Quartz claw product welding jig and welding method thereof

Abstract

The invention relates to the technical field of quartz product machining equipment, in particular to a quartz claw type product welding jig and a welding method thereof. The concentric shaft clamping assembly is arranged on the workbench and used for enabling the shaft rod to be in a vertical state; the Z-axis lifting sliding table is used for adjusting the position of the shaft rod in the vertical Z-axis direction; the supporting claw clamping assembly is used for clamping the supporting claw; the X-axis and Z-axis sliding table is used for driving the supporting claw to be close to or away from the shaft rod in the horizontal X-axis direction and driving the supporting claw to move in the vertical Z-axis direction so as to adjust the welding position of the supporting claw and the shaft rod. According to the clamping device, the supporting claw clamping assemblies are arranged, then the Z-axis lifting sliding table is arranged, and the shaft rod is rotatably arranged, so that the universality of the clamping device is effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz product processing equipment, and more specifically, to a quartz claw product welding jig and a welding method thereof. Background Art

[0002] As a key component in semiconductor epitaxial equipment, the design, manufacturing and testing of quartz claws must meet extremely high precision standards to ensure that the wafer can maintain a relatively stable horizontal state in a complex process environment, which is crucial to ensuring product quality.

[0003] The structure of the quartz claw is mainly composed of two core parts: the shaft part and the support claw part. As the center of support and rotation, the shaft part needs to have excellent mechanical strength and meet precise dimensional tolerances; while the support claw part is responsible for carrying and fixing the wafer, and its design must fully consider the size, shape and weight distribution of the wafer to ensure balanced force and reduce vibration and deviation.

[0004] The Chinese invention patent application with publication number CN115557683A discloses a processing jig for quartz shaft products. However, the processing jig has low versatility, resulting in at least the following problems:

[0005] 1. The shaft of the quartz claw is clamped by a flange sleeve, a collet nut and a graphite collet. After the shaft is clamped by this clamping method, the shaft cannot rotate, which makes it impossible to ensure the verticality of the plane formed by the top of several supporting claws and the center line of the shaft.

[0006] 2. The processing jig mentioned above fixes each quartz bottom claw with a separate clamp, resulting in the position and number of each supporting claw clamp being determined during the design and unable to be adjusted to suit different models of products (different models of quartz claws have different numbers of supporting claws, ranging from 3 to 6). Summary of the invention

[0007] The main purpose of the present invention is to provide a quartz claw product welding jig and a welding method thereof to solve at least one technical problem mentioned in the background technology.

[0008] In order to solve the above technical problems, on the one hand, the present invention proposes a welding fixture for quartz claw products, the quartz claw comprises: a shaft and a supporting claw arranged on the shaft, wherein the welding fixture comprises:

[0009] Workbench;

[0010] A concentric shaft clamping assembly is arranged on the workbench and is used to clamp the shaft in a vertical state, and the shaft can rotate on the concentric shaft clamping assembly;

[0011] The Z-axis lifting slide is used to adjust the position of the shaft in the vertical Z-axis direction;

[0012] A supporting claw clamping assembly, used for clamping the supporting claw;

[0013] And an X-axis and Z-axis slide table is used to drive the supporting claw to approach or move away from the shaft rod along the horizontal X-axis direction, and drive the supporting claw to move along the vertical Z-axis direction to adjust its welding position with the shaft rod.

[0014] By setting a set of support claw clamping components, setting a Z-axis lifting slide, and setting the shaft rod to be rotatable, its versatility is effectively improved. On the one hand, the required number of support claws can be welded on the shaft rod according to the needs; on the other hand, it can ensure that the distance between the outer edge of each support claw on the shaft rod and the axis of the shaft rod is consistent, thereby improving the accuracy of the produced support claws.

[0015] In the above technical solution, further, the workbench includes: an upper top plate, a lower bottom plate and a connecting rod arranged to connect the two, and a hole for the shaft rod to pass through is opened on the upper top plate;

[0016] Among them, the Z-axis lifting slide is arranged on the lower bottom plate, the support claw clamping assembly is arranged on the upper top plate, and the concentric axis clamping assembly is arranged on the bottom of the upper top plate.

[0017] In any of the above technical solutions, further, it also includes:

[0018] The frame has rollers arranged around the bottom;

[0019] The lower base plate is detachably arranged on the frame; a handle is also arranged on the lower base plate.

[0020] In any of the above technical solutions, further, the concentric shaft clamping assembly includes:

[0021] A mounting frame is arranged at the bottom of the upper top plate;

[0022] The concentric shaft is a hollow structure and is vertically arranged on the mounting frame;

[0023] The clamping parts have two groups and are respectively arranged at the upper and lower ends of the concentric shaft. After the shaft rod is embedded in the concentric shaft, the two groups of clamping parts respectively clamp the parts of the shaft rod located at the two ends of the concentric shaft.

[0024] The concentric shaft can be rotatably arranged on the mounting frame with its axis as the rotation center.

[0025] In any of the above technical solutions, further, both ends of the concentric shaft are provided with tapered grooves, and the diameter of the tapered grooves gradually decreases from the outside to the inside; the clamping part includes:

[0026] A collet having a hollow chamber for the shaft to pass through, the outer walls of both ends of the collet are conical structures, and the outer wall of one end is adapted to the conical groove, the end is embedded in the conical groove, and the other end is located outside the conical groove;

[0027] The nut has a threaded hole at one end and is threadedly connected to the outer wall of the end of the coaxial shaft, and a tapered hole at the other end and is adapted to the tapered structure of one end of the collet extending out of the coaxial shaft;

[0028] Wherein, both ends of the collet are provided with openings, so that when the collet is squeezed by the nut and the coaxial shaft, the diameter of the hollow chamber on the collet can be reduced to clamp the shaft.

[0029] In any of the above technical solutions, further, the mounting frame includes: an upper flange; a lower flange; and a connecting column for connecting the upper flange and the lower flange;

[0030] Among them, bearings are arranged in the middle of the upper flange and the lower flange, and the coaxial shaft is rotatably arranged on the upper flange and the lower flange through the bearings, and its two ends pass through and extend out of the upper flange and the lower flange respectively.

[0031] In any of the above technical solutions, further, it also includes:

[0032] The rotating table is arranged on the Z-axis lifting slide, and is used for clamping the bottom of the shaft rod and driving the shaft rod to rotate.

[0033] In any of the above technical solutions, further, the support claw clamping assembly includes:

[0034] A mounting seat is arranged on the X-axis and Z-axis slide table;

[0035] A clamping seat, arranged on the mounting seat;

[0036] Wherein, a limiting groove is provided on the clamp seat for the end of the supporting claw to be embedded, and a detachable limiting baffle is provided on the limiting groove, and the limiting baffle is used to limit the supporting claw from leaving the clamp seat.

[0037] On the other hand, a welding method for quartz claw products is also provided, and the specific steps of the welding method are as follows:

[0038] S1. Pass the shaft through the hole of the upper plate from top to bottom, and make its bottom rest on the Z-axis lifting slide;

[0039] S2, control the Z-axis lifting slide to make the upper end of the shaft extend out of the upper top plate to a certain height;

[0040] S3, vertically clamping the shaft by means of a concentric shaft clamping assembly;

[0041] S4, placing the supporting claw on the supporting claw clamping assembly and clamping it;

[0042] S5, control the X-axis and Z-axis slides, first drive the support claw clamping assembly to move horizontally, so that the welding end of the support claw on it abuts against the shaft rod, and then drive the support claw clamping assembly to move in the vertical direction, so that the welding end of the support claw on it is aligned with the welding position of the shaft rod;

[0043] S6. Welding the connection between the support claw and the shaft rod using a welding gun;

[0044] S7, control the shaft rod to rotate so that its other welding position is aligned with the support claw clamping assembly, and then return to step S4 until all the support claws are welded to the shaft rod. In this way, the welding work of one quartz claw is completed.

[0045] Beneficial effects: Compared with the prior art, the use of the concentric shaft clamping assembly has at least the following technical effects:

[0046] The clamped shaft can rotate about its center line, which reduces the circular runout of the shaft side, that is, reduces the error of the distance from the outer edge of the supporting claw to the axis after welding N supporting claws;

[0047] The verticality of the shaft and the top plane is no longer important, which reduces the difficulty of fixture processing and installation;

[0048] It can be ensured that the verticality between the plane formed by the top ends of the N supporting claws and the quartz shaft rod meets the requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0050] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0051] Figure 2 It is a partial structural schematic diagram of the present invention;

[0052] Figure 3 yes Figure 2 Schematic diagram of the internal structure;

[0053] Figure 4 It is a schematic diagram of the exploded structure of the concentric shaft clamping assembly of the present invention;

[0054] Figure 5 It is a structural schematic diagram of the X-axis and Z-axis slide table of the present invention.

[0055] The following are the descriptions of the reference numerals:

[0056] 10. Quartz claw; 11. Shaft; 12. Support claw; 100. Rack; 110. Workbench; 111. Upper plate; 112. Lower plate; 113. Connecting rod; 114. Handle; 120. Roller; 200. Concentric axis clamping assembly; 210. Mounting frame; 211. Upper flange; 212. Lower flange; 213. Connecting column; 220. Concentric axis; 230. Clamping part; 231. Collet; 2311. Opening; 2312. Annular groove; 232. Nut; 300. Z-axis lifting slide; 400. Support claw clamping assembly; 410. Mounting seat; 420. Clamping seat; 421. Limiting groove; 422. Limiting baffle; 500. X-axis and Z-axis slides; 600. Rotating table. DETAILED DESCRIPTION

[0057] Below, the example embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0058] It should be noted that, as shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not specifically refer to the singular, but may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0059] If the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0060] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0061] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0062] The quartz claw 10 is mainly composed of a shaft 11 and a supporting claw 12 arranged on the shaft 11. The number of the supporting claws 12 is generally N, 3≤N≤6, and is selected according to different needs. Since the existing equipment for producing quartz claws 10 can only produce quartz claws 10 of the same type, the versatility is low, so it needs to be improved.

[0063] The following embodiments will be used to describe in detail a quartz claw product welding fixture and a welding method thereof of the present application.

[0064] Embodiment 1:

[0065] like Figure 1-Figure 5 As shown, in the present embodiment, a quartz claw product welding jig is proposed, including: a workbench 110; a coaxial axis clamping assembly 200, which is arranged on the workbench 110 and is used to clamp the shaft 11 in a vertical state, and the shaft 11 can rotate on the coaxial axis clamping assembly 200; a Z-axis lifting slide 300, which is used to adjust the position of the shaft 11 in the vertical Z-axis direction; a support claw clamping assembly 400, which is used to clamp the support claw 12; and an X-axis Z-axis slide 500, which is used to drive the support claw 12 to approach or move away from the shaft 11 along the horizontal X-axis direction, and drive the support claw 12 to move along the vertical Z-axis direction to adjust its welding position with the shaft 11.

[0066] The welding jig also has a frame 100, which can be moved by rollers 120 arranged around the bottom. The workbench 110 is horizontally mounted on the frame 100; the concentric axis clamping assembly 200 is used to clamp the vertical shaft 11 and ensure that the shaft 11 is vertical to the horizontal plane; the Z-axis lifting slide 300 is arranged below the concentric axis clamping assembly 200, used to clamp the bottom of the shaft 11, and can adjust the height of the shaft 11 before the concentric axis clamping assembly 200 clamps the shaft 11, so that the shaft 11 can cooperate with the support claw 12 on the support claw clamping assembly 400.

[0067] Specifically, the height of the shaft 11 is first adjusted by the Z-axis lifting slide 300, and then it is positioned and made vertical by the concentric shaft clamping assembly 200. Next, the support claw 12 is installed on the support claw clamping assembly 400, and the welding position of the support claw 12 and the shaft 11 is adjusted by the X-axis Z-axis slide 500. After the support claw 12 and the shaft 11 are connected, the contact position of the two is welded by a welding gun. When welding the next support claw 12, it is only necessary to rotate the shaft 11, adjust the position of the shaft 11, and then install the support claw 12 to be welded on the support claw clamping assembly 400. If it is found that there is a deviation in the connection between the support claw 12 and the shaft 11 at this time, it indicates that the support claw 12 is different in size from the previous support claw 12, there are some problems, and the support claw 12 needs to be replaced.

[0068] By setting up a group of support claw clamping assemblies 400, and then setting up a Z-axis lifting slide 300 and making the shaft rod 11 rotatable, its versatility is effectively improved. On the one hand, the required number of support claws 12 can be welded on the shaft rod 11 as needed; on the other hand, it can ensure that the outer edges of each support claw 12 on the shaft rod 11 are at a consistent distance from the axis of the shaft rod 11, thereby improving the accuracy of the produced support claws 12.

[0069] It should be noted that the workbench 110 is divided into a layered structure to facilitate the installation of various devices. Specifically, the workbench 110 includes: an upper top plate 111, a lower bottom plate 112, and a connecting rod 113 provided to connect the two. The upper top plate 111 is provided with a hole for the shaft rod 11 to pass through;

[0070] The Z-axis lifting slide 300 is disposed on the lower base plate 112 , the support claw clamping assembly 400 is disposed on the upper top plate 111 , and the concentric axis clamping assembly 200 is disposed at the bottom of the upper top plate 111 .

[0071] Embodiment 2:

[0072] This embodiment is a further improvement made on the basis of the first embodiment.

[0073] like Figure 2-Figure 4 As shown, in this embodiment, the concentric shaft clamping assembly 200 includes: a mounting frame 210, which is arranged at the bottom of the upper top plate 111; a concentric shaft 220, which is a hollow structure and is vertically arranged on the mounting frame 210; a clamping portion 230, which has two groups and is respectively arranged at the upper and lower ends of the concentric shaft 220. After the shaft 11 is embedded in the concentric shaft 220, the two groups of clamping portions 230 respectively clamp the parts of the shaft 11 located at the two ends of the concentric shaft 220;

[0074] The concentric shaft 220 can be rotatably disposed on the mounting frame 210 with its axis as the rotation center.

[0075] First, insert the shaft 11 from top to bottom into the concentric shaft 220; then, operate the clamping part 230 to clamp the inserted end of the shaft 11. Since the concentric shaft 220 can rotate freely with its axis as the rotation center, the shaft 11 can be easily driven to rotate, and at the same time, the shaft 11 can be ensured to be vertical to the horizontal plane, which greatly improves work efficiency and processing accuracy.

[0076] In this embodiment, it should be noted that the mounting frame 210 includes: an upper flange 211; a lower flange 212; and a connecting column 213 for connecting the upper flange 211 and the lower flange 212;

[0077] The upper flange 211 and the lower flange 212 are both provided with bearings in the middle, and the coaxial shaft 220 is rotatably provided on the upper flange 211 and the lower flange 212 through the bearings, and its two ends pass through and extend out of the upper flange 211 and the lower flange 212 respectively.

[0078] The upper flange 211 and the lower flange 212 are the main load-bearing and positioning components of the mounting frame 210. They are located at the top and bottom of the mounting frame 210, respectively, and are tightly connected through the connecting column 213 to form a stable support frame. The bearing is a crucial component of the mounting frame 210, which is installed in the middle of the upper flange 211 and the lower flange 212, respectively, to support the concentric shaft 220 and allow it to rotate freely with the axis as the rotation center.

[0079] By adopting the ingenious combination and precise installation of the upper flange 211, the lower flange 212, the connecting column 213 and the bearing, it can be ensured that the coaxial shaft 220 remains stable, precise and reliable during the rotation process.

[0080] Embodiment three:

[0081] This embodiment is a further improvement made on the basis of the second embodiment.

[0082] like Figure 2-Figure 4As shown, in this embodiment, the connecting column 213 is a hexagonal stud, and both ends of the hexagonal stud are connected to the upper flange 211 and the lower flange 212 by screws.

[0083] The design of using hexagonal studs as the connecting columns 213 and connecting the upper flange 211 and the lower flange 212 by screws can not only provide a stable connection and support function, but also facilitate installation, disassembly and maintenance work.

[0084] Embodiment 4:

[0085] This embodiment is a further improvement made on the basis of the second and third embodiments.

[0086] like Figure 2-Figure 4 As shown, in this embodiment, conical grooves are provided at both ends of the concentric shaft 220, and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping part 230 includes: a collet 231, which has a hollow chamber for the shaft 11 to pass through, and the outer walls of both ends thereof are conical structures, and the outer wall of one end thereof is adapted to the conical groove, and the end is embedded in the conical groove, and the other end is located outside the conical groove; a nut 232, one end hole of which is a threaded hole and is threadedly connected to the outer wall of the end of the concentric shaft 220, and the other end hole is a conical hole and is adapted to the conical structure of one end of the collet 231 extending out of the concentric shaft 220;

[0087] Both ends of the collet 231 are provided with openings 2311 , so that when the collet 231 is squeezed by the nut 232 and the coaxial shaft 220 , the diameter of the hollow chamber therein can be reduced to clamp the shaft 11 .

[0088] In this embodiment, through the mutual cooperation of the concentric shaft 220, the tapered groove, the collet 231 and the nut 232, the clamping portion 230 can effectively clamp the shaft rod 11. This design is not only simple in structure but also easy to operate. The shaft rod 11 can be clamped or loosened by rotating the nut 232, which is very suitable for application scenarios of quartz claw 10 processing and detection.

[0089] Specifically, after the shaft 11 is inserted into the coaxial shaft 220, by rotating the nut 232, when the inner wall of the tapered hole on the nut 232 abuts against the tapered surface of the upper end of the collet 231 and an external force is applied, the collet 231 will move into the coaxial shaft 220. During the movement, the interior of the collet 231 gradually shrinks and abuts against the shaft 11, thereby clamping the shaft 11.

[0090] It should be noted that there are multiple openings 2311 distributed along the circumferential direction of the collet 231. By providing multiple openings 2311, the outer wall of the collet 231 can be easily deformed after being squeezed by the outside (nut 232) to clamp the shaft 11.

[0091] It should be noted that the outer wall of the nut 232 is provided with knurling to facilitate the staff to rotate the nut 232.

[0092] It should be noted that there is also an annular groove 2312 arranged radially inward on the outer wall of the collet 231 . The annular groove 2312 is located between the two conical structures. This arrangement enables the collet 231 to clamp the shaft 11 more effectively.

[0093] Embodiment five:

[0094] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0095] like Figure 1 , Figure 2 , Figure 3 , Figure 5 As shown, in this embodiment, it also includes: a rotating table 600, which is arranged on the Z-axis lifting slide 300, for clamping the bottom of the shaft 11 and driving the shaft 11 to rotate.

[0096] By providing the rotating platform 600 , when the supporting claw 12 on the supporting claw clamping assembly 400 is docked with the shaft 11 , it is convenient to accurately and quickly adjust the angle of the shaft 11 .

[0097] Embodiment six:

[0098] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0099] like Figure 3 and Figure 4 As shown, in this embodiment, the support claw clamping assembly 400 includes: a mounting seat 410, which is disposed on the X-axis and Z-axis slide table 500; a clamping seat 420, which is disposed on the mounting seat 410;

[0100] The clamp seat 420 is provided with a limiting groove 421 for the end of the supporting claw 12 to be embedded in, and a detachable limiting baffle 422 is provided on the limiting groove 421 , and the limiting baffle is used to limit the supporting claw 12 from leaving the clamp seat 420 .

[0101] The welding end of the support claw 12 is facing the shaft 11, and then the other end is placed in the installation groove of the clamp seat 420, and the end of the support claw 12 is against the inner wall of the installation groove, and then the limit baffle 422 is fixed to the clamp seat 420 by screws to fix the support claw 12. After the installation of the support claw 12 is completed, the X-axis and Z-axis slide 500 is adjusted to move the support claw 12 toward the shaft 11 until the end of the support claw 12 is against the welding area of ​​the shaft 11, thereby completing the adjustment of the support claw 12.

[0102] Embodiment seven:

[0103] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0104] like Figure 1 As shown, in this embodiment, the lower base plate 112 is detachably disposed on the frame 100; a handle 114 is also disposed on the lower base plate 112 to facilitate installation and removal of the entire fixture.

[0105] Embodiment eight:

[0106] This embodiment provides a welding method for quartz claw products, and the specific steps of the welding method are as follows:

[0107] S1, after the shaft rod 11 passes through the hole of the upper top plate 111 from top to bottom, the bottom of the shaft rod 11 is against the Z-axis lifting slide 300;

[0108] S2, controlling the Z-axis lifting slide 300 to make the upper end of the shaft 11 extend out of the upper top plate 111 to a certain height;

[0109] S3, vertically clamping the shaft 11 by the coaxial axis clamping assembly 200;

[0110] S4, placing the support claw 12 on the support claw clamping assembly 400 and clamping it;

[0111] S5, control the X-axis and Z-axis slide 500, first drive the support claw clamping assembly 400 to move horizontally, so that the welding end of the support claw 12 on it abuts against the shaft 11, and then drive the support claw clamping assembly 400 to move in the vertical direction, so that the welding end of the support claw 12 on it is aligned with the welding position of the shaft 11;

[0112] S6, welding the connection between the support claw 12 and the shaft rod 11 using a welding gun;

[0113] S7, control the shaft rod 11 to rotate so that another welding position is aligned with the support claw clamping assembly 400, and then return to step S4 until all the support claws 12 are welded to the shaft rod 11. In this way, the welding work of one quartz claw 10 is completed.

[0114] The embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A welding jig for quartz claw products, the quartz claw comprising: The shaft and the supporting claws arranged on the shaft, characterized in that the welding fixture comprises: Workbench (110); A coaxial shaft clamping assembly (200) is arranged on the workbench (110) and is used to clamp the shaft in a vertical state, and the shaft can rotate on the coaxial shaft clamping assembly (200); A Z-axis lifting slide (300) is used to adjust the position of the shaft in the vertical Z-axis direction; A support claw clamping assembly (400) for clamping the support claw; And an X-axis Z-axis slide (500) is used to drive the support claw to approach or move away from the shaft rod along the horizontal X-axis direction, and drive the support claw to move along the vertical Z-axis direction to adjust the welding position between the support claw and the shaft rod.

2. The quartz claw product welding jig according to claim 1, characterized in that: The workbench (110) comprises: an upper top plate (111), a lower bottom plate (112), and a connecting rod (113) arranged to connect the two, and a hole for the shaft rod to pass through is opened on the upper top plate (111); Wherein, the Z-axis lifting slide (300) is arranged on the lower base plate (112), the supporting claw clamping assembly (400) is arranged on the upper top plate (111), and the coaxial axis clamping assembly (200) is arranged at the bottom of the upper top plate (111).

3. The quartz claw product welding jig according to claim 2, characterized in that: Also includes: The frame (100) has rollers (120) arranged around the bottom thereof; The lower base plate (112) is detachably arranged on the frame (100); a handle (114) is also arranged on the lower base plate (112).

4. The quartz claw product welding jig according to claim 2, characterized in that: The concentric shaft (220) clamping assembly (200) comprises: A mounting frame (210) is arranged at the bottom of the upper top plate (111); A concentric shaft (220) having a hollow structure and vertically disposed on the mounting frame (210); The clamping parts (230) have two groups and are respectively arranged at the upper and lower ends of the concentric shaft (220). After the shaft rod is embedded in the concentric shaft (220), the two groups of clamping parts (230) respectively clamp the parts of the shaft rod located at the two ends of the concentric shaft (220); The concentric shaft (220) is rotatably arranged on the mounting frame (210) with its axis as the rotation center.

5. The quartz claw product welding jig according to claim 4, characterized in that: Conical grooves are provided at both ends of the concentric shaft (220), and the diameter of the conical grooves gradually decreases from the outside to the inside; the clamping portion (230) comprises: A collet (231) having a hollow chamber for the shaft to pass through, the outer walls of both ends of the collet are conical structures, and the outer wall of one end is adapted to the conical groove, the end is embedded in the conical groove, and the other end is located outside the conical groove; A nut (232), one end hole of which is a threaded hole and is threadedly connected to the outer wall of the end of the coaxial shaft (220), and the other end hole of which is a tapered hole and is adapted to the tapered structure of one end of the collet (231) extending out of the coaxial shaft (220); Wherein, both ends of the collet (231) are provided with openings (2311), so that when the collet (231) is squeezed by the nut (232) and the coaxial shaft (220), the diameter of the hollow chamber thereon can be reduced to clamp the shaft.

6. The quartz claw product welding jig according to claim 4, characterized in that: The mounting frame (210) includes: an upper flange (211); a lower flange (212); and a connecting column (213) for connecting the upper flange (211) and the lower flange (212); Wherein, bearings are provided in the middle of the upper flange (211) and the lower flange (212), and the concentric shaft (220) is rotatably provided on the upper flange (211) and the lower flange (212) through the bearings, and its two ends respectively pass through and extend out of the upper flange (211) and the lower flange (212).

7. The quartz claw product welding jig according to claim 4, characterized in that: Also includes: The rotating platform (600) is arranged on the Z-axis lifting slide (300) and is used to clamp the bottom of the shaft and can drive the shaft to rotate.

8. The quartz claw product welding jig according to claim 2, characterized in that: The support claw clamping assembly (400) comprises: A mounting seat (410) is arranged on the X-axis and Z-axis slide table; A clamping seat (420) is arranged on the mounting seat (410); The clamp seat (420) is provided with a limiting groove (421) for the end of the supporting claw to be embedded in, and the limiting groove (421) is provided with a detachable limiting baffle (422), and the limiting plate is used to limit the supporting claw from detaching from the clamp seat (420).

9. A welding method for quartz claw products, characterized in that: The welding jig according to any one of claims 2 to 8 is used, and the specific steps of the welding method are as follows: S1, after the shaft rod passes through the hole of the upper top plate (111) from top to bottom, its bottom is against the Z-axis lifting slide; S2, controlling the Z-axis lifting slide (300) so that the upper end of the shaft extends out of the upper top plate (111) to a certain height; S3, vertically clamping the shaft rod by means of a coaxial shaft clamping assembly (200); S4, placing the supporting claw on the supporting claw clamping assembly (400) and clamping it; S5, control the X-axis and Z-axis slide table (500), first drive the support claw clamping assembly (400) to move horizontally so that the welding end of the support claw on it abuts against the shaft rod, and then drive the support claw clamping assembly (400) to move in the vertical direction so that the welding end of the support claw on it is aligned with the welding position of the shaft rod; S6. Welding the connection between the support claw and the shaft rod using a welding gun; S7, control the shaft rod to rotate so that another welding position is aligned with the support claw clamping assembly (400), and then return to step S4 until all the support claws are welded to the shaft rod. In this way, the welding work of one quartz claw is completed.

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