A nitrogen continuous purification equipment

Through the monitoring and detection mechanism of the nitrogen continuous purification equipment, the problem of moisture in nitrogen affecting the purification effect is solved, and efficient and uninterrupted supply of high-purity nitrogen is achieved to ensure process quality.

CN120114965BActive Publication Date: 2025-08-08SHANGHAI HANKE TECH CO LTD
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Patent Information

Application Number
CN202510607341.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-05-13
Publication Date
2025-08-08
Estimated Expiration
2045-05-13

AI Technical Summary

Technical Problem

The prior art cannot effectively eliminate the impact of moisture in nitrogen on purification effect, resulting in unqualified process quality.

Method used

The nitrogen continuous purification equipment is used to monitor the fixing mechanism and detect the fixing mechanism, and use metal sheets to cool solidification moisture, pressure sensor weight measurement and thermistor to detect the nitrogen purity to ensure purification effect, and to enable a spare tank when the purification tank is clogged to ensure uninterrupted gas supply.

Benefits of technology

It effectively avoids the impact of moisture on purification effect, ensures that the nitrogen purity is qualified, avoids unqualified process quality, realizes uninterrupted supply of high-purity nitrogen, and improves the working time and production efficiency of process equipment.

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Abstract

The present invention relates to the technical field of nitrogen purification, and more particularly to a continuous nitrogen purification device, comprising: a controller body, a monitoring and fixing mechanism fixed to the controller body, a detection and fixing mechanism fixed to the monitoring and fixing mechanism, and two purification tanks disposed between the monitoring and fixing mechanisms. The present invention cools a metal sheet therein, allowing water molecules in the nitrogen to solidify and adsorb on its surface. The metal sheet is then weighed using a pressure sensor, thereby converting the water molecule content in the nitrogen into a weight gain of the metal sheet, thereby detecting the water content of the nitrogen entering the device. If a high water content is detected, the nitrogen is dried, effectively preventing the influence of moisture on the purification effect of the purification tank. Furthermore, two thermistors are used to detect whether the nitrogen purified by the purification tank is qualified, effectively preventing the occurrence of process quality failures due to substandard nitrogen purity.
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Description

Technical Field

[0001] The present invention relates to the technical field of nitrogen purification, and in particular to a nitrogen continuous purification device. Background Art

[0002] In modern industrial production and scientific research activities, nitrogen, as an important industrial gas, has a very wide range of applications. In the chemical, metallurgical, and electronic industries, the purity of nitrogen plays a decisive role in the quality of the final product. In the solar cell manufacturing process, atomic layer deposition is required to manufacture thin films. To ensure process quality, higher-purity nitrogen is required for purge work. In order to obtain higher-purity nitrogen, it needs to be purified. For example, a nitrogen purification device disclosed in publication number CN109179346B can purify nitrogen.

[0003] Some process equipment that requires high-purity nitrogen mostly purifies the nitrogen in high-purity nitrogen cylinders to meet the purity requirements of the process equipment. However, due to excessive moisture in the raw gas, improper cylinder handling, or even long-term exposure to high humidity during transportation and storage, even if the cylinder itself is well sealed, external moisture may slowly penetrate into the cylinder through the cylinder wall due to the certain air permeability of the cylinder wall, increasing the moisture content in the nitrogen. This moisture will affect the purification effect of the device.

[0004] In actual scenarios, devices that process nitrogen through room-temperature purification technology do not have a drying process. During the adsorption process, moisture will be preferentially adsorbed by the adsorbent, reducing the adsorbent's adsorption capacity for other impurities, thereby affecting the purification effect of the device, making the nitrogen unable to meet process requirements, and unable to detect moisture in the nitrogen before purification, resulting in unqualified process quality problems. Summary of the Invention

[0005] In view of the above-mentioned shortcomings of the prior art, the present invention provides a continuous nitrogen purification device, which can effectively solve the problem that the prior art cannot eliminate moisture and thus affects the nitrogen purification effect.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] The present invention provides a nitrogen continuous purification device, comprising: a controller body, a monitoring fixing mechanism fixed on the controller body, a detection fixing mechanism fixed on the monitoring fixing mechanism, and two purification tanks arranged between the monitoring fixing mechanism and the detection fixing mechanism;

[0008] The monitoring fixing mechanism includes a fixed shell 1 fixed on the controller body, a partition 1 fixed in the fixed shell 1, two airbag rings are embedded in the upper end of the partition 1, and partition 2 is fixed at both ends of the fixed shell 1, and the two partitions 2 separate the fixed shell 1 into two sealed cavities, and a sealing component fixed to the upper end of the fixed shell 1 is provided above the airbag ring, a sealing shell is fixed in the middle of the upper end of the fixed shell 1, and a plurality of heating copper plates are fixed in an array in the sealing shell, and a Z-shaped tube is fixed at both ends of the sealing shell and is connected to the sealed cavity, and two rectangular grooves are symmetrically provided at the upper end of the sealing shell, and a baffle is slidably connected in the rectangular groove, and an arc-shaped hole is provided on one end of the baffle close to the Z-shaped tube, and the sealing shell and the Z-shaped tube need to be connected by an arc-shaped hole, and a monitoring component is fixed in the middle of the lower end of the fixed shell 1.

[0009] Preferably, the two sealed cavities are respectively connected to two purification tanks.

[0010] Preferably, the sealing assembly includes a sealing tube fixed to an upper end of a fixed shell, an electromagnetic ring is fixed in the sealing tube, a permanent magnet ring movably connected to the sealing tube is provided above the electromagnetic ring, the electromagnetic ring and the permanent magnet ring magnetically repel each other, a sealing ball is provided below the electromagnetic ring, the sealing ball is fixedly connected to the permanent magnet ring, the upper end of the permanent magnet ring is fixedly connected to a sealing cover tube, the upper end of the sealing cover tube is fixedly connected to the baffle, a plurality of open grooves are arranged in an array on the outer surface of the sealing cover tube, the outer surface of the sealing tube is connected to a connecting ring, an air outlet is provided on the outer surface of the sealing tube, and the air outlet is connected to the sealing cavity located on the same side.

[0011] Preferably, the connecting ring is communicated with the sealing housing, and a one-way valve is provided at the connection between the connecting ring and the sealing housing.

[0012] Preferably, the monitoring component includes a monitoring tube fixed to the lower end of the fixed shell, a wind pressure measuring device is fixed in the monitoring tube, a semiconductor cooling fin is embedded in the monitoring tube, a pressure sensor fixed in the monitoring tube is symmetrically provided above the wind pressure measuring device, a metal sheet is slidably connected in the monitoring tube, and the metal sheet is in contact with the semiconductor cooling fin.

[0013] Preferably, the wind pressure measuring device, the pressure sensor and the controller body are connected by electrical signals to form a detection circuit, and the electromagnetic ring, the heating copper sheet and the controller body are connected by electrical signals to form an operation circuit.

[0014] Preferably, the detection fixing mechanism includes an upper fixing frame fixed to the upper end of the sealed shell, the upper fixing frame is connected to two purification tanks, the end of the upper fixing frame away from the controller body is connected to two connecting heads, the lower end of the connecting head is fixed with a rectangular shell, and a one-way valve is provided at the connection between the two connecting heads and the rectangular shell. The lower end of the rectangular shell is connected to an air outlet pipe, and the middle part of the end of the rectangular shell close to the controller body is connected to an L-shaped tube, and the lower end of the L-shaped tube is fixed with a detection component.

[0015] Preferably, the detection component includes a detection shell fixed on a fixed shell, a fixed plate is fixed in the detection shell, the fixed plate divides the detection shell into two detection cavities, heating resistance wires are fixed in both detection cavities, thermistors are fixed on the upper and lower end surfaces of the fixed plate, and the detection cavity located on the upper side is connected to the L-shaped tube.

[0016] Compared with the prior art, the technical solution provided by the present invention has the following beneficial effects:

[0017] By cooling the metal sheet, the water molecules in the nitrogen can be solidified and adsorbed on its surface. The metal sheet is weighed by a pressure sensor, and the water molecule content in the nitrogen can be converted into the weight gain of the metal sheet, thereby detecting the water content of the nitrogen entering the device. If a high water content is detected, the nitrogen will first enter a sealed shell equipped with a heating copper sheet for drying, effectively avoiding the influence of moisture on the purification effect of the purification tank. In addition, by using the balanced bridge between the two thermistors, the impurity concentration can be inferred based on the change in thermal conductivity, thereby calculating the nitrogen purity. It can detect whether the nitrogen purified by the purification tank is qualified, effectively avoiding the occurrence of unqualified process quality due to substandard nitrogen purity.

[0018] The wind pressure measuring device can detect the pressure of nitrogen in the inlet and outlet. The nitrogen pressure of both can be used to determine whether the purification tank is blocked. When the purification tank in use is detected to be blocked, the spare purification tank can be activated without affecting the gas supply to the process equipment. This solves the problem of having to stop the gas supply to the process equipment when replacing the purification tank, ensures the continuous and uninterrupted supply of purified nitrogen to the process equipment, and greatly improves the working time and production efficiency of the process equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort.

[0020] Figure 1It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a partial structural schematic diagram of the present invention;

[0022] Figure 3 Schematic diagram of the internal structure of the monitoring and fixing mechanism of the present invention;

[0023] Figure 4 for Figure 3 A magnified view of point A in the figure;

[0024] Figure 5 This is a schematic diagram of the internal structure of the plugging assembly of the present invention;

[0025] Figure 6 Schematic diagram of the internal structure of the monitoring component of the present invention;

[0026] Figure 7 Schematic diagram of the internal structure of the detection and fixing mechanism of the present invention;

[0027] Figure 8 Schematic diagram of the internal structure of the detection component of the present invention;

[0028] Figure 9 This is a schematic diagram of the position of the sealing cover tube when the device of the present invention is working.

[0029] Figure numerals: 1, controller body; 2, monitoring fixing mechanism; 3, detection fixing mechanism; 4, purification tank; 20, baffle; 21, fixed shell 1; 22, partition 1; 23, airbag ring; 24, partition 2; 25, blocking assembly; 26, sealing shell; 27, heating copper sheet; 28, Z-shaped tube; 29, monitoring assembly; 251, sealing tube; 252, electromagnetic ring; 253, permanent magnet ring; 254, blocking ball; 255, sealing cover tube ; 256, open groove; 257, connecting ring; 258, air outlet; 291, monitoring tube; 292, wind pressure measuring device; 293, semiconductor cooling plate; 294, pressure sensor; 295, metal sheet; 31, upper fixing frame; 32, connecting head; 33, rectangular shell; 34, air outlet pipe; 35, L-shaped tube; 36, detection component; 361, detection shell; 362, fixing plate; 363, heating resistance wire; 364, thermistor. DETAILED DESCRIPTION

[0030] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0031] The present invention will be further described below with reference to the embodiments.

[0032] Example: Refer to Figures 1 to 9 A nitrogen continuous purification device includes: a controller body 1, a PLC controller is provided in the controller body 1, a monitoring fixing mechanism 2 is fixed on the controller body 1, a detection fixing mechanism 3 is fixed on the monitoring fixing mechanism 2, and two purification tanks 4 are provided between the monitoring fixing mechanism 2 and the detection fixing mechanism 3;

[0033] Specifically, the purification tank 4 can purify the nitrogen in the high-purity gas cylinder so that it meets the process requirements for thin film manufacturing. Since the purification tank 4 in this device adopts room temperature purification technology, it is impossible to dry out the moisture therein. The components in the monitoring and fixing mechanism 2 can detect the nitrogen content in the gas cylinder and dry out the nitrogen with a high water content so that it does not reduce the purification effect of the purification tank 4. Two purification tanks 4 are provided. When blockage is detected in the purification tank 4, the spare purification tank 4 can be activated, so that the device can continuously and uninterruptedly supply high-purity nitrogen to the process equipment.

[0034] Further explanation, in order to be able to process nitrogen with different water contents, the following settings are made, such as Figure 3 and Figure 4 As shown, the monitoring fixing mechanism 2 includes a fixed shell 21 fixed on the controller body 1, a partition 22 is fixed in the fixed shell 21, and two airbag rings 23 are embedded on the upper end of the partition 22. The two ends of the fixed shell 21 are fixed with partitions 24. The two partitions 24 separate the fixed shell 21 into two sealed chambers, and the two sealed chambers are respectively connected to the two purification tanks 4. A blocking component 25 fixed to the upper end of the fixed shell 21 is provided above the airbag ring 23. The fixed shell 21 is fixed with a partition 24. A sealed shell 26 is fixed in the middle of the upper end of 21, and a plurality of heating copper plates 27 are fixed in an array in the sealed shell 26. Z-shaped tubes 28 are fixed at both ends of the sealed shell 26 and are connected to the sealed cavity. Two rectangular grooves are symmetrically provided on the upper end of the sealed shell 26, and a baffle 20 is slidably connected in the rectangular groove. An arc-shaped hole is provided at one end of the baffle 20 close to the Z-shaped tube 28. The sealed shell 26 and the Z-shaped tube 28 need to be connected by the arc-shaped hole. A monitoring component 29 is fixed in the middle of the lower end of the fixed shell 21.

[0035] To further illustrate, in order to separately process nitrogen with different contents, the following settings are made, such as Figure 5As shown, the sealing assembly 25 includes a sealing tube 251 fixed to the upper end of the fixed shell 21, an electromagnetic ring 252 is fixed in the sealing tube 251, and a permanent magnet ring 253 movably connected to the sealing tube 251 is provided above the electromagnetic ring 252. The electromagnetic ring 252 and the permanent magnet ring 253 magnetically repel each other, and a sealing ball 254 is provided below the electromagnetic ring 252. The sealing ball 254 is fixedly connected to the permanent magnet ring 253, and the upper end of the permanent magnet ring 253 is fixedly connected to a sealing cover tube 255. The upper end of the sealing cover tube 255 is fixedly connected to the baffle 20, and a plurality of open grooves 256 are arranged in an array on the outer surface of the sealing cover tube 255. The outer surface of the sealing tube 251 is connected to a connecting ring 257, which is connected to the sealing shell 26. A one-way valve is provided at the connection between the connecting ring 257 and the sealing shell 26, and an air outlet 258 is provided on the outer surface of the sealing tube 251. The air outlet 258 is connected to the sealing cavity located on the same side.

[0036] Further explanation, in order to detect the water content of nitrogen entering the device, the following settings are made, such as Figure 6 As shown, the monitoring assembly 29 includes a monitoring tube 291 fixed to the lower end of the fixed housing 21, a wind pressure measuring device 292 fixed in the monitoring tube 291, a semiconductor cooling plate 293 embedded in the monitoring tube 291, and a pressure sensor 294 fixed in the monitoring tube 291 symmetrically arranged above the wind pressure measuring device 292. A metal plate 295 is slidably connected in the monitoring tube 291, and the metal plate 295 is in contact with the semiconductor cooling plate 293. The wind pressure measuring device 292, the pressure sensor 294, and the controller body 1 are connected by electrical signals to form a detection circuit. The electromagnetic ring 252 and the heating copper plate 27 are connected by electrical signals to the controller body 1 to form an operation circuit.

[0037] The nitrogen in the gas cylinder will enter the monitoring tube 291, and the PLC controller therein will energize the semiconductor cooling fin 293. The cooling surface of the semiconductor cooling fin 293 is located in the monitoring tube 291, so that it can cool the metal sheet 295 in contact with it. At this time, the nitrogen entering the monitoring tube 291 will stay in the monitoring tube 291 and part of the area inside the fixed shell 21, and will not be able to flow. The semiconductor cooling fin 293 will cool the metal sheet 295 to below zero. When the nitrogen in the gas cylinder contains moisture, it will solidify on the surface of the metal sheet 295. The weight of the metal sheet 295 is detected by two pressure sensors 294 to determine whether the moisture content therein affects the purification effect of the purification tank 4.

[0038] To further illustrate, in order to detect the nitrogen content after replacing the purification tank 4, the following settings are made, such as Figure 7As shown, the detection and fixing mechanism 3 includes an upper fixing frame 31 fixed to the upper end of the sealed shell 26, the upper fixing frame 31 is connected to the two purification tanks 4, and the end of the upper fixing frame 31 away from the controller body 1 is connected to two connectors 32, and the lower end of the connector 32 is fixed with a rectangular shell 33, and a one-way valve is provided at the connection between the two connectors 32 and the rectangular shell 33. The lower end of the rectangular shell 33 is connected to an outlet pipe 34, and a wind pressure measuring device 292 is provided in the outlet pipe 34, which can detect the nitrogen pressure in the outlet pipe 34. The middle part of the end of the rectangular shell 33 close to the controller body 1 is connected to an L-shaped tube 35, and the lower end of the L-shaped tube 35 is fixed with a detection component 36.

[0039] Further explanation, in order to detect whether the nitrogen gas purified by the purification tank 4 is qualified, the following settings are made, such as Figure 8 As shown, the detection assembly 36 includes a detection housing 361 fixed to the fixed housing 21. A fixing plate 362 is fixed in the detection housing 361. The fixing plate 362 divides the detection housing 361 into two detection chambers. A heating resistor 363 is fixed in each of the two detection chambers. Thermistors 364 are fixed to the upper and lower end surfaces of the fixing plate 362. The detection chamber on the upper side is connected to the L-shaped tube 35.

[0040] The nitrogen gas purified by the purification tank 4 will enter the detection housing 361 through the L-shaped tube 35, and then enter the detection cavity located on the upper side. At this time, pure nitrogen gas for comparison is introduced into the detection cavity located on the lower side. Then, the nitrogen in the two detection cavities is heated simultaneously by the heating resistor 363, which can compensate for the temperature of the nitrogen in the two detection cavities. The balanced bridge between the two thermistors 364 can detect whether the nitrogen gas purified by the purification tank 4 is qualified.

[0041] The working principle of the present invention is as follows: In the solar cell manufacturing process, an atomic layer deposition process is required to manufacture thin films. In order to ensure the process quality, the purity of nitrogen needs to reach 9.0 when the atomic layer deposition process is performed. The high-purity nitrogen cylinders supplied on the market have a nitrogen purity of 6.0. Usually, a purification tank 4 is used to purify the nitrogen in the cylinder with a purity of 6.0. The high-purity nitrogen cylinder is connected to the monitoring tube 291, and the valve between them is opened. The nitrogen in the cylinder will enter the monitoring tube 291, and the PLC controller therein will energize the semiconductor cooling plate 293. The cooling surface of the semiconductor cooling plate 293 is located in the monitoring tube 291, so that it can cool the metal sheet 295 in contact with it (when current passes through a loop composed of two different semiconductor materials, heat will be generated at the joint of the two materials). Absorption or release phenomenon: when a DC voltage is applied to the cooling plate, the current flows in a specific direction in the P-type and N-type semiconductor elements, causing one end to continuously absorb heat and become the cooling end). At this time, the nitrogen entering the monitoring tube 291 will remain in the monitoring tube 291 and part of the area inside the fixed shell 21, and will not be able to flow. The semiconductor cooling plate 293 therein will cool the metal plate 295 to below zero. When the nitrogen in the gas cylinder contains moisture, it will solidify on the surface of the metal plate 295. The weight of the metal plate 295 is detected by two pressure sensors 294 to determine whether the moisture content therein affects the purification effect of the purification tank 4 (in the nitrogen purification process, adsorbents are often used to remove impurities. Moisture will be preferentially adsorbed by the adsorbent, occupying adsorption sites, and reducing the adsorbent's ability to adsorb other impurities).

[0042] When the moisture content in the gas cylinder is low and will not affect the purification effect of the purification tank 4, the PLC controller will energize one of the electromagnetic rings 252 to make it magnetic. Under the action of the magnetic force, the permanent magnet ring 253 and the sealing cover tube 255, which are magnetically repelled by it, are pushed upward, so that the opening groove 256 opened on the outer surface of the sealing cover tube 255 coincides with the air outlet 258. At this time, the nitrogen in the monitoring tube 291 can enter the sealing tube 251 through the air bag ring 23, and then flow into the sealed cavity through the opening groove 256 and the air outlet 258, continue to flow upward and be purified by the purification tank 4, and finally flow into the air outlet pipe 34 from the connector 32 and the rectangular shell 33, so that the nitrogen can flow to the device that requires high-purity nitrogen. When the pressure on the pressure sensor 294 exceeds the set value, the PLC controller will pass a larger current into the electromagnetic ring 252, so that it can push the permanent magnet ring 253 and the sealing cover tube 255 to move upward a larger distance, so that the opening groove 256 opened on the outer surface of the sealing cover tube 255 coincides with the air outlet 258. The open groove 256 on the outer surface is connected to the connecting ring 257, so that the nitrogen in the monitoring tube 291 enters the sealed housing 26 before entering the sealed cavity. The nitrogen is then dried by the heating copper sheet 27 in the sealed housing 26. A water-absorbing sponge is provided in the sealed housing 26, located below the Z-shaped tube 28. The water-absorbing sponge can absorb the water vapor generated during the drying process, that is, remove the water content in the nitrogen. At the same time, it can also remove the oxygen content in the nitrogen (copper has a certain reducing property. Under heating conditions, copper atoms can undergo an oxidation-reduction reaction with oxygen molecules. In this reaction, copper is oxidized to copper oxide, and oxygen is consumed, thereby achieving the purpose of removing oxygen from the high-purity nitrogen). When the sealing cover tube 255 moves upward, it also drives the baffle 20 to move upward, so that the arc-shaped hole therein contacts the end of the Z-shaped tube 28. After the nitrogen in the sealed housing 26 is deoxygenated and dried, it can enter the sealed cavity through the Z-shaped tube 28 and continue to be purified.

[0043] The purification tank 4 may become clogged after being used for a period of time, affecting the flow rate of the purified nitrogen. A wind pressure measuring device 292 is also provided in the outlet pipe 34. The two wind pressure measuring devices 292 can detect the nitrogen pressure in the monitoring pipe 291 and the outlet pipe 34. Under normal circumstances, the pressure in the monitoring pipe 291 is set to 100 psig. When the purification tank 4 is newly put into use, the pressure in the outlet pipe 34 is also displayed as 100 psig. As the purification tank 4 is used and consumed, the interior gradually becomes clogged, and the pressure displayed by the wind pressure measuring device 292 in the outlet pipe 34 gradually decreases. When the pressure value in the outlet pipe 34 reaches 90 psig, it indicates that the pressure difference between the two ends of the purification tank 4 has reached the alarm value of 10 psig. At this time, the flow rate of the purified nitrogen can no longer meet the use requirements of the process equipment, and the purification tank in use needs to be repaired. 4 is replaced, and the PLC controller stops supplying power to the electromagnetic ring 252, causing the permanent magnet ring 253 and the sealing cover tube 255 to move downward under the weight of the blocking ball 254, so that the blocking ball 254 contacts the airbag ring 23 to block it, preventing the nitrogen in the monitoring tube 291 from entering the sealing tube 251. The PLC controller then passes a current of the same intensity into the other permanent magnet ring 253, and the nitrogen entering the monitoring tube 291 will enter the other permanent magnet ring 253. The valve in the outlet pipe 34 is then closed and the valve in the L-shaped tube 35 is opened. The nitrogen purified by the purification tank 4 will enter the detection housing 361 through the L-shaped tube 35 and then enter the detection chamber on the upper side. At this time, pure nitrogen for reference (the pure nitrogen meeting the process requirements) is passed into the detection chamber on the lower side.

[0044] Then the heating resistor 363 heats the nitrogen entering the two detection chambers at the same time, which can compensate for the temperature of the nitrogen in the two detection chambers. Through the balanced bridge between the two thermistors 364, it can be detected whether the nitrogen purified by the purification tank 4 is qualified (the nitrogen is heated by the thermistors 364, and the heating resistor 363 is to ensure that the nitrogen entering the two detection chambers maintains the same temperature. If the nitrogen contains impurities with a thermal conductivity significantly higher or lower than that of nitrogen, the overall thermal conductivity of the mixed gas will deviate from the baseline value of pure nitrogen. By measuring the change in thermal conductivity, the impurity content can be inferred. The nitrogen concentration is calculated, and the nitrogen purity is thereby calculated). This process takes a while. The nitrogen in the gas cylinder is used to purge the purification tank 4 until the purified nitrogen is qualified. The valve in the gas outlet pipe 34 is then opened, and the valve in the L-shaped tube 35 needs to be closed at the same time to allow the qualified nitrogen to enter the process equipment. This solves the problem of having to stop supplying gas to the process equipment when replacing the purification tank 4, ensures a continuous and uninterrupted supply of purified nitrogen to the process equipment, greatly improves the working time and production efficiency of the process equipment, and also avoids the occurrence of unqualified process quality due to substandard nitrogen purity.

[0045] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A nitrogen continuous purification device, characterized in that: include: A controller body (1), a monitoring fixing mechanism (2) being fixed on the controller body (1), a detection fixing mechanism (3) being fixed on the monitoring fixing mechanism (2), and two purification tanks (4) being provided between the monitoring fixing mechanism (2) and the detection fixing mechanism (3); The monitoring fixing mechanism (2) includes a fixed shell (21) fixed on the controller body (1), a partition (22) is fixed in the fixed shell (21), two airbag rings (23) are embedded in the upper end of the partition (22), and partitions (24) are fixed at both ends of the fixed shell (21), and the two partitions (24) separate the fixed shell (21) into two sealed cavities, a blocking component (25) fixed to the upper end of the fixed shell (21) is provided above the airbag ring (23), and a sealing shell (26) is fixed in the middle of the upper end of the fixed shell (21). A plurality of heating copper sheets (27) are fixed in an array inside the sealing shell (26), and a Z-shaped tube (28) is fixed at both ends of the sealing shell (26) and is connected to the sealing cavity. Two rectangular grooves are symmetrically provided at the upper end of the sealing shell (26), and a baffle (20) is slidably connected in the rectangular groove. An arc-shaped hole is provided at one end of the baffle (20) close to the Z-shaped tube (28). The sealing shell (26) and the Z-shaped tube (28) need to be connected by the arc-shaped hole. A monitoring component (29) is fixed at the middle of the lower end of the fixed shell (21), and the two sealing cavities are respectively connected to the two purification tanks (4); The blocking assembly (25) comprises a sealing tube (251) fixed to the upper end of a fixed housing (21), an electromagnetic ring (252) fixed in the sealing tube (251), a permanent magnet ring (253) movably connected to the sealing tube (251) is provided above the electromagnetic ring (252), the electromagnetic ring (252) and the permanent magnet ring (253) repel each other magnetically, and a blocking ball (254) is provided below the electromagnetic ring (252), the blocking ball (254) and the permanent magnet ring (253) are in contact with each other. The upper end of the permanent magnet ring (253) is fixedly connected to a sealing cover tube (255), the upper end of the sealing cover tube (255) is fixedly connected to the baffle (20), the outer surface of the sealing cover tube (255) is provided with a plurality of open grooves (256) in an array, the outer surface of the sealing tube (251) is connected to a connecting ring (257), the outer surface of the sealing tube (251) is provided with an air outlet (258), and the air outlet (258) is connected to the sealing cavity located on the same side; The connecting ring (257) is connected to the sealing housing (26), and a one-way valve is provided at the connection between the connecting ring (257) and the sealing housing (26).

2. A nitrogen continuous purification equipment according to claim 1, characterized in that: The monitoring assembly (29) includes a monitoring tube (291) fixed to the lower end of a fixed shell (21), a wind pressure measuring device (292) fixed in the monitoring tube (291), a semiconductor cooling fin (293) embedded in the monitoring tube (291), a pressure sensor (294) fixed in the monitoring tube (291) symmetrically arranged above the wind pressure measuring device (292), a metal sheet (295) slidably connected in the monitoring tube (291), and the metal sheet (295) is in contact with the semiconductor cooling fin (293).

3. A nitrogen continuous purification equipment according to claim 2, characterized in that: The wind pressure measuring device (292), the pressure sensor (294) and the controller body (1) are connected by electrical signals to form a detection circuit, and the electromagnetic ring (252), the heating copper sheet (27) and the controller body (1) are connected by electrical signals to form an operation circuit.

4. The continuous nitrogen purification equipment according to claim 1, characterized in that: The detection fixing mechanism (3) comprises an upper fixing frame (31) fixed to the upper end of the sealing shell (26), the upper fixing frame (31) is connected to the two purification tanks (4), and the end of the upper fixing frame (31) away from the controller body (1) is connected to two connectors (32), the lower end of the connector (32) is fixed with a rectangular shell (33), and a one-way valve is provided at the connection between the two connectors (32) and the rectangular shell (33). The lower end of the rectangular shell (33) is connected to an air outlet pipe (34), and the middle part of the end of the rectangular shell (33) close to the controller body (1) is connected to an L-shaped tube (35), and the lower end of the L-shaped tube (35) is fixed with a detection component (36).

5. The continuous nitrogen purification equipment according to claim 4, characterized in that: The detection assembly (36) includes a detection shell (361) fixed on a fixed shell (21), a fixed plate (362) fixed in the detection shell (361), and the fixed plate (362) divides the detection shell (361) into two detection cavities. A heating resistance wire (363) is fixed in each of the two detection cavities. The upper and lower end surfaces of the fixed plate (362) are fixed with a thermistor (364), and the detection cavity located on the upper side is connected to the L-shaped tube (35).

Citation Information

Patent Citations

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