Ion-thinning sample stage and thinning apparatus thereof

Abstract

The application discloses an ion thinning sample stage and a thinning instrument thereof, wherein a sample clamping unit clamps and fixes a sample to be thinned; a rotating thinning unit rotates the sample clamped by the sample clamping unit; an ion beam bombards upper and lower surfaces of the sample to be thinned to thin the sample; a position adjusting unit adjusts the height and angle of the clamped sample to ensure that the ion beam bombards the center of the sample to be thinned, and uniformly thins the sample to obtain a thin film. The application realizes smooth rotation of the sample stage, uniformly and effectively thins the sample, the effective inclination angle is 7-15 degrees, a thin area is formed around the center point under the transmission of the ion beam, the placement requirement of the sample is reduced, and the clamping of the sample is more stable.

Description

Technical Field

[0001] The present invention relates to the technical field of material sample preparation, and more specifically, to an ion thinning sample stage and a thinning instrument thereof. Background Art

[0002] The ion thinning instrument is a widely used instrument in materials science. Designed for transmission electron microscopy (TEM) sample preparation, it boasts rapid sample preparation speeds and can produce high-quality TEM (Transmission Electron Microscope) samples with minimal effort. Its operating principle is as follows: In a high vacuum, two opposing cold cathode ion guns deliver high-energy argon ion streams, bombarding both sides of a rotating sample at a specific angle. When the bombardment energy exceeds the binding energy of the surface atoms of the sample, the argon ions cause the surface atoms to be sputtered. After a long period of continuous bombardment and sputtering, a hole is eventually formed in the center of the sample. The sample becomes extremely thin at the edge of the hole and transparent to the electron beam, thus forming a thin film.

[0003] The tilt angle of existing ion thinning instruments is mainly 5-15 degrees, the thin area finally formed on the sample is small, and when the sample is clamped, the position adjustment of the sample stage, the integrity of the sample, the stability of the sample stage, and the heat dissipation of the sample stage cannot be well guaranteed.

[0004] Therefore, the problems existing in the prior art need to be further improved and developed. Summary of the Invention

[0005] (1) Purpose of the invention: In order to solve the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ion thinning sample stage and a thinning instrument thereof, so as to reduce the inclination angle of the ion thinning sample stage and thereby increase the range of the sample thinning area.

[0006] (II) Technical Solution: In order to solve the above technical problems, the present technical solution provides an ion thinning sample stage, comprising a sample clamping unit, a rotation thinning unit, and a position adjustment unit; the sample clamping unit clamps and fixes the sample to be thinned;

[0007] The rotating thinning unit rotates the sample clamped by the sample clamping unit, and bombards the upper and lower surfaces of the sample to be thinned with ion beams to thin the sample;

[0008] The position adjustment unit adjusts the height and angle of the clamped sample to ensure that the ion beam bombards the center of the sample to be thinned, uniformly thins the sample, and obtains a thin film sample.

[0009] Preferably, the sample clamping unit includes a sample holder, a spring clamp and a clamping piece;

[0010] The sample holder includes two layers, a first sample holder and a second sample holder; the inner ring of the second sample holder is provided with a ring-shaped protruding end, the height of the protruding end is equal to the thickness of the first sample holder, and the two form a complete ring;

[0011] The annular inner diameter side of the second sample holder is also provided with an oblique groove and a clamping platform connected to the oblique groove. The clamp is placed on the clamping platform through the oblique groove. The upper surface of the clamping platform is also provided with a spring clamp.

[0012] Preferably, the clips are two identical convex double-eye masks, and the clips are in the shape of a ring as a whole, including a central hole and a notch;

[0013] The outer diameter of the clip is equal to the inner diameter of the connection between the inclined groove and the clip platform.

[0014] Preferably, the angle between the center of the clip and the line connecting the outer circumference of the clip is 1-10°; the diameter of the center hole is greater than 0.5 mm and less than 3 mm.

[0015] Preferably, the rotary thinning unit comprises a rotating wheel, a corner ring, and a ball disposed on the corner ring; the rotating wheel is disposed on a side of the second sample holder away from the first sample holder;

[0016] The corner ring is annular and is located between the first sample holder and the second sample holder. The outer diameter of the corner ring is equal to the outer diameter of the sample holder, and the inner diameter is equal to the outer diameter of the protruding end of the second sample holder.

[0017] The corner ring is provided with n rows of balls, where n≥2, and the balls are evenly arranged at equal intervals along the circumferential direction on the corner ring.

[0018] Preferably, the balls are symmetrically arranged along the center of the rotating wheel, and the center of the rotating wheel and the center of the line connecting the balls are located on the same vertical line.

[0019] Preferably, the position adjustment unit includes a support base and an adjustment device located on the support base; the support base includes a first support base, a second support base and a third support base, the third support base is a semi-cylinder, and a support plate is provided on the upper surface of the third support base;

[0020] The adjusting device includes an X-axis adjusting device, a Y-axis adjusting device, a Z-axis adjusting device and a locking device.

[0021] Preferably, the support seat is a stepped cylinder, and the diameter of the cylinder decreases gradually from the end connected to the ion gun toward the sample seat; the upper surface of the first support seat is provided with a scale, with the horizontal center axis as 0°, and there are 40° scales on both sides, and they are arranged circumferentially in units of 5°.

[0022] Preferably, when adjusting the position through the adjusting device, first loosen the locking device, first adjust the Y-axis direction through the Y-axis adjusting device, and then adjust the Z-axis direction through the Z-axis adjusting device; after all three-way adjustments are completed, tighten the locking device to lock and fix.

[0023] An ion thinning instrument comprises any one of the above-mentioned ion thinning sample stages.

[0024] (3) Beneficial effects: The present invention provides an ion thinning sample stage and its thinning instrument. First, multiple rows of ball bearings and rotating wheels are arranged between the sample holders, which can realize the smooth rotation of the sample stage, thereby uniformly and effectively thinning the sample; secondly, the angle and three-way height adjustment are performed by the position adjustment unit to ensure that the left and right ion sources are transmitted in parallel at the center point of the sample, with an effective tilt angle of 7 to 15 degrees, and a thin area is formed around the center point under the transmission of the ion beam; finally, the clip structure of the convex double-eye mask and the size relationship between the center hole and the sample to be thinned reduce the placement requirements of the sample and make the clamping of the sample more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is an overall structural diagram of an ion thinning sample stage of the present invention;

[0026] Figure 2 It is a cross-sectional structural diagram of the sample holder of the present invention;

[0027] Figure 3 It is a cross-sectional structural diagram of the sample holder of the present invention;

[0028] Figure 4 It is a structural diagram of the third support base of the present invention;

[0029] Figure 5 is a top view of the internal structure of the sample holder of the present invention;

[0030] Figure 6 It is a right side view of the internal structure of the sample holder of the present invention;

[0031] Figure 7 Schematic diagram of the structure of the notch of the clip of the present invention.

[0032] Figure numerals: sample holder 1, first sample holder 11, second sample holder 12, inclined groove 121, clamping table 122, spring clamp 2, clamping ring 21, clamping piece 3, center hole 31, notch 32, rotating wheel 4, support rod 41, corner ring 5, ball 6, support seat 7, first support seat 71, second support seat 72, third support seat 73, support plate 74, adjusting device 8, X-axial adjusting device 81, Y-axial adjusting device 82, Z-axial adjusting device 83, locking device 84. DETAILED DESCRIPTION

[0033] The present invention is further described in detail below in conjunction with preferred embodiments. More details are set forth in the following description to facilitate a full understanding of the present invention. However, the present invention can obviously be implemented in a variety of other ways different from the description. Those skilled in the art can make similar generalizations and deductions based on actual application situations without violating the connotation of the present invention. Therefore, the scope of protection of the present invention should not be limited by the content of this specific embodiment.

[0034] The accompanying drawings are schematic diagrams of embodiments of the present invention. It should be noted that the drawings are merely examples and are not drawn to scale, and should not be used to limit the actual scope of protection claimed in the present invention.

[0035] An ion thinning sample stage includes a sample clamping unit, a rotational thinning unit, and a position adjustment unit. The sample clamping unit clamps and secures the sample to be thinned. The rotational thinning unit rotates the sample clamped by the sample clamping unit, bombarding the upper and lower surfaces of the sample to be thinned with an ion beam, thereby thinning the sample. The position adjustment unit adjusts the height and angle of the clamped sample to ensure that the ion beam can bombard the center of the sample to be thinned, thereby uniformly thinning the sample and obtaining the desired thin film sample.

[0036] A specific embodiment of the present invention, as Figures 1 to 6 As shown, the sample clamping unit includes a sample holder 1, a spring clamp 2, and a clamping piece 3. The sample holder 1 comprises two layers, a first sample holder 11, and a second sample holder 12. The inner ring of the second sample holder 12 is provided with a circular protrusion. The height of the protrusion is equal to the thickness of the first sample holder 11. In other words, when the first and second sample holders 11, 12 are fixed together, they form a complete ring. The first and second sample holders 11, 12 are fixed together by fixing screws.

[0037] The side of the protruding end of the second sample holder 12, that is, the side of the annular inner diameter of the second sample holder 12, also has an inclined groove 121 and a clamping platform 122 connected to the inclined groove 121. The inclined groove 121 is formed along the annular inner diameter of the second sample holder 12, gradually sloping inward from top to bottom. The clamping platform 122 is provided at the tail end of the inclined groove 121, that is, the end with the largest inner diameter of the second sample holder 12. The clip 3 is placed on the clamping platform 122 through the inclined groove 121. The inclined effect of the inclined groove 121 prevents the clip 3 from falling out of the clamping platform 122.

[0038] More preferably, a spring clamp 2 is further provided on the upper surface of the clamping table 122. The spring clamp 2 is in the shape of a tight hoop, and two circular clamping rings 21 are formed at both ends of the spring clamp 2. The spring clamp 2 is fixed in the protruding end of the second sample table 12. The two circular clamping rings 21 of the spring clamp are located on the upper surface of the clamping table 122. The clamping ring 21 stably fixes the two clamps on the clamping table 122, avoiding the movement of the clamp 3 on the clamp 122, thereby affecting the thinning effect on the sample.

[0039] The clips 3 comprise two identical convex double-eye masks, one of which is used as an example for illustration. The clips 3 are generally annular and include a center hole 31 and a notch 32. The outer diameter of the clip 3 is equal to the maximum inner diameter of the second sample holder 12, that is, the inner diameters of the chute 121 and the clip platform 122 are equal. The clips 3 are bowl-shaped with a raised angle, meaning that the center of the clip 3 and the outer circumference are not in the same horizontal plane. The line connecting the center of the clip 3 and the outer circumference of the clip 3 forms an angle of 1 to 10°. The center hole 31 within the clip 3 coincides with the center of the clip 3. The diameter of the center hole 31 is greater than 0.5 mm and less than 3 mm, preferably 2 mm in this embodiment. A crescent-shaped notch 32 is formed around the circumference of the clip 3 to facilitate the installation and clamping of the spring clamp 2, thereby securing the sample to be thinned.

[0040] The crescent-shaped notch 32 of the clip 3 is as shown in FIG. Figure 7 As shown, a circle with a radius R3 equal to half the radius of the clip 3 and a center angle of 10° is constructed with the clip 3 as the center. Crescent-shaped notches 32 are then cut outward from the two end points of the arc, with R3 as the radius and the intersection of the 10° arc on the clip 3 as the center.

[0041] When the clamping pieces 3 are used to clamp and fix the sample to be thinned, the convex sides of the two clamping pieces 3 are in contact, that is, the two clamping pieces 3 are mirror placed, and the sample to be thinned is clamped between the two clamping pieces 3. The sample to be thinned is generally 3mm in diameter, so the accuracy requirement for the position of the sample to be thinned in this embodiment is very low, as long as the sample to be thinned can completely cover the center hole 31. Then the notch 32 of the clamping piece 3 is aligned with the clamping ring 21 of the spring clamp 2, the clamping piece 3 is placed on the clamping table 122 along the inclined groove 121, and then the clamping piece 3 is rotated so that the clamping ring 21 clamps and fixes the clamping piece 3 on the clamping table 122. Through the multi-layer clamping of the inclined groove 121, the spring clamp 2 and the clamping piece 3, the sample to be thinned is stably fixed in the sample seat 1.

[0042] The rotating thinning unit includes a rotating wheel 4, a corner ring 5 and a plurality of balls 6 arranged on the corner ring 5. The rotating wheel 4 is arranged on the side of the second sample seat 12 away from the first sample seat 11, and is fixed on a supporting rod 41 to ensure that the rotating wheel 4 is vertically below the balls 6. The rotating wheel 4 can be externally connected to a motor or a power source to provide driving force. In this embodiment, the motor and the power source providing driving force are arranged in the cavity behind the supporting seat 7. Through the rotation of the rotating wheel 4, the rotation of the second sample seat 12 can be realized, thereby driving the sample to be thinned to rotate and achieving uniform thinning of the sample to be thinned.

[0043] The corner ring 5 is annular and located between the first sample seat 11 and the second sample seat 12. The outer diameter of the corner ring 5 is equal to the outer diameter of the sample seat 1, and the inner diameter is adapted to the second sample seat 12, that is, equal to the outer diameter of the convex end of the second sample seat 12. The corner ring 5 is provided with n rows of balls 6, n≥2. The balls 6 are uniformly arranged at equal intervals in the circumferential direction on the corner ring 5. Correspondingly, the first sample seat 11 and the second sample seat 12 are respectively provided with circumferential recessed tracks on the side facing the corner ring 5, and the diameter of the recessed track is equal to the diameter of the ball 6.

[0044] The diameter of the ball 6 is 1mm.

[0045] When the first sample seat 11, the corner ring 5 and the second sample seat 12 are sequentially installed, through the arrangement of the balls 6, when the rotating wheel 4 rotates, the relative sliding between the first sample seat 11 and the second sample seat 12 is ensured, thereby realizing the rotation of the sample to be thinned. The balls 6 are fixed by the corner ring 5 to avoid aggregation of the balls 6 during rotation, thereby affecting the rotation effect and further affecting the thinning of the sample.

[0046] It should be noted that both side edges of the rotating wheel 4 should all be located within the outermost side of the multiple rows of balls 6, as long as the rotating wheel 4 is not placed outside the balls 6. In other words, the axial arrangement width of the multiple rows of balls 6 should be greater than the thickness of the rotating wheel 4, and the rotating wheel 4 is located near the center of the outermost circle of the multiple rows of balls 6, ensuring that in the cross-sectional direction, the rotating wheel 4 is entirely located below the multiple rows of balls 6. In this embodiment, two rows of balls 6 are provided, and the center of the rotating wheel 4 is located between the two rows of balls 6. Preferably, the two rows of balls 6 are symmetrically arranged along the center of the rotating wheel 4, that is, the center of the rotating wheel 4 and the center of the line connecting the two rows of balls 6 are located on the same vertical line, ensuring the balance and stability of the sample holder 1 and preventing one side of the sample holder 1 from tilting during rotation, thereby affecting the thinning effect on the sample.

[0047] The materials of the rotating wheel 4 and the ball bearings 6 are not specifically limited. In this embodiment, the rotating wheel 4 is preferably a copper wheel, which has a certain strength. A rubber sleeve is embedded outside the copper wheel, and the rubber sleeve has a certain flexibility to prevent contact between the rotating wheel 6 and the second sample holder 12, resulting in wear and thus affecting the rotation effect. The ball bearings 6 are preferably steel balls to ensure a certain strength.

[0048] The position adjustment unit includes a support base 7 and an adjustment device 8 located on the support base 7. The support base 7 is a stepped cylinder. The diameter of the cylinder decreases from the end connected to the ion gun toward the sample base 1. The first support base 71, the second support base 72, and the third support base 73 are respectively arranged. The third support base 73 is a semi-cylinder. A support plate 74 is provided on the upper surface of the third support base 73 on the same side as the first sample base 1. The support plate 74 is connected to the third support base 73 by a mortise and tenon structure.

[0049] The upper surface of the first support seat 71 is also provided with a scale, with the horizontal center axis as 0°, and 40° scales on both sides, and arranged circumferentially in units of 5°. When the support plate 74 and the sample holder 1 are in a horizontal state, the 0° marking line of the second support seat 72 will be aligned with the horizontal center axis. At this time, the first support seat 71 and the second support seat 72 are both in the initial state, that is, 0°. When the second support seat 72 rotates counterclockwise, the second support seat 72 will rotate to a negative angle. When the 0° marking line of the second support seat 72 rotates one grid, it means that the second support seat 72 has rotated 5° relative to the first support seat 71. Similarly, when the second support seat 72 rotates clockwise, the second support seat 72 will rotate to a positive angle. When the 0° marking line of the second support seat 72 rotates one grid, it means that the second support seat 72 has rotated 5° relative to the first support seat 71.

[0050] A rubber ring is provided between the first support 71 and the second support 72 to ensure smooth rotation and complete sealing between the first support 71 and the second support 72. The second support 72 provides support for the support plate 74 and the third support 73, while also balancing axial and flexural forces. It also transmits the temperature of the sample surface bombarded by the ion beam, reducing the temperature rise of the sample caused by the ion beam and ensuring that the sample is always at zero potential.

[0051] More preferably, a ball bearing is provided on the periphery of the support rod 41 connected to the rotating wheel 4 in the first support seat 71; a needle bearing is provided on the periphery of the support rod 41 in the second support seat 72, and the ball bearing and the needle bearing form a bearing pair for supporting and balancing the deflection force.

[0052] The support plate 74 is a stepped plate, fixed to the upper surface of the third support seat 73, with one end in contact with the second support seat 72, and the other end is semicircular and concave inward, matching the inner diameter of the sample holder 1, and fixing the sample holder 1 by fixing screws.

[0053] The adjustment device 8 includes an X-axis adjustment device 81, a Y-axis adjustment device 82, a Z-axis adjustment device 83, and a locking device 84. This adjustment device 8 allows the three-dimensional position of the sample holder to be adjusted, ensuring that the ion beam ejected from the ion chamber behind the support 7 strikes the center of the sample to be thinned on the sample holder 1. Bombardment can be performed when the angle between the ion beam and the sample is between 7 and 15 degrees. Because the effective tilt angle of 7 to 15 degrees is smaller than existing tilt angles, it is more convenient to use.

[0054] In this embodiment, the adjustment devices 8 are all jackscrews and / or set screws. The X-axis adjustment devices 81 comprise two jackscrews, one located on the side of the third support seat 73 away from the second support seat 72. The X-axis adjustment devices 81 are symmetrically arranged about the support rod 41 connected to the rotating wheel 4. Tightening or loosening the X-axis adjustment devices 81 enables movement of the third support seat 73 in the X-axis direction, thereby driving the sample holder 1 forward and backward. When tightening the X-axis adjustment devices 81, the third support seat 73 moves toward the second support seat 72; when loosening the X-axis adjustment devices 81, the third support seat 73 moves away from the second support seat 72.

[0055] The Y-axis adjusting device 82 is a top screw on the side of the third support base 73, and the tail end is in contact with the supporting plate 74. By loosening or tightening the Y-axis adjusting device 82, the left and right movement of the supporting plate 74 is realized, thereby driving the sample seat 1 to move in the Y-axis direction. When the Y-axis adjusting device 82 is tightened, the supporting plate 74 moves to the right, that is, moves away from the Y-axis adjusting device; when the Y-axis adjusting device 82 is loosened, the supporting plate 74 moves to the left, that is, moves towards the Y-axis adjusting device.

[0056] The Z-axis adjusting device 83 is two top screws arranged on the upper surface of the third support base 73. The Z-axis adjusting device 83 also passes through the threaded hole of the supporting plate 74, and is arranged symmetrically towards the side where the first sample seat 11 is located, with the support rod 41 connected to the rotating wheel 4 as the axis. By tightening or loosening the Z-axis adjusting device 83, the up and down movement of the supporting plate 74 is realized, thereby driving the sample seat 1 to move up and down. When the Z-axis adjusting device 83 is tightened, the supporting plate 74 moves downward, that is, moves towards the rotating wheel 4; when the Z-axis adjusting device 83 is loosened, the supporting plate 74 moves upward, that is, moves away from the rotating wheel 4.

[0057] The locking device 84 is located at the center of the Z-axis adjusting device, and the Y-axis adjusting device 82 and the Z-axis adjusting device 83 are locked or loosened by the locking device 84. When the locking device 84 is tightened, the supporting plate 74 is locked on the third support base 73, and the Y-axis adjusting device 82 and the Z-axis adjusting device 83 cannot be adjusted; when the locking device 84 is loosened, the supporting plate 74 is loosened, and the Y-axis adjusting device 82 and / or the Z-axis adjusting device 83 can be adjusted.

[0058] It should be noted that when the position is adjusted by the adjusting device 8, the locking device 84 is first loosened, the Y-axis is first adjusted by the Y-axis adjusting device 82, and then the Z-axis is adjusted by the Z-axis adjusting device 83. For the adjustment of the X-axis, it can be before or after the adjustment of the Y-axis or the Z-axis, or after the adjustment of the Y-axis and the Z-axis. Finally, after the adjustment of the three directions is completed, the locking device 84 is tightened to be locked and fixed.

[0059] An ion thinning instrument includes an ion thinning sample stage. By placing the sample to be thinned on the ion thinning sample stage and bombarding it with an ion beam, the effective tilt angle between the ion beam and the sample is smaller. When the effective tilt angle is between 7 and 15 degrees, a thin film product with a large thin area can be obtained.

[0060] The present invention provides an ion thinning sample stage and its thinning instrument. First, multiple rows of ball bearings and rotating wheels are provided between the sample holders to achieve smooth rotation of the sample stage, thereby uniformly and effectively thinning the sample. Secondly, the position adjustment unit is used to adjust the angle and height in three directions to ensure that the left and right ion sources are transmitted in parallel at the center point of the sample, ensuring that the effective tilt angle during operation is 7 to 15 degrees, and forming a thin area around the center point under ion beam transmission. Finally, the clip structure of the convex double-eye mask and the size relationship between the center hole and the sample to be thinned reduce the requirements for sample placement, making the sample clamping more stable, with a large contact area and good heat dissipation performance.

[0061] The above content is an explanation of the preferred embodiments of the present invention, which can help those skilled in the art to more fully understand the technical solutions of the present invention. However, these embodiments are merely illustrative, and it cannot be determined that the specific implementation methods of the present invention are limited to the description of these embodiments. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions and transformations can be made, which should be deemed to fall within the scope of protection of the present invention.

Claims

1. An ion thinning sample stage, characterized in that: The device comprises a sample clamping unit, a rotating thinning unit, and a position adjustment unit; the sample clamping unit clamps and fixes the sample to be thinned; the sample clamping unit comprises a sample holder, a spring clamp, and a clamping piece; the clamping piece is two identical convex double-eye masks, and the clamping piece is annular in shape, including a center hole and a notch; the angle between the center of the clamping piece and the outer circumference of the clamping piece is 1 to 10 degrees; The rotary thinning unit rotates the sample clamped by the sample clamping unit, bombards the upper and lower surfaces of the sample to be thinned with ion beams, and thins the sample; the rotary thinning unit includes a rotating wheel, a corner ring, and balls arranged on the corner ring; the corner ring is provided with n rows of balls, n ≥ 2, and the balls are evenly arranged along the circumferential direction on the corner ring with equal spacing; the balls are symmetrically arranged along the center of the rotating wheel, and the center of the rotating wheel and the center of the line connecting the balls are located on the same vertical line; The position adjustment unit adjusts the height and angle of the clamped sample to ensure that the ion beam bombards the center of the sample to be thinned, uniformly thins the sample, and obtains a thin film sample; the position adjustment unit includes a support seat and an adjustment device located on the support seat; the adjustment device includes an X-axis adjustment device, a Y-axis adjustment device, a Z-axis adjustment device and a locking device; when the position is adjusted by the adjustment device, the locking device is first loosened, the Y-axis is adjusted first by the Y-axis adjustment device, and then the Z-axis is adjusted by the Z-axis adjustment device; after all three-axis adjustments are completed, the locking device is tightened to lock and fix.

2. The ion thinning sample stage according to claim 1, characterized in that: The sample holder includes two layers, a first sample holder and a second sample holder; the inner ring of the second sample holder is provided with a ring-shaped protruding end, the height of the protruding end is equal to the thickness of the first sample holder, and the two form a complete ring; The annular inner diameter side of the second sample holder is also provided with an inclined groove and a clamping platform connected to the inclined groove. The clamp is placed on the clamping platform through the inclined groove. The upper surface of the clamping platform is also provided with a spring clamp.

3. The ion thinning sample stage according to claim 2, characterized in that: The outer diameter of the clip is equal to the inner diameter of the connection between the inclined groove and the clip platform.

4. The ion thinning sample stage according to claim 3, characterized in that: The diameter of the central hole is greater than 0.5 mm and less than 3 mm.

5. The ion thinning sample stage according to claim 1, characterized in that: The rotating wheel is arranged on a side of the second sample holder away from the first sample holder; The corner ring is annular and is located between the first sample holder and the second sample holder. The outer diameter of the corner ring is equal to the outer diameter of the sample holder, and the inner diameter is equal to the outer diameter of the protruding end of the second sample holder.

6. The ion thinning sample stage according to claim 1, characterized in that: The position adjustment unit includes a support base and an adjustment device located on the support base; the support base includes a first support base, a second support base and a third support base, the third support base is a semi-cylinder, and a support plate is provided on the upper surface of the third support base.

7. The ion thinning sample stage according to claim 6, characterized in that: The support seat is a stepped cylinder, and the diameter of the cylinder decreases gradually from the end connected to the ion gun to the sample seat; the upper surface of the first support seat is provided with a scale, with the horizontal center axis as 0°, and there are 40° scales on both sides, and they are arranged circumferentially in units of 5°.

8. An ion thinning instrument, characterized in that: An ion thinning sample stage comprising any one of claims 1-7.

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