Sintering equipment for processing aluminum nitride ceramic substrate

Abstract

The invention discloses sintering equipment for processing an aluminum nitride ceramic substrate, which comprises a support frame, a sintering box is fixedly connected to the support frame, a clamping device is arranged in the sintering box, a substrate prefabricated part is arranged on the clamping device, and a device for collecting air in the sintering box and adjusting the air so as to adjust the temperature of the substrate prefabricated part is arranged on the sintering box. The adjusting device is used for changing the clamping position of the clamping device on the base plate prefabricated part, and a gas guide device is arranged at the bottom end of the sintering box and used for heating nitrogen in the sintering box, guiding the nitrogen into the sintering box and sintering the base plate prefabricated part in the sintering box; the base plate prefabricated part can be inclined through the clamping device, two sets of rolling shafts can make contact with and support the two faces of the base plate prefabricated part all the time till one side of the base plate prefabricated part is attached to a baffle, meanwhile, a lower abutting block supports the bottom end of the base plate prefabricated part under the action of a first spring, the clamping and fixing point of the base plate prefabricated part can be changed, and the clamping effect of the base plate prefabricated part is improved. And all positions of the substrate can be fully sintered.

Description

Technical Field

[0001] The invention relates to the technical field of sintering equipment, in particular to sintering equipment for processing aluminum nitride ceramic substrates. Background Art

[0002] Aluminum nitride ceramic substrate is a high-performance ceramic material with excellent thermal conductivity, electrical insulation and mechanical strength. It is widely used in the electronic and electrical fields, especially in high-power electronic devices that require high thermal conductivity and electrical insulation. In the processing of aluminum nitride ceramic substrates, sintering is one of the key steps. The sintering of aluminum nitride ceramic substrates is a process in which the pre-prepared aluminum nitride powder or preform is treated at high temperature to cause bonding, diffusion and rearrangement between the particles, and finally form a dense and uniform ceramic material.

[0003] The Chinese patent with publication number CN207845509U discloses a sintering device for aluminum nitride ceramic substrates, which includes a box and a liquefied gas flamethrower. The right side wall of the box is symmetrically provided with two connecting frames, each of which is rotatably connected to two driving rollers, a movable plate is sandwiched between the four driving rollers, and one of the driving rollers located at the bottom is coaxially provided with a worm gear. The side wall of the box is provided with a support frame, and a first motor is provided on the support frame. A worm is welded at the output end of the first motor, and the worm is meshed with the worm gear. Through holes are provided on both side walls of the box, and a door body is provided at the through hole on the left side wall of the box. A handle is welded on the bottom side wall of the door body, and a groove for matching the door body is provided on the inner wall of the box. The device can fix the aluminum nitride ceramic substrate, avoid the position change of the aluminum nitride ceramic substrate during the sintering process, heat evenly, sintering efficiency is higher, and the sintered product quality is better.

[0004] However, the above-mentioned prior art has the following deficiencies: during the sintering process of the aluminum nitride ceramic substrate, although the aluminum nitride ceramic substrate can be clamped and fixed by the fixing buckle, the fixing buckle will block the surface of the aluminum nitride ceramic substrate, so that the area cannot be heated evenly, resulting in uneven sintering. This uneven sintering will not only affect the microstructure and performance of the aluminum nitride ceramic substrate, but may also produce stress concentration points inside the substrate, thereby reducing its mechanical strength and thermal conductivity. In addition, the part blocked by the fixing buckle may form defects such as cracks or pores during the sintering process. These defects will further affect the reliability and service life of the aluminum nitride ceramic substrate. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that during the sintering process of the aluminum nitride ceramic substrate, although the aluminum nitride ceramic substrate can be clamped and fixed by a fixing buckle, the fixing buckle will block the surface of the aluminum nitride ceramic substrate, so that the area cannot be heated evenly, resulting in uneven sintering. This uneven sintering will not only affect the microstructure and performance of the aluminum nitride ceramic substrate, but may also produce stress concentration points inside the substrate, thereby reducing its mechanical strength and thermal conductivity. In addition, the part blocked by the fixing buckle may form defects such as cracks or pores during the sintering process. These defects will further affect the reliability and service life of the aluminum nitride ceramic substrate. A sintering device for processing an aluminum nitride ceramic substrate is provided.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: a sintering device for processing aluminum nitride ceramic substrates, comprising: a support frame, wherein a sintering box is fixedly connected to the support frame, a clamping device is arranged in the sintering box, a substrate preform is arranged on the clamping device, the sintering box is provided with an adjusting device for collecting air in the sintering box and changing the clamping position of the substrate preform by adjusting the air, and a gas guide device is arranged at the bottom of the sintering box for heating the nitrogen in the sintering box and introducing it into the sintering box so as to sinter the substrate preform in the sintering box;

[0007] The clamping device comprises a lower plate fixedly connected to the bottom end of the sintering box, and an upper plate slidably connected to the top end of the sintering box and penetrating the sintering box, a connecting block is slidably inserted at the bottom end of the upper plate, a connecting rod is slidably inserted in the connecting block, a roller is rotatably connected to the connecting rod, the roller abuts against the base plate preform, a mounting groove is provided on the lower plate, the base plate preform is arranged at the top end of the mounting groove, a lower abutting block is slidably inserted in the mounting groove, a spring 1 is fixedly connected to the bottom end of the lower abutting block, one end of the spring 1 is fixedly connected to the bottom end of the mounting groove, a baffle is fixedly connected to the top end of the lower plate, and the baffle is arranged on one side of the top end of the mounting groove;

[0008] Among them, when the adjusting device pushes the upper plate to move to one side, the roller abutting against the substrate preform pushes the substrate preform to move, so that the substrate preform is tilted, and during the tilting process, the roller always supports the substrate preform until one side of the substrate preform is in contact with the baffle. At this time, a gap is generated between the bottom end of the substrate preform and the notch of the installation groove, so that the spring lifts the lower block until the lower block abuts against the bottom end of the substrate preform, supports the bottom end of the substrate preform, and changes the clamping and fixing point of the substrate preform by the clamping device.

[0009] As a further solution of the present invention: an air outlet groove is formed through the lower plate, an air inlet groove is formed through the lower plate, an adjustment groove is formed on the connecting block, a spring 2 is fixedly connected to the top of the connecting rod, and the other end of the spring 2 is fixedly connected to the top of the adjustment groove.

[0010] As a further scheme of the present invention: the air guiding device includes a connecting pipe which is connected to the bottom end of the sintering box, and the connecting pipe is connected to the air outlet groove, the bottom end of the connecting pipe is connected to a heating box, the heating box is fixedly connected to the support frame, a switching piece is slidably inserted in the connecting pipe, a heating coil is provided in the heating box, and one end of the heating coil passes through the heating box, a graphite rod is connected to the heating coil, and the graphite rod is fixedly connected to the inner wall of the heating box, the top of the heating box is connected to an air outlet box, the bottom end of the sintering box is connected to an air inlet box, and the top of the air inlet box is connected to the air inlet groove, the top of the sintering box is fixedly connected to an air pump, the air inlet end of the air pump is connected to the air outlet box, and the air outlet end of the air pump is connected to the air inlet box.

[0011] As a further solution of the present invention: the switching member includes a connecting block which is slidably inserted into the connecting pipe, a blocking block is fixedly connected to the top of the connecting block, the blocking block is adapted to the air outlet groove, a spring five is fixedly connected to the bottom of the connecting block, one end of the spring five is fixedly connected to the bottom end of the heating box, a flow groove one is opened through the connecting block, a flow groove two is opened through the side end of the blocking block, a flow groove three is opened through the side end of the connecting block, the flow groove two is connected with the flow groove one, and the flow groove three is connected with the flow groove one.

[0012] As a further solution of the present invention: the regulating device comprises a regulating member 1 and a regulating member 2 symmetrically distributed on both sides of the sintering box, and a connecting pipe is arranged between the regulating member 1 and the regulating member 2.

[0013] As a further solution of the present invention: the adjusting member 1 includes a fixed tube passing through the side end of the sintering box, one end of the fixed tube passes through the sintering box and is connected with an airbag, the inner wall of the airbag is fixedly connected with an expansion plate, one end of the expansion plate is fixedly connected with a sealing member, and one end of the sealing member passes through the fixed tube, one end of the outer side of the airbag abuts against a push plate, one end of the push plate is connected with an adjusting tube, one end of the adjusting tube passes through the push plate, the airbag and the expansion plate in sequence and is connected with the airbag, one end of the adjusting tube is slidably connected with the connecting tube and is connected with the connecting tube, a hydraulic rod is fixedly connected to the top of the sintering box, and the movable end of the hydraulic rod is fixedly connected to the push plate.

[0014] As a further solution of the present invention: the second adjusting member also includes a fixing tube, an airbag, an opening plate, a sealing member, a push plate, an adjusting tube and a hydraulic rod.

[0015] As a further solution of the present invention: a limiting block is slidably inserted on part of the fixed tubes in the sintering box, and the limiting block passes through the fixed tube, a spring three is fixedly connected to the limiting block, and one end of the spring three is fixedly connected to the outer side of the fixed tube.

[0016] As a further solution of the present invention: the sealing member comprises a telescopic rod fixedly connected to the expansion plate, one end of the telescopic rod passes through the airbag and the fixed tube, and is clamped with a sealing disk, and the sealing disk is adapted to the fixed tube.

[0017] As a further solution of the present invention: a connecting groove is provided at the side end of the telescopic rod, a card block is slidably inserted in the connecting groove, a spring four is fixedly connected to one end of the card block, one end of the spring four is fixedly connected to the inner wall of the connecting groove, a slot is movably provided on the sealing disk, a card slot is provided on the inner wall of the slot, the card slot is connected to the slot, and the card slot is adapted to the card block.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The present invention can tilt the substrate preform by the clamping device, and the two groups of rollers can always contact and support the two sides of the substrate preform until one side of the substrate preform is in contact with the baffle. At the same time, the lower abutment block supports the bottom end of the substrate preform under the action of the first spring, and the clamping and fixing point of the substrate preform can be changed to ensure that all positions of the substrate can be fully sintered. The cooperation of the second spring and the adjustment groove can provide a buffer for the abutment between the roller and the substrate preform, avoiding excessive extrusion or unstable support of the substrate preform due to the rigid connection, reducing the impact force transmitted to the substrate preform, reducing the risk of cracking, deformation and other problems in the processing process, and improving the product yield rate;

[0020] 2. In the present invention, the circulation of nitrogen between the sintering box and the gas guide device is realized through the structures such as the air pump and the switching member in the gas guide device, so that the nitrogen can be reused, thereby avoiding the waste of nitrogen, reducing the production cost and improving the resource utilization rate. By switching the air inlet and outlet of the air pump, the nitrogen in the sintering box is smoothly discharged back into the heating box, which is convenient for the subsequent operation of taking out the finished ceramic substrate in the sintering box, and is also beneficial to the subsequent use and maintenance of the equipment. The air inlet box is located in the middle of the sintering box. After the nitrogen enters the sintering box, it will squeeze the internal air to both sides, and the nitrogen circulates between the sintering box and the gas guide device, which can make the temperature in the sintering box more uniform, avoid local temperature being too high or too low, ensure that the substrate preform is heated evenly during the sintering process, and reduce the problem of uneven sintering caused by temperature difference.

[0021] 3. In the present invention, the upper plate is pushed to move and change the position and clamping fixing point of the substrate preform through the adjusting device, so that each position of the substrate preform has the opportunity to be fully sintered during the sintering process, avoiding the problem of uneven sintering caused by the blocking of the substrate preform by the clamping device, improving the sintering quality, and being able to utilize the flow and pressure changes of the gas in the sintering box and the action of the hydraulic rod to automatically complete the change of the clamping position of the substrate preform without manual operation, reducing manpower input, improving production efficiency, and reducing the errors and risks that may be caused by manual operation. The sealing components and other components in the adjusting device can achieve good sealing between the airbag and the sintering box, ensuring the stability of the gas environment in the sintering box, preventing the substrate preform from contacting with oxygen to produce an oxidation reaction during the sintering process, ensuring the normal progress of the sintering process, and also extending the service life of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0023] Figure 2 It is a cross-sectional view of the overall structure of a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0024] Figure 3 It is a schematic structural diagram of an upper plate in a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0025] Figure 4 The invention relates to a sintering device for processing aluminum nitride ceramic substrates. Figure 3 A schematic diagram of the structure at A;

[0026] Figure 5 It is a schematic structural diagram of a clamping device in a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0027] Figure 6 It is a structural schematic diagram of a connecting block in a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0028] Figure 7 The invention relates to a sintering device for processing aluminum nitride ceramic substrates. Figure 6 Schematic diagram of the structure at B;

[0029] Figure 8 It is a structural schematic diagram of a gas guide device in a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0030] Fig. 9 It is a structural schematic diagram of a switching component in a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0031] Fig.10 It is a schematic structural diagram of an adjusting member 1 in a sintering device for processing an aluminum nitride ceramic substrate according to the present invention;

[0032] Fig.11 The invention relates to a sintering device for processing aluminum nitride ceramic substrates. Fig.10 Schematic diagram of the structure at C;

[0033] Fig.12 The present invention is a cross-sectional view of the structure of a telescopic rod in a sintering device for processing an aluminum nitride ceramic substrate.

[0034] In the figure: 1, support frame; 2, sintering box; 3, clamping device; 31, upper plate; 32, connecting block; 321, adjusting groove; 322, spring 2; 33, connecting rod; 34, roller; 35, mounting groove; 36, lower block; 37, spring 1; 38, baffle; 39, lower plate; 391, air outlet groove; 392, air inlet groove; 4, substrate preform; 5, air guide device; 51, heating box; 52, connecting pipe; 53, switching part; 531, blocking block; 532, connecting block; 533, spring 5; 534, flow groove 2; 535, flow groove 1; 536, flow groove three; 54. heating coil; 55. graphite rod; 56. air pump; 57. air outlet box; 58. air inlet box; 6. adjusting device; 61. adjusting part one; 611. fixing tube; 6111. limiting block; 6112. spring three; 612. air bag; 613. opening plate; 614. sealing part; 6141. telescopic rod; 6142. sealing disk; 6143. connecting groove; 6144. clamping block; 6145. spring four; 6146. slot; 6147. clamping slot; 615. push plate; 616. adjusting tube; 617. hydraulic rod; 62. adjusting part two; 63. connecting pipe. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The following is an explanation of an embodiment of the present invention based on the overall structure of the present invention.

[0037] Reference Figures 1 to 5 In an embodiment of the present invention, a sintering device for processing an aluminum nitride ceramic substrate comprises: a support frame 1, wherein a sintering box 2 is fixedly connected to the support frame 1, a clamping device 3 is arranged in the sintering box 2, a substrate preform 4 is arranged on the clamping device 3, and the sintering box 2 is provided with an adjusting device 6 for collecting air in the sintering box 2 and changing the clamping position of the substrate preform 4 by the clamping device 3 by adjusting the air, so that the substrate preform 4 can be sintered at all positions of the substrate preform 4 during the sintering process, and the substrate preform 4 is prevented from being sintered unevenly due to the blocking of the substrate preform 4 by the clamping device 3 during the sintering process, and the bottom end of the sintering box 2 is provided with a gas guide device 5 for heating the nitrogen therein and introducing it into the sintering box 2, heating the substrate preform 4, and sintering the substrate preform 4 in the sintering box 2;

[0038] The clamping device 3 includes a lower plate 39 fixedly connected to the bottom end of the sintering box 2, and an upper plate 31 slidably connected to the top end of the sintering box 2 and passing through the sintering box 2. The length and width of the lower plate 39 are the same as the length and width of the interior of the sintering box 2, the width of the upper plate 31 is the same as the width of the interior of the sintering box 2, the length of the upper plate 31 is greater than the length of the sintering box 2, and a connecting block 32 is slidably inserted at the bottom end of the upper plate 31. The connecting block 32 is U-shaped, and multiple groups of connecting blocks 32 are arranged, which are evenly distributed at the bottom end of the upper plate 31, and two groups of connecting blocks 32 are arranged on both sides of each group of substrate preforms 4, and two groups of connecting rods 33 are slidably inserted in each group of connecting blocks 32, and the two groups of connecting rods 33 are symmetrically distributed on both sides of the connecting blocks 32, and the connecting rods 33 are T-shaped, and the bottom ends of the connecting rods 33 pass through the connecting block 32, and a group of rollers 34 are arranged between the two groups of connecting rods 33, and the two ends of each group of rollers 34 are respectively connected to a group The connecting rod 33 is rotatably connected, and the roller 34 abuts against the substrate preform 4. A mounting groove 35 is provided on the lower plate 39. The mounting groove 35 is a convex shape. There are multiple groups of mounting grooves 35, which are evenly opened at the top of the lower plate 39. A group of substrate preforms 4 is arranged at the top of each group of mounting grooves 35. A lower stop block 36 is slidably inserted in the mounting groove 35. The lower stop block 36 is T-shaped, and the top of the lower stop block 36 is an eight-shaped shape, with two groups of inclined surfaces, each group of inclined surfaces is half the width of the substrate preform 4. Multiple groups of springs 37 are fixedly connected to the bottom end of each group of lower stop blocks 36. Multiple groups of springs 37 are evenly distributed in the mounting grooves 35. One end of the spring 37 is fixedly connected to the bottom end of the mounting groove 35. A baffle 38 is fixedly connected to the top of the lower plate 39. The baffle 38 is arranged on one side of the top of the mounting groove 35. Two groups of baffles 38 are arranged at the top of each group of mounting grooves 35, and the two groups of baffles 38 are distributed in an eight-shaped shape.

[0039] When the adjusting device 6 pushes the upper plate 31 to move to one side, a group of rollers 34 abutting against the substrate preform 4 pushes the substrate preform 4 to move, so that the substrate preform 4 is tilted, and during the tilting process, one group of rollers 34 always supports the substrate preform 4, and the other group of rollers 34 is pushed upward under the tilting action of the substrate preform 4, and the two groups of rollers 34 are always maintained to contact and support the two sides of the substrate preform 4 until one side of the substrate preform 4 is in contact with the baffle 38. At this time, a gap is generated between the bottom end of the substrate preform 4 and the notch of the mounting groove 35, so that the spring 1 37 lifts the lower stop block 36 until the inclined surface on one side of the top of the lower stop block 36 abuts against the bottom end of the substrate preform 4, supports the bottom end of the substrate preform 4, and exposes half of the bottom end of the substrate preform 4, thereby changing the clamping and fixing point of the clamping device 3 on the substrate preform 4.

[0040] Reference Figure 6 to Figure 7The lower plate 39 is provided with an air outlet groove 391, and two groups of air outlet grooves 391 are symmetrically provided on both sides of the top of the lower plate 39. The lower plate 39 is provided with an air inlet groove 392, and the air inlet groove 392 is located between the two groups of air outlet grooves 391. Each group of connecting blocks 32 is provided with a group of adjusting grooves 321, and the top of each group of connecting rods 33 is fixedly connected with a group of springs 322, and the other end of the springs 322 is fixedly connected to the top of the adjusting grooves 321. When one group of rollers 34 is pushed upward under the inclination of the substrate preform 4, the connecting rod 33 slides upward in the connecting block 32, and the springs 322 are stretched to generate a downward pulling force. When the other group of rollers 34 tends to move downward with the inclination of the substrate preform 4, the springs 322 will be compressed to generate an upward thrust, so that the two groups of rollers 34 support and fix the substrate preform 4.

[0041] By adopting the above scheme, the cooperation between the second spring 322 and the adjustment groove 321 can provide a buffer for the abutment between the roller 34 and the substrate preform 4, always maintain good support and contact with the substrate preform 4, avoid excessive squeezing or unstable support of the substrate preform 4 due to rigid connection, and help ensure that during the position change of the substrate preform 4, the two groups of rollers 34 can stably contact and support the two sides of the substrate preform 4, and prevent the substrate preform 4 from being damaged due to sudden external force or movement when the clamping device 3 changes the clamping position of the substrate preform 4. The buffering and adjustment effect of the second spring 322 can reduce the impact force transmitted to the substrate preform 4 due to the movement of the device, reduce the risk of cracking, deformation and other problems of the substrate preform 4 during the processing, and improve the product yield.

[0042] Reference Figures 8 to 9The gas guide device 5 includes a connecting pipe 52 which is connected to the bottom end of the sintering box 2. The connecting pipe 52 is provided with two groups, which are symmetrically distributed at the bottom end of the sintering box 2, and the connecting pipe 52 is connected to the gas outlet groove 391. The bottom ends of the two groups of connecting pipes 52 are connected to the heating box 51. The two groups of connecting pipes 52 and the heating box 51 are distributed in a U shape. The heating box 51 is fixedly connected to the support frame 1. A group of switching members 53 is slidably inserted in each group of connecting pipes 52. A heating coil 54 is provided in the heating box 51, and one end of the heating coil 54 passes through the heating box 51. A graphite rod 55 is connected to the heating coil 54, and the graphite rod 55 is connected to the heating box 51. The inner wall of the box 51 is fixedly connected, the top of the heating box 51 is penetrated and connected with an air outlet box 57, the bottom of the sintering box 2 is penetrated and connected with an air inlet box 58, and the top of the air inlet box 58 is connected with the air inlet groove 392, the top of the sintering box 2 is fixedly connected with an air pump 56, the air inlet end of the air pump 56 is penetrated and connected with the air outlet box 57, and the air outlet end of the air pump 56 is penetrated and connected with the air inlet box 58, the heating coil 54, the graphite rod 55 and the air pump 56 are respectively provided with two groups, which are symmetrically distributed on both sides of the air outlet box 57, and the switching member 53 includes a connecting block 532 which is slidably plugged with the connecting pipe 52, and the top of the connecting block 532 is fixedly connected with a blocking block 531, and the blocking block 531 Matching with the air outlet groove 391, the length and width of the blocking block 531 are smaller than the length and width of the connecting block 532, and the bottom end of the connecting block 532 is fixedly connected with a spring 533, and the spring 533 is provided with two groups, which are symmetrically distributed at the bottom end of the connecting block 532, and one end of the spring 533 is fixedly connected to the bottom end of the heating box 51, and a flow groove 1 535 is opened through the connecting block 532, and a flow groove 2 534 is opened through the side end of the blocking block 531, and the flow groove 2 534 is provided with four groups, which are symmetrically distributed at the side end of the blocking block 531, and a flow groove 3 536 is opened through the side end of the connecting block 532, and the flow groove 3 536 is provided There are four groups, which are symmetrically distributed on the side ends of the connecting block 532. Flow groove two 534 is connected to flow groove one 535, and flow groove three 536 is connected to flow groove one 535. When the nitrogen in the sintering box 2 pushes the switching member 53 downward, the spring five 533 is compressed, and the blocking block 531 enters the connecting pipe 52. The nitrogen passes through the air outlet groove 391 and the gap between the blocking block 531 and the connecting pipe 52 in turn, enters the flow groove two 534, and passes through the flow groove two 534, the flow groove one 535 and the flow groove three 536 in turn, and enters the heating box 51 again, so that the nitrogen circulates between the sintering box 2 and the gas guide device 5.

[0043] For this purpose, in the present technical solution, the air pump 56 adopts the existing technology and is a vortex air pump 56. Its working principle is based on a pair of mutually meshing vortex rotors, which generate vacuum or compressed air through rotational motion. The vortex air pump 56 operates in both directions and its air inlet and outlet can be switched; the heating coil 54 and the graphite rod 55 adopt the existing technology and are basic components in a high-frequency induction heating furnace. High-frequency alternating current generates an alternating magnetic field through the heating coil 54. Since the graphite rod 55 is in the heating coil 54, when the graphite rod 55 is in the magnetic field, eddy currents are generated inside the material. When the eddy currents flow inside the material, Joule heat is generated due to the resistance effect, causing the material to heat up rapidly, thereby heating the nitrogen in the heating box 51.

[0044] The above scheme is adopted: the circulation flow of nitrogen between the sintering box 2 and the gas guide device 5 is realized through structures such as the air pump 56 and the switching member 53, so that the nitrogen can be reused, avoiding the waste of nitrogen, reducing the production cost, and also improving the utilization rate of resources. By switching the air inlet and outlet of the air pump 56, the nitrogen in the sintering box 2 can be smoothly discharged and returned to the heating box 51, which is convenient for the subsequent removal of the finished ceramic substrate in the sintering box 2 and the subsequent use and maintenance of the equipment. The air inlet box 58 is located in the middle position of the sintering box 2. After the nitrogen enters the sintering box 2, the internal air will be squeezed to both sides, and the nitrogen circulates between the sintering box 2 and the gas guide device 5, which can make the temperature in the sintering box 2 more uniform, avoiding local temperature being too high or too low, thereby ensuring that the substrate preform 4 is heated evenly during the sintering process and reducing the problem of uneven sintering caused by temperature differences.

[0045] Reference Figures 10 to 12The adjusting device 6 includes an adjusting member 1 61 and an adjusting member 2 62 symmetrically distributed on both sides of the sintering box 2, a connecting pipe 63 is arranged between the adjusting member 1 61 and the adjusting member 2 62, the adjusting member 1 61 includes a fixed pipe 611 penetrating the side end of the sintering box 2, one end of the fixed pipe 611 penetrates the sintering box 2, and is connected with an air bag 612, the fixed pipe 611 is composed of a group of straight pipes and a group of limiting rings, so that the cross section of the fixed pipe 611 is U-shaped, the limiting ring is arranged at the end face of the straight pipe on the inner side of the air bag 612, the inner wall of the air bag 612 is fixedly connected with a support plate 613, one end of the support plate 613 is fixedly connected with a sealing member 614, and one end of the sealing member 614 penetrates the fixed pipe 611, one end of the outer side of the air bag 612 abuts against a push plate 615, one end of the push plate 615 An adjusting tube 616 is connected through the adjusting tube 616, which is composed of a group of L-shaped tubes and a group of F-shaped tubes, wherein one end of the L-shaped tube in the adjusting tube 616 is slidably plugged into the connecting tube 63, and both ends of the F-shaped tube in the adjusting tube 616 sequentially penetrate the push plate 615, the air bag 612 and the expansion plate 613, and are connected to the air bag 612. A hydraulic rod 617 is fixedly connected to the top of the sintering box 2, and the movable end of the hydraulic rod 617 is fixedly connected to the push plate 615. The adjusting part 2 62 also includes a fixed tube 611, an air bag 612, an expansion plate 613, a sealing part 614, a push plate 615, an adjusting tube 616 and a hydraulic rod 617. A limited block 6111 is slidably plugged into a part of the fixed tube 611 in the sintering box 2. The limited block 6111 is T-shaped. 1 is provided with four groups, which are symmetrically distributed on the side ends of the fixed tube 611, and the limit block 6111 passes through the fixed tube 611, and each group of limit blocks 6111 is fixedly connected with two groups of spring three 6112, and the two groups of spring three 6112 are symmetrically distributed on both sides of the limit block 6111, and one end of the spring three 6112 is fixedly connected to the outside of the fixed tube 611, and the sealing member 614 includes a telescopic rod 6141 fixedly connected to the expansion plate 613, one end of the telescopic rod 6141 passes through the airbag 612 and the fixed tube 611, and is clamped with a sealing disk 6142, and the sealing disk 6142 is adapted to the fixed tube 611, and a connecting groove 6143 is opened at the side end of the telescopic rod 6141, and the connecting groove 6143 is provided with four groups, which are symmetrically opened on the outer circumferential surface of the telescopic rod 6141, and each group of connecting groove 61 43 is slidably plugged with a group of blocks 6144, the blocks 6144 are cone-shaped, one end of each group of blocks 6144 is fixedly connected with a spring four 6145, one end of the spring four 6145 is fixedly connected to the inner wall of the connecting groove 6143, the sealing disk 6142 is movable to open a slot 6146, the slot 6146 is adapted to the telescopic rod 6141, the inner wall of the slot 6146 is provided with a slot 6147, four groups of slots 6147 are arranged, symmetrically distributed on the inner wall of the slot 6146, the slots 6147 are cone-shaped, the slots 6147 are connected with the slots 6146, and the slots 6147 are adapted to the blocks 6144. After starting the equipment, the nitrogen in the heating box 51 is heated and enters the sintering box 2 through the air pump 56. Since the air inlet box 58 is in the middle of the sintering box 2,The original air in the box is squeezed to both sides by the nitrogen and enters the airbag 612 through the fixed tube 611. As the gas in the airbag 612 increases, the airbag 612 expands, driving the expansion plate 613 to move to both sides, and then driving the telescopic rod 6141 and the sealing disk 6142 to move until the sealing disk 6142 abuts against the limit block 6111. After that, the air continues to enter the airbag 612 through the gap between the arc surface of the sealing disk 6142 and the fixed tube 611, causing the airbag 612 to continue to expand and the telescopic rod 6141 to stretch to its maximum length. When the telescopic rod 6141 stretches to its maximum length, the expansion plate 613 continues to move, and the tensile force on the sealing disk 6142 is greater than the elastic force of the spring three 6112, and the limit block 6111 abutting against the sealing disk 6142 moves outward. The spring 3 6112 is stretched under force, and the sealing disk 6142 passes through the limit block 6111 until it abuts against the limit ring on the end face of the fixed tube 611. At this time, the air completely enters the airbag 612, and the airbag 612 and the sintering box 2 are separated by the sealing disk 6142. After sintering for a period of time, a group of hydraulic rods 617 are started, and their movable ends drive the push plate 615 to move and squeeze the airbag 612. The telescopic rod 6141 contracts, and the air in the airbag 612 pushes the sealing disk 6142 to move until it abuts against the limit block 6111. The air enters the other group of airbags 612 through the two groups of regulating tubes 616 and the connecting tube 63. The other group of airbags 612 expands due to the increase of air, and the push plate 615 continues to move. The ring restricts the sealing disk 6142, and the tension on the telescopic rod 6141 is greater than the elastic force of the spring four 6145. The block 6144 and the slot 6147 produce abutment force, and the block 6144 moves to the inside of the connecting groove 6143. The spring four 6145 is compressed. When the block 6144 is completely pushed into the connecting groove 6143, the telescopic rod 6141 and the sealing disk 6142 are separated, and the other group of air bags 612 are no longer restricted and continue to expand. The push plate 615 abuts against the upper plate 31 and pushes it to move, thereby tilting the substrate preform 4, changing the clamping and fixing point of the clamping device 3 on the substrate preform 4, squeezing the other group of air bags 612, and the substrate preform 4 can be tilted to the other side. The clamping and fixing point is changed again. When the sintering is completed , the two groups of hydraulic rods 617 are started to squeeze the two groups of airbags 612 synchronously, the telescopic rod 6141 is forced to shrink, and the block 6144 is pushed into the connecting groove 6143 after contacting the edge of the slot 6146, until the connecting groove 6143 and the card slot 6147 correspond to each other. Under the action of the spring 4 6145, the block 6144 and the card slot 6147 are plugged, and the sealing disk 6142 is pushed by the telescopic rod 6141, passes through the limit block 6111 and the fixed pipe 611 into the sintering box 2, and at the same time, the air pump 56 is started and the air inlet and outlet are switched, so that the nitrogen in the sintering box 2 returns to the heating box 51, and the air in the airbag 612 also re-enters the sintering box 2, squeezing the nitrogen from both sides to the middle, so that it completely passes through the air inlet groove 392 and enters the heating box 51. ,

[0046] By adopting the above scheme: the upper plate 31 is pushed to move by the adjusting device 6 to change the position and the clamping fixing point of the substrate preform 4, so that each position of the substrate preform 4 has the opportunity to be fully sintered during the sintering process, avoiding the problem of uneven sintering caused by the blocking of the substrate preform 4 by the clamping device 3, and improving the sintering quality. The adjusting device 6 can use the flow and pressure changes of the gas in the sintering box 2 and the action of the hydraulic rod 617 to automatically complete the change of the clamping position of the substrate preform 4 without manual operation, reducing manpower investment, improving production efficiency, and reducing the errors and risks that may be caused by manual operation. The sealing member 614 and other components in the adjusting device 6 can achieve a good seal between the air bag 612 and the sintering box 2, ensuring the stability of the gas environment in the sintering box 2, preventing the substrate preform 4 from contacting with oxygen during the sintering process to produce an oxidation reaction, ensuring the normal progress of the sintering process, and also extending the service life of the equipment.

[0047] The working principle of the present invention is as follows: when in use, the lid of the sintering box 2 is first opened, and the substrate preform 4 is placed in the clamping device 3 in the sintering box 2, so that the two sides of the substrate preform 4 are respectively abutted against the two adjacent groups of rollers 34, and the bottom end of the substrate preform 4 is placed above the mounting groove 35, so that the gravity of the substrate preform 4 presses the lower abutment block 36 into the mounting groove 35, so that the substrate preform 4 is confined between the two groups of rollers 34 and the two groups of baffles 38, so that the substrate preform 4 is clamped and fixed, and then the lid of the sintering box 2 is closed, and the heating coil 54 is connected to high-frequency alternating current, so that the heating coil 54 generates an alternating magnetic field, so that the temperature of the graphite rod 55 is rapidly increased, thereby heating the nitrogen in the heating box 51, and while heating, the air pump 56 is started to make the heating box The nitrogen in 51 passes through the heating box 51, the air outlet box 57, the air pump 56 and the air inlet box 58 in turn, and enters the sintering box 2. Since the air inlet box 58 is in the middle of the sintering box 2, as the nitrogen enters, the air in the sintering box 2 will be squeezed to both sides, so that the air enters the airbag 612 through the fixed tube 611. As the gas in the airbag 612 increases, the airbag 612 expands, thereby driving the expansion plate 613 to move to both sides, and driving the telescopic rod 6141 and the sealing disk 6142 to move until the sealing disk 6142 abuts against the limit block 6111, limiting the sealing disk 6142. After that, the air enters the airbag 612 through the gap between the arc surface of the sealing disk 6142 and the fixed tube 611, so that the airbag 612 continues to expand, driving the expansion plate 613 to move to both sides, and driving the telescopic rod 6141 and the sealing disk 6142 to move until the sealing disk 6142 abuts against the limit block 6111, limiting the sealing disk 6142. The plate 613 continues to move, thereby extending the telescopic rod 6141 until the telescopic rod 6141 extends to its maximum length. At this time, due to the continued movement of the expansion plate 613, the sealing disk 6142 is subjected to a pulling force generated by the movement of the expansion plate 613, which is greater than the elastic force of the spring three 6112, so that the limit block 6111 abutting against the sealing disk 6142 moves outward, and the spring three 6112 is stretched under force, so that the sealing disk 6142 passes through the limit block 6111 until the sealing disk 6142 abuts against the limiting ring on the end face of the fixed tube 611. At this time, the air completely enters the airbag 612 and blocks the fixed tube 611 through the sealing disk 6142, so that the airbag 612 is separated from the sintering box 2. Then, as the nitrogen in the heating box 51 continues to enter In the sintering box 2, it contacts with the substrate preform 4 and performs a sintering process on the substrate preform 4. Since the airbag 612 is separated from the sintering box 2, the nitrogen in the sintering box 2 pushes the switching member 53 to move downward, and compresses the spring five 533. As the switching member 53 moves downward, the blocking block 531 enters the connecting tube 52. Since the length and width of the blocking block 531 are less than the length and width of the inner wall of the connecting tube 52, when the blocking block 531 moves downward into the connecting tube 52, there is a gap between the outer side of the blocking block 531 and the inner wall of the connecting tube 52, so that the nitrogen passes through the air outlet groove 391 and the gap between the blocking block 531 and the connecting tube 52 in turn, enters the flow groove two 534, and passes through the flow groove two 534, the flow groove one 535 and the flow groove three 536 in turn, and enters the heating box 51 again.The nitrogen is circulated between the sintering box 2 and the gas guide device 5. After sintering for a period of time, a group of hydraulic rods 617 are started, and the movable ends of the hydraulic rods 617 drive the push plate 615 to move, so that the airbag 612 is subjected to pressure, thereby contracting the telescopic rod 6141, and the air inside the airbag 612 pushes the sealing disk 6142 to move until the sealing disk 6142 abuts against the limiting block 6111. At this time, the air passes through the two groups of regulating tubes 616 and the connecting tube 63 and enters the other group of airbags 612. Due to the increase of air in the other group of airbags 612, the other group of airbags 612 continues to expand, so that the push plate 615 continues to move. At this time, due to the restriction of the sealing disk 6142 by the limiting ring on the end face of the fixed tube 611, the telescopic rod 6141 The pulling force is greater than the elastic force of spring four 6145, so that the block 6144 and the slot 6147 produce abutment force, so that the block 6144 moves to the inside of the connecting slot 6143 and the spring four 6145 is compressed. When the block 6144 is completely pushed into the connecting slot 6143, the connection between the telescopic rod 6141 and the sealing disk 6142 is released, so that the telescopic rod 6141 and the sealing disk 6142 are separated, so that the other group of air bags 612 are no longer restricted by the telescopic rod 6141 and the sealing disk 6142 and continue to expand. As the squeezing of the squeezed air bags 612 proceeds, the push plate 615 abuts against the upper plate 31 and pushes the upper plate 31 to move, so that the group of rollers 34 abutting against the substrate preform 4 pushes the substrate preform 4 to move, so that the substrate preform The substrate preform 4 is tilted, and during the tilting process, one group of rollers 34 always supports the substrate preform 4, and the other group of rollers 34 is pushed upward under the tilting action of the substrate preform 4, and the two groups of rollers 34 are always kept in contact and support on both sides of the substrate preform 4 until one side of the substrate preform 4 is in contact with the baffle 38. At this time, a gap is generated between the bottom end of the substrate preform 4 and the notch of the mounting groove 35, so that the spring 1 37 lifts the lower stop block 36 until the inclined surface of one side of the top of the lower stop block 36 is in contact with the bottom end of the substrate preform 4, supports the bottom end of the substrate preform 4, and exposes half of the bottom end of the substrate preform 4, changes the clamping and fixing point of the clamping device 3 on the substrate preform 4, and then, squeezes the other group of air bags 612 to make the substrate preform 4 The preform 4 tilts to the other side, and the clamping fixing point of the clamping device 3 on the substrate preform 4 is changed again. When sintering is completed, the heating coil 54 is de-energized, and the two groups of hydraulic rods 617 are started to synchronously squeeze the two groups of air bags 612. During the squeezing process, the telescopic rod 6141 is forced to shrink. When it shrinks to the shortest length, the block 6144 abuts against the edge of the slot 6146, so that the block 6144 is pushed into the connecting groove 6143 until the connecting groove 6143 and the slot 6147 correspond. Under the action of the spring four 6145, the block 6144 and the slot 6147 are plugged. After that, the sealing disk 6142 is pushed by the telescopic rod 6141 until the sealing disk 6142 abuts against the limit block 6111, and under the abutting force,The sealing disk 6142 is passed through the limit block 6111 until the sealing disk 6142 passes through the fixed tube 611 and enters the sintering box 2. At this time, the air pump 56 is started and the air inlet and outlet are switched, so that the nitrogen in the sintering box 2 passes through the air inlet groove 392, the sintering box 2, the air inlet box 58, the air pump 56 and the air outlet box 57 in sequence and enters the heating box 51. Since the air bag 612 is squeezed, the air in the air bag 612 re-enters the sintering box 2 from both sides of the sintering box 2, and the nitrogen in the sintering box 2 is squeezed from both sides to the middle, so that the nitrogen completely passes through the air inlet groove 392 in the middle of the sintering box 2 and enters the heating box 51. After that, the lid of the sintering box 2 is opened to take out the finished ceramic substrate in the sintering box 2. The clamping device 3 can be used to The substrate preform 4 is tilted, and the two groups of rollers 34 can always contact and support the two sides of the substrate preform 4 until one side of the substrate preform 4 is in contact with the baffle 38. At the same time, the lower stop block 36 supports the bottom end of the substrate preform 4 under the action of the spring 1 37, which can change the clamping and fixing point of the substrate preform 4 to ensure that all positions of the substrate can be fully sintered. The cooperation of the spring 2 322 and the adjustment groove 321 can provide a buffer for the contact between the roller 34 and the substrate preform 4, avoid excessive squeezing or unstable support of the substrate preform 4 due to the rigid connection, reduce the impact force transmitted to the substrate preform 4, reduce the risk of cracking, deformation and other problems during the processing, and improve the product yield. The structure 53 realizes the circulation of nitrogen between the sintering box 2 and the gas guide device 5, so that the nitrogen can be reused, avoiding the waste of nitrogen, reducing the production cost and improving the resource utilization rate. By switching the air inlet and outlet of the air pump 56, the nitrogen in the sintering box 2 is smoothly discharged back to the heating box 51, which is convenient for the subsequent operation of taking out the finished ceramic substrate in the sintering box 2, and is also beneficial to the subsequent use and maintenance of the equipment. The air inlet box 58 is located in the middle of the sintering box 2. After the nitrogen enters the sintering box 2, it squeezes the internal air to both sides, and the nitrogen circulates between the sintering box 2 and the gas guide device 5, which can make the temperature in the sintering box 2 more uniform, avoid local temperature being too high or too low, ensure that the substrate preform 4 is heated evenly during the sintering process, and reduce the temperature caused by The problem of uneven sintering caused by temperature difference can be solved by pushing the upper plate 31 to move and change the position and clamping point of the substrate preform 4 through the adjusting device 6, so that each position of the substrate preform 4 can have the opportunity to be fully sintered during the sintering process, avoiding the problem of uneven sintering caused by the blocking of the substrate preform 4 by the clamping device 3, improving the sintering quality, and being able to automatically change the clamping position of the substrate preform 4 by utilizing the flow and pressure change of the gas in the sintering box 2 and the action of the hydraulic rod 617, without manual operation, reducing manpower input, improving production efficiency, and reducing the errors and risks that may be caused by manual operation. The sealing member 614 and other components in the adjusting device 6 can achieve good sealing between the airbag 612 and the sintering box 2.The stability of the gas environment in the sintering box 2 is ensured, and the substrate preform 4 is prevented from contacting with oxygen during the sintering process to produce an oxidation reaction, thereby ensuring the normal progress of the sintering process and also extending the service life of the equipment.

[0048] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A sintering device for processing aluminum nitride ceramic substrates, comprising: A support frame (1), wherein a sintering box (2) is fixedly connected to the support frame (1), characterized in that a clamping device (3) is arranged in the sintering box (2), a substrate preform (4) is arranged on the clamping device (3), the sintering box (2) is provided with an adjusting device (6) for collecting air in the sintering box (2) and changing the clamping position of the clamping device (3) on the substrate preform (4) by adjusting the air, and a gas guide device (5) is arranged at the bottom end of the sintering box (2) for heating nitrogen in the sintering box (2) and introducing it into the sintering box (2) so as to sinter the substrate preform (4) in the sintering box (2); The clamping device (3) comprises a lower plate (39) fixedly connected to the bottom end of the sintering box (2), and an upper plate (31) slidably connected to the top end of the sintering box (2) and penetrating the sintering box (2), a connecting block (32) slidably inserted at the bottom end of the upper plate (31), a connecting rod (33) slidably inserted in the connecting block (32), a roller (34) rotatably connected to the connecting rod (33), the roller (34) abuts against the substrate preform (4), and the The lower plate (39) is provided with a mounting groove (35), the base plate preform (4) is arranged at the top of the mounting groove (35), a lower stop block (36) is slidably inserted in the mounting groove (35), a spring (37) is fixedly connected to the bottom end of the lower stop block (36), one end of the spring (37) is fixedly connected to the bottom end of the mounting groove (35), a baffle (38) is fixedly connected to the top end of the lower plate (39), and the baffle (38) is arranged on one side of the top end of the mounting groove (35); When the adjusting device (6) pushes the upper plate (31) to move to one side, the roller (34) abutting against the substrate preform (4) pushes the substrate preform (4) to move, so that the substrate preform (4) tilts, and during the tilting process, the roller (34) always supports the substrate preform (4) until one side of the substrate preform (4) fits against the baffle (38). At this time, a gap is generated between the bottom end of the substrate preform (4) and the notch of the installation groove (35), so that the spring 1 (37) lifts the lower stop block (36) until the lower stop block (36) abuts against the bottom end of the substrate preform (4), supports the bottom end of the substrate preform (4), and changes the clamping fixing point of the clamping device (3) on the substrate preform (4).

2. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 1, characterized in that: The lower plate (39) is provided with an air outlet groove (391) extending therethrough, the lower plate (39) is provided with an air inlet groove (392) extending therethrough, the connecting block (32) is provided with an adjustment groove (321), the top end of the connecting rod (33) is fixedly connected to a second spring (322), and the other end of the second spring (322) is fixedly connected to the top end of the adjustment groove (321).

3. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 2, characterized in that: The gas guide device (5) comprises a connecting pipe (52) which is connected to the bottom end of the sintering box (2), and the connecting pipe (52) is connected to the gas outlet groove (391). The bottom end of the connecting pipe (52) is connected to the heating box (51). The heating box (51) is fixedly connected to the support frame (1). A switching member (53) is slidably inserted in the connecting pipe (52). A heating coil (54) is arranged in the heating box (51), and one end of the heating coil (54) passes through the heating box (51). The heating coil (54) A graphite rod (55) is connected through the inside, and the graphite rod (55) is fixedly connected to the inner wall of the heating box (51); the top of the heating box (51) is connected through an air outlet box (57); the bottom of the sintering box (2) is connected through an air inlet box (58), and the top of the air inlet box (58) is connected to the air inlet groove (392); the top of the sintering box (2) is fixedly connected to an air pump (56); the air inlet end of the air pump (56) is connected through the air outlet box (57), and the air outlet end of the air pump (56) is connected through the air inlet box (58).

4. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 3, characterized in that: The switching member (53) includes a connecting block (532) slidably plugged into the connecting pipe (52), the top of the connecting block (532) is fixedly connected to a blocking block (531), the blocking block (531) is adapted to the air outlet groove (391), the bottom of the connecting block (532) is fixedly connected to a spring five (533), one end of the spring five (533) is fixedly connected to the bottom end of the heating box (51), a flow groove one (535) is provided through the inside of the connecting block (532), a flow groove two (534) is provided through the side end of the blocking block (531), a flow groove three (536) is provided through the side end of the connecting block (532), the flow groove two (534) is connected to the flow groove one (535), and the flow groove three (536) is connected to the flow groove one (535).

5. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 4, characterized in that: The regulating device (6) comprises a regulating member 1 (61) and a regulating member 2 (62) symmetrically distributed on both sides of the sintering box (2), and a connecting pipe (63) is provided between the regulating member 1 (61) and the regulating member 2 (62).

6. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 5, characterized in that: The regulating member 1 (61) comprises a fixed tube (611) penetrating the side end of the sintering box (2); one end of the fixed tube (611) penetrates the sintering box (2) and is connected with an air bag (612); an inner wall of the air bag (612) is fixedly connected with a support plate (613); one end of the support plate (613) is fixedly connected with a sealing member (614), and one end of the sealing member (614) penetrates the fixed tube (611); one end of the outer side of the air bag (612) is abutted with a push plate (615); One end of the push plate (615) is connected to an adjusting tube (616), and one end of the adjusting tube (616) passes through the push plate (615), the air bag (612) and the expansion plate (613) in sequence, and is connected to the air bag (612). One end of the adjusting tube (616) is slidably connected to the connecting tube (63) and is connected to the connecting tube (63). A hydraulic rod (617) is fixedly connected to the top of the sintering box (2), and the movable end of the hydraulic rod (617) is fixedly connected to the push plate (615).

7. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 6, characterized in that: The second adjusting member (62) also includes a fixing tube (611), an air bag (612), an opening plate (613), a sealing member (614), a push plate (615), an adjusting tube (616) and a hydraulic rod (617).

8. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 7, characterized in that: A limiting block (6111) is slidably inserted on a portion of the fixed tube (611) in the sintering box (2), and the limiting block (6111) passes through the fixed tube (611), and a spring three (6112) is fixedly connected to the limiting block (6111), and one end of the spring three (6112) is fixedly connected to the outer side of the fixed tube (6111).

9. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 8, characterized in that: The sealing member (614) comprises a telescopic rod (6141) fixedly connected to the expansion plate (613); one end of the telescopic rod (6141) passes through the airbag (612) and the fixed tube (611) and is clamped with a sealing disk (6142); the sealing disk (6142) is adapted to the fixed tube (611).

10. The sintering equipment for processing aluminum nitride ceramic substrate according to claim 9, characterized in that: The telescopic rod (6141) is provided with a connecting groove (6143) at the side end, a clamping block (6144) is slidably inserted in the connecting groove (6143), one end of the clamping block (6144) is fixedly connected with a spring four (6145), one end of the spring four (6145) is fixedly connected to the inner wall of the connecting groove (6143), the sealing disk (6142) is movably provided with a slot (6146), the inner wall of the slot (6146) is provided with a clamping groove (6147), the clamping groove (6147) is communicated with the slot (6146), and the clamping groove (6147) is adapted to the clamping block (6144).

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