Ceramic substrate measuring device

Abstract

The invention discloses a ceramic substrate measuring device, and relates to the technical field of single-layer chip ceramic dielectric capacitor production, the ceramic substrate measuring device comprises a workbench, a shield, an air supply filtering mechanism, an X-direction movement mechanism, a tray, a Y-direction movement mechanism, a measuring mechanism and a controller, the shield is arranged at the upper part of the workbench, the X-direction movement mechanism is used for driving the tray to move along the X direction, and the Y-direction movement mechanism is used for driving the tray to move along the Y direction; the tray is used for placing a to-be-measured product or a calibration block, the Y-direction movement mechanism is used for driving the measuring mechanism to move in the Y direction, the measuring mechanism comprises a mounting frame, a lifting assembly and a first laser displacement sensor, the lifting assembly can drive the first laser displacement sensor to move up and down, and the first laser displacement sensor can be located above the tray; an opening is formed in one side of the protective cover, the tray can penetrate through the opening to extend to the outside, a mounting opening is formed in the protective cover, and an air supply filtering mechanism is arranged at the mounting opening. The device can prevent the product from bumping, scratching and subfissure, and can ensure the high precision of measurement.

Description

Technical Field

[0001] The invention relates to the technical field of single-layer chip ceramic capacitor production, in particular to a ceramic substrate measuring device. Background Art

[0002] The surface of the single-layer chip ceramic capacitor uses gold electrodes, which are suitable for micro-assembly processes such as gold wire and gold ribbon. The single-layer chip ceramic capacitor has small size, high precision, solid structure and stable performance. It can be used in aerospace, aviation, radar, microwave communication and other electronic equipment.

[0003] During the production process of single-layer chip ceramic capacitors, the ceramic substrate needs to be ground, and the thickness of the ceramic substrate needs to be measured after grinding. Most of the measuring instruments on the market are contact type, such as micrometers. During use, it is found that contact measurement will cause scratches and cracks on the product, leading to product quality problems. At the same time, wear at the contact point will cause measurement problems. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a ceramic substrate measuring device to prevent the product from being bumped, scratched and cracked, and to ensure high-precision measurement.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a ceramic substrate measuring device, comprising a workbench, a shield, an air supply filtering mechanism, an X-direction motion mechanism, a tray, a Y-direction motion mechanism, a measuring mechanism and a controller, wherein the shield is arranged on the upper part of the workbench, the X-direction motion mechanism is arranged on the workbench and located in the shield, the X-direction motion mechanism is used to drive the tray to move along the X-direction, the tray is used to place a product to be measured or a calibration block, the Y-direction motion mechanism is arranged on the workbench and located in the shield, the Y-direction motion mechanism is used to drive the measuring mechanism to move along the Y-direction, the measuring mechanism comprises a mounting frame, a lifting component and a first laser displacement sensor, the lifting component is arranged on the mounting frame, the lifting component can drive the first laser displacement sensor to move up and down, and the first laser displacement sensor can be located above the tray; an opening is arranged on one side of the shield, the tray can extend to the outside through the opening, a mounting port is arranged on the shield, and the air supply filtering mechanism is arranged at the mounting port; the X-direction motion mechanism, the Y-direction motion mechanism, the air supply filtering mechanism and the first laser displacement sensor are all connected to the controller.

[0007] Preferably, the X-axis motion mechanism includes a first screw drive assembly, a movable table and a first guide assembly, the first guide assembly is arranged on the workbench, the movable table is slidably mounted on the first guide assembly, the first screw drive assembly is used to drive the movable table to slide along the first guide assembly, and the first screw drive assembly is connected to the controller; a second guide assembly is arranged on the upper part of the movable table, the length direction of the second guide assembly is consistent with the length direction of the first guide assembly, the tray is slidably mounted on the second guide assembly, and a linear telescopic drive component for driving the tray to slide along the second guide assembly is arranged on the upper part of the movable table, and the linear telescopic drive component is connected to the controller.

[0008] Preferably, the first guide assembly includes two first guide rails parallel to each other, each of the first guide rails is slidably mounted with a first slider group, and each of the first slider groups is connected to the lower part of the moving platform.

[0009] Preferably, the second guide assembly includes two second guide rails parallel to each other, each of the second guide rails is slidably mounted with a second slider group, each of the second slider groups is connected to the bottom of the tray, and the linear telescopic drive component is located between the two second guide rails.

[0010] Preferably, a through hole is provided on the tray, and an annular limiting plate is provided on the upper part of the tray, the center hole of the annular limiting plate corresponds to the position of the through hole, the size of the center hole is larger than the size of the through hole, and the annular limiting plate is used to place the product to be tested or the calibration block.

[0011] Preferably, the measuring mechanism also includes a second laser displacement sensor, the lifting assembly can drive the second laser displacement sensor to move up and down, the second laser displacement sensor corresponds to the first laser displacement sensor in the vertical direction, the second laser displacement sensor can be located below the tray, and the second laser displacement sensor is connected to the controller.

[0012] Preferably, the lifting assembly includes a dovetail groove guide rail, a rack, a first gear, a second gear, a first dovetail groove slider, a second dovetail groove slider, a first adjusting knob, a second adjusting knob, a first connecting plate and a second connecting plate, the dovetail groove guide rail is vertically fixed to the mounting frame, and the rack is vertically arranged on the dovetail groove guide rail; the first dovetail groove slider is slidably installed on the upper part of the dovetail groove guide rail, the first adjusting knob is rotatably installed on the first dovetail groove slider via a first rotating shaft, the first rotating shaft extends into the first dovetail groove slide and is fixedly sleeved with the first gear, the first gear is meshed with the rack, The first connecting plate is arranged on the side of the first dovetail groove slider away from the dovetail groove guide rail, and the first laser displacement sensor is arranged on the first connecting plate; the second dovetail groove slider is slidably installed on the lower part of the dovetail groove guide rail, and the second adjustment knob is rotatably installed on the second dovetail groove slider through a second rotating shaft, the second rotating shaft extends into the second dovetail groove slide and is fixedly sleeved with the second gear, the second gear is meshed with the rack, the second dovetail groove slider is arranged on the side away from the dovetail groove guide rail, and the second laser displacement sensor is arranged on the second connecting plate.

[0013] Preferably, the Y-axis motion mechanism includes a second screw drive assembly, a movable plate and a third guide assembly, the third guide assembly is arranged on the workbench, the movable plate is slidably installed on the third guide assembly, the second screw drive assembly is used to drive the movable plate to slide along the third guide assembly, the mounting frame is arranged on the movable plate, and the second screw drive assembly is connected to the controller.

[0014] Preferably, the third guide assembly includes two third guide rails parallel to each other, each of the third guide rails is slidably mounted with a third slider group, and each of the third slider groups is connected to the lower part of the movable plate.

[0015] Preferably, the air supply and filtering mechanism comprises an air supply fan and a filter, the mounting port is arranged at the top of the protective cover, the air supply fan and the filter are sequentially mounted at the mounting port from top to bottom, and the air supply fan is connected to the controller.

[0016] Compared with the prior art, the present invention has achieved the following technical effects:

[0017] The ceramic substrate measuring device of the present invention comprises a workbench, a shield, an air supply filter mechanism, an X-direction motion mechanism, a tray, a Y-direction motion mechanism, a measuring mechanism and a controller, wherein the measuring mechanism comprises a mounting frame, a lifting assembly and a first laser displacement sensor, wherein the X-direction motion mechanism is used to drive the tray to move along the X-direction, and the tray is used to place the product to be measured or the calibration block. When working, the first laser displacement sensor is located above the tray, a calibration block with a known thickness is placed on the tray, the first laser displacement sensor measures the distance between the first laser displacement sensor and the upper surface of the calibration block, and then the calibration block is removed, the product to be measured is placed on the tray, the first laser displacement sensor measures the distance between the first laser displacement sensor and the upper surface of the product to be measured, and then the thickness of the product to be measured is calculated by combining the thickness of the calibration block and the distance between the first laser displacement sensor and the upper surface of the calibration block. The measurement accuracy can reach ±1μm, and the surface of the ceramic substrate is not contacted during the measurement process to prevent bumps, scratches and hidden cracks, avoid affecting the product, and avoid the phenomenon of measurement problems caused by contact point wear, which can ensure high measurement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A first three-dimensional structural diagram of the ceramic substrate measuring device provided by the present invention;

[0020] Figure 2 A second three-dimensional structural diagram of the ceramic substrate measuring device provided by the present invention;

[0021] Figure 3 This is a schematic diagram of the structure of the ceramic substrate measuring device provided by the present invention after removing the sliding door, left side glass, right side glass and rear side glass;

[0022] Figure 4 A three-dimensional structural diagram of the X-axis motion mechanism and the tray in the ceramic substrate measuring device provided by the present invention;

[0023] Figure 5 A front view of the X-axis motion mechanism and the tray in the ceramic substrate measuring device provided by the present invention;

[0024] Figure 6 A three-dimensional structural diagram of the X-axis motion mechanism, the tray, the Y-axis motion mechanism and the measuring mechanism in the ceramic substrate measuring device provided by the present invention;

[0025] Figure 7A left view of the X-axis motion mechanism, the tray, the Y-axis motion mechanism and the measuring mechanism in the ceramic substrate measuring device provided by the present invention;

[0026] Figure 8 A three-dimensional structural diagram of a measuring mechanism in a ceramic substrate measuring device provided by the present invention;

[0027] Fig. 9 This is a three-dimensional structural diagram of the annular limiting plate in the ceramic substrate measuring device provided by the present invention.

[0028] Explanation of reference numerals: 100, ceramic substrate measuring device; 1, workbench; 2, shield; 3, sliding door; 4, left glass; 5, opening; 6, right glass; 7, blower; 8, frame; 9, foot; 10, leg; 11, first guide rail; 12, moving table; 13, first motor; 14, first support; 15, first coupling; 16, first lead screw; 17, first lead screw nut; 18, first slider; 19, second guide rail; 20, linear telescopic drive component; 21, tray; 22, annular limit plate; 221, outer annular plate; 222, inner ring shaped plate; 23, the product to be tested; 24, the third guide rail; 25, the moving plate; 26, the mounting frame; 27, the dovetail groove guide rail; 28, the first dovetail groove slider; 29, the first adjusting knob; 30, the first rotating shaft; 31, the first connecting plate; 32, the first laser displacement sensor; 33, the second dovetail groove slider; 34, the second adjusting knob; 35, the second rotating shaft; 36, the second connecting plate; 37, the second laser displacement sensor; 38, the second motor; 39, the second support; 40, the second coupling; 41, the second lead screw; 42, the second lead screw nut; 43, the third slider. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] The purpose of the present invention is to provide a ceramic substrate measuring device to prevent the product from being bumped, scratched and cracked, and to ensure high-precision measurement.

[0031] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] like Figure 1-Figure 9As shown, this embodiment provides a ceramic substrate measuring device 100, including a workbench 1, a shield 2, an air supply and filtering mechanism, an X-direction motion mechanism, a tray 21, a Y-direction motion mechanism, a measuring mechanism and a controller. The shield 2 is arranged on the upper part of the workbench 1. Specifically, the bottom of the shield is an open structure and is fixedly connected to the upper part of the workbench 1. The X-direction motion mechanism is arranged on the workbench 1 and located in the shield 2. The X-direction motion mechanism is used to drive the tray 21 to move along the X-direction. The tray 21 is used to place a product 23 to be measured or a calibration block. The Y-direction motion mechanism is arranged on the workbench 1 and located in the shield 2. The Y-direction motion mechanism is used to drive the measuring mechanism to move along the Y-direction. It should be noted that the X-direction and the Y-direction are perpendicular to each other, and the X-direction is defined as the left-right direction, and the Y-direction is defined as the front-back direction. The measuring mechanism includes a mounting frame 26, a lifting assembly and a first laser displacement sensor 32. The lifting assembly is arranged on the mounting frame 26. The lifting assembly can drive the first laser displacement sensor 32 to move up and down. The first laser displacement sensor 32 can be located above the tray 21. An opening 5 is arranged on one side of the shield 2. The tray 21 can extend to the outside through the opening 5. A mounting port is arranged on the shield 2. An air supply filter mechanism is arranged at the mounting port. The X-axis motion mechanism, the Y-axis motion mechanism, the air supply filter mechanism and the first laser displacement sensor 32 are all connected to the controller.

[0033] During operation, the tray 21 is driven to move along the X direction by the X-direction motion mechanism, and the measuring mechanism is driven to move along the Y direction by the Y-direction motion mechanism, so that the first laser displacement sensor 32 is located above the tray 21, and a calibration block with a known thickness is placed on the tray 21. The first laser displacement sensor 32 measures the distance to the upper surface of the calibration block, and then the calibration block is removed, and the product 23 to be measured is placed on the tray 21. The first laser displacement sensor 32 measures the distance to the upper surface of the product 23 to be measured, and then the thickness of the product 23 to be measured is calculated in combination with the thickness of the calibration block and the distance between the first laser displacement sensor 32 and the upper surface of the calibration block. The measurement accuracy can reach ±1μm. During the measurement process, the surface of the ceramic substrate is not contacted to prevent bumps, scratches and hidden cracks, avoid affecting the product, and avoid measurement problems caused by wear of the contact points, thereby ensuring high measurement accuracy.

[0034] like Figure 4 and Figure 5As shown, the X-axis motion mechanism includes a first screw drive assembly, a movable table 12 and a first guide assembly, the first guide assembly is arranged on the workbench 1, the movable table 12 is slidably installed on the first guide assembly, the first screw drive assembly is used to drive the movable table 12 to slide along the first guide assembly, and the first screw drive assembly is connected to the controller; a second guide assembly is arranged on the upper part of the movable table 12, the length direction of the second guide assembly is consistent with the length direction of the first guide assembly, the tray 21 is slidably installed on the second guide assembly, and a linear telescopic drive component 20 for driving the tray 21 to slide along the second guide assembly is arranged on the upper part of the movable table 12, and the linear telescopic drive component 20 is connected to the controller.

[0035] The first guide assembly includes two mutually parallel first guide rails 11, each of which has a first slider group slidably mounted thereon, and each of which is connected to the lower portion of the moving platform 12. In this embodiment, the first slider group includes two first sliders 18.

[0036] The first screw drive assembly includes a first motor 13, a first screw 16, a first screw nut 17 and two first supports 14. A first strip hole is provided on the workbench 1. The length direction of the first strip hole is consistent with the length direction of the first guide rail 11, and the first strip hole is located between the two first guide rails 11. The two first supports 14 are both provided at the bottom of the workbench 1 and located at both ends of the first strip hole. The two ends of the first screw 16 are rotatably mounted in the two first supports 14 respectively. The first motor 13 is provided at the bottom of the workbench 1. The first motor 13 is connected to the controller, and the power output shaft of the first motor 13 is connected to one end of the first screw 16. The first screw nut 17 is provided on the first screw 16, and the first screw nut 17 passes through the first strip hole and is connected to the lower part of the moving platform 12. In this embodiment, the power output shaft of the first motor 13 is connected to one end of the first screw 16 through the first coupling 15.

[0037] When in use, the first motor 13 is started, causing the first screw 16 to rotate, and the first screw nut 17 to reciprocate along the first screw 16, thereby causing the movable platform 12 to move along the X direction, so that the second guide assembly, the linear telescopic drive component 20 and the tray 21 on the movable platform 12 move along the X direction.

[0038] The second guide assembly includes two second guide rails 19 parallel to each other, and a second slider group is slidably mounted on each second guide rail 19, and each second slider group is connected to the bottom of the tray 21. In this embodiment, the second slider group includes two second sliders. The linear telescopic drive component 20 is located between the two second guide rails 19, and the linear telescopic drive component 20 is connected to one end of the tray 21. The linear telescopic drive component 20 is used to drive the tray 21 to move along the X direction.

[0039] In this specific embodiment, the linear telescopic driving component 20 is a cylinder or an electric push rod.

[0040] The tray 21 is provided with a through hole, and an annular limiting plate 22 is provided on the upper part of the tray 21. The center hole of the annular limiting plate 22 corresponds to the position of the through hole, and the size of the center hole is larger than the size of the through hole. The annular limiting plate 22 is used to place the product 23 to be tested or the calibration block. The annular limiting plate 22 in this embodiment is fixed to the upper part of the tray 21 by multiple bolts.

[0041] like Fig. 9 As shown, the annular limit plate 22 in this embodiment includes an outer annular plate 221 and an inner annular plate 222 arranged at the inner lower part of the outer annular plate 221, and a step is formed between the inner annular plate 222 and the outer annular plate 221. The upper part of the inner annular plate 222 is used to place the product 23 to be tested or the calibration block, and the outer annular plate 221 is fixed to the upper part of the tray 21 by multiple bolts.

[0042] In this specific embodiment, the annular limiting plate 22 is made of PEEK material so as not to scratch the product to be tested 23 and the calibration block.

[0043] In this specific embodiment, the through hole is a rectangular through hole, and the annular limiting plate 22 is a rectangular plate with a rectangular center hole.

[0044] The measuring mechanism also includes a second laser displacement sensor 37. The lifting assembly can drive the second laser displacement sensor 37 to move up and down. The second laser displacement sensor 37 corresponds to the first laser displacement sensor 32 in the vertical direction. The second laser displacement sensor 37 can be located below the tray 21. The second laser displacement sensor 37 is connected to the controller.

[0045] When in use, the calibration block or the product to be tested 23 is placed above the inner ring plate of the annular limiting plate 22, and the lower part of the calibration block or the product to be tested 23 is exposed to the outside through the through hole to facilitate the second laser displacement sensor 37 located below to perform measurement.

[0046] The first lead screw drive assembly in this embodiment is used to drive the movable table 12 and other components on it to move along the X direction in the protective cover 2. The linear telescopic drive component 20 is used to enable the tray 21 to extend to the outside of the movable table 12 to facilitate the second laser displacement sensor 37 located below to perform measurement work, and the linear telescopic drive component 20 is used to enable the tray 21 to extend to the outside through the opening 5 on the protective cover 2 to facilitate the placement of the calibration block or the product to be measured 23.

[0047] The first lead screw drive assembly and the linear telescopic drive component 20 cooperate to realize the movement of the tray 21 along the X direction, ensuring that the calibration block or the product to be tested 23 is placed in and taken out outside the protective cover 2, thereby reducing dust from entering the protective cover 2.

[0048] like Figure 8 As shown, the lifting assembly includes a dovetail groove guide rail 27, a rack, a first gear, a second gear, a first dovetail groove slider 28, a second dovetail groove slider 33, a first adjusting knob 29, a second adjusting knob 34, a first connecting plate 31 and a second connecting plate 36. The dovetail groove guide rail 27 is vertically fixed on the mounting frame 26, and the rack is vertically arranged on the dovetail groove guide rail 27.

[0049] The first dovetail groove slider 28 is slidably installed on the upper part of the dovetail groove guide rail 27, and the first adjustment knob 29 is rotatably installed on the first dovetail groove slider 28 through the first rotating shaft 30. The first rotating shaft 30 extends into the first dovetail groove slide and is fixedly sleeved with a first gear, which is meshed with the rack. A first connecting plate 31 is provided on the side of the first dovetail groove slider 28 away from the dovetail groove guide rail 27, and a first laser displacement sensor 32 is provided on the first connecting plate 31.

[0050] By rotating the first adjusting knob 29, the first gear can be rotated, and then through the meshing relationship between the first gear and the rack, the first dovetail groove slider 28 can be moved up and down along the dovetail groove guide rail 27 to realize the up and down movement of the first laser displacement sensor 32, and then the distance between the first laser displacement sensor 32 and the upper surface of the calibration block can be adjusted according to the test distance required by the first laser displacement sensor 32.

[0051] The second dovetail groove slider 33 is slidably installed on the lower part of the dovetail groove guide rail 27, and the second adjustment knob 34 is rotatably installed on the second dovetail groove slider 33 through the second rotating shaft 35. The second rotating shaft 35 extends into the second dovetail groove slide and is fixedly sleeved with a second gear, and the second gear is meshed with the rack. A second connecting plate 36 is provided on the side of the second dovetail groove slider 33 away from the dovetail groove guide rail 27, and the second laser displacement sensor 37 is provided on the second connecting plate 36.

[0052] By rotating the second adjustment knob 34, the second gear can be rotated, and then through the meshing relationship between the second gear and the rack, the second dovetail groove slider 33 can be moved up and down along the dovetail groove guide rail 27 to realize the up and down movement of the second laser displacement sensor 37, and then the distance between the second laser displacement sensor 37 and the lower surface of the calibration block can be adjusted according to the test distance required by the second laser displacement sensor 37.

[0053] like Figure 6 and Figure 7As shown, the Y-axis motion mechanism includes a second screw drive assembly, a movable plate 25 and a third guide assembly. The third guide assembly is arranged on the workbench 1. The length direction of the third guide assembly is perpendicular to the length direction of the first guide assembly. The movable plate 25 is slidably installed on the third guide assembly. The second screw drive assembly is used to drive the movable plate 25 to slide along the third guide assembly. The mounting frame 26 is arranged on the movable plate 25, and the second screw drive assembly is connected to the controller.

[0054] The third guide assembly includes two third guide rails 24 parallel to each other, each of which is slidably mounted with a third slider 43 set, and each of which is connected to the lower part of the moving plate 25. The third slider 43 set in this embodiment includes two third sliders 43.

[0055] The second screw drive assembly includes a second motor 38, a second screw 41, a second screw nut 42 and two second supports 39. A second strip hole is provided on the workbench 1. The length direction of the second strip hole is consistent with the length direction of the third guide rail 24, and the second strip hole is located between the two third guide rails 24. The two second supports 39 are both provided at the bottom of the workbench 1 and located at both ends of the second strip hole. The two ends of the second screw 41 are rotatably mounted in the two second supports 39 respectively. The second motor 38 is provided at the bottom of the workbench 1. The second motor 38 is connected to the controller, and the power output shaft of the second motor 38 is connected to one end of the second screw 41. The second screw nut 42 is provided on the second screw 41, and the second screw nut 42 passes through the second strip hole and is connected to the lower part of the moving plate 25. In this embodiment, the power output shaft of the second motor 38 is connected to one end of the second screw 41 through the second coupling 40.

[0056] When in use, the second motor 38 is started, causing the second screw 41 to rotate, and the second screw nut 42 to reciprocate along the second screw 41, thereby causing the movable plate 25 to move along the Y direction, so that the mounting frame 26, lifting assembly, first laser displacement sensor 32 and second laser displacement sensor 37 on the movable plate 25 move along the Y direction.

[0057] The air supply filter mechanism includes an air blower 7 and a filter, the installation opening is set at the top of the shield 2, the air blower 7 and the filter are installed at the installation opening from top to bottom, and the air blower 7 is connected to the controller. The filter in this embodiment is a high-efficiency filter.

[0058] When working, the air blower 7 continuously delivers filtered fresh air to the product detection area, so that a pressure difference is generated between the product detection area and the outside of the protective cover 2, which can effectively prevent dust particles from entering the product detection area inside the protective cover 2 and reduce the influence of dust particles on the measurement.

[0059] The controller in this embodiment is a computer, which includes operating software. The operating software mainly controls the action of the device and stores and organizes the measured data. It also has the following functions: deviation adjustment of the measured value, deviation adjustment of the measured value for ceramic substrates of different materials, mainly involving some ceramic substrates with high light transmittance, the value measured by laser is different from the actual size of the ceramic substrate, so it is necessary to adjust the measured value of this ceramic substrate, so as to achieve the purpose of consistency between the final value and the actual value, so that the maximum deviation of the value of repeated measurement at the same point is less than 1μm.

[0060] This embodiment also includes a frame 8, a support plate is arranged on the upper part of the frame 8, a plurality of legs 10 are arranged on the lower part of the workbench 1, the lower part of each leg 10 is connected to the upper part of the support plate, and a plurality of feet 9 are arranged on the bottom of the frame 8.

[0061] The protective cover 2 in this embodiment is provided with a front mounting opening on the front side, a rear mounting opening on the rear side, a left mounting opening on the left side, and a right mounting opening on the right side. Two sliding doors 3 that are staggered front and back are provided at the front mounting opening. The front mounting opening is opened or closed by moving the sliding doors 3 left and right. After opening, it is convenient to operate the components inside the protective cover 2, such as turning the first adjusting knob 29 and the second adjusting knob 34; a rear side glass is provided at the rear mounting opening, a right side glass 6 is provided at the right mounting opening, and a left side glass 4 is provided at the left mounting opening. An opening 5 is provided on the left side glass 4, and the opening 5 is a strip opening, and the strip opening is extended along the front and rear directions.

[0062] The specific usage process is: turn on the blower 7, the controller controls the first motor 13 to move the movable platform 12 to the leftmost side of the protective cover 2, and then controls the linear telescopic drive component 20 to extend so that the tray 21 extends to the outside through the opening 5, and places a calibration block above the inner ring plate 222 of the annular limit plate 22. By controlling the linear telescopic drive component 20, the tray 21 and the calibration block on the annular limit plate 22 are moved back to the inside of the protective cover 2 through the opening 5, and at the same time, the tray 21 is located on the outside of the movable platform 12.

[0063] The controller controls the first motor 13 and the second motor 38 so that the first laser displacement sensor 32 and the second laser displacement sensor 37 are located above and below the calibration block, respectively. The operating software of the controller can display the distance between the first laser displacement sensor 32 and the upper surface of the calibration block, as well as the distance between the second laser displacement sensor 37 and the lower surface of the calibration block. By turning the first adjusting knob 29 and the second adjusting knob 34, the distance between the first laser displacement sensor 32 and the upper surface of the calibration block is 30 mm, and the distance between the second laser displacement sensor 37 and the lower surface of the calibration block is 30 mm.

[0064] The linear telescopic drive component 20 is controlled to extend so that the tray 21 extends to the outside through the opening 5, the calibration block is removed, and the product 23 to be tested is placed above the inner annular plate 222 of the annular limit plate 22. The linear telescopic drive component 20 is controlled to move the tray 21 and the product 23 to be tested on the annular limit plate 22 back to the inside of the protective cover 2 through the opening 5, and the product 23 to be tested is located between the first laser displacement sensor 32 and the second laser displacement sensor 37.

[0065] The first laser displacement sensor 32 measures the distance to the upper surface of the product to be measured 23, and the second laser displacement sensor 37 measures the distance to the lower surface of the product to be measured 23. The thickness of the product to be measured 23 is calculated by combining the thickness of the calibration block, the distance to the upper surface of the calibration block measured by the first laser displacement sensor 32, and the distance to the lower surface of the calibration block measured by the second laser displacement sensor 37. In this embodiment, the measurement accuracy is further improved by combining the first laser displacement sensor 32 and the second laser displacement sensor 37.

[0066] At the same time, since the emitted lasers of the first laser displacement sensor 32 and the second laser displacement sensor 37 are relatively thin, when the laser hits the product to be measured 23, only one point is measured. The dust particles may affect the measurement of the product to be measured 23. Therefore, in this embodiment, the regional measurement and averaging method is used to collect data. That is, during measurement, the X-axis and the Y-axis perform interpolation movement with a circle of 1 mm diameter. During the movement, the data of N points (the number can be changed) on the collected trajectory are calculated to obtain the final measurement data, and the final data accuracy can reach ±1μm.

[0067] In this embodiment, the operating software running in the computer can operate the device, such as starting the test, pausing, switching between automatic and manual modes, calibrating the first laser displacement sensor 32 and the second laser displacement sensor 37, etc. It should be noted that in the automatic mode, the mobile stage 12 and the mobile plate 25 automatically move to the set position after pressing a button, and in the manual mode, the operator presses the first forward button or the first backward button through the operating software to realize the forward or backward movement of the mobile stage 12, and presses the second forward button or the second backward button to realize the forward or backward movement of the mobile plate 25. The measured data can also be recorded and simply statistically summarized (such as the maximum value, the minimum value, and the average value), effectively reducing the statistical work of the data.

[0068] The present specification uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A ceramic substrate measuring device, characterized in that: The invention comprises a workbench, a shield, an air supply filter mechanism, an X-direction motion mechanism, a tray, a Y-direction motion mechanism, a measuring mechanism and a controller. The shield is arranged on the upper part of the workbench. The X-direction motion mechanism is arranged on the workbench and located in the shield. The X-direction motion mechanism is used to drive the tray to move along the X-direction. The tray is used to place the product to be tested or the calibration block. The Y-direction motion mechanism is arranged on the workbench and located in the shield. The Y-direction motion mechanism is used to drive the measuring mechanism to move along the Y-direction. The measuring mechanism comprises a mounting frame, a lifting assembly and a first laser displacement sensor. The lifting assembly is arranged on the mounting frame. The lifting assembly can drive the first laser displacement sensor to move up and down. The first laser displacement sensor can be located above the tray. An opening is arranged on one side of the shield. The tray can extend to the outside through the opening. A mounting port is arranged on the shield. The air supply filter mechanism is arranged at the mounting port. The X-direction motion mechanism, the Y-direction motion mechanism, the air supply filter mechanism and the first laser displacement sensor are all connected to the controller.

2. The ceramic substrate measuring device according to claim 1, characterized in that: The X-axis motion mechanism includes a first screw drive component, a movable table and a first guide component, wherein the first guide component is arranged on the workbench, the movable table is slidably mounted on the first guide component, the first screw drive component is used to drive the movable table to slide along the first guide component, and the first screw drive component is connected to the controller; a second guide component is arranged on the upper part of the movable table, the length direction of the second guide component is consistent with the length direction of the first guide component, the tray is slidably mounted on the second guide component, a linear telescopic drive component for driving the tray to slide along the second guide component is arranged on the upper part of the movable table, and the linear telescopic drive component is connected to the controller.

3. The ceramic substrate measuring device according to claim 2, characterized in that: The first guide assembly includes two mutually parallel first guide rails, each of which has a first slider group slidably mounted thereon, and each of the first slider groups is connected to the lower part of the moving platform.

4. The ceramic substrate measuring device according to claim 2, characterized in that: The second guide assembly includes two second guide rails parallel to each other, each of which has a second slider group slidably mounted thereon, each of which is connected to the bottom of the tray, and the linear telescopic drive component is located between the two second guide rails.

5. The ceramic substrate measuring device according to claim 1, characterized in that: A through hole is provided on the tray, and an annular limiting plate is provided on the upper part of the tray. The center hole of the annular limiting plate corresponds to the position of the through hole, the size of the center hole is larger than the size of the through hole, and the annular limiting plate is used to place the product to be tested or the calibration block.

6. The ceramic substrate measuring device according to claim 5, characterized in that: The measuring mechanism also includes a second laser displacement sensor. The lifting assembly can drive the second laser displacement sensor to move up and down. The second laser displacement sensor corresponds to the first laser displacement sensor in the vertical direction. The second laser displacement sensor can be located below the tray. The second laser displacement sensor is connected to the controller.

7. The ceramic substrate measuring device according to claim 6, characterized in that: The lifting assembly includes a dovetail groove guide rail, a rack, a first gear, a second gear, a first dovetail groove slider, a second dovetail groove slider, a first adjusting knob, a second adjusting knob, a first connecting plate and a second connecting plate. The dovetail groove guide rail is vertically fixed to the mounting frame, and the rack is vertically arranged on the dovetail groove guide rail; the first dovetail groove slider is slidably installed on the upper part of the dovetail groove guide rail, and the first adjusting knob is rotatably installed on the first dovetail groove slider through a first rotating shaft. The first rotating shaft extends into the first dovetail groove slide and is fixedly sleeved with the first gear. The first gear is meshed with the rack. The first connecting plate is arranged on the side of the first dovetail groove slider away from the dovetail groove guide rail, and the first laser displacement sensor is arranged on the first connecting plate; the second dovetail groove slider is slidably installed on the lower part of the dovetail groove guide rail, and the second adjustment knob is rotatably installed on the second dovetail groove slider through a second rotating shaft, the second rotating shaft extends into the second dovetail groove slide and is fixedly sleeved with the second gear, the second gear is meshed with the rack, the second dovetail groove slider is arranged on the side away from the dovetail groove guide rail, and the second laser displacement sensor is arranged on the second connecting plate.

8. The ceramic substrate measuring device according to claim 1, characterized in that: The Y-axis motion mechanism includes a second screw drive assembly, a movable plate and a third guide assembly, the third guide assembly is arranged on the workbench, the movable plate is slidably mounted on the third guide assembly, the second screw drive assembly is used to drive the movable plate to slide along the third guide assembly, the mounting frame is arranged on the movable plate, and the second screw drive assembly is connected to the controller.

9. The ceramic substrate measuring device according to claim 8, characterized in that: The third guide assembly includes two third guide rails parallel to each other, each of the third guide rails is slidably mounted with a third slider group, and each of the third slider groups is connected to the lower part of the moving plate.

10. The ceramic substrate measuring device according to claim 1, characterized in that: The air supply and filtering mechanism comprises an air supply fan and a filter. The mounting opening is arranged at the top of the protective cover. The air supply fan and the filter are sequentially mounted at the mounting opening from top to bottom. The air supply fan is connected to the controller.

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