Micro-focus ray source device and ray detection equipment

Abstract

The invention provides a micro-focus ray source device and ray detection equipment. The micro-focus ray source device comprises a light tube emitter, a light tube supporting structure, a sealing shell, a stacking module and a controller module, one end of the light pipe supporting structure is detachably connected with one end of the sealing shell in a sealed mode, the light pipe supporting structure and the sealing shell define a first cavity, the first cavity is a sealed cavity, and the first cavity is filled with an insulating medium; the light pipe supporting structure is fixedly connected to a first position of the light pipe emitter through at least one fastener; the anode end of the light pipe emitter is fixedly connected with the stacking module, and the first part of the light pipe emitter and the stacking module are arranged in the first cavity and immersed in the insulating medium; the bottom of the stacking module is connected with the controller module through an insulating lead, and the controller module is fixedly connected to the outer surface of the sealing shell. And the flexibility of the micro-focus ray source device for adapting to different voltage grades and detection requirements is enhanced, so that the universality of the micro-focus ray source is enhanced.

Description

Technical Field

[0001] The present invention relates to the technical field of detection equipment application, and in particular to a micro-focus ray source device and ray detection equipment. Background Art

[0002] For defect detection in the chip manufacturing process, such as circuit short circuit, open circuit, tiny bubbles in chip packaging and other problems, X-ray inspection equipment such as new energy battery packaging non-destructive testing can provide clear images for accurate analysis and quality control; micro-focus X-ray source is the core component of X-ray inspection equipment, which is used to generate the energy required by the detection system, but the structural form of existing micro-focus X-ray sources has low universality. Summary of the invention

[0003] The purpose of the embodiments of the present invention is to provide a micro-focus ray source device and a ray detection device to solve the problem that the existing micro-focus ray source has low structural universality.

[0004] In order to achieve the above-mentioned object, an embodiment of the present invention provides a micro-focus ray source device, including: a light pipe emitter, a light pipe support structure, a sealed housing, a stacking module and a controller module;

[0005] One end of the light pipe support structure is detachably connected to one end of the sealed shell, and the light pipe support structure and the sealed shell enclose a first chamber, the first chamber is a sealed chamber, and the first chamber is filled with an insulating medium;

[0006] The light pipe support structure includes at least one fastener, and the light pipe support structure is fixedly connected to the first position of the light pipe transmitter through the at least one fastener to adapt to the light pipe transmitters of different voltage levels;

[0007] The anode end of the light tube transmitter is fixedly connected to the stacking module, the first part of the light tube transmitter and the stacking module are arranged inside the first chamber and immersed in the insulating medium, and the first part is the part of the light tube transmitter located at the first position and close to the anode end;

[0008] The bottom of the stacking module is connected to the controller module through an insulated lead, and the controller module is fixedly connected to the outer surface of the sealed shell. The controller module provides power supply for the micro-focus ray source device and controls the input voltage level and boost gradient of the stacking module through a program.

[0009] An embodiment of the present invention further provides a ray detection device, which includes the micro-focus ray source device provided by the embodiment of the present invention.

[0010] One of the above technical solutions has the following advantages or beneficial effects:

[0011] In the embodiment of the present invention, the micro-focus ray source device comprises: a light pipe transmitter, a light pipe support structure, a sealed housing, a stacking module and a controller module; one end of the light pipe support structure is detachably sealedly connected to one end of the sealed housing, the light pipe support structure and the sealed housing are enclosed to form a first chamber, the first chamber is a sealed chamber, and the first chamber is filled with an insulating medium; the light pipe support structure comprises at least one fastener, and the light pipe support structure is fixedly connected to the first position of the light pipe transmitter through the at least one fastener to adapt to the light pipe transmitters of different voltage levels;

[0012] The anode end of the light pipe transmitter is fixedly connected to the stacking module, the first part of the light pipe transmitter and the stacking module are arranged inside the first chamber and immersed in the insulating medium, the first part is the part of the light pipe transmitter located at the first position close to the anode end; the bottom of the stacking module is connected to the controller module through an insulating lead, the controller module is fixedly connected to the outer surface of the sealed shell, the controller module provides power supply for the micro-focus ray source device and controls the input voltage level and boost gradient of the stacking module through a program. In the embodiment of the present invention, one end of the light pipe support structure is detachably connected to one end of the sealed shell, the light pipe support structure and the sealed shell are enclosed to form a sealed chamber, so that the inside of the sealed chamber is filled with insulating medium, so that the micro-focus ray source device can be flexibly disassembled and replaced according to different needs; the light pipe support structure is fixedly connected to the first position of the light pipe transmitter by at least one fastener, so that the installation position of the light pipe transmitter is adjustable, and can adapt to light pipe transmitters of different specifications and sizes, thereby enhancing the flexibility of the micro-focus ray source device to adapt to different voltage levels and detection requirements, thereby enhancing the versatility of the micro-focus ray source. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of a micro-focus ray source device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0014] In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0015] like Figure 1 As shown, an embodiment of the present invention provides a structural schematic diagram of a micro-focus ray source device, such as Figure 1 As shown, it includes: a micro-focus ray source device, including: a light pipe emitter 1, a light pipe support structure 2, a sealed housing 6, a stacking module 3 and a controller module 7;

[0016] One end of the light pipe support structure 2 is detachably connected to one end of the sealed housing 6. The light pipe support structure 2 and the sealed housing 6 enclose a first chamber 5. The first chamber 5 is a sealed chamber, and the first chamber 5 is filled with an insulating medium.

[0017] The light pipe support structure 2 includes at least one fastener, and the light pipe support structure 2 is fixedly connected to the first position of the light pipe emitter 1 through the at least one fastener;

[0018] The anode end of the light tube transmitter 1 is fixedly connected to the stacking module 3, and the first part of the light tube transmitter 1 and the stacking module 3 are arranged inside the first chamber 5 and immersed in the insulating medium, and the first part is the part of the light tube transmitter 1 located at the first position and close to the anode end;

[0019] The bottom of the stacking module 3 is connected to the controller module 7 through an insulated lead, and the controller module 7 is fixedly connected to the outer surface of the sealed shell 6. The controller module 7 provides power supply for the micro-focus ray source device and controls the input voltage level and boost gradient of the stacking module 3 through a program, and has a wide voltage control capability.

[0020] In the embodiment of the present invention, Figure 1 The structural form is given as an example. Of course, the above-mentioned light pipe transmitter 1, light pipe support structure 2, sealed housing 6, stacking module 3 and controller module 7 can be of any structure and shape under the premise of satisfying the basic functions, and the embodiment of the present invention does not limit this. Among them, the above-mentioned light pipe transmitter 1 is the core component for generating rays in the micro-focus ray source device, and its anode end is fixedly connected to the stacking module 3; the above-mentioned light pipe support structure 2 provides stable support for the light pipe transmitter 1; the above-mentioned light pipe support structure 2 is connected to the light pipe transmitter 1 through at least one fastener to flexibly adapt to light pipe transmitters of different voltage levels, for example, it can adapt to light pipe transmitters of different voltage levels from 90KV to 130KV. The embodiment of the present invention does not limit the specific type of fasteners, and bolts, screws, clamping fasteners, etc. can be used to meet different installation and disassembly requirements; the above-mentioned first position can be any position on the light pipe transmitter 1.

[0021] The function of the sealed housing 6 is to provide electrical insulation protection, prevent high voltage leakage, and protect internal components from external environmental factors such as dust, moisture, etc. The material of the sealed housing 6 is not specifically limited in the present embodiment, and metal, alloy, etc. can be selected.

[0022] The above-mentioned design of detachable connection between the light pipe support structure 2 and the sealed housing 6 facilitates the assembly, debugging and maintenance of the device. The specific form of the detachable connection is not specifically limited in the embodiment of the present invention. In some optional embodiments, threaded holes can be respectively opened at the corresponding positions of the light pipe support structure 2 and the sealed housing 6, and bolts can be passed through these threaded holes and then tightened with nuts; the light pipe support structure 2 and the sealed housing 6 can also be connected together by using an elastic clamp, which can be made of metal or high-strength plastic, and has anti-slip grooves or rubber pads on its inner side to increase the friction with the connecting parts. During installation, the clamp is sleeved on the connecting part of the light pipe support structure 2 and the sealed housing 6, and then the clamp is tightly held by tightening the bolts on the clamp or adjusting the tension device of the clamp. Mutually matching plug and socket structures can also be respectively set at the connecting ends of the light pipe support structure 2 and the sealed housing 6. The plug part is designed with a protrusion or a pin, and the socket part is correspondingly provided with a groove or a jack. During installation, the plug is inserted into the socket, and positioning and connection are achieved through the cooperation of the protrusion and the groove. In order to ensure the stability of the connection, an elastic buckle or a positioning pin may be provided between the plug and the socket.

[0023] In some optional embodiments, a sealing structure may be further provided at the connection between at least one fastener of the light pipe support structure and the light pipe emitter at the first position to ensure that the connection can be effectively sealed and protected in all directions; the specific form of the sealing structure is not specifically limited in the embodiment of the present invention and may be selected according to the specific use environment, for example: sealing foam, rubber sealing pad or sealant, etc.

[0024] The first chamber 5 is a sealed chamber filled with an insulating medium. The size and shape of the first chamber 5 are not specifically limited in the embodiment of the present invention. The sealing method of the sealed chamber is also not limited in the embodiment of the present invention. A rubber sealing ring can be used for sealing, or a welding sealing method can be used for sealing. The function of the insulating medium is to isolate components with different potentials to prevent problems such as short circuits and high-voltage breakdown. In the micro-focus ray source device, the light tube emitter 1 and the stacking module 3 will generate high voltage when working. The insulating medium can effectively prevent these high-voltage components from electrical contact with other structures to ensure the safety of the device. At the same time, the insulating medium also has a certain thermal conductivity, which can transfer the heat generated by the light tube emitter 1 and the stacking module 3 when working, assist in heat dissipation, and maintain the temperature inside the device stable. The insulating medium can be insulating oil or epoxy resin, etc., and the embodiment of the present invention does not make specific limitations on this.

[0025] The stacking module 3 generates a high-voltage electric field under the control of the controller module 7, which is used to accelerate the electrons emitted by the light tube emitter 1, so that the electrons obtain sufficient energy to bombard the anode target to generate micro-focus rays. The specific shape of the stacking module 3 is not specifically limited in the embodiment of the present invention. In some optional embodiments, the stacking module 3 can be flat or cylindrical to save space, and a multi-layer stacking structure is set under the premise of ensuring the boost requirement to improve the integration of the micro-focus ray source device. The controller module 7 provides power supply for the entire micro-focus ray source device, and can accurately control the stacking module 3 to adjust the input voltage level and boost gradient according to different voltage gradient levels and practical scenarios, thereby controlling the working state of the light tube emitter 1 and the stacking module 3.

[0026] In the embodiment of the present invention, one end of the light pipe support structure 2 is detachably connected to one end of the sealed shell 6, and the light pipe support structure 2 and the sealed shell 6 enclose a sealed chamber, so that the interior of the sealed chamber is filled with an insulating medium, so that the micro-focus ray source device can be flexibly disassembled and parts can be replaced according to different needs; the light pipe support structure 2 is fixedly connected to the first position of the light pipe transmitter 1 by at least one fastener, so that the installation position of the light pipe transmitter 1 is adjustable and can adapt to light pipe transmitters 1 of different specifications and sizes, thereby enhancing the flexibility of the micro-focus ray source device to adapt to different voltage levels and detection requirements, thereby enhancing the versatility of the micro-focus ray source.

[0027] As an optional implementation, Figure 1 As shown, a sealed second chamber 4 is disposed inside the first chamber 5 , and the light pipe emitter 1 located in the first portion and the stacking module 3 are disposed inside the second chamber 4 .

[0028] In this embodiment, the second chamber 4 is arranged inside the first chamber 5 in a sealed state, which can provide a more stable and closed environment for the part of the light tube emitter 1 close to the anode end and the stacking module 3, further reduce the interference of external factors on them, and better ensure that the process of emitting electrons is not affected by external impurities, voltage fluctuations and other factors, stably generate high-quality electron beams, ensure the stable output of high-voltage electric fields, and thus improve the efficiency and quality of ray generation, thereby improving the overall stability and reliability of the device.

[0029] The embodiment of the present invention does not specifically limit the selection of the material of the second chamber 4. In some optional embodiments, the second chamber 4 can be made of polycarbonate (PC), which has good mechanical properties and electrical insulation properties, can effectively protect internal components, and is light in weight, which helps to achieve lightweighting of the device; or can be made of metal, such as aluminum alloy, which has good thermal conductivity. In addition, the embodiment of the present invention also does not limit the specific shape of the second chamber 4.

[0030] Of course, whether the second chamber 4 is disposed in the first chamber 5 does not affect the realization of the basic functions of the micro-focus ray source device of the present invention.

[0031] As an optional embodiment, at least one slot is provided on the inner wall of the second chamber 4, and at least one protrusion corresponding to the at least one slot is provided on the stacking module 3, and the at least one slot is connected to the at least one protrusion by interference fit.

[0032] The main purpose of the at least one slot on the inner wall of the second chamber 4 is to cooperate with the protrusion on the stacking module 3 to achieve the positioning and fixation of the stacking module 3. The close cooperation between the slot and the protrusion limits the displacement of the stacking module 3 in the second chamber 4, ensuring that the stacking module 3 always remains in the correct position during the operation of the device, providing a guarantee for its stable operation. At the same time, due to the characteristics of interference fit, the protrusion can also transmit the force and vibration generated by the stacking module 3 during operation to a certain extent, avoiding the performance of the micro-focus ray source device being affected by loose connection.

[0033] The shapes of the above-mentioned slots and protrusions can be designed according to actual needs. For example, the slots are designed to be in the shape of dovetail slots, and the corresponding protrusions are designed to be in the shape of dovetails that match them. This shape can provide stronger anti-slip performance. Even when the device is subjected to large vibration or impact, the stacking module 3 is not easy to slip out of the slots, further enhancing the reliability of the connection. The slots and protrusions can also be designed to be serrated to increase the friction between the two and improve the stability of the connection.

[0034] In addition, other connection methods such as threaded connection, snap connection or welding connection can also be used to replace the above-mentioned matching connection method of the slot and the protrusion to achieve the fixed connection between the second chamber 4 and the stacking module 3. Different connection methods do not affect the realization of the basic functions of the micro-focus radiation source device of the present invention.

[0035] As an optional implementation, the light pipe transmitter 1 and the stacking module 3 are electrically and flexibly connected via a voltage equalizing device.

[0036] In this embodiment, the light tube transmitter and the stacking module are connected conductively and flexibly by means of pressure equalizing rings of different sizes adapted to different heat dissipation capabilities and pressure equalization. The pressure equalization device may include a flexible conductive sheet and a pressure equalization capacitor. One end of the flexible conductive sheet is tightly connected to the electrode lead-out end of the light tube transmitter 1, and the electronic or current signal generated by the light tube transmitter 1 can be obtained. The other end is connected to one end of the pressure equalization capacitor, and the electrical signal of the light tube transmitter 1 can be transmitted to the task of the pressure equalization capacitor. The flexible conductive sheet has good conductivity and flexibility. The conductive and flexible connection between the light tube transmitter 1 and the stacking module 3 through the pressure equalization device can adapt to the slight displacement or vibration that may exist between the light tube transmitter 1 and the stacking module 3, ensure the stable transmission of the electrical signal, and avoid affecting the performance of the device due to loose or broken connections. For example, in some industrial detection equipment with extremely high stability requirements, even if the equipment vibrates slightly during operation, the conductive and flexible connection can ensure that the electrical connection between the light tube transmitter 1 and the pressure equalization capacitor is stable and reliable.

[0037] The voltage balancing device can balance the voltage between the light tube emitter 1 and the stacking module 3. When the micro-focus ray source device is working, the light tube emitter 1 and the stacking module 3 are at different potentials, and the voltage will fluctuate with the change of the working state. The voltage balancing device stores and releases charges to keep the voltage difference between the two within a suitable range to prevent damage to components caused by excessive voltage. It can also improve the stability of electron transmission, thereby ensuring the stability of the quality of the rays generated by the micro-focus ray source; at the same time, most of the heat of the light tube reflector can be quickly transferred to the insulating medium to prevent the light tube reflector from being damaged due to overheating.

[0038] In some optional embodiments, a flexible conductive sheet with a buffer structure may be designed, for example, an elastic buffer layer may be added to the middle portion of the flexible conductive sheet. When a large displacement occurs between the light pipe emitter 1 and the stacking module 3, the buffer layer may play a buffering role, further protecting the flexible conductive sheet from being broken or damaged.

[0039] In addition, a flexible printed circuit board (FPCB) connection or a metal braided belt connection can be used instead of the above-mentioned conductive flexible connection through the voltage balancing device, because the FPCB itself has good electrical conductivity and can stably transmit electrical signals. At the same time, by reasonably designing the circuit layout on the FPCB, such as adding some capacitors, inductors and other components, it can play a certain role in voltage balancing; the metal braided belt has a large surface area and low resistance, and can efficiently conduct current. When a voltage difference occurs between the light tube transmitter 1 and the stacking module 3, the free electrons in the metal braided belt will move rapidly, which can also play a role in balancing the voltage.

[0040] As an optional embodiment, the at least one fastener is a clamping fastener, which includes a pair of clamping plates and an adjusting screw, wherein the adjusting screw passes through through holes opened at corresponding positions of the pair of clamping plates, and the pair of clamping plates are moved closer to or farther away from each other by rotating the adjusting screw.

[0041] In this embodiment, a pair of clamping plates are arranged opposite to each other and are respectively located on both sides of the connection part between the light tube transmitter 1 and the light tube support structure 2. Its main function is to achieve the clamping and fixing of the light tube transmitter 1 and the light tube support structure 2 by cooperating with the adjusting screw. The inner side of the clamping plate can be designed with anti-slip patterns or rubber pads, so that the friction with the surface of the light tube transmitter 1 and the light tube support structure 2 can be increased during clamping to prevent loosening during the operation of the device and ensure the stability of the connection. The above-mentioned adjusting screw passes through the through holes opened at the corresponding positions of the pair of clamping plates, and one end of the adjusting screw can be equipped with a knob or nut for easy rotation operation. By rotating the adjusting screw, the distance between the pair of clamping plates can be changed. For example: when the adjusting screw is rotated clockwise, the clamping plates are close to each other, thereby clamping the light tube transmitter 1 and the light tube support structure 2; when it is rotated counterclockwise, the clamping plates are away from each other, which is convenient for installation, disassembly or adjustment of components.

[0042] In some optional embodiments, the adjusting screw can be designed with a scale, so that when the adjusting screw is rotated, the distance the clamping piece moves and the approximate change in the clamping force can be intuitively understood, which facilitates accurate control of the clamping force. In addition, in order to improve the adjustment convenience and efficiency of the adjusting screw, a power assist device, such as a worm gear mechanism or a gear transmission mechanism, can be installed on the adjusting screw. Through these mechanisms, the operator can achieve rapid rotation of the adjusting screw with less force.

[0043] In addition, in some optional embodiments, on the basis of the clamping fastener, an auxiliary positioning structure can be added to improve the installation accuracy of the light pipe transmitter 1 and the light pipe support structure 2. For example, a positioning pin or a positioning groove is provided on the clamping piece, and a corresponding positioning hole or positioning protrusion is provided on the light pipe transmitter 1 and the light pipe support structure 2. During installation, the positioning pin is first inserted into the positioning hole or the positioning protrusion is clamped into the positioning groove to achieve preliminary positioning, and then clamped by adjusting the screw, so as to ensure that the light pipe transmitter 1 and the light pipe support structure 2 are accurately aligned during the installation process to avoid offset or tilt.

[0044] In this embodiment, the clamping fastener achieves precise control of the clamping piece by adjusting the screw, and can provide a stable and adjustable clamping force, effectively preventing the light pipe emitter 1 and the light pipe support structure 2 from loosening or displacement during the operation of the device, and ensuring the connection stability helps to improve the working reliability and detection accuracy of the micro-focus ray source device. In addition, since the clamping force of the clamping fastener can be adjusted according to actual needs, it can adapt to light pipe emitters 1 and light pipe support structures 2 of different sizes and materials, thereby improving the versatility and flexibility of the micro-focus ray source device.

[0045] Of course, in some optional embodiments, the connection between the light tube emitter 1 and the light tube support structure 2 can also be achieved by other means instead of clamping fasteners, such as welding. The welding connection can provide extremely high connection strength to ensure that the relative position between the light tube emitter 1 and the light tube support structure 2 is fixed, which is suitable for situations where stability requirements are extremely high and frequent disassembly is not required; or bolt connection can be used. The bolt connection has the advantages of firm connection and multiple disassembly, and different connection strength requirements can be met by selecting bolts and nuts of different specifications. It is more suitable in some micro-focus ray source devices that have high requirements on installation accuracy and maintainability.

[0046] As an optional implementation, a sealing structure is provided at the detachable connection between the first position of the light pipe emitter 1 and the lower end of the light pipe support structure 2 and the upper end of the sealing shell 6 .

[0047] In this embodiment, a sealing structure is provided at the detachable connection between the first position of the light pipe transmitter 1 and the lower end of the light pipe support structure 2 and the upper end of the sealed housing 6, which can prevent external dust, moisture, debris and corrosive substances from entering the interior of the device, avoid these substances from damaging the internal precision components such as the light pipe transmitter 1 and the stacking module 3, and ensure that the device operates stably in a good environment.

[0048] The above sealing structure can use rubber gaskets. Rubber has good elasticity and sealing performance, and its material can be selected according to the use environment of the device. For example, in a high temperature environment, a high temperature resistant fluororubber material can be selected, which can maintain elasticity and sealing performance at high temperatures to prevent sealing failure due to excessive temperature; in a humid environment, an EPDM rubber material with good water resistance can be selected to prevent the rubber from aging and deteriorating due to long-term contact with moisture. Sealant can also be used for sealing. The sealant can form a continuous sealing layer at the connection part, has good adhesion and filling properties, can fill some irregularly shaped gaps, and improve the sealing effect.

[0049] By setting up a sealing structure, the influence of adverse external factors on the light pipe emitter 1, the stacking module 3 and other components is effectively reduced, and the risk of damage to components or performance degradation caused by the intrusion of impurities such as external gases is guaranteed, thereby improving the stability of the entire micro-focus ray source device. A stable working environment helps the light pipe emitter 1 to stably emit electrons and the stacking module 3 to stably generate high voltage, ensuring that the micro-focus ray source continuously and stably outputs high-quality rays.

[0050] Of course, in some optional implementations, the sealing structure can be replaced by other methods to improve the stability of the connection parts. For example, a special processing technology can be used to manufacture the connection parts of the light pipe emitter 1, the light pipe support structure 2 and the sealing shell 6 to improve the flatness and roughness of the connection parts, so that the connection parts can be more closely matched and the possibility of foreign substances intrusion can be reduced; the connection parts can also be made of materials with higher strength and certain self-sealing properties, and the stability and sealing of the connection parts can be improved by using the characteristics of the material itself.

[0051] As an optional implementation, the light pipe emitter 1 includes a hot cathode element.

[0052] In this embodiment, the hot cathode element is installed inside the light tube emitter 1 and closely cooperates with other components of the light tube emitter 1. It can be set at the starting position of electron emission and maintain a specific spatial relationship with the subsequent electric field structure used to accelerate electrons and the anode target material, so as to ensure that the emitted electrons can be smoothly accelerated and bombard the anode target material to generate rays.

[0053] The main function of the above-mentioned hot cathode element is to generate electrons through the principle of thermal electron emission. When working, the hot cathode element is heated to a certain temperature, and the electrons inside it obtain enough energy to overcome the surface potential barrier and escape, forming an electron cloud. These escaped electrons are accelerated under the action of the electric field and become the initial electron source for generating micro-focus rays.

[0054] The material of the hot cathode element is not specifically limited in the present embodiment, and can be selected according to different requirements. For example, tungsten wire has a higher melting point and better thermal stability, and can work stably for a long time at high temperature; lanthanum hexaboride (LaB 6 ) and other materials. Lanthanum hexaboride has a lower work function and can emit more electrons at the same temperature, which can improve the electron emission efficiency. In addition, new hot cathode materials, such as carbon nanotube composites, can be used to further improve the performance of hot cathodes by utilizing their unique electronic structure and excellent physical properties.

[0055] In this embodiment, the hot cathode element can provide stable and high-density electron emission. When the micro-focus ray source device is working, stable electron emission is the basis for generating a stable ray beam. The light tube emitter 1 includes a hot cathode element to ensure the stability of the ray intensity and energy, thereby improving the accuracy and reliability of the detection results.

[0056] In some optional embodiments, the hot cathode can be designed as a porous structure to increase the surface area of ​​electron emission, thereby increasing the amount of electron emission. A special material, such as a rare earth oxide coating, can also be coated on the surface of the hot cathode to reduce the work function of electron escape and enhance the electron emission capability.

[0057] Of course, in some optional implementations, the function of the micro-focus ray source device to generate electrons can also be achieved by replacing the hot cathode element with other methods, for example, by using cold cathode technology, such as field emission cathode.

[0058] As an optional implementation, the inner walls of the first chamber 5 and the second chamber 4 are provided with an anti-corrosion coating.

[0059] In this embodiment, the above-mentioned anti-corrosion coating can prevent the inner wall of the chamber from being corroded. During the operation of the micro-focus ray source device, there will be an insulating medium inside, and there may be some tiny impurities generated by the operation of the components. At the same time, the device may be under different environmental conditions, and these factors may cause the inner wall of the chamber to corrode. The anti-corrosion coating can effectively isolate these corrosive factors, prevent the inner wall of the chamber from rusting and corroding, thereby ensuring the sealing performance and structural strength of the chamber, preventing the leakage of the insulating medium caused by the corrosion of the inner wall, avoiding affecting the normal operation of the light tube transmitter 1 and the stacking module 3, and ensuring the long-term stable operation of the device.

[0060] The materials of the above-mentioned anti-corrosion coating can be selected in a variety of ways according to the use environment and performance requirements of the device. For micro-focus ray source devices used in humid environments, epoxy resin coatings with good water resistance can be selected. They can form a solid protective film in a water environment and effectively prevent moisture from corroding the inner wall of the chamber. In a high-temperature environment, ceramic coating is a good choice. It has the characteristics of high temperature resistance, wear resistance and corrosion resistance, and can maintain good protective performance at high temperatures. In addition, organic-inorganic composite coatings can also be used to combine the flexibility of organic materials and the high hardness and corrosion resistance of inorganic materials to improve the comprehensive performance of the coating.

[0061] By providing an anti-corrosion coating on the inner wall of the chamber, the chamber is effectively prevented from being damaged by corrosion, ensuring the sealing performance and structural integrity of the first chamber 5 and the second chamber 4. This helps to maintain the normal working environment of the light pipe transmitter 1 and the stacking module 3, reduce the probability of failure caused by chamber corrosion, and improve the reliability and stability of the micro-focus ray source device.

[0062] Of course, in some optional embodiments, the anti-corrosion coating can be replaced by other methods to protect the inner wall of the chamber and improve the stability of the device. For example, the chamber is made of corrosion-resistant materials, such as stainless steel, titanium alloy, etc. These materials themselves have good corrosion resistance and can reduce the occurrence of corrosion to a certain extent. Or the inner wall of the chamber is subjected to surface treatment, such as passivation treatment, anodizing treatment, etc., to improve its corrosion resistance by changing the surface structure and properties of the inner wall of the chamber.

[0063] As an optional implementation, the outside of the first chamber 5 has a heat dissipation layer.

[0064] In this embodiment, the heat dissipation layer is tightly attached to the outer surface of the first chamber 5, and can completely cover all sides of the first chamber 5, and form a tight connection with the outer wall of the first chamber 5, ensuring that there is no obvious gap or looseness between the two, so as to achieve efficient heat transfer. Components such as the light pipe transmitter and the stacking module in the first chamber will generate heat during operation. If they are not dissipated in time, the temperature in the chamber will be too high, affecting the performance and life of these components, and may even cause failures. The main function of the heat dissipation layer is to quickly and effectively transfer the heat generated in the first chamber to the external environment, so that the first chamber is maintained within a suitable operating temperature range, ensuring the stable operation of the light pipe transmitter and the stacking module, and then ensuring the overall performance and reliability of the micro-focus ray source device. In addition, the embodiments of the present invention do not limit the specific materials and structures of the heat dissipation layer.

[0065] Of course, whether a heat dissipation layer is provided outside the first chamber 5 does not affect the realization of the basic functions of the micro-focus ray source device.

[0066] In the embodiment of the present invention, the micro-focus ray source device includes: a light pipe transmitter 1, a light pipe support structure 2, a sealed housing 6, a stacking module 3 and a controller module 7; one end of the light pipe support structure 2 is detachably connected to one end of the sealed housing 6, and the light pipe support structure 2 and the sealed housing 6 enclose a first chamber 5, the first chamber 5 is a sealed chamber, and the first chamber 5 is filled with an insulating medium; the light pipe support structure 2 includes at least one fastener, and the light pipe support structure 2 is fixedly connected to the first position of the light pipe transmitter 1 through the at least one fastener; the light pipe transmitter 1 The anode end of the light tube emitter 1 is fixedly connected to the stacking module 3, the first part of the light tube emitter 1 and the stacking module 3 are arranged inside the first chamber 5 and immersed in the insulating medium, and the first part is the part of the light tube emitter 1 located at the first position and close to the anode end; the bottom of the stacking module 3 is connected to the controller module 7 through an insulating lead, and the controller module 7 is fixedly connected to the outer surface of the sealed shell 6. The controller module 7 provides power supply for the micro-focus ray source device and controls the input voltage level and boost gradient of the stacking module 3 through a program. In the embodiment of the present invention, one end of the light pipe support structure 2 is detachably connected to one end of the sealed shell 6, and the light pipe support structure 2 and the sealed shell 6 enclose a sealed chamber, so that the interior of the sealed chamber is filled with an insulating medium, so that the micro-focus ray source device can be flexibly disassembled and parts can be replaced according to different needs; the light pipe support structure 2 is fixedly connected to the first position of the light pipe transmitter 1 by at least one fastener, so that the installation position of the light pipe transmitter 1 is adjustable and can adapt to light pipe transmitters 1 of different specifications and sizes, thereby enhancing the flexibility of the micro-focus ray source device to adapt to different voltage levels and detection requirements, thereby enhancing the versatility of the micro-focus ray source.

[0067] In addition, in an embodiment of the present invention, there is also provided a ray detection device including a micro-focus ray source device of any implementation manner provided in an embodiment of the present invention.

[0068] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with (but not limited to) technical features with similar functions disclosed in the present application.

[0069] Except for the technical features described in the specification, the remaining technical features are known technologies to those skilled in the art. In order to highlight the innovative features of the present invention, the remaining technical features will not be described here in detail.

Claims

1. A micro-focus ray source device, characterized in that: include: A light pipe transmitter, a light pipe support structure, a sealed housing, a stacking module, and a controller module; One end of the light pipe support structure is detachably sealed to one end of the sealed housing, and the light pipe support structure and the sealed housing enclose a first chamber, which is a sealed chamber filled with an insulating medium; The light pipe support structure includes at least one fastener, and the light pipe support structure is fixedly connected to the first position of the light pipe transmitter through the at least one fastener to adapt to the light pipe transmitters of different voltage levels; The anode end of the light tube transmitter is fixedly connected to the stacking module, the first part of the light tube transmitter and the stacking module are arranged inside the first chamber and immersed in the insulating medium, and the first part is the part of the light tube transmitter located at the first position and close to the anode end; The bottom of the stacking module is connected to the controller module through an insulated lead, and the controller module is fixedly connected to the outer surface of the sealed shell. The controller module provides power supply for the micro-focus ray source device and controls the input voltage level and boost gradient of the stacking module through a program.

2. The micro-focus ray source device according to claim 1, characterized in that: A sealed second chamber is arranged inside the first chamber, and the light pipe emitter located in the first part and the stacking module are arranged inside the second chamber.

3. The micro-focus ray source device according to claim 2, characterized in that: At least one slot is defined in the inner wall of the second chamber, and at least one protrusion corresponding to the at least one slot is disposed on the stacking module, and the at least one slot is connected to the at least one protrusion by interference fit.

4. The micro-focus ray source device according to any one of claims 1 to 3, characterized in that: The light pipe emitter is conductively and flexibly connected to the stacking module via a voltage equalizing device.

5. The micro-focus ray source device according to any one of claims 1 to 3, characterized in that: At least one of the fasteners is a clamping fastener, which includes a pair of clamping plates and an adjusting screw. The adjusting screw passes through through holes opened at corresponding positions of the pair of clamping plates. By rotating the adjusting screw, the pair of clamping plates are moved closer to or farther away from each other.

6. The micro-focus ray source device according to any one of claims 1 to 3, characterized in that: A sealing structure is provided at the detachable connection between the first position of the light pipe emitter and the lower end of the light pipe support structure and the upper end of the sealing housing.

7. The micro-focus ray source device according to any one of claims 1 to 3, characterized in that: The light pipe emitter includes a hot cathode element.

8. The micro-focus ray source device according to claim 2, characterized in that: The inner walls of the first chamber and the second chamber are provided with an anti-corrosion coating.

9. The micro-focus ray source device according to any one of claims 1 to 3, characterized in that: The first chamber has a heat dissipation layer outside.

10. A radiation detection device, characterized in that: The radiation detection equipment comprises the micro-focus radiation source device according to any one of claims 1 to 9.

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