Precise chip strip trimming integrated processing device

Abstract

The invention discloses a precise chip strip trimming integrated processing device, and relates to the technical field of microelectronic technologies. Two supporting plates are connected to the bottom plate, mounting plates are connected to the ends, away from the bottom plate, of the supporting plates, and a rotating mechanism is connected to each mounting plate. Through the action of an electric telescopic rod, a rotating plate can be pushed to move, so that the position of the rotating plate is changed, a workpiece needing to be machined is placed in two clamping plates, a handle rotates to drive a screw rod to rotate, so that the screw rod pushes a connector to move, the screw rod is rotated through the handle, and the workpiece can be accurately fixed between the two clamping plates; the stability of the workpiece in the machining process is ensured, the connector pushes the pushing plate to move, the pushing plate is pushed, the spring is extruded, the workpiece between the two clamping plates is fixed, the workpiece is accurately fixed, it can be ensured that the workpiece cannot move or vibrate in the machining process, and therefore the machining precision and the surface quality are improved.

Description

Technical Field

[0001] The invention relates to the technical field of microelectronics technology, and in particular to an integrated processing device for precise rib cutting of chip strips. Background Art

[0002] The chip strip precision rib cutting integrated processing device is a device specially used in the semiconductor chip manufacturing process. It is used to cut semiconductor wafers into individual chips. This process is called rib cutting. It is the last step in chip manufacturing and a key step to ensure that each chip is independent and complete. Through the integrated processing device, the chip strip can be precisely cut to ensure the straightness of the cutting edge and the accuracy of the cutting size, which is crucial for subsequent chip packaging and testing. Through precise cutting, the wafer material can be maximized and the waste generated in the production process can be reduced. The chip strip precision rib cutting integrated processing device is an indispensable part of the semiconductor manufacturing process. It plays a key role in improving chip production efficiency and product quality.

[0003] The Chinese patent authorization announcement number is CN111730771B, and the name is a wafer cutting machine, including: a machine base, a cutting tool, a clamp and a stage; the clamp is fixedly installed on the machine base, and is used to clamp and fix the silicon rod; the stage is arranged directly below the clamp, and the stage includes an outer ring part and a central part, the upper end face of the central part is arranged horizontally, and the silicon rod is against the upper end face of the central part, and the projection of the silicon rod in the vertical direction falls outside the central part. Compared with the prior art, the wafer cutting machine of the present application can be firmly clamped to avoid chip breakage and curling;

[0004] The shortcomings of the above scheme are: although the above scheme can prevent the chip from breaking and curling, it cannot cut different chips when used, and cannot adapt to chips of different sizes, shapes or thicknesses, which limits the application of the device in diversified production environments. It is necessary to purchase or customize special cutting equipment for each different specification of chips, which increases production costs, and can only cut in one direction, which limits the diversity and flexibility of cutting. During the cutting process, if the wafer or chip needs to be flipped to adapt to the cutting path, the equipment that cannot be flipped may result in reduced material utilization because of technical problems such as the cutting line may not be able to fully utilize the area of ​​the wafer. Summary of the invention

[0005] The purpose of the present invention is to provide an integrated processing device for precise chip strip cutting to solve the problems that the prior art cannot cut different chips and cannot adapt to chips of different sizes, shapes or thicknesses, which limits the application of the device in diversified production environments. It is necessary to purchase or customize special cutting equipment for each different specification of chips, which increases production costs, and can only cut in one direction, which limits the diversity and flexibility of cutting. During the cutting process, if the wafer or chip needs to be flipped to adapt to the cutting path, the equipment that cannot be flipped may result in reduced material utilization because the cutting line may not fully utilize the area of ​​the wafer. Technical problem.

[0006] The technical problem to be solved by the present invention can be achieved by the following technical solutions:

[0007] Integrated processing device for precise cutting of chip strips, including a base plate;

[0008] Two supporting plates are connected to the bottom plate, and one end of the supporting plate away from the bottom plate is connected to a mounting plate, and each of the mounting plates is connected to a rotating mechanism, and the rotating mechanism includes a driving gear and a gear ring, and a motor is connected to the mounting plate, and the driving gear is connected to the driving end of the motor, and the gear ring is meshed and connected to the outer periphery of the driving gear, and a rotating disk is connected to the side of the gear ring away from the driving gear, and two connecting shafts are connected to the rotating disk, and one end of the two connecting shafts away from the rotating disk is connected to an electric telescopic rod, and the telescopic end of the electric telescopic rod is connected to a rotating plate, and a clamping mechanism is connected to the rotating plate, and the clamping mechanism is symmetrically arranged;

[0009] The bottom plate is connected to a fixed plate, the fixed plate is connected to two sets of limit bars, and both sets of limit bars are connected to a lifting mechanism;

[0010] A cutting mechanism is connected between the two groups of limit bars, and the cutting mechanism includes multiple groups of slide rails and multiple cutting knives. The multiple groups of slide rails are connected between the two groups of limit bars, and each of the slide rails is provided with a slide groove, in which an electric slider is slidably connected, and the electric slider is connected to a connecting plate, and the cutting knife is connected to the connecting plate.

[0011] As a further solution of the present invention: the connecting shaft is a steel structure.

[0012] As a further solution of the present invention: the clamping mechanism on each side includes a pushing plate and a clamping plate, the rotating plate is connected to a fixed frame, the fixed frame is rotatably connected to a screw, a pushing plate is provided at one end of the screw away from the handle, a connecting head is connected between the pushing plate and the screw, and a clamping plate is provided at one end of the pushing plate away from the handle.

[0013] As a further solution of the present invention: a handle is connected to the screw rod.

[0014] As a further solution of the present invention: anti-slip patterns are distributed on the handle.

[0015] As a further solution of the present invention: an anti-slip pad is connected to the inner side of the clamping plate.

[0016] As a further solution of the present invention: the lifting mechanism includes a rack and a rotating gear, the rack is connected to the limit bar, the rotating gear is meshingly connected to the rack, a connecting rod is connected to the base plate, the end of the connecting rod away from the base plate is connected to a driving motor, and the rotating gear is connected to the driving end of the driving motor.

[0017] As a further solution of the present invention: a plurality of springs are connected between the pushing plate and the clamping plate.

[0018] As a further solution of the present invention: a lubricant is applied between the electric slider and the slide groove.

[0019] As a further solution of the present invention: the cutting knife is an ultrasonic cutting knife.

[0020] Beneficial effects of the present invention:

[0021] 1. The present invention can push the rotating plate to move through the action of the electric telescopic rod, thereby changing the position of the rotating plate, placing the workpiece to be processed between the two clamping plates, and rotating the handle to drive the screw to rotate, so that the screw pushes the connecting head to move. By rotating the screw through the handle, the workpiece can be accurately fixed between the two clamping plates to ensure the stability of the workpiece during processing. The connecting head pushes the push plate to move, pushes the push plate, squeezes the spring, and fixes the workpiece between the two clamping plates. By accurately fixing the workpiece, it can be ensured that the workpiece will not move or vibrate during processing, thereby improving processing accuracy and surface quality.

[0022] 2. The motor of the present invention drives the driving gear to rotate and transmits the power of the motor to the driving gear. The outer periphery of the driving gear is connected with a gear ring, which meshes with the driving gear. The driving gear drives the meshing gear ring to rotate, and the gear ring drives the rotating disk to rotate. The rotating disk drives the connecting shaft to rotate. The connecting shaft drives the rotating plate to rotate through the electric telescopic rod. The rotating plate can drive the workpiece between the clamping mechanism to rotate. The cutting knife on the connecting plate can cut the sample on the clamping mechanism. The cutting knife can perform precise rib cutting operations along the slide rail. The position of the cutting mechanism can be accurately adjusted through the cooperation of the limit strip and the lifting mechanism. The rotation of the rotating disk and the connecting shaft allows the workpiece to rotate smoothly, which is convenient for cutting and processing from different angles. The cutting knife performs precise rib cutting operations along the slide rail.

[0023] 3. The present invention drives the rotating gear to rotate through a driving motor, the rotating gear drives the meshing rack to move, the rack drives the limit bar to move, so that the cutting mechanism on the limit bar moves up and down to adjust the position. Through the cooperation of the limit bar and the lifting mechanism, the position of the cutting mechanism can be accurately adjusted to ensure the cutting accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be further described below in conjunction with the accompanying drawings.

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 yes Figure 1 The enlarged structural diagram at A in the middle;

[0027] Figure 3 It is a schematic diagram of the main structure of the support plate and the mounting plate in the present invention;

[0028] Figure 4 yes Figure 3 Side view of the structure;

[0029] Figure 5 yes Figure 3 Stereoscopic image.

[0030] In the figure: 1. bottom plate; 2. support plate; 3. mounting plate; 4. fixing plate; 5. limit strip; 6. slide rail; 7. rack; 8. connecting rod; 9. driving motor; 10. rotating gear; 12. electric slider; 13. cutting knife; 14. connecting plate; 15. slide groove; 16. rotating disk; 17. gear ring; 18. driving gear; 19. fixing frame; 20. screw rod; 21. handle; 22. clamping plate; 24. electric telescopic rod; 25. spring; 26. connecting shaft; 27. connector; 28. rotating plate; 29. ​​pushing plate. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] like Figure 1-Figure 5As shown, the integrated processing device for precise rib cutting of chip strips comprises a base plate 1, to which two support plates 2 are connected, and an end of the support plate 2 away from the base plate 1 is connected to a mounting plate 3, and each mounting plate 3 is connected to a rotating mechanism, and the rotating mechanism comprises a driving gear 18 and a gear ring 17, and an electric motor is connected to the mounting plate 3, and the driving gear 18 is connected to the driving end of the electric motor, and the gear ring 17 is meshingly connected to the outer periphery of the driving gear 18, and a rotating disk 16 is connected to the side of the gear ring 17 away from the driving gear 18, and two connecting shafts 26 are connected to the rotating disk 16, and the connecting shafts 26 are steel structures, and an electric telescopic rod 24 is connected to the end of the two connecting shafts 26 away from the rotating disk 16, and a rotating plate 28 is connected to the telescopic end of the electric telescopic rod 24, and a clamping mechanism is connected to the rotating plate 28, and the clamping mechanism is symmetrically arranged, and each side The clamping mechanisms include a pushing plate 29 and a clamping plate 22, the rotating plate 28 is connected to a fixing frame 19, the fixing frame 19 is rotatably connected to a screw rod 20, the screw rod 20 is connected to a handle 21, the handle 21 is provided with anti-skid patterns, the end of the screw rod 20 away from the handle 21 is provided with a pushing plate 29, a connector 27 is connected between the pushing plate 29 and the screw rod 20, the end of the pushing plate 29 away from the handle 21 is provided with a clamping plate 22, the inner side of the clamping plate 22 is connected with an anti-skid pad, and a plurality of springs 25 are connected between the pushing plate 29 and the clamping plate 22; the workpiece to be processed is placed in the two clamping plates 22, the handle 21 is rotated to drive the screw rod 20 to rotate, so that the screw rod 20 pushes the connector 27 to move, and the screw rod 20 is rotated by the handle 21, so that the workpiece can be accurately fixed between the two clamping plates 22 to ensure the stability of the workpiece during processing;

[0033] The bottom plate 1 is connected to a fixed plate 4, and two groups of limit bars 5 are connected to the fixed plate 4. The two groups of limit bars 5 are connected to a lifting mechanism, and the lifting mechanism includes a rack 7 and a rotating gear 10. The rack 7 is connected to the limit bar 5, and the rotating gear 10 is meshed with the rack 7. The bottom plate 1 is connected to a connecting rod 8, and the end of the connecting rod 8 away from the bottom plate 1 is connected to a driving motor 9, and the rotating gear 10 is connected to the driving end of the driving motor 9;

[0034] A cutting mechanism is connected between the two groups of limit bars 5, and the cutting mechanism includes multiple groups of slide rails 6 and multiple cutting knives 13. The multiple groups of slide rails 6 are connected between the two groups of limit bars 5, and each of the slide rails 6 is provided with a slide groove 15. An electric slider 12 is slidably connected in the slide groove 15, and lubricant is applied between the electric slider 12 and the slide groove 15. A connecting plate 14 is connected to the electric slider 12, and the cutting knife 13 is connected to the connecting plate 14. The cutting knife 13 is an ultrasonic cutting knife.

[0035] The working principle of the present invention is as follows: the workpiece to be processed is placed between the two clamping plates 22, and the screw rod 20 is driven to rotate by rotating the handle 21, so that the screw rod 20 pushes the connecting head 27 to move. The screw rod 20 is rotated by the handle 21, and the workpiece can be accurately fixed between the two clamping plates 22 to ensure the stability of the workpiece during processing. The connecting head 27 pushes the push plate 29 to move, and the push plate 29 is pushed to squeeze the spring 25 to fix the workpiece between the two clamping plates 22. The motor transmits the power of the motor to the driving gear 18 through the rotation of the driving gear 18, and the driving gear 18 is driven by the driving gear 18. The outer periphery of 8 is connected with a gear ring 17, which meshes with a driving gear 18. The driving gear 18 drives the meshing gear ring 17 to rotate, the gear ring 17 drives the rotating disk 16 to rotate, the rotating disk 16 drives the connecting shaft 26 to rotate, the connecting shaft 26 drives the rotating plate 28 to rotate through the electric telescopic rod 24, the rotating plate 28 can drive the workpiece between the clamping mechanism to rotate, the electric telescopic rod 24 can push the rotating plate 28 to move, thereby changing the position of the rotating plate 28, the electric telescopic rod 24 and the rotating disk 16 can flexibly adjust the processing position to adapt to workpieces of different sizes and shapes;

[0036] A fixing plate 4 is connected to the bottom plate 1, and two groups of limiting bars 5 are connected to the fixing plate 4. A lifting mechanism is connected to each group of limiting bars 5. The position of the cutting mechanism can be easily adjusted through the limiting bars 5 and the lifting mechanism on the bottom plate 1 to meet different processing requirements. The lifting mechanism includes a rack 7 and a rotating gear 10. The rack 7 is connected to the limiting bar 5, and the rotating gear 10 is meshed with the rack 7. One end of the connecting rod 8 is connected to a driving motor 9, and the rotating gear 10 is connected to the driving end of the driving motor 9. The rotating gear 10 is driven to rotate by the driving motor 9, and the rotating gear 10 drives the meshing rack 7 to move, and the rack 7 drives the limiting bar 5 to move, so that the limiting bar 5 is moved upward. The cutting mechanism moves up and down to adjust the position; a slide groove 15 is provided on the slide rail 6, and an electric slider 12 is slidably connected in the slide groove 15. The electric slider 12 slides in the slide groove 15, and the electric slider 12 drives the connecting plate 14 to move. The cutting knife 13 on the connecting plate 14 can cut the sample on the clamping mechanism, and the cutting knife 13 can perform precise rib cutting operations along the slide rail 6. Through the cooperation of the limit bar 5 and the lifting mechanism, the position of the cutting mechanism can be accurately adjusted to ensure the consistency of each processing. The cooperation of the slide rail 6 and the electric slider 12 enables the cutting knife 13 to perform precise rib cutting operations along the slide rail 6, thereby improving the accuracy and quality of cutting;

[0037] The device can adapt to the processing of different types of workpieces, improving the versatility and applicability of the equipment. The overall design and function make the processing process more efficient, reduce non-productive time, improve overall production efficiency, improve processing accuracy, efficiency, and automation, while reducing operating difficulty and maintenance costs. It is suitable for industrial fields that require high-precision processing.

[0038] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. An integrated processing device for precise chip strip cutting, comprising a bottom plate (1); characterized in that: Two support plates (2) are connected to the base plate (1), one end of the support plate (2) away from the base plate (1) is connected to a mounting plate (3), each mounting plate (3) is connected to a rotating mechanism, the rotating mechanism comprises a driving gear (18) and a gear ring (17), the mounting plate (3) is connected to a motor, the driving gear (18) is connected to the driving end of the motor, the gear ring (17) is meshingly connected to the outer periphery of the driving gear (18), the side of the gear ring (17) away from the driving gear (18) is connected to a rotating disk (16), the rotating disk (16) is connected to two connecting shafts (26), the ends of the two connecting shafts (26) away from the rotating disk (16) are connected to an electric telescopic rod (24), the telescopic end of the electric telescopic rod (24) is connected to a rotating plate (28), the rotating plate (28) is connected to a clamping mechanism, and the clamping mechanism is symmetrically arranged; The bottom plate (1) is connected to a fixing plate (4), the fixing plate (4) is connected to two groups of limit strips (5), and both groups of limit strips (5) are connected to a lifting mechanism; A cutting mechanism is connected between the two groups of limit bars (5), and the cutting mechanism comprises a plurality of slide rails (6) and a plurality of cutting knives (13). The plurality of slide rails (6) are connected between the two groups of limit bars (5), and each of the slide rails (6) is provided with a slide groove (15). An electric slider (12) is slidably connected in the slide groove (15), and a connecting plate (14) is connected to the electric slider (12), and the cutting knife (13) is connected to the connecting plate (14).

2. The chip strip precision cutting integrated processing device according to claim 1, characterized in that: The connecting shaft (26) is a steel structure.

3. The chip strip precision cutting integrated processing device according to claim 1, characterized in that: The clamping mechanism on each side comprises a pushing plate (29) and a clamping plate (22); the rotating plate (28) is connected to a fixing frame (19); a screw rod (20) is rotatably connected to the fixing frame (19); a pushing plate (29) is provided at one end of the screw rod (20) away from the handle (21); a connecting head (27) is connected between the pushing plate (29) and the screw rod (20); and a clamping plate (22) is provided at one end of the pushing plate (29) away from the handle (21).

4. The chip strip precision cutting integrated processing device according to claim 3, characterized in that: The screw rod (20) is connected with a handle (21).

5. The chip strip precision cutting integrated processing device according to claim 4, characterized in that: The handle (21) is provided with anti-slip patterns.

6. The chip strip precision cutting integrated processing device according to claim 5, characterized in that: The inner side of the clamping plate (22) is connected with an anti-slip pad.

7. The chip strip precision cutting integrated processing device according to claim 1, characterized in that: The lifting mechanism comprises a rack (7) and a rotating gear (10), wherein the rack (7) is connected to the limit bar (5), and the rotating gear (10) is meshedly connected to the rack (7); a connecting rod (8) is connected to the base plate (1), and an end of the connecting rod (8) away from the base plate (1) is connected to a driving motor (9), and the rotating gear (10) is connected to the driving end of the driving motor (9).

8. The chip strip precision cutting integrated processing device according to claim 3, characterized in that: A plurality of springs (25) are connected between the pushing plate (29) and the clamping plate (22).

9. The chip strip precision cutting integrated processing device according to claim 1, characterized in that: Lubricant is applied between the electric slider (12) and the slide groove (15).

10. The chip strip precision cutting integrated processing device according to claim 1, characterized in that: The cutting knife (13) is an ultrasonic cutting knife.

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