Heating disc for manufacturing photoetching mask

Abstract

The invention discloses a heating plate for manufacturing a photoetching mask plate, and belongs to the technical field of heating plates, the heating plate sequentially comprises a heating substrate, a base plate, a bottom shell and a corrugated pipe from top to bottom, a heating wire is mounted in the heating substrate, a connecting piece is mounted on the bottom wall of the bottom shell, and the corrugated pipe is connected with the bottom wall of the connecting piece through a bolt; a protective shell is installed in the center of the bottom wall of the bottom shell and arranged in the corrugated pipe, an installation hole is formed in the center of the bottom shell and connected with the protective shell in a penetrating mode, a power line is arranged in the protective shell, and the upper end of the power line penetrates through the installation hole and is electrically connected with the heating wire. After the hot plate is manufactured, the hot plate is stably used in the atmosphere of 800 DEG C and the vacuum atmosphere of 1100 DEG C, the high-temperature requirement for mask plate machining is met, the side wall of the bottom shell with the first elastic piece is connected with the heating container, the bottom shell and the third elastic piece are connected with the outer wall of the heating container in a sealed mode, and sealing between the bottom shell and the heating container is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of heating plates, and particularly relates to a heating plate for manufacturing a photolithographic mask. Background Art

[0002] As a master plate used in the photolithography process of semiconductor processing, the mask carries the designed microscopic circuit layout and transfers it to semiconductor process materials such as silicon wafers through processes such as photolithographic exposure and etching. The manufacturing process of the mask includes more than a dozen processes such as glue coating, pattern conversion, pattern lithography, development, etching, stripping, optical inspection, and defect repair. In the glue coating stage, photoresist is coated on the mask substrate and the liquid photoresist is baked to a hard film state and then subsequent processing is carried out. There are two important technical points in the baking of the mask. One is that the baking temperature is high, generally requiring 350 - 500 degrees Celsius; the other is that the temperature uniformity on the mask during baking is required to be high. Only when the mask is sufficiently uniform can it be ensured that the baked hard film is of uniform thickness and no local air holes are generated. The existing heating plates for masks have the following problems to be improved:

[0003] 1. The currently used heating plates for masks are mainly in the form of aluminum plates plus metal sheathed heating wires. The heat plates made of aluminum are restricted by the melting point of aluminum itself and generally cannot provide heating conditions above 430 degrees Celsius. For some masks with high-temperature baking requirements, they cannot meet the requirements; in addition to using aluminum, there are also heating plates made of high-melting-point metal materials such as stainless steel and Hastelloy, which can be heated to the required high temperature, but the thermal conductivity of metals such as stainless steel and Hastelloy is 13 - 18 w / m·k, far lower than that of aluminum (170 - 200 w / m·k). The temperature uniformity of such high-temperature alloy heat plates is poor and it is difficult to meet the high temperature uniformity required during mask processing at high temperatures.

[0004] 2. Using metal sheathed heating wires as the heat source of the metal heat plate, once the insulation inside the metal sheathed heating wire is not well done or insulation failure occurs during long-term use, the metal plate body will conduct with the heating wire, the plate body will be charged and even electric sparking will occur, and the product cannot be processed or even the machine tool will be damaged.

[0005] 3. When the heating plate is used in a vacuum environment, when the heating plate is connected and fixed to the heating container, it is a rigid connection and the sealing performance is poor, affecting the processing effect.

[0006] 4. When the heater is leak-tested and repaired as a whole, the heater needs to be broken and removed, which is not convenient for replacement. Moreover, when the existing heater is leak-tested as a whole, additional testing equipment is required for testing, which is inconvenient to use. Summary of the Invention

[0007] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a heating plate for manufacturing a photolithography mask, which at least partially solves the problems raised in the above background art.

[0008] The technical solution adopted by the present invention is as follows: A heating plate for manufacturing a photolithography mask includes a heating substrate, a backing plate, a bottom shell and a corrugated pipe from top to bottom in sequence. The heating substrate is used to carry the mask. The heating substrate, the backing plate and the bottom shell are fixed by bolts. A heating wire is installed inside the heating substrate and used as a heat source. A connecting piece is installed on the bottom wall of the bottom shell. The corrugated pipe is connected to the bottom wall of the connecting piece by bolts. A protective shell is installed at the center of the bottom wall of the bottom shell. The protective shell is arranged inside the corrugated pipe, and the lower end of the protective shell extends out of the bottom wall of the corrugated pipe. An installation hole is provided at the center of the bottom shell, and the installation hole is connected to the protective shell in a through manner. A power cord is arranged inside the protective shell, and the upper end of the power cord passes through the installation hole and is electrically connected to the heating wire;

[0009] A placement groove is arranged inside the bottom shell. The outer side of the placement groove penetrates through the outer wall of the bottom shell. An annular slot is arranged on the bottom wall of the bottom shell. The upper end of the slot is connected to the placement groove in a through manner. The lower end of the slot penetrates through the bottom wall of the bottom shell. A driving plate and a connecting plate are installed in the placement groove. The connecting plate is fixedly connected to the upper wall and the bottom wall of the placement groove respectively. The driving plate is movably arranged in the placement groove. There are multiple groups of the driving plates and the connecting plates, and the number is the same. The driving plates and the connecting plates are placed alternately. The connecting plate is movably clamped between adjacent two groups of driving plates. An elastic member II is connected to the side of adjacent two groups of driving plates away from the installation hole. The upper end of the elastic member II is connected to the upper wall of the placement groove, and the lower end is connected to the bottom wall of the placement groove. An elastic member I is installed on the outer wall of the bottom shell. A sealed chamber is formed among the elastic member I, the elastic member II and the outer wall of the driving plate, and is set as a ventilation chamber I.

[0010] Further, the bottom wall of the side of the driving plate close to the installation hole is of an inclined structure. A ventilation hole I, a connecting cavity and a ventilation hole II are arranged inside the driving plate. The ventilation hole I is close to the installation hole, and the ventilation hole II is far from the installation hole. The ventilation hole I, the connecting cavity and the ventilation hole II are connected in sequence in a through manner. The lower ends of the ventilation hole I and the ventilation hole II both penetrate through the bottom wall of the driving plate. Multiple groups of ventilation holes III for gas flow are arranged on the bottom wall of the bottom shell. A control valve is arranged inside the ventilation hole III to facilitate controlling the gas flow. The number of the ventilation pipes III is the same as the number of the driving plates, and they are respectively arranged at the lower ends of the driving plates. The upper end of the ventilation hole III is connected to the placement groove in a through manner, and the lower end penetrates through the bottom wall of the bottom shell. When the driving plate moves and drives the ventilation hole I to move to the directly upper end of the ventilation hole III, the ventilation hole I is connected to the ventilation hole III in a through manner, and the gas enters the ventilation hole I through the ventilation hole III and enters the ventilation hole II through the connecting cavity.

[0011] Wherein, an air vent cavity II and multiple groups of air pipes for gas circulation are installed inside the bottom case. The number of the air pipes is the same as that of the air vents III. The air pipes are arranged at the lower end of the driving plate. The air vent cavity II is annularly arranged inside the outer part of the bottom wall of the bottom case. The multiple groups of air pipes are annularly and evenly arranged at equal intervals inside the bottom wall of the bottom case. One end of any group of air pipes is connected to the air vent cavity II in a penetrating manner. When the driving plate moves to drive the air vent I to move to the directly upper end of the air vent III, the air vent I is connected to the air vent III in a penetrating manner, and the air vent II is connected to the other end of the air pipe in a penetrating manner. Gas enters the air vent I through the air vent III, enters the air vent II through the connection cavity, enters the air pipe from the air vent II, and then enters the air vent cavity II.

[0012] Preferably, an elastic member III is installed on the bottom wall of the bottom case. The elastic member III is arranged at the upper end of the air vent cavity II and is connected to the air vent cavity II in a penetrating manner. The connection between the elastic member III and the air vent cavity II is a sealed structure.

[0013] As a preference of the present invention, a cooling cavity for cooling is arranged inside the connecting plate. One end of the cooling cavity is connected to the placing groove in a penetrating manner and is close to the inserting slot for placing. The other end of the cooling cavity is arranged inside the upper wall of the bottom case and is connected to the installation hole in a penetrating manner. A control valve is arranged inside the cooling cavity to facilitate the control of gas circulation.

[0014] Wherein, a fixing plate is installed on the bottom wall of the corrugated pipe. The protective shell penetrates through the fixing plate. A hydraulic rod is installed on the upper wall of the fixing plate. A lifting plate is installed at the upper end of the hydraulic rod. The lifting plate is movably clamped between the inner wall of the corrugated pipe and the outer wall of the protective shell; the operation of the hydraulic rod can push the lifting plate to move up and down.

[0015] As a preference of the present invention, an installation plate I is arranged at the upper end of the inner side wall of the corrugated pipe, and an installation plate II is arranged at the lower end of the inner side wall of the connecting member. Both the installation plate I and the installation plate II are annular structures, and the inner diameter of the installation plate II is smaller than that of the installation plate I. An extrusion bladder I is installed on the upper wall of the installation plate I and the lifting plate, and an extrusion bladder II is installed on the upper wall of the installation plate II and the lifting plate. The extrusion bladder I is arranged between the extrusion bladder II and the inner side wall of the corrugated pipe. The extrusion bladder I and the extrusion bladder II are connected in a sealed manner. The connection position between the connecting member and the corrugated pipe is arranged between the extrusion bladder I and the extrusion bladder II.

[0016] Among them, an extrusion bladder three is installed between the upper wall of the lifting plate and the bottom wall of the bottom shell. The extrusion bladder one, the extrusion bladder two and the extrusion bladder three are all annular structures and are concentrically arranged. The extrusion bladder three is arranged between the extrusion bladder two and the protective shell. The extrusion bladder three is arranged on the bottom shell between the slot and the mounting hole. A sealed chamber is formed between the inner wall of the connecting piece and the extrusion bladder three. A pushing plate is also installed on the upper wall of the lifting plate. An extrusion plate is arranged on the upper wall of the pushing plate. The extrusion plate is arranged directly below the slot. The side wall of the extrusion plate is an arc structure, and a plurality of groups of ball bearings for reducing friction are movably installed. When the extrusion plate is lifted through the slot and arranged at the inclined surface of the driving plate, the arc surface of the extrusion plate with ball bearings contacts the inclined surface of the driving plate. As the extrusion plate continues to lift, the driving plate moves away from the mounting hole.

[0017] Preferably, a pressure sensor one is arranged on the bottom wall of the mounting plate two. The pressure sensor one is arranged between the extrusion bladder one and the extrusion bladder two and is used to detect the sealing condition of the connecting piece and the corrugated pipe. A pressure sensor two is arranged on the bottom wall of the bottom shell. The pressure sensor two is arranged between the extrusion bladder three, the extrusion bladder two and the connecting piece and is used to detect the sealing performance of the heating plate. A through hole is arranged on the upper wall of the mounting plate two. The upper end of the through hole is connected in a through manner with the sealed chamber between the extrusion bladder three and the extrusion bladder two. The lower end of the through hole is connected in a through manner with the sealed chamber between the extrusion bladder one and the extrusion bladder two. A control valve is arranged in the through hole to facilitate the control of the gas flow.

[0018] Among them, the heating substrate is an aluminum nitride ceramic substrate, the covering material of the heating plate is also an aluminum nitride ceramic substrate, the heating wire material is nickel-chromium alloy, and the bottom shell material is 310S stainless steel.

[0019] After adopting the above structure, the beneficial effects of the present invention are as follows:

[0020] (1) This heating plate uses high-purity aluminum nitride ceramics. The firing temperature of the aluminum nitride ceramic substrate reaches 1800 degrees Celsius. After being made into a hot plate, it can be stably used in an 800-degree Celsius atmosphere and a 1100-degree Celsius vacuum atmosphere, and can meet the high-temperature requirements of mask plate processing.

[0021] (2) The high-purity aluminum nitride ceramics used in this heating plate have good insulation performance, high reliability, strong stability, a small thermal expansion coefficient, a small cumulative thermal deformation amount during long-term high-temperature use, a long product life, and a thermal conductivity as high as 170 w / m·k, which is similar to the thermal conductivity of aluminum. The material with a high thermal conductivity makes the heating plate surface have better temperature uniformity.

[0022] (3) When the heating plate is placed in the heating container, the heating substrate is arranged inside the heating container. The side wall of the bottom shell with the first elastic member is connected to the heating container, and the bottom shell and the third elastic member are hermetically connected to the outer wall of the heating container to achieve fixed installation, increasing the seal between the bottom shell and the heating container.

[0023] (4) When it is necessary to detect the airtightness of the heating plate before use, the first pressure sensor is arranged between the first extrusion bladder and the second extrusion bladder to detect the sealing condition of the connecting member and the corrugated pipe. The second pressure sensor is arranged between the third extrusion bladder, the second extrusion bladder and the connecting member to detect the airtightness of the heating plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation to the present invention.

[0025] Figure 1 Structural schematic diagram of a heating plate for manufacturing a photolithography mask plate proposed by the present invention;

[0026] Figure 2 Cross-sectional view of a heating plate for manufacturing a photolithography mask plate proposed by the present invention from the first perspective;

[0027] Figure 3 For Figure 2 Local enlarged view of part A of

[0028] Figure 4 For Figure 2 Local enlarged view of part B of

[0029] Figure 5 Cross-sectional view of a heating plate for manufacturing a photolithography mask plate proposed by the present invention from the second perspective;

[0030] Figure 6 For Figure 5 Local enlarged view of part C of

[0031] Figure 7 For Figure 5 Local enlarged view of part D of

[0032] Figure 8 Cross-sectional view of a heating plate for manufacturing a photolithography mask plate proposed by the present invention from the third perspective;

[0033] Figure 9 For Figure 8 Local enlarged view of part E of

[0034] Figure 10 For Figure 8 Local enlarged view of part F of

[0035] Figure 11This is a cross-sectional view of the bottom case of a heating plate used in the manufacture of a lithography mask according to the present invention.

[0036] In the drawings: 1, heating substrate; 2, backing plate; 3, bottom case; 4, bellows; 5, heating wire; 6, connecting piece; 7, protective shell; 8, mounting hole; 9, power cord; 10, placement groove; 11, slot; 12, driving plate; 13, connecting plate; 14, second elastic member; 15, first elastic member; 16, first ventilation hole; 17, connecting cavity; 18, second ventilation hole; 19, second ventilation cavity; 20, ventilation pipe; 21, third elastic member; 22, cooling cavity; 23, fixing plate; 24, hydraulic rod; 25, lifting plate; 26, first mounting plate; 27, second mounting plate; 28, first extrusion bladder; 29, second extrusion bladder; 30, third extrusion bladder; 31, pushing plate; 32, extrusion plate; 33, first pressure sensor; 34, second pressure sensor; 35, through hole; 36, first ventilation cavity; 37, third ventilation hole. Detailed implementation manners

[0037] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0038] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0039] As Figures 1-11As shown in the figure, a heating plate for manufacturing a photolithography mask plate includes a heating substrate 1, a backing plate 2, a bottom shell 3, and a bellows 4 from top to bottom in sequence. The heating substrate 1 is used to carry the mask plate. The heating substrate 1, the backing plate 2, and the bottom shell 3 are fixed by bolts. A heating wire 5 is installed inside the heating substrate 1 and used as a heat source. A connecting piece 6 is installed on the bottom wall of the bottom shell 3. The bellows 4 is connected to the bottom wall of the connecting piece 6 by bolts. A protective shell 7 is installed at the center of the bottom wall of the bottom shell 3. The protective shell 7 is arranged inside the bellows 4, and the lower end of the protective shell 7 extends out of the bottom wall of the bellows 4. An installation hole 8 is provided at the center of the bottom shell 3. The installation hole 8 is connected to the protective shell 7 in a through manner. A power cord 9 is arranged inside the protective shell 7. The upper end of the power cord 9 passes through the installation hole 8 and is electrically connected to the heating wire 5;

[0040] A placement groove 10 is arranged inside the bottom shell 3. The outer side of the placement groove 10 penetrates through the outer wall of the bottom shell 3. An annular slot 11 is arranged on the bottom wall of the bottom shell 3. The upper end of the slot 11 is connected to the placement groove 10 in a through manner. The lower end of the slot 11 penetrates through the bottom wall of the bottom shell 3. A driving plate 12 and a connecting plate 13 are installed inside the placement groove 10. The connecting plate 13 is fixedly connected to the upper wall and the bottom wall of the placement groove 10 respectively. The driving plate 12 is movably arranged inside the placement groove 10. There are multiple groups of the driving plate 12 and the connecting plate 13, and the number is the same. The driving plate 12 and the connecting plate 13 are placed alternately. The connecting plate 13 is movably clamped between two adjacent driving plates 12. An elastic member II 14 is connected to the side of two adjacent driving plates 12 away from the installation hole 8. The upper end of the elastic member II 14 is connected to the upper wall of the placement groove 10, and the lower end is connected to the bottom wall of the placement groove 10. An elastic member I 15 is installed on the outer wall of the bottom shell 3. An airtight chamber is formed among the elastic member I 15, the elastic member II 14, and the outer wall of the driving plate 12, which is set as an air vent chamber I 36.

[0041] One side bottom wall of the driving board 12 close to the mounting hole 8 is of an inclined structure. An air vent one 16, a connection cavity 17 and an air vent two 18 are arranged in the driving board 12. The air vent one 16 is arranged close to the mounting hole 8, and the air vent two 18 is arranged away from the mounting hole 8. The air vent one 16, the connection cavity 17 and the air vent two 18 are sequentially and communicatively connected. The lower ends of the air vent one 16 and the air vent two 18 both penetrate through the bottom wall of the driving board 12. The bottom wall of the bottom shell 3 is provided with multiple groups of air vents three 37 for gas circulation. A control valve is arranged in the air vent three 37 to facilitate the control of gas circulation. The number of the third vent pipes 20 is the same as that of the driving boards 12 and are respectively arranged at the lower ends of the driving boards 12. The upper ends of the air vents three 37 are communicatively connected with the placing groove 10, and the lower ends penetrate through the bottom wall of the bottom shell 3. When the driving board 12 moves to drive the air vent one 16 to move to the directly upper end of the air vent three 37, the air vent one 16 is communicatively connected with the air vent three 37. Gas enters the air vent one 16 through the air vent three 37 and enters the air vent two 18 through the connection cavity 17.

[0042] An air vent cavity two 19 and multiple groups of vent pipes 20 for gas circulation are installed in the bottom shell 3. The number of the vent pipes 20 is the same as that of the air vents three 37. The vent pipes 20 are arranged at the lower ends of the driving boards 12. The air vent cavity two 19 is arranged in a ring shape inside the outer part of the bottom wall of the bottom shell 3. Multiple groups of the vent pipes 20 are arranged in a ring shape at equal intervals and evenly in the bottom wall of the bottom shell 3. One end of any group of the vent pipes 20 is communicatively connected with the air vent cavity two 19. When the driving board 12 moves to drive the air vent one 16 to move to the directly upper end of the air vent three 37, the air vent one 16 is communicatively connected with the air vent three 37, and the air vent two 18 is communicatively connected with the other end of the vent pipe 20. Gas enters the air vent one 16 through the air vent three 37, enters the air vent two 18 through the connection cavity 17, enters the vent pipe 20 from the air vent two 18, and then enters the air vent cavity two 19.

[0043] In this embodiment, an elastic member III 21 is installed on the bottom wall of the bottom case 3. The elastic member III 21 is provided at the upper end of the second ventilation cavity 19 and is connected to the second ventilation cavity 19 in a through manner. A sealing structure is formed between the elastic member III 21 and the second ventilation cavity 19. When the heating plate is placed in the heating container, the heating substrate 1 is arranged in the heating container. The side wall of the bottom case 3 with the elastic member I 15 is connected to the heating container to achieve fixed installation. To increase the seal between the bottom case 3 and the heating container, when the driving plate 12 moves away from the mounting hole 8, the elastic member II 14 can be extruded. The elastic member II 14 deforms in the direction close to the elastic member I 15, the pressure in the first ventilation cavity 36 increases, and the elastic member I 15 is extruded, and the elastic member I 15 protrudes outwards, increasing the seal between the side wall of the bottom case 3 and the heating container. At the same time, the movement of the driving plate 12 drives the first ventilation hole 16 to move to the directly upper end of the third ventilation hole 37. The first ventilation hole 16 is connected to the third ventilation hole 37 in a through manner. The second ventilation hole 18 is connected to the other end of the ventilation pipe 20 in a through manner. Gas enters the first ventilation hole 16 through the third ventilation hole 37, enters the second ventilation hole 18 through the connection cavity 17, enters the ventilation pipe 20 from the second ventilation hole 18, and then enters the second ventilation cavity 19, and the elastic member III 21 bulges, realizing the sealed connection between the bottom case 3 and the outer wall of the heating container.

[0044] A cooling cavity 22 for cooling is arranged in the connecting plate 13. One end of the cooling cavity 22 is connected to the placing groove 10 in a through manner and is arranged close to the inserting slot 11. The other end of the cooling cavity 22 is arranged in the upper wall of the bottom case 3 and is connected to the mounting hole 8 in a through manner. A control valve is arranged in the cooling cavity 22 to facilitate the control of gas flow.

[0045] A fixing plate 23 is installed on the bottom wall of the corrugated pipe 4. The protective shell 7 penetrates through the fixing plate 23. A hydraulic rod 24 is installed on the upper wall of the fixing plate 23. A lifting plate 25 is installed at the upper end of the hydraulic rod 24. The lifting plate 25 is movably clamped between the inner wall of the corrugated pipe 4 and the outer wall of the protective shell 7. The operation of the hydraulic rod 24 can push the lifting plate 25 to move up and down.

[0046] An installation plate I 26 is arranged at the upper end of the inner side wall of the corrugated pipe 4. An installation plate II 27 is arranged at the lower end of the inner side wall of the connecting member 6. Both the installation plate I 26 and the installation plate II 27 are annular structures, and the inner diameter of the installation plate II 27 is smaller than the inner diameter of the installation plate I 26. An extrusion bladder I 28 is installed on the upper wall of the installation plate I 26 and the lifting plate 25. An extrusion bladder II 29 is installed on the upper wall of the installation plate II 27 and the lifting plate 25. The extrusion bladder I 28 is arranged between the extrusion bladder II 29 and the inner side wall of the corrugated pipe 4. A sealed connection is formed between the extrusion bladder I 28 and the extrusion bladder II 29. The connection position between the connecting member 6 and the corrugated pipe 4 is arranged between the extrusion bladder I 28 and the extrusion bladder II 29.

[0047] An extrusion bladder three 30 is installed between the upper wall of the lifting plate 25 and the bottom wall of the bottom shell 3. The extrusion bladder one 28, the extrusion bladder two 29, and the extrusion bladder three 30 are all annular structures and are concentrically placed. The extrusion bladder three 30 is arranged between the extrusion bladder two 29 and the protective shell 7. The extrusion bladder three 30 is arranged on the bottom shell 3 between the slot 11 and the mounting hole 8. A sealed chamber is formed between the inner wall of the connecting piece 6 and the extrusion bladder three 30. A push plate 31 is also installed on the upper wall of the lifting plate 25. An extrusion plate 32 is provided on the upper wall of the push plate 31. The extrusion plate 32 is arranged directly below the slot 11. The side wall of the extrusion plate 32 is an arc structure, and multiple groups of ball bearings for reducing friction are movably installed. When the extrusion plate 32 is lifted through the slot 11 and is arranged at the inclined surface of the driving plate 12, the arc surface of the extrusion plate 32 with ball bearings contacts the inclined surface of the driving plate 12. As the extrusion plate 32 continues to rise, the driving plate 12 moves away from the mounting hole 8;

[0048] It should be noted that when the hydraulic rod 24 works, it can push the lifting plate 25 to rise. The lifting plate 25 drives the extrusion bladder one 28, the extrusion bladder two 29, and the extrusion bladder three 30 to compress. The pressure in the sealed chamber between the extrusion bladder one 28 and the extrusion bladder two 29 increases, and the pressure in the sealed chamber between the extrusion bladder three 30, the extrusion bladder two 29, and the connecting piece 6 increases; when it is necessary to drive the driving plate 12 to achieve sealing, the lifting plate 25 drives the extrusion plate 32 to insert into the slot 11 and drives the driving plate 12. At this time, the control valve in the vent hole three 37 is opened, and the control valve in the cooling chamber 22 is closed. When it is necessary to cool down the heating substrate 1, the extrusion plate 32 does not insert into the slot 11 when it rises. At this time, the control valve in the vent hole three 37 is closed, and the control valve in the cooling chamber 22 is opened. The gas between the extrusion bladder three 30, the extrusion bladder two 29, and the connecting piece 6 enters the placement groove 10 through the slot 11, and enters the cooling chamber 22 through the placement groove 10 and is discharged from the mounting hole 8. When the lifting plate 25 moves down, the gas in the mounting hole 8 enters the sealed chamber between the extrusion bladder three 30, the extrusion bladder two 29, and the connecting piece 6 through the cooling chamber 22.

[0049] A pressure sensor one 33 is provided on the bottom wall of the mounting plate two 27. The pressure sensor one 33 is arranged between the extrusion bladder one 28 and the extrusion bladder two 29 and is used to detect the sealing condition of the connecting piece 6 and the corrugated pipe 4. A pressure sensor two 34 is provided on the bottom wall of the bottom shell 3. The pressure sensor two 34 is arranged between the extrusion bladder three 30, the extrusion bladder two 29, and the connecting piece 6 and is used to detect the sealing performance of the heating plate; a through hole 35 is provided on the upper wall of the mounting plate two 27. The upper end of the through hole 35 is connected to the sealed chamber between the extrusion bladder three 30 and the extrusion bladder two 29 in a through manner, and the lower end of the through hole 35 is connected to the sealed chamber between the extrusion bladder one 28 and the extrusion bladder two 29 in a through manner. A control valve is arranged in the through hole 35 to facilitate the control of the gas flow.

[0050] The heating substrate 1 is an aluminum nitride ceramic substrate, the cover plate material of the heating plate is also an aluminum nitride ceramic substrate, the material of the heating wire 5 is nickel-chromium alloy, and the material of the bottom case 3 is 310S stainless steel.

[0051] The specific use is as follows:

[0052] When the heating plate is placed in the heating container, the heating substrate 1 is arranged inside the heating container, and the side wall of the bottom case 3 with the first elastic member 15 is connected to the heating container to achieve fixed installation. In order to increase the seal between the bottom case 3 and the heating container, the hydraulic rod 24 works to push the lifting plate 25 upward. The control valve in the cooling cavity 22 is opened, and after discharging a part of the gas between the second extrusion bladder 29, the third extrusion bladder 30 and the connecting member 6, the control valve in the cooling cavity 22 is opened, and the control valve in the third vent hole 37 is opened. The lifting plate 25 continues to move upward, driving the extrusion plate 32 to insert into the slot 11 and driving the driving plate 12. When the extrusion plate 32 rises through the slot 11 and is located at the inclined surface of the driving plate 12, the arc surface of the extrusion plate 32 with the ball contacts the inclined surface of the driving plate 12. As the extrusion plate 32 continues to rise, the driving plate 12 moves away from the mounting hole 8, and can squeeze the second elastic member 14. The second elastic member 14 deforms in the direction close to the first elastic member 15, the pressure in the first ventilation cavity 36 increases, squeezing the first elastic member 15, and the first elastic member 15 protrudes outward, increasing the seal between the side wall of the bottom case 3 and the heating container; at the same time, the movement of the driving plate 12 drives the first vent hole 16 to move to the directly upper end of the third vent hole 37. The first vent hole 16 is connected to the third vent hole 37 in a through manner, the second vent hole 18 is connected to the other end of the ventilation pipe 20 in a through manner. The gas enters the first vent hole 16 through the third vent hole 37, enters the second vent hole 18 through the connecting cavity 17, enters the ventilation pipe 20 from the second vent hole 18, and then enters the second ventilation cavity 19, and the third elastic member 21 bulges, realizing the sealed connection between the bottom case 3 and the outer wall of the heating container, and then the hydraulic rod 24 stops working.

[0053] The heating substrate 1 works to heat-treat the mask plate.

[0054] After the processing is completed and the heating substrate 1 needs to be cooled down, the hydraulic rod 24 drives the lifting plate 25 to descend to the initial position. At this time, the control valves in the third vent hole 37 and the cooling cavity 22 are both opened, and the control valve in the through hole 35 is also opened. The extrusion plate 32 moves downward to disengage from the slot 11. Then the hydraulic rod 24 moves upward again. When the extrusion plate 32 is lifted, it does not insert into the slot 11. The gas between the third extrusion bladder 30, the second extrusion bladder 29 and the connecting member 6 enters the placement groove 10 through the slot 11, and enters the cooling cavity 22 through the placement groove 10 and is discharged from the mounting hole 8. When the lifting plate 25 moves downward, the gas in the mounting hole 8 enters the sealed chamber between the third extrusion bladder 30, the second extrusion bladder 29 and the connecting member 6 through the cooling cavity 22, achieving the technical effect of cooling.

[0055] When it is necessary to detect the airtightness of the heating plate before use, the control valve in the third vent hole 37 is opened, and the control valves in the through hole 35 and the cooling cavity 22 are both closed. The hydraulic rod 24 can work to push the lifting plate 25 upward. The first pressure sensor 33 is arranged between the first extrusion bladder 28 and the second extrusion bladder 29 to detect the sealing condition of the connecting member 6 and the corrugated pipe 4. The second pressure sensor 34 is arranged between the third extrusion bladder 30, the second extrusion bladder 29 and the connecting member 6 to detect the airtightness of the heating plate.

[0056] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Generally speaking, if those of ordinary skill in the art are inspired by it and, without departing from the gist of the present invention, design similar structural modes and embodiments to this technical solution without creative efforts, they should all fall within the protection scope of the present invention.

Claims

1. A heating plate for manufacturing a photolithography mask, characterized in that: From top to bottom, it includes a heating substrate, a pad, a bottom shell and a bellows, a heating wire is installed inside the heating substrate, a connecting piece is installed on the bottom wall of the bottom shell, the bellows is connected to the bottom wall of the connecting piece by bolts, a protective shell is installed at the center of the bottom wall of the bottom shell, the protective shell is arranged in the bellows, and the lower end of the protective shell extends out of the bottom wall of the bellows, a mounting hole is arranged at the center of the bottom shell, the mounting hole is connected with the protective shell, a power line is arranged in the protective shell, and the upper end of the power line passes through the mounting hole and is electrically connected to the heating wire; The bottom shell is provided with a placement groove, the outer side of the placement groove passes through the outer wall of the bottom shell, the bottom wall of the bottom shell is provided with a slot of an annular structure, the upper end of the slot is connected with the placement groove, and the lower end of the slot passes through the bottom wall of the bottom shell, and a driving plate and a connecting plate are installed in the placement groove, and the connecting plate is respectively fixedly connected to the upper wall and the bottom wall of the placement groove. The driving plate is movably arranged in the placement groove, and the driving plate and the connecting plate are provided with multiple groups, and the number is the same. The driving plate and the connecting plate are staggered, and the connecting plate is movably connected between two adjacent groups of driving plates. The two adjacent groups of driving plates are connected with elastic parts 2 on the side away from the mounting hole, the upper end of the elastic part 2 is connected with the upper wall of the placement groove, and the lower end is connected with the bottom wall of the placement groove, and the outer wall of the bottom shell is provided with elastic parts 1, and the sealing chamber between the elastic parts 1, the elastic parts 2 and the outer wall of the driving plate is set as ventilation chamber 1.

2. A heating plate for manufacturing a photolithography mask according to claim 1, characterized in that: The bottom wall of one side of the driving plate close to the mounting hole is an inclined structure, and a vent hole 1, a connecting cavity and a vent hole 2 are provided in the driving plate, and the vent hole 1, the connecting cavity and the vent hole 2 are connected in sequence, and the lower ends of the vent hole 1 and the vent hole 2 are both arranged through the bottom wall of the driving plate, and the bottom wall of the bottom shell is provided with a plurality of groups of vent holes 3 for gas circulation, and a control valve is provided in the vent hole 3, and the number of the vent pipes 3 is the same as the number of the driving plates, and they are respectively arranged at the lower end of the driving plates, and the upper end of the vent hole 3 is connected with the placement groove, and the lower end is arranged through the bottom wall of the bottom shell.

3. A heating plate for manufacturing a photolithography mask according to claim 2, characterized in that: A second ventilation cavity and multiple groups of ventilation pipes for gas circulation are installed in the bottom shell, the number of the ventilation pipes is the same as the number of the ventilation holes three, the ventilation pipes are arranged at the lower end of the driving plate, the second ventilation cavity is arranged in a ring shape inside the outer side of the bottom wall of the bottom shell, and multiple groups of ventilation pipes are evenly arranged in a ring shape inside the bottom wall of the bottom shell at equal intervals, one end of any group of ventilation pipes is through-connected with the second ventilation cavity, when the driving plate moves to drive the first ventilation hole to move to the upper end of the third ventilation hole, the first ventilation hole is through-connected with the third ventilation hole, and the second ventilation hole is through-connected with the other end of the ventilation pipe.

4. A heating plate for manufacturing a photolithography mask according to claim 3, characterized in that: The bottom wall of the bottom shell is installed with an elastic member 3, which is arranged at the upper end of the ventilation cavity 2 and is connected with the ventilation cavity 2 through the elastic member 3 and a sealing structure is formed between the elastic member 3 and the ventilation cavity 2.

5. The heating plate for manufacturing a photolithography mask according to claim 4, characterized in that: A cooling cavity for cooling is provided in the connecting plate, one end of the cooling cavity is connected with the placement groove and placed close to the slot, the other end of the cooling cavity is arranged in the upper wall of the bottom shell and connected with the mounting hole, and a control valve is provided in the cooling cavity.

6. A heating plate for manufacturing a photolithography mask according to claim 5, characterized in that: A fixing plate is installed on the bottom wall of the bellows, the protective shell passes through the fixing plate, a hydraulic rod is installed on the upper wall of the fixing plate, a lifting plate is installed on the upper end of the hydraulic rod, and the lifting plate is movably clamped between the inner wall of the bellows and the outer wall of the protective shell.

7. A heating plate for manufacturing a photolithography mask according to claim 6, characterized in that: A mounting plate 1 is provided at the upper end of the inner side wall of the bellows, and a mounting plate 2 is provided at the lower end of the inner side wall of the connecting piece. Both the mounting plate 1 and the mounting plate 2 are annular structures, and the inner diameter of the mounting plate 2 is smaller than the inner diameter of the mounting plate 1. An extrusion bag 1 is installed on the mounting plate 1 and the upper wall of the lifting plate, and an extrusion bag 2 is installed on the mounting plate 2 and the upper wall of the lifting plate. The extrusion bag 1 is arranged between the extrusion bag 2 and the inner side wall of the bellows, and the extrusion bag 1 and the extrusion bag 2 are sealed. The connection position between the connecting piece and the bellows is arranged between the extrusion bag 1 and the extrusion bag 2.

8. The heating plate for manufacturing a photolithography mask according to claim 7, characterized in that: An extrusion capsule three is installed between the upper wall of the lifting plate and the bottom wall of the bottom shell. Extrusion capsule one, extrusion capsule two and extrusion capsule three are all annular structures and are placed concentrically. Extrusion capsule three is arranged between extrusion capsule two and the protective shell. Extrusion capsule three is arranged on the bottom shell between the slot and the mounting hole. A sealed chamber is formed between the inner wall of the connecting piece and extrusion capsule three. A pushing plate is also installed on the upper wall of the lifting plate. An extrusion plate is provided on the upper wall of the pushing plate. The extrusion plate is arranged at the lower end of the slot. The side wall of the extrusion plate is an arc structure, and a plurality of groups of balls for reducing friction are movably installed.

9. The heating plate for manufacturing a photolithography mask according to claim 8, characterized in that: A pressure sensor 1 is provided on the bottom wall of the second mounting plate, and the pressure sensor 1 is provided between the first extrusion bag and the second extrusion bag. A pressure sensor 2 is provided on the bottom wall of the bottom shell, and the pressure sensor 2 is provided between the third extrusion bag, the second extrusion bag and the connecting piece. A through hole is provided on the upper wall of the second mounting plate, and the upper end of the through hole is connected to the sealed chamber between the third extrusion bag and the second extrusion bag, and the lower end of the through hole is connected to the sealed chamber between the first extrusion bag and the second extrusion bag, and a control valve is provided in the through hole.

10. The heating plate for manufacturing a photolithography mask according to claim 9, characterized in that: The heating substrate is an aluminum nitride ceramic substrate, the heating wire material is a nickel-chromium alloy, and the bottom shell material is 310S stainless steel.

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