Optical fiber probe structure for micro-nano scale sensing and control
By designing an optical fiber probe structure with a light guide core and a conductive core, the problems of optical signal attenuation and large needle tip size in the existing probe structure are solved, and the ability of high spatial resolution and multi-physical quantity monitoring is achieved.
Patent Information
- Application Number
- CN202510010730.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-03
- Publication Date
- 2025-05-13
AI Technical Summary
The existing photoelectric signal sensing micro-nano probe structures have problems with optical signal attenuation and large needle tip size, making it difficult to achieve high spatial resolution and multi-physical quantity monitoring.
An optical fiber probe structure is designed, including a cladding, a light guide core and a conductive core. The conductive core of the sensor gradually approaches the central light guide core to form a micro-nano-level tip, and the connecting portion can transmit optical signals and electrical signals at the same time.
It realizes independent detection of optical and electrical signals, reduces signal interference, controllable pin tip size, and can reach nanometers in diameter, improving spatial resolution and multi-physical quantity monitoring capabilities.
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Figure CN119986054A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the field of micro-nano manufacturing technology and the field of micro-nano sensing and manipulation, and in particular relates to an optical fiber probe structure for micro-nano sensing and manipulation. Background Art
[0002] Micro-nano sensing and manipulation are widely used in the fields of electronic devices, materials science and biomedicine, and their potential application value is increasingly demonstrated. In the micro-area thermal property monitoring of electronic devices, the service life of the devices can be effectively improved; in the research of micro-nano materials and structures, observing and measuring the physical and chemical properties of individual structures can help develop new materials; in the related research of biomedicine, the activity status monitoring of individual cells and micro-nano regional tissues provides a research method for medical treatment.
[0003] Scanning probe microscopes are widely used in various fields, not only for the study of the surface structure and properties of samples, but also for the study of electricity, mechanics, optics, thermodynamics and other fields. The application of micro-nano probes has greatly promoted the development of various fields. The original probe structure can only realize the manipulation and sensing measurement of micro-nano areas through optical signals or electrical signals. In order to realize the detection of multiple physical quantities, micro-nano electrical structures can be integrated on optical probes by MEMS processing, ion beam etching and magnetron sputtering to realize the synchronous detection of optical and electrical signals. The existing optoelectronic signal sensing micro-nano probe structures are mainly single-core thin-film structures and multi-core thin-film structures. The use of thin-film structure probes will cause the optical signal to attenuate. At the same time, the tip size formed by the thin-film structure probe is relatively large, usually more than 100 nanometers. Summary of the invention
[0004] In view of the above shortcomings of the prior art, the present invention aims to provide a probe structure for micro-nanoscale sensing and manipulation to realize multi-physical quantity monitoring of optical and electrical signals. The probe structure can be used in the fields of micro-nano temperature monitoring, optical imaging, electrochemistry, and cell stimulation detection.
[0005] To achieve the above object, the present invention adopts the following technical solutions:
[0006] A fiber optic probe structure for micro-nanoscale sensing and manipulation, the fiber optic probe comprising a cladding (1) and a light-guiding core (3) in the center of the cladding (1), the cladding (1) also comprising a conductive core, the front end of the fiber optic probe being a taper as a sensing portion, and the rear end of the fiber optic probe being a connecting portion for transmitting light and electrical signals.
[0007] The conductive core of the sensing part gradually approaches the central light-guiding core (3), and the diameters of the conductive core and the light-guiding core (3) gradually decrease; the sensing part and the conductive core and the light-guiding core (3) inside all have micro-nano-level tips.
[0008] The tail end of the connection part is connected to both the common optical fiber and the wire to realize the transmission of optical and electrical signals.
[0009] The cladding (1) and the light-guiding core (3) are made of insulating materials, and the refractive index of the light-guiding core (3) is greater than the refractive index of the cladding (1); the conductive core is made of conductive material, and the number of the conductive cores is ≥1.
[0010] The conductive cores at different positions are made of the same or different conductive materials, and the conductive materials are metals or semiconductors.
[0011] The micro-nano tip at the end of the conductive core is exposed from the side of the cone region of the cladding (1) of the sensing part, and the outer side wall of the micro-nano tip of the conductive core constitutes a part of the outer contour of the cone region.
[0012] The number of conductive cores is ≥ 2, the lower ends of the conductive cores pass through both sides of the tip of the sensing part and extend downward to exceed the tip of the sensing part, and the conductive cores are of equal length.
[0013] The number of conductive cores is ≥ 2, the lower ends of the conductive cores pass through both sides of the tip of the sensing part and extend downward to exceed the tip of the sensing part, and the conductive cores are of different lengths.
[0014] The number of conductive cores is ≥ 2, a contact point (6) is provided at the lower end of the sensing portion, and the lower end of each conductive core extends to be connected to the contact point (6).
[0015] Each conductive core uses a different conductive material, and there are differences in Seebeck coefficients between the conductive materials.
[0016] The advantages of the present invention compared with the prior art are:
[0017] (1) The probe structure provided by the present invention is diverse and variable, and can realize independent detection of optical and electrical signals, thereby reducing interference between different signals.
[0018] (2) The probe structure provided by the present invention has a controllable tip size, a diameter that can reach the nanometer level, a simple preparation method, and can achieve higher spatial resolution and multi-physical quantity monitoring.
[0019] (3) The probe structure provided by the present invention can realize scanning imaging of sample surface temperature, surface morphology and near-field optics, can be used for electrostatic force, capacitive force and electrochemical microscopy, and can realize cell activity state monitoring and micro-nano manipulation. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The accompanying drawings are included to provide a further understanding of the present application and constitute a part of the present application. The accompanying drawings illustrate embodiments of the present application and together with the specification serve to explain the principles of the present application. In the accompanying drawings:
[0021] Figure 1The structure diagram of the support part of the micro-nano sensing and control probe with dual conductive cores
[0022] Figure 2 Schematic diagram of a dual-conductor probe with a fully supported structure
[0023] Figure 3 Schematic diagram of a double conductive core equal length probe with a semi-supported non-contact structure
[0024] Figure 4 Schematic diagram of a double-conductive-core unequal-length probe with a semi-supported non-contact structure
[0025] Figure 5 Schematic diagram of a double-conducting core probe with a semi-supported contact structure
[0026] In the figure: 1 is the cladding, 2 is the conductive core, 3 is the light-guiding core, 4 is the conductive core, 5 is the cell, and 6 is the contact of the conductive core. DETAILED DESCRIPTION
[0027] The specific embodiments of the present invention are further described in detail below, but the present invention is not limited to these embodiments, and any improvement or substitution based on the basic spirit of the present embodiment still falls within the scope of protection required by the claims of the present invention.
[0028] An optical fiber probe structure for micro-nanoscale sensing and manipulation, characterized in that the probe structure comprises: a support portion constituting the main body of the probe structure, a sensing portion located at one end of the support portion, and a connecting portion located at the other end of the support portion for connection. The support portion is composed of a cladding, a light-guiding core, and a conductive core, wherein the light-guiding core is located at the center of the cladding; the conductive cores are distributed in parallel around the protective layer around the light-guiding core. The sensing portion is composed of a cladding, a light-guiding core, and a conductive core, wherein the light-guiding core is located at the center of the cladding, and the conductive core of the sensing portion continuously approaches the central light-guiding core. The sensing portion and the conductive core and light-guiding core inside all have micro-nanoscale tips. The light-guiding core at the tail end of the connecting portion is optically connected to an ordinary optical fiber, and the conductive core is electrically connected to a wire, so as to realize the transmission of optical and electrical signals.
[0029] Preferably, the cladding and the light-guiding core of the support part are made of insulating materials, and there is a difference in refractive index between the two; the conductive core is made of a material with conductive properties, including but not limited to metals such as gold and platinum, alloys such as nickel-chromium and platinum-rhodium, and semiconductors such as silicon and selenium. The number of conductive cores includes but is not limited to one, and the conductive cores at different positions can be made of the same or different conductive materials.
[0030] Preferably, the contact structure and non-contact structure formed by the conductive core at the tip of the sensing part include but are not limited to two or more conductive cores. The conductive core tips of the sensing part of the contact structure have a nano-scale contact area and have a conductive property; the conductive core of the sensing part of the non-contact structure does not have a direct contact area, and there is a micro-nano-scale spacing between the conductive core tips, which cannot be directly conductive.
[0031] Preferably, the conductive core has a cone region equal length structure and a cone region unequal length structure, including but not limited to two or more conductive cores. The conductive core tips of the cone region equal length structure are in the same plane, and the conductive core tips of the cone region unequal length structure are in different planes.
[0032] Preferably, the non-contact structure includes a fully supported structure in which the conductive core is respectively wrapped by the cladding and a semi-supported structure in which the conductive core is respectively semi-wrapped by the cladding.
[0033] Preferably, the conductive core of the full support structure exposes the nanoscale conductive tip side, and the conductive core tips are separated by a cladding or a light-guiding core as a separation layer.
[0034] Preferably, the conductive core tips of the semi-support structure are completely exposed, and no separation layer exists between the tips.
[0035] Embodiment 1:
[0036] The present invention provides an optical fiber probe structure for micro-nanoscale sensing and manipulation: a support portion constituting the main body of the probe structure, a sensing portion located at one end of the support portion, and a connecting portion located at the other end of the support portion for connection. The support portion is composed of a cladding, a light-guiding core, and a conductive core, wherein the light-guiding core is located at the center of the cladding; the conductive cores are distributed in parallel around the protective layer around the light-guiding core. The sensing portion is composed of a cladding, a light-guiding core, and a conductive core, wherein the light-guiding core is located at the center of the cladding, and the conductive core of the sensing portion continuously approaches the central light-guiding core. The sensing portion and the conductive core and light-guiding core inside all have micro-nanoscale tips. The light-guiding core at the tail end of the connecting portion is optically connected to an ordinary optical fiber, and the conductive core is electrically connected to a wire, to achieve transmission of optical and electrical signals. The number of conductive cores in the probe structure includes, but is not limited to, one. As shown in the attached Figure 1 As shown, the probe structure support portion containing two conductive cores is composed of a cladding 1, a light-guiding core 3, and conductive cores 2 and 4. The light-guiding core 3 is located at the center of the cladding 1; the conductive cores 2 and 4 are distributed in parallel in the cladding 1 around the light-guiding core 3.
[0037] A fully support structure probe for micro-nano sensing and manipulation, wherein the number of conductive cores in the probe structure includes but is not limited to one. A fully support structure probe with two conductive cores is shown in the attached Figure 2As shown. The sensing part of the probe with a full support structure of dual conductive cores is composed of a cladding 1, a light-guiding core 3, and conductive cores 2 and 4. The light-guiding core 3 is located at the center of the cladding 1, and the conductive cores 2 and 4 are constantly approaching the central light-guiding core 3. The sensing part and the internal conductive cores 2 and 4 and the light-guiding core 3 all have micro-nano tips. The light-guiding core 3 at the tail end of the connecting part is optically connected to an ordinary optical fiber, and the conductive cores 2 and 4 are electrically connected to the wire to realize the transmission of optical and electrical signals. The internal conductive cores 2 and 4 will expose the micro-nano side surfaces near the probe tip, and the cladding 1 or the light-guiding core 3 serves as a separation layer between the conductive core tips. A capacitor structure can be formed between the tips of the conductive cores 2 and 4. By applying an electrical signal at the connecting end, it can be used as an electrostatic force and capacitance probe to realize micro-nano manipulation and material dielectric property detection, and at the same time, the light-guiding core 3 can realize near-field optical signal collection.
[0038] Embodiment 2:
[0039] Based on Example 1, a semi-support structure conductive core equal length probe for micro-nano sensing and manipulation is proposed, and the number of conductive cores in the probe structure is not limited to one. A semi-support structure conductive core equal length probe with two conductive cores is shown in the attached figure. Figure 3 As shown, the sensing part of the probe is composed of a cladding 1, a light-guiding core 3, and conductive cores 2 and 4. The light-guiding core 3 is located at the center of the cladding 1, and the conductive cores 2 and 4 are constantly approaching the central light-guiding core 3. The sensing part and the conductive cores 2 and 4 inside and the light-guiding core 3 all have micro-nano tips. The light-guiding core 3 at the tail end of the connecting part is optically connected to a common optical fiber, and the conductive cores 2 and 4 are electrically connected to the wire to realize the transmission of optical and electrical signals. The tips of the conductive cores 2 and 4 are completely exposed, and there is no partition layer between the tips of the conductive cores 2 and 4. The tips of the conductive cores 2 and 4 are located in the same plane. The completely exposed tips of the conductive cores 2 and 4 can be used as electrochemical probes to realize electrochemical catalytic reactions and material electrical property detection, and can also be used for cell and tissue electrical stimulation. The light-guiding core 3 can be used for optical detection of reactants in electrochemical catalytic reactions and cell and tissue electrical stimulation.
[0040] Embodiment 3:
[0041] Based on Example 1, a semi-support structure conductive core unequal length probe for micro-nano sensing and manipulation is proposed, and the number of conductive cores in the probe structure is not limited to one. The semi-support structure conductive core unequal length probe with two conductive cores is shown in the attached figure. Figure 4As shown, the probe sensing part is composed of a cladding 1, a light-guiding core 3, and conductive cores 2 and 4. The light-guiding core 3 is located at the center of the cladding 1, and the conductive cores 2 and 4 are constantly approaching the central light-guiding core 3. The sensing part and the conductive cores 2 and 4 and the light-guiding core 3 inside all have micro-nano tips. The light-guiding core 3 at the tail end of the connecting part is optically connected to the ordinary optical fiber, and the conductive cores 2 and 4 are electrically connected to the wire to realize the transmission of optical signals and electrical signals. The tips of the conductive cores 2 and 4 are completely exposed, there is no partition layer between the tips of the conductive cores 2 and 4, the tips of the conductive cores 2 and 4 are located in different planes, and there is a micro-nano length difference between the tips of the conductive cores 2 and 4. The micro-nano length difference between the tips of the conductive cores 2 and 4 can be used for the detection of the internal and external potential of a single cell. The shorter tip of the conductive core 2 contacts the outer wall of the cell membrane of the cell 5, and the tip of the conductive core 4 enters the cell 5, which can realize the monitoring of the activity state of a single cell.
[0042] Embodiment 4:
[0043] Based on Example 1, a semi-supported contact structure probe for micro-nano sensing and manipulation is proposed, and the number of conductive cores in the probe structure is not limited to one. The semi-supported contact structure probe with two conductive cores is shown in the attached figure. Figure 5 As shown, the probe sensing part is composed of a cladding 1, a light-guiding core 3, and conductive cores 2 and 4. The light-guiding core 3 is located at the center of the cladding 1. The conductive cores 2 and 4 are constantly approaching the central light-guiding core 3, and contact at the tip of the probe to form a contact point 6, thereby realizing the electrical connection between the conductive cores 2 and 4. The tail light-guiding core 3 of the connecting part is optically connected to the ordinary optical fiber, and the conductive cores 2 and 4 are electrically connected to the wire to realize the transmission of optical and electrical signals. The conductive cores 2 and 4 in contact are made of different conductive materials, and there is a difference in Seebeck coefficient between the materials of the conductive cores 2 and 4. The conductive cores 2 and 4 in contact form a micro-nano thermocouple with a micro-nano-level temperature measurement junction 6, which can be used for micro-nano temperature measurement, and can realize temperature scanning imaging in combination with an atomic force scanning microscope; the light-guiding core 3 can be used to receive near-field optical signals, and the probe can realize multi-physical signal sensing detection such as light, heat and force.
[0044] It is necessary to point out here that the above embodiments are limited to further elaboration and understanding of the technical solution of the present invention and cannot be understood as further limitation of the technical solution of the present invention. Inventions and creations with non-outstanding essential features and significant progress made by those skilled in the art still fall within the protection scope of the present invention.
Claims
1. An optical fiber probe structure for micro-nanoscale sensing and manipulation, the optical fiber probe comprising a cladding (1), a light-guiding core (3) in the center of the cladding (1), characterized in that: A conductive core is arranged outside the light-guiding core (3); the front end of the optical fiber probe is tapered to form a sensing portion; and the rear end of the optical fiber probe is a connecting portion for transmitting light and electrical signals.
2. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 1, characterized in that: The conductive core of the sensing part gradually approaches the central light-guiding core (3), and the diameters of the conductive core and the light-guiding core (3) gradually decrease; the sensing part and the conductive core and the light-guiding core (3) inside all have micro-nano-level tips.
3. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 2, characterized in that: The tail end of the connection part is connected to both the common optical fiber and the wire to realize the transmission of optical and electrical signals.
4. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 2, characterized in that: The cladding (1) and the light-guiding core (3) are made of insulating materials, and the refractive index of the light-guiding core (3) is greater than the refractive index of the cladding (1); the conductive core is made of conductive material, and the number of the conductive cores is ≥1.
5. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 4, characterized in that: The conductive cores at different positions are made of the same or different conductive materials, and the conductive materials are metals or semiconductors.
6. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 4, characterized in that: The micro-nano tip at the end of the conductive core is exposed from the side of the cone region of the cladding (1) of the sensing part, and the outer side wall of the micro-nano tip of the conductive core constitutes a part of the outer contour of the cone region.
7. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 4, characterized in that: The number of conductive cores is ≥ 2, the lower ends of the conductive cores pass through both sides of the tip of the sensing part and extend downward to exceed the tip of the sensing part, and the conductive cores are of equal length.
8. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 7, characterized in that: The number of conductive cores is ≥ 2, the lower ends of the conductive cores pass through both sides of the tip of the sensing part and extend downward to exceed the tip of the sensing part, and the conductive cores are of different lengths.
9. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 4, characterized in that: The number of conductive cores is ≥ 2, a contact point (6) is provided at the lower end of the sensing portion, and the lower end of each conductive core extends to be connected to the contact point (6).
10. The optical fiber probe structure for micro-nanoscale sensing and manipulation according to claim 9, characterized in that: Each conductive core uses a different conductive material, and there are differences in Seebeck coefficients between the conductive materials.