Compound semiconductor wafer rapid warehouse-in and warehouse-out detection device

Abstract

The invention discloses a compound semiconductor wafer rapid warehouse-in and warehouse-out detection device, and relates to the field of wafer detection, the compound semiconductor wafer rapid warehouse-in and warehouse-out detection device comprises a device body, two sides of the device body are symmetrically provided with detection racks, an inner cavity of the device body is movably connected with a Casset box assembly, an inner cavity of the Casset box assembly is rotatably connected with a first Casset box and a second Casset box, and the first Casset box and the second Casset box are movably connected with the detection racks. Placement grooves are symmetrically formed in the centers of the opposite sides of the first Casset box and the second Casset box, a detection camera is mounted at the top of the detection frame, and air pump seats are symmetrically mounted in inner cavities of the two placement grooves. According to the compound semiconductor wafer rapid warehouse-in and warehouse-out detection device, through the arrangement of the first Casset box and the second Casset box, the wafer reversing work can be rapidly completed, the top and the bottom of the wafer can be detected through the cooperation of the two detection cameras, the detection efficiency is improved, and the detection efficiency is improved. Therefore, the detection efficiency and the warehousing efficiency of the wafers can be effectively improved.

Description

Technical Field

[0001] The invention relates to the field of wafer detection, and in particular to a compound semiconductor wafer rapid warehouse entry and exit detection device. Background Art

[0002] Wafer refers to the silicon chip used to make silicon semiconductor circuits. Its original material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. The main processing methods of wafers are sheet processing and batch processing, that is, processing one or more wafers at the same time. As the feature size of semiconductors becomes smaller and smaller, the processing and measurement equipment becomes more and more advanced, new data characteristics have emerged in wafer processing. At the same time, the reduction in feature size makes the number of particles in the air during wafer processing increase the impact on the quality and reliability of the wafer after processing. As the cleanliness improves, new data characteristics have also emerged in the number of particles.

[0003] The material boxes used for wafer transportation are inconsistent with the material boxes used for on-site production testing, resulting in the need to perform wafer reversing, wafer sorting and inspection when entering and leaving the warehouse. Currently, manual single-wafer processing is used, which is inefficient and safety cannot be guaranteed.

[0004] Therefore, it is necessary to propose a compound semiconductor wafer rapid in-and-out warehouse detection device to solve the above problems. Summary of the invention

[0005] The main purpose of the present invention is to provide a compound semiconductor wafer rapid warehouse-in and warehouse-out detection device, which can effectively solve the problems in the background technology.

[0006] To achieve the above object, the technical solution adopted by the present invention is:

[0007] A compound semiconductor wafer fast in-and-out warehouse detection device, comprising a device body, detection racks symmetrically installed on both sides of the device body, a cassette box assembly movably connected in the inner cavity of the device body, a first cassette box and a second cassette box rotatably connected in the inner cavity of the cassette box assembly, placement grooves symmetrically opened in the middle of opposite sides of the first cassette box and the second cassette box, and a detection camera installed on the top of the detection rack;

[0008] An air pump seat is symmetrically installed in the inner cavity of the two placement grooves, a material discharge block is movably connected to the right side of the air pump seat on the left side, and support components are symmetrically movably connected to both ends of the right side of the second Cassette box;

[0009] A sheet sorting assembly is installed on the left side of the device body, the bottom of the inner cavity of the sheet sorting assembly is movably connected to a base, both ends of the top of the base are symmetrically movably connected to limit assemblies, a fixed seat is installed on the left side of the top of the base, and the right side of the fixed seat is movably connected to a lifting platform.

[0010] Preferably, a linear motor is installed in the inner cavity of the device body, the output end of the linear motor is connected to the Cassette box assembly, a servo motor is installed on the outer wall of the Cassette box assembly, the servo motor is installed with a first rotating shaft through a coupling, and the first rotating shaft is installed in the center of the inner cavity of the Cassette box assembly.

[0011] Preferably, one end of the first Cassette box and the second Cassette box are installed on the top and right side of the first rotating shaft, a feed chute is provided on the left side of the Cassette box assembly, and a through groove is provided on the top of the second Cassette box. The through groove and the feed chute have the same size, and the through groove is connected to the placement groove at the second Cassette box.

[0012] Preferably, an air hole is opened on the side of the air pump seat, a movable groove is opened on the right side of the left air pump seat, elastic bands are symmetrically installed on the top and bottom of the inner cavity of the movable groove, the side of the top of the blanking block is inclined, and a screw is installed on the bottom of the inner cavity of the movable groove.

[0013] Preferably, a rotating motor is installed on the outer wall of the air pump seat on the left side, and the rotating motor is connected to the screw rod through a second rotating shaft. The blanking block is movably connected in the inner cavity of the movable groove and threadedly connected to the outer wall of the screw rod, and the opposite sides of the two elastic bands are symmetrically installed on both sides of the blanking block.

[0014] Preferably, rollers are rotatably connected to the opposite sides of the two support assemblies, buffer pads are symmetrically installed on the right sides of the two support assemblies, and storage blocks are symmetrically rotatably connected to the opposite sides of the two support assemblies. The storage block is movably connected in the inner cavity of the second Cassette box, and a translation cylinder is installed in the inner cavity of the second Cassette box, and the right side of the translation cylinder is installed on the left side of the storage block.

[0015] Preferably, a warehouse door is installed on the outer wall of the storage block, universal wheels are symmetrically installed around the bottom of the base, a threaded rod is rotatably connected to the center of the inner cavity of the base, a first drive motor is installed on the outer wall of the base, and the first drive motor is connected to the threaded rod through a third rotating shaft.

[0016] Preferably, both of the two limiting components are arc-shaped, and the center of the bottom of the limiting component is movably connected in the inner cavity of the base and is threadedly connected to the outer wall of the threaded rod.

[0017] Preferably, a threaded column is rotatably connected to the center of the inner cavity of the limiting component, a second drive motor is installed on the top of the fixing seat, and the bottom of the second drive motor is connected to the threaded column through a fourth rotating shaft.

[0018] Preferably, the center of the left side of the lifting platform is movably connected in the inner cavity of the fixing seat and is threadedly connected to the outer wall of the second driving motor, and matching grooves are symmetrically opened in the center of both ends of the lifting platform, and the sizes of the matching grooves and the limiting components are matched.

[0019] Compared with the prior art, the present invention provides a compound semiconductor wafer rapid in-and-out warehouse detection device, which has the following beneficial effects:

[0020] 1. The compound semiconductor wafer rapid in-and-out storage detection device can drive the first Cassette box and the second Cassette box to move at the device body through the Cassette box assembly by starting the set linear motor, and can drive the first Cassette box and the second Cassette box to rotate by starting the set servo motor. During the rotation of the first Cassette box and the second Cassette box, the wafer installed at the first Cassette box can be flipped to the second Cassette box, so that the wafer flipping work can be completed quickly. In conjunction with the two detection cameras set, the top and bottom of the wafer can be inspected respectively, so that the detection efficiency and storage efficiency of the wafer can be effectively improved.

[0021] 2. The compound semiconductor wafer rapid in-and-out warehouse detection device can adsorb the wafers to be detected by starting the set air pump seat and cooperating with the opened air holes. When the wafer is transferred, its stability can be effectively improved. When it is flipped, it can also play a certain buffering effect. By starting the set translation cylinder, the support assembly can be driven to move through the storage block. When the wafer moves from the first Cassette box to the second Cassette box, the buffer pad on the side of the support assembly can be used for buffering and material connection. When the translation cylinder moves the storage block to the inner cavity of the second Cassette box, the support assembly will contact the second Cassette box. At this time, the support assembly can be blocked, thereby detaching from the wafer, so that the wafer can enter the inner cavity of the second Cassette box normally.

[0022] 3. The compound semiconductor wafer rapid in-and-out warehouse detection device can drive the lead screw to rotate by starting the set rotating motor, so that the unloading block can be threadedly connected with the lead screw. At this time, the unloading block can drive the wafer at the second Cassette box to move to the left, so as to facilitate the subsequent wafer sorting after the inspection.

[0023] 4. The compound semiconductor wafer rapid entry and exit detection device can drive the threaded column to rotate by starting the second drive motor, so that the left side of the lifting platform can be threadedly connected to it, so that the lifting platform can move up and down. When sorting the wafers, the lifting platform can be adjusted according to the thickness of the wafers and the amount of material unloaded, so that the wafers can be stacked on the top of the lifting platform, thereby improving the wafer sorting efficiency.

[0024] 5. The compound semiconductor wafer rapid entry and exit detection device can drive the threaded rod to rotate by starting the first driving motor, so that the bottom of the limit assembly can be threadedly connected to the threaded rod. At this time, the two limit assemblies can move to the opposite side, so that the wafer on the top of the lifting platform can be limited. By opening the set warehouse door and cooperating with the set universal wheels, the wafers after wafer sorting can be subsequently transported. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 It is a schematic diagram of the structure of the Cassette box assembly of the present invention;

[0027] Figure 3 It is a structural schematic diagram of the air pump seat on the left side of the present invention;

[0028] Figure 4 It is a structural schematic diagram of the blanking block of the present invention;

[0029] Figure 5 It is a schematic diagram of the structure of the support assembly of the present invention;

[0030] Figure 6 It is a schematic diagram of the structure of the wafer sorting assembly of the present invention.

[0031] In the figure: 1. Device body; 2. Linear motor; 3. Detection frame; 4. Detection camera; 5. Cassette box assembly; 6. Servo motor; 7. First Cassette box; 8. Second Cassette box; 9. Through slot; 10. Feeding slot; 11. Placement slot; 12. Air hole; 13. Air pump seat; 14. Movable slot; 15. Elastic belt; 16. Feeding block; 17. Screw; 18. Rotating motor; 19. Support assembly; 20. Roller; 21. Buffer pad; 22. Storage block; 23. Translation cylinder; 24. Sheet sorting assembly; 25. Warehouse door; 26. Base; 27. Universal wheel; 28. First drive motor; 29. ​​Threaded rod; 30. Limiting assembly; 31. Fixed seat; 32. Second drive motor; 33. Threaded column; 34. Lifting platform; 35. Adapter slot. DETAILED DESCRIPTION

[0032] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0033] Embodiment 1:

[0034] like Figure 1 , Figure 2 As shown, a compound semiconductor wafer fast in-and-out warehouse detection device comprises a device body 1, detection frames 3 are symmetrically installed on both sides of the device body 1, a Cassette box assembly 5 is movably connected in the inner cavity of the device body 1, a first Cassette box 7 and a second Cassette box 8 are rotatably connected in the inner cavity of the Cassette box assembly 5, a placement groove 11 is symmetrically opened in the middle of the opposite side of the first Cassette box 7 and the second Cassette box 8, a linear motor 2 is installed in the inner cavity of the device body 1, and the output end of the linear motor 2 is connected to the Cassette box 1. The cassette box assembly 5 is connected, a servo motor 6 is installed on the outer wall of the cassette box assembly 5, and the servo motor 6 is installed with a first rotating shaft through a coupling, and the first rotating shaft is installed in the middle of the inner cavity of the cassette box assembly 5, one end of the first cassette box 7 and the second cassette box 8 are installed on the top and right side of the first rotating shaft, a material discharge chute 10 is opened on the left side of the cassette box assembly 5, and a through groove 9 is opened on the top of the second cassette box 8, and the through groove 9 and the material discharge chute 10 are of the same size, and the through groove 9 is connected with the placement groove 11 at the second cassette box 8;

[0035] By starting the set linear motor 2, the first Cassette box 7 and the second Cassette box 8 can be driven to move at the device body 1 through the Cassette box assembly 5, and by starting the set servo motor 6, the first Cassette box 7 and the second Cassette box 8 can be driven to rotate. During the rotation of the first Cassette box 7 and the second Cassette box 8, the wafer installed at the first Cassette box 7 can be flipped to the second Cassette box 8, so that the wafer flipping work can be completed quickly, and with the two detection cameras 4 set, the top and bottom of the wafer can be inspected respectively, so that the inspection efficiency and warehousing efficiency of the wafer can be effectively improved.

[0036] Embodiment 2:

[0037] like Figure 1-Figure 5As shown, a compound semiconductor wafer rapid in-and-out warehouse detection device, two placement slots 11 inner cavities are symmetrically installed with air pump seats 13, the right side of the left air pump seat 13 is movably connected with a feed block 16, the two ends of the right side of the second Cassette box 8 are symmetrically movably connected with support components 19, the side of the air pump seat 13 is provided with an air hole 12, the right side of the left air pump seat 13 is provided with a movable slot 14, the top and bottom of the inner cavity of the movable slot 14 are symmetrically installed with elastic bands 15, the side of the top of the feed block 16 is inclined, the bottom of the inner cavity of the movable slot 14 is installed with a screw rod 17, the outer wall of the left air pump seat 13 is installed with a rotating motor 18, and the rotating motor 18 is rotated by The second rotating shaft is connected to the screw 17, the material discharge block 16 is movably connected in the inner cavity of the movable groove 14 and is threadedly connected to the outer wall of the screw 17, the two elastic bands 15 are symmetrically installed on the two sides of the material discharge block 16 on opposite sides, the two supporting components 19 are rotatably connected to the rollers 20 on the opposite sides, the two supporting components 19 are symmetrically installed with buffer pads 21 on the right sides, and the two supporting components 19 are symmetrically rotatably connected to the storage block 22 on the opposite sides, and the storage block 22 is movably connected in the inner cavity of the second Cassette box 8, and a translation cylinder 23 is installed in the inner cavity of the second Cassette box 8, and the right side of the translation cylinder 23 is installed on the left side of the storage block 22;

[0038] By starting the set air pump seat 13 and cooperating with the opened air hole 12, the wafer to be inspected can be adsorbed, which can effectively improve the stability of the wafer when it is transferred, and can also play a certain buffering effect when it is flipped. By starting the set translation cylinder 23, the support assembly 19 can be driven to move through the storage block 22. When the wafer moves from the first Cassette box 7 to the second Cassette box 8, the buffer pad 21 on the side of the support assembly 19 can be used to buffer and receive the material. When the translation cylinder 23 moves the storage block 22 to the inner cavity of the second Cassette box 8, the support assembly 19 will contact the second Cassette box 8. At this time, the support assembly 19 can be blocked, thereby separating from the wafer, so that the wafer can normally enter the inner cavity of the second Cassette box 8;

[0039] By starting the rotating motor 18, the screw rod 17 can be driven to rotate, so that the unloading block 16 can be threadedly connected to the screw rod 17. At this time, the unloading block 16 can drive the wafer at the second Cassette box 8 to move to the left, so as to facilitate the subsequent wafer sorting after the inspection is completed.

[0040] Embodiment three:

[0041] like Figure 1 , Figure 6As shown, a compound semiconductor wafer rapid storage and retrieval detection device, a wafer sorting assembly 24 is installed on the left side of the device body 1, the bottom of the inner cavity of the wafer sorting assembly 24 is movably connected to a base 26, the two ends of the top of the base 26 are symmetrically movably connected to a limit assembly 30, a fixed seat 31 is installed on the left side of the top of the base 26, and a lifting platform 34 is movably connected to the right side of the fixed seat 31, a warehouse door 25 is installed on the outer wall of the storage block 22, universal wheels 27 are symmetrically installed around the bottom of the base 26, a threaded rod 29 is rotatably connected to the center of the inner cavity of the base 26, and a first drive motor 28 is installed on the outer wall of the base 26. The first drive motor 28 is connected to the third shaft through the third shaft. The threaded rod 29 is connected, and the two limit assemblies 30 are both arc-shaped. The center of the bottom of the limit assembly 30 is movably connected in the inner cavity of the base 26 and is threadedly connected to the outer wall of the threaded rod 29. The center of the inner cavity of the limit assembly 30 is rotatably connected with a threaded column 33. The top of the fixed seat 31 is installed with a second drive motor 32. The bottom of the second drive motor 32 is connected to the threaded column 33 through a fourth rotating shaft. The center of the left side of the lifting platform 34 is movably connected in the inner cavity of the fixed seat 31 and is threadedly connected to the outer wall of the second drive motor 32. The center of both ends of the lifting platform 34 is symmetrically provided with an adapter groove 35, and the size of the adapter groove 35 and the limit assembly 30 are adapted.

[0042] By starting the second driving motor 32, the threaded column 33 can be driven to rotate, so that the left side of the lifting platform 34 can be threadedly connected thereto, so that the lifting platform 34 can move up and down. When wafers are sorted, the lifting platform 34 can be adjusted according to the thickness of the wafers and the number of materials to be unloaded, so that the wafers can be stacked on the top of the lifting platform 34, thereby improving the wafer sorting efficiency;

[0043] By starting the first driving motor 28, the threaded rod 29 can be driven to rotate, so that the bottom of the limit assembly 30 can be threadedly connected to the threaded rod 29. At this time, the two limit assemblies 30 can move to the opposite side, so that the wafer on the top of the lifting platform 34 can be limited. By opening the warehouse door 25 and cooperating with the universal wheel 27, the wafers after wafer sorting can be subsequently transported.

[0044] It should be noted that the present invention is a compound semiconductor wafer rapid warehouse-in and warehouse-out detection device, when in use.

[0045] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A compound semiconductor wafer rapid in-and-out warehouse detection device, comprising a device body (1), characterized in that: Detection frames (3) are symmetrically installed on both sides of the device body (1); a Cassette box assembly (5) is movably connected in the inner cavity of the device body (1); a first Cassette box (7) and a second Cassette box (8) are rotatably connected in the inner cavity of the Cassette box assembly (5); placement grooves (11) are symmetrically opened in the middle of opposite sides of the first Cassette box (7) and the second Cassette box (8); and a detection camera (4) is installed on the top of the detection frame (3); An air pump seat (13) is symmetrically installed in the inner cavity of the two placement grooves (11), a material discharge block (16) is movably connected to the right side of the left air pump seat (13), and support components (19) are symmetrically movably connected to the two ends of the right side of the second cassette box (8); A sheet sorting assembly (24) is installed on the left side of the device body (1); the bottom of the inner cavity of the sheet sorting assembly (24) is movably connected to a base (26); the two ends of the top of the base (26) are symmetrically movably connected to a limit assembly (30); a fixed seat (31) is installed on the left side of the top of the base (26); and the right side of the fixed seat (31) is movably connected to a lifting platform (34).

2. A compound semiconductor wafer rapid in-and-out warehouse detection device according to claim 1, characterized in that: A linear motor (2) is installed in the inner cavity of the device body (1), and the output end of the linear motor (2) is connected to the Cassette box assembly (5). A servo motor (6) is installed on the outer wall of the Cassette box assembly (5). The servo motor (6) is installed with a first rotating shaft through a coupling, and the first rotating shaft is installed in the center of the inner cavity of the Cassette box assembly (5).

3. A compound semiconductor wafer rapid in-and-out warehouse detection device according to claim 1, characterized in that: One end of the first Cassette box (7) and the second Cassette box (8) are installed on the top and right side of the first rotating shaft, a material discharge chute (10) is provided on the left side of the Cassette box assembly (5), a through groove (9) is provided on the top of the second Cassette box (8), the through groove (9) and the material discharge chute (10) have similar dimensions, and the through groove (9) is connected to a placement groove (11) at the second Cassette box (8).

4. A compound semiconductor wafer rapid in-and-out warehouse detection device according to claim 1, characterized in that: An air hole (12) is provided on the side of the air pump seat (13), and a movable groove (14) is provided on the right side of the left air pump seat (13). Elastic bands (15) are symmetrically installed at the top and bottom of the inner cavity of the movable groove (14). The side of the top of the blanking block (16) is inclined, and a screw rod (17) is installed at the bottom of the inner cavity of the movable groove (14).

5. The compound semiconductor wafer rapid in-and-out warehouse detection device according to claim 1, characterized in that: A rotating motor (18) is installed on the outer wall of the air pump seat (13) on the left side, and the rotating motor (18) is connected to the screw rod (17) through a second rotating shaft. The lower material block (16) is movably connected in the inner cavity of the movable groove (14) and is threadedly connected to the outer wall of the screw rod (17). The opposite sides of the two elastic bands (15) are symmetrically installed on both sides of the lower material block (16).

6. A compound semiconductor wafer rapid in-and-out warehouse detection device according to claim 1, characterized in that: A roller (20) is rotatably connected to one side opposite to the other of the two support assemblies (19), a buffer pad (21) is symmetrically installed on the right side of the two support assemblies (19), and a storage block (22) is symmetrically rotatably connected to one side opposite to the other of the two support assemblies (19), the storage block (22) is movably connected in the inner cavity of the second Cassette box (8), a translation cylinder (23) is installed in the inner cavity of the second Cassette box (8), and the right side of the translation cylinder (23) is installed on the left side of the storage block (22).

7. The compound semiconductor wafer rapid storage and retrieval detection device according to claim 1, characterized in that: The outer wall of the storage block (22) is provided with a warehouse door (25), universal wheels (27) are symmetrically provided around the bottom of the base (26), a threaded rod (29) is rotatably connected to the center of the inner cavity of the base (26), a first drive motor (28) is provided on the outer wall of the base (26), and the first drive motor (28) is connected to the threaded rod (29) via a third rotating shaft.

8. A compound semiconductor wafer rapid storage and retrieval detection device according to claim 7, characterized in that: The two limiting components (30) are both arc-shaped, and the center of the bottom of the limiting component (30) is movably connected in the inner cavity of the base (26) and is threadedly connected to the outer wall of the threaded rod (29).

9. The compound semiconductor wafer rapid storage and retrieval detection device according to claim 1, characterized in that: A threaded column (33) is rotatably connected to the center of the inner cavity of the limiting assembly (30), a second drive motor (32) is installed on the top of the fixing seat (31), and the bottom of the second drive motor (32) is connected to the threaded column (33) via a fourth rotating shaft.

10. A compound semiconductor wafer rapid storage and retrieval detection device according to claim 9, characterized in that: The center of the left side of the lifting platform (34) is movably connected in the inner cavity of the fixing seat (31) and is threadedly connected to the outer wall of the second driving motor (32). The center of both ends of the lifting platform (34) is symmetrically provided with an adaption groove (35), and the size of the adaption groove (35) is adapted to that of the limit assembly (30).

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