Bellows pneumatic liquid supply pump for semiconductor and its working method

Abstract

The present invention belongs to the field of pump technology, and in particular, to a semiconductor bellows pneumatic liquid supply pump and a working method thereof. The present invention provides a semiconductor bellows pneumatic liquid supply pump, comprising: a bellows pump chamber; at least two valve housings, which are arranged on the side walls of the pump body and are suitable for connecting the bellows pump chamber and the pump body; at least two one-way valves, which are slidably arranged in the valve housings and are suitable for opening and closing the valve housings; at least two adjusting sealing devices, which are arranged on the side walls of the one-way valves; wherein, when the left side of the bellows pump chamber contracts toward the pump body, the one-way valve moves into the valve housing, and the adjusting sealing device is suitable for limiting the movement stroke of the one-way valve; the corresponding one-way valve located on the right side of the pump body moves synchronously in a direction away from the pump body, and the adjusting sealing device is suitable for improving the stability of the one-way valve and the valve housing; by adjusting the setting of the sealing device, the deformation amplitude of the compression spring is reduced, and the service life of the compression spring is increased.

Description

Technical Field

[0001] The invention belongs to the technical field of pumps, and specifically relates to a liquid variable displacement pump, and more particularly to a semiconductor bellows pneumatic liquid supply pump and a working method thereof. Background Art

[0002] In the semiconductor processing industry, the secondary liquid supply of the ultrapure water system is mostly carried out through a bellows pneumatic liquid supply pump.

[0003] In the related art, the bellows pneumatic liquid supply pump uses gas as a power source and controls the inflow and outflow of gas to cause the bellows to expand and contract, thereby achieving continuous and stable liquid delivery.

[0004] However, in the process of conveying liquid, the bellows and the internal compression spring frequently expand and contract and deform, and will gradually fatigue and age; and the water flow impacting the valve head for liquid inlet and outlet will aggravate the fatigue loss of the compression spring, resulting in a deterioration of the sealing effect.

[0005] Therefore, how to reduce the fatigue loss caused by the frequent compression deformation of the compression spring in the bellows is a technical problem that needs to be solved urgently in the art.

[0006] It should be noted that the above information disclosed in this background technology section is only used to understand the background technology conceived by the present application, and therefore, the above description is not considered to constitute information of related technology. Summary of the invention

[0007] The embodiments of the present disclosure at least provide a semiconductor bellows pneumatic liquid supply pump and a working method thereof.

[0008] In a first aspect, an embodiment of the present disclosure provides a semiconductor bellows pneumatic liquid supply pump, comprising:

[0009] A corrugated pump chamber, wherein two corrugated pump chambers are respectively arranged on two sides of the pump body;

[0010] At least two valve housings, which are arranged on the side wall of the pump body and are used to connect the corrugated pump chamber with the pump body;

[0011] At least two one-way valves are slidably disposed in the valve housing and are used to open and close the valve housing;

[0012] At least two regulating sealing devices are arranged on the side wall of the one-way valve;

[0013] When the left side corrugated pump chamber contracts toward the pump body, the one-way valve moves into the valve housing, and the regulating sealing device is used to limit the movement stroke of the one-way valve;

[0014] The corresponding one-way valve located on the right side of the pump body moves synchronously in a direction away from the pump body, and the regulating sealing device is used to improve the stability of the one-way valve and the valve housing.

[0015] In an optional embodiment, a compression spring is provided on one side of the one-way valve, and the compression spring is used to push the one-way valve to seal the valve housing sleeve, and the two one-way valves located in the same bellows pump chamber face opposite directions.

[0016] In an optional embodiment, the regulating sealing device comprises: a positioning frame, which is arranged between the compression spring and the one-way valve and has a plurality of limiting grooves opened in the radial direction;

[0017] A plurality of limit blocks are slidably arranged in the limit grooves and abut against the inner wall of the valve housing;

[0018] The inner wall of the valve housing is provided with a positioning groove adapted to the limit block, and a return spring is arranged in each positioning groove;

[0019] When the one-way valve moves horizontally to open the valve housing, the limit block is pushed by the positioning frame to slide outward to be inserted into the positioning groove to limit the deformation amplitude of the compression spring.

[0020] In an optional embodiment, the inner side wall of the limit block is provided with a first inclined surface;

[0021] The positioning frame is provided with a second inclined surface adapted to the first inclined surface;

[0022] When the one-way valve moves horizontally to close the valve housing, the second inclined surface abuts against the first inclined surface to push the limit block to be inserted into the positioning groove.

[0023] In an optional embodiment, a positioning piece is provided on the inner side of each of the limit blocks, and the positioning piece is used to pass through the positioning frame;

[0024] When the one-way valve moves horizontally to open the valve housing, a plurality of the positioning sheets move apart from each other.

[0025] In an optional embodiment, the slot length of the positioning slot is consistent with the length of the limiting block;

[0026] Wherein, when the limiting block is inserted into the positioning groove, it is used to limit the rotation of the positioning frame relative to the valve housing sleeve.

[0027] In a second aspect, the present disclosure also provides a bellows pneumatic liquid supply pump, comprising:

[0028] At least two corrugated pump chambers, the two corrugated pump chambers are respectively arranged on two sides of the pump body;

[0029] Two valve housings are arranged in each of the bellows pump chambers, and the valve housings are connected to the pump body;

[0030] A one-way valve is slidably disposed in each valve housing sleeve, and the two one-way valves located on both sides of the pump body face opposite directions;

[0031] An adjusting sealing device is arranged between the compression spring and the one-way valve;

[0032] When a one-way valve on the left side of the pump body opens the valve housing, the regulating sealing device is used to limit the deformation amplitude of the compression spring.

[0033] In an optional embodiment, the regulating sealing device comprises: a positioning frame, which is arranged at the end of the compression spring and has a plurality of limiting grooves opened in the radial direction;

[0034] A plurality of limit blocks, which are slidably disposed in the limit grooves and abut against the one-way valves;

[0035] The inner wall of the valve housing is provided with a positioning groove adapted to the limit block;

[0036] When the one-way valve moves horizontally to open the valve housing, the limit block is pushed by the positioning frame to slide outward to be inserted into the positioning groove to limit the deformation amplitude of the compression spring.

[0037] In an optional embodiment, the inner side wall of the limit block is provided with a first inclined surface;

[0038] The positioning frame is provided with a second inclined surface adapted to the first inclined surface;

[0039] When the one-way valve moves in the direction of the compression spring, the second inclined surface abuts against the first inclined surface to push the limit block to insert into the positioning groove.

[0040] In a third aspect, the present disclosure also provides an adjustable sealing device, including:

[0041] The valve housing has a plurality of positioning grooves on its inner wall and a compression spring disposed inside;

[0042] A one-way valve, which is slidably disposed in the valve housing and is used to open and close the valve housing;

[0043] A positioning frame, which is arranged at the end of the compression spring and has a plurality of limiting grooves opened in the radial direction;

[0044] A plurality of limit blocks, which are slidably disposed in the limit grooves and abut against the one-way valves;

[0045] When the one-way valve moves horizontally to open the valve housing, the limit block is pushed by the positioning frame and inserted into the positioning groove to limit the deformation amplitude of the compression spring.

[0046] In an optional embodiment, a positioning piece is provided on the inner side of each of the limit blocks, and the positioning piece is used to pass through the positioning frame;

[0047] When the one-way valve moves horizontally to open the valve housing, the side walls of the plurality of positioning pieces abut against each other.

[0048] In a fourth aspect, the embodiments of the present disclosure further provide a working method of a pneumatic liquid supply pump, the working method comprising:

[0049] When the left side corrugated pump chamber contracts toward the pump body, the one-way valve moves into the valve housing sleeve, and the regulating sealing device is used to limit the movement stroke of the one-way valve;

[0050] The corresponding one-way valve located on the right side of the pump body moves synchronously in a direction away from the pump body, and the regulating sealing device is used to improve the stability of the one-way valve and the valve housing.

[0051] The beneficial effect of the present invention is that the present invention provides a semiconductor bellows pneumatic liquid supply pump and a working method thereof, by adjusting the cooperation between the sealing device, the one-way valve and the valve housing, when the one-way valve moves horizontally to open the valve housing, the sealing device can be adjusted to limit the movement stroke of the one-way valve, so as to reduce the extrusion pressure of the one-way valve on the compression spring, reduce the deformation amplitude of the compression spring, and increase the service life of the compression spring; and when the one-way valve closes the valve housing, the sealing device can be adjusted to improve the stability between the one-way valve and the valve housing.

[0052] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0053] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, this article specifically cites preferred embodiments and provides detailed descriptions as follows in conjunction with the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the related technologies, the drawings required for use in the specific embodiments or the related technical descriptions will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0055] Figure 1 A three-dimensional diagram of a semiconductor bellows pneumatic liquid supply pump provided by an embodiment of the present disclosure;

[0056] Figure 2 An internal stereogram of a bellows pneumatic liquid supply pump provided by an embodiment of the present disclosure;

[0057] Figure 3 A three-dimensional diagram of a one-way valve and an adjustable sealing device provided in an embodiment of the present disclosure;

[0058] Figure 4 A sectional perspective view of a one-way valve and an adjustable sealing device provided in an embodiment of the present disclosure;

[0059] Figure 5 A schematic diagram of a one-way valve in an open valve housing state provided by an embodiment of the present disclosure;

[0060] Figure 6 A schematic diagram of a state in which a limit block provided in an embodiment of the present disclosure is inserted into a positioning groove.

[0061] In the figure:

[0062] 1. Pump body; 2. Corrugated pump chamber;

[0063] 3. Valve housing; 30. Compression spring; 31. Positioning groove; 32. Return spring;

[0064] 4. One-way valve; 5. Adjusting sealing device; 51. Positioning frame; 52. Limiting groove; 53. Limiting block; 54. First inclined surface; 55. Second inclined surface; 56. Positioning sheet. DETAILED DESCRIPTION

[0065] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0066] In this article, when it is mentioned that the first component is located on the second component, this may mean that the first component may be directly formed on the second component, or the third component may be interposed between the first component and the second component. In addition, in the drawings, in order to effectively describe the technical content, the thickness of the components may be exaggerated or reduced.

[0067] Herein, example embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as "at least one of..." modify the entire list of elements when following a list of elements, rather than modifying individual elements in the list. For example, the expression "at least one of a, b, and c" should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0068] The terms used herein are only used to describe specific exemplary configurations and are not intended to be limited. As used herein, the singular articles "one", "an" and "the" may also be intended to include plural forms, unless it is clearly indicated above that this is not the case. The terms "comprise", "include" and "have" are inclusive, and therefore specify the presence of features, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components and / or combinations thereof. The method steps, processes and operations described herein should not be interpreted as necessarily requiring them to be performed in the specific order discussed or shown, unless specifically identified as an execution order. Additional or alternative steps may be adopted.

[0069] As used herein, the phrases "in one embodiment," "according to one embodiment," "in some embodiments," and the like generally refer to the fact that the particular feature, structure, or characteristic following the phrase may be included in at least one embodiment of the present disclosure. Therefore, a particular feature, structure, or characteristic may be included in more than one embodiment of the present disclosure, so that these phrases do not necessarily refer to the same embodiment. As used herein, the terms "example," "exemplary," and the like are used to "serve as an example, instance, or illustration." Any implementation, aspect, or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. On the contrary, the use of the terms "example," "exemplary," and the like is intended to present concepts in a concrete manner.

[0070] Through research, it is found that in the related technology, the bellows pneumatic liquid supply pump uses gas as the power source, and controls the inlet and outlet of gas to make the bellows expand and contract to achieve continuous and stable liquid delivery.

[0071] However, in the process of conveying liquid, the bellows and the internal compression spring frequently expand and contract and deform, and will gradually fatigue and age; and the water flow impacting the valve head for liquid inlet and outlet will aggravate the fatigue loss of the compression spring, resulting in a deterioration of the sealing effect.

[0072] Therefore, how to reduce the fatigue loss of compression springs is a technical problem that needs to be solved urgently in this field.

[0073] The defects in the above solutions and the reasons for their occurrence are the results obtained by the inventor after practice and careful research. Therefore, the process of discovering the above problems and the solutions proposed by the present invention in this article for the above problems should be the contributions made by the inventor to the present invention during the disclosure process.

[0074] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0075] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0076] like Figures 1 to 6 As shown, at least one embodiment provides a bellows pneumatic liquid supply pump for semiconductors, comprising: a bellows pump chamber 2, two of the bellows pump chambers 2 are respectively arranged on both sides of a pump body 1; the side walls of the pump body are respectively provided with a liquid inlet pipe and a liquid outlet pipe, and the liquid inlet pipe and the liquid outlet pipe are respectively connected to the two bellows pump chambers 2. At least two valve housings 3 are arranged on the side walls of the pump body 1 and are used to connect the bellows pump chamber 2 and the pump body 1; preferably, there are four valve housings 3. At least two one-way valves 4 are slidably arranged in the valve housing 3 and are used to open and close the valve housing 3; the two one-way valves 4 located in the same bellows pump chamber 2 face opposite directions. At least two regulating sealing devices 5 are arranged on the side wall of the one-way valve 4; when the left side corrugated pump chamber 2 contracts toward the pump body 1, the one-way valve 4 moves into the valve housing 3, and the regulating sealing device 5 is used to limit the movement stroke of the one-way valve 4; the movement stroke of the one-way valve 4 is limited, that is, the squeezing force of the one-way valve 4 on the compression spring 30 becomes smaller, thereby reducing the deformation amplitude of the compression spring 30. The corresponding one-way valve 4 located on the right side of the pump body 1 moves synchronously in the direction away from the pump body 1, and the regulating sealing device 5 is used to improve the stability of the one-way valve 4 and the valve housing 3. By adjusting the cooperation among the sealing device 5, the one-way valve 4 and the valve housing 3, when the one-way valve 4 moves horizontally to open the valve housing 3, the sealing device 5 can be adjusted to limit the moving stroke of the one-way valve 4, so as to reduce the squeezing pressure of the one-way valve 4 on the compression spring 30, reduce the deformation amplitude of the compression spring 30, and increase the service life of the compression spring 30; and when the one-way valve 4 closes the valve housing 3, the sealing device 5 can be adjusted to improve the stability between the one-way valve 4 and the valve housing 3.

[0077] Reference Figure 3 A compression spring 30 is arranged on one side of the one-way valve 4, and the compression spring 30 is arranged in the valve housing 3. The compression spring 30 is used to push the one-way valve 4 to seal the valve housing 3. The two one-way valves 4 located in the same corrugated pump chamber 2 face opposite directions. When a one-way valve 4 on the left side of the pump body 1 moves horizontally to open the valve housing 3, the corresponding other one-way valve 4 on the right side of the pump body 1 moves horizontally to seal the corresponding other valve housing 3.

[0078] Reference Figure 4The regulating sealing device 5 includes: a positioning frame 51, which is arranged between the compression spring 30 and the one-way valve 4, and is radially provided with a plurality of limiting grooves 52, the groove length of the limiting grooves 52 being greater than the length of the limiting blocks 53; a plurality of limiting blocks 53, which are slidably arranged in the limiting grooves 52 and abut against the inner wall of the valve shell 3; one side of the limiting block 53 protrudes from the positioning frame 51, and the limiting block 53 abuts against the inner wall of the valve shell 3.

[0079] Reference Figure 5 The inner wall of the valve housing 3 is provided with a positioning groove 31 adapted to the limiting block 53; the slot length of the positioning groove 31 is consistent with the length of the limiting block 53, and a return spring 32 is provided in the positioning groove 31, and the return spring 32 is used to push the limiting block 53 to move toward the axial direction of the positioning frame 51. When the limiting block 53 is inserted into the positioning groove 31, it is used to limit the rotation of the positioning frame 51 relative to the valve housing 3.

[0080] Continue to refer to the attached Figure 5 When the one-way valve 4 moves horizontally to open the valve housing 3, the one-way valve 4 moves in the direction of the compression spring 30. As the compression spring 30 is squeezed by the one-way valve 4, the limiting block 53 is inserted into the positioning groove 31 under the push of the positioning frame 51, thereby limiting the movement stroke of the one-way valve 4 and further limiting the deformation amplitude of the compression spring 30. Figure 5 F1 in the figure represents the thrust of the positioning frame 51 on the limiting block 53 . Figure 5 The arrow in indicates the direction of water flow. At this time, after the limit block 53 is inserted into the positioning groove 31, the water flow thrust cannot push the one-way valve 4 to continue to move in the direction of the compression spring 30, so as to reduce the deformation amplitude of the compression spring 30 and improve the service life of the compression spring 30. Figure 6 The arrows in the figure indicate the direction of water flow.

[0081] Continue to refer to the attached Figure 4 A first inclined surface 54 is provided on the inner side wall of the limit block 53; a second inclined surface 55 adapted to the first inclined surface 54 is provided in the positioning frame 51; wherein, when the one-way valve 4 moves in the direction of the compression spring 30, the second inclined surface 55 abuts against the first inclined surface 54 to push the limit block 53 to be inserted into the positioning groove 31.

[0082] Reference Figure 5 A positioning piece 56 is disposed inside each of the limit blocks 53, and the positioning piece 56 is used to penetrate the positioning frame 51; when the one-way valve 4 moves horizontally to close the valve housing 3, a plurality of the positioning pieces 56 move apart. Each positioning piece 56 is used to block the water flow pressure transmitted from the direction of the compression spring 30, further improving the stability between the one-way valve 4 and the valve housing 3.

[0083] Reference Figure 2At least one embodiment provides a bellows pneumatic liquid supply pump, comprising: at least two bellows pump chambers 2, the two bellows pump chambers 2 are respectively arranged on both sides of the pump body 1; two valve shells 3 are arranged in each of the bellows pump chambers 2, and the valve shells 3 are connected to the pump body 1; a one-way valve 4 is slidably arranged in each valve shell 3, and the two one-way valves 4 located on both sides of the pump body 1 face opposite directions; an adjusting sealing device 5, which is arranged between the compression spring 30 and the one-way valve 4; wherein, when a one-way valve 4 on the left side of the pump body 1 opens the valve shell 3, the adjusting sealing device 5 is used to limit the deformation amplitude of the compression spring 30.

[0084] Reference Figure 3 At least one embodiment provides an adjustable sealing device, comprising: a valve housing 3, the inner wall of which is provided with a plurality of positioning grooves 31, and a compression spring 30 is arranged inside; a one-way valve 4 is slidably arranged in the valve housing 3 and used to open and close the valve housing 3; the compression spring 30 is used to push the one-way valve 4 to close the valve housing 3. A positioning frame 51 is arranged at the end of the compression spring 30 and is provided with a plurality of limiting grooves 52 in the radial direction; a plurality of limiting blocks 53 are slidably arranged in the limiting grooves 52 and abut against the one-way valve 4; wherein, when the one-way valve 4 moves horizontally to open the valve housing 3, the limiting blocks 53 are pushed by the positioning frame 51 to be inserted into the positioning groove 31 to limit the deformation amplitude of the compression spring 30.

[0085] At least one embodiment provides a working method of a pneumatic liquid supply pump, the working method comprising:

[0086] When the corrugated pump chamber 2 on the left side contracts toward the pump body 1, the one-way valve 4 moves into the valve housing sleeve 3, and the adjusting sealing device 5 is used to limit the moving stroke of the one-way valve 4; the corresponding one-way valve 4 located on the right side of the pump body 1 moves synchronously in the direction away from the pump body 1, and the adjusting sealing device 5 is used to improve the stability of the one-way valve 4 and the valve housing sleeve 3.

[0087] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0088] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, terms such as "first", "second" and other numerical terms do not imply an order or sequence when used in this document unless explicitly indicated above. Therefore, without departing from the teachings of the example embodiments, the first element, component, region, layer or section discussed above may be referred to as a second element, component, region, layer or section.

[0089] With the above-mentioned ideal embodiments of the present invention as inspiration, through the above-mentioned description content, relevant personnel can make various changes and modifications without departing from the scope of the technical idea of ​​the present invention.

Claims

1. A semiconductor bellows pneumatic liquid supply pump, characterized in that: include: A corrugated pump chamber (2), wherein the two corrugated pump chambers (2) are respectively arranged on two sides of the pump body (1); At least two valve housings (3), which are arranged on the side wall of the pump body (1) and are used to connect the corrugated pump chamber (2) and the pump body (1); At least two one-way valves (4) are slidably disposed in the valve housing (3) and are used to open and close the valve housing (3); A compression spring (30) is provided on one side of the one-way valve (4); At least two adjusting sealing devices (5) are arranged on the side wall of the one-way valve (4); When the corrugated pump chamber (2) located on one side of the pump body (1) contracts toward the pump body (1), the one-way valve (4) moves into the valve housing (3), and the regulating sealing device (5) is used to limit the movement stroke of the one-way valve (4); The corresponding one-way valve (4) located on the other side of the pump body (1) moves synchronously in a direction away from the pump body (1), and the regulating sealing device (5) is used to improve the stability of the one-way valve (4) and the valve housing (3); The two one-way valves (4) located in the same bellows pump chamber (2) face in opposite directions; The regulating sealing device (5) comprises: a positioning frame (51), which is arranged between the compression spring (30) and the one-way valve (4) and has a plurality of limiting grooves (52) radially formed therein; a plurality of limit blocks (53) which are slidably disposed in the limit grooves (52) and abut against the inner wall of the valve housing (3); The inner wall of the valve housing (3) is provided with a positioning groove (31) adapted to the limiting block (53), and a return spring (32) is arranged in each positioning groove (31); When the one-way valve (4) moves horizontally to open the valve housing (3), the limiting block (53) is pushed by the positioning frame (51) to slide outwards to be inserted into the positioning groove (31) to limit the deformation amplitude of the compression spring (30).

2. The semiconductor bellows pneumatic liquid supply pump according to claim 1, characterized in that: The inner side wall of the limit block (53) is provided with a first inclined surface (54); The positioning frame (51) has a second inclined surface (55) formed therein and adapted to match the first inclined surface (54); When the one-way valve (4) moves horizontally to close the valve housing (3), the second inclined surface (55) abuts against the first inclined surface (54) to push the limit block (53) to be inserted into the positioning groove (31).

3. The semiconductor bellows pneumatic liquid supply pump according to claim 1, characterized in that: A positioning piece (56) is disposed on the inner side of each of the limiting blocks (53), and the positioning piece (56) is used to penetrate the positioning frame (51); When the one-way valve (4) moves horizontally to close the valve housing (3), the plurality of positioning pieces (56) move away from each other.

4. The semiconductor bellows pneumatic liquid supply pump according to claim 1, characterized in that: The slotting length of the positioning slot (31) is consistent with the length of the limiting block (53); When the limiting block (53) is inserted into the positioning groove (31), it is used to limit the rotation of the positioning frame (51) relative to the valve housing (3).

5. A bellows pneumatic liquid supply pump, characterized in that: include: At least two corrugated pump chambers (2), the two corrugated pump chambers (2) being respectively arranged on two sides of the pump body (1); Two valve housings (3) are arranged in each of the corrugated pump chambers (2), and the valve housings (3) are in communication with the pump body (1); A one-way valve (4) is slidably disposed in each valve housing (3), and the two one-way valves (4) located on both sides of the pump body (1) face in opposite directions; An adjusting sealing device (5) disposed between the compression spring (30) and the one-way valve (4); When a one-way valve (4) on the left side of the pump body (1) opens the valve housing (3), the sealing device (5) is adjusted to limit the deformation amplitude of the compression spring (30). The regulating sealing device (5) comprises: a positioning frame (51) which is arranged at the end of the compression spring (30) and has a plurality of limiting grooves (52) opened in the radial direction; a plurality of limit blocks (53) which are slidably disposed in the limit groove (52) and abut against the one-way valve (4); The inner wall of the valve housing (3) is provided with a positioning groove (31) adapted to the limiting block (53); When the one-way valve (4) moves horizontally to open the valve housing (3), the limiting block (53) is pushed by the positioning frame (51) to slide outwards to be inserted into the positioning groove (31) to limit the deformation amplitude of the compression spring (30).

6. The bellows pneumatic liquid supply pump according to claim 5, characterized in that: The inner side wall of the limit block (53) is provided with a first inclined surface (54); The positioning frame (51) has a second inclined surface (55) formed therein and adapted to match the first inclined surface (54); When the one-way valve (4) moves in the direction of the compression spring (30), the second inclined surface (55) abuts against the first inclined surface (54) to push the limit block (53) to be inserted into the positioning groove (31).

7. An adjustable sealing device, characterized in that: include: A valve housing (3) has a plurality of positioning grooves (31) formed on its inner wall and a compression spring (30) disposed inside thereof; A one-way valve (4) which is slidably disposed in the valve housing (3) and is used to open and close the valve housing (3); A positioning frame (51) is arranged at the end of the compression spring (30) and is provided with a plurality of limiting grooves (52) along the radial direction; a plurality of limit blocks (53) which are slidably disposed in the limit groove (52) and abut against the one-way valve (4); When the one-way valve (4) moves horizontally to open the valve housing (3), the limit block (53) is pushed by the positioning frame (51) to be inserted into the positioning groove (31) to limit the deformation amplitude of the compression spring (30). A positioning piece (56) is disposed on the inner side of each of the limiting blocks (53), and the positioning piece (56) is used to penetrate the positioning frame (51); When the one-way valve (4) moves horizontally to open the valve housing (3), the side walls of the plurality of positioning pieces (56) abut against each other.

8. A method for operating a pneumatic liquid supply pump, characterized in that: Using the semiconductor bellows pneumatic liquid supply pump according to any one of claims 1 to 4, the working method includes: When the left side corrugated pump chamber (2) contracts towards the pump body (1), the one-way valve (4) moves into the valve housing (3), and the regulating sealing device (5) is used to limit the movement stroke of the one-way valve (4); The corresponding one-way valve (4) located on the right side of the pump body (1) moves synchronously in a direction away from the pump body (1), and the regulating sealing device (5) is used to improve the stability of the one-way valve (4) and the valve housing (3).

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