Detection method and detection device for chopper strength

Through the methods of airflow erosion and dust substance collection, the strength detection function relationship of ceramic split knife samples is constructed, which solves the problem of inaccurate strength detection of ceramic split knife strength in the existing technology, and realizes an accurate prediction of the life of ceramic split knife products.

CN119935782APending Publication Date: 2025-05-06苏州芯合半导体材料有限公司
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Patent Information

Application Number
CN202510210368.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-02-25
Publication Date
2025-05-06

AI Technical Summary

Technical Problem

The prior art is difficult to accurately detect the strength of the ceramic chopper, resulting in uncertain product service life prediction and local strength differences affect product performance.

Method used

By eroding the ceramic splitting knife sample with airflow, collecting the eroded and peeling sample dust, constructing a functional relationship between the airflow pressure-sample dust mass-measurement time, and using a detection device to measure the equivalent strength of the splitting knife.

Benefits of technology

It realizes a more accurate detection of the strength of the ceramic splitting knife sample, which can truly reflect the true strength of the product, and improves the accuracy of prediction of product life.

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Abstract

The invention discloses a chopper strength detection method and a detection device, and the chopper strength detection method comprises the following steps: eroding a chopper sample by using airflow, collecting sample dust substances peeled off by erosion, constructing a function relationship of airflow pressure-sample dust substance mass-measurement time, and calculating the strength of the chopper according to the function relationship. And measuring the equivalent strength of the chopper by adopting a detection device based on the function relationship. The chopper strength detection device comprises at least one detection channel, micropores are formed in the detection channel, an objective table is arranged at the position, corresponding to the micropores, of the detection channel, a ceramic chopper sample to be detected is placed on the objective table, an air inlet of the detection channel is connected with an air supply pipeline, the air supply pipeline is connected with an air cylinder, and an air outlet of the detection channel is connected with an air exhaust pipeline. The exhaust pipeline is connected with a vacuum pump; a microbalance is arranged below the exhaust pipeline, and a dust collecting device is arranged on the microbalance. According to the detection device and the detection method, the strength of the chopper sample can be accurately detected, and the service life of the chopper product can be better predicted.
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Description

Technical Field

[0001] The invention relates to the technical field of ceramic splitting knives, and in particular to a method and a device for detecting the strength of a splitting knives. Background Art

[0002] With the development of semiconductor packaging technology, higher requirements are placed on the service life of ceramic splitters. In the field of ceramic splitters, the service life is determined by many factors, among which the intrinsic hardness of the ceramic material has the greatest impact. At present, the product hardness of ceramic splitters is basically close to the intrinsic hardness of existing materials, and it is difficult to continue to improve. Another important factor affecting the service life is the strength of the material. However, since the existing strength characterization methods all require the use of standard samples for testing and have a certain Weibull distribution, they cannot truly reflect the true strength of the splitter products. In addition, due to process factors, the final product has large differences in local strength, which will affect the final performance of the product at the least, and may cause the ceramic splitter to break occasionally during use, which brings greater uncertainty to the use of ceramic splitters.

[0003] Therefore, in view of the above technical problems, it is urgent to provide a product quality detection method to better predict the product life. Summary of the invention

[0004] In order to solve the above technical problems, the purpose of the present invention is to provide a detection method and a detection device for splitting knife strength, which can more accurately detect the strength of ceramic splitting knife samples and better predict the life of ceramic splitting knife products.

[0005] In order to achieve the above technical objectives and the above technical effects, the present invention is implemented through the following technical solutions:

[0006] On the one hand, the present invention provides a splitting knife strength detection method, comprising the following steps: using airflow to erode splitting knife samples, collecting sample dust peeled off by erosion, constructing a functional relationship of airflow pressure-sample dust mass-measurement time, and using a detection device based on the functional relationship to measure the equivalent strength of the splitting knife

[0007] Furthermore, the wedge strength detection method includes the following specific steps:

[0008] Step 1: Place multiple cleaver samples to be tested on the stage and fix them respectively, and introduce airflow with a specific pressure into each detection channel. The airflow continuously erodes the ceramic cleaver samples, and the microprocessor starts counting at the same time;

[0009] Step 2: Collect the dust of the sample eroded and peeled off through a dust collection device. When the dust reaches a certain mass, it is fed back to the microprocessor through a microbalance detection, and the microprocessor stops counting at this time.

[0010] Step 3, changing the airflow pressure and repeating the above steps, constructing a functional relationship of airflow pressure-sample dust mass-measurement time, and using a detection device based on the functional relationship to measure the equivalent strength of the splitting knife;

[0011] Step 4: Replace splitting knife samples from different batches, and obtain equivalent strength values ​​of ceramic splitting knives from different batches based on the obtained functional relationship.

[0012] Furthermore, the air flow pressure is controlled by a pressure stabilizing valve to output a pulse, a continuous constant pressure or a variable pressure.

[0013] Furthermore, the constructed functional relationship of airflow pressure-sample dust mass-measurement time is shown in formula (1):

[0014] m=at p (1);

[0015] Where a is the equivalent strength of the splitting knife, m is the dust mass of the sample, p is the constant pressure of the airflow, and t is the measurement time; different a values ​​represent the service life grade of splitting knife products from different batches.

[0016] On the other hand, the present invention provides a splitting knife strength detection device, which includes at least one detection channel, the detection channel is provided with microholes, the detection channel is provided with a loading platform at the corresponding microholes, the splitting knife sample to be tested is placed on the loading platform, the air inlet of the detection channel is connected to an air supply pipeline, the air supply pipeline is connected to a gas cylinder, the air outlet of the detection channel is connected to an exhaust pipeline, the exhaust pipeline is connected to a vacuum pump; a microbalance is provided below the exhaust pipeline, the microbalance is provided with a dust collection device, and the dust collection device is used to collect sample dust eroded and peeled off from the splitting knife sample to be tested.

[0017] Furthermore, a pressure-stabilizing valve is provided on the air supply pipeline, and the pressure-stabilizing valve is a gas pressure-stabilizing valve, a solenoid valve, or an electromagnetic heating valve.

[0018] Furthermore, the cleaver strength detection device also includes a microprocessor, and the microprocessor is connected to the vacuum pump, the microbalance and the pressure regulating valve.

[0019] Beneficial effects of the present invention:

[0020] The present invention uses airflow to erode the ceramic splitting knife sample to be tested, and the sample dust peeled off by erosion is collected in a dust collection device. The mass of the collected sample dust is measured by a microbalance, the airflow pressure is changed and the detection is repeated multiple times to construct a functional relationship of airflow pressure-sample dust mass-measurement time, and then different batches of ceramic splitting knife samples are replaced. According to the obtained functional relationship, the equivalent strength values ​​of ceramic splitting knives under different batches are automatically detected and output. The detection device and detection method of the present invention can more accurately detect the strength of ceramic splitting knife samples, have a high degree of automation, can truly reflect the true strength of the splitting knife product, and can better predict the life of the ceramic splitting knife product. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a simplified structural diagram of the cleaving knife strength detection device of the present invention. DETAILED DESCRIPTION

[0022] The technical solutions in the present invention will be described clearly and completely below in conjunction with specific embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] like Figure 1 A preferred embodiment of a splitting knife strength detection device shown in the figure comprises N (N≥1) detection channels 9, micropores are opened on the detection channels 9, and a stage 5 is arranged at the corresponding micropores of the detection channels 9, and a ceramic splitting knife sample to be tested is placed on the stage 5, and an air inlet of the detection channel 9 is connected to an air supply pipeline 7, and the air supply pipeline 7 is connected to a gas cylinder 1, and an air outlet of the detection channel 9 is connected to an exhaust pipeline 10, and the exhaust pipeline 10 is connected to a vacuum pump 2; a microbalance 6 is arranged below the exhaust pipeline 10, and a dust collecting device 8 is arranged on the microbalance 6, and the dust collecting device 8 is used to collect sample dust eroded and peeled off from the ceramic splitting knife sample to be tested.

[0024] Wherein, a pressure stabilizing valve 11 is provided on the air supply pipeline 7. In this embodiment, the pressure stabilizing valve is an electromagnetic heating valve.

[0025] The ceramic splitting knife strength detection device further comprises a microprocessor 4 , wherein the microprocessor 4 is connected to the vacuum pump 2 , the microbalance 6 and the pressure regulating valve 11 , and the microprocessor 4 is also connected to the power supply 3 .

[0026] The detection method based on the above-mentioned cleaver strength detection device includes the following steps:

[0027] A plurality of ceramic splitting knife samples to be tested are placed on the stage 5 for fixing, and an airflow of a specific pressure is introduced into each detection channel 9. The airflow continuously erodes the ceramic splitting knife samples, and at the same time, the microprocessor 4 starts counting. The eroded and peeled sample dust is collected by the dust collection device 8. When it reaches a specific mass, it is detected by the microbalance 6 and fed back to the microprocessor 4. At this time, the microprocessor 4 stops counting and controls the vacuum pump 2 to be turned off; the airflow pressure is changed and the above steps are repeated to construct a functional relationship of airflow pressure-sample dust mass-measurement time, and the equivalent strength of the splitting knife is measured by a detection device based on the functional relationship; different batches of ceramic splitting knife samples are replaced, and the equivalent strength values ​​of the ceramic splitting knives under different batches are obtained according to the obtained functional relationship.

[0028] In the method of the above embodiment, the air flow pressure is controlled by the pressure stabilizing valve 11 to output a constant pressure. In other embodiments, the pressure may also be variable.

[0029] Specifically, the constructed functional relationship of airflow pressure-sample dust mass-measurement time is shown in formula (1):

[0030] m=at p (1);

[0031] Wherein, a is the equivalent strength of the ceramic splitting knife, m is the dust mass of the sample, p is the constant pressure of the airflow, and t is the measurement time; different a values ​​represent the service life grade of ceramic splitting knife products from different batches.

[0032] The present invention uses airflow to erode the ceramic splitting knife sample to be tested, and the sample dust peeled off by erosion is collected in a dust collection device. The mass of the collected sample dust is measured by a microbalance, the airflow pressure is changed and the detection is repeated multiple times to construct a functional relationship of airflow pressure-sample dust mass-measurement time, and then different batches of ceramic splitting knife samples are replaced. The equivalent strength values ​​of ceramic splitting knives under different batches are obtained according to the obtained functional relationship. The detection device and detection method of the present invention can more accurately detect the strength of the ceramic splitting knife sample, can truly reflect the true strength of the splitting knife product, and can better predict the life of the ceramic splitting knife product.

[0033] It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the above embodiments are only exemplary and non-restrictive, and all changes falling within the meaning and scope of the similar elements of the claims are within the present invention. The strength detection method described can also be extended to product areas other than ceramic splitters, and all fall within the scope of protection of the present invention without departing from the spirit and essence of the present invention.

[0034] In addition, it should be understood that although this specification is described in accordance with the embodiments, not every embodiment includes only one independent technical solution, and this description of the specification is only for the sake of clear understanding. Those skilled in the art will take the specification as a whole, or appropriately combine and change the technical solutions in each embodiment, and other embodiments formed are all within the scope of the present invention.

Claims

1. A method for detecting the strength of a splitting knife, characterized in that: The method comprises the following steps: using airflow to erode a splitting knife sample, collecting sample dust peeled off by erosion, constructing a functional relationship of airflow pressure-sample dust mass-measurement time, and using a detection device based on the functional relationship to measure the equivalent strength of the splitting knife.

2. A method for detecting the strength of a riving knife according to claim 1, characterized in that: The steps include: Step 1: Place multiple cleaver samples to be tested on the stage and fix them respectively, and introduce airflow with a specific pressure into each detection channel. The airflow continuously erodes the ceramic cleaver samples, and the microprocessor starts counting at the same time; Step 2: The dust of the sample eroded and peeled off is collected by a dust collection device. When a specific mass is reached, it is fed back to the microprocessor through a microbalance detection, and the microprocessor stops counting at this time; Step 3, changing the airflow pressure and repeating the above steps, constructing a functional relationship of airflow pressure-sample dust mass-measurement time, and using a detection device based on the functional relationship to measure the equivalent strength of the splitting knife; Step 4: Replace splitting knife samples from different batches, and obtain the splitting knife equivalent strength values ​​under different batches according to the obtained functional relationship.

3. A method for detecting the strength of a splitting knife according to claim 2, characterized in that: The air flow pressure is controlled by a pressure regulating valve and the output is pulse, continuous constant pressure or variable pressure.

4. A method for detecting the strength of a cleaver according to claim 1, characterized in that: The constructed functional relationship of airflow pressure-sample dust mass-measurement time is shown in formula (1): m=at p (1); Where a is the equivalent strength of the splitting knife, m is the dust mass of the sample, p is the constant pressure of the airflow, and t is the measurement time; different a values ​​represent the service life grade of splitting knife products from different batches.

5. A cleaver strength detection device, characterized in that: The invention comprises at least one detection channel, wherein microholes are provided on the detection channel, and a stage is provided at the corresponding microholes of the detection channel, and a splitting knife sample to be tested is placed on the stage, and an air inlet of the detection channel is connected to an air supply pipeline, and the air supply pipeline is connected to a gas cylinder, and an air outlet of the detection channel is connected to an exhaust pipeline, and the exhaust pipeline is connected to a vacuum pump; a microbalance is provided below the exhaust pipeline, and a dust collecting device is provided on the microbalance, and the dust collecting device is used to collect sample dust eroded and peeled off from the splitting knife sample to be tested.

6. A wedge strength detection device according to claim 5, characterized in that: The air supply pipeline is provided with a pressure stabilizing valve, which is a gas pressure stabilizing valve, a solenoid valve or an electromagnetic heating valve.

7. A cleaver strength detection device according to claim 6, characterized in that: It also includes a microprocessor, which is connected to the vacuum pump, the microbalance and the pressure-stabilizing valve.