Environmental control system and intelligent double-platform LDI device

Abstract

The invention provides an environment control system and intelligent double-platform LDI equipment, and belongs to the field of laser intelligent machining.The environment control system comprises a master control module, a water cooling machine, a drying machine, an air storage tank and an air blower, and the water cooling machine, the air storage tank and the air blower provide circulating cold water and high-pressure or negative-pressure air for a target area through independent pipelines under the control of the master control module; the device is used for regulating and controlling a target area to be in a constant-temperature, constant-humidity and constant-pressure working environment. The system provides cooling circulating water, dry air, high-pressure air or vacuumization for a working environment, ensures stable operation of equipment, and is convenient to popularize and apply in the detection and processing fields of IC support plates, soft plates, HDI plates, multi-layer plates, ceramic substrates, alloy plates and the like.

Description

Technical Field

[0001] The present invention belongs to the environmental control technology of precision machining, and specifically relates to an environmental control system and an intelligent dual-platform LDI device. Background Art

[0002] Laser Direct Imaging (LDI) is a device that uses a laser beam to accurately project a circuit pattern onto a photosensitive material to form a high-precision circuit board pattern. It is mainly used in the field of circuit board manufacturing, especially in the exposure process of PCB (Printed Circuit Board) technology. Because the processing environment of LDI is harsh, precise control of temperature, humidity, and pressure is required. Therefore, it is necessary to design a system that can simultaneously control the equipment environment. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide an environmental control system and an intelligent dual-platform LDI device, which can solve the above problems.

[0004] An environmental control system includes a master control module, a water cooler, a dryer, an air storage tank and a blower. The water cooler, the air storage tank and the blower provide circulating cold water and high-pressure or negative-pressure air to a target area through independent pipelines under the control of the master control module, so as to regulate the target area to be in a constant temperature, constant humidity and constant pressure working environment.

[0005] Furthermore, the dryer and the gas storage tank are connected in series to ensure the dryness of the stored gas.

[0006] Furthermore, the blower includes two modes, namely, forward and reverse modes, to supply pressurized gas or extract gas from the target area.

[0007] Furthermore, the master control module includes a master controller, a flow channel main pipe and a plurality of flow channel manifolds; the openings of the flow channel air pipes correspond to different target areas.

[0008] Furthermore, the flow channel main pipe has a built-in multi-channel casing for conveying different environmental control media.

[0009] The present application also provides an intelligent dual-platform LDI device, including an exposure station, a material table A, a material table B, an alignment module, an exposure calibration module and an environmental control system according to the above; the material table A and the material table B are arranged on both sides of the exposure station, and alternately load and unload and expose materials; two alignment modules are arranged across the material tables on the corresponding sides, and are used for front positioning of the materials to be processed; each material table is provided with an exposure calibration module, which is used for calibration during material loading; the target area of ​​the environmental control system is the exposure station.

[0010] Compared with the prior art, the beneficial effect of the present invention is that the system provides cooling circulating water, dry air, high-pressure air or vacuum to the working environment, ensuring the stable operation of the equipment, and is convenient for promotion and application in the detection and processing fields of IC substrates, flexible boards, HDI boards, multi-layer boards, ceramic substrates, alloy boards, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a schematic diagram of the environmental control system; Figure 2 and Figure 3 Schematic diagram of the intelligent dual-platform LDI device from different perspectives.

[0012] In the figure, 100. Exposure Station; 200, A material table; 300, B material table; 400, alignment module; 500, exposure calibration module; 600, master control module; 610, master controller; 620, flow channel main pipe; 630, flow channel manifold; 640, temperature control submodule; 700, water cooling machine; 800, dryer; 900, gas tank; 1000. Blower. DETAILED DESCRIPTION

[0013] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0014] Environmental control system An environmental control system includes a master control module 600, a water cooler 700, a dryer 800, a gas storage tank 900 and a blower 1000.

[0015] The water chiller 700, the air storage tank 900 and the blower 1000 provide circulating cold water, high-pressure or negative-pressure air to the target area through independent pipelines under the control of the master control module 600, so as to regulate the target area to a constant temperature, constant humidity and constant pressure working environment.

[0016] The dryer 800 and the gas storage tank 900 are connected in series to ensure the dryness of the stored gas.

[0017] The blower 1000 includes two modes, forward and reverse, to supply pressurized gas or extract gas from the target area.

[0018] The master control module 600 includes a master controller 610 , a flow channel main pipe 620 and a plurality of flow channel manifolds 630 ; the openings of the flow channel air pipes 630 correspond to different target areas.

[0019] Furthermore, the flow channel main pipe 610 has a built-in multi-channel casing for conveying different environmental control media.

[0020] The aforementioned media mainly include water and gas, which are transmitted through different pipelines respectively.

[0021] It should be noted that the flow path design for temperature control, humidity and pressure can adopt existing technologies and will not be elaborated here.

[0022] Furthermore, for local areas where heat is concentrated, an independent temperature control submodule 640 can be designed, which can adopt different methods such as water cooling, air cooling, etc. or a combination thereof.

[0023] Intelligent dual-platform LDI equipment An intelligent dual-platform LDI device includes an exposure station 100, an A material stage 200, a B material stage 300, an alignment module 400, an exposure calibration module 500 and the aforementioned environmental control system.

[0024] Among them, the A material table 200 and the B material table 300 are arranged on both sides of the exposure station 100, and are used for alternate loading and unloading and exposure; two alignment modules 400 are arranged across the material tables on the corresponding sides for front positioning of the materials to be processed; each material table is provided with an exposure calibration module 500 for calibration during material loading; the target area of ​​the environmental control system is the exposure station 100.

[0025] The material table structures of A material table 200 and B material table 300 are the same and they share a carrier line. The material tables include a material table driver, an air flotation guide assembly, a material table frame, a carrier module and a plate carrier module. The material table frame is connected to the dovetail protrusion at the top of the carrier line through the floating port of the air flotation guide assembly. The material table driver is arranged between the carrier line and the material table frame. The bottom of the height-adjustable carrier module is fixedly connected to the top of the material table frame. A plate carrier module with a vacuum suction plate is arranged on the top of the carrier module.

[0026] The equipment adopts front and rear double-station alternating exposure with high production efficiency, and the material table adopts dovetail air floating platform design to ensure long-stroke and high-precision angular swing accuracy control.

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An environmental control system, characterized in that: The environmental control system comprises a master control module (600), a water cooler (700), a dryer (800), an air storage tank (900) and a blower (1000); the water cooler (700), the air storage tank (900) and the blower (1000) provide circulating cold water and high-pressure or negative-pressure air to a target area through independent pipelines under the control of the master control module (600), so as to regulate the target area to be in a working environment of constant temperature, constant humidity and constant pressure.

2. The environmental control system according to claim 1, characterized in that: The dryer (800) and the gas storage tank (900) are connected in series to ensure the dryness of the stored gas.

3. The environmental control system according to claim 1, characterized in that: The blower (1000) includes two modes: forward and reverse, so as to supply pressurized gas or extract gas from a target area.

4. The environmental control system according to claim 1, characterized in that: The master control module (600) comprises a master controller (610), a flow channel main pipe (620) and a plurality of flow channel manifolds (630); the openings of the flow channel air pipes (630) correspond to different target areas.

5. The environmental control system according to claim 4, characterized in that: The flow channel main pipe (610) has a built-in multi-channel casing for conveying different environmental control media.

6. An intelligent dual-platform LDI device, characterized in that: It comprises an exposure station (100), an A material table (200), a B material table (300), an alignment module (400), an exposure calibration module (500), and an environmental control system according to any one of claims 1 to 5; Material table A (200) and material table B (300) are arranged on both sides of the exposure station (100) for alternate loading and unloading and exposure; two alignment modules (400) are arranged across the material tables on the corresponding sides for front positioning of the materials to be processed; each material table is provided with an exposure calibration module (500) for calibration during material loading; and the target area of ​​the environmental control system is the exposure station (100).

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