Container for storing and supplying gas and using method

Abstract

The invention relates to a gas storage and supply container and a using method, the gas storage and supply container comprises a bottle body, a bottle valve, a gas inlet pipeline, a gas outlet pipeline and a gas supply limiting unit; the cylinder valve comprises a handle, a valve rod, a valve element and a valve body, two gas passages which are not intersected are arranged on the valve element, the gas inlet pipeline comprises a first gas inlet pipe and a second gas inlet pipe, the first gas inlet pipe penetrates through the valve body in the horizontal direction, and the second gas inlet pipe penetrates through the valve body in the vertical direction; the air outlet pipeline comprises a first air outlet pipe and a second air outlet pipe; the first air outlet pipe penetrates through the valve body in the horizontal direction, and the second air outlet pipe penetrates through the valve body in the vertical direction. The use method of the container comprises a filling method and a gas supply method. The container cylinder valve is provided with the air inlet and the air outlet, the air supply limiting unit is used for controlling the opening and closing authority of the air outlet and the air inlet in the air inflation and air supply state, and the air inflation efficiency is ensured while safety is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of gas storage and gas supply, and in particular to a gas storage and gas supply container and a use method thereof. Background Art

[0002] In the field of semiconductor manufacturing, the ion implantation process is a crucial step, which is used to precisely control the doping concentration in semiconductor materials, thereby achieving precise control of the electrical properties of the device. During this process, the machine operating voltage is often as high as tens of thousands of volts to ensure that the ion beam can efficiently penetrate the silicon wafer and reach the predetermined doping depth. However, such a high operating voltage poses a great challenge to the insulation design of the machine, especially in terms of the gas supply system.

[0003] The traditional central gas supply system is not suitable for ion implantation because it cannot effectively insulate the high-voltage machine. In order to ensure the stability and safety of the gas supply, the gas cylinder usually needs to be manually placed inside the machine and directly connected to the ion implantation equipment. Although this approach meets the process requirements to a certain extent, it also brings potential safety hazards.

[0004] There are many types of gases used in the ion implantation process, including but not limited to highly toxic and flammable pure gases such as arsine and phosphine, as well as flammable and toxic mixed gases such as boron trifluoride and germanium tetrafluoride. Once these gases leak unexpectedly, they will not only pose a serious threat to the personal safety of workers, but may also cause catastrophic accidents such as fire and explosion, causing irreversible damage to the equipment.

[0005] Chinese patent CN110345257A discloses a built-in gas cylinder valve and a gas cylinder equipped with the valve. Through a compact structural design, the valve body and other components other than the driving handle are designed to be compact cylindrical. When in use, the valve body is completely placed inside the gas cylinder, so that the pressure inside and outside the valve body is balanced, which can effectively increase the service life of the gas cylinder valve structure. This technology can balance the pressure inside and outside the valve body. Although it can increase its service life to a certain extent, there may be a risk of gas leakage during use. Once toxic gas leaks, it will cause damage to personnel and equipment.

[0006] To this end, it is necessary to design a valve system that can effectively isolate gas leakage, while reducing the pressure and flow of the discharged gas, minimizing potential safety risks, and ensuring stable operation under extreme working conditions of the gas cylinder. Summary of the invention

[0007] The object of the present invention is to provide a gas storage and gas supply container and a use method to reduce the safety risks of toxic gases in gas cylinders to people and equipment.

[0008] The specific technical solutions provided by the present invention are as follows:

[0009] A gas storage and supply container, comprising a bottle body, a bottle valve, an air inlet pipeline and an air outlet pipeline;

[0010] The bottle body comprises a bottleneck and a barrel;

[0011] The bottle valve comprises a handle, a valve stem, a valve core and a valve body, a stopper is arranged on the lower surface of the handle, the upper end of the valve stem is connected to the handle, the lower end of the valve stem is connected to the valve core, the valve core is located inside the cavity of the valve body, the valve body is engaged with the bottleneck through threads, three positioning holes are arranged inside the cavity of the valve body, the three positioning holes are respectively a filling positioning hole, an air supply positioning hole and a closing positioning hole, a spring positioning pin is arranged on the circumference of the side of the valve core, and the spring positioning pin and the positioning hole inside the cavity form a positioning unit;

[0012] The air intake pipeline comprises an air intake port, a first air intake pipe, a second air intake pipe and an air intake plug, wherein the first air intake pipe penetrates the valve body in a horizontal direction, one end of the first air intake pipe is connected to the air intake port, and the other end of the first air intake pipe is connected to the valve core; the second air intake pipe penetrates the valve body in a vertical direction, one end of the second air intake pipe is connected to the valve core, and the other end of the second air intake pipe is connected to a filter;

[0013] The air outlet pipeline includes an air outlet, a first air outlet pipe, a second air outlet pipe and an air outlet plug; the first air outlet pipe penetrates the valve body in the horizontal direction, one end of the first air outlet pipe is connected to the air outlet, and the other end of the first air outlet pipe is connected to the valve core; the second air outlet pipe penetrates the valve body in the vertical direction, the second air outlet pipe passes into the interior of the cylinder, the upper end is connected to the valve core, and the lower end is provided with a flow limiting valve and a pressure reducing valve.

[0014] Preferably, two non-intersecting gas passages are arranged on the valve core, including a first passage and a second passage, the first passage and the second passage are both bent at 90°, the angle between the horizontal gas passage of the first passage and the horizontal gas passage of the second passage is 60°-120°, and the angle between the first air inlet pipe and the first air outlet pipe is equal to the angle between the horizontal gas passage of the first passage and the horizontal gas passage of the second passage.

[0015] Preferably, the handle is rotated to drive the block, the valve stem and the valve core to rotate. During the rotation of the handle, the spring locating pin on the valve core enters the filling locating hole, and the gas cylinder is in the filling state; the spring locating pin enters the gas supply locating hole, and the gas cylinder is in the gas supply state; the spring locating pin enters the closing locating hole, and the gas cylinder is in the closing state.

[0016] Preferably, during the process of turning the handle, the spring positioning pin on the valve core enters the filling positioning hole, and the gas cylinder is in a filling state; the first air inlet pipe is connected to the horizontal air path of the first passage of the valve core, the upper end of the second air inlet pipe is connected to the vertical air path of the first passage of the valve core, the first air outlet pipe is connected to the horizontal air path of the second passage of the valve core, and the upper end of the second air outlet pipe is connected to the vertical air path of the second passage of the valve core.

[0017] Preferably, the container also includes a gas supply limit unit, which is detachably installed on the upper end of the valve body. The gas supply limit unit consists of a limit ring and bolts. The limit ring is fixed to the valve body by bolts, and the block works together with the gas supply limit unit so that the gas cylinder can only be in a gas supply state and a closed state.

[0018] Preferably, a limiting ring and a bolt are installed at the upper end of the valve body, and when the handle is turned, the spring positioning pin on the valve core enters the gas supply positioning hole, and the gas cylinder is in a gas supply state; the first gas outlet pipe is connected to the horizontal gas path of the second passage of the valve core, and the upper end of the second gas outlet pipe is connected to the vertical gas path of the second passage of the valve core, and the horizontal gas path and the vertical gas path of the first passage of the valve core are not connected to the air inlet pipeline;

[0019] At least two groups of flow limiting valves and pressure reducing valves are arranged at the lower end of the second gas outlet pipe, and the number of the flow limiting valves and pressure reducing valves is set according to the pressure of the gas in the gas cylinder, so that the gas pressure at the gas outlet should be lower than 100KPa, the gas flow rate should be greater than the target flow rate, and the flow rate difference should not be greater than 30%;

[0020] The lower end of the second air outlet pipe is provided with a first flow limiting valve, a first pressure reducing valve, a second flow limiting valve and a second pressure reducing valve in sequence from top to bottom, and the flow limiting valve and the pressure reducing valve are arranged at intervals.

[0021] Preferably, a limit ring and a bolt are installed on the upper end of the valve body, and during the rotation of the handle, the spring positioning pin on the valve core enters the closing positioning hole; the gas cylinder is in a closed state; the horizontal gas path and the vertical gas path of the first passage and the second passage of the valve core are not connected to the air inlet pipeline and the air outlet pipeline.

[0022] Preferably, a sealing material is provided between the valve stem and the valve body.

[0023] The present invention also provides a method for using a gas storage and gas supply container, which includes a filling method and a gas supply method;

[0024] The filling method comprises the following steps:

[0025] S11, adjusting the bottle valve to an inflated state;

[0026] S12, evacuating the remaining gas in the gas cylinder body from the gas inlet, evacuating the remaining gas in the gas outlet pipeline from the gas outlet, introducing the gas to be charged from the gas inlet, and purging and replacing the remaining gas between the first pressure reducing valve and the second pressure reducing valve;

[0027] S13, closing the gas outlet and filling gas from the gas inlet;

[0028] S14, adjusting the bottle valve to a closed state;

[0029] S15, plugging the air inlet and the air outlet with plugs respectively;

[0030] The gas supply method comprises the following steps:

[0031] S21, installing the air supply limit unit to the upper end of the valve body, and when the bottle valve is in a closed state, removing the air outlet plug, and connecting the air outlet to the air supply pipeline;

[0032] S22, evacuate the gas outlet to a vacuum state through the gas supply pipeline, and close the evacuation valve;

[0033] S23, rotating the bottle valve to a gas supply state;

[0034] S24. Evacuate the gas outlet, draw gas from the gas cylinder, and control the flow rate through a mass flow meter.

[0035] Preferably, when preparing a two-component or multi-component mixed gas, step S13 of the filling method is repeated to mix the gas cylinders, thereby obtaining a two-component or multi-component mixed gas.

[0036] A gas storage and gas supply container and a method of use of the present invention have the following beneficial effects:

[0037] 1. The present invention is equipped with a pressure reducing valve and a flow limiting valve on the gas outlet pipeline, which effectively limits the output pressure and flow of the gas; in the event of an accidental leakage, it can greatly reduce the harm to the human body and the damage to mechanical equipment, thereby greatly improving the safety of use.

[0038] 2. The present invention integrates the air inlet and the air outlet through the bottle valve structure, and uses the air supply limit unit to accurately control the opening and closing of the two ports in the inflation and air supply states. During the filling process, the gas can be smoothly filled in through the conventional air inlet pipeline; in the air supply stage, only the air outlet is allowed to be opened, and the flow and pressure limiting measures are implemented simultaneously, which ensures safe operation while ensuring efficient inflation performance, thereby optimizing and simplifying the process.

[0039] 3. The container and method of the present invention also have the ability to prepare multi-component gases. By repeating the filling steps and combining the mixing operation of the gas cylinder, a gas mixture containing two or more components can be easily prepared, further broadening the scope of application. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a schematic structural diagram of the gas storage container of the present invention;

[0041] Figure 2 It is a cross-sectional view of the bottle valve of the container of the present invention in a filled state;

[0042] Figure 3 A cross-sectional view of the bottle valve of the container of the present invention in a gas supply state;

[0043] Figure 4 It is a cross-sectional view of the bottle valve of the container of the present invention in a closed state;

[0044] Explanation of the markings in the figure: 101, bottleneck; 102, cylinder; 201, handle; 2011, stopper; 202, valve stem; 203, valve core; 2031, first passage; 2032, second passage; 2033, spring locating pin; 204, valve body; 2041, thread; 2042, filling locating hole; 2043, air supply locating hole; 2044, closing locating hole; 301, air inlet; 302, first air inlet pipe; 303, second air inlet pipe; 304, air inlet plug; 305, filter; 401, air outlet; 402, first air outlet pipe; 403, second air outlet pipe; 4031, first flow limiting valve; 4032, first pressure reducing valve; 4033, second flow limiting valve; 4034, second pressure reducing valve; 404, air outlet plug; 501, limit ring; 502, bolt. DETAILED DESCRIPTION

[0045] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation method, structure, characteristics and effects of the present invention are described in detail below in combination with the preferred embodiments.

[0046] Example 1

[0047] like Figure 1 , which is a schematic structural diagram of a gas storage and gas supply container of the present invention;

[0048] A gas storage and supply container comprises a bottle body, a bottle valve, an air inlet pipeline and an air outlet pipeline.

[0049] The bottle body comprises a bottleneck 101 and a cylinder 102 .

[0050] The bottle valve comprises a handle 201, a valve stem 202, a valve core 203 and a valve body 204. A stopper 2011 is provided on the lower surface of the handle 201. The upper end of the valve stem 202 is connected to the handle 201, and the lower end of the valve stem 202 is connected to the valve core 203. The valve core 203 is located inside the cavity of the valve body 204. The valve body 204 is engaged with the bottleneck 101 through a thread 2041. Three positioning holes are provided inside the cavity of the valve body 204, which are a filling positioning hole 2042, an air supply positioning hole 2043 and a closing positioning hole 2044. A spring positioning pin 2033 is provided on the circumference of the side of the valve core 203. The spring positioning pin 2033 and the positioning hole inside the cavity form a positioning unit.

[0051] The handle 201 is rotated to drive the block 2011, the valve stem 202 and the valve core 203 to rotate. During the rotation of the handle 201, the spring positioning pin 2033 on the valve core 203 enters the filling positioning hole 2042, and the gas cylinder is in the filling state; the spring positioning pin 2033 enters the gas supply positioning hole 2043, and the gas cylinder is in the gas supply state; the spring positioning pin 2033 enters the closing positioning hole 2044, and the gas cylinder is in the closing state.

[0052] Two non-intersecting gas passages are arranged on the valve core 203, including a first passage 2031 and a second passage 2032. The first passage 2031 and the second passage 2032 are both bent at 90°, and the angle between the horizontal gas path of the first passage 2031 and the horizontal gas path of the second passage 2032 is 120°. The angle between the first air inlet pipe 302 and the first air outlet pipe 402 is equal to the angle between the horizontal gas path of the first passage 2031 and the horizontal gas path of the second passage 2032.

[0053] The air intake pipeline includes an air intake port 301, a first air intake pipe 302, a second air intake pipe 303 and an air intake plug 304. The first air intake pipe 302 penetrates the valve body 204 in the horizontal direction, one end of the first air intake pipe 302 is connected to the air intake port 301, and the other end of the first air intake pipe 302 is connected to the valve core 203; the second air intake pipe 303 penetrates the valve body 204 in the vertical direction, one end of the second air intake pipe 303 is connected to the valve core 203, and the other end of the second air intake pipe 303 passes into the interior of the cylinder 102 and is connected to the filter 305;

[0054] The air outlet pipeline includes an air outlet 401, a first air outlet pipe 402, a second air outlet pipe 403 and an air outlet plug 404; the first air outlet pipe 402 penetrates the valve body 204 in the horizontal direction, one end of the first air outlet pipe 402 is connected to the air outlet 401, and the other end of the first air outlet pipe 402 is connected to the valve core 203; the second air outlet pipe 403 penetrates the valve body 204 in the vertical direction, the second air outlet pipe 403 passes into the interior of the cylinder 102, the upper end is connected to the valve core 203, and the lower end is provided with a flow limiting valve and a pressure reducing valve.

[0055] During the process of turning the handle 201, the spring positioning pin 2033 on the valve core 203 enters the filling positioning hole 2042, and the gas cylinder is in a filling state; the first air inlet pipe 302 is horizontally connected to the first passage 2031 of the valve core 203, the upper end of the second air inlet pipe 303 is vertically connected to the first passage 2031 of the valve core 203, the first air outlet pipe 402 is horizontally connected to the second passage 2032 of the valve core 203, and the upper end of the second air outlet pipe 403 is vertically connected to the second passage 2032 of the valve core 203. Figure 2 shown.

[0056] Example 2

[0057] On the basis of Example 1, the container also includes a gas supply limit unit, which is detachably installed on the upper end of the valve body 204. The gas supply limit unit is composed of a limit ring 501 and a bolt 502. The limit ring 501 is fixed to the valve body 204 by the bolt 502. The block 2011 works together with the gas supply limit unit so that the gas cylinder can only be in a gas supply state and a closed state.

[0058] A limit ring 501 and a bolt 502 are installed on the upper end of the valve body 204. When the handle 201 is turned, the spring positioning pin 2033 on the valve core 203 enters the gas supply positioning hole 2043, and the gas cylinder is in a gas supply state; the first gas outlet pipe 402 is connected to the horizontal gas path of the second passage 2032 of the valve core 203, and the upper end of the second gas outlet pipe 403 is connected to the vertical gas path of the second passage 2032 of the valve core 203. The horizontal gas path and the vertical gas path of the first passage 2031 of the valve core 203 are not connected to the air inlet pipeline. Figure 3 As shown;

[0059] At least two sets of flow limiting valves and pressure reducing valves are arranged at the lower end of the second gas outlet pipe 403. The number of the flow limiting valves and pressure reducing valves is set according to the pressure of the gas in the gas cylinder, so that the gas pressure at the gas outlet 401 should be lower than 100KPa and the gas flow rate should be greater than the target flow rate, but the difference is not greater than 30%;

[0060] The lower end of the second air outlet pipe 403 is provided with a first flow limiting valve 4031, a first pressure reducing valve 4032, a second flow limiting valve 4033 and a second pressure reducing valve 4034 in sequence from top to bottom, and the flow limiting valves and the pressure reducing valves are arranged at intervals.

[0061] During the rotation of the handle 201, the spring positioning pin 2033 on the valve core 203 enters the closing positioning hole 2044; the gas cylinder is in a closed state; the horizontal gas path and the vertical gas path of the first passage 2031 and the second passage 2032 of the valve core 203 are not connected to the inlet pipeline and the outlet pipeline, such as Figure 4 .

[0062] Example 3

[0063] Different from Embodiments 1 and 2, the angle between the horizontal gas path of the first passage 2031 and the horizontal gas path of the second passage 2032 is 60°.

[0064] Example 4

[0065] Different from Embodiments 1 and 2, the included angle between the horizontal gas path of the first passage 2031 and the horizontal gas path of the second passage 2032 is 90°.

[0066] Example 5

[0067] Using the gas storage container in Example 1, this embodiment provides a method for filling the container, comprising the following steps:

[0068] S11, adjust the bottle valve to the inflation state;

[0069] S12, evacuate the remaining gas inside the gas cylinder to -0.1MPa from the gas inlet 301, evacuate the remaining gas in the gas outlet pipeline to -0.1MPa from the gas outlet 401, and introduce the gas to be filled PH3 from the gas inlet 301 to purge the remaining gas between the first pressure reducing valve 4032 and the second pressure reducing valve 4034 for 30 minutes;

[0070] S13, close the air outlet 401, and fill PH3 to 10MPa from the air inlet 301;

[0071] S14, adjusting the bottle valve to a closed state, that is, the first air inlet pipe 302 and the first air outlet pipe 402 are not connected to any passage of the valve core 203;

[0072] S15, plugging the gas inlet 301 and the gas outlet 401 with plugs respectively, and filling with phosphine gas at a pressure of 10 MPa.

[0073] Example 6

[0074] A two-component mixed gas filling method is performed on the basis of Example 5, wherein one of the components is used for replacement in step S12, and step S13 is repeated once to fill the two components to obtain a mixed gas, as shown in Table 1 for details.

[0075] Table 1 Two-component mixed gas filling mass and gas distribution volume concentration

[0076]

[0077] The main use of 1% phosphine / hydrogen is as an N-type doping source for silicon materials in semiconductor manufacturing; the main use of 5% diborane / nitrogen is as a P-type doping source for silicon materials in semiconductor manufacturing, as well as epitaxial growth, passivation, diffusion and ion implantation of silicon and germanium.

[0078] Example 7

[0079] Using the gas storage container in Example 2, based on Example 5, this embodiment provides a gas supply method for the container, comprising the following steps:

[0080] S21, install the gas supply limit assembly, when the bottle valve is in the closed state, remove the gas outlet plug 404, and connect the gas outlet 401 to the gas supply pipeline;

[0081] S22, evacuate the gas outlet 401 to -0.1 MPa through the gas supply pipeline, and close the evacuation valve;

[0082] S23, rotating the bottle valve to the air supply state, that is, the first air outlet pipe 402 is horizontally connected to the first passage 2031 of the valve core 203, the upper end of the second air outlet pipe 403 is vertically connected to the first passage 2031 of the valve core 203, and the first air inlet pipe 302 is not connected to the valve core 203;

[0083] S24, evacuate the gas outlet 401, draw gas from the gas cylinder, and control the flow rate through a mass flow meter.

[0084] The gas pressure discharged from the gas outlet 401 is 40 KPa, and the gas flow is 4 mL / min. After the phosphine gas is filled with the gas cylinder of the present invention, the outlet pressure of the gas cylinder is reduced from 10 MPa to 40 KPa, which is reduced by 250 times compared with the ordinary gas cylinder.

[0085] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A gas storage and supply container, characterized in that: It includes a bottle body, a bottle valve, an air inlet pipeline and an air outlet pipeline; The bottle body comprises a bottleneck (101) and a barrel (102); The bottle valve comprises a handle (201), a valve stem (202), a valve core (203) and a valve body (204); a stopper (2011) is arranged on the lower surface of the handle (201); the upper end of the valve stem (202) is connected to the handle (201); the lower end of the valve stem (202) is connected to the valve core (203); the valve core (203) is located inside the cavity of the valve body (204); the valve body (204) is connected to the bottleneck (101) via a thread (2041); three positioning holes are arranged inside the cavity of the valve body (204); the three positioning holes are respectively a filling positioning hole (2042), an air supply positioning hole (2043) and a closing positioning hole (2044); a spring positioning pin (2033) is arranged on the circumference of the side of the valve core (203); the spring positioning pin (2033) and the positioning hole inside the cavity form a positioning unit; The air intake pipeline comprises an air intake port (301), a first air intake pipe (302), a second air intake pipe (303) and an air intake plug (304); the first air intake pipe (302) penetrates the valve body (204) in a horizontal direction, one end of the first air intake pipe (302) is connected to the air intake port (301), and the other end of the first air intake pipe (302) is connected to the valve core (203); the second air intake pipe (303) penetrates the valve body (204) in a vertical direction, one end of the second air intake pipe (303) is connected to the valve core (203), and the other end of the second air intake pipe (303) is connected to a filter (305); The air outlet pipeline comprises an air outlet (401), a first air outlet pipe (402), a second air outlet pipe (403) and an air outlet plug (404); the first air outlet pipe (402) passes through the valve body (204) in the horizontal direction, one end of the first air outlet pipe (402) is connected to the air outlet (401), and the other end of the first air outlet pipe (402) is connected to the valve core (203); the second air outlet pipe (403) passes through the valve body (204) in the vertical direction, the second air outlet pipe (403) passes into the interior of the cylinder (102), the upper end of the second air outlet pipe (403) is connected to the valve core (203), and the lower end is provided with a flow limiting valve and a pressure reducing valve.

2. A gas storage and supply container according to claim 1, characterized in that: The valve core (203) is provided with two non-intersecting gas passages, including a first passage (2031) and a second passage (2032); the first passage (2031) and the second passage (2032) are both bent at 90°; the included angle between the horizontal gas passage of the first passage (2031) and the horizontal gas passage of the second passage (2032) is 60°-120°; the included angle between the first air inlet pipe (302) and the first air outlet pipe (402) is equal to the included angle between the horizontal gas passage of the first passage (2031) and the horizontal gas passage of the second passage (2032).

3. A gas storage and supply container according to claim 2, characterized in that: The handle (201) is rotated to drive the block (2011), the valve stem (202) and the valve core (203) to rotate. During the rotation of the handle (201), the spring positioning pin (2033) on the valve core (203) enters the filling positioning hole (2042), and the gas cylinder is in a filling state; the spring positioning pin (2033) enters the gas supply positioning hole (2043), and the gas cylinder is in a gas supply state; the spring positioning pin (2033) enters the closing positioning hole (2044), and the gas cylinder is in a closing state.

4. A gas storage and supply container according to claim 3, characterized in that: During the process of rotating the handle (201), the spring positioning pin (2033) on the valve core (203) enters the filling positioning hole (2042), and the gas cylinder is in a filling state; the first air inlet pipe (302) is horizontally connected to the first passage (2031) of the valve core (203); the upper end of the second air inlet pipe (303) is vertically connected to the first passage (2031) of the valve core (203); the first air outlet pipe (402) is horizontally connected to the second passage (2032) of the valve core (203); the upper end of the second air outlet pipe (403) is vertically connected to the second passage (2032) of the valve core (203).

5. A gas storage and supply container according to claim 3, characterized in that: The container further comprises a gas supply limiting unit, which is detachably mounted on the upper end of the valve body (204), and comprises a limiting ring (501) and a bolt (502), wherein the limiting ring (501) is fixed to the valve body (204) via the bolt (502), and the stopper (2011) and the gas supply limiting unit work together so that the gas cylinder can only be in a gas supply state and a closed state.

6. A gas storage and supply container according to claim 5, characterized in that: A limiting ring (501) and a bolt (502) are installed at the upper end of the valve body (204); when the handle (201) is turned, the spring positioning pin (2033) on the valve core (203) enters the gas supply positioning hole (2043), and the gas cylinder is in a gas supply state; the first gas outlet pipe (402) is connected to the horizontal gas path of the second passage (2032) of the valve core (203); the upper end of the second gas outlet pipe (403) is connected to the vertical gas path of the second passage (2032) of the valve core (203); the horizontal gas path and the vertical gas path of the first passage (2031) of the valve core (203) are not connected to the gas inlet pipeline; At least two groups of flow limiting valves and pressure reducing valves are arranged at the lower end of the second gas outlet pipe (403), and the number of the flow limiting valves and pressure reducing valves is set according to the pressure of the gas in the gas cylinder, so that the gas pressure at the gas outlet (401) should be lower than 100 KPa, the gas flow rate should be greater than the target flow rate, and the flow rate difference should not be greater than 30%; The lower end of the second air outlet pipe (403) is provided with a first flow limiting valve (4031), a first pressure reducing valve (4032), a second flow limiting valve (4033) and a second pressure reducing valve (4034) in sequence from top to bottom, and the flow limiting valve and the pressure reducing valve are arranged at intervals.

7. A gas storage and supply container according to claim 5, characterized in that: A limiting ring (501) and a bolt (502) are installed on the upper end of the valve body (204); when the handle (201) is rotated, the spring positioning pin (2033) on the valve core (203) enters the closing positioning hole (2044); the gas cylinder is in a closed state; the horizontal gas path and the vertical gas path of the first passage (2031) and the second passage (2032) of the valve core (203) are not connected to the air inlet pipeline and the air outlet pipeline.

8. A gas storage and supply container according to claim 1, characterized in that: A sealing material is provided between the valve stem (202) and the valve body (204).

9. A method for using a gas storage and supply container according to any one of claims 1 to 8, characterized in that: The method of use includes a filling method and a gas supply method; The filling method comprises the following steps: S11, adjusting the bottle valve to an inflated state; S12, evacuating the remaining gas in the gas cylinder body from the gas inlet (301), evacuating the remaining gas in the gas outlet pipeline from the gas outlet (401), introducing the gas to be charged from the gas inlet (301), and purging and replacing the remaining gas between the first pressure reducing valve (4032) and the second pressure reducing valve (4034); S13, closing the gas outlet (401) and filling gas from the gas inlet (301); S14, adjusting the bottle valve to a closed state; S15, plugging the air inlet (301) and the air outlet (401) with plugs respectively; The gas supply method comprises the following steps: S21, installing the gas supply limit unit to the upper end of the valve body (204), and when the bottle valve is in a closed state, removing the gas outlet plug (404), and connecting the gas outlet (401) to the gas supply pipeline; S22, evacuating the gas outlet (401) to a vacuum state through the gas supply pipeline, and closing the evacuation valve; S23, rotating the bottle valve to a gas supply state; S24, evacuate the gas outlet (401), draw gas from the gas cylinder, and control the flow rate through a mass flow meter.

10. The method for using a gas storage and supply container according to claim 9, characterized in that: When preparing a two-component or multi-component mixed gas, step S13 of the filling method is repeated to mix the gas cylinders evenly, thereby obtaining a two-component or multi-component mixed gas.

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