Air inlet pipeline device and semiconductor equipment
By installing insulating anti-arc components on the outer layer and inner wall of the inner tube of the intake pipeline device, the problem of gases in the pipeline in the plasma process is solved, and the equipment stability and product quality are improved.
Patent Information
- Application Number
- CN202510399411.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2025-05-09
AI Technical Summary
During the plasma-enhanced atomic layer deposition or chemical vapor deposition process, the gas excited into plasma is prone to arcing when passing through the pipeline, resulting in equipment failure and unstable product quality.
An air intake pipeline device is designed, including an outer tube and an inner tube. The inner walls of the outer tube and the inner tube are respectively equipped with an insulating outer anti-arc assembly and an inner anti-arc assembly. Through the arrangement of these components, gases are prevented from ionization and arcing in the pipeline.
It effectively prevents ionization and arcing of gases in the pipeline, improves the stability of the equipment and the quality of products, and reduces the occurrence of equipment failures.
Smart Images
Figure CN119956329A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to an air intake pipeline device and semiconductor equipment. Background Art
[0002] In processes such as plasma enhanced atomic layer deposition (PEALD) or plasma enhanced chemical vapor deposition (PECVD), RF power and electrode components are usually used to excite process gases to generate plasma for thin film deposition reactions. However, after the gas is excited into plasma, it will have higher energy and activity, and arcing is likely to occur when passing through the pipeline.
[0003] In view of this, it is necessary to propose an air intake pipeline device and a semiconductor device to solve the above problems. Summary of the invention
[0004] The object of the present invention is to provide an air intake pipeline device and a semiconductor device, which are used to prevent the problem of arcing when the gas is excited into plasma and passes through the pipeline during a plasma process.
[0005] The present invention provides an air intake pipeline device, comprising: Outer tube; The outer arc-proof component is arranged on the inner wall of the outer tube and has insulation properties.
[0006] The beneficial effect of the air intake pipeline device provided by the present invention is that by arranging an insulating outer layer arc prevention component on the inner wall of the outer layer tube, ionization and arcing of the gas can be effectively prevented when passing through the outer layer tube.
[0007] In a possible embodiment, the air intake pipeline device further includes: An inner tube is arranged inside the outer tube, an outer space is formed between the outer tube and the inner tube, and the outer arc-proof component is located in the outer space; The inner arc-proof component is arranged in the inner tube and has insulation properties.
[0008] The beneficial effect is that by arranging an insulating inner layer arc prevention component on the inner wall of the inner layer tube, ionization and arcing of the gas can be effectively prevented when the gas passes through the inner layer tube.
[0009] In a possible embodiment, the inner layer anti-arcing assembly includes a plurality of first anti-arcing parts arranged at intervals on the inner wall of the inner layer tube along the extension direction of the inner layer tube, and the first anti-arcing parts are insulating and have a through hole in the middle.
[0010] In a possible embodiment, the inner layer anti-arcing assembly includes a plurality of second anti-arcing parts arranged at intervals on the inner wall of the inner layer tube along the extension direction of the inner layer tube, and the second anti-arcing parts are insulating and have a plurality of through holes arranged at intervals.
[0011] In a possible embodiment, the inner layer anti-arcing component includes a plurality of first anti-arcing parts and a plurality of second anti-arcing parts which are arranged on the inner wall of the inner layer tube at intervals along the extension direction of the inner layer tube, the first anti-arcing parts and the second anti-arcing parts are alternately arranged and both have insulation properties, a through hole is provided in the middle of the first anti-arcing part, and a plurality of through holes are provided at intervals in the second anti-arcing part.
[0012] The beneficial effect is that the gas needs to flow through the through hole of the first anti-arcing piece and / or the through hole of the second anti-arcing piece, and the first anti-arcing piece and the second anti-arcing piece can effectively prevent the current from passing through the gas, thereby avoiding ionization and arcing.
[0013] In a possible embodiment, the perforation is disposed close to an edge of the second arc-preventing member.
[0014] The beneficial effect is that the perforation is arranged close to the edge of the second arc-preventing member, and the electric field distribution is optimized to reduce the electric field intensity, thereby avoiding the occurrence of ionization and arcing.
[0015] In a possible embodiment, the through hole and the through hole are staggered in a vertical direction.
[0016] The beneficial effect is that the staggered arrangement of the perforations and the through holes in the vertical direction helps to disperse the electric field and reduce the concentration of the electric field in a specific area. This dispersion can reduce the risk of ionization, because ionization usually occurs in areas with higher electric field strength.
[0017] In a possible embodiment, the first anti-arcing component includes a first plate portion arranged horizontally and a first tube portion fixedly connected to the first plate portion along an edge of the first plate portion, the first plate portion and the first tube portion are insulating, the first tube portion is tubular and adapted to the inner layer tube, the first tube portion is arranged on the inner wall of the inner layer tube, and the through hole is arranged on the first plate portion.
[0018] The beneficial effect is that the first tube portion arranged on the inner wall of the inner tube has insulation properties, thereby preventing the gas from being ionized and arcing on the inner wall of the inner tube.
[0019] In a possible embodiment, the second anti-arcing member includes a horizontally arranged second plate portion and a second tube portion fixedly connected to the second plate portion along an edge of the second plate portion, the second plate portion and the second tube portion are insulating, the second tube portion is tubular and adapted to the inner layer tube, the second tube portion is arranged on the inner wall of the inner layer tube, and the perforation is arranged on the second plate portion.
[0020] The beneficial effect is that the second tube portion arranged on the inner wall of the inner tube has insulation properties, thereby preventing the gas from being ionized and arcing on the inner wall of the inner tube.
[0021] In a possible embodiment, the outer anti-arcing component includes a plurality of third anti-arcing parts which are arranged on the inner wall of the outer layer tube at intervals along the extension direction of the outer layer tube, the third anti-arcing parts are sleeved on the outside of the inner layer tube and have insulating properties, and a plurality of flow holes are arranged at intervals on the third anti-arcing parts, and the flow holes are located on the side of the third anti-arcing parts close to the outer layer tube.
[0022] In a possible embodiment, the outer anti-arcing component includes a plurality of fourth anti-arcing parts which are arranged on the inner wall of the outer layer tube at intervals along the extension direction of the outer layer tube, the fourth anti-arcing parts are sleeved on the outside of the inner layer tube and have insulating properties, and a plurality of guide holes are arranged at intervals on the fourth anti-arcing part, and the guide holes are located on the side of the fourth anti-arcing part close to the inner layer tube.
[0023] In a possible embodiment, the outer anti-arcing component includes a plurality of third anti-arcing parts and a plurality of fourth anti-arcing parts which are arranged on the inner wall of the outer layer tube at intervals along the extension direction of the outer layer tube, the third anti-arcing parts and the fourth anti-arcing parts are alternately arranged and both have insulation properties, the third anti-arcing parts and the fourth anti-arcing parts are sleeved on the outside of the inner layer tube, the third anti-arcing part is provided with a plurality of flow holes at intervals, and the flow holes are located on the side of the third anti-arcing part close to the outer layer tube, the fourth anti-arcing part is provided with a plurality of guide holes at intervals, and the guide holes are located on the side of the fourth anti-arcing part close to the inner layer tube.
[0024] The beneficial effect is that the gas needs to flow through the flow holes of the third anti-arcing piece and / or the guide holes of the fourth anti-arcing piece, and the third anti-arcing piece and the fourth anti-arcing piece can effectively prevent current from passing through the gas, thereby avoiding ionization and arcing.
[0025] In a possible embodiment, the third anti-arcing component includes a third plate portion arranged horizontally and a third tube portion fixedly connected to the third plate portion along an edge of the third plate portion, the third plate portion and the third tube portion are insulating, the third tube portion is tubular and matched with the outer layer tube, the third tube portion is arranged on the inner wall of the outer layer tube, the flow hole is arranged on the third plate portion and is located on the side of the third plate portion close to the outer layer tube, the third plate portion is provided with a first set of holes matched with the inner layer tube, and the third plate portion is sleeved on the outside of the inner layer tube through the first set of holes.
[0026] The beneficial effect is that the third tube portion arranged on the inner wall of the outer tube has insulation properties, thereby preventing the gas from being ionized and arcing on the inner wall of the inner tube.
[0027] In a possible embodiment, the fourth anti-arcing component includes a fourth plate portion arranged horizontally and a fourth tube portion fixedly connected to the fourth plate portion along the edge of the fourth plate portion, the fourth plate portion and the fourth tube portion are insulating, the fourth tube portion is tubular and is adapted to the outer layer tube, the fourth tube portion is arranged on the inner wall of the outer layer tube, the fourth plate portion is provided with a second set of holes adapted to the inner layer tube, the fourth plate portion is sleeved on the outside of the inner layer tube through the second set of holes, the guide hole is arranged on the fourth plate portion and is located on the side of the fourth plate portion close to the inner layer tube, and the guide hole is connected to the second set of holes.
[0028] The beneficial effect is that the fourth tube portion arranged on the inner wall of the outer tube has insulation properties, thereby preventing the gas from being ionized and arcing on the inner wall of the inner tube.
[0029] The present invention further provides a semiconductor device, comprising: an air intake pipeline device as in any of the above embodiments. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] Figure 1 It is a cross-sectional schematic diagram of the air intake pipeline device of the present invention.
[0031] Figure 2 It is a three-dimensional cross-sectional view of an air intake pipeline device of the present invention in one embodiment.
[0032] Figure 3 It is a schematic diagram of the first anti-arcing member in the air intake pipe device of the present invention.
[0033] Figure 4 It is a schematic diagram of the second arc-preventing member in the air intake pipe device of the present invention.
[0034] Figure 5 It is a three-dimensional cross-sectional view of an outer tube of an air intake pipe device in one embodiment of the present invention.
[0035] Figure 6 It is a schematic diagram of the third anti-arcing member in the air intake pipe device of the present invention.
[0036] Figure 7 It is a schematic diagram of the fourth arc-preventing member in the air intake pipe device of the present invention.
[0037] Explanation of the reference numerals: 100, outer tube; 110, outer space; 200, inner anti-arcing assembly; 210, first anti-arcing part; 211, first plate; 2111, through hole; 212, first tube; 220, second anti-arcing part; 221, second plate; 2211, through hole; 222, second tube; 300, inner tube; 400, outer anti-arcing assembly; 410, third anti-arcing part; 411, third plate; 4111, flow hole; 4112, flow port; 4113, first set of holes; 412, third tube; 420, fourth anti-arcing part; 421, fourth plate; 4211, guide hole; 4212, guide port; 4213, second set of holes; 422, fourth tube. DETAILED DESCRIPTION
[0038] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0039] In view of the problems existing in the prior art, an embodiment of the present invention provides an air intake pipeline device. Figure 1 is a cross-sectional schematic diagram of the air intake pipe device of the present invention, see Figure 1 The air intake pipeline device includes an outer tube 100 and an outer arc prevention component 400. The outer tube 100, for example, in a deposition device, is used to connect to a shower plate. The outer arc prevention component 400 is disposed on the inner wall of the outer tube 100 and has insulation. In this embodiment, by disposing the outer arc prevention component 400 on the inner wall of the outer tube 100, the outer arc prevention component 400 has insulation, which can significantly reduce the adhesion and diffusion ability of the arc. When the arc tries to propagate on the surface of the outer arc prevention component 400, due to the high resistance characteristics of the outer arc prevention component 400, the energy of the arc will decay rapidly, and thus cannot continue to propagate, thereby preventing the gas from ionizing and arcing in the outer tube 100.
[0040] In one embodiment, see Figure 1The air inlet pipeline device also includes: an inner tube 300 and an inner anti-arc assembly 200. The inner tube 300 is arranged in the outer tube 100. For example, in the deposition equipment, the inner tube 300 is used to connect with the spray plate. An outer space 110 is formed between the outer tube 100 and the inner tube 300. The outer anti-arc assembly 400 is located in the outer space 110. The inner anti-arc assembly 200 is arranged in the inner tube 300 and has insulation. In this embodiment, by arranging the inner anti-arc assembly 200 on the inner wall of the inner tube 300, the inner anti-arc assembly 200 has insulation, which can significantly reduce the adhesion and diffusion ability of the arc. When the arc tries to propagate on the surface of the inner anti-arc assembly 200, due to the high resistance characteristics of the inner anti-arc assembly 200, the energy of the arc will decay rapidly, so that it cannot continue to propagate, preventing the gas from ionizing and arcing in the inner tube 300.
[0041] In one embodiment, Figure 2 is a three-dimensional cross-sectional view of an air intake pipe device of the present invention in one embodiment, Figure 3 Schematic diagram of the first arc-preventing member in the air intake pipe device of the present invention, see Figure 2 and Figure 3 The inner arc-prevention assembly 200 includes a plurality of first arc-prevention members 210 arranged at intervals on the inner wall of the inner tube 300 along the extension direction of the inner tube 300. The first arc-prevention members 210 are adapted to the inner tube 300, and the first arc-prevention members 210 are insulating and have a through hole 2111 in the middle. In this embodiment, the first arc-prevention member 210 is insulating, that is, the first arc-prevention member 210 has a very high resistivity, which can prevent the flow of current, effectively prevent the propagation of the arc in the inner tube 300, reduce the attachment and diffusion of the arc in the inner tube 300, and prevent the gas from ionizing and arcing in the inner tube 300.
[0042] In one embodiment, Figure 4 is a schematic diagram of the second arc-preventing member in the air intake pipe device of the present invention, see Figure 2 and Figure 4 The inner anti-arcing assembly 200 includes a plurality of second anti-arcing members 220 arranged at intervals on the inner wall of the inner tube 300 along the extension direction of the inner tube 300. The second anti-arcing members 220 are adapted to the inner tube 300. The second anti-arcing members 220 are insulating and are provided with a plurality of perforations 2211 at intervals. In this embodiment, the second anti-arcing member 220 is insulating, that is, the second anti-arcing member 220 has a very high resistivity, which can prevent the flow of current, effectively prevent the propagation of the arc in the inner tube 300, greatly reduce the attachment and diffusion of the arc in the inner tube 300, and prevent the gas from ionizing and arcing in the inner tube 300.
[0043] In one embodiment, see Figure 2, Figure 3 as well as Figure 4 The inner anti-arcing component 200 includes a plurality of first anti-arcing parts 210 and a plurality of second anti-arcing parts 220 which are arranged on the inner wall of the inner tube 300 at intervals along the extension direction of the inner tube 300. The first anti-arcing parts 210 and the second anti-arcing parts 220 are alternately arranged and both have insulation properties. A through hole 2111 is provided in the middle of the first anti-arcing part 210, and a plurality of through holes 2211 are provided at intervals in the second anti-arcing part 220. In this embodiment, the first arc-preventing member 210 and the second arc-preventing member 220 are insulating, that is, the first arc-preventing member 210 and the second arc-preventing member 220 have high resistivity, which can prevent the flow of current, effectively prevent the arc from propagating in the inner tube 300, and reduce the attachment and diffusion of the arc in the inner tube 300. In addition, the first arc-preventing member 210 and the second arc-preventing member 220 are alternately arranged, which also provides a stronger insulation effect, preventing the gas from ionizing and arcing in the inner tube 300. The combination of the through hole 2111 and the perforation 2211 optimizes the gas flow path and contributes to the uniform distribution of plasma.
[0044] In one embodiment, see Figure 2 and Figure 4 The perforations 2211 are arranged close to the edge of the second arc-preventing member 220. A plurality of perforations 2211 are arranged at intervals along the circumferential direction of the inner tube 300.
[0045] Since plasma is charged, the gas excited into plasma is passed into the inner tube 300 and the outer tube 100 of the air intake pipe device, which will generate an electric field in the inner tube 300 and the outer tube 100. Electric field concentration is a phenomenon in which the intensity of the electric field in a certain local area increases significantly, and this enhancement may lead to ionization and arcing. Ionization refers to the process in which gas molecules or atoms lose electrons under the action of an electric field and become positively charged ions and negatively charged electrons, while arcing refers to the charged particles generated by ionization forming a current channel under the action of an electric field, resulting in a discharge phenomenon.
[0046] The perforation 2211 is arranged near the edge of the second anti-arcing member 220, and the electric field lines can pass through the perforation 2211, and the electric field lines are dispersed to a larger area, so as to avoid the electric field being concentrated on the surface of the second anti-arcing member 220, so that the electric field is more evenly distributed in the entire inner tube 300, and the local electric field intensity is prevented from being too high, and ionization and arcing are avoided. The through hole 2111 is located in the middle of the first anti-arcing member 210, that is, the through hole 2111 is located in the middle of the inner tube 300; the perforation 2211 is arranged near the edge of the second anti-arcing member 220, that is, the through hole 2111 is located at the edge of the inner tube 300, and the combination of the through hole 2111 and the perforation 2211 not only promotes the gas flow, but also makes the gas more evenly distributed in the entire inner tube 300.
[0047] In a specific embodiment, see Figure 2 In this embodiment, since ionization usually occurs in an area with a high electric field strength, the staggered arrangement of the perforations 2211 and the through holes in the vertical direction helps to disperse the electric field, avoid the electric field from being concentrated in a certain area, and prevent the gas from being ionized and arcing in the inner tube 300.
[0048] In one embodiment, see Figure 2 and Figure 3 The first arc-preventing member 210 includes a first plate portion 211 arranged horizontally and a first tube portion 212 fixedly connected to the first plate portion 211 along the edge of the first plate portion 211. The first plate portion 211 and the first tube portion 212 are insulated. The first tube portion 212 is tubular and matches the inner tube 300. The first tube portion 212 is arranged on the inner wall of the inner tube 300, and the through hole 2111 is arranged on the first plate portion 211. In this embodiment, the first tube portion 212 is insulated and arranged on the inner wall of the inner tube 300, which reduces the chance of collision between gas molecules and the inner wall of the inner tube 300, and prevents the gas from being ionized and arcing at the inner wall of the inner tube 300.
[0049] In one embodiment, see Figure 2 and Figure 4 The second arc-preventing member 220 includes a second plate portion 221 arranged horizontally and a second tube portion 222 fixedly connected to the second plate portion 221 along the edge of the second plate portion 221. The second plate portion 221 and the second tube portion 222 are insulative. The second tube portion 222 is tubular and matches the inner tube 300. The second tube portion 222 is arranged on the inner wall of the inner tube 300, and the perforation 2211 is arranged on the second plate portion 221. In this embodiment, the second tube portion 222 is insulative and arranged on the inner wall of the inner tube 300, which reduces the chance of collision between gas molecules and the inner wall of the inner tube 300, and prevents gas from being ionized and arcing at the inner wall of the inner tube 300.
[0050] In a specific embodiment, see Figure 2 In two adjacent first anti-arcing members 210 and second anti-arcing members 220, the end face of the first tube portion 212 of the first anti-arcing member 210 and the end face of the second tube portion 222 of the second anti-arcing member 220 are arranged close to each other, so that the first tube portions 212 of several first anti-arcing members 210 and the second tube portions 222 of several second anti-arcing members 220 are continuously laid on the inner wall of the outer tube 100, and the gas will not directly contact the inner wall of the inner tube 300 when passing through the setting area of the first anti-arcing member 210 and the second anti-arcing member 220 in the inner tube 300. Since the first tube portion 212 and the second tube portion 222 are insulating, the gas molecules are not easily ionized when passing through, which prevents the gas from ionizing and arcing at the inner wall of the inner tube 300.
[0051] In one embodiment, Figure 5 FIG. 1 is a three-dimensional cross-sectional view of an outer tube of an air intake pipe device according to an embodiment of the present invention. Figure 6 is a schematic diagram of the third arc-preventing member in the air intake pipe device of the present invention, see Figure 5 and Figure 6 The outer anti-arcing component 400 includes a plurality of third anti-arcing parts 410 which are arranged on the inner wall of the outer tube 100 at intervals along the extension direction of the outer tube 100. The third anti-arcing parts 410 are sleeved on the outer side of the inner tube 300 and have insulating properties. A plurality of flow holes 4111 are arranged on the third anti-arcing part 410 at intervals. The flow holes 4111 are located on a side of the third anti-arcing part 410 close to the outer tube 100. The flow holes 4111 are formed with flow openings 4112 on a side of the third anti-arcing part 410 close to the outer tube 100. In this embodiment, the third anti-arcing member 410 is supported between the inner tube 300 and the outer tube 100. The third anti-arcing member 410 is insulating, that is, the third anti-arcing member 410 has a very high resistivity. The high resistivity can prevent the flow of current, effectively prevent the propagation of the arc in the outer space 110, greatly reduce the attachment and diffusion of the arc in the outer space 110, and prevent the gas from ionizing and arcing in the outer space 110.
[0052] In one embodiment, Figure 7 FIG. 1 is a schematic diagram of the fourth arc-preventing member in the air intake pipe device of the present invention, see Figure 2 , Figure 5 as well as Figure 7 The outer anti-arcing component 400 includes a plurality of fourth anti-arcing parts 420 which are arranged on the inner wall of the outer tube 100 at intervals along the extension direction of the outer tube 100. The fourth anti-arcing parts 420 are sleeved on the outer side of the inner tube 300 and have insulation. A plurality of guide holes 4211 are arranged at intervals on the fourth anti-arcing part 420. The guide holes 4211 are located on the side of the fourth anti-arcing part 420 close to the inner tube 300. The guide holes 4211 are formed with guide ports 4212 on the side of the fourth anti-arcing part 420 close to the inner tube 300. In this embodiment, the fourth anti-arcing member 420 is supported between the inner tube 300 and the outer tube 100. The fourth anti-arcing member 420 is insulating, that is, the fourth anti-arcing member 420 has a very high resistivity. The high resistivity can prevent the flow of current, effectively prevent the propagation of the arc in the outer space 110, greatly reduce the attachment and diffusion of the arc in the outer space 110, and prevent the gas from ionizing and arcing in the outer space 110.
[0053] In one embodiment, see Figure 2 , Figure 5 , Figure 6 as well as Figure 7The outer anti-arcing component 400 includes a plurality of third anti-arcing components 410 and a plurality of fourth anti-arcing components 420 which are arranged at intervals on the inner wall of the outer tube 100 along the extension direction of the outer tube 100. The third anti-arcing components 410 and the fourth anti-arcing components 420 are arranged alternately and both have insulation properties. The third anti-arcing components 410 and the fourth anti-arcing components 420 are sleeved outside the inner tube 300. The third anti-arcing component 410 is provided with a plurality of flow holes 4111 at intervals. The flow holes 411 1 is located on a side of the third anti-arcing member 410 close to the outer tube 100, a flow hole 4111 is formed with a flow opening 4112 on the side of the third anti-arcing member 410 close to the outer tube 100, a plurality of flow guide holes 4211 are provided at intervals on the fourth anti-arcing member 420, the flow guide holes 4211 are located on a side of the fourth anti-arcing member 420 close to the inner tube 300, and a flow guide opening 4212 is formed on the side of the fourth anti-arcing member 420 close to the inner tube 300. In this embodiment, the third arc-preventing member 410 and the fourth arc-preventing member 420 are insulating, that is, the third arc-preventing member 410 and the fourth arc-preventing member 420 have high resistivity, which can prevent the flow of current, effectively prevent the arc from propagating in the inner tube 300, and reduce the attachment and diffusion of the arc in the inner tube 300. The third arc-preventing member 410 and the fourth arc-preventing member 420 are alternately arranged to provide a stronger insulation effect, preventing the gas from ionizing and arcing in the inner tube 300. The combination of the flow hole 4111 and the guide hole 4211 optimizes the gas flow path and contributes to the uniform distribution of plasma.
[0054] In one embodiment, see Figure 2 , Figure 5 as well as Figure 6 The third anti-arcing member 410 includes a third plate portion 411 arranged horizontally and a third tube portion 412 fixedly connected to the third plate portion 411 along the edge of the third plate portion 411, the third plate portion 411 and the third tube portion 412 are insulating, the third tube portion 412 is tubular and matched with the outer tube 100, the third tube portion 412 is arranged on the inner wall of the outer tube 100, the flow hole 4111 is arranged on the third plate portion 411 and is located on the side of the third plate portion 411 close to the outer tube 100, the flow port 4112 is arranged on the third tube portion 412, the third plate portion 411 is provided with a first set of holes 4113 matched with the inner tube 300, and the third plate portion 411 is sleeved on the outside of the inner tube 300 through the first set of holes 4113. In this embodiment, the third tube portion 412 is insulating and disposed on the inner wall of the outer tube 100 , which reduces the chance of collision between gas molecules and the inner wall of the outer tube 100 and prevents ionization and arcing of the gas at the inner wall of the outer tube 100 .
[0055] In one embodiment, see Figure 2 , Figure 5 as well as Figure 7The fourth anti-arcing member 420 includes a fourth plate portion 421 arranged horizontally and a fourth tube portion 422 fixedly connected to the fourth plate portion 421 along the edge of the fourth plate portion 421, the fourth plate portion 421 and the fourth tube portion 422 are insulating, the fourth tube portion 422 is tubular and is compatible with the outer layer tube 100, the fourth tube portion 422 is arranged on the inner wall of the outer layer tube 100, the fourth plate portion 421 is provided with a second set of holes 4213 compatible with the inner layer tube 300, the fourth plate portion 421 is sleeved on the outside of the inner layer tube 300 through the second set of holes 4213, the guide hole 4211 is arranged on the fourth plate portion 421 and is located on the side of the fourth plate portion 421 close to the inner layer tube 300, the guide hole 4211 is connected to the second set of holes 4213, and the guide port 4212 is arranged on the inner wall of the second set of holes 4213. In this embodiment, the fourth tube portion 422 is insulating and disposed on the inner wall of the outer tube 100 , which reduces the chance of collision between gas molecules and the inner wall of the outer tube 100 and prevents ionization and arcing of the gas at the inner wall of the outer tube 100 .
[0056] In a specific embodiment, see Figure 2 and Figure 5 In two adjacent third anti-arcing members 410 and fourth anti-arcing members 420, the end face of the third tube portion 412 of the third anti-arcing member 410 and the end face of the fourth tube portion 422 of the fourth anti-arcing member 420 are arranged close to each other, so that the third tube portions 412 of a plurality of third anti-arcing members 410 and the fourth tube portions 422 of a plurality of fourth anti-arcing members 420 are continuously laid on the inner wall of the outer tube 100, and the gas will not directly contact the inner wall of the outer tube 100 when passing through the arrangement area of the third anti-arcing member 410 and the fourth anti-arcing member 420 in the outer tube 100. Since the third tube portion 412 and the fourth tube portion 422 are insulating, the gas molecules are not easily ionized when passing through, so as to prevent the gas from ionizing and arcing at the inner wall of the outer tube 100.
[0057] In a specific embodiment, the outer arc protection component 400 and the inner arc protection component 200 are made of ceramic or other insulating materials.
[0058] In a specific embodiment, see Figure 1 and Figure 2 The outer tube 100 and the inner tube 300 are circular tubes, the first plate portion 211, the second plate portion 221, the third plate portion 411, and the fourth plate portion 421 are all circular, the first tube portion 212, the second tube portion 222, the third tube portion 412, and the fourth tube portion 422 are all circular tubes, the outer tube 100, the inner tube 300, the first plate portion 211, the second plate portion 221, the third plate portion 411, the fourth plate portion 421, the first tube portion 212, the second tube portion 222, the third tube portion 412, and the fourth tube portion 422 are concentrically arranged, and the concentric arrangement can ensure that the gas flows more evenly in the intake pipe device.
[0059] In addition, the present invention also provides a semiconductor device, for example, the semiconductor device is a deposition device such as an atomic layer deposition (ALD) device, a chemical vapor deposition (CVD) device, or a plasma enhanced chemical vapor deposition (PECVD) device, and the semiconductor device includes: an intake pipeline device as in any of the above embodiments.
[0060] In the description of the present invention, it should be understood that the terms "including" and "having" and any variations thereof used herein are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatuses.
[0061] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0062] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.
[0063] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by those with ordinary skills in the field to which the present invention belongs.
Claims
1. An air intake pipe device, characterized in that: include: Outer tube; The outer arc-proof component is arranged on the inner wall of the outer tube and has insulation properties.
2. The air intake pipe device according to claim 1, characterized in that: Also includes: An inner tube is arranged inside the outer tube, an outer space is formed between the outer tube and the inner tube, and the outer arc-proof component is located in the outer space; The inner arc-proof component is arranged in the inner tube and has insulation properties.
3. The air intake pipe device according to claim 2, characterized in that: The inner arc-proof component comprises a plurality of first arc-proof parts which are arranged on the inner wall of the inner tube at intervals along the extension direction of the inner tube. The first arc-proof parts are insulating and have a through hole in the middle.
4. The air intake pipe device according to claim 2, characterized in that: The inner layer arc prevention assembly includes a plurality of second arc prevention members arranged at intervals on the inner wall of the inner layer tube along the extension direction of the inner layer tube, the second arc prevention members are insulating and have a plurality of through holes arranged at intervals.
5. The air intake pipe device according to claim 2, characterized in that: The inner layer anti-arcing component includes a plurality of first anti-arcing parts and a plurality of second anti-arcing parts which are arranged on the inner wall of the inner layer tube at intervals along the extension direction of the inner layer tube. The first anti-arcing parts and the second anti-arcing parts are arranged alternately and both have insulating properties. A through hole is provided in the middle of the first anti-arcing part, and a plurality of through holes are provided at intervals in the second anti-arcing part.
6. The air intake pipe device according to claim 5, characterized in that: The perforation is arranged close to the edge of the second arc-preventing member.
7. The air intake pipe device according to claim 5, characterized in that: The through holes and the through holes are staggered in the vertical direction.
8. The air intake pipe device according to claim 3 or 5, characterized in that: The first anti-arcing component includes a first plate portion arranged horizontally and a first tube portion fixedly connected to the first plate portion along an edge of the first plate portion, the first plate portion and the first tube portion are insulating, the first tube portion is tubular and adapted to the inner layer tube, the first tube portion is arranged on the inner wall of the inner layer tube, and the through hole is arranged on the first plate portion.
9. The air intake pipe device according to claim 4 or 5, characterized in that: The second anti-arcing component includes a second plate portion arranged horizontally and a second tube portion fixedly connected to the second plate portion along the edge of the second plate portion, the second plate portion and the second tube portion are insulating, the second tube portion is tubular and adapted to the inner layer tube, the second tube portion is arranged on the inner wall of the inner layer tube, and the through hole is arranged on the second plate portion.
10. The air intake pipe device according to claim 2, characterized in that: The outer anti-arcing component includes a plurality of third anti-arcing parts which are arranged on the inner wall of the outer tube at intervals along the extension direction of the outer tube. The third anti-arcing parts are sleeved on the outside of the inner tube and have insulating properties. A plurality of flow holes are arranged at intervals on the third anti-arcing parts, and the flow holes are located on the side of the third anti-arcing parts close to the outer tube.
11. The air intake pipe device according to claim 2, characterized in that: The outer anti-arcing component includes a plurality of fourth anti-arcing parts which are arranged on the inner wall of the outer tube at intervals along the extension direction of the outer tube. The fourth anti-arcing parts are sleeved on the outside of the inner tube and have insulating properties. A plurality of guide holes are arranged at intervals on the fourth anti-arcing parts, and the guide holes are located on the side of the fourth anti-arcing part close to the inner tube.
12. The air intake pipe device according to claim 2, characterized in that: The outer anti-arcing component includes a plurality of third anti-arcing parts and a plurality of fourth anti-arcing parts which are arranged on the inner wall of the outer tube at intervals along the extension direction of the outer tube, the third anti-arcing parts and the fourth anti-arcing parts are alternately arranged and both have insulation properties, the third anti-arcing parts and the fourth anti-arcing parts are sleeved on the outside of the inner tube, the third anti-arcing part is provided with a plurality of flow holes at intervals, the flow holes are located on the side of the third anti-arcing part close to the outer tube, the fourth anti-arcing part is provided with a plurality of guide holes at intervals, the guide holes are located on the side of the fourth anti-arcing part close to the inner tube.
13. The air intake pipe device according to claim 10 or 12, characterized in that: The third anti-arcing component includes a third plate portion arranged horizontally and a third tube portion fixedly connected to the third plate portion along the edge of the third plate portion, the third plate portion and the third tube portion are insulating, the third tube portion is tubular and matched with the outer tube, the third tube portion is arranged on the inner wall of the outer tube, the flow hole is arranged on the third plate portion and is located on the side of the third plate portion close to the outer tube, the third plate portion is provided with a first set of holes matched with the inner tube, and the third plate portion is sleeved on the outside of the inner tube through the first set of holes.
14. The air intake pipe device according to claim 11 or 12, characterized in that: The fourth anti-arcing component includes a fourth plate portion arranged horizontally and a fourth tube portion fixedly connected to the fourth plate portion along the edge of the fourth plate portion, the fourth plate portion and the fourth tube portion are insulating, the fourth tube portion is tubular and matched with the outer tube, the fourth tube portion is arranged on the inner wall of the outer tube, the fourth plate portion is provided with a second set of holes matched with the inner tube, the fourth plate portion is sleeved on the outside of the inner tube through the second set of holes, the guide hole is arranged on the fourth plate portion and is located on the side of the fourth plate portion close to the inner tube, and the guide hole is connected with the second set of holes.
15. A semiconductor device, characterized in that: include: An air intake pipe device as claimed in any one of claims 1 to 14.