscope in the fourth embodiment of the present invention; Fig.17 Schematic diagram of sensitive modes of a single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention; Fig.18 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention; Fig.19 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention; Fig. 20It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in Embodiment 4 of the present invention; Fig.21 It is a partial schematic diagram of a single-axis out-of-plane MEMS gyroscope in the fourth embodiment of the present invention.

[0018] Explanation of the reference numerals in the specification: 21, first anchor point; 22, second anchor point; 23, third anchor point; 24, fourth anchor point; 25, fifth anchor point; 31, drive frame; 311, first groove bottom; 312, main body; 313, extension; 32, mass block; 321, second groove wall; 322, second groove bottom; 33, detection frame; 34, coupling lever; 41, first spring beam; 42, second spring beam; 43, third spring beam; 44, fourth spring beam; 45, fifth spring beam; 51, first decoupling beam; 52, second decoupling beam; 53, third decoupling beam; 61, drive mode excitation electrode; 62, sensitive mode detection electrode; 63, drive mode detection electrode; 64, orthogonal adjustment electrode; 65, sensitive mode feedback electrode; 71, first coupling beam; 72, second coupling beam; 73, third coupling beam; 74, fourth coupling beam; 75, fifth coupling beam. DETAILED DESCRIPTION

[0019] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0020] Embodiment 1 See also Figures 1 to 6 As shown, one embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0021] Single-axis out-of-plane MEMS gyroscope, including: substrate; An anchor point unit, the anchor point unit is fixed on the substrate, and the anchor point unit includes a first anchor point 21 and a second anchor point 22; A motion unit, comprising four driving frames 31, wherein the four driving frames 31 are arranged in an array along the x-direction and the y-direction, the driving frames 31 are connected to the first anchor point 21 through a first spring beam 41, the driving frames 31 have the freedom of linear motion along the x-direction, two mass blocks 32 arranged along the x-direction are arranged between the two driving frames 31 arranged along the x-direction, the mass blocks 32 are connected to the driving frames 31 adjacent to each other along the x-direction through a first decoupling beam 51, a detection frame 33 is arranged between the two mass blocks 32 arranged along the x-direction, the detection frame 33 is connected to the second anchor point 22 through a second spring beam 42, the detection frame 33 has the freedom of swinging around the y-direction, and the detection frame 33 is connected to the two mass blocks 32 adjacent to each other along the x-direction through a second decoupling beam 52; The electrode unit is fixed on the substrate, and includes a driving mode excitation electrode 61 and a sensitive mode detection electrode 62. The driving mode excitation electrode 61 is used to drive the driving frame 31 to move linearly along the x direction, and the sensitive mode detection electrode 62 is used to detect the out-of-plane swing displacement of the detection frame 33 around the y direction.

[0022] In this embodiment, the motion unit has an axis of symmetry in the x-axis direction and an axis of symmetry in the y-axis direction. The motion unit includes two motion components arranged at a distance along the y-axis direction. Each motion component includes two driving frames 31, two mass blocks 32 and a detection frame 33. In the same motion component, the two mass blocks 32 are symmetrically connected to the two sides of the detection frame 33 in the x-direction, and the two driving frames 31 are symmetrically connected to the two sides of the two mass blocks 32 in the x-direction. The driving frame 31, the mass block 32, the detection frame 33 and the coupling lever 34 are all rigid structures.

[0023] The structure and layout of the first spring beam 41 should ensure the freedom of movement of each drive frame 31 along its own reciprocating direction and inhibit movement in other directions. The first spring beam 41 is the main beam of the drive shaft stiffness, which can provide the required stiffness and excellent impact resistance for the drive mode in the direction of movement, and can improve the anti-interference ability of the structure along the drive direction and the out-of-plane direction. The structure and layout of the second spring beam 42 should ensure the freedom of the detection frame 33 to swing around the y direction and inhibit movement in other directions.

[0024] When the driving frame 31 moves, the mass block and the driving frame 31 can move in the same trend. The first decoupling beam 51 ensures that the motion modes of the driving frame 31 and the mass block 32 in different motion directions do not interfere with each other. After the mass block 32 is affected by the angular velocity along the Y direction and generates the Coriolis force, it drives the detection frame 33 to move out of the plane. The second decoupling beam 52 ensures that the motion modes of the mass block 32 and the detection frame 33 in different motion directions do not interfere with each other.

[0025] The driving mode excitation electrode 61 receives the driving signal provided by the peripheral circuit and drives the corresponding driving frame 31 to reciprocate in the plane along the x direction. Figure 2 The direction indicated by the arrow is a reverse oscillating motion with the same frequency and amplitude, and the amplitude of the motion is 10-20um, which constitutes the driving mode of the gyroscope. The driving frame 31 and the mass block 32 perform linear motion but do not drive the detection frame 33 to perform linear motion; When the gyroscope is subjected to an angular velocity input with the Y axis as the axis, it will be subjected to a Coriolis force perpendicular to both the driving direction and the angular velocity direction. Figure 3The trend shown is that the detection frame 33 moves out of the plane around the y direction, and the upper and lower detection frames 33 make differential motion, forming the sensitive mode of the gyroscope. The mass block 32 and the detection frame 33 swing out of the plane, but do not drive the drive frame 31 to swing out of the plane. Through the sensitive mode detection electrode 62, the detection of the out-of-plane swing displacement of the detection frame 33 can be realized, and then the angular velocity information can be calculated. Among them, the dot in the circle represents the in-plane swing of the detection frame 33 perpendicular to the paper surface, and the cross in the circle represents the out-of-plane swing perpendicular to the paper surface.

[0026] In this embodiment, the sensitive mode detection electrode 62 can be additionally provided to realize closed-loop detection, or open-loop detection can be performed according to the current configuration scheme.

[0027] On the one hand, the two-level decoupling method is used to decouple the movement of the drive frame 31 and the movement of the detection frame 33, which can reduce the gyroscope orthogonal error from the structural level, further reduce the gyroscope's zero bias index, and lay the foundation for realizing a high-performance gyroscope; on the other hand, under the driving resonance state, the mass block 32 moves linearly, which can provide a larger driving displacement (>10um) than the traditional structure. The large driving displacement can improve the signal-to-noise ratio of the gyroscope and enhance the mechanical sensitivity, thereby compensating for the problem of reduced effective detection area and reduced mechanical sensitivity due to the two-level decoupling structure.

[0028] In this embodiment, the above-mentioned driving frame 31 is concave in shape, and the above-mentioned driving frame 31 has a first groove, and the above-mentioned first groove has a first groove opening, a first groove wall and a first groove bottom 311. The two above-mentioned first groove openings arranged along the x direction are opposite to each other, and the above-mentioned first anchor point 21 is arranged inside the above-mentioned first groove. The above-mentioned first spring beam 41 is connected to the above-mentioned first groove wall, the above-mentioned mass block 32 is embedded in the above-mentioned first groove, and the above-mentioned first decoupling beam 51 is located in the above-mentioned first groove and connected to the above-mentioned first groove wall.

[0029] In this embodiment, the first notch of the driving frame 31 faces the x-direction, the two first groove walls of the same first groove are arranged at a distance in the y-direction, and the first groove bottom of the same first groove is opposite to the first notch. One end of the first spring beam 41 is connected to the first anchor point 21, and the other end is connected to the first groove wall. One end of the first decoupling beam 51 is connected to the first groove wall of the driving frame 31, and the other end is connected to the mass block 32. By arranging the driving frame 31 and the mass block 32 to be mutually embedded, this connection method can realize that when the driving frame 31 moves along the X-axis, the mass block 32 is driven to move together, but when the mass block 32 moves out of the plane, it will not drive the mass block 32 to move out of the plane.

[0030] In this embodiment, the first groove wall is L-shaped, including a main body and an extension portion. The main body 312 extends along the x direction and is connected to the first groove bottom. The extension portion 313 extends along the y direction and is connected to one end of the main body 312 away from the first groove bottom. The first spring beam 41 is located in the first groove and is connected to the main body 312. The first decoupling beam 51 is located in the first groove and is connected to the extension portion 313. The extension portion 313 is connected to the adjacent extension portion 313 along the x direction through the first coupling beam 71.

[0031] In this embodiment, the first groove is similar to a T-shaped groove, that is, the size of the groove cavity portion of the first groove close to the bottom of the first groove along the y direction is smaller than the size of the first notch along the y direction. By setting the first coupling beam 71, it is possible to ensure that the driving frame of the gyroscope performs oscillation motion with the same frequency, equal amplitude and opposite direction. By setting the first groove wall of the driving frame to be L-shaped, the L-shape is mainly designed to achieve in-plane coupling between the driving frame 31 and the mass block 32 through the first decoupling beam 51, and out-of-plane decoupling connection.

[0032] In this embodiment, the mass block 32 is concave in shape, and has a second groove. The second groove has a second groove opening, a second groove wall 321 and a second groove bottom 322. The two second groove openings arranged along the x direction are opposite to each other. The first decoupling beam 51 is located outside the second groove and connected to the second groove bottom 322. The detection frame 33 is embedded in the second groove. The second decoupling beam 52 is located in the second groove and connected to the second groove wall 321.

[0033] In this embodiment, the second notch of the mass block 32 faces the x-direction, the two second groove walls of the same second groove are arranged at a distance along the y-direction, and the second groove bottom of the same second groove is opposite to the second notch. One end of the first decoupling beam 51 is connected to the first groove wall of the driving frame 31, and the other end is connected to the second groove wall of the mass block 32. One end of the second decoupling beam 52 is connected to the second groove wall of the mass block 32, and the other end is connected to the detection frame 33. By arranging the mass block 32 and the detection frame 33 to be mutually embedded, the function of the second decoupling beam 52 is that when the mass block 32 moves in the driving mode, the second decoupling beam 52 has a small stiffness along the X-axis, which can ensure that the detection frame 33 is not affected by the driving movement. At the same time, when the mass block 32 is subjected to the Coriolis force, the sensitive mode can drive the detection frame 33 to move after being excited.

[0034] In this embodiment, the anchor point unit also includes a fifth anchor point 25. A coupling lever 34 is provided on the side of the two driving frames 31 arranged along the y direction away from the center of the gyroscope. The coupling lever 34 is connected to the fifth anchor point 25 through a fifth spring beam 45. The coupling lever 34 has the freedom to swing around the Z-axis direction. Both ends of the coupling lever 34 are respectively connected to the two adjacent driving frames 31 along the y direction through a third decoupling beam 53.

[0035] In this embodiment, the coupling lever 34 extends along the y direction, and the fifth anchor point 25 is connected to the midpoint of the coupling lever 34 through the fifth spring beam 45. The third decoupling beam 53 is arranged so that the motion modes of the driving frame 31 and the coupling lever 34 in different motion directions do not interfere with each other, ensuring that the driving frame 31 can strictly move in the X direction. By setting the coupling lever 34, it can be ensured that the driving frame of the gyroscope performs oscillation motion with the same frequency, equal amplitude and opposite trend.

[0036] In this embodiment, the electrode unit further includes a driving mode detection electrode 63 and an orthogonal adjustment electrode 64 .

[0037] The mass block 32 is provided with a mass balance through hole, and the orthogonal adjustment electrode 64 is directly opposite to the mass balance through hole and constitutes an orthogonal stiffness adjustment structure. The orthogonal adjustment electrode 64 generates corresponding electrostatic negative stiffness to offset the orthogonal stiffness introduced by the processing error, so as to achieve the purpose of orthogonal correction and improve the output accuracy of the gyroscope. The orthogonal coupling error caused by the process manufacturing is reduced by adding orthogonal stiffness compensation electrodes. The high vacuum degree and high Q value inside the cavity of the gyroscope device are achieved by wafer-level vacuum bonding and deposition of getter, so that the invention has the potential of high precision and high performance.

[0038] The above gyroscope process is relatively easy to implement, is conducive to mass production and has low cost.

[0039] Embodiment 2 See also Figure 7 and Figure 8 As shown, one embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0040] The rest is the same as the first embodiment, except that, in this embodiment, the anchor point unit further includes a third anchor point 23 , and the extension portion 313 is further connected to the third anchor point 23 via a third spring beam 43 .

[0041] In this embodiment, the third anchor point 23 is disposed between two adjacent extension portions 313 along the x direction. By providing the third anchor point 23 and the third spring beam 43, the stability of the gyroscope can be improved when subjected to interference (vibration, impact load, etc.) along the z direction.

[0042] The working principle and working method of the gyroscope in the second embodiment are consistent with those in the first embodiment.

[0043] In this embodiment, the electrode unit further includes a sensitive mode feedback electrode 65. The sensitive mode feedback electrode 65 is used to enable open-loop detection or closed-loop detection.

[0044] Embodiment 3 See also Figures 9 to 14 As shown, one embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0045] The rest is the same as the first embodiment, except that, in this embodiment, the first decoupling beam 51 is connected to the second groove bottom, and the second groove wall is connected to the second groove wall adjacent to the second groove wall along the x direction through the second coupling beam 72 .

[0046] In this embodiment, the driving frame 31 is not in a concave shape but in a rectangular shape, and there is no connection between the two driving frames 31 arranged along the x direction. By providing the second coupling beam 72, it is possible to ensure that the two mass blocks perform seesaw motion in opposite directions, thereby improving the anti-interference characteristics of the gyroscope and separating the interference mode. The working principle and working method of the gyroscope of the third embodiment are consistent with those of the first embodiment.

[0047] In this embodiment, the above-mentioned detection frame 33 is an I-shape, and the above-mentioned detection frame 33 has two third grooves. The above-mentioned third groove has a third notch. The two third notches of the same above-mentioned detection frame 33 are respectively facing the positive direction of the Y-axis and the negative direction of the Y-axis, and part of the above-mentioned second coupling beam 72 extends into the above-mentioned third groove.

[0048] In this embodiment, the detection frame 33 is in an I-shape, and the area of ​​the detection frame is increased as much as possible. A larger area means a larger detection capacitance, higher sensitivity, higher precision, and better gyro performance.

[0049] In this embodiment, the anchor point unit further includes a fourth anchor point 24, and a side of the second groove bottom away from the center of the gyroscope is connected to the fourth anchor point 24 via a fourth spring beam 44, and the mass block 32 has the freedom to move linearly along the x direction and to swing around the y direction, and a side of the second groove bottom close to the center of the gyroscope is connected to the second groove bottom adjacent to the y direction via a third coupling beam 73.

[0050] In this embodiment, by setting the fourth spring beam 44, the fourth anchor point 24 and the third coupling beam 73, the main advantages of the fourth spring beam 44 and the fourth anchor point 24 are: shielding interference modes other than driving and sensitive modes, increasing the out-of-plane stiffness, and increasing the third coupling beam 73 for structural impact resistance: improving the robustness of sensitive modes, and enhancing anti-interference and anti-process error capabilities.

[0051] Embodiment 4 See also Figures 15 to 21As shown, one embodiment of the single-axis out-of-plane MEMS gyroscope of the present invention.

[0052] The rest is the same as the third embodiment, except that, in this embodiment, the fourth anchor point, the fourth spring beam and the third coupling beam are not provided. The second slot wall near the outer edge of the gyroscope is connected to the second slot wall adjacent to the x direction through the fourth coupling beam 74, and the second slot wall near the center of the gyroscope is connected to the second slot wall adjacent to the y direction through the fifth coupling beam 75.

[0053] In this embodiment, the fourth anchor, the fourth spring beam and the third coupling beam are not provided. The fifth coupling beam 75 is provided close to the center of the gyroscope, and the outer periphery of the fifth coupling beam 75 is an anchor point. The fifth coupling beam 75 is provided close to the center to change the coupling form, which is a different design scheme of the structure.

[0054] The working principle and working method of the gyroscope of the fourth embodiment are consistent with those of the first embodiment.

[0055] Obviously, the above embodiments are merely examples for clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the protection scope of the invention.

Claims

1. A single-axis out-of-plane MEMS gyroscope, characterized in that: include: substrate; An anchor point unit, the anchor point unit is fixed on the substrate, and the anchor point unit includes a first anchor point and a second anchor point; A motion unit, comprising four drive frames, the four drive frames are arranged in an array along the x-direction and the y-direction, the drive frames are connected to the first anchor point through a first spring beam, the drive frames have the freedom of linear motion along the x-direction, two mass blocks arranged along the x-direction are arranged between the two drive frames arranged along the x-direction, the mass blocks are connected to the adjacent drive frames along the x-direction through a first decoupling beam, a detection frame is arranged between the two mass blocks arranged along the x-direction, the detection frame is connected to the second anchor point through a second spring beam, the detection frame has the freedom of swinging around the y-direction, and the detection frame is connected to the adjacent two mass blocks along the x-direction through a second decoupling beam; The electrode unit is fixed on the substrate and includes a driving mode excitation electrode and a sensitive mode detection electrode. The driving mode excitation electrode is used to drive the driving frame to move linearly along the x direction, and the sensitive mode detection electrode is used to detect the out-of-plane swing displacement of the detection frame around the y direction.

2. The single-axis out-of-plane MEMS gyroscope according to claim 1, characterized in that: The driving frame is in a concave shape and has a first groove. The first groove has a first notch, a first groove wall located on the side of the first notch, and a first groove bottom facing the first notch. The two first notches arranged along the x direction are opposite to each other. The first anchor point is arranged inside the first groove. The first spring beam is connected to the first groove wall. The mass block is embedded in the first groove. The first decoupling beam is located in the first groove and connected to the first groove wall.

3. The single-axis out-of-plane MEMS gyroscope according to claim 2, characterized in that: The first groove wall is L-shaped, including a main body and an extension portion, the main body extends along the x direction and is connected to the first groove bottom, the extension portion extends along the y direction, one end of the extension portion is connected to an end of the main body away from the first groove bottom, the other ends of the two extension portions of the same driving frame are between the first notch, the first spring beam is located in the first groove and connected to the main body, the first decoupling beam is located in the first groove and connected to the extension portion, and the extension portion is connected to the adjacent extension portions along the x direction through the first coupling beam.

4. The single-axis out-of-plane MEMS gyroscope according to claim 3, characterized in that: The anchor point unit further includes a third anchor point, and the extension portion is further connected to the third anchor point via a third spring beam.

5. The single-axis out-of-plane MEMS gyroscope according to claim 1, characterized in that: The mass block is in a concave shape, and has a second groove. The second groove has a second notch, a second groove wall located on the side of the second notch, and a second groove bottom facing the second notch. The two second notches arranged along the x direction are opposite to each other. The first decoupling beam is located outside the second groove and connected to the second groove bottom. The detection frame is embedded in the second groove, and the second decoupling beam is located in the second groove and connected to the second groove wall.

6. The single-axis out-of-plane MEMS gyroscope according to claim 5, characterized in that: The second slot walls are connected to the adjacent second slot walls along the x direction through a second coupling beam.

7. The single-axis out-of-plane MEMS gyroscope according to claim 6, characterized in that: The detection frame is I-shaped and has two third grooves. The third groove has a third notch. The two third notches of the same detection frame are respectively facing the positive direction of the Y axis and the negative direction of the Y axis, and part of the second coupling beam extends into the third groove.

8. The single-axis out-of-plane MEMS gyroscope according to claim 5, characterized in that: The anchor point unit also includes a fourth anchor point, and a side of the second slot bottom away from the center of the gyroscope is connected to the fourth anchor point through a fourth spring beam, the mass block has the freedom to move linearly along the x direction and to swing around the y direction, and a side of the second slot bottom close to the center of the gyroscope is connected to the second slot bottom adjacent to the y direction through a third coupling beam.

9. The single-axis out-of-plane MEMS gyroscope according to claim 5, characterized in that: The second slot wall near the outer edge of the gyroscope is connected to the second slot wall adjacent to the gyroscope along the x direction through a fourth coupling beam, and the second slot wall near the center of the gyroscope is connected to the second slot wall adjacent to the y direction through a fifth coupling beam.

10. The single-axis out-of-plane MEMS gyroscope according to claim 1, characterized in that: The anchor point unit also includes a fifth anchor point. A coupling lever is provided on the side of the two driving frames arranged along the y direction away from the center of the gyroscope. The coupling lever is connected to the fifth anchor point through a fifth spring beam. The coupling lever has the freedom to swing around the Z-axis direction. The two ends of the coupling lever are respectively connected to the two adjacent driving frames along the y direction through a third decoupling beam.

Images