System and method for controlling inflation of OHB

Abstract

The invention provides a system and method for controlling inflation of an OHB, and the method comprises the steps: an MES selects an available OHB as an inflation destination, and transmits the inflation destination and inflation time to an MCS; the MCS transmits the inflation time to the CPC matched with the inflation destination, and transmits the inflation destination to the OHT; the CPC receives the inflation time as the timing time; the OHT carries the FOUP to be inflated to an inflation destination, the FOUP triggers an OHB base load to start inflation, the CPC starts timing, inflation is finished when the timing time is up, and the CPC transmits an inflation finishing signal to the MCS; and the MCS transmits an inflation ending signal to the MES, and the MES sends an instruction of moving away from the FOUP. According to the invention, the function of accurately controlling the inflation time is realized through a step-by-step communication mode of MES, MCS and CPC architectures, and unnecessary supply loss of dry air or nitrogen can be reduced while the requirements of a production process are met, so that the purpose of saving cost is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device manufacturing, and in particular to a system and method for controlling OHB inflation. Background Art

[0002] FOUP (Front Opening Unified Pod) gas filling equipment is a device used to fill FOUP with gas in semiconductor factories to reduce wafer oxidation and maintain the temperature, humidity and cleanliness of the internal environment of FOUP to meet the product process requirements. Currently, FOUP gas filling equipment in mainstream semiconductor factories is directly placed on OHB (Over Head Buffer) and directly picked up and placed by OHT (Overhead Hoist Transport) to save leading time.

[0003] The method of inflating a FOUP generally includes: using an OHT trolley to move the FOUP to be inflated to the OHB position for inflation, the FOUP triggers the OHB base load sensor to turn on (sensor on), that is, the inflation starts (purge start), the OHT trolley moves the FOUP away and turns off the load sensor (sensor off), that is, the inflation ends (purge stop). However, the inflation time required in this method does not match the actual inflation time.

[0004] In another method of inflating FOUP, the purge controller (XCDA Purge Controller, CPC) sets the purge time by group, and the OHT trolley moves the FOUP that needs to be inflated to different OHB positions as required. The FOUP triggers the start of the OHB base load inflation, and the CPC timer counts. When the inflation time is reached, the inflation ends, and the OHT trolley moves away from the FOUP. However, in this method, one CPC can only set one inflation time.

[0005] In another method of inflating the FOUP, the OHT cart moves the FOUP to be inflated to the OHB position, and the EAP (Equipment Automation Programming) controls the start and end of inflation through IPC (Inter-Process Communication) commands. However, this method simultaneously crosses multiple systems such as MES (Manufacturing Execution System) / MCS (Material Control System) / EAP, and the communication and control architecture is complex. Summary of the invention

[0006] The object of the present invention is to provide a system and method for controlling the inflation of OHB, which can accurately control the inflation time, reduce unnecessary supply loss of dry air or nitrogen while meeting the production process requirements, and save production costs.

[0007] To solve the above technical problems, according to a first aspect of the present invention, a method for controlling the inflation of OHB is provided, comprising the following steps:

[0008] The MES selects an available OHB in the OHB group as a gas filling destination, and transmits the gas filling destination and the gas filling time to the MCS;

[0009] The MCS transmits the inflation time to the CPC matching the inflation destination, and transmits the inflation destination to the OHT;

[0010] The CPC receives the inflation time sent by the MCS as the timing time;

[0011] The OHT transports the FOUP to be inflated to the inflation destination, the FOUP triggers the start of inflation of the OHB base load at the inflation destination, the CPC starts timing, and inflation ends when the timing time is reached, and the CPC transmits an inflation end signal to the MCS; and

[0012] The MCS transmits the inflation completion signal to the MES, and the MES issues an instruction to move the FOUP away.

[0013] Optionally, the method further includes: the MCS receiving a removal instruction from the MES and transmitting the instruction to the OHT, and the OHT removing the FOUP from the inflation destination.

[0014] Optionally, after the OHT moves away from the FOUP, it transmits a signal indicating that the move-away is completed to the CPC and the MCS, and the CPC updates the storage quantity of available OHBs and transmits it to the MCS.

[0015] Optionally, the MCS receives a signal indicating that the move-out is completed and the storage quantity of available OHBs, updates the storage quantity of available OHBs in the MCS, and transmits the update to the MES.

[0016] Optionally, the MES receives the storage quantity of available OHB transmitted by the MCS and updates it.

[0017] Optionally, the MES also determines the ID of the FOUP to be inflated, matches the ID with the inflation destination one by one, and transmits it to the MCS; the MCS transmits the ID and the inflation destination to the OHT; and the OHT transports each of the FOUP to the corresponding inflation destination.

[0018] Optionally, the CPC transmits the inflation completion signal to the MCS and, at the same time, transmits the ID of the FOUP that has completed inflation to the MCS; the MCS transmits the inflation completion signal and the ID of the FOUP that has completed inflation to the MES, and the MES issues an instruction to move the ID away.

[0019] In order to solve the above technical problems, according to a second aspect of the present invention, a system for controlling the inflation of OHB is provided, comprising:

[0020] The MES is used to select an available OHB in the OHB group as the inflation destination, and transmit the inflation destination and inflation time to the MCS; and at the same time, issue an instruction to move the FOUP away according to the inflation end signal sent back by the MCS;

[0021] MCS, used to transmit the inflation time to CPC matching the inflation destination, and transmit the inflation destination to OHT; and transmit the inflation end signal returned by CPC to MES;

[0022] OHT, used to transport the FOUP to be inflated to the inflation destination;

[0023] OHB, for inflating the FOUP; and

[0024] CPC is used to receive the inflation time sent by the MCS as the timing time, and to count when the OHB starts to inflate, to end the inflation when the timing time is reached, and to transmit an inflation end signal to the MCS.

[0025] Optionally, the OHT is further used to move the FOUP away from the inflation destination, and transmit a moving completion signal to the CPC and the MCS;

[0026] The CPC is also used to update the storage quantity of available OHB and transmit it to the MCS;

[0027] The MCS is further used to receive a move-out instruction from the MES and transmit it to the OHT, and to update the storage quantity of available OHBs and transmit it to the MES;

[0028] The MES is also used to update the storage quantity of available OHB.

[0029] Optionally, the MES is also used to determine the ID of the FOUP to be inflated, match the ID with the inflation destination one by one, and transmit it to the MCS; the MCS is also used to transmit the ID and the inflation destination to the OHT; the OHT is also used to transport each of the FOUP to the corresponding inflation destination.

[0030] In summary, in the system and method for controlling the inflation of OHB provided by the present invention, MES transmits the inflation destination and inflation time of the FOUP to be inflated to MCS, MCS transmits the inflation time to CPC, transmits the inflation destination to OHT, OHT transports the FOUP to the inflation destination, OHB at the inflation destination inflates the FOUP, CPC starts timing at the beginning of inflation, ends inflation when the inflation time is reached, and transmits the inflation end signal to MCS, MCS transmits the inflation end signal to MES, and MES issues an instruction to move the FOUP away. The present invention realizes the function of accurately controlling the inflation time through the step-by-step communication mode of the MES, MCS and CPC architecture, which can reduce unnecessary supply loss of dry air or nitrogen while meeting the production process requirements, so as to achieve the purpose of cost saving. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Those skilled in the art will appreciate that the accompanying drawings are provided for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.

[0032] Figure 1 It is a flowchart of a method for controlling OHB inflation provided by an embodiment of the present invention.

[0033] Figure 2 It is a flowchart of a method for controlling OHB inflation provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0034] In order to make the purpose, advantages and features of the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0035] As used in the present invention, the singular forms "one", "an", and "the" include plural objects, unless the content clearly indicates otherwise. As used in the present invention, the term "or" is generally used in a sense that includes "and / or", unless the content clearly indicates otherwise. As used in the present invention, the term "several" is generally used in a sense that includes "at least one", unless the content clearly indicates otherwise. As used in the present invention, the term "at least two" is generally used in a sense that includes "two or more", unless the content clearly indicates otherwise. In addition, the terms "first", "second", and "third" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features.

[0036] The core idea of ​​the present invention is to realize the precise control of the inflation time function through the step-by-step communication mode of MES, MCS and CPC architecture, which can reduce unnecessary dry air or nitrogen supply loss while meeting the production process requirements, so as to achieve the purpose of cost saving.

[0037] Figure 1 is a flowchart of a method for controlling OHB inflation provided by an embodiment of the present invention. Figure 1 As shown, the method for controlling the inflation of OHB provided in this embodiment includes the following steps:

[0038] Step S1: MES selects an available OHB in the OHB group as the inflation destination, and transmits the inflation destination and inflation time to MCS;

[0039] Step S2: the MCS transmits the inflation time to the CPC matching the inflation destination, and transmits the inflation destination to the OHT;

[0040] Step S3: the CPC receives the inflation time sent by the MCS as the timing time;

[0041] Step S4: the OHT transports the FOUP to be inflated to the inflation destination, the FOUP triggers the start of inflation of the OHB base load at the inflation destination, the CPC starts timing, and inflation ends when the timing time is reached, and the CPC transmits an inflation end signal to the MCS; and

[0042] Step S5: the MCS transmits the inflation completion signal to the MES, and the MES issues an instruction to move the FOUP away.

[0043] It should be understood that although Figure 1The steps in the flowchart are shown in sequence as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order restriction for the execution of these steps, and these steps can be executed in other orders. Moreover, Figure 1 At least part of the steps may include multiple steps or multiple stages. These steps or stages are not necessarily performed at the same time, but can be performed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed in turn or alternately with other steps or at least part of the steps or stages in other steps.

[0044] Figure 2 FIG. 1 is a flowchart of a method for controlling OHB inflation provided by an embodiment of the present invention. Figure 1 and Figure 2 The method for controlling the inflation of OHB provided in this embodiment is described.

[0045] In step S1 , the MES selects an available OHB in the OHB group as a charging destination, and transmits the charging destination and charging time to the MCS.

[0046] In this embodiment, the MES selects an available OHB in the OHB group as the inflation destination, and subsequently the FOUP to be inflated needs to be transported to the inflation destination for inflation, and the MES also sets the inflation time of the FOUP to be inflated. The MES transmits the inflation destination and the inflation time to the MCS.

[0047] In step S2, the MCS transmits the charging time to the CPC that matches the charging destination, and transmits the charging destination to the OHT.

[0048] In this embodiment, the MCS transmits the inflation time to the CPC that matches the inflation destination, the inflation destination is provided with an OHB for inflation, and the MCS transmits the inflation time to the CPC that matches the OHB, that is, the CPC for controlling the OHB. At the same time, the MCS transmits the inflation destination to the OHT.

[0049] In step S3, the CPC receives the inflation time sent by the MCS as a timing time, which is subsequently used to control the inflation time of the OHB.

[0050] In step S4, the OHT transports the FOUP to be inflated to the inflation destination, the FOUP triggers the start of inflation of the OHB base load at the inflation destination, the CPC starts timing, and inflation ends when the timing time is reached, and the CPC transmits an inflation end signal to the MCS.

[0051] The OHT receives the inflation destination transmitted by the MCS, moves the FOUP to be inflated to the inflation destination, and when the FOUP is placed on the OHB in the inflation destination, the inflation of the OHB base load is triggered. When inflation starts, the CPC starts timing, and when the inflation time reaches the timing time, the CPC controls the OHB to stop inflating, that is, inflation ends, and then the CPC transmits an inflation end signal to the MCS.

[0052] In step S5, the MCS transmits the inflation completion signal to the MES, and the MES issues an instruction to move the FOUP away.

[0053] In this embodiment, the MCS receives the inflation completion signal transmitted by the CPC and transmits it to the MES. The MES receives the inflation completion signal and issues an instruction to move the FOUP away.

[0054] In the method for controlling OHB inflation provided by the present invention, MES transmits the inflation destination and inflation time of the FOUP to be inflated to MCS, MCS transmits the inflation time to CPC, transmits the inflation destination to OHT, OHT transports the FOUP to the inflation destination, OHB at the inflation destination inflates the FOUP, CPC counts at the beginning of inflation, ends inflation when the inflation time is reached, and transmits the inflation end signal to MCS, MCS transmits the inflation end signal to MES, and MES issues an instruction to move the FOUP away. The present invention realizes the function of accurately controlling the inflation time through the step-by-step communication mode of the MES, MCS and CPC architecture, which can reduce unnecessary supply loss of dry air or nitrogen while meeting the production process requirements, so as to achieve the purpose of cost saving.

[0055] In one embodiment of the present invention, when multiple OHBs are required to inflate multiple FOUPs, the MES can also determine the ID of the FOUP to be inflated, and correspond the ID to the inflation destination one-to-one, that is, each ID of the FOUP to be inflated corresponds to an inflation destination, that is, each ID corresponds to an OHB for inflating the FOUP of the ID. Of course, in the case where the inflation time of different FOUPs is different, it can also correspond to the inflation time one-to-one, that is, the ID of the FOUP to be inflated, the inflation destination and the inflation time correspond one-to-one. The MES transmits the corresponding inflation destination, the ID and the inflation time to the MCS.

[0056] The MES transmits the inflation destination, the ID, and the inflation time to the MCS, and the MCS transmits the corresponding ID and the inflation destination to the OHT, and transmits the corresponding inflation time and the ID to the CPC.

[0057] The CPC receives the inflation time and the ID sent by the MCS, and uses the inflation time corresponding to each ID as the timing time for inflation of the ID.

[0058] The OHT transports each FOUP to the corresponding inflation destination, and the FOUP triggers the inflation of the corresponding OHB base load at the inflation destination. The CPC starts timing, and inflation ends when the timing time is reached. The CPC transmits the inflation end signal to the MCS and also transmits the ID of the FOUP that has completed inflation to the MCS; the MCS transmits the inflation end signal and the ID of the FOUP that has completed inflation to the MES, and the MES issues an instruction to move the ID away.

[0059] In one embodiment of the present invention, after the MES issues a move-out instruction, the method further includes: the MCS receives the move-out instruction from the MES and transmits it to the OHT, and the OHT moves the FOUP from the inflation destination. When the move-out instruction issued by the MES includes ID information, the MCS receives the move-out instruction of the ID and transmits it to the OHT, and the OHT moves the FOUP of the ID from the inflation destination corresponding to the ID.

[0060] The method further includes: after the OHT moves the FOUP, the OHT transmits a moving completion signal to the CPC and the MCS, and the CPC updates the storage quantity of available OHBs and transmits it to the MCS. The MCS receives the moving completion signal and the storage quantity of available OHBs, updates the storage quantity of available OHBs in the MCS, and transmits it to the MES. The MES receives the storage quantity of available OHBs transmitted by the MCS and updates it.

[0061] Accordingly, the present invention also provides a system for controlling the inflation of OHB, and the system is used to control the start and end of the inflation of OHB. Figure 2 As shown, the system for controlling the inflation of OHB includes:

[0062] The MES is used to select an available OHB in the OHB group as the inflation destination, and transmit the inflation destination and inflation time to the MCS; and at the same time, issue an instruction to move the FOUP away according to the inflation end signal sent back by the MCS;

[0063] MCS, used to transmit the inflation time to CPC matching the inflation destination, and transmit the inflation destination to OHT; and transmit the inflation end signal returned by CPC to MES;

[0064] OHT, used to transport the FOUP to be inflated to the inflation destination;

[0065] OHB, for inflating the FOUP; and

[0066] CPC is used to receive the inflation time sent by the MCS as the timing time, and to count when the OHB starts to inflate, to end the inflation when the timing time is reached, and to transmit an inflation end signal to the MCS.

[0067] Furthermore, the OHT is also used to move the FOUP away from the inflation destination and transmit a signal of the moving completion to the CPC and the MCS; the CPC is also used to update the storage quantity of available OHB and transmit it to the MCS; the MCS is also used to receive the moving instruction of the MES and transmit it to the OHT, as well as to update the storage quantity of available OHB and transmit it to the MES; the MES is also used to update the storage quantity of available OHB.

[0068] Furthermore, the MES is also used to determine the ID of the FOUP to be inflated, match the ID with the inflation destination one by one, and transmit it to the MCS; the MCS is also used to transmit the ID and the inflation destination to the OHT; the OHT is also used to transport each of the FOUP to the corresponding inflation destination.

[0069] It should be noted that the system and method for controlling OHB inflation provided by the present invention are carried out under the premise that the inflation time required by the product process is met and the pressure inside the FOUP is positive compared to the external environment.

[0070] In summary, in the system and method for controlling the inflation of OHB provided by the present invention, MES transmits the inflation destination and inflation time of the FOUP to be inflated to MCS, MCS transmits the inflation time to CPC, transmits the inflation destination to OHT, OHT transports the FOUP to the inflation destination, OHB at the inflation destination inflates the FOUP, CPC starts timing at the beginning of inflation, ends inflation when the inflation time is reached, and transmits the inflation end signal to MCS, MCS transmits the inflation end signal to MES, and MES issues an instruction to move the FOUP away. The present invention realizes the function of accurately controlling the inflation time through the step-by-step communication mode of the MES, MCS and CPC architecture, which can reduce unnecessary supply loss of dry air or nitrogen while meeting the production process requirements, so as to achieve the purpose of cost saving.

[0071] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A method for controlling the inflation of an OHB, characterized in that: The following steps are involved: The MES selects an available OHB in the OHB group as a gas filling destination, and transmits the gas filling destination and the gas filling time to the MCS; The MCS transmits the inflation time to the CPC matching the inflation destination, and transmits the inflation destination to the OHT; The CPC receives the inflation time sent by the MCS as the timing time; The OHT transports the FOUP to be inflated to the inflation destination, the FOUP triggers the start of inflation of the OHB base load at the inflation destination, the CPC starts timing, and inflation ends when the timing time is reached, and the CPC transmits an inflation end signal to the MCS; and The MCS transmits the inflation completion signal to the MES, and the MES issues an instruction to move the FOUP away.

2. The method for controlling OHB inflation according to claim 1, characterized in that: The method further includes: the MCS receiving a removal instruction from the MES and transmitting the instruction to the OHT, and the OHT removing the FOUP from the inflation destination.

3. The method for controlling OHB inflation according to claim 2, characterized in that: After the OHT moves out of the FOUP, it transmits a moving completion signal to the CPC and the MCS. The CPC updates the storage quantity of available OHBs and transmits it to the MCS.

4. The method for controlling OHB inflation according to claim 3, characterized in that: The MCS receives a signal indicating that the move-out is completed and the storage quantity of available OHBs, updates the storage quantity of available OHBs in the MCS, and transmits the update to the MES.

5. The method for controlling OHB inflation according to claim 4, characterized in that: The MES receives the storage quantity of available OHB transmitted by the MCS and updates the storage quantity.

6. The method for controlling the inflation of OHB according to any one of claims 1 to 5, characterized in that: The MES also determines the ID of the FOUP to be inflated, matches the ID with the inflation destination one by one, and transmits it to the MCS; the MCS transmits the ID and the inflation destination to the OHT; the OHT transports each of the FOUPs to the corresponding inflation destination.

7. The method for controlling the inflation of OHB according to claim 6, characterized in that: The CPC transmits the inflation completion signal to the MCS and transmits the ID of the FOUP that has completed inflation to the MCS; the MCS transmits the inflation completion signal and the ID of the FOUP that has completed inflation to the MES, and the MES issues an instruction to move the ID away.

8. A system for controlling the inflation of an OHB, characterized in that: include: The MES is used to select an available OHB in the OHB group as the inflation destination, and transmit the inflation destination and inflation time to the MCS; and at the same time, issue an instruction to move the FOUP away according to the inflation end signal sent back by the MCS; MCS, used to transmit the inflation time to CPC matching the inflation destination, and transmit the inflation destination to OHT; and transmit the inflation end signal returned by CPC to MES; OHT, used to transport the FOUP to be inflated to the inflation destination; OHB, for inflating the FOUP; and CPC is used to receive the inflation time sent by the MCS as the timing time, and to count when the OHB starts to inflate, to end the inflation when the timing time is reached, and to transmit an inflation end signal to the MCS.

9. The system for controlling the inflation of OHB according to claim 8, characterized in that: The OHT is further used to move the FOUP away from the inflation destination and transmit a moving completion signal to the CPC and the MCS; The CPC is also used to update the storage quantity of available OHB and transmit it to the MCS; The MCS is further used to receive a move-out instruction from the MES and transmit it to the OHT, and to update the storage quantity of available OHBs and transmit it to the MES; The MES is also used to update the storage quantity of available OHB.

10. The system for controlling the inflation of OHB according to claim 8 or 9, characterized in that: The MES is also used to determine the ID of the FOUP to be inflated, match the ID with the inflation destination one by one, and transmit it to the MCS; the MCS is also used to transmit the ID and the inflation destination to the OHT; the OHT is also used to transport each of the FOUP to the corresponding inflation destination.

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