Multidirectional rotating workpiece rotating stand for film coating

Abstract

The multidirectional rotating workpiece rotating stand comprises a fixed gear, a driving rotating disc and a plurality of planet carriers, the fixed gear is fixedly arranged, the driving rotating disc is rotationally arranged, and the planet carriers are installed on the driving rotating disc; the planet carrier comprises a fixed shaft, a rotary shell, a driven gear and a plurality of layers of hanging rods, the fixed shaft is fixedly installed on the driving rotary disc, the rotary shell is rotatably installed on the driving rotary disc, the rotation center of the rotary shell coincides with the axis of the fixed shaft, the driven gear is fixedly installed on the rotary shell, and the driven gear is meshed with the fixed gear; a fixed bevel gear and an inert bevel gear are arranged corresponding to each layer of hanging rod, the fixed bevel gear is fixedly connected to the fixed shaft, the inert bevel gear is rotationally connected to the inner side of the rotary shell and meshed with the fixed bevel gear, the hanging rods are rotationally arranged on the rotary shell and incline outwards, and output bevel gears meshed with the inert bevel gear are arranged on the hanging rods. According to the invention, uniform coating of a workpiece with a complex coating surface can be better realized.

Description

Technical Field

[0001] The invention relates to the technical field of sputtering coating, and in particular to a multi-directional rotating workpiece rotating rack for coating. Background Art

[0002] Sputtering coating is a process in which ions bombard the target surface, knocking out the atoms of the target and depositing them on the surface of the workpiece to form a thin film. During the coating process, the workpiece is fixed on the workpiece turntable by the corresponding fixture. The traditional workpiece turntable usually fixes the workpiece vertically, and then performs simple revolution and rotation to achieve a thin film on the workpiece surface.

[0003] However, it is difficult for the traditional workpiece turret to achieve uniform coating on workpieces with complex coating surfaces, such as semicircular workpieces with arc-shaped coating surfaces. When coating a semicircular workpiece, the traditional workpiece turret is vertically fixed to the semicircular workpiece, and the sputtering target is set on the side. During the sputtering coating process, the traditional workpiece turret will drive the semicircular workpiece to revolve and rotate, but it will be difficult to coat the upper middle position of the semicircular workpiece.

[0004] Therefore, the present invention designs a multi-directional rotating workpiece rotating rack for workpieces with relatively complex coating surfaces, so as to achieve uniform coating of the workpieces with complex coating surfaces. Summary of the invention

[0005] The object of the present invention is to provide a multi-directional rotating workpiece turntable for coating, which can better realize uniform coating of workpieces with complex coating surfaces.

[0006] The purpose of the present invention is achieved through the following technical solutions:

[0007] A multi-directional rotating workpiece turntable for coating, characterized in that it includes a fixed gear, a driving turntable and a plurality of planetary carriers, the fixed gear is fixedly arranged, the driving turntable is rotatably arranged and coincides with the center of the fixed gear, the planetary carrier is installed on the driving turntable and is arranged around the center of the driving turntable; the planetary carrier includes a fixed shaft, a rotating shell, a driven gear and a multi-layer hanging rod, the fixed shaft is fixedly installed on the driving turntable, the rotating shell is rotatably installed on the driving turntable, the rotation center of the rotating shell coincides with the axis center of the fixed shaft, the driven gear is fixedly installed on the rotating shell, the driven gear is meshed with the fixed gear, and a fixed bevel gear and an inert bevel gear are respectively provided on the planetary carrier corresponding to each layer of hanging rods, the fixed bevel gear is fixedly connected to the fixed shaft, the inert bevel gear is rotatably connected to the inner side of the rotating shell, the inert bevel gear is meshed with the fixed bevel gear, the hanging rod is rotatably arranged on the rotating shell and tilted outwardly, and the hanging rod is provided with an output bevel gear meshing with the inert bevel gear.

[0008] A further technical solution of the present invention is: a movable bearing seat is provided on the rotating outer shell corresponding to each hanging rod, the movable bearing seat can be rotated and adjusted relative to the rotating outer shell, the rotation adjustment center of the movable bearing seat coincides with the rotation center of the inert bevel gear, the hanging rod is rotatably connected to the movable bearing seat, and the inclination angle of the hanging rod can be adjusted by rotating and adjusting the movable bearing seat.

[0009] A further technical solution of the present invention is: a rotating connection part is provided on both sides of the movable bearing seat, a rotating connection shaft is provided on the rotating outer shell corresponding to the rotating connection part, the rotating connection part is rotatably connected with the rotating connection shaft, and a lifting and lowering adjustment component is provided on the rotating outer shell corresponding to each movable bearing seat, and the movable bearing seat is rotationally adjusted by the lifting and lowering adjustment component.

[0010] A further technical solution of the present invention is: the lifting and lowering adjustment component includes a push screw and a pull-back screw, and a mounting portion protruding outward is respectively provided on the rotating outer shell for each movable bearing seat, and a threaded hole and a through hole are provided on the mounting portion. The push screw is threadedly connected in the threaded hole, and the inner end of the push screw pushes against the movable bearing seat, and the pull-back screw passes through the through hole, and the inner end of the pull-back screw is hinged to the movable bearing seat, and an adjusting nut is provided on the part of the pull-back screw extending out of the rotating outer shell.

[0011] A further technical solution of the present invention is: the multi-directional rotating workpiece turntable also includes a connecting disk arranged opposite to the active turntable, the active turntable and the connecting disk are fixedly connected together by a support rod, the corresponding planetary frames on the active turntable and the connecting disk are respectively provided with a fixed bearing seat and a stop plate, the two ends of the rotating outer shell are respectively rotatably connected to the fixed bearing seats of the active turntable and the connecting disk, the fixed shaft passes through the middle of the rotating outer shell, the two ends of the fixed shaft are respectively connected to the stop plates, and the fixed shaft is supported by the stop plates and the rotation of the fixed shaft is restricted.

[0012] A further technical solution of the present invention is: rotating sleeves are fixedly provided at both ends of the rotating housing respectively, the rotating sleeves are rotatably connected to the fixed bearing seat, and the ends of the fixed shafts pass through the rotating sleeves.

[0013] A further technical solution of the present invention is: a limit strip is provided on the anti-rotation plate, a limit through groove is provided on the end surface of the fixed shaft, and the limit strip is embedded in the limit through groove.

[0014] A further technical solution of the present invention is that two layers of hanging rods adjacent to each other are staggered and located at different sides of the rotating shell.

[0015] A further technical solution of the present invention is that each layer of the rotary shell is provided with two hanging rods located on opposite sides.

[0016] A further technical solution of the present invention is: the workpiece rotating frame also includes a fixed plate and a motor, the fixed gear is fixedly mounted on the fixed plate, the active turntable is rotatably mounted on the fixed plate, the motor is fixedly mounted in the middle of the fixed plate, and the output shaft of the motor is connected to the middle of the active turntable.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. When in use, the present invention can rotate the workpiece fixed on the hanging rod around the center of the active turntable, around the center of the fixed axis, and around the center of the hanging rod, thereby realizing multi-directional rotation. The inclined hanging rod also makes the workpiece inclined during the coating process. Through the combination of the above two aspects, the present invention can better realize uniform coating of workpieces with complex coating surfaces.

[0019] 2. The present invention further installs the hanging rod through an adjustable movable bearing seat, so that the inclination angle of the hanging rod can be adjusted, thereby better adapting to workpieces of different shapes. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is one of the three-dimensional schematic diagrams of the multi-directional rotating workpiece turntable according to an embodiment of the present invention;

[0021] Figure 2 This is the second three-dimensional schematic diagram of the multi-directional rotating workpiece turntable according to an embodiment of the present invention;

[0022] Figure 3 is a front view schematic diagram of a multi-directional rotating workpiece turntable according to an embodiment of the present invention;

[0023] Figure 4 is a bottom view schematic diagram of a multi-directional rotating workpiece turntable according to an embodiment of the present invention;

[0024] Figure 5 is a front view schematic diagram of a planet carrier according to an embodiment of the present invention;

[0025] Figure 6 yes Figure 5 Schematic cross-sectional view at AA in the middle;

[0026] Figure 7 is a schematic top view of a planet carrier according to an embodiment of the present invention;

[0027] Figure 8 yes Figure 6 The enlarged schematic diagram of G in the middle;

[0028] Fig. 9 yes Figure 5 The enlarged schematic diagram of F in the middle;

[0029] Fig.10It is a schematic diagram of the assembly structure of one layer of hanging rods of the planetary carrier according to an embodiment of the present invention;

[0030] Fig.11 Schematic diagram of the upward and downward adjustment of the hanging rod of the planet carrier according to an embodiment of the present invention;

[0031] Fig.12 It is a structural schematic diagram of a movable bearing seat of an embodiment of the present invention when part is disassembled;

[0032] Fig.13 It is a schematic diagram of the installation structure of the active rotating disk and the fixed gear according to an embodiment of the present invention.

[0033] Meaning of reference numerals in the figure:

[0034] 1-driving turntable; 2-planet carrier; 2.1-driven gear; 2.2-hanging rod; 2.3-fixed shaft; 2.4-rotating housing; 2.5-top screw; 2.6-limiting slot; 2.7-fixed bevel gear; 2.8-inert bevel gear; 2.9-output bevel gear; 2.10-movable bearing seat; 2.11-pullback screw; 2.12-locking nut; 2.13-installation part; 2.14-adjusting nut; 2.15-rotating connecting shaft; 2.16-rotating connecting part; 2.17-rotating sleeve; 2.18-long hole; 3-stop plate; 3.1-limiting strip; 4-support rod; 5-connecting plate; 6-fixed gear; 7-fixed bearing seat; 8-fixed plate; 9-turntable bearing; 10-motor. DETAILED DESCRIPTION

[0035] The present invention is further described below in conjunction with embodiments.

[0036] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0037] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0038] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0039] Example:

[0040] like Figures 1 to 13 The multi-directional rotating workpiece turntable for coating of the present embodiment is shown, which includes a fixed gear 6, an active turntable 1, a connecting disk 5 and a plurality of planetary carriers 2. The number of planetary carriers 2 is designed according to the size of the coating equipment and other requirements. Twelve planetary carriers 2 are schematically shown in the figure of the present embodiment.

[0041] The fixed gear 6 is fixedly arranged, the driving turntable 1 is rotatably arranged, the center of the driving turntable 1 coincides with the center of the fixed gear 6, and the driving turntable 1 is located above the fixed gear 6. The connecting disk 5 is arranged correspondingly to the driving turntable 1 up and down, and the driving turntable 1 and the connecting disk 5 are fixedly connected together through a plurality of struts 4. The planet carrier 2 is installed between the driving turntable 1 and the connecting disk 5, and is arranged around the center of the driving turntable 1.

[0042] like Figures 5 to 10 As shown, the planetary carrier 2 includes a fixed shaft 2.3, a rotating shell 2.4, a driven gear 2.1 and a plurality of hanging rods 2.2. In the figure of this embodiment, nine layers of hanging rods 2.2 are schematically shown on the planetary carrier 2, and each layer includes two hanging rods 2.2 located on opposite sides, and the upper and lower adjacent layers of hanging rods 2.2 are staggered and located on different sides of the rotating shell 2.4. The staggered setting can avoid the influence of the upper and lower workpieces on the coating.

[0043] Fixed bearing seats 7 are provided on the driving turntable 1 and the connecting disk 5 corresponding to the planetary carriers, and anti-rotation plates 3 are provided on the lower side of the driving turntable 1 and the upper side of the connecting disk 5 corresponding to the fixed shaft 2.3. Rotating sleeves 2.17 are fixedly provided at both ends of the rotating housing 2.4, and the rotating sleeves 2.17 are rotationally connected to the fixed bearing seats 7, so that the rotating housing 2.4 is rotationally installed between the driving turntable 1 and the connecting disk 5. The fixed shaft 2.3 passes through the middle of the rotating housing 2.4, and the ends of the fixed shaft 2.3 pass through the rotating sleeves 2.17. The two ends of the fixed shaft 2.3 are respectively connected to the anti-rotation plates 3, and the fixed shaft 2.3 is supported and the rotation of the fixed shaft 2.3 is limited by the anti-rotation plates 3, so that the fixed shaft 2.3 is fixedly installed on the driving turntable 1. The rotation center of the rotating housing 2.4 coincides with the axis of the fixed shaft 2.3.

[0044] The structure in which the end of the fixed shaft 2.3 is connected to the anti-rotation plate 3 is as follows: a limit strip 3.1 is provided on the anti-rotation plate 3, a limit slot 2.6 is provided on the end face of the fixed shaft 2.3, and the limit strip 3.1 is embedded in the limit slot 2.6.

[0045] The driven gear 2.1 is fixedly mounted on the rotating shaft sleeve 2.17 at the lower end of the rotating housing 2.4, and is located inside the anti-rotation plate 3. The driven gears 2.1 of all planet carriers 2 are meshed with the fixed gear 6. When the driving turntable 1 drives all planet carriers 2 to rotate, the driven gear 2.1 and the fixed gear 6 cooperate to drive the driven gear 2.1 to rotate, thereby driving the rotating housing 2.4 to rotate.

[0046] In this embodiment, each layer of the hanging rod 2.2 is provided with a fixed bevel gear 2.7 and an inert bevel gear 2.8, the fixed bevel gear 2.7 is fixedly connected to the fixed shaft 2.3, the inert bevel gear 2.8 is rotatably connected to the inner side of the rotating housing 2.4, and the inert bevel gear 2.8 is meshed with the fixed bevel gear 2.7. When the rotating housing 2.4 rotates, the inert bevel gear 2.8 rotates by itself under the cooperation between the inert bevel gear 2.8 and the fixed bevel gear 2.7.

[0047] In this embodiment, a movable bearing seat 2.10 is provided on the rotating housing 2.4 corresponding to each hanging rod 2.2. The movable bearing seat 2.10 can be adjusted to rotate up and down relative to the rotating housing 2.4. The specific installation structure of the movable bearing seat 2.10 is as follows: Fig.10 and Fig.12 As shown, the two sides of the movable bearing seat 2.10 are provided with rotating connection parts 2.16, and the two inner sides of the rotating housing 2.4 are provided with rotating connection shafts 2.15 corresponding to the rotating connection parts 2.16, and the centers of the two inner rotating connection shafts 2.15 coincide with each other, and the rotating connection parts 2.16 are rotatably connected with the rotating connection shafts 2.15 through the rotating holes, so that the movable bearing seat 2.10 can be rotated up and down for adjustment, and the tilt angle of the hanging rod 2.2 can be adjusted by rotating and adjusting the movable bearing seat 2.10. The inert bevel gear 2.8 is rotatably installed on the inner end of one of the rotating connection shafts 2.15, so that the rotation adjustment center of the movable bearing seat 2.10 coincides with the rotation center of the inert bevel gear 2.8.

[0048] A lifting and adjusting assembly is provided on the rotary housing 2.4 corresponding to each movable bearing seat 2.10, and the movable bearing seat 2.10 is rotated and adjusted by the lifting and adjusting assembly. The specific structure of the lifting and adjusting assembly is as follows: Figures 8 to 11As shown, the lifting and lowering adjustment assembly of this embodiment includes two abutting screws 2.5 and a pull-back screw 2.11. A horizontal mounting portion 2.13 protruding outward is provided on the rotary housing 2.4 for each movable bearing seat 2.10. The mounting portion 2.13 of this embodiment is a horizontal plate, and the mounting portion 2.13 is located below the corresponding movable bearing 2.10. Two threaded holes are respectively located on both sides and a through hole is located in the middle on the mounting portion 2.13. The two abutting screws 2.5 are threadedly connected in the threaded holes. The abutting screws 2.5 vertically penetrate into the rotary housing, and the inner ends of the abutting screws 2.5 abut against the bottom of the movable bearing seat 2.10. The part of the abutting screws 2.5 located outside the rotary housing 2.4 is threadedly connected with a locking nut 2.12. After the rotation adjustment of the abutting screws 2.5 is completed, the locking nut 2.12 is tightened to lock the abutting screws 2.5. The pull-back screw 2.11 passes through the through hole and is located between the two abutting screws 2.5. The inner end of the pull-back screw 2.11 is hinged to the movable bearing seat 2.10. An adjusting nut 2.14 is threadedly connected to the part of the pull-back screw 2.11 extending to the outside 2.4 of the rotary housing.

[0049] A vertical long hole 2.18 is provided on the rotary housing 2.4 corresponding to each hanging rod 2.2. The hanging rod 2.2 passes through the long hole 2.18. The hanging rod 2.2 is rotatably connected to the movable bearing seat 2.10, and the hanging rod 2.2 is inclined outward. During coating, the workpiece fixed on the hanging rod 2.2 will also be in an inclined state.

[0050] When the tilt angle of the hanging rod 2.2 needs to be adjusted, the locking nut 2.12 needs to be loosened, and then the abutting screw 2.5 and the adjusting nut 2.14 are rotated to adjust the angle. After the adjustment is completed, the locking nut 2.12 can be tightened again.

[0051] Each hanging rod 2.2 is provided with an output bevel gear 2.9 at its inner end. The output bevel gear 2.9 meshes with the inertia bevel gear 2.8. When the inertia bevel gear 2.8 rotates, the output bevel gear 2.9 is driven to rotate, thereby driving the hanging rod 2.2 to rotate.

[0052] The adjustment structure and transmission structure of the hanging rod 2.2 enable the hanging rod 2.2 to realize self-rotation and angle adjustment at the same time, and there is no conflict between the two functions.

[0053] When in use, the multi-directional rotating workpiece rotating rack of this embodiment will also be provided with a fixing plate 8 and a motor 10, such as Fig.13As shown, the fixed gear 6 is fixedly mounted on the fixed plate 8, and the active turntable 1 is mounted on the fixed plate 8 through the turntable bearing 9, so that the active turntable 1 can rotate on the fixed plate 8. The motor 10 is fixedly mounted below the middle of the fixed plate 8, and the output shaft of the motor 10 is vertically upward and connected to the middle of the active turntable 1. The active turntable 1 is driven to rotate by the motor 10, and the fixed plate 8 is fixedly arranged on the equipment.

[0054] The operation process of the multi-directional rotating workpiece turntable of this embodiment is as follows:

[0055] The multi-directional rotating workpiece turret will be installed in the coating chamber of the sputtering coating equipment during use, the target material will be installed on the side of the multi-directional rotating workpiece turret, the workpiece will be fixed on the hanging rod 2.2 by a conventional fixture, and the workpiece will be in an inclined state.

[0056] During the coating process, the motor 10 will drive the active turntable 1 to rotate, and the active turntable 1 will drive all the planetary carriers 2 and the workpieces to rotate around the center of the active turntable 1 ( Figure 4 The rotation direction indicated by A in the figure is the rotation direction of the driving turntable 1 of this embodiment. At the same time, under the cooperation between the driven gear 2.1 and the fixed gear 6, the driven gear 2.1 will rotate ( Figure 4 The rotation direction indicated by B is the rotation direction of the driven gear 2.1 in this embodiment), thereby driving the rotating housing 2.4 to rotate ( Figure 7 The rotation direction shown in C is the rotation direction of the rotary housing 2.4 of this embodiment), so that the workpiece on the planetary carrier 2 will rotate around the fixed shaft 2.3 at the same time. When the rotary housing 2.4 rotates, the inertial bevel gear 2.8 will rotate by itself under the cooperation between the fixed bevel gear 2.7 and the inertial bevel gear 2.8, and the rotation of the inertial bevel gear 2.8 will drive the output bevel gears 2.9 on both sides to rotate, thereby driving the hanging rod 2.2 to rotate ( Figure 7 The rotation direction shown in D is the rotation direction of the hanging rod 2.2 of this embodiment), thereby driving the workpiece on the hanging rod 2.2 to rotate around the center of the hanging rod 2.2. During the above operation, the workpiece will rotate in three directions, and the workpiece is in an inclined state, which can better uniformly coat the complex coating surface of the workpiece, such as the arc-shaped coating surface.

[0057] The above embodiments of the present invention are not intended to limit the protection scope of the present invention, and the implementation modes of the present invention are not limited thereto. All other modifications, replacements or changes made to the above structures of the present invention based on the above contents of the present invention, in accordance with common technical knowledge and customary means in the art, without departing from the above basic technical ideas of the present invention, should fall within the protection scope of the present invention.

Claims

1. A multi-directional rotating workpiece turret for coating, characterized in that: It includes a fixed gear, a driving turntable and a plurality of planet carriers, wherein the fixed gear is fixedly arranged, the driving turntable is rotatably arranged and coincides with the center of the fixed gear, the planet carrier is mounted on the driving turntable and arranged around the center of the driving turntable; the planet carrier includes a fixed shaft, a rotating shell, a driven gear and a multi-layer hanging rod, the fixed shaft is fixedly arranged on the driving turntable, the rotating shell is rotatably arranged on the driving turntable, the rotation center of the rotating shell coincides with the axis center of the fixed shaft, the driven gear is fixedly arranged on the rotating shell, the driven gear meshes with the fixed gear, and a fixed bevel gear and an inert bevel gear are respectively provided on the planet carrier corresponding to each layer of the hanging rod, the fixed bevel gear is fixedly connected to the fixed shaft, the inert bevel gear is rotatably connected to the inner side of the rotating shell, the inert bevel gear meshes with the fixed bevel gear, the hanging rod is rotatably arranged on the rotating shell and tilted outward, and the hanging rod is provided with an output bevel gear meshing with the inert bevel gear.

2. The multi-directional rotating workpiece turret for coating according to claim 1, characterized in that: A movable bearing seat is provided on the rotating shell corresponding to each hanging rod. The movable bearing seat can be rotated and adjusted relative to the rotating shell. The rotation adjustment center of the movable bearing seat coincides with the rotation center of the inert bevel gear. The hanging rod is rotatably connected to the movable bearing seat. The inclination angle of the hanging rod can be adjusted by rotating and adjusting the movable bearing seat.

3. The multi-directional rotating workpiece turret for coating according to claim 2, characterized in that: A rotating connection part is provided on both sides of the movable bearing seat, a rotating connection shaft is provided on the rotating shell corresponding to the rotating connection part, the rotating connection part is rotatably connected with the rotating connection shaft, and a lifting and adjusting component is provided on the rotating shell corresponding to each movable bearing seat, and the movable bearing seat is rotationally adjusted by the lifting and adjusting component.

4. The multi-directional rotating workpiece turret for coating according to claim 3, characterized in that: The lifting and lowering adjustment assembly includes a push-on screw and a pull-back screw. The rotating shell is provided with a mounting portion protruding outward for each movable bearing seat, and the mounting portion is provided with a threaded hole and a through hole. The push-on screw is threadedly connected in the threaded hole, and the inner end of the push-on screw pushes against the movable bearing seat. The pull-back screw passes through the through hole, and the inner end of the pull-back screw is hinged to the movable bearing seat. An adjusting nut is provided on the portion of the pull-back screw that extends out of the rotating shell.

5. The multi-directional rotating workpiece turret for coating according to claim 1, characterized in that: The multi-directional rotating workpiece turntable also includes a connecting disk arranged opposite to the active turntable, the active turntable and the connecting disk are fixedly connected together by a support rod, the active turntable and the connecting disk are respectively provided with a fixed bearing seat and a stop plate corresponding to the planetary frame, the two ends of the rotating shell are respectively rotatably connected to the fixed bearing seats of the active turntable and the connecting disk, the fixed shaft passes through the middle of the rotating shell, the two ends of the fixed shaft are respectively connected to the stop plates, and the fixed shaft is supported by the stop plates and the rotation of the fixed shaft is limited.

6. The multi-directional rotating workpiece turret for coating according to claim 5, characterized in that: Rotating sleeves are fixedly provided at both ends of the rotating housing respectively. The rotating sleeves are rotatably connected to the fixed bearing seat, and the ends of the fixed shaft pass through the rotating sleeves.

7. The multi-directional rotating workpiece turret for coating according to claim 5, characterized in that: The anti-rotation plate is provided with a limiting strip, the end surface of the fixed shaft is provided with a limiting through groove, and the limiting strip is embedded in the limiting through groove.

8. The multi-directional rotating workpiece turret for coating according to claim 1, characterized in that: The two upper and lower adjacent layers of the hanging rods are staggered and located on different sides of the rotating shell.

9. The multi-directional rotating workpiece turret for coating according to claim 8, characterized in that: Each layer of the rotary shell is respectively provided with two hanging rods located on opposite sides.

10. The multi-directional rotating workpiece turret for coating according to claim 1, characterized in that: The workpiece rotating frame also includes a fixed plate and a motor, the fixed gear is fixedly mounted on the fixed plate, the active turntable is rotatably mounted on the fixed plate, the motor is fixedly mounted in the middle of the fixed plate, and the output shaft of the motor is connected to the middle of the active turntable.

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