A tooling fixture for vertical boat loading and sintering of silicon carbide

Abstract

The present invention relates to the field of silicon carbide product processing, and specifically to a tooling fixture for vertical boat clamping and sintering of silicon carbide, including a tooling base, two U-shaped support plates symmetrically arranged left and right and fixedly installed on the upper side thereof, a clamping mechanism, and a heat conduction mechanism. Through the cooperation of the driving component and the linkage component, the operator only needs to push the handle rod to move the limiting block. At the same time, driving the linkage component by the driving component can also synchronously drive the blocking plate to rotate, completing the limiting fixation or release of the limiting fixation of the vertical silicon carbide boat. Compared with the traditional threaded pressing plate that needs to be locked point by point, the clamping steps are greatly simplified and the efficiency is significantly improved; in the present invention, the columns of the vertical silicon carbide boat are centered in the clamping grooves, effectively reducing the area of the vertical silicon carbide boat blocked. At the same time, the first heat collecting member and the second heat collecting member concentrate the heat flow to the blocked area of the vertical silicon carbide boat, effectively reducing the local temperature difference and further increasing the sintering uniformity.

Description

Technical Field

[0001] The present invention relates to the field of silicon carbide product processing, and specifically to a tooling fixture for clamping and sintering a silicon carbide vertical boat. Background Art

[0002] The silicon carbide vertical boat is a loading device, as Figure 8 shown, and is widely used in the production processes of fields such as semiconductors and ceramic materials. The silicon carbide vertical boat obtains excellent heat resistance and structural stability through the sintering process. During the sintering process, the clamping and fixing method of the silicon carbide vertical boat will directly affect the sintering effect of the workpiece.

[0003] Currently, for the clamping and fixing of the silicon carbide vertical boat, a mechanical structure mainly using a pressure plate connected by threads and a vertical plate in cooperation is adopted. Specifically, an operator needs to manually screw a bolt to make the pressure plate and the vertical plate jointly clamp the silicon carbide vertical boat to achieve the positioning and fixing of the silicon carbide vertical boat.

[0004] Although the clamping method of the above-mentioned existing tooling fixture can provide a basic limiting function, it relies on multiple thread pairs to lock the pressure plate point by point, and cannot achieve single-action to linkage control. The clamping steps are cumbersome, resulting in low clamping efficiency, being difficult to meet the rapid operation requirements of mass production, and being prone to loose clamping due to the operation error of screwing the bolt.

[0005] In addition, the above-mentioned existing tooling fixture does not design a heat conduction optimization scheme for the part of the silicon carbide vertical boat blocked by the pressure plate and the vertical plate, resulting in a poor contact effect between the part of the silicon carbide vertical boat blocked by the pressure plate and the vertical plate and the heat source, and then causing uneven heat distribution of the silicon carbide vertical boat during sintering, affecting the sintering quality.

[0006] In summary, the traditional threaded pressure plate structure is difficult to meet the process requirements of rapid installation and disassembly, and there are problems affecting heat distribution. Therefore, there is an urgent need for a tooling fixture integrating rapid clamping and directional heat conduction to improve production efficiency and product sintering consistency. Summary of the Invention

[0007] In order to solve the above technical problems, the technical solution adopted by the present invention is: a tooling fixture for clamping and sintering a silicon carbide vertical boat, including a tooling seat and two U-shaped support plates fixedly installed on the upper side thereof and arranged symmetrically left and right. This tooling fixture further includes: a clamping mechanism and a heat conduction mechanism; the clamping mechanism includes a guide shaft, a driving component, two rotating rods and a linkage component. The guide shaft is movably arranged in the vertical section of the U-shaped support plate. A limiting block is fixedly installed on the upper side of the guide shaft. Card slots for the upright columns of the vertical boat to penetrate are opened on the upper side of the vertical section and the middle of the horizontal section of the U-shaped support plate and the lower side of the limiting block. The two rotating rods are symmetrically arranged front and back and rotatably arranged on the horizontal section of the U-shaped support plate. A blocking plate is fixedly installed at the upper end of one of the rotating rods.

[0008] The driving component moves the limiting block to be clamped with the vertical section of the U-shaped support plate and fixes the corresponding upright column of the vertical boat, and the driving component cooperates with the linkage component to rotate and reverse the blocking plate and fix the corresponding upright column of the vertical boat.

[0009] The heat conduction mechanism includes a number of supporting pins for centering the upright column in the clamping groove, and a first heat collecting member and a second heat collecting member for concentrating the heat flow into the clamping groove.

[0010] Preferably, the driving component includes two track grooves opened at equal intervals along the circumferential direction of the guide shaft on its outer ring wall. Two protruding columns sliding inside the corresponding track grooves are fixedly installed inside the vertical section of the U-shaped support plate. A pushing pipe fitting is movably sleeved on the lower side of the guide shaft. A guide groove is opened on the outer ring wall of the lower side of the guide shaft. The pushing pipe fitting slides in the guide groove through the convex block fixedly installed inside it.

[0011] Preferably, the track groove is composed of two vertical sections staggered by 90 degrees and an arc section communicating between the vertical sections. The guide groove is composed of two annular sections directly opposite to each other up and down and a vertical section communicating between the annular sections. The annular sections of the guide groove are coaxial with the guide shaft and the pushing pipe fitting. A handle rod is fixedly installed on the outer side of the pushing pipe fitting.

[0012] Preferably, a rotating locking rod is rotatably arranged inside the vertical section of the U-shaped support plate. Two symmetrically arranged clamping blocks located above the U-shaped support plate are fixedly installed on the upper side of the rotating locking rod. A fixed pipe fitting is fixedly installed at the position corresponding to the rotating locking rod on the limiting block.

[0013] Preferably, two sliding grooves for the clamping blocks to slide are opened at equal intervals along the circumferential direction on the inner side surface of the fixed pipe fitting. The sliding groove is integrally in an L-shaped structure with the vertical section at the bottom and the horizontal section at the top.

[0014] Preferably, a connecting support plate is rotatably arranged on the outer side of the pushing pipe fitting. The connecting support plate drives the rotating locking rod to rotate through the cooperation of a gear-rack transmission structure and a worm-gear transmission structure.

[0015] Preferably, the linkage components correspond to the rotating rods one by one; the linkage component includes a linkage rod slidably arranged up and down inside the guide shaft and rotatably connected to the U-shaped support plate. Crank plates are fixedly installed on the outer ring walls of the lower sides of the linkage rod and the corresponding rotating rod, and a connecting rod member is jointly hinged between two corresponding crank plates.

[0016] Preferably, a linkage locking rod is fixedly installed at the upper end of the rear rotating rod. A locking groove for the linkage locking rod to move is opened on the blocking plate; the locking groove is composed of an arc section structure and a sector section structure. The linkage locking rod is in an L-shaped structure. After the rear rotating rod drives the linkage locking rod to rotate, the horizontal section of the linkage locking rod blocks inside the sector section of the locking groove, so that the position of the blocking plate is locked.

[0017] Preferably, the heat conduction mechanism further includes a bushing assembly; the bushing assembly includes a first lining plate member disposed in the vertical section of the U-shaped support plate and the clamping groove on the limiting block, and a second lining plate member is disposed in the clamping groove of the horizontal section of the U-shaped support plate. The first heat collecting member is fixedly connected to the left and right sides of the first lining plate member, and the second heat collecting member is fixedly connected to the left and right sides of the second lining plate member. A plurality of supporting nails are fixedly installed on the inner sides of the first lining plate member and the second lining plate member.

[0018] The beneficial effects of the present invention are as follows: First, through the cooperation of the driving component and the linkage component, the operator only needs to push the handle rod to move the limiting block. At the same time, driving the linkage component by the driving component can also synchronously drive the blocking plate to rotate, completing the limiting and fixing of the silicon carbide vertical boat or the release of the limiting and fixing. Compared with the traditional threaded pressing plate that needs to be locked point by point, the clamping steps are greatly simplified and the efficiency is significantly improved.

[0019] Second, after the driving component moves the position of the limiting block, it can also automatically lock the limiting block when the limiting block is pressed in place through the cooperation of the locking rod, the clamping block and the sliding groove, avoiding manual adjustment errors, ensuring clamping stability, and the movement and locking of the limiting block are completed continuously, further simplifying the clamping steps and improving the clamping efficiency.

[0020] Third, under the cooperation of the driving component and the linkage component, moving the front handle rod completes the movement of the front limiting block and the blocking plate, and moving the rear handle rod completes the movement of the rear limiting block and the locking rod, so that the linkage locking rod blocks and locks the blocking plate, thus eliminating the need for separate locking of the blocking plate, further simplifying the clamping steps.

[0021] Fourth, the present invention makes the column of the silicon carbide vertical boat be centered in the clamping groove, effectively reducing the area of the silicon carbide vertical boat blocked. At the same time, the first heat collecting member and the second heat collecting member concentrate the heat flow to the blocked area of the silicon carbide vertical boat, effectively reducing the local temperature difference, further increasing the sintering uniformity and improving the sintering quality. Description of the Drawings

[0022] The present invention will be further described below with reference to the drawings and embodiments.

[0023] Figure 1 It is the overall structural schematic diagram of the present invention when clamping the silicon carbide vertical boat.

[0024] Figure 2 It is the structural schematic diagram of the U-shaped support plate, the clamping mechanism and the heat conduction mechanism in the present invention.

[0025] Figure 3 It is a partial cross-sectional view of the U-shaped support plate and the driving component in the present invention.

[0026] Figure 4 It is a partial cross-sectional view of the guide shaft and the pushing pipe fitting in the present invention.

[0027] Figure 5 It is a partial cross-sectional view of the rotating locking rod and the fixed pipe fitting when they are not connected together in the present invention.

[0028] Figure 6 It is a partial cross-sectional view of the U-shaped support plate, the blocking plate, the rotating rod and the linkage assembly in the present invention.

[0029] Figure 7 It is a schematic structural view of the first heat collecting part, the first lining plate part and the supporting nails in the present invention.

[0030] Figure 8 It is a schematic structural view of the silicon carbide vertical boat.

[0031] In the figure: 1, tooling seat; 2, U-shaped support plate; 3, clamping mechanism; 4, heat conduction mechanism; 31, guide shaft; 32, limit block; 33, drive assembly; 34, rotating rod; 35, blocking plate; 36, linkage assembly; 37, rotating locking rod; 38, connecting support plate; 41, bushing assembly; 42, first heat collecting part; 43, second heat collecting part; 331, track groove; 332, protruding column; 333, pushing pipe fitting; 334, guide groove; 335, handle rod; 336, limit groove; 361, linkage rod; 362, crank plate; 363, connecting rod part; 364, locking groove; 365, linkage locking rod; 371, clamping block; 372, fixed pipe fitting; 373, sliding groove; 411, first lining plate part; 412, supporting nail; 413, second lining plate part. Specific Embodiments

[0032] The embodiments of the present invention will be described in detail below. The embodiments described below are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention. For those without specific technical or conditions noted in the embodiments, the techniques or conditions described in the literature in the art or according to the product specifications are followed.

[0033] Refer to Figure 1 、 Figure 2 and Figure 8 , a tooling fixture for clamping and sintering a silicon carbide vertical boat, comprising a tooling seat 1, on the upper side of which two U-shaped support plates 2 arranged symmetrically left and right and used for limiting and supporting the silicon carbide vertical boat are fixedly installed. A clamping mechanism 3 for quickly clamping the silicon carbide vertical boat and a heat conduction mechanism 4 for conducting heat to the position of the silicon carbide vertical boat blocked by the U-shaped support plate 2 are arranged on the U-shaped support plate 2.

[0034] When the silicon carbide vertical boat needs to be sintered, first place the silicon carbide vertical boat on the tooling seat 1, so that the upright posts on the silicon carbide vertical boat are placed on the U-shaped support plate 2. Subsequently, the operator can quickly and conveniently fix the silicon carbide vertical boat corresponding to the U-shaped support plate 2 through the clamping mechanism 3. Then, the operator moves the tooling seat 1 to transfer the silicon carbide vertical boat into the sintering furnace for sintering processing. During sintering, the heat conduction mechanism 4 can centrally guide the heat flow to the area of the silicon carbide vertical boat blocked by the U-shaped support plate 2, effectively reducing the local temperature difference and improving the sintering quality.

[0035] After sintering is completed, the operator releases the fixation of the silicon carbide vertical boat by operating the clamping mechanism 3 in the reverse direction. Subsequently, a new silicon carbide vertical boat is clamped on this tooling fixture again, so as to continuously sinter the silicon carbide vertical boat.

[0036] Refer to Figure 1 、 Figure 2 and Figure 3 As shown in, the clamping mechanism 3 includes a guide shaft 31 movably arranged in the vertical section of the U-shaped support plate 2. A limit block 32 located outside the U-shaped support plate 2 is fixedly installed on the upper side of the guide shaft 31. The clamping mechanism 3 further includes a driving assembly 33 for controlling the movement of the limit block 32. Clamping slots for the upright posts of the vertical boat to pass through are provided on the upper side of the vertical section of the U-shaped support plate 2, the lower side of the limit block 32, and the middle of the horizontal section of the U-shaped support plate 2.

[0037] In the initial state, the upper side surface of the guide shaft 31 is located above the U-shaped support plate 2, so that the guide shaft 31 drives the limit block 32 to be in a position away from the U-shaped support plate 2 upward, and the length direction of the limit block 32 is perpendicular to the horizontal section of the U-shaped support plate 2 on the horizontal plane, so that the limit block 32 does not block the space above the vertical section of the U-shaped support plate 2. When clamping the silicon carbide vertical boat, the operator places the silicon carbide vertical boat inside the tooling seat 1 and makes the three upright posts of the silicon carbide vertical boat simultaneously placed in the corresponding clamping slots.

[0038] Refer to Figure 1 、 Figure 2 、 Figure 3 and Figure 4 As shown in, the driving assembly 33 includes two track grooves 331 equidistantly arranged along the circumferential direction of the guide shaft 31 on its outer ring wall. Two protruding columns 332 sliding in the corresponding track grooves 331 are fixedly installed inside the vertical section of the U-shaped support plate 2. A pushing pipe fitting 333 is movably sleeved on the lower side of the guide shaft 31. A guide groove 334 is provided on the outer ring wall of the lower side of the guide shaft 31. The pushing pipe fitting 333 slides in the guide groove 334 through a convex block fixedly installed inside it.

[0039] Continue to refer to Figure 1 、 Figure 2 、 Figure 3 and Figure 4, the track groove 331 consists of two vertical segments, one above the other, that are staggered by ninety degrees and an arc segment that connects the two vertical segments. The guiding groove 334 consists of two opposite annular segments, one above the other, and a vertical segment that connects the two annular segments. The annular segments of the guiding groove 334 are coaxial with the guiding shaft 31 and the pushing pipe fitting 333. A handle rod 335 is fixedly installed on the outer side of the pushing pipe fitting 333.

[0040] In the initial state, the pushing pipe fitting 333 drives the convex block thereon to be located inside the upper annular segment of the guiding groove 334, and the convex block of the pushing pipe fitting 333 is staggered by ninety degrees from the vertical segment of the guiding groove 334. When the three columns of the silicon carbide vertical boat (refer to Figure 8 ) are simultaneously placed inside the corresponding clamping slots, the operator manually moves the front handle rod 335 downward. The front handle rod 335 drives the front pushing pipe fitting 333 to move downward. The front pushing pipe fitting 333 drives the guiding shaft 31 to move downward synchronously through the cooperation between the convex block thereon and the upper annular segment of the guiding groove 334.

[0041] The guiding shaft 31 synchronously drives the limiting block 32 thereon to move downward. At the same time, the guiding shaft 31 drives the track groove 331 thereon to move, so that the protruding column 332 initially slides inside the vertical segment on the lower side of the corresponding track groove 331. When the arc segment of the track groove 331 slides in cooperation with the protruding column 332, the guiding shaft 31 will rotate ninety degrees while moving downward, so that the guiding shaft 31 drives the limiting block 32 to rotate until the length direction thereof is parallel to the horizontal segment of the U-shaped support plate 2.

[0042] At this time, the guiding shaft 31 drives the vertical segment of the guiding groove 334 thereon to rotate to correspond to the convex block of the pushing pipe fitting 333, that is, the convex block of the pushing pipe fitting 333 is located at the position where the vertical segment of the guiding groove 334 transitions to the upper annular segment. When the pushing pipe fitting 333 continues to move downward, the guiding shaft 31 moves downward synchronously with the pushing pipe fitting 333 under the action of gravity, so that the protruding column 332 slides inside the vertical segment on the lower side of the corresponding track groove 331, and finally the limiting block 32 is clamped on the upper side of the corresponding vertical segment of the U-shaped support plate 2, and the limiting block 32 blocks and limits the column at the corresponding position of the silicon carbide vertical boat.

[0043] Refer to Figure 1 、 Figure 2 and Figure 7, the heat conduction mechanism 4 includes a first heat collecting member 42 and a second heat collecting member 43 detachably arranged on the U-shaped support plate 2 through a bushing assembly 41, and a support pin 412 for implementing multi-point abutting and limiting on the upright posts of the vertical boat. Both the first heat collecting member 42 and the second heat collecting member 43 are used for concentrating and guiding the heat flow. The bushing assembly 41 includes a first lining plate member 411 and a second lining plate member 413. The first lining plate member 411 is fixedly installed in the clamping grooves on the vertical section of the U-shaped support plate 2 and the limiting block 32 by means of countersunk head screws. The second lining plate member 413 is fixedly installed in the clamping groove on the horizontal section of the U-shaped support plate 2 by means of countersunk head screws. The first heat collecting member 42 is fixedly connected to both the left and right sides of the first lining plate member 411, and the second heat collecting member 43 is fixedly connected to both the left and right sides of the second lining plate member 413. A plurality of support pins 412 are fixedly installed on the inner sides of the first lining plate member 411 and the second lining plate member 413.

[0044] The operator first fixedly connects the first lining plate member 411 to the clamping grooves on the vertical section of the U-shaped support plate 2 and the limiting block 32 by means of countersunk head screws, and at the same time fixedly connects the second lining plate member 413 to the clamping groove on the horizontal section of the U-shaped support plate 2 by means of countersunk head screws. When the limiting block 32 is clamped on the upper side of the corresponding vertical section of the U-shaped support plate 2, the support pin 412 on the corresponding first lining plate member 411 driven by the limiting block 32 abuts and limits the corresponding upright post of the silicon carbide vertical boat. Similarly, the support pin 412 of the corresponding U-shaped support plate 2 also abuts and limits the upright post of the silicon carbide vertical boat.

[0045] At the same time, the first heat collecting member 42 on the limiting block 32 and the first heat collecting member 42 on the U-shaped support plate 2 are spliced together to form a funnel-shaped structure. The funnel-shaped structure can concentrate and guide the heat flow into the corresponding clamping groove. Under the abutting and limiting of the support pin 412 on the upright post of the silicon carbide vertical boat, the upright posts of the silicon carbide vertical boat are arranged in the middle of the clamping groove. There are a large number of gaps between the first lining plate member 411, the second lining plate member 413 and the corresponding upright posts, so that the heat flow guided into the corresponding clamping groove can cover the shielded area of the silicon carbide vertical boat, effectively reducing the local temperature difference and improving the sintering quality.

[0046] Refer to Figure 1 、 Figure 2 and Figure 6 , the clamping mechanism 3 further includes a rotating rod 34 rotatably arranged on the horizontal section of the U-shaped support plate 2 and a linkage assembly 36. The rotating rod 34 and the linkage assembly 36 are both arranged symmetrically front and back. The upper end surface of the front rotating rod 34 penetrates through the horizontal section of the U-shaped support plate 2 and is fixedly installed with a blocking plate 35. The driving assembly 33 makes the blocking plate 35 rotate through the front linkage assembly 36.

[0047] Refer to Figure 1 、 Figure 2 、 Figure 3 andFigure 6 The linkage assembly 36 includes a linkage rod 361 that is slidably arranged up and down inside the guide shaft 31 and is rotatably connected to the U-shaped support plate 2. Crank plates 362 are fixedly installed on the outer circumferential walls of the lower sides of the linkage rod 361 and the corresponding rotating rods 34. The crank plates 362 on the linkage rod 361 and the crank plates 362 on the corresponding rotating rods 34 are arranged parallel to each other and are hinged to each other through a connecting rod member 363. The crank plates 362 are located below the pushing pipe member 333.

[0048] In the initial state, the length direction of the blocking plate 35 is perpendicular to the horizontal section of the U-shaped support plate 2 on the horizontal plane, so that the upright posts of the silicon carbide vertical boat can be smoothly placed into the clamping grooves on the horizontal section of the U-shaped support plate 2. When the guide shaft 31 starts to rotate while moving downward, the guide shaft 31 drives the linkage rod 361 to rotate synchronously by 90 degrees. The linkage rod 361 drives the rotating rod 34 to rotate synchronously through the crank plates 362 and the connecting rod member 363, so that the rotating rod 34 drives the blocking plate 35 to rotate to be parallel to the horizontal section of the U-shaped support plate 2, thereby enabling the blocking plate 35 to block and limit the corresponding upright posts of the silicon carbide vertical boat.

[0049] Refer to Figure 3 and Figure 5 A rotating locking rod 37 is rotatably arranged inside the vertical section of the U-shaped support plate 2. Two symmetrically arranged clamping blocks 371 are fixedly installed on the upper side of the rotating locking rod 37 and are located above the U-shaped support plate 2. A fixed pipe member 372 is fixedly installed at the position corresponding to the rotating locking rod 37 on the limiting block 32.

[0050] Refer to Figure 2 、 Figure 3 and Figure 5 Two sliding grooves 373 for the clamping blocks 371 to slide are equidistantly arranged along the circumferential direction on the inner side surface of the fixed pipe member 372. The sliding grooves 373 are integrally in an L-shaped structure with the vertical section below and the horizontal section above. A connecting support plate 38 is rotatably arranged on the outer side of the pushing pipe member 333. The connecting support plate 38 drives the rotating locking rod 37 to rotate through the cooperation of a gear-rack transmission structure and a worm-gear transmission structure.

[0051] The worm-gear transmission structure in this embodiment includes a worm wheel fixedly installed on the lower side of the coaxially rotating locking rod 37. A worm that meshes with the corresponding worm wheel is rotatably arranged inside the U-shaped support plate 2. The gear-rack transmission structure includes a gear fixedly installed on one side of the worm close to the corresponding connecting support plate 38. A rack that meshes with the gear is fixedly installed on the connecting support plate 38. When the pushing pipe member 333 is in the initial state, the rack is located above the gear and the gear does not mesh with the rack.

[0052] It should be noted that for the convenience of installation inside the U-shaped support plate 2, the U-shaped support plate 2 adopts an assembled structure and is assembled into an integral body by welding.

[0053] When the pushing pipe fitting 333 is moved downward, it will drive the connecting support plate 38 thereon to move downward synchronously. When the limiting block 32 rotates to be parallel to the horizontal section of the U-shaped support plate 2, the fixed pipe fitting 372 and the corresponding rotating locking rod 37 are coaxial. And at this time, the clamping block 371 on the rotating locking rod 37 corresponds to the vertical section of the sliding groove 373 on the fixed pipe fitting 372.

[0054] When the limiting block 32 is clamped on the upper side of the corresponding vertical section of the U-shaped support plate 2, the convex block of the pushing pipe fitting 333 is located at the position where the vertical section of the guiding groove 334 transitions to the upper annular section. The limiting block 32 drives the fixed pipe fitting 372 thereon to be sleeved on the upper side of the corresponding rotating locking rod 37, and at the same time, the clamping block 371 is moved into the vertical section of the corresponding sliding groove 373. At this time, the limiting block 32 is blocked by the U-shaped support plate 2 and cannot move downward anymore.

[0055] Subsequently, continue to move the pushing pipe fitting 333 downward. The pushing pipe fitting 333 drives the convex block thereon to move downward along the vertical section of the guiding groove 334 into the lower annular section of the guiding groove 334. During this process, the pushing pipe fitting 333 drives the rack to engage with the gear and drive the gear to rotate through the connecting support plate 38. The gear drives the worm wheel to rotate through the worm, and the worm wheel drives the rotating locking rod 37 to rotate by ninety degrees, so that the rotating locking rod 37 drives the clamping block 371 thereon to rotate into the horizontal section of the sliding groove 373, thereby locking the rotating locking rod 37 and the fixed pipe fitting 372 into a whole, and further locking the front limiting block 32 on the U-shaped support plate 2.

[0056] Refer to Figure 2 and Figure 6 As shown in, the upper end surface of the rear rotating rod 34 penetrates through the horizontal section of the U-shaped support plate 2 and is fixedly installed with a linkage locking rod 365. A locking groove 364 for the movement of the linkage locking rod 365 is provided on the blocking plate 35. The locking groove 364 is composed of an arc section structure and a sector section structure. The linkage locking rod 365 is in an L-shaped structure. The horizontal section of the linkage locking rod 365 rotates inside the sector section of the locking groove 364, thereby blocking and locking the position of the blocking plate 35.

[0057] In the initial state, the horizontal section of the linkage locking rod 365 is arranged horizontally from left to right. When the blocking plate 35 rotates to be parallel to the horizontal section of the U-shaped support plate 2, the blocking plate 35 drives the locking groove 364 thereon to move to the position of the linkage locking rod 365, so that the linkage locking rod 365 is located in the sector section of the locking groove 364.

[0058] When locking the front limiting block 32 on the U-shaped support plate 2, the operator manually pulls down the rear handle rod 335. By the same principle as above, the rear rotating rod 34 drives the linkage locking rod 365 to rotate, so that the horizontal section of the linkage locking rod 365 rotates forward to be arranged longitudinally in the front-rear direction, and the horizontal section of the linkage locking rod 365 blocks on the fan-shaped section of the locking groove 364, thereby locking the blocking plate 35 on the U-shaped support plate 2.

[0059] Refer to Figure 1 , Figure 2 and Figure 3 , it should be noted that a limiting groove 336 for the sliding of the handle rod 335 is formed on the U-shaped support plate 2. The limiting groove 336 is composed of a vertical section and a horizontal section communicated with the lower side of the vertical section for the handle rod 335 to rotate by 90 degrees. When the handle rod 335 moves downward to the connection between the horizontal section and the vertical section of the limiting groove 336, the operator manually rotates the handle rod 335 into the horizontal section of the limiting groove 336 to restrict the upward movement of the handle rod 335. When the handle rod 335 rotates, the convex block on the pushing pipe fitting 333 drives to move along the annular section on the lower side of the guiding groove 334. It should be noted that in the initial state, the length direction of the limiting block 32 is vertically arranged with the horizontal section of the U-shaped support plate 2 on the horizontal plane. At this time, the handle rod 335 is located above the vertical section of the limiting groove 336 and is under the control of the operator. In addition, a horizontal section can also be communicated with the upper side of the vertical section of the limiting groove 336. In this way, when the limiting block 32 is in the initial state, the handle rod 335 can be limited in the upper horizontal section of the limiting groove 336 without the need for the operator to control. Of course, the specific shape of the limiting groove 336 can be selected and set according to actual needs.

[0060] Subsequently, the silicon carbide vertical boat is transferred into the sintering furnace for sintering processing by moving the tooling seat 1. During sintering, the first heat concentrating member 42 concentrates and guides the heat flow to the position between the first lining member 411 and the column of the silicon carbide vertical boat, and the second heat concentrating member 43 concentrates and guides the heat flow to the position between the second lining member 413 and the column of the silicon carbide vertical boat, thereby effectively reducing the local temperature difference and improving the sintering quality. After sintering is completed, the tooling seat 1 is moved out of the sintering furnace for cooling. After cooling is completed, by first moving up the rear pushing pipe fitting 333 and then moving up the front pushing pipe fitting 333, the limiting block 32 and the blocking plate 35 are moved to the initial position, thereby facilitating the replacement of the silicon carbide vertical boat.

[0061] Refer to Figures 1 to 8, when sintering the silicon carbide vertical boat, the specific working process is as follows: The first step; Operating the front handle rod 335: The operator places the three columns of the silicon carbide vertical boat in the corresponding clamping grooves at the same time. First, move the front handle rod 335 downward, so that the guide shaft 31 drives the limit block 32 to move downward and rotate 90 degrees at the same time. At the same time, the guide shaft 31 also drives the baffle 35 to rotate to be parallel to the horizontal section of the U-shaped support plate 2 through the front rotating rod 34 and the linkage assembly 36. The baffle 35 blocks and limits the corresponding columns of the silicon carbide vertical boat, and the limit block 32 drives the fixed pipe fitting 372 thereon to move to the coaxial position of the rotating locking rod 37 at the corresponding position. Then continue to move the front handle rod 335 downward, so that the limit block 32 is clamped on the upper side of the corresponding vertical section of the U-shaped support plate 2, and at the same time, the clamping block 371 moves into the vertical section of the corresponding sliding groove 373. Subsequently, continue to move the front push pipe fitting 333 downward. The push pipe fitting 333 drives the clamping block 371 thereon to rotate into the horizontal section of the sliding groove 373 through the rotating locking rod 37, so as to lock the rotating locking rod 37 and the fixed pipe fitting 372 into a whole, and further lock the front limit block 32 on the U-shaped support plate 2.

[0062] The second step; Operating the rear handle rod 335: The operator manually pulls the rear handle rod 335 downward. The principle is the same as above, so that the rear limit block 32 limits the corresponding columns of the silicon carbide vertical boat. At the same time, the rear rotating rod 34 drives the horizontal section of the linkage locking rod 365 to rotate and block on the fan-shaped section of the locking groove 364, and further locks the baffle 35 on the U-shaped support plate 2.

[0063] The third step; Move the silicon carbide vertical boat into the sintering furnace for sintering processing by moving the tooling seat 1. During sintering, the first heat concentrating part 42 concentrates and guides the heat flow to the position between the first lining part 411 and the columns of the silicon carbide vertical boat, and the second heat concentrating part 43 concentrates and guides the heat flow to the position between the second lining part 413 and the columns of the silicon carbide vertical boat, so as to effectively reduce the local temperature difference.

[0064] The fourth step; Move the tooling seat 1 out of the sintering furnace for cooling. After cooling is completed, first move the rear handle rod 335, and then move the front handle rod 335 backward, so that the limit block 32 and the baffle 35 move to the initial position, and then remove the silicon carbide vertical boat.

[0065] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention, and still be covered by the protection scope of the present invention.

Claims

1. A fixture for vertical boat-mounted sintering of silicon carbide, comprising a fixture seat and two symmetrically arranged U-shaped support plates fixedly mounted on its upper side, characterized in that: Also includes: The clamping mechanism comprises a guide shaft, a driving assembly, two rotating rods and a linkage assembly; The guide shaft is movably arranged in the vertical section of the C-shaped support plate, a limit block is fixedly installed on the upper side of the guide shaft, and a clamping groove for the column of the vertical boat to penetrate is opened on the upper side of the vertical section of the C-shaped support plate, the middle part of the horizontal section, and the lower side of the limit block; The two rotating rods are symmetrically arranged front and back and are rotatably arranged on the horizontal section of the U-shaped support plate, and a blocking plate is fixedly installed on the upper end of one of the rotating rods; The driving assembly moves the limit block to engage with the vertical section of the U-shaped support plate and fix the corresponding column of the vertical boat, and the driving assembly cooperates with the linkage assembly to rotate the blocking plate and fix the corresponding column of the vertical boat; The heat conduction mechanism includes a plurality of support pins for arranging the upright column in the center of the slot, and a first heat collecting member and a second heat collecting member for concentrating the heat flow into the slot; The driving assembly comprises two track grooves which are arranged at equal intervals on the outer ring wall of the guide shaft along the circumference direction, two protruding columns which slide in the corresponding track grooves are fixedly installed inside the vertical section of the U-shaped support plate, a push pipe is provided on the movable sleeve at the lower side of the guide shaft, and a guide groove is arranged on the outer ring wall at the lower side of the guide shaft, and the push pipe slides in the guide groove through a protruding block which is fixedly installed inside the push pipe; A rotation locking rod is rotatably arranged inside the vertical section of the C-shaped support plate, and two symmetrically arranged positioning blocks located above the C-shaped support plate are fixedly installed on the upper side of the rotation locking rod, and a fixed pipe is fixedly installed on the position of the limiting block corresponding to the rotation locking rod; The outer side of the push pipe is provided with a connecting support plate, and the connecting support plate drives the rotation locking rod to rotate through the gear rack transmission structure and the worm gear transmission structure; The linkage assembly corresponds to the rotating rod one by one; the linkage assembly includes a linkage rod that is slidably arranged inside the guide shaft and is rotatably connected to the C-shaped support plate. The lower outer ring wall of the linkage rod and the corresponding rotating rod is fixedly installed with a crank plate, and a connecting rod is hinged between the crank plates at two corresponding positions.

2. A fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: The track groove is composed of two upper and lower vertical sections staggered at 90 degrees and an arc section connected between the vertical sections. The guide groove is composed of two upper and lower opposite annular sections and a vertical section connected between the annular sections. The annular section of the guide groove is coaxial with the guide shaft and the pushing pipe fitting, and a handle rod is fixedly installed on the outside of the pushing pipe fitting.

3. The fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: Two sliding grooves for the positioning block to slide are arranged at equal intervals on the inner side surface of the fixed pipe along its circumferential direction, and the sliding groove is an L-shaped structure with the vertical section at the bottom and the horizontal section at the top.

4. A fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: A linkage locking rod is fixedly mounted on the upper end of the rotating rod at the rear side, and a locking groove for the linkage locking rod to move is provided on the blocking plate.

5. A fixture for vertical boat sintering of silicon carbide according to claim 4, characterized in that: The locking groove is composed of an arc segment structure and a fan-shaped segment structure, and the linkage locking rod is an L-shaped structure. After the rear rotating rod drives the linkage locking rod to rotate, the horizontal section of the linkage locking rod is blocked in the fan-shaped segment of the locking groove, so that the position of the blocking plate is locked.

6. The fixture for vertical boat sintering of silicon carbide according to claim 1, characterized in that: The heat conduction mechanism also includes a bushing assembly; the bushing assembly includes a No. 1 lining plate member arranged in a positioning groove on the vertical section of the C-shaped support plate and the limit block, a No. 2 lining plate member is arranged in the positioning groove of the horizontal section of the C-shaped support plate, a No. 1 heat collecting member is fixedly connected to the left and right sides of the No. 1 lining plate member, and a No. 2 heat collecting member is fixedly connected to the left and right sides of the No. 2 lining plate member, and a plurality of supporting nails are fixedly installed on the inner sides of the No. 1 lining plate member and the No. 2 lining plate member.

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