Defect identification method used in yttrium oxide material manufacturing process

Abstract

The invention discloses an identification method for defects in a yttrium oxide material manufacturing process, and belongs to the technical field of material identification, the method comprises the following steps: S1, selecting Y2O3 raw powder with the purity of 99.9%, and testing an ultraviolet absorption spectrum; s2, adding pure water into the Y2O3 raw powder, uniformly stirring, and dividing into a plurality of parts; s3, the mixture is placed in a grinding machine to be ground at the rate of 1200 rpm, the rate of 1600 rpm and the rate of 2000 rpm; s4, sampling and testing the ultraviolet absorption spectrum of the powder at unit time intervals; s5, after grinding is completed, Y2O3 powder is obtained, and the ultraviolet absorption spectrum is tested again; s6, preparing slurry, and performing spray granulation; s7, calcining the Y2O3 powder; and S8, APS meltallizing is carried out. According to the method, detection is carried out in each step in the yttrium oxide material manufacturing process, real-time data monitoring is established, and compared with an existing experimental identification method, the material consumption and the time consumption are less, the efficiency is higher, and the manufacturing process steps generating large defects can be more accurately positioned.

Description

Technical Field

[0001] The invention belongs to the technical field of material identification, and in particular relates to a method for identifying defects in a manufacturing process of yttrium oxide materials. Background Art

[0002] Yttrium oxide has the characteristics of high melting point, relative stability and low thermal expansion. It is an important raw material for preparing high-performance electronic ceramics and anti-plasma corrosion spray powder. In recent years, yttrium oxide powder has also been more widely used in the electronics industry and semiconductor industry, especially as a spray material for semiconductor etcher to prevent plasma corrosion and radiation corrosion.

[0003] Generally speaking, yttrium oxide with higher purity is white, but in many cases the coating turns pink after spraying, which affects the corrosion resistance, high temperature resistance and service life of the coating.

[0004] In the process of analyzing yttrium oxide materials, the conventional method is to use different grinding efficiencies to prove that the pink color of the yttrium oxide coating is due to point defects caused by grinding. However, this method is to prove the influence of a certain factor. A single test is performed after the experiment is completed, and it cannot systematically and completely characterize the changes that occur in each step of the yttrium oxide material in the process. Summary of the invention

[0005] In view of this, an object of the present invention is to provide a method for identifying defects in the yttrium oxide material manufacturing process.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] The present invention provides a method for identifying defects in a yttrium oxide material manufacturing process, the method comprising the following steps:

[0008] S1. Select Y2O3 raw powder with a purity of 99.9% and test the ultraviolet absorption spectrum;

[0009] S2. Add pure water to the Y2O3 raw powder, stir well and divide into several portions;

[0010] S3, placing in a sander and grinding at a rate of 1200 rpm, 1600 rpm, and 2000 rpm respectively;

[0011] S4, sampling and testing the ultraviolet absorption spectrum of powder at intervals of unit time;

[0012] S5. After grinding, Y2O3 powder is obtained and the UV absorption spectrum is tested again;

[0013] S6, slurry preparation and spray granulation;

[0014] S7, Y2O3 powder calcination;

[0015] S8, APS spraying.

[0016] Furthermore, the particle size of the Y2O3 raw powder is 1.660-26.570 μm.

[0017] Furthermore, the particle size of the ground Y2O3 powder is 0.532-3.150 μm.

[0018] Furthermore, the interval unit time is 3-5 minutes.

[0019] The beneficial effects of the present invention are:

[0020] 1. The present invention takes samples at intervals of unit time during the yttrium oxide grinding process, establishes real-time data monitoring in the yttrium oxide material process, and the ultraviolet spectrometer can utilize the yttrium oxide molecules to absorb ultraviolet radiation to cause the electron energy level transition in the yttrium oxide molecules to produce an ultraviolet spectrum, and conducts qualitative analysis of the yttrium oxide material based on the ultraviolet visible spectrum and the degree of absorption.

[0021] 2. The powder is tested and analyzed at each step of the grinding process to clarify the changes in the powder during the experiment, thereby locating the process steps that produce larger defects. Compared with existing experimental identification methods, it consumes less material and time, is more efficient, and can more accurately locate the process steps that produce larger defects.

[0022] Other advantages, objectives and features of the present invention will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art may be taught from the practice of the present invention. The objectives and other advantages of the present invention may be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to make the purpose, technical solution and beneficial effects of the invention clearer, the present invention provides the following drawings for illustration:

[0024] Figure 1 It is a schematic diagram of the process of the present invention;

[0025] Figure 2 This is the UV absorption spectrum test chart of the Y2O3 raw powder of the present invention;

[0026] Figure 3 This is a test chart of the ultraviolet absorption spectrum of the Y2O3 powder after grinding of the present invention;

[0027] Figure 4 is the ultraviolet absorption spectrum of the Y2O3 powder of the present invention during grinding at 1200 rpm;

[0028] Figure 5 is a reference layer of the present invention;

[0029] Figure 6 This is the sample coating of the present invention (from left to right: 2000 rpm, 1600 rpm, 1200 rpm). DETAILED DESCRIPTION

[0030] A method for identifying defects in the manufacturing process of yttrium oxide materials.

[0031] Example 1

[0032] S1. Select Y2O3 raw powder with a purity of 99.9% and a particle size of 1.660, and test the UV absorption spectrum;

[0033] S2. Add pure water to the Y2O3 raw powder, stir and evenly divide into four parts;

[0034] S3, placing in a sander and grinding at a rate of 1200 rpm, 1600 rpm, and 2000 rpm respectively;

[0035] S4, sampling every 3 minutes to test the powder UV absorption spectrum;

[0036] S4, after grinding, obtain Y2O3 powder, and test the UV absorption spectrum again;

[0037] S5, slurry preparation and spray granulation;

[0038] Calcination of S6 and Y2O3 powders;

[0039] S7, APS spraying.

[0040] Use a colorimeter to test the color difference of the coating. Figure 5 For the reference coating, Figure 6 Table 1 is the color information of the reference coating, and Table 2 is the color information of the four sample coatings:

[0041] Table 1

[0042] L a b Reference Layers 94.5 -0.5 1.2

[0043] Table 2

[0044] Test samples △E △L △a △b 800rpm 3.8 -2.9 1.4 0.9 1200rpm 4.6 -4.0 1.9 1.4 1600rpm 13.2 -9.0 7.8 5.7 2000rpm 13.5 -9.5 7.8 5.8

[0045] Figure 1 is a defect identification flow chart of the present invention, Figure 2 , Figure 3 By comparison, it was found that when using different grinding speeds, the higher the grinding speed, the lower the intrinsic peak of yttrium oxide powder (wavelength is 200-220nm). Figure 4 This is the UV absorption spectrum of yttrium oxide powder during grinding at 1200 rpm.

[0046] After granulation, calcination and APS spraying of the above three types of grinding powders, the coating color was observed. The coating obtained using 1200 rpm was closest to white.

[0047] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A method for identifying defects in a yttrium oxide material manufacturing process, characterized in that: The method comprises the following steps, S1. Select Y2O3 raw powder with a purity of 99.9% and test the UV absorption spectrum; S2. Add pure water to the Y2O3 raw powder, stir well and divide into several portions; S3, placing in a sander and grinding at a rate of 1200 rpm, 1600 rpm, and 2000 rpm respectively; S4, sampling and testing the ultraviolet absorption spectrum of powder at intervals of unit time; S5. After grinding, Y2O3 powder is obtained and the UV absorption spectrum is tested again; S6, slurry preparation and spray granulation; S7, Y2O3 powder calcination; S8, APS spraying.

2. A method for identifying defects in a yttrium oxide material manufacturing process according to claim 1, characterized in that: The particle size of the Y2O3 raw powder is 1.660-26.570 μm.

3. The method for identifying defects in the yttrium oxide material manufacturing process according to claim 1, characterized in that: The particle size of the ground Y2O3 powder is 0.532-3.150 μm.

4. The method for identifying defects in the yttrium oxide material manufacturing process according to claim 1, characterized in that: The interval unit time is 3-5 minutes.

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