Substrate processing apparatus and substrate processing method

Abstract

The present invention provides a substrate processing apparatus and a substrate processing method, which may include: a plurality of pick-up head devices which variably adjust a pitch, can pick up a plurality of pick-up objects arranged at a certain pitch together, and can move left and right such that the pick-up objects are separated from each other and expanded or close to each other and tightened; the guiding device is used for guiding the left-right moving path of the pick-up head device; and the distance adjusting device enables the pick-up head devices to move left and right along the guide device so as to adjust the distance between the pick-up head devices.

Description

Technical Field

[0001] The present invention relates to a substrate processing device and a substrate processing method, and more specifically to a substrate processing device and a substrate processing method that can precisely adjust the spacing according to the picking objects such as semiconductor chips or semiconductor packages arranged at various spacings and pick them up together. Background Art

[0002] Semiconductor chips separated from wafers or semiconductor packages separated from substrate strips are classified into various pitches and arranged on a platform or tray, etc. In order to simultaneously transfer multiple pickup objects, a pickup device consisting of multiple pickup heads with fixed pitches is widely used to classify pickup objects such as semiconductor chips or semiconductor packages arranged at various pitches. Summary of the invention

[0003] Problem to be solved

[0004] However, although the existing pickup device consisting of multiple pickup heads picks up the objects simultaneously through multiple pickup heads, since the spacing of the pickup heads is fixed during manufacturing, multiple objects can be picked up simultaneously when the spacing of the objects is consistent with the spacing of the pickup heads.

[0005] If the spacing of the arranged multiple picking objects is inconsistent with the spacing of the picking head, the picking head can only be moved individually to pick up one picking object at a time and classify them. Therefore, there are many problems such as consuming more time in the picking process and reducing productivity.

[0006] The present invention is used to solve multiple problems including the above problems, and its purpose is to provide a pickup head using a variable pitch mode of a flat cam to make the pitch of the pickup head consistent with the pickup object, so that multiple pickup objects can be picked up together for transfer and classification, and the position accuracy and repeatability when adjusting the pitch are greatly improved by forming multiple rows of cam grooves, and a substrate processing device and a substrate processing method can be precisely calibrated when the pickup head shakes or deviates from the position. Such problems are only illustrative, and the scope of the present invention is not limited by these problems.

[0007] Means of solving the problem

[0008] A substrate processing device based on the concept of the present invention and used to solve the above-mentioned problems may include: a plurality of pickup head devices, which can adjust the spacing variably, can pick up a plurality of pickup objects arranged at a certain spacing together, and can move left and right to move away from each other and open or approach each other and tighten; a guide device, which guides the left and right movement path of the pickup head devices; and a spacing adjustment device, which makes the pickup head devices move left and right along the guide device respectively to adjust the spacing of the pickup head devices; the spacing adjustment device includes: a flat cam, which is formed with a plurality of first-column cam grooves on the upper part, and a plurality of second-column cam grooves corresponding to the same are formed on the lower part, and is formed into a structure that can be lifted and lowered, so that when the first-column cam grooves and the second-column cam grooves are lifted and lowered, the upper cam followers formed on each of the pickup head devices move left and right along the first-column cam grooves, and at the same time, the lower cam followers formed on each of the pickup head devices move left and right along the second-column cam grooves; and a cam drive actuator, which makes the flat cam move up and down.

[0009] In addition, according to the present invention, the flat cam may include: a flat cam body, which is formed in a flat plate shape as a whole; a plurality of the first-row cam grooves, which are formed at the upper part of the flat cam body, and at least a portion of them are formed obliquely from the upper part to the lower part or from the lower part to the upper part of the flat cam body, so that the intervals between them gradually move away from or approach each other, so that the upper cam followers move away from and open or approach and tighten each other as the flat cam body moves up and down; and a plurality of the second-row cam grooves, which are formed at the lower part of the flat cam body, and at least a portion of them are formed obliquely from the upper part to the lower part or from the lower part to the upper part of the flat cam body, so that the intervals between them gradually move away from or approach each other, so that the lower cam followers move away from and open or approach and tighten each other as the flat cam body moves up and down.

[0010] Furthermore, according to the present invention, the first row of cam groove portions and the second row of cam groove portions may be formed in the same shape to improve repetition accuracy.

[0011] Furthermore, according to the present invention, the spacing adjustment device may further include a cam follower adjustment device. To improve the accuracy, the cam follower adjustment device can finely adjust the left and right position of the upper cam follower or the lower cam follower.

[0012] In addition, according to the present invention, the cam follower adjustment device may include: a free groove portion, formed in a part of the pickup head device, extending in the left and right directions; a cam follower variable shaft portion, inserted into the free groove portion, formed with the upper cam follower or the lower cam follower, and capable of moving position in the left and right directions along the free groove portion; and left and right position fixing screws, respectively arranged in the left and right directions of the free groove portion to fix the position of the cam follower variable shaft portion.

[0013] Furthermore, according to the present invention, the lower cam follower may be formed on a cam follower fixed shaft portion fixed to the pickup head device; and the upper cam follower is formed on the cam follower variable shaft portion of the cam follower adjusting device formed on the pickup head device.

[0014] In addition, according to the present invention, the cam-driven actuator may include: a driving motor fixed to a frame; a power transmission device for transmitting the rotational power of the driving motor; a threaded rod for rotating through the power transmission device; and a nut member connected to the flat cam, penetrated by the threaded rod and threadably raised and lowered along the guide member.

[0015] Furthermore, according to the present invention, the power transmission device may include a driving pulley connected to the rotating shaft of the driving motor, a driven pulley connected to the rotating shaft of the threaded rod, and a transmission belt wound around the driving pulley and the driven pulley and transmitting power.

[0016] In addition, according to the present invention, the pickup head device may include: a movable module, which is guided by the guide device to move left and right on one side, and is formed with the upper cam follower and the lower cam follower; a pickup head module, which is fastened to the movable module and is formed with a vacuum pipeline; and a pickup head, which is formed on the pickup head module, is connected to the vacuum pipeline and picks up the pickup object.

[0017] In addition, according to the present invention, the guiding device may include: a guide frame; at least one linear motion guide rail, whose two ends are fixed to the guide frame, guiding the left and right movement path of the movable module; and at least one linear motion guide module, fixed to the movable module, moving along the linear motion guide rail.

[0018] In addition, according to the present invention, the linear motion guide rail may include: an upper track formed at the upper part of the movable module; and a lower track formed at the lower part of the movable module; the linear motion guide module may include: an upper guide module moving along the upper track; and a lower guide module moving along the lower track.

[0019] In addition, according to the present invention, the upper rail may include: an upper first rail, which matches the upper first guide module formed at the upper end of the movable module; and an upper second rail, which is separated from the upper first rail and matches the upper second guide module formed at the upper lower end of the movable module.

[0020] In addition, according to the present invention, the lower rail may include: a lower first rail, which matches the lower first guide module formed at the lower upper end of the movable module; and a lower second rail, which is separated from the lower first rail and matches the lower second guide module formed at the lower lower end of the movable module.

[0021] In addition, according to the present invention, the plurality of upper first guide modules and the plurality of upper second guide modules can be staggered in a Z shape to avoid mutual interference; the plurality of lower first guide modules and the plurality of lower second guide modules can be staggered in a Z shape to avoid mutual interference.

[0022] In addition, according to the present invention, it can also include: a spacing measuring device for measuring the spacing of the picked-up objects; and a control unit for receiving spacing information from the spacing measuring device and applying a lifting control signal to the cam driving actuator to lift the flat cam.

[0023] Furthermore, according to the present invention, the pickup object may be a singulated semiconductor chip or a semiconductor package.

[0024] Furthermore, according to the present invention, the pickup head device may be a pickup head device of a semiconductor cutting and sorting device that cuts and sorts semiconductor wafers or semiconductor strips.

[0025] In addition, a substrate processing method based on the concept of the present invention and used to solve the above-mentioned problem utilizes a substrate processing device, and the substrate processing device may include: a plurality of pickup head devices, which can variably adjust the spacing, can pick up a plurality of pickup objects arranged at a certain spacing together, and can move left and right to move away from each other and open or approach each other and tighten; a guide device, which guides the left and right movement path of the pickup head device; and a spacing adjustment device, which makes the pickup head device move left and right along the guide device respectively to adjust the spacing of the pickup head device; the spacing adjustment device includes: a flat cam, which is formed with a plurality of first-row cam grooves on the upper part, and a plurality of second-row cam grooves corresponding to the cam grooves on the lower part, and is formed into a structure that can be lifted and lowered, so that when the first-row cam grooves and the second-row cam grooves are lifted and lowered When the pick-up head device moves left and right along the first column of cam grooves, the upper cam follower formed on each of the pick-up head devices moves left and right along the second column of cam grooves; and the cam drive actuator causes the flat cam to move up and down; the substrate processing method may include: step (a), using a spacing measuring device to measure the spacing of the picked-up objects; step (b), applying a lifting control signal to the cam drive actuator so that the flat cam is lifted and lowered using the spacing information received from the spacing measuring device; step (c), the pick-up head device moves left and right along the guide device while the spacing of the pick-up head device is adjusted; and step (d), picking up and transferring a plurality of the picked-up objects by a plurality of the pick-up head devices.

[0026] Furthermore, according to the present invention, in the step (c), the accuracy can be improved by using a cam follower adjustment device capable of finely adjusting the left-right position of the upper cam follower or the lower cam follower.

[0027] In addition, a substrate processing device based on the concept of the present invention and used to solve the above-mentioned problem may include: a plurality of pickup head devices, the spacing of which can be variably adjusted, so as to pick up a plurality of pickup objects arranged at a certain spacing together, and can move left and right to move away from each other and open or move closer to each other and tighten; a guide device to guide the left and right movement path of the pickup head devices; and a spacing adjustment device to make the pickup head devices move left and right along the guide device respectively to adjust the spacing of the pickup head devices; the spacing adjustment device may include: a flat cam having a plurality of first-row cam grooves formed on the upper part, a plurality of second-row cam grooves corresponding thereto formed on the lower part, and being formed into a structure that can be lifted and lowered, so that when the first-row cam grooves and When the second row of cam grooves is lifted, the upper cam followers formed on each of the pickup head devices move left and right along the first row of cam grooves, and at the same time, the lower cam followers formed on each of the pickup head devices move left and right along the second row of cam grooves; and a cam driving actuator causes the flat plate cam to be lifted; the flat plate cam may include: a flat plate cam body, which is formed in a flat plate shape as a whole; a plurality of the first row of cam grooves, which are formed on the upper part of the flat plate cam body, and are at least partially formed obliquely from the upper part to the lower part or from the lower part to the upper part of the flat plate cam body, so that the intervals between them gradually move away from or close to each other, so that the upper cam followers move along with the lifting of the flat plate cam body. The cam follower of the second row is formed at the lower part of the flat cam body, and at least a part of the second row of cam grooves is formed obliquely from the upper part to the lower part or from the lower part to the upper part of the flat cam body, so that the intervals between them gradually move away from or close to each other, so that the lower cam followers move away from and open or approach and tighten with the lifting and lowering movement of the flat cam body; the spacing adjustment device also includes a cam follower adjustment device, and in order to improve the accuracy, the cam follower adjustment device can finely adjust the left and right positions of the upper cam follower or the lower cam follower; the cam follower adjustment device may include: a free groove portion formed on the pickup head device A part is formed extending in the left and right directions; a cam follower variable shaft portion is inserted into the free groove portion, and the upper cam follower or the lower cam follower is formed, which can move along the free groove portion to the left and right directions; and left and right position fixing screws are respectively arranged in the left and right directions of the free groove portion to fix the position of the cam follower variable shaft portion; the guiding device may include: a guiding frame; at least one linear motion guide rail, both ends of which are fixed to the guiding frame to guide the left and right moving path of the movable module; and at least one linear motion guiding module, which is fixed to the movable module and moves along the linear motion guide rail; it may also include: a spacing measuring device to measure the spacing of the picked-up objects;and a control unit that receives the spacing information from the spacing measuring device and applies a lifting control signal to the cam driving actuator to lift the plate cam. ;

[0028] Effects of the Invention

[0029] The embodiments of the present invention configured as described above have the following effects:

[0030] By using a pickup head with a variable pitch using a flat cam, the pitch of the pickup head is made consistent with the pickup object, so that multiple pickup objects can be picked up together and then transferred and classified, thereby shortening the picking time and greatly improving production efficiency, and by forming multiple rows of cam grooves, the position accuracy and repeatability when adjusting the pitch are greatly improved, and precise calibration can be performed when the pickup head shakes or deviates from the position. Of course, the scope of the present invention is not limited to these effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 is a schematic diagram illustrating a first spacing state of a pickup head of a substrate processing device according to some embodiments of the present invention;

[0032] Figure 2 It is depicted Figure 1 A schematic diagram of a second spacing state of a pickup head of a substrate processing device;

[0033] Figure 3 It is shown from the overall Figure 1 A front perspective view of a substrate processing device;

[0034] Figure 4 It is shown from the overall Figure 1 a rear perspective view of a substrate processing device;

[0035] Figure 5 It is depicted Figure 1 A side cross-sectional view of a cam-driven actuator of a substrate processing device;

[0036] Figure 6 It is depicted Figure 1 a rear view of the substrate processing device;

[0037] Figure 7 It is depicted Figure 1 A rear view of a flat cam of a substrate processing device;

[0038] Figure 8 It is depicted Figure 1 A rear view of a guide device of a substrate processing device;

[0039] Fig. 9 Yes Figure 8An enlarged view of a portion A of a substrate processing device in FIG.

[0040] Fig.10 It is depicted Figure 8 A perspective view of a cam follower adjustment device of a substrate processing device;

[0041] Fig.11 It is depicted Fig.10 A cross-sectional view of a cam follower adjustment device of a substrate processing device;

[0042] Fig.12 is a sequence diagram illustrating a substrate processing method according to some embodiments of the present invention;

[0043] Description of reference numerals:

[0044] 1 Pick object; P Spacing;

[0045] P1 first spacing; P2 second spacing;

[0046] 10 Pick-up head device; 11 Movable module;

[0047] 111 upper cam follower; 112 lower cam follower;

[0048] 12 Pick-up head module; 13 Pick-up head;

[0049] 20 Guide device; GF Guide frame;

[0050] R Linear motion guide rail; B Linear motion guide module;

[0051] R1 upper track; R2 lower track;

[0052] B1 upper guide module; B2 lower guide module;

[0053] R11 upper first track; R12 upper second track;

[0054] B11 upper first guide module; B12 upper second guide module;

[0055] R21 lower first track; R22 lower second track;

[0056] B21 lower first guide module; B22 lower second guide module;

[0057] 30 spacing adjustment device; 31 flat cam;

[0058] 310 a flat cam body; 311 a first row of cam grooves;

[0059] 312 second row cam groove portion; G guide member;

[0060] 32 cam driven actuator; 321 drive motor;

[0061] F frame; 322 power transfer unit;

[0062] 323 threaded rod; 324 nut member;

[0063] 325 guide member; 326 drive pulley;

[0064] 327 driven pulley; 328 transmission belt;

[0065] 33 cam follower adjusting device; 331 free groove portion;

[0066] 332 variable shaft portion of cam follower; 333 left and right position fixing screws;

[0067] S Cam follower fixing shaft; 40 Spacing measuring device;

[0068] 50 control unit; 100 substrate processing device;

[0069] 1000 Semiconductor cutting and sorting equipment. DETAILED DESCRIPTION

[0070] Hereinafter, some preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0071] The embodiments of the present invention are intended to more completely describe the present invention to those skilled in the art. The following embodiments may be changed into several different forms, and the scope of the present invention is not limited to the following embodiments. On the contrary, these embodiments are intended to make the present disclosure more thorough and complete, and fully convey the spirit of the present invention to those skilled in the art. In addition, for the convenience and clarity of explanation, the thickness or size of each layer in the drawings is exaggerated.

[0072] The terms used in this specification are used to describe specific embodiments and are not intended to limit the present invention. As used in this specification, singular forms may include plural forms unless otherwise clearly indicated in the context. In addition, "comprising" used in this specification specifically specifies the existence of the shapes, numbers, steps, operations, components, elements and / or combinations thereof involved, and does not exclude the existence or addition of more than one other shapes, numbers, operations, components, elements and / or combinations.

[0073] Embodiments of the present invention are described below with reference to the accompanying drawings that schematically illustrate preferred embodiments of the present invention. In the accompanying drawings, variations of the shapes depicted may be expected, for example, based on manufacturing techniques and / or tolerances. Therefore, embodiments of the present invention should not be construed as being limited to the specific shapes depicted in this specification, but should include, for example, shape variations resulting from manufacturing.

[0074] Figure 1 is a schematic diagram illustrating a first pitch P1 state of a pickup head 13 of a substrate processing apparatus 100 according to some embodiments of the present invention; Figure 2 It is depicted Figure 1 FIG. 1 is a schematic diagram of a second pitch P2 state of the pickup head 13 of the substrate processing apparatus 100 .

[0075] First, if Figure 1 as well as Figure 2 As shown, a substrate processing apparatus 100 according to some embodiments of the present invention may generally include a pickup head apparatus 10 and a distance adjustment apparatus 30 .

[0076] A plurality of pickup head devices 10 may be formed, and the plurality of pickup head devices 10 may be variably adjusted in spacing, so as to pick up a plurality of pickup objects 1 arranged at a certain spacing together, and may move away from each other and open or approach each other and tighten left and right.

[0077] The pickup head device 10 may include: a movable module 11 formed with an upper cam follower 111 and a lower cam follower 112 ; and a pickup head 13 connected to a vacuum line and picking up the pickup object 1 .

[0078] Here, the upper cam follower 111 and the lower cam follower 112 are formed into shapes corresponding to any one of the first column cam groove portions 311 and any one of the second column cam groove portions 312 described below, respectively. Depending on the shapes of the cam groove portions 311 and 312, cam followers (cam followers) of very various shapes and types, such as circular protrusion shapes, polygonal protrusion shapes or roller shapes, can be applied.

[0079] The spacing adjustment device 30 is a device that enables the pickup head device 10 to move left and right along the guide device 20 respectively to adjust the spacing P of the pickup head device 10. For example, the spacing adjustment device 30 may include a flat cam 31, a plurality of first-column cam grooves 311 are formed at the upper part, a plurality of second-column cam grooves 312 corresponding thereto are formed at the lower part, and a structure that can be lifted and lowered is formed, so that when the first-column cam grooves 311 and the second-column cam grooves 312 are lifted and lowered, the upper cam followers 111 formed on each pickup head device 10 move left and right along the first-column cam grooves 311, and at the same time, the lower cam followers 112 formed on each pickup head device 10 move left and right along the second-column cam grooves 312.

[0080] More specifically, for example, the flat cam 31 may include: a flat cam body 310, which is formed in a flat plate shape as a whole and is formed along the guide member G (refer to Figure 4 ) a liftable structure; a plurality of first-row cam grooves 311 formed on the upper part of the flat cam body 310, at least a portion of which is formed obliquely from the upper part to the lower part or from the lower part to the upper part of the flat cam body 310, so that the intervals between them gradually move away from or approach each other, so that the upper cam followers 111 move away from each other and open or approach each other and tighten as the flat cam body 310 moves up and down; and a plurality of second-row cam grooves 312 formed on the lower part of the flat cam body 310, at least a portion of which is formed obliquely from the upper part to the lower part or from the lower part to the upper part of the flat cam body 310, so that the intervals between them gradually move away from or approach each other, so that the lower cam followers 112 move away from each other and open or approach each other and tighten as the flat cam body 310 moves up and down.

[0081] The respective shapes of the first column cam groove portion 311 and the second column cam groove portion 312 have a smaller inclination in the central portion, but a larger inclination as they approach the periphery, spreading out like a fan, and can be formed into the same shape to improve repeatability accuracy.

[0082] As described above, the first row of cam grooves 311 and the second row of cam grooves 312 can be manufactured by subjecting the flat plate cam body 310 having a flat plate shape as a whole to high-precision processing such as wire cutting, turning, cutting, or laser processing.

[0083] The substrate processing apparatus 100 according to some embodiments of the present invention may further include, for example, a spacing measuring device 40 for measuring a spacing P (for example, P1 or P2) of the picked-up object 1; and a control unit 50 for receiving spacing information from the spacing measuring device 40 and applying a lifting control signal to the cam drive actuator 32 (see Figure 4), thereby causing the flat cam 31 to move up and down.

[0084] Therefore, according to the present invention, Figure 1 If a plurality of objects 1 are arranged at a relatively narrow first pitch P1, the pitch measuring device 40 can measure the first pitch P1 of the objects 1, and the control unit 50 receiving the pitch information from the pitch measuring device 40 can drive the actuator 32 using the cam (see Figure 4 ) makes the flat cam 31 descend, thereby adjusting the pick-up heads 13 to be close to each other to the first spacing P1, so as to pick up multiple pick-up objects 1 at the same time, such as Figure 2 As shown, if multiple picking objects 1 are arranged at a relatively wide second pitch P2, the pitch measuring device 40 can measure the second pitch P2 of the picking objects 1, and the control unit 50 that receives the pitch information from the pitch measuring device 40 can use the cam drive actuator 32 to lift the flat cam 31, thereby adjusting the picking heads 13 to move away from each other to the second pitch P2, so that multiple picking objects 1 can be picked up at the same time.

[0085] Here, as for the distance information, the operator may input a predefined distance using the distance input device without using the distance measuring device 40 .

[0086] In addition, the distance measuring device 40 may use a visual camera, but is not limited to this, and a very various types of sensors may be used.

[0087] In addition, the picking object 1 may be a singulated semiconductor chip or a semiconductor package, and the picking head device 10 may be a picking head device of a semiconductor cutting and sorting device that cuts and sorts semiconductor wafers or semiconductor strips.

[0088] Such a semiconductor cutting and sorting device belongs to the subsequent process equipment in the manufacturing equipment of semiconductor devices, and can perform the following functions: after cutting and singulating semiconductor chips or semiconductor packages, the grades can be classified into states such as good or bad by detecting their quality status, and they are classified and loaded into the tray or box of the final container according to the divided grades. However, it should not be limited to this, and very various forms or types of picking objects or picking devices can be applied.

[0089] Therefore, according to the present invention, the pitch of the picking head 13 with a variable pitch using a flat cam 31 is made consistent with the first pitch P1 or the second pitch P2 of the picking object, so that multiple picking objects 1 can be picked up together and then transferred and classified, thereby greatly shortening the picking time and greatly improving the production efficiency when classifying by package type.

[0090] At the same time, by forming the cam groove portions such as the plurality of first-row cam groove portions 311 and the plurality of second-row cam groove portions 312 into a multi-row structure, the position accuracy and the repeatability accuracy when adjusting the pitch are greatly improved.

[0091] Figure 3 It is shown from the overall Figure 1 A front perspective view of the substrate processing apparatus 100; Figure 4 It is shown from the overall Figure 1 A rear perspective view of the substrate processing apparatus 100; Figure 5 It is depicted Figure 1 A side cross-sectional view of a cam drive actuator 32 of the substrate processing apparatus 100; Figure 6 It is depicted Figure 1 FIG. 1 is a rear view of the substrate processing apparatus 100 .

[0092] like Figure 3 As shown, the pickup head device 10 of the substrate processing device 100 according to some embodiments of the present invention may include, for example, a movable module 11, a guided device 20 (see Figure 8 ) guides the left and right movement of one side, forming an upper cam follower 111 and a lower cam follower 112; a pickup head module 12, fastened to the movable module 11, forming a vacuum pipeline; and a pickup head 13, formed in the pickup head module 12, connected to the vacuum pipeline and picking up the pickup object 1.

[0093] Therefore, when the flat cam 31 is raised and lowered by the cam driving actuator 32, the upper cam followers 111 and the lower cam followers 112 respectively inserted into the multiple first-row cam grooves 311 and the multiple second-row cam grooves 312 of the flat cam 31 move left and right, so that the movable module 11 moves left and right. When the movable module 11 moves left and right, the pickup head module 12 and the pickup head 13 also move left and right, so that the spacing P can be variably adjusted.

[0094] like Figures 4 to 6 As shown, the spacing adjustment device 30 of the substrate processing apparatus 100 according to some embodiments of the present invention may further include a cam driving actuator 32 for lifting and lowering the flat cam 31 .

[0095] like Figures 4 to 6 As shown, the cam-driven actuator 32 may, for example, include: a driving motor 321, fixed to the frame F; a power transmission device 322, transmitting the rotational power of the driving motor 321; a threaded rod 323, rotating through the power transmission device 322; and a nut member 324, connected to the flat cam 31, penetrated by the threaded rod 323 and moved up and down in a threaded manner along the guide member 325.

[0096] However, such a cam-driven actuator 32 is not limited to the combination of a threaded rod and a nut member, but can also be applied to actuators of very various shapes or types such as a linear motor, a gear combination, a pulley and a transmission belt combination, a chain and a sprocket combination, a pulley and a rope combination, etc.

[0097] like Figure 5 As shown, more specifically, the power transmission device 322 may include, for example: a driving pulley 326 connected to the rotating shaft of the driving motor 321; a driven pulley 327 connected to the rotating shaft of the threaded rod 323; and a transmission belt 328 wound around the driving pulley 326 and the driven pulley 327 and transmitting power.

[0098] However, a power transmission device 322 like this is not limited to a pulley and a transmission belt combination. In addition, it can also be applied to actuators of a very wide variety of shapes or types, such as a chain and sprocket combination, a pulley and a rope combination, or a direct connection method can be used and the power transmission device can be omitted.

[0099] Therefore, if Figures 4 to 6 As shown, when the rotating shaft of the driving motor 321 rotates forward or reversely, the driving pulley 326 of the power transmission device 322 can rotate forward or reversely, and at the same time, the driven pulley 327 wound with the transmission belt 328 can also rotate forward or reversely, and the threaded rod 323 connected to the rotating shaft of the driven pulley 327 also rotates forward or reversely, while causing the nut component 324 connected to the flat cam 31 to be raised and lowered in a threaded manner.

[0100] Figure 7 It is depicted Figure 1 A rear view of the flat cam 31 of the substrate processing device 100; Figure 8 It is depicted Figure 1 FIG. 1 is a rear view of the guide device 20 of the substrate processing apparatus 100 .

[0101] like Figure 7 and Figure 8 As shown, the substrate processing apparatus 100 according to some embodiments of the present invention may further include a guide device 20 for guiding the left and right moving path of the pickup head device 10 .

[0102] like Figure 8 As shown, the guiding device 20 may include, for example: a guiding frame GF (refer to Figure 6 ); at least one linear motion (LM) guide rail R, whose two ends are fixed to the guide frame GF, guiding the left and right moving path of the movable module 11; and at least one linear motion guide module B, fixed to the movable module 11, moving along the linear motion guide rail R.

[0103] The linear motion guide rail R may, for example, include: an upper rail R1 formed at the upper part of the movable module 11; and a lower rail R2 formed at the lower part of the movable module 11; the linear motion guide module B includes: an upper guide module B1 moving along the upper rail R1; and a lower guide module B2 moving along the lower rail R2.

[0104] The upper rail R1 may, for example, include: an upper first rail R11, which matches an upper first guide module B11 formed at the upper upper end of the movable module 11; and an upper second rail R12, which is separated from the upper first rail R11 and matches an upper second guide module B12 formed at the upper lower end of the movable module 11.

[0105] The lower rail R2 may include: a lower first rail, which matches the lower first guide module B21 formed at the lower upper end of the movable module 11; and a lower second rail R22, which is separated from the lower first rail R21 and matches the lower second guide module B22 formed at the lower lower end of the movable module 11.

[0106] However, such a guide device 20 is not limited to the drawings, and guide members of various shapes and types, such as various rails, guide rods, or guide modules, may be applicable.

[0107] like Figure 8 As shown, the multiple upper first guide modules B11 and the multiple upper second guide modules B12 are staggered in a Z shape to avoid mutual interference; the multiple lower first guide modules B21 and the multiple lower second guide modules B22 are staggered in a Z shape to avoid mutual interference.

[0108] Therefore, by utilizing the linear motion guide rails R that form two rows each at the top and bottom, for a total of four rows, and the linear motion guide modules B that are also configured in two rows each at the top and bottom, for a total of four rows, the positioning accuracy and repeatability accuracy of the left and right movement of the pickup head 13 can be greatly improved, and by utilizing the guide modules that are configured in a Z-shape and staggered with each other, the space utilization rate can be greatly improved.

[0109] Fig. 9 Yes Figure 8 A portion A of the substrate processing apparatus 100 is enlarged and shown in an enlarged view; Fig.10 It is depicted Figure 8 A perspective view of the cam follower adjustment device 33 of the substrate processing device 100; Fig.11 It is depicted Fig.10 FIG. 5 is a cross-sectional view of the cam follower adjustment device 33 of the substrate processing apparatus 100 .

[0110] like Figures 9 to 11As shown, the substrate processing device 100 according to some embodiments of the present invention may further include a cam follower adjustment device 33. In order to improve the position accuracy and repeatability accuracy, the cam follower adjustment device 33 can finely adjust the left and right positions of the upper cam follower 111 or the lower cam follower 112.

[0111] The cam follower adjustment device 33 may, for example, include: a free groove portion 331, formed in a part of the pickup head device 10, extending in the left-right direction; a cam follower variable shaft portion 332, inserted into the free groove portion 331, formed with an upper cam follower 111 or a lower cam follower 112, capable of moving in the left-right direction along the free groove portion 331; and left-right position fixing screws 333, respectively arranged in the left and right directions of the free groove portion 331, to fix the position of the cam follower variable shaft portion 332.

[0112] Here, if Fig. 9 As shown, for example, the lower cam follower 112 can be formed on the cam follower fixed shaft portion S fixed to the pickup head device 10, and the upper cam follower 111 can be formed on the cam follower variable shaft portion 332 of the cam follower adjustment device 33 formed on the pickup head device 10.

[0113] However, this is not limited to this. For example, a cam follower variable shaft portion 332 may be formed on the lower cam follower 112, and a cam follower fixed shaft portion S may be formed on the upper cam follower 111, or a cam follower variable shaft portion 332 may be formed on both the lower cam follower 112 and the upper cam follower 111, or a cam follower fixed shaft portion S may be formed on both the lower cam follower 112 and the upper cam follower 111.

[0114] Therefore, for example, by using the cam follower adjusting device 33 of the present invention, the left and right position fixing screws 333 respectively arranged in the left and right directions of the free groove portion 331 can be loosened and the position of the cam follower variable shaft portion 332 can be precisely moved in the left and right directions. Then, a pre-pressure is applied to tighten the left and right position fixing screws 333, so that the cam follower variable shaft portion 332 can be accurately positioned in the correct position.

[0115] Therefore, according to the present invention, the pitch P of the picking head 13 is made consistent with the picking object 1 by using a picking head 13 with a variable pitch adopting a flat cam 31, so that multiple picking objects 1 can be picked up together and then transferred and classified, thereby shortening the picking time and greatly improving the production efficiency, and by forming multiple rows of cam grooves 311, 312, the position accuracy and repeatability when adjusting the pitch are greatly improved, and by using the cam follower adjustment device 33, the picking head 13 can be precisely calibrated when it shakes or deviates from the position.

[0116] Fig.12 FIG. 4 is a sequence diagram illustrating a substrate processing method according to some embodiments of the present invention.

[0117] like Figures 1 to 12 As shown, the substrate processing method according to some embodiments of the present invention utilizes a substrate processing device 100, and the substrate processing device 100 may include: a plurality of pickup head devices 10, which can variably adjust the pitch P, can pick up a plurality of pickup objects 1 arranged at a certain pitch P together, and can move away from each other and open or approach each other and tighten left and right; a guide device 20, which guides the left and right movement path of the pickup head device 10; and a pitch adjustment device 30, which makes the pickup head device 10 move left and right along the guide device 20 respectively to adjust the pitch of the pickup head device 10; the pitch adjustment device 30 may include: a flat cam 31, which is formed with a plurality of first-row cam grooves 311 at the upper part, and a plurality of second-row cam grooves 312 corresponding thereto at the lower part, and is formed into a structure that can be lifted and lowered, so that when the first-row cam grooves 311 and the second-row cam grooves 312 are moved, the first-row cam grooves 311 and the second-row cam grooves 312 are moved left and right. 12 is lifted or lowered, the upper cam follower 111 formed on each pickup head device 10 moves left and right along the first row of cam grooves 311, and at the same time, the lower cam follower 112 formed on each pickup head device 10 moves left and right along the second row of cam grooves 312; and the cam driving actuator 32 causes the flat cam 31 to lift or lower; the substrate processing method may include: step (a), using the spacing measuring device 40 to measure the spacing P of the pickup object 1; step (b), applying a lifting control signal to the cam driving actuator 32, so as to lift or lower the flat cam 31 using the spacing information received from the spacing measuring device 40; step (c), while the pickup head device 10 moves left and right along the guide device 20, the spacing P of the pickup head device 10 is adjusted; and step (d), picking up and transferring multiple pickup objects 1 by multiple pickup head devices 10.

[0118] In step (c), the accuracy is improved by using the cam follower adjustment device 33 which can finely adjust the left-right position of the upper cam follower 111 or the lower cam follower 112 .

[0119] The present invention describes the embodiment shown in the figure as a reference, but this is only an example. It is understood that those skilled in the art can make various changes and obtain other equivalent embodiments. Therefore, the true technical protection scope of the present invention should be determined according to the technical ideas of the attached claims.

Claims

1. A substrate processing device, characterized in that: include: Multiple pick-up head devices, with variable adjustable spacing, can pick up multiple pick-up objects arranged at a certain spacing together, and can move left and right to move away from each other and open or move closer to each other and tighten; A guiding device, guiding the left and right moving path of the pickup head device; as well as A spacing adjustment device, which enables the pickup head device to move left and right along the guide device to adjust the spacing of the pickup head device; The spacing adjustment device comprises: A flat cam having a plurality of first-row cam grooves formed on the upper portion and a plurality of second-row cam grooves corresponding thereto formed on the lower portion, and being formed into a structure capable of being raised and lowered, so that when the first-row cam grooves and the second-row cam grooves are raised and lowered, an upper cam follower formed on each of the pickup head devices moves left and right along the first-row cam grooves, and at the same time, a lower cam follower formed on each of the pickup head devices moves left and right along the second-row cam grooves; as well as The cam drives the actuator to move the flat cam up and down.

2. The substrate processing device according to claim 1, characterized in that: The flat cam comprises: The flat cam body is formed in a flat plate shape as a whole; A plurality of the first row of cam grooves are formed on the upper portion of the flat cam body, and at least a portion of the cam grooves are formed obliquely from the upper portion to the lower portion or from the lower portion to the upper portion of the flat cam body, so that the intervals between them gradually move away from or closer to each other, so that the upper cam followers move away from and open or move closer to each other and tighten as the flat cam body moves up and down; and A plurality of second-row cam groove portions are formed at the lower portion of the flat cam body, and are at least partially inclined from the upper portion to the lower portion or from the lower portion to the upper portion of the flat cam body, so that the intervals between them gradually move away from or closer to each other, thereby causing the lower cam followers to move away from and open or move closer to and tighten as the flat cam body moves up and down.

3. The substrate processing device according to claim 2, characterized in that: The first row of cam groove portions and the second row of cam groove portions are formed in the same shape to improve repetition accuracy.

4. The substrate processing device according to claim 1, characterized in that: The spacing adjustment device further comprises a cam follower adjustment device, and in order to improve the accuracy, the cam follower adjustment device can finely adjust the left and right position of the upper cam follower or the lower cam follower.

5. The substrate processing device according to claim 4, characterized in that: The cam follower adjusting device comprises: A free groove portion is formed on a portion of the pickup head device and extends in the left and right directions; A cam follower variable shaft portion, inserted into the free groove portion, formed with the upper cam follower or the lower cam follower, and capable of moving in a left-right direction along the free groove portion; and Left and right position fixing screws are respectively arranged in the left and right directions of the free groove portion to fix the position of the variable shaft portion of the cam follower.

6. The substrate processing device according to claim 5, characterized in that: The lower cam follower is formed on a cam follower fixing shaft portion fixed to the pickup head device; The upper cam follower is formed on the cam follower variable shaft portion of the cam follower adjustment device formed on the pickup head device.

7. The substrate processing apparatus according to claim 1, wherein: The cam driven actuator comprises: A driving motor fixed to the frame; A power transmission device for transmitting the rotational power of the drive motor; a threaded rod that is rotated by the power transmission device; and The nut member is connected to the flat cam, is penetrated by the threaded rod and moves up and down along the guide member in a threaded manner.

8. The substrate processing device according to claim 7, characterized in that: The power transmission device comprises: A driving pulley connected to the rotating shaft of the driving motor; A driven pulley connected to the rotating shaft of the threaded rod; and A transmission belt is wound around the driving pulley and the driven pulley to transmit power.

9. The substrate processing apparatus according to claim 1, wherein: The pickup head device comprises: A movable module, which is guided by the guide device to move left and right on one side, and is formed with the upper cam follower and the lower cam follower; A pickup head module, fastened to the movable module, formed with a vacuum line; and A pickup head, formed in the pickup head module, is connected to the vacuum line and picks up the pickup object.

10. The substrate processing apparatus according to claim 9, wherein: The guiding device comprises: Guide framework; At least one linear motion guide rail, with both ends fixed to the guide frame, guiding the left and right movement path of the movable module; and At least one linear motion guide module is fixed to the movable module and moves along the linear motion guide rail.

11. The substrate processing apparatus according to claim 10, wherein: The linear motion guide rail comprises: an upper rail formed on an upper portion of the movable module; and A lower track formed at the lower part of the movable module; The linear motion guide module comprises: an upper guide module moving along the upper track; and The lower guide module moves along the lower track.

12. The substrate processing apparatus according to claim 11, characterized in that: The upper track comprises: an upper first rail, matched with an upper first guide module formed at an upper end of the movable module; and The upper second rail is formed to be separated from the upper first rail and matches with the upper second guide module formed at the upper lower end of the movable module.

13. The substrate processing apparatus according to claim 12, wherein: The lower track comprises: a lower first rail, matched with a lower first guide module formed at the lower upper end of the movable module; and The lower second rail is formed to be separated from the lower first rail and matches with the lower second guide module formed at the lower end of the movable module.

14. The substrate processing apparatus according to claim 13, wherein: The plurality of upper first guide modules and the plurality of upper second guide modules are staggered with each other in a Z-shape to avoid mutual interference; The plurality of lower first guiding modules and the plurality of lower second guiding modules are staggered with each other in a zigzag arrangement to avoid mutual interference.

15. The substrate processing apparatus according to claim 1, wherein: Also includes: A spacing measuring device for measuring the spacing of the picked-up objects; as well as The control unit receives the gap information from the gap measuring device and applies a lifting control signal to the cam driving actuator to lift the plate cam.

16. The substrate processing apparatus according to claim 1, wherein: The pickup object is a singulated semiconductor chip or a semiconductor package.

17. The substrate processing apparatus according to claim 1, wherein: The pickup head device is a pickup head device of a semiconductor cutting and sorting device that cuts semiconductor wafers or semiconductor strips and then sorts them.

18. A substrate processing method, characterized in that: The substrate processing method utilizes a substrate processing device, which includes: a plurality of pickup head devices, which can adjust the spacing variably, can pick up a plurality of pickup objects arranged at a certain spacing together, and can move left and right to move away from each other and open or approach each other and tighten; a guide device, which guides the left and right movement path of the pickup head device; and a spacing adjustment device, which makes the pickup head device move left and right along the guide device respectively to adjust the spacing of the pickup head device; the spacing adjustment device includes: a flat cam, which is formed with a plurality of first-row cam grooves on the upper part, and a plurality of second-row cam grooves corresponding to the cam grooves on the lower part, and is formed into a liftable structure, so that when the first-row cam grooves and the second-row cam grooves are lifted and lowered, the upper cam followers formed on each of the pickup head devices move left and right along the first-row cam grooves, and at the same time, the lower cam followers formed on each of the pickup head devices move left and right along the second-row cam grooves; and a cam drive actuator, which makes the flat cam move up and down; The substrate processing method comprises: Step (a), measuring the distance between the picked-up objects using a distance measuring device; Step (b), applying a lifting control signal to the cam driving actuator so as to lift the plate cam using the spacing information received from the spacing measuring device; Step (c), the pickup head device moves left and right along the guide device while the spacing of the pickup head device is adjusted; and Step (d), picking up and transferring a plurality of the picking objects by a plurality of the picking head devices.

19. The substrate processing method according to claim 18, characterized in that: In the step (c), The accuracy is improved by using a cam follower adjustment device capable of finely adjusting the left-right position of the upper cam follower or the lower cam follower.

20. A substrate processing device, characterized in that: include: Multiple pick-up head devices, with variable adjustable spacing, can pick up multiple pick-up objects arranged at a certain spacing together, and can move left and right to move away from each other and open or move closer to each other and tighten; A guiding device, guiding the left and right moving path of the pickup head device; as well as A spacing adjustment device, which enables the pickup head device to move left and right along the guide device to adjust the spacing of the pickup head device; The spacing adjustment device comprises: A flat cam having a plurality of first-row cam grooves formed on an upper portion and a plurality of second-row cam grooves corresponding thereto formed on a lower portion, and being formed into a structure capable of being raised and lowered, so that when the first-row cam grooves and the second-row cam grooves are raised and lowered, an upper cam follower formed on each of the pickup head devices moves left and right along the first-row cam grooves, and at the same time, a lower cam follower formed on each of the pickup head devices moves left and right along the second-row cam grooves; and The cam drives the actuator to move the flat cam up and down; The flat cam comprises: The flat cam body is formed in a flat plate shape as a whole; A plurality of the first row of cam grooves are formed on the upper portion of the flat cam body, and at least a portion of the cam grooves are formed obliquely from the upper portion to the lower portion or from the lower portion to the upper portion of the flat cam body, so that the intervals between them gradually move away from or closer to each other, so that the upper cam followers move away from and open or move closer to each other and tighten as the flat cam body moves up and down; and A plurality of the second row of cam grooves are formed at the lower portion of the flat cam body, and at least a portion of the cam grooves are formed obliquely from the upper portion to the lower portion or from the lower portion to the upper portion of the flat cam body, so that the intervals between them gradually move away from or closer to each other, so that the lower cam followers move away from and open or move closer to each other and tighten as the flat cam body moves up and down; The spacing adjustment device further comprises a cam follower adjustment device, which can finely adjust the left and right positions of the upper cam follower or the lower cam follower in order to improve the accuracy; The cam follower adjusting device comprises: A free groove portion is formed on a portion of the pickup head device and extends in the left and right directions; A cam follower variable shaft portion, inserted into the free groove portion, formed with the upper cam follower or the lower cam follower, and capable of moving in a left-right direction along the free groove portion; and Left and right position fixing screws are respectively arranged in the left and right directions of the free groove portion to fix the position of the variable shaft portion of the cam follower; The guiding device comprises: Guide framework; At least one linear motion guide rail, with both ends fixed to the guide frame, guiding the left and right movement path of the movable module; and At least one linear motion guide module, fixed to the movable module and moving along the linear motion guide rail; Also includes: a spacing measuring device for measuring the spacing of the picked-up objects; and The control unit receives the gap information from the gap measuring device and applies a lifting control signal to the cam driving actuator to lift the plate cam.

Images