Semiconductor automation factory crown block cargo transportation control method and electronic equipment

Abstract

The invention provides a semiconductor automation factory crown block cargo transportation control method and electronic equipment. The method comprises the steps that a control end of a machine sends a dispatching demand to a crown block system according to dispatching information of a first control system; according to the dispatching requirement, the crown block system conveys goods to the machine table; the goods comprise a wafer storage box and a placing piece used for storing wafers, and the placing piece is located in the wafer storage box. Binding information A of the wafer storage box and the placement piece is stored in the first control system and the control end of the machine table; when the goods arrive at the machine table, the wafer storage box is unfastened, the placing piece is taken out, and the crown block system carries away the empty wafer storage box; and when the wafer storage box is unbound, the control end of the machine unbinds the binding information A, and the first control system still stores the binding information A. According to the method, accurate matching of the wafer storage box and the placement piece can be achieved, the crown block can carry out conveying operation among different machine tables, the production efficiency can be improved, and the production cost can be reduced.

Description

Technical Field

[0001] The present invention relates to the field of automated production technology, and in particular to a control method and electronic equipment for overhead crane cargo transportation in a semiconductor automated factory. Background Art

[0002] In the field of semiconductor manufacturing, cassettes and cartridges are sealed and reusable packaging containers that play a key role in transporting wafers between different processing tools in the semiconductor manufacturing industry. During transportation, the wafers are placed in the cartridge, and the cartridge is usually stored in the cassette. The cassette provides a clean and controlled environment for the wafers to prevent them from contamination and damage.

[0003] The existing overhead crane system is usually used in 12-inch carbon-based semiconductor factories to transport carbon-based semiconductor materials. The overhead crane system (MCS) of 6-inch wafer production plants is rarely used in transporting crystal boxes, making it difficult to achieve assembly line operations. Especially for wet process machines and furnace tube machines, the crystal boxes cannot enter the machine, resulting in limited overhead crane transportation. The wet process machine has different inlet and outlet ends, and the crystal box needs to be transported from the inlet end to the outlet end to complete a process flow. Although the inlet and outlet ends of the furnace tube machine are the same, most processes require control chip monitoring, and the furnace tube machine carrying the control chip cannot perform overhead crane operations. Therefore, both machines need to handle empty crystal boxes separately before the next batch of products can be placed, thereby realizing the transportation of multiple batches of goods. However, the existing machines can only store plugs, and the crystal boxes bound to the plugs cannot be stored in them, which makes the coding between the crystal box and the plug easy to confuse, making it difficult for the crystal box to accurately match the plug, resulting in the handling and transportation of empty crystal boxes becoming the biggest problem.

[0004] If the empty crystal boxes cannot be processed or transported from the incoming end to the outgoing end, the furnace tube machine can only perform single batch operations during the operation of the machine, and the wet process machine cannot perform overhead crane operations. This greatly restricts the application of the overhead crane and increases production costs.

[0005] Therefore, it is necessary to improve the control method of the overhead crane system of the existing 6-inch wafer production plant to overcome the defects of the prior art. Summary of the invention

[0006] In order to overcome the problems existing in the related art, one of the objects of the present invention is to provide a control method for overhead crane cargo transportation in a semiconductor automation factory. The method can realize precise matching of wafer storage boxes and placement parts through the linkage of the machine control terminal, the overhead crane system and the first control system, and through the processing of binding information A, so that the overhead crane can perform transportation operations between different machines, thereby improving production efficiency and reducing production costs.

[0007] A method for controlling cargo transportation by an overhead crane in a semiconductor automation factory, comprising:

[0008] The control end of the machine sends the dispatching requirements to the overhead travelling crane system according to the dispatching information of the first control system;

[0009] According to the dispatching requirements, the overhead crane system transports the goods to the machine; wherein the goods include a wafer storage box and a placement piece for storing wafers, and the placement piece is located in the wafer storage box; the first control system and the control end of the machine both store the binding information A of the wafer storage box and the placement piece;

[0010] The goods arrive at the machine, the wafer storage box is unlocked, the placement piece is taken out, and the overhead crane system transports the empty wafer storage box away;

[0011] When the wafer storage box is opened, the control end of the machine unbinds the binding information A, and the first control system still stores the binding information A.

[0012] In a preferred technical solution of the present invention, the machine comprises a first machine and a second machine;

[0013] In the first machine, if one dispatch is for one cargo:

[0014] The overhead crane system delivers the wafer storage box with the placement member to the first machine;

[0015] At the first machine, after the wafer storage box is unlocked and the placement piece is taken away, the control end of the first machine sends a request to the overhead crane system to transport an empty wafer storage box;

[0016] The overhead crane system takes away the empty wafer storage box, and the first control system ends the overhead crane dispatch instruction.

[0017] In a preferred technical solution of the present invention, in the first machine, if multiple batches of goods are dispatched at one time:

[0018] The control terminal of the first machine sends a plurality of cargo handling requests to the overhead crane system;

[0019] The overhead crane system sequentially delivers the multiple batches of goods to the first machine; and each time the goods are delivered to the first machine, the wafer storage boxes are untied, and the control end of the first machine unbinds the binding information A so that the placement pieces are taken out;

[0020] When the delivery of a batch of goods is completed and the empty wafer storage boxes are taken away by the overhead crane system, the control end of the first machine sends a request to the overhead crane system to deliver the next batch.

[0021] In a preferred technical solution of the present invention, the second machine includes an inlet and an outlet;

[0022] In the second machine, the overhead crane system delivers the wafer storage box with the placement member to the second machine;

[0023] At the receiving end of the second machine, after the wafer storage box is unlocked and the placement piece is taken away, the control end of the second machine sends a request to the overhead crane system to transport an empty wafer storage box;

[0024] The overhead crane system transports the empty wafer storage box to the shipping end of the second machine, and takes away the placement piece associated with the binding information A at the shipping end of the second machine.

[0025] In a preferred technical solution of the present invention, the overhead crane system transports the empty wafer storage box to the shipping end of the second machine, and takes away the placement piece associated with the binding information A at the shipping end, including:

[0026] The control terminal of the second machine feeds back a processing completion signal to the first control system and requests the goods to be shipped out;

[0027] The first control system receives feedback from the control end of the machine and confirms to the control end of the second machine that the goods are allowed to leave the station;

[0028] After receiving the confirmation that the cargo is allowed to leave the station, the control terminal of the second machine sends a cargo leaving the station transfer request to the overhead travelling crane system;

[0029] The overhead crane system transports the empty wafer storage box to the shipping end of the second machine according to the cargo outbound transport request to receive the processed cargo.

[0030] In a preferred technical solution of the present invention, after the delivery end takes away the placement piece associated with the binding information A, it also includes:

[0031] The control terminal of the second machine feeds back the real-time processing progress to the first control system;

[0032] The first control system controls the operation of the overhead crane system according to the real-time processing progress.

[0033] In a preferred technical solution of the present invention, the wafer storage box comprises a bottom box and an upper box body, the upper box body is arranged on the bottom box, and the upper box body is detachably arranged on the bottom box;

[0034] The bottom box is provided with a switch port, and the machine platform is provided with a key for unlocking the bottom box and the upper box body;

[0035] When the switch port of the bottom box is placed on the key, the upper box body is separated from the bottom box.

[0036] In a preferred technical solution of the present invention, a material-retrieving robot arm is provided in the machine, and the material-retrieving robot arm is used to retrieve the placement pieces in the wafer storage box;

[0037] And when the material-retrieving robot arm takes away the placement items in the wafer storage box, the control end of the machine unbinds the binding information A.

[0038] In a preferred technical solution of the present invention, the first control system is a manufacturing execution system, and the first control system generates dispatch information according to the production order, specifically including:

[0039] According to the order information, select the corresponding wafer storage box;

[0040] And according to the selected wafer storage box, one or more batches of dispatch information are generated.

[0041] A second object of the present invention is to provide an electronic device, comprising:

[0042] Processor; and

[0043] The memory stores executable codes thereon, and when the executable codes are executed by the processor, the processor is caused to execute the method as described above.

[0044] The beneficial effects of the present invention are:

[0045] The present invention provides a control method and electronic device for overhead crane cargo transportation in a semiconductor automation factory. The method comprises: the control end of the machine sends the dispatching demand to the overhead crane system according to the dispatching information of the first control system; according to the dispatching demand, the overhead crane system transports the goods to the machine; wherein the goods include a wafer storage box and a placement piece for storing wafers, and the placement piece is located in the wafer storage box. The first control system and the control end of the machine both store binding information A between the wafer storage box and the placement piece; when the goods arrive at the machine, the wafer storage box is untied, the placement piece is taken out, and the overhead crane system transports the empty wafer storage box away; and when the wafer storage box is untied, the control end of the machine unbinds the binding information A, and the first control system still stores the binding information A. During the application of the method, the first control system generates dispatching information according to the production order, and sends the dispatching information to the control end of the etching machine. After receiving the dispatching information, the control end of the machine sends a detailed dispatching demand to the overhead crane system. The overhead crane system starts and transports the wafer storage box with the jam from the temporary storage area to the machine. When the goods arrive at the machine, the mechanical unlocking device installed on the machine is activated according to the preset program, and the unlocking switch at the bottom of the wafer storage box is triggered, thereby unlocking it. The robotic arm takes out the placement piece and relocks the wafer storage box. During this process, the control end of the machine simultaneously unbinds the binding information A, but the binding information is still completely retained in the first control system. This operation ensures that the placement piece can be unloaded to the machine, but the first control system can also ensure that the wafer storage box and the placement piece can be accurately matched based on the binding information A when the placement piece is subsequently recovered, thereby ensuring the continuity of production. Due to the precise matching of the wafer storage box and the placement piece, the overhead crane system can respond quickly according to the instructions of the entire system and shuttle efficiently between different machines, greatly shortening the cargo transportation time and ensuring the continuity of the production process, thereby improving overall production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 is a flow chart of overhead crane cargo transportation in a semiconductor automation factory provided in an embodiment of the present invention;

[0047] Figure 2 It is an information interaction diagram of a first control system, a control terminal of a machine, and an overhead traveling vehicle system provided in an embodiment of the present invention;

[0048] Figure 3 is a scheduling diagram between a manufacturing execution system, a machine platform and an overhead crane system provided in an embodiment of the present invention;

[0049] Figure 4 is a schematic diagram of the bottom of a wafer storage box provided in an embodiment of the present invention;

[0050] Figure 5 is a schematic diagram of an electronic device provided in an embodiment of the present invention.

[0051] Reference numerals:

[0052] 1. Wafer storage box; 11. Bottom box; 12. Upper box body; 13. Switch port. DETAILED DESCRIPTION

[0053] The preferred embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the preferred embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the present invention more thorough and complete, and to fully convey the scope of the present invention to those skilled in the art.

[0054] Example 1

[0055] like Figure 1-Figure 4 As shown, this embodiment provides a control method for overhead crane cargo transportation in a semiconductor automation factory, comprising:

[0056] The control end of the machine sends the dispatching requirements to the overhead travelling crane system according to the dispatching information of the first control system;

[0057] According to the dispatching requirements, the overhead crane system transports the goods to the machine; wherein the goods include a wafer storage box and a placement piece for storing wafers, and the placement piece is located in the wafer storage box; the first control system and the control end of the machine both store the binding information A of the wafer storage box and the placement piece;

[0058] The goods arrive at the machine, the wafer storage box is unlocked, the placement piece is taken out, and the overhead crane system transports the empty wafer storage box away;

[0059] When the wafer storage box is opened, the control end of the machine unbinds the binding information A, and the first control system still stores the binding information A.

[0060] Specifically, the first control system of the present application is a manufacturing execution system (MES), the wafer storage box is a wafer box, and the placement piece is a plug, which is used to place wafers.

[0061] The above-mentioned control method for the overhead crane cargo transportation of a semiconductor automation factory, during the application of this method, the first control system generates dispatch information based on the production order, and sends the dispatch information to the control end of the etching machine. After receiving the dispatch information, the control end of the machine sends a detailed dispatch requirement to the overhead crane system. The overhead crane system starts and transports the wafer storage box with the plug from the temporary storage area to the machine. When the goods arrive at the machine, the mechanical unlocking device set on the machine is started according to the preset program, and the unlocking switch at the bottom of the wafer storage box is triggered, thereby unlocking. The mechanical arm takes out the placement piece and the wafer storage box is locked again. In this process, the control end of the machine synchronously unbinds the binding information A, but the binding information is still completely retained in the first control system. This operation ensures that the placement piece can be unloaded to the machine, but the first control system can ensure that the wafer storage box and the placement piece can be accurately matched when the placement piece is subsequently recovered based on the binding information A, thereby ensuring the continuity of production.

[0062] The control method realizes fully automated production process control through close cooperation between the manufacturing execution system, the overhead crane and the machine. From the allocation of production tasks to the precise handling of goods, each link is closely connected, and there is no need for manual intervention in the cargo transportation path and machine operation, which greatly reduces the time delays and operational errors caused by human factors. For example, traditional manual handling may take 5-10 minutes each time to transfer goods between machines, but after adopting the method of the present application, the overhead crane system can complete the handling task within 1-2 minutes. In large-scale production, the time saved by frequent cargo transportation can be accumulated to greatly shorten the overall production cycle, thereby significantly improving production. And due to the precise management of binding information A, the overhead crane system can quickly respond to subsequent transportation needs and realize efficient shuttle between different machines and between machines and crystal box placement racks. When a machine completes the processing process, the overhead crane system can immediately find the corresponding empty crystal box according to the instructions of the MES system and the retained binding information A, and accurately match and transport it with the processed placement parts, ensuring the continuity of the production process, avoiding the time waste caused by finding and matching goods, and further improving production efficiency.

[0063] More specifically, the present application provides an implementation method of applying the control method to transport goods between a furnace tube machine and a wet process machine. The details are as follows:

[0064] The machine comprises a first machine and a second machine; the first machine is a furnace tube machine, and the second machine is a wet process machine.

[0065] In the first machine, if one dispatch is for one cargo:

[0066] The overhead crane system delivers the wafer storage box with the placement member to the first machine;

[0067] At the first machine, after the wafer storage box is unlocked and the placement piece is taken away, the control end of the first machine sends a request to the overhead crane system to transport an empty wafer storage box;

[0068] The overhead crane system takes away the empty wafer storage box, and the first control system ends the overhead crane dispatch instruction.

[0069] The existing overhead crane system of a 6-inch wafer production plant cannot be used for cargo transportation operations of a wet process machine and a furnace tube machine at the same time. The control method of the present application can overcome this defect.

[0070] As the first control system, the Manufacturing Execution System (MES) is responsible for the scheduling and management of the overall production process. When a new batch of wafer processing tasks is issued, MES generates dispatch information based on process requirements and machine status. Suppose that a specific process step in this task needs to be processed on the furnace tube machine first.

[0071] MES sends the dispatch information to the control end of the furnace tube machine (machine automation software EAP). After EAP parses the information, it sends detailed dispatch requirements to the overhead crane system (MCS), which clearly instructs the overhead crane to transport a wafer storage box (crystal box) containing a placement part (jam) to the furnace tube machine.

[0072] The overhead crane system uses its precise positioning and grasping devices to identify and grasp the corresponding crystal box in the temporary storage area, and transports the crystal box to the feed port of the furnace tube machine along the preset track. After the crystal box arrives at the furnace tube machine, the mechanical unlocking device on the machine automatically starts. After the device detects the crystal box arrival signal through the sensor, it triggers the unlocking mechanism at the bottom of the crystal box through the key in the machine, and the crystal box cover is opened smoothly. The robotic arm then carefully removes the plug and places it in the processing area inside the furnace tube machine, ready for heat treatment. After completing the pick-and-place operation, the crystal box cover automatically drops and relocks to form an empty crystal box.

[0073] At this time, the EAP of the furnace tube machine immediately sends a request to the MCS to transport the empty wafer box. After receiving the request, the MCS dispatches a nearby overhead crane to the furnace tube machine, grabs the empty wafer box with a robotic arm, and transports it to the designated empty wafer box temporary storage area or recycling station according to the predetermined route. At the same time, after the MES system confirms that the overhead crane has completed this transportation task, it ends the dispatch instruction for the overhead crane and prepares for the next round of task scheduling.

[0074] Furthermore, in the first machine, if multiple batches of goods are dispatched at one time:

[0075] The control terminal of the first machine sends a plurality of cargo handling requests to the overhead crane system;

[0076] The overhead crane system sequentially delivers the multiple batches of goods to the first machine; and each time the goods are delivered to the first machine, the wafer storage boxes are untied, and the control end of the first machine unbinds the binding information A so that the placement pieces are taken out;

[0077] When the delivery of a batch of goods is completed and the empty wafer storage boxes are taken away by the overhead crane system, the control end of the first machine sends a request to the overhead crane system to deliver the next batch.

[0078] The method is used to transport multiple batches of goods for furnace tube machines as follows:

[0079] MES sends detailed dispatch information to the control end of the furnace tube machine (machine automation software EAP). After receiving the information, EAP recognizes that this is a dispatch task for multiple batches of goods, and immediately sends a request to move multiple batches of goods to the overhead crane system.

[0080] After receiving the request, the overhead crane system will prioritize the dispatch of the idle overhead crane closest to the first batch of goods to the temporary storage area based on the intelligent scheduling algorithm. The overhead crane grabs the first batch of crystal boxes with jams in the temporary storage area and transports them smoothly to the feed port of the furnace tube machine along the preset high-speed track.

[0081] When the first batch of goods arrives at the furnace tube machine, the key on the machine triggers the electronic unlocking switch at the bottom of the crystal box, the crystal box cover automatically opens, and the robotic arm accurately removes the plug according to the preset program and places it in the heating chamber inside the furnace tube machine for processing, and then the crystal box cover is closed and locked again. During this process, the EAP of the furnace tube machine synchronously unbinds the binding information A between the crystal box and the plug to ensure the real-time update and accuracy of the system data.

[0082] After the crane system completes the transportation and removal of the first batch of goods, it transports the empty cassettes to the designated empty cassette storage area. At this time, EAP immediately sends a request to the crane system to transport the next batch of goods according to the preset task flow. The crane system repeats the above transportation and operation process, and efficiently transports the remaining 4 batches of goods to the furnace tube machine in turn, and ensures that the operations of unlocking the cassettes, removing the placement parts, and unbinding the binding information for each batch of goods are performed accurately.

[0083] During the entire processing of multiple batches of goods, MES always maintains progress monitoring and data management of each batch of goods to ensure the orderly progress of the production process and the integrity of the data until all batches of goods complete the predetermined process processing on the furnace tube machine.

[0084] This method can shorten the processing time to less than 3 hours through efficient overhead crane scheduling and automated operation, significantly improving the production speed and increasing the output per unit time.

[0085] Accurate binding information management and automated process control ensure that each batch of goods can enter the processing link accurately, avoiding production delays and rework caused by goods confusion or incorrect operation, further optimizing the production process and improving overall production efficiency.

[0086] In a specific embodiment, the second machine includes an inlet and an outlet;

[0087] In the second machine, the overhead crane system delivers the wafer storage box with the placement member to the second machine (wet process machine);

[0088] At the receiving end of the second machine, after the wafer storage box is unlocked and the placement piece is taken away, the control end of the second machine sends a request to the overhead crane system to transport an empty wafer storage box;

[0089] The overhead crane system transports the empty wafer storage box to the shipping end of the second machine, and takes away the placement piece associated with the binding information A at the shipping end of the second machine.

[0090] Specifically, the overhead crane system transports the empty wafer storage box to the shipping end of the second machine, and takes away the placement piece associated with the binding information A at the shipping end, including:

[0091] The control terminal of the second machine feeds back a processing completion signal to the first control system and requests the goods to be shipped out;

[0092] The first control system receives feedback from the control end of the machine and confirms to the control end of the second machine that the goods are allowed to leave the station;

[0093] After receiving the confirmation that the cargo is allowed to leave the station, the control terminal of the second machine sends a cargo leaving the station transfer request to the overhead travelling crane system;

[0094] The overhead crane system transports the empty wafer storage box to the shipping end of the second machine according to the cargo outbound transport request to receive the processed cargo.

[0095] In this embodiment, the method for transporting goods by a crane is as follows:

[0096] The MES system determines what needs to be processed on the wet process machine based on process requirements and production plans. The MES first sends detailed dispatch information to the wet process machine control terminal (machine automation software EAP), and the overhead crane system also receives and interprets relevant instructions from EAP.

[0097] According to the instructions, the overhead crane system grabs the crystal box (wafer storage box) with the plug (placement part) from the temporary storage area and transports it to the inlet of the wet process machine along the predetermined track. After the crystal box arrives at the inlet, the automatic unlocking mechanism (key) on the machine triggers the unlocking device at the bottom of the crystal box, and the crystal box cover opens smoothly. The robot arm accurately removes the plug according to the preset program and places it in the reaction chamber inside the wet process machine, ready for the chemical wet treatment process, and then the crystal box cover is closed and locked again. At this time, the EAP of the wet process machine sends a request to the overhead crane system to transport the empty crystal box.

[0098] After receiving the request, the overhead crane system quickly dispatches the overhead crane to move the empty wafer box to the shipping end of the wet process machine and waits for the next instruction at the shipping end. After the wet process machine completes the processing of the wafer, the EAP feeds back the processing end signal to the MES and requests the goods to be shipped out. After receiving the feedback information, the MES verifies the data and confirms the process, and then sends a confirmation message to the EAP of the wet process machine to allow the goods to be shipped out.

[0099] After receiving the confirmation information, the EAP sends a request to the overhead crane system to transport the goods out of the station. Based on the request, the overhead crane system operates the overhead crane again to accurately place the empty crystal box at the designated location of the shipping end. At the same time, the robotic arm takes out the processed jammer associated with the binding information A from the inside of the machine and places it in the crystal box to complete the reloading of the goods. Subsequently, the overhead crane system transports the crystal box containing the processed goods to the next production link or the designated storage area to ensure the continuity and efficiency of the entire production process. This method can quickly respond to requests from the machine control end, and promptly transport empty crystal boxes and loaded processed goods, reducing time delays caused by manual coordination or equipment waiting in traditional transportation methods.

[0100] Furthermore, after the delivery end takes away the placement piece associated with the binding information A, the method further includes:

[0101] The control terminal of the second machine feeds back the real-time processing progress to the first control system;

[0102] The first control system controls the operation of the overhead crane system according to the real-time processing progress.

[0103] In a more preferred embodiment, the present application also includes: during the processing, the control end of the wet process machine (machine automation software EAP) collects key processing parameters such as chemical solution concentration changes, temperature fluctuations, wafer surface reaction progress, etc. in real time through built-in sensors and monitoring modules, and calculates the real-time processing progress based on these parameters. For example, when a chemical etching step is completed by 30%, EAP will immediately feed back this progress information to MES.

[0104] After receiving the feedback, MES analyzes the progress information according to its built-in process optimization algorithm and production scheduling logic. If the analysis results show that the current processing progress is normal and the materials and equipment required for the subsequent processes are ready, MES will maintain the current operating status of the overhead crane system or schedule the overhead crane to perform other auxiliary operations according to the predetermined plan, such as moving the raw materials to be used for the next batch of processing to the temporary storage area.

[0105] However, if MES finds that the processing progress is abnormal, such as the etching rate is too slow due to the deviation of solution concentration, which may affect product quality and delivery time, MES will immediately activate the emergency plan. It may send instructions to the overhead crane system, requiring the overhead crane to quickly transport a specific chemical reagent replenishment device to the vicinity of the wet process machine so that the staff can adjust the solution concentration in time; or adjust the priority of the overhead crane's transportation tasks to give priority to transporting spare plugs or crystal boxes that are closely related to the current processing batch, to ensure that the damaged wafers or materials can be replaced in time when problems occur, to ensure production continuity and product quality.

[0106] In practical applications, the wafer storage box 1 includes a bottom box 11 and an upper box body 12, wherein the upper box body 12 is disposed on the bottom box 11, and the upper box body 12 is detachably disposed on the bottom box 11;

[0107] The bottom box 11 is provided with a switch port 13, and a key for unlocking the bottom box 11 and the upper box body 12 is provided on the machine platform;

[0108] When the switch port 13 of the bottom box 11 is placed on the key, the upper box body 12 is separated from the bottom box 11 .

[0109] When the wafer storage box 1 reaches the designated position of the furnace tube machine, the mechanical device on the machine will automatically align the switch port 13 of the bottom box 11 with the key specially set on the machine. This key is a precisely designed and manufactured mechanical unlocking component, and its shape and size match the switch port 13 of the bottom box 11. Once the switch port 13 of the bottom box 11 is placed on the key, the key will trigger a series of unlocking actions through the internal mechanical structure, so that the upper box body 12 and the bottom box 11 are separated smoothly. At this time, the machine's mechanical arm will quickly and accurately remove the placement piece (stuck) from the bottom box 11 and place it in the processing area inside the furnace tube machine for subsequent process processing.

[0110] This design makes the unlocking and picking and placing operations on the machine extremely simple and efficient, reducing the operating steps and time and improving operating efficiency.

[0111] Furthermore, a material taking robot arm is provided in the machine, and the material taking robot arm is used to take out the placed pieces in the wafer storage box;

[0112] And when the material-retrieving robot arm takes away the placement items in the wafer storage box, the control end of the machine unbinds the binding information A.

[0113] The application of the material-retrieving robot arm realizes the automated operation of retrieving the placed parts from the wafer storage box, replacing the traditional manual material-retrieving method. This not only greatly improves the speed and accuracy of material retrieval, but also reduces the interference of human factors on the production process. The operation of synchronously unbinding the binding information A during the material-retrieving process ensures that the data in the machine control end and the MES system always remain accurate and consistent. This avoids production confusion and material mismatch problems caused by data errors or inconsistencies, and ensures the orderly progress of the production process and the traceability of the products. For example, if the binding information A is erroneous or confusing, it may cause the processed wafers to be unable to correctly match the wafer box for subsequent transportation and storage, seriously affecting the production schedule and product quality. The patented method effectively solves this problem and ensures the continuity of production.

[0114] Furthermore, the first control system is a manufacturing execution system, and the first control system generates dispatch information according to the production order, specifically including:

[0115] According to the order information, select the corresponding wafer storage box;

[0116] And according to the selected wafer storage box, one or more batches of dispatch information are generated.

[0117] The manufacturing execution system achieves the best match between materials and production tasks through accurate analysis of order information and reasonable selection of wafer storage boxes. It avoids production delays or product quality problems caused by improper material selection, ensures that the wafer storage boxes used in the production process can meet the special process requirements of the wafer, and improves the stability of product quality.

[0118] Example 3

[0119] Corresponding to the aforementioned method embodiments, the present application also provides an electronic device and corresponding embodiments.

[0120] See also Figure 5 , the electronic device 1000 includes a memory 1010 and a processor 1020 .

[0121] The processor 1020 may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or the processor may be any conventional processor, etc.

[0122] The memory 1010 may include various types of storage units, such as system memory, read-only memory (ROM), and permanent storage devices. Among them, ROM can store static data or instructions required by the processor 1020 or other modules of the computer. The permanent storage device may be a readable and writable storage device. The permanent storage device may be a non-volatile storage device that does not lose the stored instructions and data even after the computer is powered off. In some embodiments, the permanent storage device uses a large-capacity storage device (such as a magnetic or optical disk, flash memory) as a permanent storage device. In some other embodiments, the permanent storage device may be a removable storage device (such as a floppy disk, optical drive). The system memory may be a readable and writable storage device or a volatile readable and writable storage device, such as a dynamic random access memory. The system memory may store some or all instructions and data required by the processor at run time. In addition, the memory 1010 may include any combination of computer-readable storage media, including various types of semiconductor memory chips (DRAM, SRAM, SDRAM, flash memory, programmable read-only memory), and disks and / or optical disks may also be used. In some embodiments, the memory 1010 may include a readable and / or writable removable storage device, such as a laser disc (CD), a read-only digital versatile disc (e.g., DVD-ROM, double-layer DVD-ROM), a read-only Blu-ray disc, an ultra-density optical disc, a flash memory card (e.g., SD card, minSD card, Micro-SD card, etc.), a magnetic floppy disk, etc. The computer-readable storage medium does not include carrier waves and transient electronic signals transmitted wirelessly or wired.

[0123] The memory 1010 stores executable codes, and when the executable codes are processed by the processor 1020 , the processor 1020 can execute part or all of the methods described above.

[0124] A second object of the present invention is to provide an electronic device, comprising:

[0125] Processor; and

[0126] The memory stores executable codes thereon, and when the executable codes are executed by the processor, the processor is caused to execute the method as described above.

[0127] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to those of ordinary skill in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so that once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings. In the description of the present application, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present application; the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0128] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0129] In addition, it should be noted that the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this application. The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for controlling cargo transportation by overhead crane in semiconductor automation factory, characterized in that: include: The control end of the machine sends the dispatching requirements to the overhead travelling crane system according to the dispatching information of the first control system; According to the dispatching requirements, the overhead crane system transports the goods to the machine; wherein the goods include a wafer storage box and a placement piece for storing wafers, and the placement piece is located in the wafer storage box; the first control system and the control end of the machine both store the binding information A of the wafer storage box and the placement piece; The goods arrive at the machine, the wafer storage box is unlocked, the placement piece is taken out, and the overhead crane system transports the empty wafer storage box away; When the wafer storage box is opened, the control end of the machine unbinds the binding information A, and the first control system still stores the binding information A.

2. The control method for overhead crane cargo transportation in semiconductor automation factory according to claim 1, characterized in that: The machine comprises a first machine and a second machine; In the first machine, if one dispatch is for one cargo: The overhead crane system delivers the wafer storage box with the placement member to the first machine; At the first machine, after the wafer storage box is unlocked and the placement piece is taken away, the control end of the first machine sends a request to the overhead crane system to transport an empty wafer storage box; The overhead crane system takes away the empty wafer storage box, and the first control system ends the overhead crane dispatch instruction.

3. The control method for overhead crane cargo transportation in semiconductor automation factory according to claim 2, characterized in that: In the first machine, if multiple batches of goods are dispatched at one time: The control terminal of the first machine sends a plurality of cargo handling requests to the overhead crane system; The overhead crane system sequentially delivers the multiple batches of goods to the first machine; and each time the goods are delivered to the first machine, the wafer storage boxes are untied, and the control end of the first machine unbinds the binding information A so that the placement pieces are taken out; When the delivery of a batch of goods is completed and the empty wafer storage boxes are taken away by the overhead crane system, the control end of the first machine sends a request to the overhead crane system to deliver the next batch.

4. The control method for overhead crane cargo transportation in semiconductor automation factory according to claim 2, characterized in that: The second machine includes an inlet and an outlet; In the second machine, the overhead crane system delivers the wafer storage box with the placement member to the second machine; At the receiving end of the second machine, after the wafer storage box is unlocked and the placement piece is taken away, the control end of the second machine sends a request to the overhead crane system to transport an empty wafer storage box; The overhead crane system transports the empty wafer storage box to the shipping end of the second machine, and takes away the placement piece associated with the binding information A at the shipping end of the second machine.

5. The control method for overhead crane cargo transportation in semiconductor automation factory according to claim 4, characterized in that: The overhead crane system transports the empty wafer storage box to the shipping end of the second machine, and takes away the placement piece associated with the binding information A at the shipping end, including: The control terminal of the second machine feeds back a processing completion signal to the first control system and requests the goods to be shipped out; The first control system receives feedback from the control end of the machine and confirms to the control end of the second machine that the goods are allowed to leave the station; After receiving the confirmation that the cargo is allowed to leave the station, the control terminal of the second machine sends a cargo leaving the station transfer request to the overhead travelling crane system; The overhead crane system transports the empty wafer storage box to the shipping end of the second machine according to the cargo outbound transport request to receive the processed cargo.

6. The control method for overhead crane cargo transportation in semiconductor automation factory according to claim 5, characterized in that: After the delivery end takes away the placement piece associated with the binding information A, the method further includes: The control terminal of the second machine feeds back the real-time processing progress to the first control system; The first control system controls the operation of the overhead crane system according to the real-time processing progress.

7. The control method for overhead crane cargo transportation in a semiconductor automation factory according to any one of claims 1 to 6, characterized in that: The wafer storage box comprises a bottom box and an upper box body, wherein the upper box body is arranged on the bottom box, and the upper box body is detachably arranged on the bottom box; The bottom box is provided with a switch port, and the machine platform is provided with a key for unlocking the bottom box and the upper box body; When the switch port of the bottom box is placed on the key, the upper box body is separated from the bottom box.

8. The control method for overhead crane cargo transportation in semiconductor automation factory according to claim 7, characterized in that: The machine is provided with a material taking robot arm, and the material taking robot arm is used to take out the placed pieces in the wafer storage box; And when the material-retrieving robot arm takes away the placement items in the wafer storage box, the control end of the machine unbinds the binding information A.

9. The control method for overhead crane cargo transportation in semiconductor automation factory according to claim 1, characterized in that: The first control system is a manufacturing execution system, and the first control system generates dispatch information according to the production order, specifically including: According to the order information, select the corresponding wafer storage box; And according to the selected wafer storage box, one or more batches of dispatch information are generated.

10. An electronic device, characterized in that: include: processor; as well as A memory having executable codes stored thereon, which, when executed by the processor, causes the processor to execute the method according to any one of claims 1 to 9.

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