Uniform gas inlet CVD (Chemical Vapor Deposition) tubular furnace body structure and method for preparing high-porosity porous carbon
By designing a uniform intake CVD tube furnace body structure, the problem of uneven gas distribution in traditional CVD tube furnaces is solved, and the quality consistency and production efficiency of high-porosity porous carbon are improved.
Patent Information
- Application Number
- CN202510308863.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-14
- Publication Date
- 2025-05-13
AI Technical Summary
Traditional CVD tube furnaces adopt a single-point intake method, resulting in uneven distribution of reaction gases, resulting in different quality of high-porosity porous carbon, affecting production efficiency.
A uniform intake CVD tube furnace body structure is designed, including the furnace body, sealing flange, mixed gas intake pipe and outlet pipe, and uniform gas distribution is achieved through the static mixing pipe and branch intake pipe.
The uniform distribution of reaction gas is achieved, the quality consistency of high-porosity porous carbon is improved, the process repeatability is reduced, and the production efficiency is improved.
Smart Images
Figure CN119983796A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of high-porosity porous carbon processing equipment, and in particular to a uniform air intake CVD tubular furnace structure and method for preparing high-porosity porous carbon. Background Art
[0002] CVD tube furnaces are widely used in fields such as materials science and nanoscience, and are mostly used for gas-solid contact reactions. They require not only inert protective gases such as N2 and Ar, but also reactive gases such as O2, H2, SiH4, NH3, and CO2. Traditional CVD tube furnaces usually use a single-point gas inlet method, and the reaction gas enters from one end of the furnace tube, which can easily lead to uneven gas distribution in the furnace tube. Especially when using non-inert gases, it is easy to cause high concentrations of reaction gases near the inlet end, resulting in violent reactions, and sparse reaction gases and low concentrations in the space far from the inlet end, resulting in poor product reactivity, which in turn affects the uniformity of the product. In other words, the processing of the same batch of porous carbon precursors often results in different qualities of the same batch of high-porosity porous carbon due to the inhomogeneity of the gas, and raw materials that do not meet the quality standards need to be processed repeatedly, which brings about process repeatability and affects production efficiency.
[0003] Therefore, how to solve the uneven contact between gas and reactants existing in the prior art, how to make the reaction gas enter stably, improve the violent reaction near the air inlet end and the poor reactivity of the product away from the air inlet end, and further improve the poor product stability caused by the unevenness of the gas has become a technical problem that needs to be urgently solved by technical personnel in this field. Summary of the invention
[0004] The present invention provides a uniform air intake CVD tubular furnace structure and method for preparing high-porosity porous carbon, which is used to solve the problem of uneven contact between gas and reactants in the prior art, how to make the reaction gas enter stably, improve the violent reaction near the air inlet end and poor reactivity of the product far from the air inlet end, and further improve the poor product stability caused by gas unevenness.
[0005] The present invention provides a uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon, comprising: Furnace body; A sealing flange is connected to one side of the furnace body, and a flange hole is provided on the surface of the sealing flange; Mixed gas inlet pipe; installed on one side of the sealing flange and connected to the flange hole; An air outlet pipe; one end of which is connected to the other side of the furnace body; Vacuum pressure device; connected to the air outlet pipe; A heating component is installed outside the furnace body.
[0006] In some embodiments, the mixed gas intake pipe includes: Gas intake pipe; A static mixing tube; one end of which is connected to one end of a gas inlet pipe; An activated gas inlet pipe; one end of which is connected to one side of the gas inlet pipe; A mixed gas branch pipe; one end of which is connected to the other end of the static mixing pipe, and the other end of which is connected to the flange hole.
[0007] In some of the embodiments, the diameter of the gas inlet pipe is larger than the diameter of the static mixing tube, the end of the gas inlet pipe connected to the static mixing tube is conical, and the activated gas inlet pipe is connected to the end of the conical end of the gas inlet pipe.
[0008] In some of the embodiments, a plurality of sets of spiral blades are installed inside the static mixing tube.
[0009] In some of the embodiments, the rotation angles of two adjacent groups of spiral blades differ by ninety degrees.
[0010] In some of the embodiments, two groups of mixed gas inlet pipes are provided, one group is installed at the upper part of the sealing flange, and the other group is installed at the lower part of the sealing flange.
[0011] In some of the embodiments, one end of the flange hole located inside the furnace body is communicated with the branch air inlet pipe.
[0012] In some of the embodiments, the branch air intake pipe comprises: Branch air intake primary pipe; one end is connected with the flange hole; A branch air intake secondary pipe; one end of which is connected to the other end of the branch air intake primary pipe; A branch air intake three-stage pipe; one end of which is connected to the other end of the branch air intake two-stage pipe; A first-stage air outlet pipe; one end of which is connected to one side of the branch air inlet first-stage pipe, and the first-stage air outlet pipe is provided with a plurality of through holes along the length direction; A secondary air outlet pipe; one end of which is connected to one side of the branch air inlet secondary pipe, and the secondary air outlet pipe is provided with a plurality of through holes along the length direction; A three-stage air outlet pipe; one end of which is connected to one side of the branch air inlet three-stage pipe, and the three-stage air outlet pipe is provided with a plurality of through holes along the length direction; The branch air intake primary pipe, the branch air intake secondary pipe and the branch air intake tertiary pipe are of equal length, and the volume of the branch air intake secondary pipe is two-thirds of the branch air intake primary pipe, and the volume of the branch air intake tertiary pipe is one-third of the branch air intake primary pipe.
[0013] In some of the embodiments, the lengths and volumes of the primary air outlet pipe, the secondary air outlet pipe, and the tertiary air outlet pipe are the same.
[0014] A method for preparing high-porosity porous carbon comprises the following steps: S1, aging and drying the porous carbon precursor; S2, placing the porous carbon precursor after drying on a corundum crucible, and placing the corundum crucible on the mixed gas inlet pipe at the bottom of the sealing flange; S3, placing a corundum crucible containing a certain amount of porous carbon precursor into the furnace body and sealing it through a sealing flange, heating the furnace body through a heating component, and introducing high-purity N2; S4. Under the protection of N2, the temperature inside the furnace is raised to 800-1200°C at 5°C / min and maintained constant for insulation; S5. When the temperature rises to the constant temperature range, switch the mixed gas to activate the porous carbon precursor for 4-6 hours. After the insulation time is over, switch to high-purity N2. After cooling to room temperature, open the furnace and take out the high-porosity porous carbon.
[0015] The beneficial effects of the present invention are as follows: when the furnace structure of the present invention is used, the porous carbon precursor is first aged and dried, and then the porous carbon precursor after the drying process is placed on a corundum crucible, and the corundum crucible is placed on a mixed gas inlet pipe at the lower part of a sealing flange, and the corundum crucible and the porous carbon precursor placed thereon are sent into the interior of the furnace body, and the corundum crucible containing a certain amount of porous carbon precursor is sent into the interior of the furnace body and sealed through a sealing flange, and the furnace body is heated by a heating component and N2 is introduced; the furnace body is heated by a heating component, and high-purity N2 is introduced through a gas inlet pipe, and under the protection of N2, the temperature inside the furnace body is kept at 5°C / min to 800-1200℃ and keep it constant. At this time, CO2 is introduced through the activated gas inlet pipe. CO2 and N2 are first mixed at high speed at the end of the conical end of the inlet pipe. Then the mixed gas enters the static mixing pipe for further mixing to ensure that it is mixed evenly. Then the mixed gas enters the branch inlet pipe through the mixed gas branch pipe and the flange hole, and is evenly distributed to the first outlet pipe, the second outlet pipe and the third outlet pipe through the branch inlet first pipe, the branch inlet second pipe and the branch inlet tertiary pipe. , thereby making the mixed gas concentration in the front, middle and rear of the furnace body uniform, and the quality of the prepared high-porosity porous carbon is consistent. The activation time of the porous carbon precursor by the mixed gas is 4-6h. After the insulation time is over, the activation gas inlet pipe is closed, and high-purity N2 gas is introduced through the gas inlet pipe. After cooling to room temperature, the furnace body is opened to take out the high-porosity porous carbon. In the technical solution of the present invention, the mixed gas is evenly distributed in the furnace body, so that the quality of a single batch of high-porosity porous carbon is consistent, avoiding process repeatability caused by substandard product quality and affecting product preparation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1It is a structural schematic diagram of a uniform air intake CVD tubular furnace structure and method for preparing high-porosity porous carbon according to the present invention from one perspective; Figure 2 yes Figure 1 A schematic diagram of the structure of a static mixing tube in a uniform air intake CVD tubular furnace structure and method for preparing high-porosity porous carbon is shown; Figure 3 yes Figure 1 A schematic diagram of the structure of a branch air inlet pipe in a uniform air inlet CVD tubular furnace structure and method for preparing high-porosity porous carbon is shown; In the accompanying drawings, 1. furnace body; 2. sealing flange; 3. mixed gas inlet pipe; 31. gas inlet pipe; 32. static mixing tube; 321. spiral blade; 33. activated gas inlet pipe; 34. mixed gas branch pipe; 4. outlet pipe; 5. vacuum pressure device; 6. branch inlet pipe; 61. branch inlet first-level pipe; 62. branch inlet second-level pipe; 63. branch inlet tertiary pipe; 64. first-level outlet pipe; 65. second-level outlet pipe; 66. third-level outlet pipe. DETAILED DESCRIPTION
[0017] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0018] As shown in the background technology, traditional CVD tube furnaces usually adopt a single-point air intake method, and the reaction gas enters from one end of the furnace tube, which can easily lead to uneven gas distribution in the furnace tube, especially when using non-inert gases. It is easy to cause high concentration of reaction gas near the air inlet end and violent reaction, and sparse reaction gas and low concentration in the space far away from the air inlet end, resulting in poor reactivity of the product, thereby affecting the uniformity of the product. In other words, the processing of the same batch of porous carbon precursors often causes the same batch of high-porosity porous carbon to have different qualities due to the unevenness of the gas, and raw materials that do not meet the quality standards need to be processed repeatedly, resulting in process repeatability and affecting production efficiency. Therefore, how to solve the uneven contact between gas and reactants in the prior art, how to make the reaction gas enter stably, improve the violent reaction near the air inlet end and poor product reactivity away from the air inlet end, and then improve the poor product stability caused by gas unevenness has become a technical problem that technical personnel in this field need to solve urgently.
[0019] To solve the above problems, refer to Figure 1 , Figure 2 and Figure 3The present invention provides a uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon, comprising a furnace body 1, a sealing flange 2, a mixed gas inlet pipe 3, an outlet pipe 4 and a vacuum pressure device 5. The sealing flange 2 is connected to one side of the furnace body 1, and a flange hole is provided on the surface of the sealing flange 2. The mixed gas inlet pipe 3 is installed on one side of the sealing flange 2 and is connected to the flange hole. One end of the outlet pipe 4 is connected to the other side of the furnace body 1. The vacuum pressure device 5 is connected to the outlet pipe 4. A heating component is installed on the outside of the furnace body 1.
[0020] Preferably, the mixed gas inlet pipe 3 includes: a gas inlet pipe 31, a static mixing pipe 32, an activated gas inlet pipe 33 and a mixed gas branch pipe 34, one end of the static mixing pipe 32 is connected to one end of the gas inlet pipe 31, one end of the activated gas inlet pipe 33 is connected to one side of the gas inlet pipe 31, one end of the mixed gas branch pipe 34 is connected to the other end of the static mixing pipe 32, and the other end is connected to the flange hole.
[0021] Specifically, a plurality of mixed gas branch pipes 34 are provided, and a plurality of flange holes are provided, which are consistent with the number of the mixed gas branch pipes 34 and correspond one to one.
[0022] Preferably, the diameter of the gas inlet pipe 31 is larger than the diameter of the static mixing tube 32 , the end of the gas inlet pipe 31 connected to the static mixing tube 32 is conical, and the activated gas inlet pipe 33 is connected to the end of the conical end of the gas inlet pipe 31 .
[0023] Specifically, the gas inlet pipe 31 in the present invention uses a venturi tube, so that CO2 and N2 can be mixed at a high speed, avoiding uneven mixing of the gas introduced into the furnace body 1.
[0024] Preferably, multiple groups of spiral blades 321 are installed inside the static mixing tube 32 .
[0025] Preferably, the rotation angles of two adjacent sets of spiral blades 321 differ by ninety degrees.
[0026] Specifically, the mixed gas is repeatedly mixed and separated in the static mixing tube 32, so that CO2 and N2 are mixed more evenly.
[0027] Preferably, two groups of mixed gas inlet pipes 3 are provided, one group is installed on the upper part of the sealing flange 2 , and the other group is installed on the lower part of the sealing flange 2 .
[0028] Specifically, in actual production, in addition to using the mixed gas in the present invention, single gases among O2, H2, SiH4 and NH3 can also be used, or mixed with inert protective gases such as N2 and Ar. Different gases have different densities. If the density of the mixed gas or the single gas is smaller than the gas in the furnace body, the mixed gas inlet pipe 3 at the bottom of the sealing flange 2 is selected. If the density of the mixed gas or the single gas is greater than the gas in the furnace body, the mixed gas inlet pipe 3 at the top of the sealing flange 2 is selected to discharge the gas in the furnace body faster and improve the gas diffusion efficiency. Different implementation methods can make the gas more evenly distributed in the space of the furnace body 1 faster.
[0029] Preferably, one end of the flange hole located inside the furnace body is connected to the branch air inlet pipe 6.
[0030] Specifically, the preferred scheme in the present invention is that four branch air inlet pipes 6 are installed on the upper part of the sealing flange 2, and four branch air inlet pipes 6 are installed on the lower part, and the four branch air inlet pipes 6 are grouped in pairs, one is located at a position 40 degrees counterclockwise rotated from the vertical symmetry line of the cross-section of the furnace body 1, and the other is located at a position 60 degrees counterclockwise rotated from the vertical symmetry line of the cross-section of the furnace body 1, and the other group is symmetrical with the vertical symmetry line of the cross-section of the furnace body 1. Such an arrangement allows the mixed gas to quickly reach the surface of the porous carbon precursor.
[0031] Preferably, the branch air inlet pipe 6 comprises: a branch air inlet first-stage pipe 61, a branch air inlet second-stage pipe 62, a branch air inlet tertiary pipe 63, a first-stage air outlet pipe 64, a second-stage air outlet pipe 65 and a tertiary air outlet pipe 66, one end of the branch air inlet first-stage pipe 61 is connected to the flange hole, one end of the branch air inlet second-stage pipe 62 is connected to the other end of the branch air inlet first-stage pipe 61, one end of the branch air inlet tertiary pipe 63 is connected to the other end of the branch air inlet second-stage pipe 62, one end of the first-stage air outlet pipe 64 is connected to one side of the branch air inlet first-stage pipe 61, and the first-stage air outlet pipe 64 is provided with a plurality of through holes along the length direction. Hole, one end of the secondary air outlet pipe 65 is connected to one side of the branch air inlet secondary pipe 62, and the secondary air outlet pipe 65 is provided with multiple through holes along the length direction, one end of the tertiary air outlet pipe 66 is connected to one side of the branch air inlet tertiary pipe 63, and the tertiary air outlet pipe 66 is provided with multiple through holes along the length direction, the lengths of the branch air inlet primary pipe 61, the branch air inlet secondary pipe 62 and the branch air inlet tertiary pipe 63 are equal, and the volume of the branch air inlet secondary pipe 62 is two-thirds of that of the branch air inlet primary pipe 61, and the volume of the branch air inlet tertiary pipe 63 is one-third of that of the branch air inlet primary pipe 61.
[0032] Preferably, the lengths and volumes of the primary air outlet pipe 64 , the secondary air outlet pipe 65 , and the tertiary air outlet pipe 66 are the same.
[0033] Specifically, in the preferred embodiment of the present invention, the space of the furnace body 1 is divided into three parts, and the volumes of the mixed gases outputted from the three parts are consistent, thus avoiding the technical problem of uneven distribution of the mixed gases inside the furnace body in the prior art. At the same time, the technical scheme of the present invention is a preferred scheme for processing three groups of porous carbon precursors at the same time. If more groups of porous carbon precursors need to be processed, it is only necessary to adaptively adjust the branch air inlet pipe 6.
[0034] A method for preparing high-porosity porous carbon comprises the following steps: S1, aging and drying the porous carbon precursor; S2, placing the porous carbon precursor after drying on a corundum crucible, and placing the corundum crucible on the mixed gas inlet pipe 3 at the lower part of the sealing flange 2; S3, delivering a plurality of corundum crucibles filled with porous carbon precursors into the interior of the furnace body 1, while ensuring that the sample filling amount of each crucible at the front, middle and rear of the furnace body 1 is consistent, heating the furnace body 1 through a heating assembly, and introducing high-purity N2; S4. Under the protection of N2, the temperature inside the furnace body 1 is raised to 800-1200°C at 5°C / min, and maintained constant for insulation; S5. When the temperature rises to the constant temperature range, switch the mixed gas to activate the porous carbon precursor for 4-6 hours. After the insulation time is over, switch to high-purity N2. After cooling to room temperature, open the furnace body 1 and take out the high-porosity porous carbon.
[0035] Specifically, the porous carbon precursor is one of biomass carbon and phenolic resin-based porous carbon, the activation temperature is preferably 950° C., and the activation gas flow rate is preferably 400 ml / min-800 ml / min according to the activation gas selection.
[0036] A method for preparing high-porosity porous carbon was adopted, and a method for measuring the specific surface area and pore size of the porous carbon was adopted: N2 was used as the adsorbent, and TriStarⅡplus3030 was used. The specific surface area of the porous carbon was measured according to the national standard GB / T19587-2017, and the pore volume and pore size of the porous carbon were measured according to the national standard GB / T21650.2-2008.
[0037] The present invention selects three groups of processed high-porosity porous carbons, which are: Example 1: After activation, a corundum crucible sample is taken from the front of the furnace to obtain porous carbon with high porosity; Example 2: After activation, a corundum crucible sample is taken from the middle of the furnace to obtain porous carbon with high porosity; Example 3: After activation, a corundum crucible sample is taken from the rear of the furnace to obtain porous carbon with high porosity; At the same time, three groups of high-porosity porous carbons processed by traditional single-inlet tubular furnace were selected, namely: Comparative Example 1: After activation, a corundum crucible sample was taken from the front of the furnace to obtain porous carbon with high porosity; Comparative Example 2: After activation, a corundum crucible sample was taken from the middle of the furnace to obtain porous carbon with high porosity; Comparative Example 3: After activation, a corundum crucible sample was taken from the rear of the furnace to obtain porous carbon with high porosity.
[0038]
[0039] From the comparison between the above-mentioned embodiments and the comparative examples, it can be seen that the technical solution of the present invention has not only better processing effect than the prior art, but also better uniformity of products in the same batch.
[0040] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.
[0041] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0042] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0043] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples" or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.
[0044] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.
Claims
1. A uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon, characterized in that: include: Furnace body (1); A sealing flange (2) connected to one side of the furnace body (1), and a flange hole is provided on the surface of the sealing flange (2); A mixed gas inlet pipe (3) is installed on one side of the sealing flange (2) and is connected to the flange hole; An air outlet pipe (4); one end of which is connected to the other side of the furnace body (1); A vacuum pressure device (5) connected to the air outlet pipe (4); The outside of the furnace body (1) is a CVD tube furnace heating component.
2. The uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 1, characterized in that: The mixed gas intake pipe (3) comprises: A gas inlet pipe (31); A static mixing tube (32); one end of which is in communication with one end of the gas inlet tube (31); An activated gas inlet pipe (33); one end of which is in communication with one side of the gas inlet pipe (31); A mixed gas branch pipe (34) having one end in communication with the other end of the static mixing pipe (32) and the other end in communication with the flange hole.
3. The uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 2, characterized in that: The diameter of the gas inlet pipe (31) is greater than the diameter of the static mixing pipe (32); the end of the gas inlet pipe (31) on the side connected to the static mixing pipe (32) is conical; and the activated gas inlet pipe (33) is connected to the end of the conical end of the gas inlet pipe (31).
4. The uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 2, characterized in that: A plurality of groups of spiral blades (321) are installed inside the static mixing tube (32).
5. The uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 4, characterized in that: The rotation angles of two adjacent groups of spiral blades (321) differ by ninety degrees.
6. The uniform air intake CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 1, characterized in that: The mixed gas inlet pipe (3) is provided with two groups, one group is installed on the upper part of the sealing flange (2), and the other group is installed on the lower part of the sealing flange (2).
7. The uniform gas inlet CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 1, characterized in that: One end of the flange hole located inside the furnace body is connected to the branch air inlet pipe (6).
8. The uniform gas inlet CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 1, characterized in that: The branch air intake pipe (6) comprises: A branch air intake primary pipe (61), one end of which is in communication with the flange hole; A branch air intake secondary pipe (62); one end of which is in communication with the other end of the branch air intake primary pipe (61); A branch air intake three-stage pipe (63); one end of which is in communication with the other end of the branch air intake two-stage pipe (62); A first-stage air outlet pipe (64); one end of which is in communication with one side of the branched first-stage air inlet pipe (61), and the first-stage air outlet pipe (64) is provided with a plurality of through holes along the length direction; A secondary air outlet pipe (65); one end of which is in communication with one side of the branch air inlet secondary pipe (62), and the secondary air outlet pipe (65) is provided with a plurality of through holes along the length direction; A three-stage air outlet pipe (66); one end of which is in communication with one side of the branch air inlet three-stage pipe (63), and the three-stage air outlet pipe (66) is provided with a plurality of through holes along the length direction; The branch air intake primary pipe (61), the branch air intake secondary pipe (62) and the branch air intake tertiary pipe (63) are of equal length, and the volume of the branch air intake secondary pipe (62) is two thirds of the volume of the branch air intake primary pipe (61), and the volume of the branch air intake tertiary pipe (63) is one third of the volume of the branch air intake primary pipe (61).
9. The uniform gas inlet CVD tubular furnace structure for preparing high-porosity porous carbon according to claim 8, characterized in that: The first-stage air outlet pipe (64), the second-stage air outlet pipe (65) and the third-stage air outlet pipe (66) are all of the same length and volume.
10. A method for preparing high-porosity porous carbon, which is achieved by using a uniform gas-intake CVD tubular furnace structure for preparing high-porosity porous carbon according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1, aging and drying the porous carbon precursor; S2, placing the porous carbon precursor that has been dried on a corundum crucible, and placing the corundum crucible on the mixed gas inlet pipe (3) at the bottom of the sealing flange (2); S3, placing a corundum crucible containing a certain amount of porous carbon precursor into the furnace body (1) and sealing it through a sealing flange (2), heating the furnace body (1) through a heating component, and introducing high-purity N2; S4. Under the protection of N2, the temperature inside the furnace body (1) is raised to 800-1200°C at a rate of 5°C / min, and maintained constant for insulation; S5. When the temperature rises to a constant temperature range, switch the mixed gas to activate the porous carbon precursor for 4-6 hours. After the insulation time is over, switch to high-purity N2, cool to room temperature, open the furnace body (1) and take out the high-porosity porous carbon.