High-precision semiconductor part drilling equipment and machining method thereof

Abstract

The invention provides high-precision semiconductor part drilling equipment and a machining method thereof, and relates to the technical field of semiconductor part machining equipment. The drilling machine comprises a workbench, a rack, a moving seat, a moving seat driving assembly, a rotary knife driving assembly, a drilling tool and a cooling assembly, the rack is arranged on the workbench and provided with a sliding rail, the moving seat is arranged on the sliding rail, the moving seat driving assembly can drive the moving seat to slide along the sliding rail, and the rotary knife driving assembly is arranged on the moving seat and can drive the drilling tool to rotate. The cooling assembly comprises a first cooling pipe, a first cooling pipe control unit, a second cooling pipe and a second cooling pipe control unit, the first cooling pipe is close to the first end of the sliding rail, the second cooling pipe is close to the second end of the sliding rail, and when the moving seat is close to the first end, the first cooling pipe control unit supplies liquid to the first cooling pipe; when the moving seat is close to the first end, the second cooling pipe control unit stops supplying liquid to the second cooling pipe, and when the moving seat is close to the second end, the first cooling pipe control unit stops supplying liquid, and the second cooling pipe control unit supplies liquid. The device is time-saving and labor-saving in use.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor parts processing equipment, and in particular to high-precision semiconductor parts drilling equipment and a processing method thereof. Background Art

[0002] Semiconductor parts are typically made of hard materials such as silicon and metal, which need to be precisely machined to meet strict dimensional requirements.

[0003] Existing high-precision semiconductor parts drilling equipment generally includes a drill bit, a rotating motor, a mounting seat, a drill bit drive assembly and a cooling assembly. The drill bit is connected to the output shaft of the rotating motor, and the rotating motor body is mounted on the mounting seat. The drill bit drive assembly is connected to the mounting seat and can drive the drill bit to move in the horizontal and vertical directions. The cooling assembly includes a liquid supply device and multiple cooling pipes. The multiple cooling pipes are evenly distributed on the mounting seat around the central axis of the drill bit. The liquid supply device is connected to all the cooling pipes and can supply coolant to these cooling pipes, and then the coolant is sprayed from the four sides of the drill bit to the processing part of the drill bit through these cooling pipes to ensure sufficient cooling of the processing part.

[0004] However, because when the drill bit is performing operations such as drilling grooves and expanding holes, often only the drill bit on one side of the rotating motor will contact the inner wall of the hole to be processed, while the drill bit on the other side of the rotating motor will not rub against the inner wall of the hole to be processed, there is no need for a cooling pipe to spray coolant on the drill bit on that side of the rotating motor; in order to save coolant consumption, when the drill bit is performing operations such as drilling grooves and expanding holes to the left, the user needs to manually close the cooling pipe on the right side of the rotating motor, and when the drill bit is performing operations such as drilling grooves and expanding holes to the right, the user needs to manually close the cooling pipe on the left side of the rotating motor, which makes the use of high-precision semiconductor parts drilling equipment very inconvenient.

[0005] In view of this, it is necessary to provide a high-precision semiconductor parts drilling device and a processing method thereof. Summary of the invention

[0006] In order to solve the problem that the existing high-precision semiconductor parts drilling equipment requires the user to frequently manually adjust the switch of the cooling tube, which is very inconvenient to use, the present application provides a high-precision semiconductor parts drilling equipment and a processing method thereof.

[0007] In the first aspect, the high-precision semiconductor parts drilling equipment provided by the present application adopts the following technical solutions: a workbench, a frame, a movable seat, a movable seat drive assembly, a rotary cutter drive assembly, a drill and a cooling assembly, wherein the workbench can bear the workpiece to be processed; The frame is arranged on the workbench, and a slide rail is arranged on the frame along its length direction; The movable seat is arranged on the slide rail; The seat moving drive assembly is in transmission connection with the moving seat and can drive the moving seat to slide along the slide rail; The rotary cutter drive assembly is arranged on the moving seat, and the rotary cutter drive assembly is in transmission connection with the drill bit and can drive the drill bit to rotate to process the workpiece; The cooling assembly includes a first cooling pipe, a first cooling pipe control unit, a second cooling pipe and a second cooling pipe control unit. The two ends of the slide rail are respectively formed as a first end and a second end. The first cooling pipe and the second cooling pipe are oppositely arranged on the moving seat with the drill bit as the center, and the liquid outlets of the first cooling pipe and the second cooling pipe both face the drill bit. The first cooling pipe is arranged between the drill bit and the first end of the slide rail, and the second cooling pipe is arranged between the drill bit and the second end of the slide rail; When the moving seat moves along the slide rail close to the first end of the slide rail, the first cooling pipe control unit can supply cooling liquid to the first cooling pipe, and the second cooling pipe control unit stops supplying cooling liquid to the second cooling pipe. When the moving seat moves along the slide rail close to the second end of the slide rail, the first cooling pipe control unit stops supplying cooling liquid to the first cooling pipe, and the second cooling pipe control unit can supply cooling liquid to the second cooling pipe.

[0008] By adopting the above technical solution, after fixing the workpiece to be processed on the tabletop of the workbench, the user can first drive the drill bit to rotate through the rotary cutter drive assembly to process a drilling hole on the workpiece, and then control the seat moving drive assembly to drive the moving seat to move along the slide rail to the first end or the second end of the slide rail, so as to expand the drilling hole according to the processing requirements to form a long hole such as a groove or an oval hole; since when the moving seat moves along the slide rail close to the first end of the slide rail, the first cooling pipe control unit will supply cooling liquid to the first cooling pipe while the second cooling pipe control unit will stop supplying cooling liquid to the second cooling pipe, and when the moving seat moves along the slide rail close to the second end of the slide rail, the first cooling pipe control unit will stop supplying cooling liquid to the first cooling pipe while the second cooling pipe control unit will supply cooling liquid to the second cooling pipe, it can both cool the side of the drill bit in contact with the inner wall of the hole to be processed through the cooling liquid and automatically close the cooling liquid flow in the cooling pipe on the other side of the drill bit, so that the user does not need to frequently manually adjust the switches of the cooling pipes on both sides of the drill bit, and then makes the use of the high-precision semiconductor part drilling equipment time-saving and labor-saving.

[0009] Specifically, the seat moving drive unit includes a seat moving lead screw and a seat moving motor. A chute is opened on the frame along the length direction of the slide rail. The seat moving lead screw is arranged in the chute along the length direction of the chute. A slider is arranged on the moving seat. The slider is inserted into the chute and is provided with a moving screw hole adapted to the seat moving lead screw, and the slider is screwed to the seat moving lead screw through the moving screw hole; The seat moving motor is in transmission connection with the seat moving lead screw and can drive the seat moving lead screw to rotate, so as to drive the slider to move along the sliding groove via the seat moving lead screw.

[0010] By adopting the above technical solution, the user can control the seat moving motor to drive the seat moving lead screw to rotate, and then drive the slider to drive the moving seat to move along the sliding groove via the seat moving lead screw.

[0011] Further, the first cold pipe control unit includes a first liquid storage tank, a first installation housing, a first cold pipe valve, a first worm gear and a first torsion spring. The first liquid storage tank is arranged at a position on the frame close to the first end of the slide rail. The first installation housing is arranged on the moving seat and a first liquid passing cavity is formed inside the first installation housing. The first cold pipe valve is arranged in the first liquid passing cavity and divides the first liquid passing cavity into a first liquid inlet chamber and a first liquid outlet chamber. A first liquid inlet hole leading to the outside is formed on the inner wall of the first liquid inlet chamber. The liquid outlet of the first liquid storage tank is communicated with the first liquid inlet hole through a pipeline. A first liquid outlet hole leading to the outside is formed on the inner wall of the first liquid outlet chamber. One end of the first cooling pipe far from the drill bit is connected to the first liquid outlet hole. A first accommodation groove is formed on the outer wall of the first installation housing. The first worm gear is rotatably connected to the inner wall of the first accommodation groove and is in transmission connection with the valve core of the first cold pipe valve. Toothless sections and toothed sections are formed on the tooth surface of the first worm gear. The toothed section of the first worm gear can be meshed with the external thread of the seat moving lead screw, so that the seat moving lead screw can drive the first worm gear to rotate through self-rotation until the toothed section of the first worm gear turns away from the seat moving lead screw, and the toothless section of the first worm gear faces the seat moving lead screw. The first torsion spring is arranged between the rotating shaft of the first worm gear and the inner wall of the first accommodation groove, and can apply a force to the first worm gear to make the toothed section of the first worm gear turn towards the seat moving lead screw when the toothless section of the first worm gear faces the seat moving lead screw; The second cold pipe control unit includes a second liquid storage tank, a second installation housing, a second cold pipe valve, a second worm gear, and a second torsion spring. The second liquid storage tank is arranged at a position on the frame close to the second end of the slide rail. The second installation housing is arranged on the moving seat, and a second liquid passage cavity is formed inside the second installation housing. The second cold pipe valve is arranged in the second liquid passage cavity and divides the second liquid passage cavity into a second liquid inlet chamber and a second liquid outlet chamber. A second liquid inlet hole leading to the outside is opened on the inner wall of the second liquid inlet chamber. The liquid outlet of the second liquid storage tank is communicated with the second liquid inlet hole through a pipeline. A second liquid outlet hole leading to the outside is opened on the inner wall of the second liquid outlet chamber. One end of the second cooling pipe far from the drill bit is connected to the second liquid outlet hole. A second accommodation groove is opened on the outer wall of the second installation housing. The second worm gear is rotatably connected to the inner wall of the second accommodation groove and is in transmission connection with the valve core of the second cold pipe valve. Toothless sections and toothed sections are formed on the tooth surface of the second worm gear. The toothed section of the second worm gear can be engaged with the external thread of the moving seat lead screw, so that the moving seat lead screw can drive the second worm gear to rotate through self-rotation until the toothed section of the second worm gear turns away from the moving seat lead screw, and the toothless section of the second worm gear faces the moving seat lead screw. The second torsion spring is arranged between the rotating shaft of the second worm gear and the inner wall of the second accommodation groove, and can apply a force to the second worm gear to make the toothed section of the second worm gear turn towards the moving seat lead screw when the toothless section of the second worm gear faces the moving seat lead screw; When the moving seat moves along the slide rail close to the first end of the slide rail, the toothed sections of the first worm gear and the second worm gear both rotate to a position facing the second end of the slide rail, and the second cold pipe valve is closed and the first cold pipe valve is opened to communicate the first liquid inlet chamber and the first liquid outlet chamber. When the moving seat moves along the slide rail close to the second end of the slide rail, the toothed sections of the first worm gear and the second worm gear both rotate to a position facing the first end of the slide rail, and the first cold pipe valve is closed and the second cold pipe valve is opened to communicate the second liquid inlet chamber and the second liquid outlet chamber.

[0012] By adopting the above technical solution, when the seat moving motor drives the seat moving lead screw to rotate, the external thread on the seat moving lead screw and the toothed sections on the first worm gear and the second worm gear form a driving structure similar to a worm and worm gear. Subsequently, when the moving seat approaches the first end of the slide rail along the slide rail, the toothed sections of the first worm gear and the second worm gear will be rotated by the external thread on the seat moving lead screw to a position facing the second end of the slide rail until the toothless sections of the first worm gear and the second worm gear face the seat moving lead screw. After that, when the moving seat continues to approach the first end of the slide rail along the seat moving lead screw, the external thread on the seat moving lead screw will not drive the first worm gear and the second worm gear to continue rotating, and the first torsion spring and the second torsion spring will respectively keep the toothed sections on the first worm gear and the second worm gear at a position where they are about to separate from the external thread on the seat moving lead screw but have not separated, so that the second cold tube valve is always kept closed, the first cold tube valve is always kept open and communicates the first liquid inlet chamber and the first liquid outlet chamber, thereby enabling the first liquid storage tank to supply coolant to the first cooling tube; when the moving seat approaches the second end of the slide rail along the slide rail, due to the arrangement of the first torsion spring and the second torsion spring, the toothed sections of the first worm gear and the second worm gear will be driven by the external thread on the seat moving lead screw and rotated to positions facing the first end of the slide rail. After that, when the moving seat continues to approach the second end of the slide rail along the seat moving lead screw, the external thread on the seat moving lead screw will not drive the first worm gear and the second worm gear to continue rotating, and the first torsion spring and the second torsion spring will respectively keep the toothed sections on the first worm gear and the second worm gear at a position where they are about to separate from the external thread on the seat moving lead screw but have not separated, so that the first cold tube valve is always kept closed, the second cold tube valve is always kept open and communicates the second liquid inlet chamber and the second liquid outlet chamber, thereby enabling the second liquid storage tank to supply coolant to the second cooling tube.

[0013] Furthermore, the rotary cutter driving assembly includes a lifting driving member, a driving motor and a lifting table. The lifting driving member is arranged on the moving seat, and the lifting driving member is connected to the housing of the driving motor and can drive the driving motor to approach or move away from the tabletop of the workbench. The output shaft of the driving motor is connected to the top of the lifting table, and the drill bit is connected to the bottom of the lifting table.

[0014] By adopting the above technical solution, the lifting driving member can drive the lifting table and the drill bit to lift; and the driving motor can drive the drill bit to rotate.

[0015] Furthermore, the cooling assembly further includes a water baffle. A communication hole is formed in the middle of the water baffle, and the water baffle is sleeved on the lifting table through the communication hole. Both the first installation housing and the second installation housing are connected to the top of the water baffle. An annular water retaining protrusion is formed on the side wall of the lifting table around the rotation axis of the drill bit, and the annular water retaining protrusion is located below the water baffle.

[0016] By adopting the above technical solution, the water baffle can cooperate with the annular water baffle protrusion, so that the coolant sprayed from the cooling pipe onto the workpiece surface will be blocked by the water baffle and the annular water baffle protrusion when reflecting upward, and then the driving motor above the water baffle is not easily damaged due to contact with the coolant reflected upward from the workpiece surface.

[0017] Further, a water baffle groove is formed on the pore wall of the communication hole around the rotation axis of the drill bit. A lip seal is provided between the inner wall of the water baffle groove and the side wall of the lifting table, and the sealing lip of the lip seal faces the bottom of the lifting table.

[0018] By adopting the above technical solution, the lip seal can block the gap between the water baffle and the side wall of the lifting table, so that the coolant reflected upward from the workpiece surface is not easily passed through the gap between the water baffle and the side wall of the lifting table to contact the driving motor, thereby further reducing the probability of damage to the driving motor due to water ingress.

[0019] Specifically, it further includes a waste liquid recovery assembly, and the waste liquid recovery assembly can recover the coolant dripping on the workbench.

[0020] By adopting the above technical solution, the user can recover the coolant dripping on the workbench through the waste liquid recovery assembly.

[0021] Further, the waste liquid recovery assembly includes a liquid collecting cylinder and a waste liquid guiding pipe. A liquid collecting cavity is provided inside the workbench. A plurality of liquid collecting holes leading to the tabletop of the workbench are formed on the inner top wall of the liquid collecting cavity. A liquid outlet hole leading to the outside is formed on the inner bottom wall of the liquid collecting cavity. One end of the waste liquid guiding pipe is connected to the liquid outlet hole, and the other end of the waste liquid guiding pipe is inserted into the liquid collecting cylinder.

[0022] By adopting the above technical solution, the coolant dripping on the workbench will first enter the liquid collecting cavity along the liquid collecting holes, then pass through the liquid outlet hole and the waste liquid guiding pipe and flow into the liquid collecting cylinder, so that the coolant dripping on the workbench can be collected through the liquid collecting cylinder.

[0023] Specifically, the frame includes a moving frame, a moving frame lead screw, and a moving frame motor. The slide rail is provided on the moving frame. A moving rail is provided on the tabletop of the workbench along the width direction of the frame. The moving frame is provided on the moving rail. A threaded hole adapted to the moving frame lead screw is formed on the moving frame. The moving frame lead screw is arranged along the length direction of the moving rail and is screwed with the threaded hole. The moving frame motor is in transmission connection with the moving frame lead screw and can drive the moving frame lead screw to rotate, so as to drive the moving frame to move along the moving rail via the moving frame lead screw.

[0024] By adopting the above technical solution, the user can drive the support screw to rotate through the support motor, and then drive the moving frame to move along the moving track through the support screw.

[0025] The high-precision semiconductor part drilling method provided in the second aspect of the present application adopts the following technical solution: S1. First, fill the first cold pipe control unit and the second cold pipe control unit with a sufficient amount of coolant, and then fix the workpiece to be processed on the tabletop of the workbench. S2. Start the seat moving drive assembly to drive the cutter rotating drive assembly and the drill bit to move, and start the cutter rotating drive assembly to drive the drill bit to rotate to process the workpiece. After the processing is completed, turn off the seat moving drive assembly and the cutter rotating drive assembly. S3. Recycle the coolant in the liquid collecting cylinder and clean the tabletop of the workbench.

[0026] By adopting the above technical solution, the recycling of the coolant can be realized, which can not only save costs but also reduce resource waste.

[0027] In summary, the present application includes at least one of the following beneficial technical effects: 1. It includes a workbench, a frame, a movable seat, a movable seat driving assembly, a rotary cutter driving assembly, a drill and a cooling assembly. The workbench can bear the workpiece to be processed. The frame is arranged on the workbench, and a slide rail is arranged on the frame along its own length direction. The movable seat is arranged on the slide rail. The movable seat driving assembly is connected with the movable seat in a transmission manner and can drive the movable seat to slide along the slide rail. The rotary cutter driving assembly is arranged on the movable seat, and the rotary cutter driving assembly is connected with the drill in a transmission manner and can drive the drill to rotate to process the workpiece. The cooling assembly includes a first cooling pipe, a first cooling pipe control unit, a second cooling pipe and a second cooling pipe control unit. The slide rail is connected with the movable seat in a transmission manner and can drive the movable seat to slide along the slide rail. The two ends of the rail are respectively formed as a first end and a second end, the first cooling pipe and the second cooling pipe are relatively arranged on the movable seat with the drill as the center, and the liquid outlets of the first cooling pipe and the second cooling pipe are both facing the drill, the first cooling pipe is arranged between the drill and the first end of the slide rail, and the second cooling pipe is arranged between the drill and the second end of the slide rail, when the movable seat approaches the first end of the slide rail along the slide rail, the first cooling pipe control unit can supply cooling liquid to the first cooling pipe, and the second cooling pipe control unit stops supplying cooling liquid to the second cooling pipe, and when the movable seat approaches the second end of the slide rail along the slide rail, the first cooling pipe control unit stops The cooling liquid is supplied to the first cooling pipe, and the second cooling pipe control unit can supply cooling liquid to the second cooling pipe, so that after the user fixes the workpiece to be processed on the table surface of the workbench, he can first drive the drill to rotate through the rotary cutter driving assembly to process a drill hole on the workpiece, and then control the moving seat driving assembly to drive the moving seat to move along the slide rail toward the first end or the second end of the slide rail, so as to expand the drill hole according to the processing requirements to form a long hole of the type of groove or waist hole; because when the moving seat approaches the first end of the slide rail along the slide rail, the first cooling pipe control unit supplies cooling liquid to the first cooling pipe When the movable seat moves along the slide rail to approach the second end of the slide rail, the first cooling pipe control unit stops supplying cooling liquid to the first cooling pipe, while the second cooling pipe control unit supplies cooling liquid to the second cooling pipe, which can not only cool the side of the drill bit in contact with the inner wall of the hole to be processed by the cooling liquid, but also automatically shut down the cooling liquid flow in the cooling pipe on the other side of the drill bit, so that the user does not need to frequently manually adjust the switches of the cooling pipes on both sides of the drill bit, thereby saving time and effort in the use of high-precision semiconductor parts drilling equipment; 2. It also includes a waste liquid recovery component, which can recover the coolant dripping on the workbench, which can save costs and reduce waste of resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a stereogram of the high-precision semiconductor parts drilling equipment of the present application; Figure 2 is along Figure 1 A schematic cross-sectional view taken along the center axis in the length direction of the middle drill; Figure 3 is a schematic cross-sectional view taken along the Figure 2 A-A direction in Figure 4 is a schematic cross-sectional view taken along the Figure 3 B-B direction in Figure 5 is a schematic cross-sectional view taken along the Figure 3 C-C direction in

[0029] Reference numerals: 1, workbench; 11, moving rail; 12, liquid collection chamber; 13, baffle; 2, frame; 21, moving frame; 211, slide rail; 22, moving frame lead screw; 23, moving frame motor; 3, moving seat; 31, slider; 4, moving seat drive assembly; 41, moving seat lead screw; 42, moving seat motor; 5, rotary tool drive assembly; 51, lifting drive member; 52, drive motor; 53, lifting table; 531, annular water retaining projection; 6, drill; 7, cooling assembly; 71, first cooling pipe; 72, first cooling pipe control unit; 721, first liquid storage tank; 722, first installation housing; 7221, first liquid inlet chamber; 7222, first liquid outlet chamber; 723, first cooling pipe valve; 724, first worm gear; 725, first torsion spring; 73, second cooling pipe; 74, second cooling pipe control unit; 741, second liquid storage tank; 742, second installation housing; 7421, second liquid inlet chamber; 7422, second liquid outlet chamber; 743, second cooling pipe valve; 744, second worm gear; 745, second torsion spring; 75, water baffle; 751, lip seal; 8, workpiece; 9, waste liquid recovery assembly; 91, liquid collection cylinder; 92, waste liquid guide pipe. Detailed implementation manners

[0030] The following is further described in conjunction with the attached Figures 1-5 drawings: Referring to Figure 1 and Figure 2 , a high-precision semiconductor part drilling device includes a workbench 1, a frame 2, a moving seat 3, a moving seat drive assembly 4, a rotary tool drive assembly 5, a drill 6, a cooling assembly 7 and a waste liquid recovery assembly 9. A workpiece 8 to be processed is placed on the workbench 1. A liquid collection chamber 12 is provided inside the workbench 1. A plurality of liquid collection holes leading to the tabletop of the workbench 1 are opened on the inner top wall of the liquid collection chamber 12. An outlet hole leading to the outside is opened on the inner bottom wall of the liquid collection chamber 12. One end of the waste liquid guide pipe 92 is connected to the outlet hole, and the other end of the waste liquid guide pipe 92 is inserted into the liquid collection cylinder 91, so that the coolant dripping on the workbench 1 will first enter the liquid collection chamber 12 along the liquid collection holes, then pass through the outlet hole and the waste liquid guide pipe 92 and flow into the liquid collection cylinder 91, thereby enabling the coolant dripping on the workbench 1 to be collected through the liquid collection cylinder 91.

[0031] Referring to Figure 1and Figure 2 On the workbench 1, there are two moving rails 11 arranged along the width direction of the workbench itself. The frame 2 includes a moving frame 21, a moving frame lead screw 22 and a moving frame motor 23. The two columns of the moving frame 21 are arranged on the two moving rails 11 and can slide along the moving rails 11. A threaded hole adapted to the moving frame lead screw 22 is opened on one column of the moving frame 21. The moving frame lead screw 22 is arranged along the length direction of the moving rail 11 and is screwed to the threaded hole. The moving frame motor 23 is arranged on the workbench 1 and is in transmission connection with the moving frame lead screw 22, so that the user can drive the moving frame lead screw 22 to rotate through the moving frame motor 23, and then drive the moving frame 21 to move along the moving rail 11 through the moving frame lead screw 22; on the cross beam of the moving frame 21, there is a slide rail 211 and a chute arranged along the length direction of the workbench 1. The moving seat lead screw 41 is arranged in the chute along the length direction of the chute. The moving seat 3 is provided with a slider 31. The slider 31 is inserted into the chute and is provided with a moving threaded hole adapted to the moving seat lead screw 41, and the slider 31 is screwed to the moving seat lead screw 41 through the moving threaded hole. The moving seat motor 42 is arranged at one end of the moving seat lead screw 41 and is in transmission connection with the moving seat lead screw 41, so that the user can drive the moving seat lead screw 41 to rotate by controlling the moving seat motor 42, and then drive the slider 31 to drive the moving seat 3 to move along the chute through the moving seat lead screw 41.

[0032] See Figure 2 and Figure 3 See FIGS. and, the rotary cutter driving assembly 5 includes a lifting driving member 51, a driving motor 52 and a lifting table 53. The lifting driving member 51 is arranged on the moving seat 3. The lifting driving member 51 can be a telescopic cylinder. The piston rod of the lifting driving member 51 extends upward and is connected to a vertical shaft through a cross bar. The vertical shaft passes through a through hole opened on the moving table and is connected to the housing of the driving motor 52 and can drive the driving motor 52 to approach or move away from the table surface of the workbench 1. The output shaft of the driving motor 52 is connected to the top of the lifting table 53. The drill bit 6 is detachably connected to the bottom of the lifting table 53, so that the lifting driving member 51 can drive the lifting table 53 and the drill bit 6 to lift; and the driving motor 52 can drive the drill bit 6 to rotate.

[0033] See Figure 3 and Figure 4, the cooling assembly 7 includes two first cooling pipes 71, two second cooling pipes 73, a first cooling pipe control unit 72, a second cooling pipe control unit 74 and a water baffle 75. The two end parts of the slide rail 211 are respectively formed as a first end and a second end. The two first cooling pipes 71 and the two second cooling pipes 73 are arranged at equal intervals around the rotation axis of the drill bit 6. Each first cooling pipe 71 is arranged between the drill bit 6 and the first end of the slide rail 211, and the second cooling pipe 73 is arranged between the drill bit 6 and the second end of the slide rail 211. The first cooling pipe 71 and the second cooling pipe 73 can both be universal corrugated pipes, so that the user can adjust the liquid outlets of the first cooling pipe 71 and the second cooling pipe 73 to face the position of the drill bit 6.

[0034] See Figure 3 and Figure 4 , the first cooling pipe control unit 72 includes a first liquid storage tank 721, a first installation housing 722, a first cooling pipe valve 723, a first worm gear 724 and a first torsion spring 725. The first liquid storage tank 721 is arranged at a position on the frame 2 close to the first end of the slide rail 211. The first installation housing 722 is arranged on the moving seat 3 and a first liquid passage cavity is formed inside the first installation housing 722. The first cooling pipe valve 723 is arranged in the first liquid passage cavity and divides the first liquid passage cavity into a first liquid inlet chamber 7221 and a first liquid outlet chamber 7222. A first liquid inlet hole leading to the outside is opened on the inner wall of the first liquid inlet chamber 7221. The liquid outlet of the first liquid storage tank 721 is communicated with the first liquid inlet hole through a corrugated pipe. A first liquid outlet hole leading to the outside is opened on the inner wall of the first liquid outlet chamber 7222. The end of the first cooling pipe 71 far from the drill bit is connected to the first liquid outlet hole. A first accommodation groove is opened on the outer wall of the first installation housing 722. The first worm gear 724 is rotatably connected to the inner wall of the first accommodation groove and is in transmission connection with the valve core of the first cooling pipe valve 723. And a toothless section and a toothed section are formed on the tooth surface of the first worm gear 724. The toothed section of the first worm gear 724 can be meshed with the external thread of the moving seat lead screw 41, so that the moving seat lead screw 41 can drive the first worm gear 724 to rotate through self-rotation until the toothed section of the first worm gear 724 turns away from the moving seat lead screw 41, and the toothless section of the first worm gear 724 faces the moving seat lead screw 41. The first torsion spring 725 is arranged between the rotating shaft of the first worm gear 724 and the inner wall of the first accommodation groove, and can apply a force to the first worm gear 724 to make the toothed section of the first worm gear 724 turn towards the moving seat lead screw 41 when the toothless section of the first worm gear 724 faces the moving seat lead screw 41.

[0035] See Figure 3 and Figure 5, the second cold pipe control unit 74 includes a second liquid storage tank 741, a second installation housing 742, a second cold pipe valve 743, a second worm gear 744 and a second torsion spring 745. The second liquid storage tank 741 is arranged at a position on the frame 2 close to the second end of the slide rail 211. The second installation housing 742 is arranged on the moving seat 3, and a second liquid passage cavity is formed inside the second installation housing 742. The second cold pipe valve 743 is arranged in the second liquid passage cavity and divides the second liquid passage cavity into a second liquid inlet chamber 7421 and a second liquid outlet chamber 7422. A second liquid inlet hole leading to the outside is opened on the inner wall of the second liquid inlet chamber 7421. The liquid outlet of the second liquid storage tank 741 is communicated with the second liquid inlet hole through a corrugated bellows pipe. A second liquid outlet hole leading to the outside is opened on the inner wall of the second liquid outlet chamber 7422. One end of the second cooling pipe 73 far from the drill bit is connected to the second liquid outlet hole. A second accommodation groove is opened on the outer wall of the second installation housing 742. The second worm gear 744 is rotatably connected to the inner wall of the second accommodation groove and is in transmission connection with the valve core of the second cold pipe valve 743. Toothless sections and toothed sections are formed on the tooth surface of the second worm gear 744. The toothed section of the second worm gear 744 can be meshed with the external thread of the moving seat lead screw 41, so that the moving seat lead screw 41 can drive the second worm gear 744 to rotate through self-rotation until the toothed section of the second worm gear 744 turns away from the moving seat lead screw 41, and the toothless section of the second worm gear 744 faces the moving seat lead screw 41. The second torsion spring 745 is arranged between the rotating shaft of the second worm gear 744 and the inner wall of the second accommodation groove, and can apply a force to the second worm gear 744 to make the toothed section of the second worm gear 744 turn towards the moving seat lead screw 41 when the toothless section of the second worm gear 744 faces the moving seat lead screw 41.

[0036] See Figure 2 , Figure 4 and Figure 5, a communication hole is formed in the middle of the water baffle 75, and the water baffle 75 is sleeved on the lifting table 53 through the communication hole. Both the first mounting housing 722 and the second mounting housing 742 are connected to the top of the water baffle 75. An annular water baffle protrusion 531 is formed on the side wall of the lifting table 53 around the rotation axis of the drill bit 6. The annular water baffle protrusion 531 is located below the water baffle 75, so that the water baffle 75 can cooperate with the annular water baffle protrusion 531, so that the coolant sprayed by the cooling pipe onto the surface of the workpiece 8 will be blocked by the water baffle 75 and the annular water baffle protrusion 531 when reflecting upward, and then the driving motor 52 above the water baffle 75 is not easily damaged due to contact with the coolant reflected upward from the surface of the workpiece 8; a water baffle groove is formed on the hole wall of the communication hole around the rotation axis of the drill bit 6, and a lip seal ring 751 is provided between the inner wall of the water baffle groove and the side wall of the lifting table 53. The sealing lip of the lip seal ring 751 faces the bottom of the lifting table 53, so as to block the gap between the water baffle 75 and the side wall of the lifting table 53 through the lip seal ring 751, so that the coolant reflected upward from the surface of the workpiece 8 is not easily passed through the gap between the water baffle 75 and the side wall of the lifting table 53 to contact the driving motor 52, thereby further reducing the probability of damage to the driving motor 52 due to water ingress.

[0037] Specifically, the first cold pipe valve 723 and the second cold pipe valve 743 can be ball valves, and tooth sections with a length of one-fourth of a circle are correspondingly provided on the first worm gear 724 and the second worm gear 744. Since when the seat moving motor 42 drives the seat moving lead screw 41 to rotate, the external thread on the seat moving lead screw 41 and the tooth sections on the first worm gear 724 and the second worm gear 744 form a driving structure similar to a worm and worm gear. Then when the moving seat 3 approaches the first end of the slide rail 211 along the slide rail 211, the tooth sections of the first worm gear 724 and the tooth sections of the second worm gear 744 will be rotated by the external thread on the seat moving lead screw 41 to a position facing the second end of the slide rail 211 until the toothless sections of the first worm gear 724 and the toothless sections of the second worm gear 744 face the seat moving lead screw 41. After that, when the moving seat 3 continues to approach the first end of the slide rail 211 along the seat moving lead screw 41, the external thread on the seat moving lead screw 41 will not drive the first worm gear 724 and the second worm gear 744 to rotate continuously, and the first torsion spring 725 and the second torsion spring 745 will respectively keep the tooth sections on the first worm gear 724 and the second worm gear 744 at a position where they are about to separate from the external thread on the seat moving lead screw 41 but have not separated, so that a part of the second cold pipe valve 743 close to the seat moving lead screw 41 rotates 90 degrees in the direction close to the second end of the slide rail 211 and remains in the closed state, and a part of the first cold pipe valve 723 close to the seat moving lead screw 41 rotates 90 degrees in the direction close to the second end of the slide rail 211 and remains in the open state. Then the first liquid inlet chamber 7221 is communicated with the first liquid outlet chamber 7222, so that the first liquid storage tank 721 can supply coolant to the first cooling pipe 71; When the moving seat 3 approaches the second end of the slide rail 211 along the slide rail 211, due to the arrangement of the first torsion spring 725 and the second torsion spring 745, the toothed sections of the first worm gear 724 and the second worm gear 744 will be driven by the external thread on the seat moving lead screw 41 and both rotate to the position facing the first end of the slide rail 211. After that, when the moving seat 3 continues to approach the second end of the slide rail 211 along the seat moving lead screw 41, the external thread on the seat moving lead screw 41 will no longer drive the first worm gear 724 and the second worm gear 744 to continue rotating, while the first torsion spring 725 and the second torsion spring 745 will respectively keep the toothed sections on the first worm gear 724 and the second worm gear 744 at the position where they are about to separate from the external thread on the seat moving lead screw 41 but have not separated, so that the part of the first cold tube valve 723 close to the seat moving lead screw 41 rotates 90 degrees in the direction of the first end of the slide rail 211 and remains in the closed state, and the part of the second cold tube valve 743 close to the seat moving lead screw 41 rotates 90 degrees in the direction of the first end of the slide rail 211 and remains in the open state, thereby enabling the second liquid inlet chamber 7421 to communicate with the second liquid outlet chamber 7422, so that the second liquid storage tank 741 can supply coolant to the second cooling tube 73.

[0038] The implementation principle of the high-precision semiconductor part drilling equipment described in this application is as follows: After fixing the workpiece 8 to be processed on the tabletop of the workbench 1, the user can first drive the drill bit 6 to rotate through the rotary tool driving assembly 5 to process a drill hole on the workpiece 8, and then control the seat moving driving assembly 4 to drive the moving seat 3 to move along the slide rail 211 to the first end or the second end of the slide rail 211, so as to expand the drill hole according to the processing requirements to form long holes of types such as grooves or waist-shaped holes; since when the moving seat 3 approaches the first end of the slide rail 211 along the slide rail 211, the first cold tube control unit 72 will supply coolant to the first cooling tube 71 while the second cold tube control unit 74 will stop supplying coolant to the second cooling tube 73, and when the moving seat 3 approaches the second end of the slide rail 211 along the slide rail 211, the first cold tube control unit 72 will stop supplying coolant to the first cooling tube 71, while the second cold tube control unit 74 will supply coolant to the second cooling tube 73, it can both cool the side of the drill bit in contact with the inner wall of the hole to be processed through the coolant and automatically close the coolant flow in the cooling tube on the other side of the drill bit, so that the user does not need to frequently manually adjust the switches of the cooling tubes on both sides of the drill bit, and thus the use of the high-precision semiconductor part drilling equipment is time-saving and labor-saving.

[0039] Based on the structure of the above high-precision semiconductor part drilling equipment, the second aspect of this application also provides a high-precision semiconductor part drilling method, which is implemented by using the above high-precision semiconductor part drilling equipment. The method specifically includes: S1. First, fill the first cold pipe control unit 72 and the second cold pipe control unit 74 with a sufficient amount of coolant, and then fix the workpiece 8 to be processed on the tabletop of the workbench 1. S2. Start the carriage driving assembly 4 to drive the rotary tool driving assembly 5 and the drill 6 to move, and start the rotary tool driving assembly 5 to drive the drill 6 to rotate to process the workpiece 8. After the processing is completed, turn off the carriage driving assembly 4 and the rotary tool driving assembly 5. S3. Recycle the coolant in the liquid collection cylinder 91 and clean the tabletop of the workbench 1.

[0040] Since the high-precision semiconductor part drilling method of the present application is implemented by using the above-mentioned high-precision semiconductor part drilling equipment, it can also have all the technical effects of the above-mentioned high-precision semiconductor part drilling equipment. In particular, it can realize the recycling of coolant, which can not only save costs but also reduce resource waste.

[0041] The embodiments of this specific implementation manner are all preferred embodiments of the present application, and do not limit the protection scope of the present application accordingly. The same components are denoted by the same reference numerals. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. High-precision semiconductor parts drilling equipment, characterized in that, include: A workbench (1), a frame (2), a movable seat (3), a movable seat drive assembly (4), a rotary cutter drive assembly (5), a drill (6) and a cooling assembly (7), wherein the workbench (1) is capable of receiving a workpiece (8) to be processed; The frame (2) is arranged on the workbench (1), and a slide rail (211) is arranged on the frame (2) along its length direction; The movable seat (3) is arranged on the slide rail (211); The seat moving driving assembly (4) is in driving connection with the moving seat (3) and is capable of driving the moving seat (3) to slide along the slide rail (211); The rotary cutter drive assembly (5) is arranged on the movable seat (3), and the rotary cutter drive assembly (5) is transmission-connected to the drill (6) and can drive the drill (6) to rotate so as to process the workpiece (8); The cooling assembly (7) comprises a first cooling pipe (71), a first cooling pipe control unit (72), a second cooling pipe (73) and a second cooling pipe control unit (74); the two ends of the slide rail (211) are respectively formed as a first end and a second end; the first cooling pipe (71) and the second cooling pipe (73) are relatively arranged on the movable seat (3) with the drill (6) as the center, and the liquid outlets of the first cooling pipe (71) and the second cooling pipe (73) are both oriented toward the drill (6); the first cooling pipe (71) is arranged between the drill (6) and the first end of the slide rail (211), and the second cooling pipe (73) is arranged between the drill (6) and the second end of the slide rail (211); When the movable seat (3) approaches the first end of the slide rail (211) along the slide rail (211), the first cold pipe control unit (72) can supply cooling liquid to the first cooling pipe (71), and the second cold pipe control unit (74) stops supplying cooling liquid to the second cooling pipe (73); when the movable seat (3) approaches the second end of the slide rail (211) along the slide rail (211), the first cold pipe control unit (72) stops supplying cooling liquid to the first cooling pipe (71), and the second cold pipe control unit (74) can supply cooling liquid to the second cooling pipe (73).

2. The high-precision semiconductor parts drilling equipment according to claim 1, characterized in that: The seat shifting driving unit comprises a seat shifting lead screw (41) and a seat shifting motor (42); a slide groove is provided on the frame (2) along the length direction of the slide rail (211); the seat shifting lead screw (41) is arranged in the slide groove along the length direction of the slide groove; a slider (31) is provided on the moving seat (3); the slider (31) is inserted into the slide groove and is provided with a moving screw hole matched with the seat shifting lead screw (41); and the slider (31) is screwed to the seat shifting lead screw (41) via the moving screw hole; The seat shifting motor (42) is transmission-connected to the seat shifting lead screw (41) and is capable of driving the seat shifting lead screw (41) to rotate, so as to drive the slider (31) to move along the slide groove via the seat shifting lead screw (41).

3. The high-precision semiconductor parts drilling equipment according to claim 2, characterized in that: The first cold pipe control unit (72) comprises a first liquid storage tank (721), a first mounting shell (722), a first cold pipe valve (723), a first worm gear (724) and a first torsion spring (725); the first liquid storage tank (721) is arranged on the frame (2) at a position close to the first end of the slide rail (211); the first mounting shell (722) is arranged on the movable seat (3) and a first liquid passage cavity is formed inside the first mounting shell (722); the first cold pipe valve (723) is 23) is arranged in the first liquid passage cavity and divides the first liquid passage cavity into a first liquid inlet chamber (7221) and a first liquid outlet chamber (7222), the inner wall of the first liquid inlet chamber (7221) is provided with a first liquid inlet hole leading to the outside, the liquid outlet of the first liquid storage tank (721) is connected to the first liquid inlet hole through a pipeline, the inner wall of the first liquid outlet chamber (7222) is provided with a first liquid outlet hole leading to the outside, and the end of the first cooling tube (71) away from the drill bit is connected to the first liquid outlet hole A first receiving groove is provided on the outer wall of the first mounting shell (722); the first worm wheel (724) is rotatably connected to the inner wall of the first receiving groove and is drivingly connected to the valve core of the first cold pipe valve (723); and a toothless section and a toothed section are formed on the wheel surface of the first worm wheel (724); the toothed section of the first worm wheel (724) can mesh with the external thread of the seat shifting screw (41), so that the seat shifting screw (41) can drive the first worm wheel (724) to rotate straight by self-rotation. until the toothed section of the first worm wheel (724) turns away from the seat shifting screw (41) and the toothless section of the first worm wheel (724) turns toward the seat shifting screw (41), the first torsion spring (725) is arranged between the rotating shaft of the first worm wheel (724) and the inner wall of the first accommodating groove, and can apply a force to the first worm wheel (724) to make the toothed section of the first worm wheel (724) turn toward the seat shifting screw (41) when the toothless section of the first worm wheel (724) turns toward the seat shifting screw (41); The second cold pipe control unit (74) comprises a second liquid storage tank (741), a second mounting shell (742), a second cold pipe valve (743), a second worm gear (744) and a second torsion spring (745); the second liquid storage tank (741) is arranged on the frame (2) at a position close to the second end of the slide rail (211); the second mounting shell (742) is arranged on the movable seat (3) and a second liquid passage cavity is formed inside the second mounting shell (742); the second cold pipe valve (743) is 43) is arranged in the second liquid passage cavity and divides the second liquid passage cavity into a second liquid inlet chamber (7421) and a second liquid outlet chamber (7422), a second liquid inlet hole leading to the outside is opened on the inner wall of the second liquid inlet chamber (7421), the liquid outlet of the second liquid storage tank (741) is connected to the second liquid inlet hole through a pipeline, a second liquid outlet hole leading to the outside is opened on the inner wall of the second liquid outlet chamber (7422), and an end of the second cooling tube (73) away from the drill bit is connected to the second liquid outlet hole A second receiving groove is provided on the outer wall of the second mounting shell (742); the second worm gear (744) is rotatably connected to the inner wall of the second receiving groove and is drivingly connected to the valve core of the second cold pipe valve (743); and a toothless section and a toothed section are formed on the wheel surface of the second worm gear (744); the toothed section of the second worm gear (744) can mesh with the external thread of the seat shifting screw (41), so that the seat shifting screw (41) can drive the second worm gear (744) to rotate straight by self-rotation. until the toothed section of the second worm wheel (744) turns away from the seat-shifting lead screw (41) and the toothless section of the second worm wheel (744) turns toward the seat-shifting lead screw (41), the second torsion spring (745) is arranged between the rotating shaft of the second worm wheel (744) and the inner wall of the second accommodating groove, and can apply a force to the second worm wheel (744) to make the toothed section of the second worm wheel (744) turn toward the seat-shifting lead screw (41) when the toothless section of the second worm wheel (744) turns toward the seat-shifting lead screw (41); When the movable seat (3) approaches the first end of the slide rail (211) along the slide rail (211), the toothed section of the first worm gear (724) and the toothed section of the second worm gear (744) both rotate to a position facing the second end of the slide rail (211), and the second cold pipe valve (743) is closed, and the first cold pipe valve (723) is opened to connect the first liquid inlet chamber (7221) and the first liquid outlet chamber (7222). When the movable seat (3) approaches the second end of the slide rail (211) along the slide rail (211), the toothed section of the first worm gear (724) and the toothed section of the second worm gear (744) both rotate to a position facing the first end of the slide rail (211), and the first cold pipe valve (723) is closed, and the second cold pipe valve (743) is opened to connect the second liquid inlet chamber (7421) and the second liquid outlet chamber (7422).

4. The high-precision semiconductor parts drilling equipment according to claim 3, characterized in that: The rotary cutter drive assembly (5) comprises a lifting drive member (51), a drive motor (52) and a lifting platform (53); the lifting drive member (51) is arranged on the movable seat (3), and the lifting drive member (51) is connected to the housing of the drive motor (52) and can drive the drive motor (52) to approach or move away from the table surface of the workbench (1); the output shaft of the drive motor (52) is connected to the top of the lifting platform (53), and the drill (6) is connected to the bottom of the lifting platform (53).

5. The high-precision semiconductor parts drilling equipment according to claim 4, characterized in that: The cooling assembly (7) also includes a water baffle (75), a connecting hole is opened in the middle of the water baffle (75), and the water baffle (75) is mounted on the lifting platform (53) via the connecting hole, the first mounting shell (722) and the second mounting shell (742) are both connected to the top of the water baffle (75), and an annular water-blocking protrusion (531) is formed on the side wall of the lifting platform (53) around the rotating axis of the drill (6), and the annular water-blocking protrusion (531) is located below the water baffle (75).

6. The high-precision semiconductor parts drilling equipment according to claim 5, characterized in that: A water retaining groove is provided on the wall of the connecting hole around the rotating axis of the drill bit (6), and a lip seal ring (751) is provided between the inner wall of the water retaining groove and the side wall of the lifting platform (53), and the sealing lip of the lip seal ring (751) faces the bottom of the lifting platform (53).

7. The high-precision semiconductor parts drilling equipment according to claim 1, characterized in that: It also comprises a waste liquid recovery component (9), and the waste liquid recovery component (9) is capable of recovering the coolant dripping on the workbench (1).

8. The high-precision semiconductor component drilling equipment according to claim 7, characterized in that: The waste liquid recovery component (9) comprises a liquid collecting cylinder (91) and a waste guiding pipe (92); a liquid collecting chamber (12) is provided inside the workbench (1); a plurality of liquid collecting holes leading to the table surface of the workbench (1) are provided on the inner top wall of the liquid collecting chamber (12); a liquid outlet hole leading to the outside is provided on the inner bottom wall of the liquid collecting chamber (12); one end of the waste guiding pipe (92) is connected to the liquid outlet hole, and the other end of the waste guiding pipe (92) is inserted into the liquid collecting cylinder (91).

9. The high-precision semiconductor parts drilling equipment according to claim 1, characterized in that: The frame (2) comprises a moving frame (21), a moving frame lead screw (22) and a moving frame motor (23); the slide rail (211) is arranged on the moving frame (21); a moving rail (11) is arranged on the table surface of the workbench (1) along the width direction of the frame (2); the moving frame (21) is arranged on the moving rail (11); a threaded hole matched with the moving frame lead screw (22) is opened on the moving frame (21); the moving frame lead screw (22) is arranged along the length direction of the moving rail (11) and is screwed to the threaded hole; the moving frame motor (23) is transmission-connected with the moving frame lead screw (22) and can drive the moving frame lead screw (22) to rotate, so as to drive the moving frame (21) to move along the moving rail (11) via the moving frame lead screw (22).

10. A high-precision semiconductor part drilling method, implemented by using the high-precision semiconductor part drilling equipment according to claim 8, characterized in that: include: S1, firstly, a sufficient amount of cooling liquid is loaded into the first cooling pipe control unit (72) and the second cooling pipe control unit (74), and then a workpiece (8) to be processed is fixed on the table surface of the workbench (1); S2, starting the seat transfer drive assembly (4) to drive the rotary cutter drive assembly (5) and the drill (6) to move, and starting the rotary cutter drive assembly (5) to drive the drill (6) to rotate to process the workpiece (8), and closing the seat transfer drive assembly (4) and the rotary cutter drive assembly (5) after the processing is completed; S3, recovering the cooling liquid in the liquid collecting cylinder (91) and cleaning the surface of the workbench (1).

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