Pressure transducer with improved operating pressure range

Abstract

A disclosed example pressure transducer includes: a pressure housing including a first cavity; a fluid input line configured to provide fluid to the first chamber; a first pressure measurement assembly of a first type and configured to output a first measurement signal based on a pressure of the fluid in the first cavity; a second pressure measurement assembly of a second type and configured to output a second measurement signal based on a pressure of the fluid in the first chamber; and a controller configured to determine a pressure of the fluid in the first chamber based on the first measurement signal when the pressure is within a first range, and to determine a pressure of the fluid in the first chamber based on the second measurement signal when the pressure is within a second range.

Description

[0001] Related Applications

[0002] This application claims the benefit of U.S. Provisional Patent Application Serial No. 63 / 596,034, entitled “PRESSURE TRANSDUCERS HAVING IMPROVED OPERATING PRESSURE RANGES,” filed on November 3, 2024. The entire contents of U.S. Provisional Patent Application Serial No. 63 / 596,034 are expressly incorporated herein by reference. Technical Field

[0003] The present disclosure relates generally to pressure transducers and, more particularly, to pressure transducers having an improved operating pressure range. Background Art

[0004] A pressure sensor or pressure transducer measures the pressure of a fluid input to the sensor compared to a reference pressure. A pressure sensor can be configured to compare the input pressure to a fixed reference pressure or a variable reference pressure. Summary of the invention

[0005] A pressure transducer having an improved operating pressure range is disclosed, substantially as illustrated by and described in conjunction with at least one of the accompanying drawings, as more fully set forth in the claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] These and other features, aspects and advantages of the present disclosure will be better understood when the following detailed description is read with reference to the accompanying drawings, in which like reference numerals refer to like parts throughout, and in which:

[0007] Figure 1 is a block diagram of an example process control system including a pressure transducer with a fixed reference pressure in accordance with aspects of the present disclosure.

[0008] Figure 2 is a schematic diagram of an example pressure sensor according to aspects of the present disclosure, which example pressure sensor can be used to implement Figure 1 pressure sensor.

[0009] Figure 3 yes Figure 2 A perspective view of an example pressure measurement assembly.

[0010] Figure 4 yes Figure 2 Another perspective view of an example pressure measurement assembly.

[0011] Figure 5is a flowchart representing example machine-readable instructions that may be executed by Figure 2 A pressure transducer is implemented to determine the pressure of a fluid.

[0012] The drawings are not necessarily drawn to scale. Where appropriate, similar or identical reference numerals are used to represent similar or identical components. DETAILED DESCRIPTION

[0013] In order to promote an understanding of the principles of the claimed technology and present its best currently understood mode of operation, reference will now be made to the embodiments shown in the drawings and specific language will be used to describe these embodiments. However, it should be understood that this is not intended to limit the scope of the claimed technology, as these changes and further modifications of the illustrated apparatus and further applications of the principles of the claimed technology illustrated herein are generally within the scope of those skilled in the art to which the claimed technology belongs.

[0014] Conventional pressure gauges use pressure measurement components that have high accuracy within certain ranges. However, the operating range of conventional pressure gauges may be insufficient and / or the accuracy may vary within a sub-range of the operating range. In addition, conventional pressure gauges may be unstable during the life of the sensor.

[0015] The disclosed example pressure transducer includes multiple pressure measurement components (also referred to as pressure sensors) of different types to provide extended range pressure measurements with low error and high stability. In some examples, the pressure transducer includes a first pressure measurement component of a first type (e.g., a micro-electromechanical pressure sensor) and a second pressure measurement component of a second type (e.g., a capacitive diaphragm gauge). A control circuit system can be used to select which of the multiple pressure measurement components to use for pressure measurement. In some examples, since different pressure measurement components have different error factors at different pressures, different types of pressure measurement components are selected for pressure measurement for different ranges of pressure measurement.

[0016] In some examples, the ranges over which each pressure measurement assembly provides less than a threshold error partially overlap, and one of the pressure measurement assemblies can be used to calibrate the other pressure measurement assembly. For example, if one type of pressure measurement assembly is more prone to drift over time or has other instabilities, the other type of pressure measurement assembly can be used to recalibrate the pressure measurement assembly to compensate for the drift or instability.

[0017] The disclosed example pressure transducer includes: a pressure housing including a first chamber; a fluid input pipeline configured to provide fluid to the first chamber; a first pressure measurement component, which is of a first type and is configured to output a first measurement signal based on the pressure of the fluid in the first chamber; a second pressure measurement component, which is of a second type and is configured to output a second measurement signal based on the pressure of the fluid in the first chamber; and a controller, which is configured to determine the pressure of the fluid in the first chamber based on the first measurement signal when the pressure is within a first range, and to determine the pressure of the fluid in the first chamber based on the second measurement signal when the pressure is within a second range.

[0018] In some example pressure transducers, the first pressure measurement assembly includes a micro-electromechanical pressure sensor. In some example pressure transducers, the micro-electromechanical pressure sensor includes a trench etched resonant pressure sensor.

[0019] In some example pressure transducers, the second pressure sensor includes a capacitive diaphragm gauge. In some example pressure transducers, the pressure housing includes a first cavity and a second cavity separated by a measuring diaphragm, and the second pressure measurement assembly is positioned in the second cavity. Some example pressure transducers further include a heater configured to heat at least the first cavity and the second cavity based on a target temperature. In some example pressure transducers, the first pressure measurement assembly is at least partially positioned in the first cavity or at least partially positioned in the second cavity.

[0020] In some example pressure transducers, the first range and the second range cover at least 0.01 Torr to 100 Torr. In some example pressure transducers, the first range and the second range cover at least 0.1 Torr to 1000 Torr. In some example pressure transducers, the first range and the second range cover at least 0.01 Torr to 1000 Torr.

[0021] In some example pressure transducers, the controller is configured to calibrate the other of the first pressure measurement assembly or the second pressure measurement assembly based on an output of one of the first pressure measurement assembly or the second pressure measurement assembly when the pressure of the fluid is within a predetermined range. In some example pressure transducers, the first range partially overlaps with the second range, and the predetermined range is at least partially within the overlapping portion of the first range and the second range. In some example pressure transducers, the first range partially overlaps with the second range.

[0022] Figure 1 is a block diagram of an example process control system 100 that includes a pressure transducer 102 . Figure 1The example process control system 100 includes a process chamber 104 to which a pressure transducer 102 is fluidly coupled via a fluid input line 106 to measure a pressure of the process chamber 104 .

[0023] The example process chamber 104 may receive one or more inputs, such as process feed materials, via a corresponding number of feed lines 108a, 108b, which may be controlled via mass flow controllers 110a, 110b.

[0024] The example system 100 may include a vacuum pump 112 or other pressure controlled pump; and a valve 114 to control flow between the vacuum pump 112 and the process chamber 104. The valve 114 may be controlled by a controller 116, a computing device, and / or any other control technique to maintain the pressure in the process chamber 104 within a desired range. The example pressure transducer 102 is communicatively coupled to the controller 116 to provide pressure feedback to the controller 116 (e.g., for a pressure control loop). For example, as the pressure in the process chamber 104 increases, the pressure transducer 102 measures the pressure and provides a signal representative of the pressure to the controller 116, which then controls the valve 114 to increase flow from the process chamber 104 to the vacuum pump 112. The vacuum pump 112 may have an output of the process to any appropriate location based on the nature of the process.

[0025] exist Figure 1 In an example of , the pressure transducer 102 is configured to have a fixed pressure 118, and the input pressure of the fluid received via the fluid input pipeline 106 is compared with the fixed pressure to output a pressure signal. For example, as discussed in more detail below, the pressure transducer 102 can be provided with a sealable evacuation port, which can be sealed when the desired pressure is provided within the pressure transducer 102, and / or the pressure transducer 102 can be assembled and sealed within a volume having a desired reference pressure. The fixed pressure 118 can be a vacuum pressure or another predetermined fixed reference pressure, which can be lower than, equal to, or higher than the nominal atmospheric pressure. In Figure 1 In the configuration of , the pressure transducer 102 may be used as an absolute pressure sensor.

[0026] Figure 2 is a schematic diagram of an example pressure transducer 200 that may be used to implement Figure 1 The pressure transducer 102 of the example pressure transducer 200 includes a first pressure measurement assembly 202, a second pressure measurement assembly 250, and a pressure housing 204. The pressure transducer 200 is connected to a fluid input line 208 (e.g., Figure 1 The device receives fluid through a fluid input line 106, measures the absolute pressure of the received fluid, and outputs one or more signals representing the measured pressure.

[0027] refer to Figure 2 , the first pressure measurement assembly 202 is combined with the pressure housing 204 to define a measurement chamber 222. The pressure housing 204 is attached to the fluid input line 208 and the first pressure measurement assembly 202 to define the measurement chamber 222. The example pressure housing 204 is fixed and sealed to both the fluid input line 208 and the first pressure measurement assembly 202. The first pressure measurement assembly 202 may also be referred to as a "first sensor core", wherein the first pressure measurement assembly 202 performs a first measurement, and the measurement result is converted into a first output signal.

[0028] In the illustrated example, the first pressure measurement assembly 202 includes a microelectromechanical pressure sensor 206 coupled to a diaphragm 210. In some examples, the microelectromechanical pressure sensor 206 is a trench etch resonant pressure sensor or other silicon micromachined in-plane resonant structure, wherein the microelectromechanical pressure sensor 206 outputs an output signal having a resonant frequency based on the pressure applied to the diaphragm 210. Example trench etch resonant pressure sensors that may be used to implement the microelectromechanical pressure sensor 206 are described in "Advances in Core Fundamental Sensor Technologies Enabling Improvements in the Metrological Transfer Standards of Pressure Measurement," Moisoi et al., Metrologist - NCSLI Global News, Vol. 15, No. 2, pp. 46-55 (2002) ("Moisoi"). The entire contents of Moisoi are incorporated herein by reference. Figure 3 yes Figure 2 2 is a perspective view of an example first pressure measurement assembly 202. Figure 4 yes Figure 2 Another perspective view of an example first pressure measurement assembly 202.

[0029] The diaphragm 210 is subjected to pressure within the measurement cavity 222 and transmits the pressure to the micro-electromechanical pressure sensor 206 via the incompressible fluid within the sensor cavity 212. The micro-electromechanical pressure sensor 206 is positioned at the distal end of the sensor cavity 212 relative to the diaphragm 210, and the incompressible fluid fills the rest of the sensor cavity 212. In some examples, the incompressible fluid is an incompressible oil, which can be further non-conductive. Additionally or alternatively, the micro-electromechanical pressure sensor 206 includes a second diaphragm (such as a silicon diaphragm) to electrically insulate the micro-electromechanical pressure sensor 206 from the incompressible fluid while transmitting force from the fluid to the resonant component of the micro-electromechanical pressure sensor 206.

[0030] The diaphragm 210 may have an increased or decreased diameter to further increase or decrease the sensitivity of the first pressure measurement assembly 202 .

[0031] The micro-electromechanical pressure sensor 206 is connected to the measurement circuit system 214 via ports 220, 221 for supplying input signals and / or providing output signals. The first pressure measurement assembly 202 can define a hot furnace chamber 216, which is in fluid communication with the ambient pressure. The example micro-electromechanical pressure sensor 206 can have an integrated pressure reference sealed into the micro-electromechanical pressure sensor 206. For example, a silicon diaphragm within the micro-electromechanical pressure sensor 206 separates the pressure reference from the sensor cavity 212, and the resonant element of the micro-electromechanical pressure sensor 206 resides in the reference pressure cavity of the micro-electromechanical pressure sensor 206. The micro-electromechanical pressure sensor 206 measures the pressure applied to the diaphragm 210 relative to the integrated pressure reference. The integrated pressure reference in the micro-electromechanical pressure sensor 206 can be established, for example, in the construction of the micro-electromechanical pressure sensor 206.

[0032] The additional ports may provide heating power to the heater 218 and / or provide temperature sensor data from the temperature sensor 232 for the control circuitry 228 to control the heater 218 .

[0033] exist Figure 2 In the example of FIG. 1 , the surface of the diaphragm 210 has a circular convolution that can be concentric with the diaphragm 210 and allows the diaphragm 210 to flex axially with minimal internal tension changes to improve the linearity of the micro-electro-mechanical pressure sensor 206. Because the pressure on the diaphragm 210 is measured by the micro-electro-mechanical pressure sensor 206 (e.g., by measuring changes in the resonant frequency of the drive circuit), the increase in the linear movement of the diaphragm 210 improves the accuracy of the micro-electro-mechanical pressure sensor 206.

[0034] Compared to conventional capacitive sensors in which the diaphragm is part of the capacitive electrode and the sensor output changes with diaphragm displacement, the example microelectromechanical pressure sensor 206 has reduced sensitivity to contamination on the diaphragm 210 (e.g., particles from the input line 208). Instead of relying on the sensitivity of the diaphragm 210 to affect the capacitance, the diaphragm 210 transfers the pressure in the measurement cavity 222 to the incompressible fluid within the sensor cavity 212. In this way, the example pressure transducer 200 can extend the life of the microelectromechanical pressure sensor 206 in contamination-prone applications, and the microelectromechanical pressure sensor 206 can be packaged into a smaller package than conventional sensors, for example because the guard volume that reduces contamination on the diaphragm is eliminated.

[0035] To further extend the operational measurement range beyond the range of the micro-electromechanical pressure sensor 206, the example pressure transducer 200 includes a second pressure measurement assembly 250 configured to measure the pressure in the measurement cavity 222 using a different sensor configuration. Figure 2 In the example of FIG. 2 , the second pressure measurement assembly 250 is a capacitance diaphragm gauge in which a flexible measurement diaphragm 252 is coupled to a measurement electrode 254. As the pressure at the fluid input line 208 changes relative to a reference pressure (e.g., vacuum pressure), the measurement diaphragm 252 moves or flexes, thereby changing the capacitance at the measurement electrode 254 by an amount corresponding to the pressure at the fluid input line 208 and / or in the measurement chamber 222. The capacitance signal is output from the second pressure measurement assembly 250 via one or more signal ports 270.

[0036] exist Figure 2 In the example of , the second pressure measurement assembly 250 further includes a reference electrode 256 that also measures capacitance when the measurement diaphragm 252 moves in response to pressure. The electrodes 254, 256 are metallized to form two capacitors with the flexible measurement diaphragm 252. The signals generated by the two electrodes 254, 256 vary with pressure, but at different rates. The signal from the reference electrode 256 is output via the signal port 270 and can be used to measure and offset common mode errors (e.g., errors caused by temperature).

[0037] The example second pressure measurement assembly 250 has a sensor housing 258 that contains a reference pressure for the second pressure measurement assembly 250. The sensor housing 258 includes a first section 260 and a second section 262. The first section 260 supports the electrodes 254, 256 and cooperates with the third section 264 to fix the measuring diaphragm 252. For example, the measuring diaphragm 252 can be fixed between the first section 260 and the third section 264 evenly around the circumference of the diaphragm 252.

[0038] The measuring diaphragm 252 separates the measuring chamber 222, in which the electrodes 254, 256 are positioned, from a second chamber 272 within the pressure housing 204. Figure 2 2. The first pressure measurement assembly 202 is illustrated as being positioned in the measurement cavity 222, but in other examples, the first pressure measurement assembly 202 may be at least partially positioned in the second cavity 272.

[0039] Pressure transducer 200 may include a plasma shield 268 or other shielding positioned between fluid input line 208 and measuring diaphragm 252. Plasma shield 268 includes one or more apertures to allow the pressure of the input fluid to be applied to measuring diaphragm 252, but includes one or more surfaces to block contaminants, thereby reducing the accumulation of contaminants on measuring diaphragm 252.

[0040] The second section 262 is fixed to one end of the first section 260 to close the second pressure measurement assembly 250. The signal port 270 extends through the second section 262 and is hermetically sealed with the second section 262 to maintain a reference pressure within the second pressure measurement assembly 250. The signal port 270 sends one or more measurement signals (e.g., signals representing measured pressures) and zero or more reference signals (e.g., signals representing measured reference signals, such as to reduce or eliminate common mode errors present in one or more measurement signals). The measurement circuit system 214 is connected to the signal port 270 to receive the measurement signal and / or the reference signal, and processes the measurement signal and / or the reference signal to obtain a pressure measurement result of the second pressure measurement assembly 250.

[0041] The first pressure measurement assembly 202, the second pressure measurement assembly 250, and / or the pressure housing 204 are at least partially surrounded by one or more outer shells 266. The outer shells 266 can provide thermal insulation and / or physical protection to the first pressure measurement assembly 202, the second pressure measurement assembly 250.

[0042] Pressure transducer 200 further includes one or more heaters 218 to increase the temperature of first pressure measurement assembly 202 and / or second pressure measurement assembly 250 (e.g., to reduce the effects of thermal gradients between micro-electromechanical pressure sensor 206 and process fluid). Example heaters 218 can be positioned around the outside of outer housing 266, and / or within outer housing 266 and around the outside of pressure housing 204, first pressure measurement assembly 202, and / or second pressure measurement assembly 250. In some examples, heaters 218 are controlled to heat first pressure measurement assembly 202 and / or second pressure measurement assembly 250 to a set point temperature, which in some cases is at least the expected process temperature of the fluid received via fluid input line 208. In some examples, one or more heat sinks are positioned to form contact between heater 218 and outer housing 266, and / or between heater 218 and pressure housing 204, first pressure measurement assembly 202, and / or second pressure measurement assembly 250 to more effectively distribute heat over a larger area and reduce thermal gradients. Outer housing 266 and / or pressure housing 204 can be constructed using thermally conductive materials to reduce temperature gradients within outer housing 266 and / or pressure housing 204.

[0043] The heater 218 can improve the measurement accuracy of the first pressure measurement assembly 202 and / or the second pressure measurement assembly 250 over a wide input pressure range, and / or the measurement stability over the life of the first pressure measurement assembly 202 and / or the second pressure measurement assembly 250. The heater 218 can further prevent long-term errors caused by process-induced drift. Figure 2 Two example heaters 218 are shown heating two different zones, but pressure transducer 200 may include more or fewer heaters 218 and / or more or fewer heating zones.

[0044] Pressure transducer 200 further includes control circuitry 228 that receives measurements from measurement circuitry 214 , controls heater power supply 230 to provide power to heater 218 , and receives temperature feedback signals from heater 218 and / or a temperature sensor 232 on pressure housing 204 .

[0045] The control circuit system 228 may be implemented using at least one controller or processor that controls the operation of the pressure transducer 200. The control circuit system 228 receives and processes a plurality of inputs. The control circuit system 228 may include one or more microprocessors (e.g., one or more "general purpose" microprocessors, one or more special purpose microprocessors, and / or ASICs) and / or any other type of processing device. For example, the control circuit system 228 may include one or more digital signal processors (DSPs). The control circuit system 228 may further include a memory device and / or a data storage device.

[0046] The example measurement circuit system 214 is connected to the output port 220 and the signal port 270 to receive the measurement signal, and / or to the input port 222 to provide an input or drive signal to drive the resonance of the micro-electromechanical pressure sensor 206. For example, the measurement circuit system 214 can apply a drive signal to the micro-electromechanical pressure sensor 206 via the input port 222, measure the frequency of the resulting signal output by the micro-electromechanical pressure sensor 206 via the output port 220 and / or the frequency of the resulting signal output by the measurement electrode 254 via the signal port 270, and determine the measured pressure based on the received measurement signal. For example, the measurement circuit system 214 can be calibrated for a set of frequencies and pressures after construction.

[0047] In some examples, the first pressure measurement component (e.g., micro-electromechanical pressure sensor 206) is configured to output a pressure measurement signal having a threshold error less than a threshold error for a fluid having a pressure of at least 1 Torr to 100 Torr (e.g., including a pressure range of at least 1 Torr to 100 Torr, and the pressure range may include a pressure below 1 Torr and / or a pressure above 100 Torr). In some examples, the micro-electromechanical pressure sensor 206 is configured to output a pressure measurement signal having a threshold error less than a threshold error for a fluid having a pressure of at least 10 Torr to 1000 Torr. In some examples, the micro-electromechanical pressure sensor 206 is configured to output a pressure measurement signal having a threshold error less than a threshold error for a fluid having a pressure of at least 1 Torr to 1000 Torr. An example threshold error is 0.1500% of the output signal (reading). In other examples, the pressure transducer 200 may be configured to use other pressure ranges as operating ranges, which may include a 2-decade range or a 3-decade range (in Torr order) and / or a larger operating range, while maintaining less than a threshold error within the operating range.

[0048] In some examples, the second pressure measurement assembly 250 (e.g., a capacitive diaphragm gauge) is configured to output a pressure measurement signal having a threshold error for a fluid having a pressure of at least from 0.01 Torr to 1 Torr (e.g., including a pressure range of at least 0.01 Torr to 1 Torr, and the pressure range may include pressures below 0.01 Torr and / or pressures above 1 Torr). In some examples, the second pressure measurement assembly 250 is configured to output a pressure measurement signal having a threshold error for a fluid having a pressure of at least from 0.1 Torr to 10 Torr. In some examples, the second pressure measurement assembly 250 is configured to output a pressure measurement signal having a threshold error for a fluid having a pressure of at least from 0.01 Torr to 10 Torr. Example threshold errors include 0.1500% and 0.2500%, and may be a threshold error different from the threshold error of the first pressure measurement assembly 202.

[0049] In combination, the first pressure measurement assembly 202 and the second pressure measurement assembly 250 provide the pressure transducer with a large operating pressure range that can be measured with low error and high stability. For example, in combination, the first pressure measurement assembly 202 and the second pressure measurement assembly 250 can be configured to output a pressure measurement signal having less than a threshold error for a fluid having a pressure of at least from 0.01 torr to 100 torr, wherein the measurement signal from each of the first pressure measurement assembly 202 and the second pressure measurement assembly 250 is for a different sub-range of the entire range, and the sub-ranges can partially overlap. In some examples, the first pressure measurement assembly 202 and the second pressure measurement assembly 250 are configured to output a pressure measurement signal having less than a threshold error in combination for a fluid having a pressure of at least from 0.1 torr to 1000 torr. In some examples, the first pressure measurement assembly 202 and the second pressure measurement assembly 250 are configured to output a pressure measurement signal having less than a threshold error in combination for a fluid having a pressure of at least from 0.01 torr to 1000 torr. In some examples, a sub-range of the total output pressure range has a lower error than other sub-ranges of the total output pressure range.

[0050] The control circuit system 228 determines which of the multiple measurement signals is used as the measured output signal. Figure 2 In an example, when the pressure is within a first range, the control circuit system 228 determines the pressure of the input fluid based on a measurement signal from the first pressure measurement component 202 (e.g., a micro-electromechanical pressure sensor 206), and when the pressure is within a second range, the control circuit system determines the pressure of the input fluid based on a measurement signal from the second pressure measurement component 250 (e.g., a capacitive diaphragm gauge). In some examples, the first range and the second range are selected based on the respective measurement accuracies of the first pressure measurement component 202 and the second pressure measurement component 250. For example, the control circuit system 228 can provide a pressure range less than a first threshold measurement error for the first pressure measurement component 202 to determine the measurement result based on the output signal from the first pressure measurement component 202, and provide a pressure range less than a second threshold measurement error for the second pressure measurement component 250 to determine the measurement result based on the output signal from the second pressure measurement component 250. The first threshold measurement error and the second threshold measurement error can be the same or different. Figure 2 The first range and the second range partially overlap, so that the control circuit system 228 can select from either the first pressure measurement component or the second pressure measurement component 250 within the overlapping portion of the pressure range.

[0051] In some examples, when the first pressure measurement assembly 202 is subject to lower errors than the second pressure measurement assembly 250, the control circuit system 228 uses the output signal of the first pressure measurement assembly 202 to calibrate the output of the second pressure measurement assembly 250. For example, when the control circuit system 228 detects that the input pressure is within a predetermined overlap range, the control circuit system 228 may execute a calibration procedure to use the output signal of the first pressure measurement assembly 202 to calibrate the output signal of the second pressure measurement assembly 250. Additionally or alternatively, when the input fluid pressure is within a portion of the overlap range, within which the second pressure measurement assembly 250 is subject to lower errors than the first pressure measurement assembly 202, the control circuit system 228 may use the output signal of the second pressure measurement assembly 250 to calibrate the output of the first pressure measurement assembly 202.

[0052] The example pressure transducer 200 may further include communication circuitry 234 to communicate the measurements to an external computing or control device (e.g., Figure 1 116). For example, communication circuit system 234 may include any wired and / or wireless communication circuit system. In some examples, communication circuit system 234 performs digital communication to transmit digital measurements output by measurement circuit system 214. By using digital communication (such as EtherCAT), accurate measurements made using pressure transducer 200 during communication are preserved. Communication circuit system 234 may further receive command signals, which are provided to control circuit system 228. Example command signals include configuration information, such as target heating temperature, temperature reporting interval, and / or any other desired configuration information.

[0053] Figure 5 is a flow chart representing example machine readable instructions 500 that may be executed by Figure 2 The pressure transducer 200 is implemented to determine the pressure of the fluid.

[0054] At block 502, the pressure transducer 200 receives an input fluid in the measurement chamber 222 via the fluid input line 208. For example, the fluid input line 208 may be coupled to Figure 1 The processing chamber 104 is provided to measure the pressure of a process fluid executed in the processing chamber 104.

[0055] At block 504, the first pressure measurement assembly 202 generates a first pressure measurement signal measuring the pressure in the cavity 222. For example, the micro-electromechanical pressure sensor 206 outputs a signal having a resonant frequency based on the pressure applied to the diaphragm 210 (e.g., via the output port 220). The first pressure measurement assembly 202 outputs the first pressure measurement signal to the measurement circuit system 214.

[0056] At block 506, the second pressure measurement assembly 250 generates a second pressure measurement signal that measures the pressure in the cavity 222. For example, the electrodes 254, 256 output the measurement signal and the reference signal (e.g., via the signal port 270), which may be processed by the measurement circuit system 214 to remove common mode errors from the measurement signal. The second pressure measurement assembly 250 outputs the second pressure measurement signal to the measurement circuit system 214.

[0057] At block 508, the control circuit system 228 determines whether the measured pressure (e.g., the first pressure measurement signal and / or the second pressure measurement signal) is within a first pressure range. For example, the first pressure range can be a predetermined pressure range within which the first pressure measurement signal has an error less than a threshold. If the measured pressure is within the first range (block 508), then at block 510, the control circuit system 228 determines the pressure of the fluid based on the first pressure measurement signal.

[0058] At block 512, control circuit system 228 determines whether the measured pressure (e.g., the first pressure measurement signal and / or the second pressure measurement signal) is within an overlapping range between the first pressure range and the second pressure range (e.g., the second pressure measurement signal has a predetermined pressure range less than a threshold error). If the measured pressure is within the overlapping range (block 512), then at block 514, control circuit system 228 uses the measurement signal from first pressure measurement component 202 to calibrate second pressure measurement component 250. For example, control circuit system 228 may adjust processing variables, teach points, and / or other calibration factors to cause measurement circuit system 214 to process the output signal from second pressure measurement component 250 to process the output signal in accordance with or based on its corresponding measurement signal from first pressure measurement component 202. In some examples, control circuit system 228 limits calibration to less than a threshold frequency to limit power consumption.

[0059] If the measured pressure is not within the first range (block 508 ), then at block 516 , control circuitry 228 determines the pressure of the fluid in measurement cavity 222 based on the second pressure measurement signal from second pressure measurement assembly 250 .

[0060] After calibrating the second pressure measurement assembly 250 (block 514), if the measured pressure is not within the overlap range (block 512), or after determining the pressure of the fluid in the measurement chamber 222 based on the second pressure measurement signal (block 516), control returns to block 502 to continue monitoring pressure.

[0061] The device and / or method of the present disclosure can be implemented in hardware, software, or a combination of hardware and software. The present method and / or system can be implemented in a centralized manner in at least one computing system, processor, and / or other logic circuit, or in a distributed manner with different elements spread over several interconnected computing systems, processors, and / or other logic circuits. Any type of computing system or other device adapted to perform the method described herein is suitable. A typical combination of hardware and software can be a processing system with a program or other code, integrated in a welding power source, which controls the welding power source when loaded and executed so that it implements the method described herein. Another typical embodiment can include a dedicated integrated circuit or chip, such as a field programmable gate array (FPGA), a programmable logic device (PLD) or a complex programmable logic device (CPLD) and / or a system on chip (SoC). Some embodiments may include a non-transient machine-readable (e.g., computer-readable) medium (e.g., flash memory, optical disk, magnetic storage disk, etc.), which stores one or more lines of code executable by a machine, thereby causing the machine to perform the process described herein. As used herein, the term "non-transitory machine-readable medium" is defined to include all types of machine-readable storage media and to exclude propagating signals.

[0062] As used herein, "and / or" refers to any one or more of the multiple items connected by "and / or" in a list. As an example, "x and / or y" refers to any element in a three-element set {(x), (y), (x, y)}. In other words, "x and / or y" refers to "one or both of x and y". As another example, "x, y and / or z" refers to any element in a seven-element set {(x), (y), (z), (x, y), (x, z), (y, z), (x, y, z)}. In other words, "x, y and / or z" refers to "one or more of x, y and z". As used herein, the term "exemplary" refers to being used as a non-limiting example, instance or diagram. As used herein, the terms "eg," and "for example" give a list of one or more non-limiting examples, instances or diagrams.

[0063] Although the present method and / or system has been described with reference to certain embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the present method and / or system. For example, the frames and / or components of the disclosed examples may be combined, divided, rearranged and / or otherwise modified. In addition, many modifications may be made to adapt specific circumstances or materials to the teachings of the present disclosure without departing from the scope of the present disclosure. Therefore, the present method and / or system is not limited to the specific embodiments disclosed. Alternatively, the present method and / or system will include all embodiments that fall within the scope of the appended claims, both literally and according to the doctrine of equivalents.

Claims

1. A pressure transducer, comprising: a pressure housing, the pressure housing comprising a first chamber; a fluid input line configured to provide fluid to the first chamber; a first pressure measurement assembly, the first pressure measurement assembly being of a first type and configured to output a first measurement signal based on the pressure of the fluid in the first chamber; a second pressure measurement assembly, the second pressure measurement assembly being of a second type and configured to output a second measurement signal based on the pressure of the fluid in the first chamber; as well as A controller is configured to determine the pressure of the fluid in the first chamber based on the first measurement signal when the pressure is within a first range, and to determine the pressure of the fluid in the first chamber based on the second measurement signal when the pressure is within a second range.

2. The pressure transducer according to claim 1, wherein: The first pressure measurement component includes a micro-electromechanical pressure sensor.

3. The pressure transducer according to claim 2, wherein: The micro-electromechanical pressure sensor includes a trench etched resonant pressure sensor.

4. The pressure transducer according to claim 1, wherein: The second pressure sensor includes a capacitive diaphragm gauge.

5. The pressure transducer according to claim 4, wherein: The pressure housing comprises a second chamber which is separated from the first chamber by a measuring diaphragm, and the second pressure measuring assembly is positioned in the second chamber. 6 . The pressure transducer of claim 5 , further comprising a heater configured to heat at least the first cavity and the second cavity based on a target temperature.

7. The pressure transducer according to claim 5, wherein: The first pressure measurement assembly is at least partially positioned within the first cavity or at least partially positioned within the second cavity.

8. The pressure transducer of claim 1, wherein: The first range and the second range cover at least 0.01 Torr to 100 Torr.

9. The pressure transducer of claim 1, wherein: The first range and the second range cover at least 0.1 Torr to 1000 Torr.

10. The pressure transducer of claim 1, wherein: The first range and the second range at least cover 0.01 Torr to 1000 Torr.

11. The pressure transducer of claim 1, wherein: The controller is configured to calibrate the other of the first pressure measurement assembly or the second pressure measurement assembly based on an output of one of the first pressure measurement assembly or the second pressure measurement assembly when the pressure of the fluid is within a predetermined range.

12. The pressure transducer of claim 11, wherein: The first range partially overlaps with the second range, and the predetermined range is at least partially within the overlapping portion of the first range and the second range.

13. The pressure transducer of claim 1, wherein: The first range partially overlaps with the second range.

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