Mask assembly, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus

Abstract

The invention relates to a mask assembly, an apparatus for manufacturing a display apparatus, and a method of manufacturing a display apparatus. The mask assembly includes: a mask frame including an open region; and a mask sheet covering at least a portion of the opening region and disposed on the mask frame. The mask sheet includes: a nip portion fixed to the mask frame; the connecting rod is arranged to be separated from the clamping part; and a plurality of sub-masks disposed between the nip portion and the connecting rod and defining a pattern hole, and the connecting rod is disposed between sub-masks adjacent to each other among the plurality of sub-masks to support each of the sub-masks adjacent to each other, and end portions of the sub-masks disposed on the connecting rod are spaced apart from each other.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and all benefits derived from Korean Patent Application No. 10-2023-0162733, filed on November 21, 2023, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] Embodiments relate to apparatuses and methods, and more particularly, to a mask assembly, an apparatus for manufacturing a display apparatus, and a method of manufacturing a display apparatus. Background Art

[0004] Mobile electronic devices are widely used. As mobile electronic devices, recently, tablet personal computers ("PCs") and miniaturized electronic devices such as mobile phones have been widely used.

[0005] In order to support various functions (e.g., for providing visual information such as images to users), mobile electronic devices include display devices. Recently, as components driving display devices are miniaturized, the proportion of display devices in electronic devices has gradually increased, and structures that can be bent from a flat state to form a preset angle are also being developed.

[0006] Such a display device may include various layers disposed on a substrate in a constant pattern. In this case, at least one of the various layers may be formed by a mask assembly in which at least one pattern hole is defined. Summary of the invention

[0007] The mask assembly includes a mask in which at least one pattern hole is defined, and a mask frame on which the mask is disposed. In this case, when the mask is disposed on the mask frame, the at least one pattern hole may not be defined at a preset position, but may be defined at a different position due to deformation of the mask. In this case, because the display device manufactured by the mask assembly includes pixels that are not arranged in a fine pattern, a clear image may not be displayed. Embodiments include a mask assembly in which an opening having a fine pattern is defined, an apparatus for manufacturing a display device, and a method for manufacturing a display device.

[0008] Additional features will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments of the disclosure.

[0009] In an embodiment of the present disclosure, a mask assembly includes: a mask frame, including an opening area; and a mask sheet, which covers at least a portion of the opening area and is arranged on the mask frame, wherein the mask sheet includes: a clamping portion, fixed to the mask frame; a connecting rod, spaced apart from the clamping portion; and a plurality of sub-masks, arranged between the clamping portion and the connecting rod, and the plurality of sub-masks define pattern holes, and the connecting rod is arranged between adjacent sub-masks among the plurality of sub-masks and supports each of the adjacent sub-masks, and the ends of the adjacent sub-masks arranged on the connecting rod are spaced apart from each other.

[0010] In an embodiment, each of the mutually adjacent sub-masks disposed on the connecting bar may be coupled to the connecting bar through a plurality of welding points arranged in a row.

[0011] In an embodiment, the plurality of welding points may be arranged in a direction perpendicular to a longitudinal direction of one of the plurality of sub-masks.

[0012] In an embodiment, the width of the connecting rod may be in a range of about 5 millimeters (mm) to about 100 mm.

[0013] In an embodiment, the thickness of the connecting bar may be at least the thickness of one sub-mask among the plurality of sub-masks and be within the range of 1 mm or less.

[0014] In an embodiment, the sub-masks adjacent to each other may be tensioned in a first direction and fixed to the clamping portion and the connecting rod.

[0015] In an embodiment, the mask sheet may be tensioned in a second direction different from the first direction and fixed to the mask frame.

[0016] In an embodiment, the mask assembly may further include a support rod disposed on the mask frame and intersecting the opening area.

[0017] In an embodiment, the support rod may define an opening, and the connecting rod is embedded in the opening.

[0018] In an embodiment of the present disclosure, an apparatus for manufacturing a display device includes: a deposition source, and a mask assembly facing the deposition source, wherein the mask assembly includes: a mask frame including an opening area; and a mask sheet, the mask sheet shielding at least a portion of the opening area and disposed on the mask frame, wherein the mask sheet includes: a clamping portion fixed to the mask frame; a connecting rod spaced apart from the clamping portion; and a plurality of sub-masks arranged between the clamping portion and the connecting rod, and the plurality of sub-masks define pattern holes, and the connecting rod is disposed between adjacent sub-masks among the plurality of sub-masks and supports each of the adjacent sub-masks, and the ends of the adjacent sub-masks disposed on the connecting rod are spaced apart from each other.

[0019] In an embodiment, each of the mutually adjacent sub-masks disposed on the connecting bar may be coupled to the connecting bar through a plurality of welding points arranged in a row.

[0020] In an embodiment, the plurality of welding points may be arranged in a direction perpendicular to a longitudinal direction of one of the plurality of sub-masks.

[0021] In an embodiment, the width of the connecting rod may be in a range of about 5 mm to about 100 mm.

[0022] In an embodiment, the thickness of the connecting bar may be at least the thickness of one sub-mask among the plurality of sub-masks and be within the range of 1 mm or less.

[0023] In an embodiment, the sub-masks adjacent to each other may be stretched in a first direction and fixed to the clamping portion and the connecting rod.

[0024] In an embodiment, the mask sheet may be tensioned in a second direction different from the first direction and fixed to the mask frame.

[0025] In an embodiment, the mask assembly may further include a support rod disposed on the mask frame and intersecting the opening area.

[0026] In an embodiment, the support rod may define an opening, and the connecting rod is embedded in the opening.

[0027] In an embodiment of the present disclosure, a method for manufacturing a display device includes: arranging a mask assembly and a substrate inside a chamber; and passing a deposition material supplied from a deposition source through the mask assembly and depositing the deposition material on the substrate, wherein the mask assembly includes: a mask frame including an opening area; and a mask sheet, the mask sheet shielding at least a portion of the opening area and arranged on the mask frame, wherein the mask sheet includes: a clamping portion fixed to the mask frame; a connecting rod spaced apart from the clamping portion; and a plurality of sub-masks arranged between the clamping portion and the connecting rod, and the plurality of sub-masks define pattern holes, and the connecting rod is arranged between adjacent sub-masks among the plurality of sub-masks and supports each of the adjacent sub-masks, and the ends of the adjacent sub-masks arranged on the connecting rod are spaced apart from each other.

[0028] In an embodiment, each of the mutually adjacent sub-masks disposed on the connecting bar may be coupled to the connecting bar through a plurality of welding points arranged in a row.

[0029] In an embodiment, the plurality of welding points may be arranged in a direction perpendicular to a longitudinal direction of one of the plurality of sub-masks.

[0030] In an embodiment, the width of the connecting rod may be in the range of about 5 mm to about 100 mm.

[0031] In an embodiment, the thickness of the connecting bar may be at least the thickness of one sub-mask among the plurality of sub-masks and be within the range of 1 mm or less.

[0032] In an embodiment, the sub-masks adjacent to each other may be stretched in a first direction and fixed to the clamping portion and the connecting rod.

[0033] In an embodiment, the mask sheet may be tensioned in a second direction different from the first direction and fixed to the mask frame.

[0034] In an embodiment, a support rod may be disposed on the mask frame and cross the opening area.

[0035] In an embodiment, the support rod may define an opening, and the connecting rod is embedded in the opening.

[0036] These and / or other aspects will become apparent and more readily appreciated from the following detailed description of the embodiments, the accompanying drawings, and the claims.

[0037] These general and specific aspects can be implemented by a system, a method, a computer program, or a combination of specific systems, methods, and computer programs. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The above and other features and advantages of illustrative embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0039] Figure 1 is a cross-sectional view of an embodiment of an apparatus for manufacturing a display device;

[0040] Figure 2 is a schematic perspective view of an embodiment of a mask assembly;

[0041] Figure 3 is a schematic plan view of an embodiment of a mask sheet;

[0042] Figure 4 is an embodiment of the mask sheet along Figure 3 A schematic cross-sectional view taken along line IV-IV';

[0043] Figure 5 is a schematic plan view of the support rod;

[0044] Figure 6 is an embodiment of a mask assembly along Figure 5 A schematic cross-sectional view taken along line IV-IV';

[0045] Figure 7 is a cross-sectional view for comparing an embodiment of a mask assembly and a comparative example of a mask assembly;

[0046] Figure 8 is a schematic plan view of an embodiment of a support rod;

[0047] Fig. 9 and Fig.10 is a schematic plan view of an embodiment of a support rod;

[0048] Fig.11 is a schematic plan view of an embodiment of a display device manufactured by an apparatus for manufacturing a display device; and

[0049] Fig.12 An embodiment of a display device manufactured by an apparatus for manufacturing a display device Fig.11 A cross-sectional view taken along line XII-XII'. DETAILED DESCRIPTION

[0050] Reference will now be made in detail to an embodiment, an illustrative embodiment of which is shown in the accompanying drawings, in which the same reference numerals always refer to the same elements. In this regard, the embodiments shown may have different forms and should not be construed as being limited to the description set forth herein. Therefore, the embodiments are described below only by reference to the accompanying drawings to explain the features of this description. As used herein, the term "and / or" includes any and all combinations of one or more related listed items. Throughout this disclosure, the expression "at least one of a, b, and c" means only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or their variations.

[0051] Since the present disclosure allows various changes and numerous embodiments, illustrative embodiments will be shown in the drawings and described in the written description. The effects and features of the present disclosure and methods for achieving these effects and features will be explained with reference to the embodiments described in detail below with reference to the drawings. However, the present disclosure is not limited to the following embodiments and can be implemented in various forms.

[0052] Hereinafter, embodiments will be described with reference to the accompanying drawings, in which like reference numerals refer to like elements throughout and repeated descriptions thereof will be omitted.

[0053] Although terms such as "first" and "second" may be used to describe various elements, these elements are not necessarily limited to the above terms. The above terms are used to distinguish one element from another.

[0054] As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0055] It will be understood that the terms “comprise”, “comprising” and / or “include”, “including” as used herein specify the presence of stated features or elements, but do not preclude the addition of one or more other features or elements.

[0056] It will be further understood that when a layer, region or element is referred to as being “on” another layer, region or element, it can be directly or indirectly on the other layer, region or element. That is, for example, intervening layers, regions or elements may be present.

[0057] For convenience of explanation, the size of the elements in the drawings may be exaggerated or reduced. As an example, the size and thickness of each element shown in the drawings are arbitrarily represented for convenience of explanation, and therefore, the present disclosure is not necessarily limited thereto.

[0058] The x-direction, y-direction, and z-direction are not limited to the directions indicated by the three axes of the rectangular coordinate system and can be interpreted in a broader sense. For example, the x-direction, y-direction, and z-direction can be perpendicular to each other, or can represent different directions that are not perpendicular to each other.

[0059] In the case where a particular embodiment can be implemented differently, the specific process sequence can be performed in a different order than the described order. As an example, two processes described in succession can be performed substantially simultaneously or in a reverse order.

[0060] As used herein, "about" or "approximately" includes the stated value and means within an acceptable range of deviation for the particular value as determined by one of ordinary skill in the art, taking into account the measurement in question and the errors associated with the measurement of the particular quantity (i.e., the limitations of the measurement system). For example, a term such as "about" can mean within one or more standard deviations, or within ±30%, ±20%, ±10%, or ±5% of the stated value.

[0061] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those commonly understood by those skilled in the art to which the present disclosure belongs. It will also be understood that, unless expressly defined as such herein, terms (such as those defined in general dictionaries) should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted in an overly idealized or overly formalized meaning.

[0062] Figure 1 is a cross-sectional view of an embodiment of an apparatus 2 for manufacturing a display device

[0063] refer to Figure 1 , an apparatus 2 for manufacturing a display device may include a chamber 10 , a substrate support 20 , a mask support 30 , a mask assembly MA, a deposition source 50 , a magnetic part 60 , a visual part 70 , and a pressure regulator 80 .

[0064] A space may be formed inside the chamber 10. The display substrate DS and the mask assembly MA may be accommodated in the space. In this case, a portion of the chamber 10 may be opened. The gate valve 11 may be installed in the open portion of the chamber 10. In this case, the open portion of the chamber 10 may be opened or closed according to the operation of the gate valve 11.

[0065] In this case, the display substrate DS may refer to a substrate in which at least one of an organic layer, an inorganic layer, and a metal layer is deposited on a substrate 100 (refer to Fig.12In an alternative embodiment, the display substrate DS may be a substrate 100 on which any one of an organic layer, an inorganic layer, and a metal layer is not deposited.

[0066] The substrate support 20 may support the display substrate DS. In this case, the substrate support 20 may be in the form of a plate fixed inside the chamber 10. In another embodiment, the substrate support 20 may be in the form of a shuttle in which the display substrate DS is placed and may be linearly moved inside the chamber 10. In another embodiment, the substrate support 20 may include an electrostatic chuck or an adhesive chuck disposed inside the chamber 10 to be fixed inside the chamber 10 or movable inside the chamber 10.

[0067] The mask support 30 may support the mask assembly MA. In this case, the mask support 30 may be disposed inside the chamber 10. The mask support 30 may fine-tune the position of the mask assembly MA. In this case, the mask support 30 may include a separate driver or alignment unit, etc., to move the mask assembly MA in different directions.

[0068] In another embodiment, the mask support 30 may be in the form of a shuttle. In this case, the mask assembly MA may be placed on the mask support 30. The mask support 30 may transfer the mask assembly MA. In an embodiment, the mask support 30 may be moved to the outside of the chamber 10, and after the mask assembly MA is placed on the mask support 30, the mask support 30 may enter the inside of the chamber 10 from the outside of the chamber 10.

[0069] In this case, the substrate support 20 may be integral with the mask support 30. In this case, the substrate support 20 and the mask support 30 may include a movable shuttle. In this case, the substrate support 20 and the mask support 30 may include a structure that fixes the mask assembly MA to the display substrate DS and the display substrate DS is placed on the mask assembly MA and simultaneously linearly moves the display substrate DS and the mask assembly MA.

[0070] Hereinafter, for convenience of description, a form in which the substrate support 20 and the mask support 30 are distinguished from each other and disposed at different positions and a form in which the substrate support 20 and the mask support 30 are disposed inside the chamber 10 are mainly described in detail.

[0071] The deposition source 50 may be disposed to face the mask assembly MA. In this case, the deposition material may be contained in the deposition source 50. By applying heat to the deposition material, the deposition material may evaporate or sublime. The deposition source 50 may be fixed inside the chamber 10, or disposed inside the chamber 10 to be linearly movable in one direction.

[0072] The mask assembly MA may be disposed inside the chamber 10. In this case, the mask assembly MA may include a mask frame 500 and a mask sheet 400. This is described in detail later. The deposition material may pass through the mask assembly MA and be deposited on the display substrate DS.

[0073] The magnetic part 60 may be disposed inside the chamber 10 to face the display substrate DS and / or the mask assembly MA. In this case, the magnetic part 60 may apply a magnetic force to the mask assembly MA and attract the mask assembly MA toward the display substrate DS. In particular, the magnetic part 60 may not only prevent the sagging of the mask sheet 400 but also make the mask sheet 400 adjacent to the display substrate DS. In addition, the magnetic part 60 may maintain a consistent interval between the mask sheet 400 and the display substrate DS.

[0074] The visual part 70 can be set in the chamber 10, and can capture the position of the display substrate DS and the position of the mask assembly MA. In this case, the visual part 70 may include a camera that captures the display substrate DS and the mask assembly MA. The position of the display substrate DS and the position of the mask assembly MA can be determined based on the image captured by the visual part 70, and the deformation of the mask assembly MA can be determined. In addition, based on the captured image, the substrate support 20 can fine-tune the position of the display substrate DS or the mask support 30 can fine-tune the position of the mask assembly MA. Hereinafter, the situation in which the mask support 30 fine-tunes the position of the mask assembly MA and aligns the position of the display substrate DS with the position of the mask assembly MA is mainly described in detail.

[0075] The pressure regulator 80 may be connected to the chamber 10 and adjust the internal pressure of the chamber 10. In an embodiment, the pressure regulator 80 may adjust the internal pressure of the chamber 10 to be equal to or similar to the atmospheric pressure. In addition, the pressure regulator 80 may adjust the internal pressure of the chamber 10 to be equal to or similar to a vacuum state.

[0076] The pressure regulator 80 may include a connection pipe 81 connected to the chamber 10 and a pump 82 mounted to the connection pipe 81. In this case, according to the operation of the pump 82, external air may be introduced through the connection pipe 81, or gas inside the chamber 10 may be guided to the outside through the connection pipe 81.

[0077] A method of manufacturing a display device (not shown) by the apparatus 2 for manufacturing the display device is described. First, a display substrate DS may be prepared.

[0078] The pressure regulator 80 may maintain the interior of the chamber 10 at a state equal to or similar to the atmospheric pressure. The gate valve 11 may operate to open an opening portion of the chamber 10.

[0079] Then, the display substrate DS may be loaded from the outside into the inside of the chamber 10. In this case, the display substrate DS may be loaded into the chamber 10 in various methods. In an embodiment, the display substrate DS may be loaded from the outside of the chamber 10 into the inside of the chamber 10 by a robot arm disposed outside the chamber 10. In another embodiment, in the case where the substrate support 20 is formed in the form of a shuttle, the substrate support 20 may be carried from the inside of the chamber 10 to the outside of the chamber 10, and then, the display substrate DS may be mounted on the substrate support 20 by a separate robot arm disposed outside the chamber 10, and the substrate support 20 may be loaded from the outside of the chamber 10 into the inside of the chamber 10.

[0080] As described above, the mask assembly MA may be disposed inside the chamber 10. In another embodiment, the mask assembly MA may be loaded into the inside of the chamber 10 from the outside of the chamber 10 in the same or similar manner as the display substrate DS.

[0081] When the display substrate DS is loaded into the interior of the chamber 10, the display substrate DS may be placed on the substrate support 20. In this case, the visual portion 70 may capture the position of the display substrate DS and the position of the mask assembly MA. The position of the display substrate DS and the position of the mask assembly MA may be determined based on the image captured by the visual portion 70. In this case, the apparatus 2 for manufacturing a display device may include a separate controller (not shown) to determine the position of the display substrate DS and the position of the mask assembly MA.

[0082] When the determination of the position of the display substrate DS and the position of the mask assembly MA is completed, the mask supporter 30 may finely adjust the position of the mask assembly MA.

[0083] Then, the deposition source 50 operates to supply the deposition material toward the mask assembly MA, and the deposition material passing through the plurality of pattern holes of the mask sheet 400 may be deposited on the display substrate DS. In this case, the deposition source 50 may move in parallel with the display substrate DS and the mask assembly MA, or the display substrate DS and the mask assembly MA may move in parallel with the deposition source 50. That is, the deposition source 50 may move relative to the display substrate DS and the mask assembly MA. In this case, the pump 82 may maintain the pressure of the chamber 10 in a state equal to or similar to vacuum by sucking gas inside the chamber 10 and discharging the gas to the outside.

[0084] As described above, the deposition material supplied from the deposition source 50 may pass through the mask assembly MA, be deposited on the display substrate DS, and thus form at least one of a plurality of layers (eg, organic layers, inorganic layers, and metal layers stacked in the display device described later).

[0085] Figure 2is a schematic perspective view of an embodiment of a mask assembly MA, and shows that it can be used in an apparatus 2 (refer to Figure 1 ) mask assembly MA used. Figure 3 is a schematic plan view of an embodiment of a mask sheet 400 . Figure 4 The embodiment of the mask sheet 400 is along Figure 3 Schematic cross-sectional view taken along line IV-IV'.

[0086] refer to Figures 2 to 4 The mask assembly MA may include a mask frame 500 , a mask sheet 400 , shielding rods 600 , and support rods 700 .

[0087] The mask frame 500 may include a plurality of sides connected to each other, and include an open area OA defined by the plurality of sides. That is, the open area OA may be surrounded by the plurality of sides and may pass through the center of the mask frame 500.

[0088] In an embodiment, the mask frame 500 may be a quadrilateral frame. However, the shape of the mask frame 500 is not limited thereto, but may be various other polygonal shapes. Hereinafter, for ease of description, the case where the mask frame 500 is a quadrilateral frame is mainly described.

[0089] In the case where the mask frame 500 is a quadrilateral frame, a plurality of sides may include Figure 2 The first side S1 extending in the x direction in the first direction and the second side S2 extending in the second direction intersecting the first direction (for example, Figure 2 The first side S1 is provided as a pair facing each other, and the second side S2 is provided as a pair facing each other, so the first side S1 can be connected to the second side S2. In an embodiment, the first side S1 can be a long side, and the second side S2 can be a short side. However, the present disclosure is not limited to this, but the first side S1 can be a short side, and the second side S2 can be a long side, or the length of the first side S1 can be equal to the length of the second side S2. In the following, for the convenience of description, the case where the first side S1 is a long side and the second side S2 is a short side is mainly described.

[0090] The mask sheet 400 may be tensioned in the longitudinal direction (eg, the second direction) of the mask sheet 400 and fixed to the mask frame 500. The open area OA in the center of the mask frame 500 may be covered by the mask sheet 400. Figure 24 shows that the mask sheet 400 includes a first mask sheet 400A and a second mask sheet 400B, but in an embodiment, at least one mask sheet 400 may be provided. In the case where two or more mask sheets 400 are provided, the mask sheets 400 may be arranged on the mask frame 500 to be parallel to each other. In an embodiment, the mask sheet 400 may be arranged in a first direction (e.g., Figure 2 For example, two opposite ends of the mask sheet 400 may be fixed to the mask frame 500 by welding.

[0091] In an embodiment, the mask sheet 400 may be an extended mask sheet 400 in which a plurality of sub-masks 410 are connected to each other. Because the sub-mask sheet 400 may be formed to have a substantially wide width ( Figure 3 Since the mask sheet 400 has a length in the x direction (i.e., a width of 20 mm or more), a display device having a substantially wide width can be manufactured.

[0092] In an embodiment, the mask sheet 400 may include a sub-mask 410, a connecting rod 420, and a main clamping portion 430. In an embodiment, although the sub-mask 410 may be Figure 3 The sub-mask 410 may be provided in a plurality. In an embodiment, the sub-mask 410 may include a first sub-mask 411, a second sub-mask 412, a third sub-mask 413, a fourth sub-mask 414, and a fifth sub-mask 415. Figure 3 As shown in , the sub-mask 410 may include five sub-masks, but the present disclosure is not limited thereto, and the sub-mask 410 may include less than five sub-masks or more than five sub-masks. Hereinafter, for ease of description, the first sub-mask 411, the second sub-mask 412, and the third sub-mask 413 are mainly described.

[0093] Each sub-mask 410 may define at least one pattern hole PH. The pattern hole PH may be a through hole defined to allow the deposition material to pass through the sub-mask 410. The deposition material passing through the sub-mask 410 may be deposited on the display substrate DS (refer to Figure 1 )superior.

[0094] The first sub-mask 411, the second sub-mask 412, and the third sub-mask 413 may be formed in a second direction ( Figure 3 The first sub-mask 411, the second sub-mask 412, and the third sub-mask 413 may be separated from each other at a preset interval in the second direction.

[0095] A plurality of sub-masks 410 (eg, a first sub-mask 411, a second sub-mask 412, and a third sub-mask 413) may be connected to each other by a connecting rod 420. Specifically, the first sub-mask 411 and the second sub-mask 412 separated in the second direction may be connected to each other by a first support member 421. Figure 4 As shown in , the first support member 421 may be disposed to overlap a portion of the first sub-mask 411 and the second sub-mask 412. In this case, the first support member 421 may be disposed on a lower surface of the first sub-mask 411 (eg, Figure 4 In an embodiment, the first support 421 may be fixed to the first sub-mask 411 and the second sub-mask 412 by performing spot welding on welding points WP provided at the upper surface of the first sub-mask 411 and the upper surface of the second sub-mask 412.

[0096] Similarly, the second sub-mask 412 and the third sub-mask 413 separated from each other in the second direction may be connected to each other by the second support member 422. Figure 4 As shown in , the second support member 422 may be disposed to overlap a portion of the second sub-mask 412 and the third sub-mask 413. In this case, the second support member 422 may be disposed on the lower surface of the second sub-mask 412 and the lower surface of the third sub-mask 413. In an embodiment, the second support member 422 may be fixed to the second sub-mask 412 and the third sub-mask 413 by performing spot welding on welding points WP disposed at the upper surface of the second sub-mask 412 and the upper surface of the third sub-mask 413. In this case, a plurality of welding points WP may be disposed in a row on the upper surface of each of the first sub-mask 411, the second sub-mask 412, and the third sub-mask 413. In this case, the plurality of welding points WP may be disposed in a longitudinal direction (e.g., Figure 2 The plurality of electrodes are arranged in the y direction.

[0097] The connection bar 420 may extend in an extension direction (eg, in a first direction) of the sub-masks 410. The connection bar 420 may connect the sub-masks 410 adjacent to each other while shielding a portion between the sub-masks 410 adjacent to each other.

[0098] In addition, in an embodiment, the connection bar 420 may be disposed below the sub-mask 410. That is, since the connection bar 420 is welded and connected to the lower surface of the sub-mask 410, a step difference may be formed.

[0099] The width WD of the connecting rod 420 may be in the range of about 5 mm to about 100 mm. In this case, in the case where the width WD of the connecting rod 420 is less than 5 mm, due to deformation of the connecting rod 420 while the sub-mask 410 is welded to the connecting rod 420, the connecting rod 420 may not be able to support the sub-mask 410 and may not be able to fix another sub-mask 410 to the connecting rod 420. In addition, in the case where the width WD of the connecting rod 420 exceeds 100 mm, the weight of the connecting rod 420 itself increases, which may cause deformation of the mask sheet 400 due to the weight of the connecting rod 420, or the portion on which the connecting rod 420 is provided may sag, in which case, the mask sheet 400 may be deformed in the second direction ( Figure 3 The width WD of the connecting rod 420 is measured in the y direction).

[0100] The thickness DT of the connecting bar 420 may be in the range of about the thickness of the sub-mask 410 to about 1 mm. In this case, when the thickness DT of the connecting bar 420 is less than the thickness of the sub-mask 410, the connecting bar 420 may not be able to support the sub-mask 410 disposed on the connecting bar 420, and in addition, in the case of fixing the sub-mask 410 to the connecting bar 420, deformation of the connecting bar 420 may become excessive due to heat generated during welding. In addition, in the case where the thickness DT of the connecting bar 420 exceeds 1 mm, the mask sheet 400 itself may sag due to the weight of the connecting bar 420.

[0101] The thickness DT of the connecting bar 420 may be measured in a third direction (eg, z direction). The thickness DT of the connecting bar 420 may be 1 mm or less. Preferably, the thickness of the sub-mask 410 may be about 15 micrometers (μm) to about 18 μm.

[0102] In the lateral direction (eg, Figure 3 The clamping portions CL provided at two opposite ends in the first direction (eg, the x direction) may be used to clamp and tighten each sub-mask 410 when the plurality of sub-masks 410 are connected to each other. In this case, each sub-mask 410 may be arranged in a first direction (eg, Figure 3 In the x direction) of the Figure 2 As shown in , the clipping portion CL of each sub-mask 410 may connect the sub-masks 410 and then be cut off. In an embodiment, a portion of the clipping portion CL may be cut off along the first cutting line CU1 to form an outline of the mask sheet 400.

[0103] The main clamping portion 430 may be connected to the sub-mask 410 disposed at two opposite ends in the second direction among the plurality of sub-masks 410 disposed side by side. Figure 3As shown in , the main clamping part 430 can be connected to the first sub-mask 411 and the fifth sub-mask 415, respectively. As described above, the main clamping part 430 can be connected to the sub-mask 410 by a connecting rod 420. When the mask sheet 400 is welded and fixed to the mask frame 500, the main clamping part 430 can be used to clamp and tighten the mask sheet 400 in the second direction. In an embodiment, the main clamping part 430 can be cut off after the mask sheet 400 is fixed to the mask frame 500. In an embodiment, the main clamping part 430 can be cut off along the second cutting line CU2. In this case, the end of the mask sheet 400 set on the mask frame 500 can form a straight line to substantially coincide with the edge of the mask frame 500.

[0104] Return to reference Figure 2 , the shielding rod 600 may be disposed between the mask frame 500 and the mask sheet 400 to shield the space between the plurality of mask sheets 400. In an embodiment, the shielding rod 600 may be provided as one element to shield the first mask sheet 400A and the second mask sheet 400B. In another embodiment, in the case where three or more mask sheets 400 are provided, the shielding rod 600 may be provided in plurality, and the plurality of shielding rods 600 may be spaced apart from each other in the first direction to be parallel to each other. In addition, the shielding rod 600 may be provided in the second direction (e.g., Figure 2 The shielding rod 600 may extend in the y direction of the mask frame 500 to intersect the inside (i.e., the opening area OA) of the mask frame 500. Grooves for accommodating two opposite ends of the shielding rod 600 may be defined in the mask frame 500. The shielding rod 600 may be disposed between the plurality of mask sheets 400 to shield the space between two adjacent mask sheets 400 so that the deposition material does not pass through the space between the two adjacent mask sheets 400.

[0105] The support rod 700 can be in a first direction (eg, Figure 2 In the x direction of the second direction (eg, the x direction of the second direction), the support rod 700 may extend to intersect the inner portion (ie, the opening area OA) of the mask frame 500. In an embodiment, the support rod 700 may be provided in plurality, and the plurality of support rods 700 may be provided in the second direction (eg, Figure 2 The support rod 700 may be spaced apart from each other in the y direction of the mask sheet 400 to be parallel to each other. The support rod 700 may intersect the shielding rod 600 and be disposed on the shielding rod 600 in the opening area OA. In addition, grooves for receiving two opposite ends of the support rod 700 may be defined in the mask frame 500, but the present disclosure is not limited thereto. The support rod 700 may prevent the sagging of the mask sheet 400 by supporting the mask sheet 400 in the opening area OA.

[0106] Figure 5 is a schematic plan view of the support rod 700 . Figure 6 is an embodiment of a mask assembly along Figure 5Schematic cross-sectional view taken along line IV-IV'.

[0107] refer to Figure 5 and Figure 6 In an embodiment, the support rod 700 may be arranged to overlap with the connecting rod 420 of the mask sheet 400 in a plan view. Specifically, the support rod 700 may include a first support rod 710, a second support rod 720, a third support rod 730, and a fourth support rod 740. The first support rod 710 may extend to cross the mask sheet 400. In an embodiment, the first support rod 710 may extend in the first direction between the first sub-mask 411 and the second sub-mask 412. In this case, the first support rod 710 may be arranged to overlap with the first support member 421 of the mask sheet 400. Similarly, it is understood that the second support rod 720 to the fourth support rod 740 may be arranged to overlap with the second support member 422, the third support member 423, and the fourth support member 424 of the mask sheet 400, respectively. Because each of the second support rod 720 to the fourth support rod 740 is similar to the first support rod 710, hereinafter, the first support rod 710 is mainly described.

[0108] In an embodiment, each of the plurality of support rods 700 may define an opening OP. In an embodiment, the opening OP may include a first opening OP1, a second opening OP2, a third opening OP3, and a fourth opening OP4 defined in the first support rod 710, the second support rod 720, the third support rod 730, and the fourth support rod 740, respectively. The opening OP may be a through hole extending in the extension direction of the support rod 700 (e.g., in the first direction). In an embodiment, the opening OP may be defined by the number of mask sheets 400. In an embodiment, as Figure 2 As shown in FIG. 4 , in the case where two mask sheets 400 are provided, each of the plurality of support bars 700 may define two openings OP to correspond to the first mask sheet 400A and the second mask sheet 400B.

[0109] The opening OP can accommodate the connecting rod 420. That is, because the width of the opening OP is defined to be greater than the width of the connecting rod 420 (eg, Figure 5 The length in the y direction) of the connecting rod 420 can be accommodated in the opening OP. Figure 5 As shown in FIG. 1 , the connecting rod 420 may be received in the opening OP defined in the supporting rod 700, and the sub-mask 410 (refer to FIG. 1 ) may be received in the opening OP defined in the supporting rod 700. Figure 2 ) may be supported by contacting the support bar 700. In this case, since the connection bar 420 is not disposed on the support bar 700 but is accommodated inside the support bar 700, a step difference between the support bar 700 and the sub-mask 410 may be prevented.

[0110] In addition, in an embodiment, the width of the opening OP may be defined to be about 12 μm to about 18 μm greater than the width of the connecting bar 420. Therefore, while ensuring a tolerance for accommodating the connecting bar 420, it is possible to ensure that the mask assembly MA (refer to FIG. 1 ) is cleaned. Figure 2 ) when the cleaning liquid is easily discharged without accumulating (pooling) between the support rod 700 and the connecting rod 420.

[0111] In addition, in an embodiment, the thickness (length in the z direction) of the connecting rod 420 may be equal to the thickness (length in the z direction) of the support rod 700. Therefore, in the case where the mask sheet 400 is supported by the support rod 700, the sub-mask 410 may be supported by contacting the support rod 700, and no step difference is formed between the connecting rod 420 and the support rod 700.

[0112] although Figure 5 4 shows that the width of the connecting rod 420 measured in the first direction is smaller than the width of the mask sheet 400, but the present disclosure is not limited thereto. Figure 3 As shown in FIG, the width of the connecting bar 420 measured in the first direction may be equal to the width of the mask sheet 400. In another embodiment, although not shown in the drawings, the width of the connecting bar 420 measured in the first direction may be greater than the width of the mask sheet 400.

[0113] Figure 7 2 is a cross-sectional view for comparing an embodiment of a mask assembly and a comparative example of a mask assembly. Specifically, the mask assembly in the embodiment is shown on the right, and the mask assembly according to the comparative example is shown on the left.

[0114] refer to Figure 7 , the mask assembly in the embodiment can prevent the shadow phenomenon. The shadow phenomenon refers to that when the deposition material passes through the mask sheet 400 and is deposited on the display substrate DS, the deposition material is not deposited to the normal deposition thickness. In the case where the connecting rod 420 is arranged on the support rod 700 as in the comparative example, the distance between the deposition source 50 and the support rod 700 may be reduced compared with the embodiment. Therefore, the non-deposition area SH in which the deposition material is shielded by the support rod 700 and not deposited may increase. In contrast, in the embodiment, because the connecting rod 420 is accommodated in the opening OP of the support rod 700, the distance between the deposition source 50 and the support rod 700 may be increased compared with the comparative example. Therefore, the non-deposition area SH in which the deposition material is shielded by the support rod 700 and not deposited can be reduced, and the shadow phenomenon can be prevented.

[0115] In addition, according to the comparative example, the mask assembly MA (reference Figure 2) may occur where the connecting rod 420 and the support rod 700 contact each other. In view of this, the cleaning liquid may not be easily discharged, reducing the life of the mask assembly MA. In contrast, in an embodiment, the connecting rod 420 is accommodated in the opening OP of the support rod 700, and the cleaning liquid can be easily discharged through the opening OP, and therefore, the accumulation of the cleaning liquid between the connecting rod 420 and the support rod 700 can be prevented.

[0116] Figure 8 is a schematic plan view of an embodiment of a support bar 700. Because the support bar 700 in the illustrated embodiment is similar to the support bar 700 described above, the differences will be primarily described below.

[0117] refer to Figure 8 In an embodiment, the width W1 of the first support bar 710 may be different from the width W2 of the second support bar 720. In an embodiment, the width W1 of the first support bar 710 may be greater than the width W2 of the second support bar 720. In addition, in an embodiment, the width R1 of the opening OP (i.e., the first opening OP1 of the first support bar 710) may be different from the width R2 of the opening OP (i.e., the second opening OP2 of the second support bar 720). In an embodiment, the width R1 of the first opening OP1 may be greater than the width R2 of the second opening OP2.

[0118] Since the width W1 of the first support bar 710 is different from the width W2 of the second support bar 720, and the width R1 of the first opening OP1 is different from the width R2 of the second opening OP2, the display device 1 of various sizes can be manufactured (refer to Fig.11 In the embodiment, the first sub-mask 411 (refer to Figure 3 ) size and the second sub-mask 412 (reference Figure 3 ) may be different from each other, and the size of the second sub-mask 412 and the third sub-mask 413 (reference Figure 3 ) may be different from each other. Therefore, the width of the first support member 421 connecting the first sub-mask 411 to the second sub-mask 412 may be different from the width of the second support member 422 connecting the second sub-mask 412 to the third sub-mask 413. Therefore, the width of the first opening OP1 and the width of the second opening OP2 that respectively accommodate the first support member 421 and the second support member 422 may be different from each other. In addition, the width W1 of the first support bar 710 may be different from the width W2 of the second support bar 720.

[0119] Fig. 9 and Fig.10 is a schematic plan view of an embodiment of a support bar 700. Because the support bar 700 in the illustrated embodiment is similar to the support bar 700 described above, the following mainly describes the differences.

[0120] refer to Fig. 9 In an embodiment, the support rod 700 may include a pair of parallel sub-rods extending in the first direction. In an embodiment, the first support rod 710 may include a pair of parallel first sub-rods 711 extending in the first direction. In this case, the pair of parallel first sub-rods 711 may be spaced apart from each other in the second direction. The distance between the pair of parallel first sub-rods 711 may be defined as a separation distance SS. In an embodiment, the second support rod 720 may include a pair of parallel second sub-rods 721 extending in the first direction, the third support rod 730 may include a pair of parallel third sub-rods 731 extending in the first direction, and the fourth support rod 740 may include a pair of parallel fourth sub-rods 741 extending in the first direction.

[0121] The connecting rod 420 may be accommodated between a pair of parallel first sub-rods 711. In this case, the separation distance SS may be about 12 μm to about 18 μm greater than the width of the connecting rod 420. Therefore, the support rod 700 may ensure a tolerance for accommodating the connecting rod 420, and at the same time, ensure that the mask assembly MA (reference Figure 2 ) when the cleaning liquid does not accumulate between the support rod 700 and the connecting rod 420 and is easily discharged.

[0122] although Fig. 9 4 shows that the width of the connecting rod 420 measured in the first direction is smaller than the width of the mask sheet 400, but the present disclosure is not limited thereto. Figure 3 As shown in , the width of the connecting bar 420 measured in the first direction may be equal to the width of the mask sheet 400. In another embodiment, the width of the connecting bar 420 measured in the first direction may be greater than the width of the mask sheet 400.

[0123] See also Fig.10 In an embodiment, the first support rod 710 may include a pair of parallel first sub-rods 711 extending in a first direction. In this case, the pair of parallel first sub-rods 711 may be spaced apart from each other by a separation distance SS1. In addition, the second support rod 720 may include a pair of parallel second sub-rods 721 extending in the first direction. In this case, the pair of parallel second sub-rods 721 may be spaced apart from each other by a separation distance SS2.

[0124] In this case, in an embodiment, the width W1 of the first support bar 710 may be different from the width W2 of the second support bar 720. In an embodiment, the width W1 of the first support bar 710 may be greater than the width W2 of the second support bar 720. In addition, in an embodiment, the separation distance SS1 between the first sub-bars 711 may be different from the separation distance SS2 between the second sub-bars 721. In an embodiment, the separation distance SS1 between the first sub-bars 711 may be greater than the separation distance SS2 between the second sub-bars 721.

[0125] Since the width W1 of the first support bar 710 is different from the width W2 of the second support bar 720, and the separation distance SS1 between the first sub-bars 711 is different from the separation distance SS2 between the second sub-bars 721, the display device 1 of various sizes can be manufactured (refer to Fig.11 In the embodiment, the first sub-mask 411 (refer to Figure 3 ) size and the second sub-mask 412 (reference Figure 3 ) may be different from each other, and the size of the second sub-mask 412 and the third sub-mask 413 (reference Figure 3 ) may be different in size from each other. Therefore, the width of the first support member 421 connecting the first sub-mask 411 to the second sub-mask 412 may need to be different from the width of the second support member 422 connecting the second sub-mask 412 to the third sub-mask 413. Therefore, the separation distance SS1 between the first sub-bars 711 and the separation distance SS2 between the second sub-bars 721 that respectively accommodate the first support member 421 and the second support member 422 may need to be different from each other. In addition, the width W1 of the first support bar 710 may need to be different from the width W2 of the second support bar 720.

[0126] Fig.11 is a schematic plan view of an embodiment of a display device 1 manufactured by an apparatus 2 for manufacturing a display device.

[0127] refer to Fig.11 , the display device 1 manufactured in the embodiment may include a display area DA and a peripheral area PA outside the display area DA. The display device 1 may display an image through an array of a plurality of pixels PX two-dimensionally arranged in the display area DA.

[0128] The peripheral area PA is an area where no image is displayed, and may completely or partially surround the display area DA. A driver configured to provide an electrical signal or power to pixel circuits respectively corresponding to a plurality of pixels PX, etc. may be provided in the peripheral area PA. A pad may be provided in the peripheral area PA, wherein the pad is an area to which an electronic component or a printed circuit board may be electrically connected.

[0129] In the following, although the display device 1 includes an organic light emitting diode OLED (refer to Fig.12 ), but the display device 1 according to the present disclosure is not limited thereto. In another embodiment, the display device 1 may be a light-emitting display device including an inorganic light-emitting diode (i.e., an inorganic light-emitting display device). The inorganic light-emitting diode may include a PN junction diode containing an inorganic semiconductor-type material. When a forward voltage is applied to the PN junction diode, holes and electrons are injected, and the energy generated by the recombination of holes and electrons is converted into light energy, and thus, light of a preset color may be emitted. The inorganic light-emitting diode may have a width in the range of several microns to several hundred microns. In an embodiment, the inorganic light-emitting diode may be represented by a micro light-emitting diode. In another embodiment, the display device 1 may be a quantum dot light-emitting display device.

[0130] The display device 1 can be used as a display screen in various products including televisions, notebook computers, monitors, billboards, Internet of Things ("IoT") devices, and portable electronic devices including mobile phones, smart phones, tablet personal computers ("PCs"), mobile communication terminals, electronic notepads, electronic books, portable multimedia players ("PMPs"), navigation devices, and ultra-mobile personal computers ("UMPCs"). In addition, the display device 1 in the embodiment can be used for wearable devices including smart watches, watch phones, glasses-type displays, and head-mounted displays ("HMDs"). In addition, in an embodiment, the display device 1 can be used as a display screen in an instrument panel for a vehicle, a central instrument panel for a vehicle, or a central information display ("CID") set on the dashboard of a vehicle, an in-vehicle rearview mirror display that replaces the side mirrors of the vehicle, and a display of an entertainment system set on the back of the front seat for rear seat passengers in the vehicle.

[0131] Fig.12 is an embodiment of a display device 1 manufactured by an apparatus 2 for manufacturing a display device Fig.11 A cross-sectional view taken along line XII-XII'.

[0132] refer to Fig.12 The display device 1 may include a stacked structure of a substrate 100, a pixel circuit layer PCL, a display element layer DEL, and an encapsulation layer 300. The display substrate DS (refer to Figure 1 ) may be a structure in which, for example, at least one of the pixel circuit layer PCL, the display element layer DEL, and the encapsulation layer 300 is stacked on the substrate 100 during a process of manufacturing the display device 1.

[0133] The substrate 100 may have a multilayer structure including a base layer including a polymer resin and an inorganic layer. In an embodiment, the substrate 100 may include a base layer including a polymer resin and a barrier layer including an inorganic insulating layer. In an embodiment, the substrate 100 may include a first base layer 101, a first barrier layer 102, a second base layer 103, and a second barrier layer 104 stacked in sequence. The first base layer 101 and the second base layer 103 may each include polyimide ("PI"), polyethersulfone ("PES"), polyacrylate, polyetherimide ("PEI"), polyethylene naphthalate ("PEN"), polyethylene terephthalate ("PET"), polyphenylene sulfide ("PPS"), polycarbonate ("PC"), triacetyl cellulose ("TAC"), and / or cellulose acetate propionate ("CAP"). The first barrier layer 102 and the second barrier layer 104 may each include an inorganic insulating material such as silicon oxide, silicon oxynitride, and / or silicon nitride. The substrate 100 may be flexible.

[0134] The pixel circuit layer PCL is disposed on the substrate 100 . Fig.12 The pixel circuit layer PCL includes a thin film transistor TFT, a buffer layer 111 below and / or above the element of the thin film transistor TFT, a first gate insulating layer 112, a second gate insulating layer 113, an intermediate insulating layer 114, a first planarizing insulating layer 115, and a second planarizing insulating layer 116.

[0135] The buffer layer 111 may reduce or block foreign matter, moisture, or external air penetrating from under the substrate 100, and may provide a flat surface on the substrate 100. The buffer layer 111 may include an inorganic insulating material such as silicon nitride, silicon oxynitride, and / or silicon oxide, and include a single-layer structure or a multi-layer structure including the above materials.

[0136] The thin film transistor TFT on the buffer layer 111 may include a semiconductor layer Act, and the semiconductor layer Act may include polycrystalline silicon. In an alternative embodiment, the semiconductor layer Act may include amorphous silicon, an oxide semiconductor, or an organic semiconductor. The semiconductor layer Act may include a channel region C and a drain region D and a source region S respectively disposed at two opposite sides of the channel region C. The gate electrode GE may overlap the channel region C.

[0137] The gate electrode GE may include a low resistance metal material. The gate electrode GE may include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), and titanium (Ti), and have a single layer structure or a multilayer structure including the above materials.

[0138] The first gate insulating layer 112 between the semiconductor layer Act and the gate electrode GE may include silicon oxide (SiO 2 ), Silicon Nitride (SiNx ), silicon oxynitride (SiO x N y ), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), Tantalum Oxide (Ta 2 O 5 ), hafnium oxide (HfO 2 ) or zinc oxide (ZnO x ) inorganic insulating material. Zinc oxide (ZnO x ) can be zinc oxide (ZnO) and / or zinc peroxide (ZnO 2 ).

[0139] The second gate insulating layer 113 may cover the gate electrode GE. Similar to the first gate insulating layer 112, the second gate insulating layer 113 may include silicon oxide (SiO 2 ), Silicon Nitride (SiN x ), silicon oxynitride (SiO x N y ), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), Tantalum Oxide (Ta 2 O 5 ), hafnium oxide (HfO 2 ) or zinc oxide (ZnO x ) inorganic insulating material. Zinc oxide (ZnO x ) can be zinc oxide (ZnO) and / or zinc peroxide (ZnO 2 ).

[0140] The upper electrode Cst2 of the storage capacitor Cst may be disposed on the second gate insulating layer 113. The upper electrode Cst2 may overlap the gate electrode GE thereunder. In this case, the gate electrode GE and the upper electrode Cst2 overlapping each other and the second gate insulating layer 113 between the gate electrode GE and the upper electrode Cst2 may constitute the storage capacitor Cst. That is, the gate electrode GE may serve as the lower electrode Cst1 of the storage capacitor Cst.

[0141] As described above, the storage capacitor Cst may overlap with the thin film transistor TFT. In an embodiment, the storage capacitor Cst may be formed not to overlap with the thin film transistor TFT.

[0142] The upper electrode Cst2 may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W) and / or copper (Cu), and include a single-layer structure or a multi-layer structure containing the above materials.

[0143] The intermediate insulating layer 114 may cover the upper electrode Cst2. The intermediate insulating layer 114 may include silicon oxide (SiO 2 ), Silicon Nitride (SiN x ), silicon oxynitride (SiO x N y ), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), Tantalum Oxide (Ta 2 O 5 ), hafnium oxide (HfO 2 ) or zinc oxide (ZnO x ). Zinc oxide (ZnO x ) can be zinc oxide (ZnO) and / or zinc peroxide (ZnO 2 ). The intermediate insulating layer 114 may include a single-layer structure or a multi-layer structure including an inorganic insulating material.

[0144] The drain electrode DE and the source electrode SE may each be disposed on the intermediate insulating layer 114. The drain electrode DE and the source electrode SE may be connected to the drain region D and the source region S, respectively, through contact holes of the insulating layer thereunder. The drain electrode DE and the source electrode SE may each include a material having a relatively high electrical conductivity. The drain electrode DE and the source electrode SE may each include a conductive material including molybdenum (Mo), aluminum (Al), copper (Cu), and titanium (Ti), and include a single-layer structure or a multilayer structure including the above materials. In an embodiment, the drain electrode DE and the source electrode SE may each have a multilayer structure of Ti / Al / Ti.

[0145] The first planarization insulating layer 115 may cover the drain electrode DE and the source electrode SE. The first planarization insulating layer 115 may include an organic insulating material including a general polymer such as polystyrene ("PS"), polymethyl methacrylate ("PMMA"), a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aromatic ether polymer, an amide polymer, a fluorine-containing polymer, a paraxylene polymer, a vinyl alcohol polymer, or any combination thereof.

[0146] The second planarization insulating layer 116 may be disposed on the first planarization insulating layer 115. The second planarization insulating layer 116 may include the same material as that of the first planarization insulating layer 115, and may include an organic insulating material including a general polymer such as PS, PMMA, a polymer derivative having a phenolic group, an acrylic polymer, an imide polymer, an aromatic ether polymer, an amide polymer, a fluorine-containing polymer, a paraxylene polymer, a vinyl alcohol polymer, or any combination thereof.

[0147] The display element layer DEL may be disposed on the pixel circuit layer PCL having the above structure. The display element layer DEL may include an organic light emitting diode OLED as a display element (i.e., a light emitting element). The organic light emitting diode OLED may have a stacked structure of a pixel electrode 210, an intermediate layer 220, and a common electrode 230. For example, the organic light emitting diode OLED may emit red light, green light, or blue light, or emit red light, green light, blue light, or white light. The organic light emitting diode OLED may emit light through an emission region. The emission region may be defined as a pixel PX.

[0148] The pixel electrode 210 of the organic light emitting diode OLED may be electrically connected to the thin film transistor TFT through a contact hole defined in the second planarization insulating layer 116 and the first planarization insulating layer 115 and a contact metal CM disposed on the first planarization insulating layer 115 .

[0149] The pixel electrode 210 may include, for example, indium tin oxide ("ITO"), indium zinc oxide ("IZO"), zinc oxide (ZnO), indium oxide (In 2 O 3 ), indium gallium oxide ("IGO"), or aluminum zinc oxide ("AZO"). In another embodiment, the pixel electrode 210 may include a reflective layer containing silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), or any combination thereof. In another embodiment, the pixel electrode 210 may further include a layer above / below the reflective layer, the layer comprising ITO, IZO, ZnO, or In 2 O 3 .

[0150] The pixel defining layer 117 may be disposed on the pixel electrode 210, and the pixel defining layer 117 defines an opening 117OP exposing a central portion of the pixel electrode 210. The pixel defining layer 117 may include an organic insulating material and / or an inorganic insulating material. The opening 117OP may define an emission region of light emitted from the organic light emitting diode OLED. In an embodiment, the opening 117OP may correspond to the size / width of the emission region. Therefore, the size and / or width of the pixel PX may depend on the size and / or width of the opening 117OP of the pixel defining layer 117.

[0151] The intermediate layer 220 may include an emission layer 222 formed to correspond to the pixel electrode 210. The emission layer 222 may include a polymer organic material (high molecular weight organic material) or a low molecular weight organic material that emits light having a preset color. In an alternative embodiment, the emission layer 222 may include an inorganic emission material or quantum dots.

[0152] In an embodiment, the intermediate layer 220 may include a first functional layer 221 and a second functional layer 223 disposed below and above the emission layer 222, respectively. The first functional layer 221 may include, for example, a hole transport layer ("HTL"), or include an HTL and a hole injection layer ("HIL"). The second functional layer 223 is an element disposed on the emission layer 222, and may include an electron transport layer ("ETL") and / or an electron injection layer ("EIL"). Like the common electrode 230 described below, the first functional layer 221 and / or the second functional layer 223 may be a common layer that completely covers the substrate 100.

[0153] The common electrode 230 may be disposed on the pixel electrode 210 and may overlap with the pixel electrode 210. The common electrode 230 may include a conductive material having a relatively low work function. In an embodiment, the common electrode 230 may include a (semi) transparent layer containing silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr) or any alloy thereof. In an alternative embodiment, the common electrode 230 may also include a layer on the (semi) transparent layer, the layer comprising ITO, IZO, ZnO or In 2 O 3 The common electrode 230 may be formed in one body to completely cover the substrate 100 .

[0154] The encapsulation layer 300 may be disposed on the display element layer DEL and may cover the display element layer DEL. The encapsulation layer 300 may include at least one inorganic encapsulation layer and at least one organic encapsulation layer. In an embodiment, Fig.123 shows that the encapsulation layer 300 includes a first inorganic encapsulation layer 310 , an organic encapsulation layer 320 , and a second inorganic encapsulation layer 330 which are sequentially stacked.

[0155] The first inorganic encapsulation layer 310 and the second inorganic encapsulation layer 330 may include at least one inorganic material from aluminum oxide, titanium oxide, tantalum oxide, hafnium oxide, zinc oxide, silicon oxide, silicon nitride, silicon oxynitride. The organic encapsulation layer 320 may include a polymer material. The polymer material may include acrylic resin, epoxy resin, polyimide and polyethylene. In an embodiment, the organic encapsulation layer 320 may include acrylate. The organic encapsulation layer 320 may be formed by hardening a monomer or coating a polymer. The organic encapsulation layer 320 may be transparent.

[0156] Although not shown, the touch sensor layer may be disposed on the encapsulation layer 300. An optical function layer may be disposed on the touch sensor layer. The touch sensor layer may obtain coordinate information corresponding to an external input (e.g., a touch event). The optical function layer may reduce the reflectivity of light (external light) incident from the outside toward the display device 1, and / or improve the color purity of light emitted from the display device 1. In an embodiment, the optical function layer may include a retarder and / or a polarizer. The phase retarder may include a film-type retarder or a liquid crystal retarder. The phase retarder may include a λ / 2 phase retarder and / or a λ / 4 phase retarder. The polarizer may include a film-type polarizer or a liquid crystal polarizer. The film-type polarizer may include a stretched synthetic resin film, and the liquid crystal polarizer may include liquid crystals arranged in a predetermined arrangement. Each of the phase retarder and the polarizer may also include a protective film.

[0157] The adhesive member may be disposed between the touch sensor layer and the optical function layer. For the adhesive member, a general adhesive member known in the art may be used without limitation. The adhesive member may be a pressure sensitive adhesive ("PSA") member.

[0158] In the mask assembly, the apparatus for manufacturing a display device, and the method for manufacturing a display device in the embodiments, since intervals between openings defined in the mask are maintained to be substantially the same or similar to each other, a fine pattern can be deposited.

[0159] Furthermore, in the mask assembly, the apparatus for manufacturing a display device, and the method for manufacturing a display device in the embodiments, a display device configured to display a clear image can be manufactured.

[0160] In the mask assembly, the apparatus for manufacturing a display device, and the method for manufacturing a display device in the embodiments, since masks separated from each other are included, the masks can be freely replaced.

[0161] It should be understood that the embodiments described herein should be considered in a descriptive sense only and not for limiting purposes. The description of features or advantages within each embodiment should generally be considered as other similar features or advantages that can be used in other embodiments. Although the embodiments have been described with reference to the accompanying drawings, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope as defined by the appended claims.

Claims

1. A mask assembly, wherein: The mask assembly comprises: a mask frame including an opening area; and A mask sheet, the mask sheet shielding at least a portion of the opening area and disposed on the mask frame, the mask sheet comprising: A clamping portion fixed to the mask frame; a connecting rod spaced apart from the clamping portion; and a plurality of sub-masks disposed between the clamping portion and the connecting rod, and the plurality of sub-masks define pattern holes, The connecting bar is disposed between adjacent sub-masks among the plurality of sub-masks and supports each of the adjacent sub-masks, and ends of the adjacent sub-masks disposed on the connecting bar are spaced apart from each other.

2. The mask assembly according to claim 1, wherein: Each of the sub-masks adjacent to each other disposed on the connecting bar is coupled to the connecting bar through a plurality of welding points arranged in a row.

3. The mask assembly according to claim 2, wherein: The plurality of welding points are arranged in a direction perpendicular to a longitudinal direction of one of the plurality of sub-masks.

4. The mask assembly according to claim 1, wherein: The width of the connecting rod is in the range of 5 mm to 100 mm.

5. The mask assembly according to claim 1, wherein: The thickness of the connecting bar is at least the thickness of one sub-mask among the plurality of sub-masks and is in the range of 1 mm or less.

6. The mask assembly according to claim 1, wherein: The sub-masks adjacent to each other are stretched in a first direction and fixed to the clamping portion and the connecting rod.

7. The mask assembly according to claim 6, wherein: The mask sheet is stretched in a second direction different from the first direction and fixed to the mask frame.

8. The mask assembly according to claim 1, wherein: The mask assembly further includes a support rod disposed on the mask frame and intersecting the opening area.

9. The mask assembly according to claim 8, wherein: The support rod defines an opening, and the connecting rod is embedded in the opening.

10. An apparatus for manufacturing a display device, wherein: The device comprises: Sediment sources, and A mask assembly, facing the deposition source, comprising: a mask frame including an opening area; and A mask sheet, the mask sheet shielding at least a portion of the opening area and disposed on the mask frame, the mask sheet comprising: A clamping portion fixed to the mask frame; a connecting rod spaced apart from the clamping portion; and a plurality of sub-masks arranged between the clamping portion and the connecting rod, and The plurality of sub-masks define pattern holes, The connecting bar is disposed between adjacent sub-masks among the plurality of sub-masks and supports each of the adjacent sub-masks, and ends of the adjacent sub-masks disposed on the connecting bar are spaced apart from each other.

11. The device according to claim 10, wherein: Each of the sub-masks adjacent to each other disposed on the connecting bar is coupled to the connecting bar through a plurality of welding points arranged in a row.

12. The device according to claim 11, wherein The plurality of welding points are arranged in a direction perpendicular to a longitudinal direction of one of the plurality of sub-masks.

13. The apparatus according to claim 10, wherein: The width of the connecting rod is in the range of 5 mm to 100 mm.

14. The apparatus according to claim 10, wherein: The thickness of the connecting bar is at least the thickness of one sub-mask among the plurality of sub-masks and is in the range of 1 mm or less.

15. The apparatus according to claim 10, wherein: The sub-masks adjacent to each other are stretched in a first direction and fixed to the clamping portion and the connecting rod.

16. The device according to claim 15, wherein: The mask sheet is stretched in a second direction different from the first direction and fixed to the mask frame.

17. The apparatus according to claim 10, wherein: The mask assembly further includes a support rod disposed on the mask frame and intersecting the opening area.

18. The apparatus according to claim 17, wherein: The support rod defines an opening, and the connecting rod is embedded in the opening.

19. A method of manufacturing a display device, wherein: The method comprises: placing the mask assembly and the substrate inside the chamber; and passing a deposition material supplied from a deposition source through the mask assembly and depositing the deposition material on the substrate, Wherein, the mask assembly comprises: a mask frame including an opening area; and a mask sheet, the mask sheet shielding at least a portion of the opening area and disposed on the mask frame, Wherein, the mask sheet comprises: A clamping portion fixed to the mask frame; a connecting rod spaced apart from the clamping portion; and a plurality of sub-masks disposed between the clamping portion and the connecting rod, and the plurality of sub-masks define pattern holes, and The connection bar is disposed between sub-masks adjacent to each other among the plurality of sub-masks and supports each of the sub-masks adjacent to each other, and ends of the sub-masks adjacent to each other disposed on the connection bar are spaced apart from each other.

20. The method according to claim 19, wherein: Each of the sub-masks adjacent to each other disposed on the connecting bar is coupled to the connecting bar through a plurality of welding points arranged in a row.

21. The method according to claim 20, wherein: The plurality of welding points are arranged in a direction perpendicular to a longitudinal direction of one of the plurality of sub-masks.

22. The method according to claim 19, wherein: The width of the connecting rod is in the range of 5 mm to 100 mm.

23. The method according to claim 19, wherein: The thickness of the connecting bar is at least the thickness of one sub-mask among the plurality of sub-masks and is in the range of 1 mm or less.

24. The method according to claim 19, wherein: The sub-masks adjacent to each other are stretched in a first direction and fixed to the clamping portion and the connecting rod.

25. The method according to claim 24, wherein: The mask sheet is stretched in a second direction different from the first direction and fixed to the mask frame.

26. The method of claim 19, wherein: The support rods are disposed on the mask frame and cross the opening area.

27. The method according to claim 26, wherein: The support rod defines an opening, and the connecting rod is embedded in the opening.

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