An air flotation drying device and a coating equipment

Abstract

The present invention discloses an air-floating drying device and a coating equipment. Among them, the air-floating drying device is used to heat a substrate to dry a perovskite liquid film on the substrate. The air-floating drying device includes an air-floating plate and a gas supply assembly; a plurality of uniformly distributed air outlets are arranged on the surface of the air-floating plate facing the substrate. The air outlets are used to generate drying airflows to support and heat the substrate. Each air outlet is used to heat the substrate within a unit drying area. The edge area of the unit drying area corresponding to each air outlet overlaps with the edge area of the unit drying area corresponding to an adjacent air outlet; the gas supply assembly is connected to the air outlets and is used to supply drying airflows to the air outlets. The gas supply assembly includes a first heating element, and the first heating element is used to heat the drying airflows supplied to the air outlets. The air-floating drying device and the coating equipment of the present invention are used to improve the drying uniformity of the perovskite liquid film.

Description

Technical Field

[0001] The present invention relates to the technical field of solar cell preparation, and particularly to an air-floating drying device and a coating device. Background Art

[0002] In the preparation process of perovskite solar cells, it is necessary to coat a perovskite liquid film on a substrate, and then move the substrate coated with the perovskite liquid film into a drying device to dry the perovskite liquid film, remove the solvent in the perovskite liquid film, and thus obtain a perovskite thin film. During the drying process of the perovskite liquid film, the drying uniformity of each part of the perovskite liquid film affects the drying and crystallization quality of the perovskite liquid film, and thus affects the performance of the perovskite thin film.

[0003] The existing methods for drying the perovskite liquid film mainly include using intermittent VCD (Vacuum Curing Drier) or continuous tunnel furnaces and other drying equipment. During drying, the substrate coated with the perovskite liquid film contacts the hot plate in the drying equipment, and the hot plate generates heat to heat the substrate, and the heat is transferred to the perovskite liquid film through the substrate to dry the perovskite liquid film. However, when the contact between the substrate and the hot plate is uneven, for example, due to thermal deformation, processing errors, etc., there may be some areas where the substrate and the hot plate are not fully adhered. At this time, the uniformity of the heat transferred from the hot plate to the substrate is reduced, and thus the drying and crystallization uniformity of the perovskite liquid film is reduced, affecting the quality of the perovskite thin film. Summary of the Invention

[0004] The purpose of the present invention is to provide an air-floating drying device and a coating device for improving the drying uniformity of the perovskite liquid film.

[0005] The purpose of the present invention is achieved by the following technical solutions:

[0006] An air-floating drying device for heating a substrate to dry a perovskite liquid film on the substrate, the air-floating drying device comprising:

[0007] An air-floating plate, on the surface of the air-floating plate facing the substrate, a plurality of uniformly distributed air outlets are provided, the air outlets are used for generating drying airflows to support and heat the substrate, each air outlet is used for heating the substrate within a unit drying area, and the edge area of the unit drying area corresponding to each air outlet overlaps with the edge area of the unit drying area corresponding to an adjacent air outlet;

[0008] An air supply assembly, connected to the air outlets and used for supplying drying airflows to the air outlets, the air supply assembly includes a first heating element, and the first heating element is used for heating the drying airflows supplied to the air outlets.

[0009] Preferably, a plurality of air outlets form a multi-row air outlet arranged at intervals along the second direction. The air outlet includes a first air outlet and a second air outlet arranged alternately. The first air outlet includes first air vents arranged at uniform intervals along the first direction, and the second air outlet includes second air vents arranged at uniform intervals along the first direction. The first air vents and the second air vents are alternately arranged at intervals along the first direction and the second direction respectively;

[0010] Wherein, the first direction and the second direction are perpendicular.

[0011] Preferably, the distance between the first air vent and the adjacent second air vent along the first direction is the same as the distance between the first air vent and the adjacent second air vent along the second direction.

[0012] Preferably, the unit drying area is a circular structure, and the ratio of the diameter of the unit drying area to the distance between adjacent first air vents along the first direction is 1: (0.7~0.9).

[0013] Preferably, the ratio of the air volume, air pressure of the drying air blown out from the air outlet, the distance between the air outlet and the substrate, and the aperture diameter of the air outlet is (20~35): (3.2~5): (40~50): 1;

[0014] Wherein, the unit of the air volume of the drying air is m³ / h, the unit of the air pressure is kPa, the unit of the distance between the air outlet and the substrate is μm, and the unit of the aperture diameter of the air outlet is mm.

[0015] Preferably, the distance between adjacent first air vents along the first direction is 100~150mm, and the diameter of the unit drying area is 120~210mm;

[0016] The air volume of the drying air is 70~150m³ / h, the air pressure is 10~25kPa, the aperture diameter of the air outlet is 2~8mm, and the distance between the air outlet and the substrate is 100 μm~200μm.

[0017] Preferably, the temperature of the drying air flow generated by the air outlet is 50°~70°, the drying time of the perovskite liquid film by the air float drying device is 10~30s, and the temperature of the drying air flow is inversely proportional to the drying time of the perovskite liquid film.

[0018] Preferably, the air float plate is provided with a second heating element and a second temperature sensor. The second heating element is used to perform secondary heating on the drying air flow provided by the air supply component; the temperature of the gas after being heated once by the first heating element is 0.85~0.95 times the required temperature of the drying air flow, and the temperature of the gas after being heated twice by the second heating element reaches the required temperature of the drying air flow;

[0019] The air supply assembly includes a first temperature sensor for detecting the gas temperature inside the air supply assembly, and a second temperature sensor for detecting the gas temperature inside the air floating plate. The heating powers of the first heating element and the second heating element are adjusted based on the temperature data detected by the first temperature sensor and the second temperature sensor.

[0020] Preferably, the air supply assembly includes an air supply fan and a gas distribution block. The first heating element is disposed on the gas distribution block. The air supply fan supplies air flow to the gas distribution block, and the gas inside the gas distribution block flows to the air floating plate after being heated by the first heating element.

[0021] Wherein, the gas distribution block is further provided with a pressure sensor for detecting the gas pressure inside the gas distribution block. A gas supply pressure reducing valve and a gas supply ball valve are arranged between the gas distribution block and the air supply fan. The gas supply pressure reducing valve is used for reducing the pressure and stabilizing the pressure of the air flow flowing to the gas distribution block, and the gas supply ball valve is used for controlling the on-off between the gas distribution block and the air supply fan.

[0022] A coating device includes:

[0023] A coating device for coating and forming a perovskite liquid film on the surface of a substrate;

[0024] Any one of the above air floating drying devices for heating the substrate to dry the perovskite liquid film on the substrate;

[0025] A transfer device for transferring the substrate coated by the coating device to the air floating drying device;

[0026] Wherein, the moving speed of the substrate on the air floating drying device corresponds to the coating speed of the substrate on the coating device, so that the substrate can perform continuous coating and drying operations on the coating device and the air floating drying device.

[0027] Compared with the prior art, the beneficial effects of the present invention at least include:

[0028] By adopting the air floating drying method, the substrate is supported by the air flow, and the substrate does not need to be in direct contact with the heating component, preventing uneven contact between the substrate and the heating component from affecting the drying effect of the perovskite liquid film and improving the drying uniformity of the perovskite liquid film. By overlapping the edge area of the unit drying area corresponding to the air outlet with the edge area of the unit drying area corresponding to the adjacent air outlet, the drying effect at the edge position of the unit drying area can be enhanced, effectively reducing the difference in the drying effect between the edge area and the central area of the unit drying area and improving the drying uniformity of the substrate. Description of the Drawings

[0029] Figure 1It is a schematic structural diagram of the air-floating drying device according to an embodiment of the present invention;

[0030] Figure 2 It is a schematic partial structural diagram of the air-floating drying device according to an embodiment of the present invention;

[0031] Figure 3 It is a schematic structural diagram of the air-floating plate according to an embodiment of the present invention;

[0032] Figure 4 It is a schematic diagram of the air-floating plate and the unit drying area according to an embodiment of the present invention;

[0033] Figure 5 It is a two-dimensional function diagram of the distance between the air outlet and the substrate and the bearing capacity according to an embodiment of the present invention;

[0034] Figure 6 It is a schematic structural diagram of the coating device according to an embodiment of the present invention.

[0035] In the figure: 100, air-floating drying device; 1, air-floating plate; 11, air outlet; 11a, first air outlet; 11b, second air outlet; 12, second heating element; 13, second temperature sensor; 2, air supply assembly; 21, air supply fan; 211, air supply pipeline; 212, air supply pressure reducing valve; 213, air supply ball valve; 214, safety relief valve; 22, air distribution block; 221, first heating element; 222, air distribution pipeline; 223, first temperature sensor; 224, pressure sensor; 200, coating device; 300, substrate. Detailed Embodiments

[0036] Now, example embodiments will be described more fully with reference to the accompanying drawings. However, the example embodiments can be implemented in various forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this invention will be more complete and comprehensive, and will fully convey the concept of the example embodiments to those skilled in the art. Like reference numerals in the figures denote like or similar structures, and thus their repeated description will be omitted.

[0037] In the present invention, the words expressing position and direction are described with reference to the accompanying drawings as examples, but can be changed according to needs, and all changes made are included in the protection scope of the present invention.

[0038] As Figures 1 to 4 shown, the present invention provides an air-floating drying device 100 for drying a perovskite liquid film on a substrate 300. Among them, the substrate 300 can be a glass substrate 300. The air-floating drying device 100 includes an air-floating plate 1 and an air supply assembly 2 connected to the air-floating plate 1.

[0039] Referring to Figure 2 and Figure 4, on one side of the air floating plate 1 facing the substrate 300, a plurality of air outlets 11 are provided. Each air outlet 11 can be respectively connected to the air supply assembly 2, and each air outlet 11 can blow out a drying air flow towards the substrate 300 to support and heat the substrate 300, so as to perform a drying treatment on the perovskite liquid film on the substrate 300. By adopting the air floating drying method, the substrate 300 is supported by the air flow, and the substrate 300 does not need to be in direct contact with the heating component, preventing uneven contact between the substrate 300 and the heating component from affecting the drying effect of the perovskite liquid film.

[0040] Among them, when performing air floating drying on the perovskite liquid film, the temperature of the gas that needs to be blown towards the substrate 300 can be 50°-70°. When the gas temperature is relatively high, the drying time for the perovskite liquid film can be reduced. When the gas temperature is relatively low, the drying time for the perovskite liquid film needs to be increased. Specifically, when the moving distance of the substrate 300 on the air floating drying device 100 remains unchanged, when the moving speed of the substrate 300 is relatively fast, the temperature of the drying air flow can be increased. When the moving speed of the substrate 300 is relatively slow, the temperature of the drying air flow can be reduced. In this application, the drying time for the perovskite liquid film can specifically be 10-30 s.

[0041] Refer to Figure 5 , when air floatingly supporting the substrate 300, as the distance h between the air outlet 11 and the substrate 300 increases, the bearing capacity that the drying air flow blown out from the air outlet 11 can generate on the substrate 300 decreases; conversely, as the distance h between the air outlet 11 and the substrate 300 decreases, the bearing capacity that the drying air flow blown out from the air outlet 11 can generate on the substrate 300 increases. However, when the distance h between the air outlet 11 and the substrate 300 is relatively small, the drying area that each air outlet 11 can perform on the substrate 300 decreases. At this time, more air outlets 11 need to be provided to ensure the drying effect, resulting in an increase in cost. To ensure the support effect on the substrate 300 and evenly distribute the cost, the distance h between the air outlet 11 and the substrate 300 can be set to 100 μm-200 μm.

[0042] When the distance h between the air outlet 11 and the substrate 300 is less than 100 μm, the bearing capacity that the drying air flow blown out from the air outlet 11 can generate on the substrate 300 is relatively low, and it may not be able to meet the requirements; when the distance h between the air outlet 11 and the substrate 300 is greater than 200 μm, the increase in the bearing capacity that the drying air flow blown out from the air outlet 11 can generate on the substrate 300 is relatively small, and it will increase the number of air outlets 11 required, increasing the cost.

[0043] Refer to Figure 1, the air supply assembly 2 may include an air supply fan 21 and a gas distribution block 22. The air supply fan 21 is connected to the gas distribution block 22 through an air supply pipeline 211 and supplies air flow into the gas distribution block 22. The gas distribution block 22 may be provided with a first heating element 221 for heating the air flow provided by the air supply fan 21. The gas distribution block 22 may be connected to a plurality of air outlets 11 through gas distribution pipelines 222 to supply the air flow that has been heated by the first heating element 221 to the plurality of air outlets 11. Among them, the first heating element 221 may be an existing heating component with adjustable power. The gas distribution block 22 may be provided with a plurality of air outlets, and the gas distribution pipelines 222 may also be provided with a plurality. The plurality of air outlets, the plurality of gas distribution pipelines 222, and the plurality of air outlets 11 are connected in one-to-one correspondence, that is, each air outlet is connected to the corresponding air outlet 11 through a gas distribution pipeline 222, so that the air outlet 11 can receive the air flow provided by the gas distribution block 22; alternatively, the gas distribution pipeline 222 includes a main pipeline connected to the distribution block and a plurality of branch pipelines communicating with the main pipeline, and each branch pipeline communicates with an air outlet 11, so that the air outlet 11 can receive the air flow provided by the gas distribution block 22.

[0044] To ensure that the gas distribution block 22 can supply air flow with temperature and pressure meeting the requirements to the gas distribution pipeline 222, the gas distribution block 22 may be provided with a first temperature sensor 223 and a pressure sensor 224. The first temperature sensor 223 is used to detect the gas temperature in the gas distribution block 22, and the pressure sensor 224 is used to detect the gas pressure in the gas distribution block 22. When the first temperature sensor 223 detects that the gas temperature in the gas distribution block 22 is lower than the required temperature, the power of the first heating element 221 can be increased to improve the heating effect of the first heating element 221, thereby increasing the gas temperature in the gas distribution block 22; conversely, when the first temperature sensor 223 detects that the gas temperature in the gas distribution block 22 is higher than the required temperature, the power of the first heating element 221 can be reduced to reduce the heating effect of the first heating element 221, thereby reducing the gas temperature in the gas distribution block 22. When the pressure sensor 224 detects that the gas pressure in the gas distribution block 22 is lower than the required pressure, the gas pressure flowing from the air supply pipeline 211 into the gas distribution block 22 can be increased so that the gas pressure in the gas distribution block 22 increases; conversely, when the pressure sensor 224 detects that the gas pressure in the gas distribution block 22 is higher than the required pressure, the gas pressure flowing from the air supply pipeline 211 into the gas distribution block 22 can be reduced so that the gas pressure in the gas distribution block 22 decreases.

[0045] Among them, the required temperature and required pressure of the gas in the gas distribution block 22 may be specific values or a certain range. When the temperature and pressure of the gas in the gas distribution block 22 reach the specific value or are within a certain range, the air flow supplied by the gas distribution block 22 towards the air outlet 11 can meet the drying requirements.

[0046] Before air flotation drying, the gas temperature and pressure in the air distribution block 22 can be adjusted according to the data detected by the first temperature sensor 223 and the pressure sensor 224, so that the gas temperature and pressure in the air distribution block 22 meet the requirements respectively. During the air flotation drying process, the first temperature sensor 223 and the pressure sensor 224 can keep detecting the gas in the air distribution block 22, and adjust the gas temperature and pressure in the air distribution block 22 according to the values fed back by the first temperature sensor 223 and the pressure sensor 224, so as to ensure that the air distribution block 22 always supplies an air flow with a temperature and pressure that meet the requirements during the air flotation drying process.

[0047] To facilitate the control of the on / off and pressure of the gas flowing into the air distribution block 22, a gas supply pressure reducing valve 212 and a gas supply ball valve 213 can be provided on the gas supply pipeline 211. The gas supply pressure reducing valve 212 and the gas supply ball valve 213 are located between the gas supply fan 21 and the air distribution block 22, and the gas supply pressure reducing valve 212 and the gas supply ball valve 213 can be arranged in series. The gas supply pressure reducing valve 212 is used to reduce the air flow pressure generated by the gas supply fan 21 and stabilize the air flow. The gas supply ball valve 213 is used to control the on / off of the gas supply pipeline 211. When it is necessary to increase the gas pressure flowing from the gas supply pipeline 211 into the air distribution block 22, the power of the gas supply fan 21 can be increased and / or the pressure reducing effect of the gas supply pressure reducing valve 212 can be reduced; when it is necessary to reduce the gas pressure flowing from the gas supply pipeline 211 into the air distribution block 22, the power of the gas supply fan 21 can be reduced and / or the pressure reducing effect of the gas supply pressure reducing valve 212 can be increased. In addition, a safety relief valve 214 can also be connected to the gas supply fan 21. When the gas pressure at the gas supply fan 21 is higher than the threshold value, the safety relief valve 214 can be opened to discharge the high-pressure gas, thereby achieving the pressure relief effect and preventing equipment damage caused by excessive gas pressure.

[0048] The air flow flowing out of the air distribution block 22 can flow out from the air outlet 11 without being reheated for the air flotation heating of the perovskite liquid film on the substrate 300. At this time, the required temperature of the gas in the air distribution block 22 can be the temperature for drying the perovskite liquid film, or considering the heat scattering during the flow of the air flow in the air distribution pipeline 222, the required temperature of the gas in the air distribution block 22 can be slightly higher than the temperature for drying the perovskite liquid film; for example, when the gas temperature required for air flotation drying of the perovskite liquid film is 50°-70°, the required temperature of the gas in the air distribution block 22 can be 52°-72°.

[0049] Alternatively, in order to make the temperature of the air flow flowing to the substrate 300 more accurate, the air flow flowing out from the air distribution block 22 can be heated twice and then flow out from the air outlet 11. Specifically, a second heating element 12 and a second temperature sensor 13 can be provided in the air floating plate 1. After the air flow flows into the air floating plate 1 from the air distribution pipeline 222, the second heating element 12 can perform secondary heating on the air flow, and the air flow heated by the second heating element 12 is blown out from the air outlet 11. The second temperature sensor 13 is used to detect the temperature of the gas in the air floating plate 1. When the second temperature sensor 13 detects that the temperature of the gas in the air floating plate 1 is lower than the drying wind temperature requirement, the power of the second heating element 12 can be increased to increase the temperature in the air floating plate 1; conversely, when the second temperature sensor 13 detects that the temperature of the gas in the air floating plate 1 is higher than the drying wind temperature requirement, the power of the second heating element 12 can be reduced to reduce the temperature in the air floating plate 1. The drying wind temperature requirement is the air flow temperature requirement required to blow toward the substrate 300 when drying the perovskite liquid film. The temperature of the gas after the first heating by the first heating element 221 is 0.85 to 0.95 times the required temperature of the dry air flow, and the temperature of the gas after the second heating by the second heating element 12 reaches the required temperature of the dry air flow.

[0050] Among them, a plurality of second heating elements 12 can be provided, and the plurality of second heating elements 12 are located below the plurality of air outlets 11, and the plurality of second heating elements 12 are evenly distributed. The plurality of second heating elements 12 can be used together to heat the temperature inside the air flotation plate 1, so that the gas temperature inside the air flotation plate 1 is uniform, and the gas temperature below the plurality of air outlets 11 is basically the same. Therefore, the air flow temperature blown out from the plurality of air outlets 11 is the same, and then the air flow temperature blown to each part of the substrate 300 can be made the same, thereby improving the drying and crystallization quality of the perovskite liquid film. A plurality of second temperature sensors 13 can be provided, and each second temperature sensor 13 can be arranged adjacent to a corresponding second heating element 12, and the second temperature sensor 13 is used to detect whether the corresponding second heating element 12 heats the gas to the drying wind temperature requirement.

[0051] Before air flotation drying, the gas temperature in the air flotation plate 1 can be adjusted by the data detected by the second temperature sensor 13, so that the gas temperature in the air flotation plate 1 meets the drying wind temperature requirement. During the air flotation drying process, the second temperature sensor 13 can keep detecting the gas in the air flotation plate 1, and adjust the gas temperature in the air flotation plate 1 according to the value fed back by the second temperature sensor 13, so as to ensure that the gas temperature in the air flotation plate 1 always meets the drying wind temperature requirement during the air flotation drying process.

[0052] For example, when the perovskite liquid film is dried by air flotation, the temperature of the gas blown towards the substrate 300 needs to be 50° to 70°, that is, the drying air temperature requirement is 50° to 70°. At this time, the required temperature of the gas in the air distribution block 22 can be 47° to 67°. After that, the gas in the air distribution block 22 flows into the air flotation plate 1 and is heated by the second heating element 12 to a temperature of 50° to 70°, and then the gas is blown out from the air outlet 11.

[0053] When the gas is blown out from the air outlet 11 after being heated only once in the air distribution block 22, the heated gas needs to flow a certain distance in the air distribution pipeline 222 before it can be blown out from the air outlet 11. The gas is likely to have heat loss during the flow in the air distribution pipeline 222, resulting in a decrease in the gas temperature at the air outlet 11. Moreover, it is difficult to control the amount of heat loss of the gas during the flow in the air distribution pipeline 222. Therefore, it is difficult to accurately control the gas temperature at the air outlet 11. When the gas is heated in a two-stage manner, the gas is heated in the air flotation plate 1 and then flows out from the air outlet 11. The flow path of the gas flowing out from the air outlet 11 after two-stage heating is shorter, and the temperature of the air flow flowing out from the air outlet 11 is basically the same as the temperature of the gas after two-stage heating, which can achieve accurate control of the air flow temperature at the air outlet 11. And, the second heating element 12 only needs to heat the gas to a relatively small temperature increase value, which can achieve rapid heating of the gas, and can achieve that the gas rises to meet the drying air temperature requirement after flowing through the second heating element 12.

[0054] When the drying air is blown out from the air outlet 11 towards the substrate 300, the drying air continuously diffuses obliquely outwards during the movement from the air outlet 11 towards the substrate 300, and when the drying air contacts the substrate 300, it will also diffuse horizontally along the lower surface of the substrate 300. Therefore, the drying air blown out from each air outlet 11 can contact a certain area of the substrate 300 and perform heat transfer with this area, and then the heat can be transferred from the substrate 300 to the perovskite liquid film above the substrate 300. The heating area of the substrate 300 by the drying air blown out from each air outlet 11 can be recorded as a unit drying area. Since the drying air diffuses from the air outlet 11 and contacts the substrate 300 within a unit drying area, within a unit drying area, the drying effect in the central area is better than that in the edge area. Refer to Figure 4 , to improve the uniformity when drying the substrate 300, the drying air blown out from multiple air outlets 11 will dry the substrate 300 within multiple unit drying areas, and the edge areas of multiple unit drying areas can overlap each other. Therefore, even though the drying effect in the edge area within a unit drying area is weaker than that in the central area, the drying effect in the edge area is increased under the overlapping action of the edge areas of adjacent unit drying areas, effectively reducing the difference in drying effect between the edge area and the central area, and improving the drying uniformity of the substrate 300. In Figure 4Among them, the light gray area is the non-overlapping part of the unit drying area, and the dark gray area is the overlapping part of the unit drying area.

[0055] Specifically, referring to Figure 3 and Figure 4 As shown in the figure, the air outlet 11 is a circular hole. The drying air blown out from one air outlet 11 can dry a circular unit drying area with a diameter of D on the substrate 300. The edges of multiple circular unit drying areas overlap. The multiple air outlets 11 can be staggeredly distributed. For example, the multiple air outlets 11 form multiple rows of air outlets arranged at equal intervals along the second direction, and each row of air outlets includes multiple air outlets 11 arranged at equal intervals along the first direction. The multiple rows of air outlets can be alternately arranged first row of air outlets and second row of air outlets. The first row of air outlets includes multiple first air outlets 11a arranged at equal intervals along the first direction, and the second row of air outlets includes multiple second air outlets 11b arranged at equal intervals along the second direction. In the first direction, the first air outlets 11a and the second air outlets 11b are alternately arranged, and the distance between adjacent first air outlets 11a is the same as the distance between adjacent second air outlets 11b. The second air outlet 11b can be located at the center position between the adjacent first air outlets 11a, and the first air outlet 11a can be located at the center position between the adjacent second air outlets 11b. In the second direction, the first air outlets 11a and the second air outlets 11b are alternately arranged, and the distance between adjacent first air outlets 11a is the same as the distance between adjacent second air outlets 11b. The second air outlet 11b can be located at the center position between the adjacent first air outlets 11a, and the first air outlet 11a can be located at the center position between the adjacent second air outlets 11b. Among them, the distance between adjacent first air outlets 11a in the first direction is the same as the distance between adjacent first air outlets 11a in the second direction, and both are denoted as the distance m. The distance between adjacent second air outlets 11b in the first direction is the same as the distance between adjacent second air outlets 11b in the second direction, and both are denoted as the distance m. Therefore, the distance between the first air outlet 11a and the adjacent second air outlet 11b in the first direction is the same as the distance between the first air outlet 11a and the adjacent second air outlet 11b in the second direction. The first direction and the second direction are perpendicular to each other. The first direction can specifically be the length direction of the air floating plate 1, and the second direction can specifically be the width direction of the air floating plate 1.

[0056] As the distance between the air outlets 11 decreases, the density of the air outlets 11 increases, and the uniformity of the drying air blown from the air floating plate 1 to various parts of the substrate 300 can be gradually increased. However, as the density of the air outlets 11 increases, the processing difficulty and cost of the air floating plate 1 increase, and more air outlets 11 will also increase the usage cost of the air floating drying device 100. As the distance between the air outlets 11 increases, the density of the air outlets 11 decreases, and the uniformity of the drying air blown from the air floating plate 1 to various parts of the substrate 300 can be gradually decreased. To ensure the uniformity of the drying air blown to the substrate 300 and balance the cost, the ratio of the diameter D of the unit drying area to the distance m is 1:(0.7 - 0.9). Among them, the distance m can specifically be 100 - 150 mm, and the diameter D of the unit drying area can specifically be 120 - 210 mm.

[0057] When the distance m is greater than 0.9 times the diameter, the uniformity of the drying air blown to the substrate 300 may not meet the requirements; when the distance m is less than 0.7 times the diameter D, the turbulence degree of the drying air blown to the substrate 300 increases. At this time, further reducing the distance m has a small improvement effect on the uniformity of the drying air and will increase the cost.

[0058] The diameter D of the unit drying area is mainly determined by the air volume q of the drying air blown out from the air outlets 11, the air pressure p, the distance h between the air outlets 11 and the substrate 300, and the aperture d of the air outlets 11. In this application, the ratio of the air volume q of the drying air, the air pressure p, the distance h, and the aperture d can be (20 - 35):(3.2 - 5):(40 - 50):1. The unit of the air volume q of the drying air is m³ / h, the unit of the air pressure p is kPa, the unit of the distance h is μm, and the unit of the aperture d is mm. Among them, the air volume q of the drying air can specifically be 70 - 150 m³ / h, the air pressure p can specifically be 10 - 25 kPa, and the aperture d can specifically be 2 - 8 mm.

[0059] Multiple unit drying areas formed by multiple air outlets 11 constitute the drying area of the air floating drying device 100. The area of the drying area of the air floating drying device 100 is larger than the area of the substrate 300, and the air floating drying device 100 can be used to dry one or more substrates 300 simultaneously. When the air floating drying device 100 can dry multiple substrates 300 simultaneously, the area of the drying area of the air floating drying device 100 is larger than the sum of the areas of multiple substrates 300. Among them, the area of the substrate 300 can be 600 mm × 1200 mm - 1200 mm × 2400 mm. In this application, the air floating drying device 100 can also transport the substrate 300 in an air floating manner. When the substrate 300 is placed on the air floating drying device 100, the substrate 300 is supported and driven by the drying gas provided by the air floating drying device 100. During the movement of the substrate 300, heat exchange occurs with the drying gas to heat the perovskite liquid film on the surface of the substrate 300, and then the perovskite liquid film is dried.

[0060] Referring to Figure 6 , the present invention also provides a coating device, including a coating device 200 and the above-mentioned air-floating drying device 100, and may further include a transfer device.

[0061] The coating device 200 is used to coat and form a perovskite liquid film on the surface of the substrate 300. The substrate 300 after being coated by the coating device 200 is moved to the air-floating drying device 100 through the transfer device for drying. Among them, the transfer device can be a suction cup, a roller, a conveyor belt and other transmission devices.

[0062] The first end of the air-floating drying device 100 is adjacent to the coating device 200, and the first end of the air-floating drying device 100 is for the substrate 300 after coating. The substrate 300 moves on the air-floating drying device 100 from the first end to the second end of the air-floating drying device 100 in a manner of air-floating drive. The second end of the air-floating drying device 100 is the end far from the coating device 200. During the process of the substrate 300 moving from the first end to the second end of the air-floating drying device 100, the substrate 300 is always supported by the drying air flow and undergoes heat exchange with the drying air flow, so that the drying air flow can heat the substrate 300 and dry the perovskite liquid film. Among them, the substrate 300 can move in the first direction, and the first end and the second end of the air-floating drying device 100 are the opposite ends in the first direction.

[0063] The moving speed of the substrate 300 on the air-floating drying device 100 can correspond to the coating speed of the substrate 300 on the coating device 200, so that the substrate 300 can perform continuous coating and drying operations on the coating device 200 and the air-floating drying device 100. Specifically, when a substrate 300 is coated on the coating device 200, the previous substrate 300 can move a certain distance on the air-floating drying device 100 and leave a space at the first end of the air-floating drying device 100 to receive the substrate 300. Therefore, after the substrate 300 is coated, it can be directly moved to the air-floating drying device 100 for drying without waiting for the previous substrate 300 to be dried, realizing uninterrupted processing, improving the process rhythm and increasing the efficiency.

[0064] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Without departing from the principle and purpose of the present invention, those of ordinary skill in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention, and all these changes should fall within the protection scope of the claims of the present invention.

Claims

1. An air flotation drying device, characterized in that, The air-floating drying device is used to heat a substrate to dry a perovskite liquid film on the substrate. The air-floating drying device includes: An air-floating plate (1), on the surface of the air-floating plate (1) facing the substrate, a plurality of uniformly distributed air outlets (11) are provided. The air outlets (11) are used to generate a drying air flow to support and heat the substrate. Each air outlet (11) is used to heat the substrate within a unit drying area. The edge area of the unit drying area corresponding to each air outlet (11) overlaps with the edge area of the unit drying area corresponding to an adjacent air outlet (11). The temperature of the drying air flow generated by the air outlets (11) is 50° - 70°. The drying time of the perovskite liquid film by the air-floating drying device is 10 - 30 s, and the temperature of the drying air flow is inversely proportional to the drying time of the perovskite liquid film; An air supply assembly (2), connected to the air outlets (11) and used to supply a drying air flow to the air outlets (11). The air supply assembly (2) includes a first heating element (221), and the first heating element (221) is used to heat the drying air flow supplied to the air outlets (11); Wherein, the air-floating plate (1) is provided with a second heating element (12) and a second temperature sensor (13). The second heating element (12) is used to perform secondary heating on the drying air flow provided by the air supply assembly (2). The temperature of the gas after being heated once by the first heating element (221) is 0.85 - 0.95 times the required temperature of the drying air flow, and the temperature of the gas after being heated twice by the second heating element (12) reaches the required temperature of the drying air flow.

2. The air flotation drying device according to claim 1, characterized in that, A plurality of air outlets (11) form a plurality of rows of air outlets spaced along a second direction. The rows of air outlets include alternately arranged first rows of air outlets and second rows of air outlets. The first rows of air outlets include first air outlets (11a) uniformly spaced along a first direction, and the second rows of air outlets include second air outlets (11b) uniformly spaced along the first direction. The first air outlets (11a) and the second air outlets (11b) are alternately spaced along the first direction and the second direction respectively; Wherein, the first direction and the second direction are perpendicular.

3. The air flotation drying device according to claim 2, characterized in that The spacing between the first air outlet (11a) and an adjacent second air outlet (11b) along the first direction is the same as the spacing between the first air outlet (11a) and an adjacent second air outlet (11b) along the second direction.

4. The air flotation drying device according to claim 3, characterized in that, The unit drying area is a circular structure, and the ratio of the diameter of the unit drying area to the spacing between adjacent first air outlets (11a) along the first direction is 1:(0.7 - 0.9).

5. The air flotation drying device according to claim 4, characterized in that, The ratio of the air volume, air pressure of the drying air blown out from the air outlets (11), the spacing between the air outlets (11) and the substrate, and the aperture diameter of the air outlets (11) is (20 - 35):(3.2 - 5):(40 - 50):1; Wherein, the unit of the air volume of the drying air is m³ / h, the unit of the air pressure is kPa, the unit of the spacing between the air outlets (11) and the substrate is μm, and the unit of the aperture diameter of the air outlets (11) is mm.

6. The air flotation drying device according to claim 5, characterized in that, The spacing between adjacent first air outlets (11a) in the first direction is 100 - 150 mm, and the diameter of the unit drying area is 120 - 210 mm; The drying air volume is 70 - 150 m³ / h, the air pressure is 10 - 25 kPa, the aperture of the air outlet (11) is 2 - 8 mm, and the spacing between the air outlet (11) and the substrate is 100 μm - 200 μm.

7. The air flotation drying device according to claim 1, characterized in that The air supply assembly (2) includes a first temperature sensor (223) for detecting the gas temperature in the air supply assembly (2), and a second temperature sensor (13) for detecting the gas temperature in the air - floating plate (1). The heating powers of the first heating element (221) and the second heating element (12) are adjusted according to the temperature data detected by the first temperature sensor (223) and the second temperature sensor (13).

8. The air flotation drying device according to claim 1, wherein The air supply assembly (2) includes an air supply fan (21) and a gas distribution block (22). The first heating element (221) is arranged on the gas distribution block (22). The air supply fan (21) supplies air flow to the gas distribution block (22), and the gas in the gas distribution block (22) flows to the air - floating plate (1) after being heated by the first heating element (221). Among them, the gas distribution block (22) is also provided with a pressure sensor (224) for detecting the gas pressure in the gas distribution block (22). A gas supply pressure reducing valve (212) and a gas supply ball valve (213) are arranged between the gas distribution block (22) and the air supply fan (21). The gas supply pressure reducing valve (212) is used for reducing and stabilizing the air flow flowing to the gas distribution block (22), and the gas supply ball valve (213) is used for controlling the on - off between the gas distribution block (22) and the air supply fan (21).

9. A coating device, characterized in that, Including: A coating device (200) for coating and forming a perovskite liquid film on the surface of the substrate; The air - floating drying device (100) according to any one of claims 1 to 8, for heating the substrate to dry the perovskite liquid film on the substrate; A transfer device for transferring the substrate coated by the coating device (200) to the air - floating drying device; Among them, the moving speed of the substrate on the air - floating drying device (100) corresponds to the coating speed of the substrate on the coating device (200), so that the substrate can perform continuous coating and drying operations on the coating device (200) and the air - floating drying device (100).

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