Automatic clamping micropore double-face machining universal jig

Abstract

The invention relates to the field of jigs, in particular to an automatic clamping micropore double-face machining universal jig which comprises a jig body and a plurality of sets of clamping mechanisms, and an axial through clamping space is formed in the middle of the jig body; the clamping mechanism comprises two clamping arms, one clamping arm is used for supporting a workpiece to form a lower clamping arm, and the other clamping arm forms an upper clamping arm; each clamping arm comprises a sliding block and a clamping block, the sliding blocks are arranged on the jig body and can be driven to slide in the radial direction, and at least part of each sliding block extends into the clamping space to form an extending section. The clamping blocks are arranged on the inner sides of the extending sections and can slide in the axial direction relative to the sliding blocks, and in the assembling state, a workpiece is clamped between the clamping blocks of the upper clamping arm and the clamping blocks of the lower clamping arm; radial sliding of the sliding blocks and axial sliding of the clamping blocks are carried out in a hydraulic driving or pneumatic driving mode. The scheme can adapt to clamping of workpieces with different diameters; and the two sides of the jig are almost not shielded, so that double-sided machining of the workpiece is facilitated.

Description

Technical Field

[0001] This application relates to the field of jigs, and particularly to a universal jig for automatic clamping and double-sided machining of micro-holes. Background Art

[0002] The double-sided drilling process of silicon electrodes is an important process in the manufacturing of silicon electrodes, mainly for drilling a large number of micro-holes axially penetrating the silicon electrodes on the silicon electrodes.

[0003] In the drilling process of silicon electrodes, jigs are usually required to clamp the workpieces (i.e., silicon electrodes) to ensure the stability of the drilling process.

[0004] Then, with the increase in the silicon electrode market, the market demand for silicon electrode products of different diameter sizes is increasing day by day. In traditional jigs, generally, one type of jig is only suitable for clamping silicon electrodes of one diameter size. Therefore, when machining silicon electrodes of different diameter sizes, it is necessary to replace the matching jig; moreover, traditional jigs usually use manual fixing and locking operations to fix the silicon electrodes, so there is still room for improvement. Summary of the Invention

[0005] In order to solve at least one technical problem mentioned in the background art, the purpose of this application is to provide a universal jig for automatic clamping and double-sided machining of micro-holes.

[0006] To achieve the above purpose, this application provides the following technical solutions.

[0007] A universal jig for automatic clamping and double-sided machining of micro-holes, comprising: A jig main body, which has an axially penetrating clamping space in the middle; A number of assembled clamping mechanisms, each clamping mechanism is sequentially arranged along the circumferential direction of the clamping space for clamping the edge of the workpiece; each group of the clamping mechanisms includes two clamping arms, one of the two clamping arms is used to support the workpiece to form a lower clamping arm, and the other forms an upper clamping arm; Each clamping arm includes a slider and a clamping block. The slider is arranged on the jig main body and can be driven to slide radially. At least part of the slider extends into the clamping space to form an extended section; the clamping block is arranged inside the extended section, and the clamping block can slide axially relative to the slider; the sliders of the upper clamping arm and the lower clamping arm are axially opposite to each other. In the assembled state, the workpiece is clamped between the clamping blocks of the upper clamping arm and the lower clamping arm; The radial sliding of the slider and the axial sliding of the clamping block are carried out by a hydraulic drive or a pneumatic drive method.

[0008] As an optional implementation manner of the present application, a first sliding cavity extending radially is provided in the slider, and a first sliding part is provided in the first sliding cavity. The first sliding cavity is separated into a first chamber and a second chamber by the first sliding part; the first sliding part is kept positioned relative to the fixture body, and the first sliding part can slide radially and sealingly relative to the slider in the first sliding cavity; the fixture further includes two independent first flow channels, and the two first flow channels are respectively communicated with the first chamber and the second chamber.

[0009] As an optional implementation manner of the present application, a shaft body extending radially is provided in the fixture body. One end of the shaft body is fixed to the fixture body to form a fixed end, and the other end penetrates into the first sliding cavity to form a first sliding part; the shaft body is in sliding and sealing cooperation with the slider, and the two first flow channels are arranged in the shaft body.

[0010] As an optional implementation manner of the present application, a first sliding groove extending radially is formed in the fixture body, and the slider is slidably connected in the first sliding groove in the radial direction; the shaft body is suspended in the first sliding groove, and the fixed end of the shaft body is fixed to the end wall on the side of the sliding cavity away from the clamping block.

[0011] As an optional implementation manner of the present application, a second sliding cavity extending axially is formed in the clamping block; a second sliding part is provided in the second sliding cavity. The second sliding cavity is separated into a third chamber and a fourth chamber by the second sliding part; the second sliding part is kept relatively positioned with the slider, and the second sliding part can slide axially and sealingly relative to the slider in the second sliding cavity; the fixture further includes two independent second flow channels, and the two second flow channels are respectively communicated with the third chamber and the fourth chamber.

[0012] As an optional implementation manner of the present application, a sliding head extending axially is provided in the slider. One end of the sliding head is fixed to the slider, and the other end penetrates into the second sliding cavity to form a second sliding part; the sliding head is in sliding and sealing cooperation with the second sliding cavity; the second flow channel includes a first flow section and a second flow section that are communicated; the first flow section is arranged radially in the slider; the second flow section is arranged axially in the sliding head; two conduits respectively corresponding to the two second flow channels are fixedly connected in the fixture body, and at least part of the conduits penetrate into the first flow section radially and are in sliding and sealing cooperation with the first flow section in the radial direction.

[0013] As an optional implementation manner of the present application, a concave step is formed at the side end of the side of the slider facing the workpiece. The concave step includes a base surface and a stop surface arranged perpendicular to the base surface for resisting the peripheral wall of the workpiece; the clamping block is arranged at the position of the base surface.

[0014] As an optional implementation manner of the present application, a pressing plate is provided on the side of the clamping block facing the workpiece. The side of the pressing plate away from the workpiece constitutes a pressing surface with a planar structure, and the pressing plate can at least flip on both sides relative to the clamping block in the radial direction.

[0015] As an optional implementation manner of the present application, an accommodating cavity with an arc-shaped cross-section is provided in the clamping block; an active block adapted to the accommodating cavity and capable of moving in the accommodating cavity is provided in the accommodating cavity; the active block is fixed to the pressing plate; or the pressing plate is hinged to the clamping block.

[0016] As an optional implementation manner of the present application, a displacement detector for detecting the sliding distance of the slider in the radial direction is provided between the fixture main body and the slider; and / or the fixture main body can be rotationally switched between a horizontal state and a vertical state.

[0017] Compared with the prior art, the present application has the following beneficial effects: First of all, each clamping mechanism of the present application can clamp the two sides of the workpiece through two clamping arms respectively, so as to realize the clamping of the workpiece and ensure the stability of the workpiece processing process.

[0018] First of all, in each clamping arm of the present application, since the slider can slide in the radial direction, the clamping of workpieces with different diameters can be adjusted by sliding the slider in the radial direction. It can be seen that the present application can meet the processing requirements of workpieces with different diameter sizes.

[0019] Furthermore, in this solution, the workpiece is clamped by the clamping blocks in the upper and lower clamping arms together; and the clamping blocks are axially movable, and the workpiece is clamped by the axial movement of the clamping blocks; it should be noted that although the clamping blocks in the upper and lower clamping arms are both axially movable, their actual functions are still different. Specifically, taking the two clamping arms in the same clamping mechanism as an example: The clamping block in the upper clamping arm moves axially, and its function is to press the workpiece by its own axial sliding, that is, to press the workpiece on the clamping block of the lower clamping arm.

[0020] In the lower clamping arm, the purpose of the axial movement of its clamping block is to adjust the levelness of the workpiece; it can be understood that the workpiece is jointly supported or carried by all the clamping blocks of the lower clamping arm, or it can also be understood that the workpiece is placed on the top surface of the clamping block of the lower clamping arm.

[0021] Assume that the clamping blocks of the lower clamping arm cannot be axially adjusted. In an ideal situation, as long as the top surfaces of the clamping blocks of each lower clamping arm are set on the same horizontal plane at the beginning, the workpiece can be ensured to be horizontal. However, it is difficult to achieve the ideal situation in actual applications. For example, in actual use, the slider may be deformed, resulting in the top surfaces of the clamping blocks of each lower clamping arm not being on the same horizontal plane, and thus the levelness of the workpiece cannot be ensured.

[0022] Based on this, in this solution, the clamping block of the lower clamping arm is designed to be axially movable. In this way, even if the slider is deformed, the clamping block of the lower clamping arm can be axially adjusted so that the workpiece is in a horizontal state after being placed on the clamping block of the lower clamping arm, ensuring the flatness of the workpiece.

[0023] Finally, in this solution, the sliding of the slider and the sliding of the clamping block are both driven by hydraulic or pneumatic means, so that it is similar to manually locking the fixture like a traditional fixture.

[0024] Moreover, there is another advantage of using hydraulic or pneumatic drive, that is, it can ensure that there is almost no obstruction on both axial sides of the fixture, which is beneficial for double-sided machining of the workpiece.

[0025] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present application, nor is it used to limit the scope of the present application. Other features of the present application will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] By reading the following detailed description with reference to the accompanying drawings, the above and other objects, features, and advantages of the exemplary embodiments of the present application will become easily understood. In the drawings, several embodiments of the present application are shown in an exemplary rather than restrictive manner, wherein: In the drawings, the same or corresponding reference numerals indicate the same or corresponding parts.

[0027] Figure 1 is a schematic structural diagram of the present application; Figure 2 is a schematic structural diagram of the present application in the state of clamping a workpiece; Figure 3 is a partial exploded view of the clamping arm of the present application; Figure 4 is a schematic structural diagram of the clamping arm of the present application; Figure 5 is Figure 4 a cross-sectional view taken along the A-A perspective in Figure 6 is a partial axial sectional view of the present application; Figure 7 is a partial radial sectional view of the present application; (state of removing the slider of the upper clamping arm) Figure 8 is an axial sectional view of the present application at the position of the clamping block; Figure 9 is the present application in Figure 8 a sectional view taken along the B-B perspective in Figure 10 is Figure 9 an enlarged view of part N in Figure 11 Cross-sectional view of the clamping block of the present application; Figure 12 is Figure 11 Cross-sectional view from the C-C perspective in; Figure 13 Schematic structural diagram of an embodiment in which the pressing plate of the present application is hinged to the clamping block.

[0028] Description of reference numerals in the figure: J, clamping mechanism; L1, upper clamping arm; L2, lower clamping arm; 2A, first sliding cavity; 2B, second sliding cavity; 1, fixture body; 10, rotating shaft; 11, clamping space; 12, first sliding groove; 121, slide rail; 2, clamping arm; 20, slider; 200, sliding groove; 201, first chamber; 202, second chamber; 203, concave step; 2031, base surface; 2032, stop surface; 204, second sliding groove; 21, clamping block; 210, accommodating cavity; 2101, movable block; 211, third chamber; 212, fourth chamber; 213, pressing plate; 214, guide rod; 215, guide plate; 3, shaft body; 30, first sliding portion; 301, first sealing ring; 31, first flow channel; 311, first communication hole; 32, second sealing ring; 4, sliding head; 41, second sliding portion; 411, third sealing ring; 412, fourth sealing ring; 42, second flow channel; 420, second communication hole; 421, first flow segment; 422, second flow segment; 5, conduit; 51, fifth sealing ring; 61, conductive sheet; 62, conductive terminal. Specific embodiments

[0029] To make the objectives, features, and advantages of the present application more obvious and understandable, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present application.

[0030] Referring to Figure 1-13 As shown, this embodiment provides an automatic clamping general fixture for double-sided micro-hole machining. This fixture is mainly used for double-sided micro-hole machining of workpieces. For example, double-sided micro-hole machining of silicon electrodes; here, double-sided micro-hole machining can be understood as drilling holes on the side surfaces on both axial sides of the workpiece to make micro-holes in the workpiece. The workpiece can be a circular workpiece, such as Figure 2The workpiece shown in the middle part M is a circular workpiece; of course, it can also be a polygonal workpiece, which is not specifically limited here; in this embodiment, the double-sided drilling process of a circular silicon electrode is taken as an example for specific description.

[0031] As Figure 1 shown, the fixture provided in this embodiment includes a fixture body 1 and a clamping mechanism J, etc., and the following is a specific description of each component.

[0032] In some embodiments, the fixture body 1 is basically in a disc structure; in addition, for the sake of easy understanding, in this embodiment, unless otherwise specified, the other claimed axial direction can be understood as the axis direction of the fixture body or the thickness direction of the fixture, and the radial direction is the diameter direction of the fixture body.

[0033] As Figure 1 shown, the fixture body 1 has an axially penetrating clamping space 11 in the middle. Here, the clamping space 11 is equivalent to the space for accommodating the workpiece, that is, the workpiece is finally clamped in the clamping space 11. Among them, the clamping space 11 and the fixture body 1 are basically in a concentric state.

[0034] In addition, in some embodiments, the fixture body 1 can be rotated and switched between a horizontal state and a vertical state. For example, as Figure 1 shown, a rotating shaft 10 is fixed on the side wall of the fixture body 1. The central axis of the rotating shaft 10 coincides with one of the diameter lines of the fixture body 1. In actual application, the fixture body 1 is connected to a driving shaft (not shown in the figure) through the rotating shaft 10 on the side, and the driving shaft drives the rotating shaft 10 to rotate around its own central axis, thereby driving the fixture body 1 to rotate to achieve the switching between the horizontal state and the vertical state; in the horizontal state, the fixture body 1 is parallel to the horizontal plane; the fixture body 1 rotates 90° from the horizontal state to reach the vertical state, and vice versa, rotating 90° in the reverse direction from the vertical state can return to the horizontal state again.

[0035] It should be noted that when the fixture body 1 is in the horizontal state, it is equivalent to the fixture body 1 being in the loading / unloading station, that is, the workpiece is clamped onto the fixture body 1 when the fixture body 1 is in the horizontal state; and when the fixture body 1 is in the vertical state, it is equivalent to the fixture body 1 being in the processing station. At this time, the fixture body 1 turns the clamped workpiece upright together, so as to cooperate with the drilling equipment to realize the double-sided drilling process of the workpiece.

[0036] In this embodiment, several groups of clamping mechanisms J are provided, and each group of clamping mechanisms J is arranged in sequence along the circumferential direction of the clamping space 11. Preferably, they are distributed in a circular array centered on the center of the fixture body 1 (or the center of the clamping space 11); for example, as Figure 1 shown, the specific situation of using 4 groups of clamping mechanisms J is shown in this embodiment, and the 4 groups of clamping mechanisms J are circumferentially spaced 90°.

[0037] In this embodiment, the clamping mechanism J is mainly used to clamp the edge of the workpiece. Since the structures of the clamping mechanisms J are basically the same, in this embodiment, for the sake of easy understanding, one set of the clamping mechanisms J is taken as an example for specific description.

[0038] The clamping mechanism J comprises two clamping arms 2, one of which is used to support the workpiece to form a lower clamping arm L2, and the other is used to form an upper clamping arm L1; it can be understood that the upper and lower parts here are referenced when the fixture body 1 is in a horizontal state, that is, Figure 1 In the state shown, when the fixture body 1 is in a horizontal state, of the two clamping arms 2 of the same clamping mechanism J, the one located on the lower side is mainly used to support the workpiece, and it is recorded as the lower clamping arm L2; correspondingly, the one located on the upper side is recorded as the upper clamping arm L1; the upper and lower clamping arms 2 are arranged opposite to each other along the axial direction.

[0039] The two clamping arms 2 of the same clamping mechanism J are substantially the same, so this embodiment is specifically described by taking one of the clamping arms 2 as an example.

[0040] like Figure 3 As shown, the clamping arms 2 each include a slider 20 and a clamping block 21. The slider 20 is disposed on the fixture body 1 and can be driven to slide radially, for example, Figure 6 and Figure 7 As shown, the fixture body 1 is provided with a first slide groove 12 extending in the radial direction, and the first slide groove 12 is open toward one side of the center of the fixture body 1, and the slider 20 is radially slidably connected in the first slide groove 12. At this time, Figure 2 As shown, the slider 20 is equivalent to being arranged inside the fixture body 1, and does not protrude from the surfaces on both sides of the axial direction of the fixture body 1, thus ensuring that there is almost no obstruction on both sides of the axial direction of the fixture, thereby avoiding the influence of obstructions on the processing operation during processing. In addition, the structure is more compact, which is conducive to reducing the occupied space.

[0041] In addition, in some embodiments, in order to guide the radial sliding of the slider 20, in some embodiments, as Figure 7 As shown, one or more radially extending slide rails 121 are fixedly connected in the first slide groove 12. For example, in this embodiment, two side-by-side slide rails 121 are fixed in the first slide groove 12; accordingly, a slide groove 200 adapted to the slide rail 121 is opened on the side of the slider 20 facing the slide rail 121; the slider 20 is slidably connected to the slide rail 121 through the slide groove 200; the slide rail 121 can adopt a T-shaped slide rail or a dovetail slide rail, etc., which can be selected according to actual needs and is not specifically limited here.

[0042] like Figure 6As shown, in the same clamping mechanism J, the sliders 20 of the upper clamping arm L1 and the sliders 20 of the lower clamping arm L2 are arranged axially opposite to each other; at least a part of the slider 20 extends into the clamping space 11 to form an extended section, which can also be understood as the part of the slider 20 extending into the clamping space 11 is the extended section. When actually clamping a workpiece, the workpiece is clamped between the extended sections of the upper and lower sliders 20.

[0043] In this embodiment, the reason why the slider 20 is designed to be able to slide radially along the fixture body 1 is that the length of the slider 20 extending into the clamping space 11, that is, the length of the extended section, can be adjusted by the radial sliding of the slider 20; in this way, the clamping requirements of workpieces with different diameters can be matched; for example, if the size of the workpiece is small, the length of the slider 20 extending into the clamping space 11 is a little longer, and vice versa, if the size of the workpiece is large, the length of the slider 20 extending into the clamping space 11 is a little shorter; in this way, workpieces with different diameters can be matched.

[0044] In the upper clamping arm L1 and the lower clamping arm L2 of the same clamping mechanism J, there is a slight difference. As Figure 3 shown, a concave step 203 is provided on the inner side surface of the extended section of the lower clamping arm L2. In this embodiment, the inner side of the so-called extended section can be understood as the side surfaces of the upper and lower extended sections on the opposite sides in the same clamping mechanism J; it can also be understood as the side surface of the extended section facing the workpiece when the workpiece is in the clamped state.

[0045] Among them, the concave step 203 includes a base surface 2031 with a planar structure and a stop surface 2032 perpendicular to the base surface 2031 for resisting the peripheral wall of the workpiece; the base surface 2031 and the stop surface 2032 intersect to form a generally L-shaped structure.

[0046] In some embodiments, the stop surface 2032 is preferably an arc-shaped structure that is recessed toward the side away from the center of the fixture body 1 to adapt to the outer peripheral wall of the circular workpiece. When actually clamping the workpiece, the edge of the workpiece is placed at the concave step 203, and then the slider 20 is driven to slide radially inward. Finally, the workpiece is pressed tightly on the circumference by the stop surface 2032 of the concave step 203. In this way, relying on the restriction of the stop surface 2032, the radial movement of the workpiece during processing can be avoided; and with such a setting, as long as the sliders 20 in each lower clamping arm L2 travel the same distance, the workpiece can be made to be substantially concentric with the fixture body 1 after being clamped finally. In short, the cooperation of the sliders 20 can play a role in centering the workpiece.

[0047] The clamping block 21 is arranged on the inner side of the extended section. Specifically, for the lower clamping arm L2, its clamping block 21 is arranged at the position of the base surface 2031 of the concave step 203 of the extended section. Correspondingly, the clamping block 21 of the upper clamping arm L1 is arranged on the opposite side of the clamping block 21 of the lower clamping arm L2.

[0048] In addition, in both the upper clamping arm L1 and the lower clamping arm L2, the clamping block 21 can slide axially relative to the slider 20. In the assembled state, that is, as Figure 2 shown in the state where the workpiece is clamped, axially, the workpiece is clamped between the upper and lower clamping blocks 21. That is, the axial clamping force on the workpiece is provided by the upper and lower clamping blocks 21.

[0049] It should be noted that although the clamping blocks 21 in both the upper and lower clamping arms 2 are axially movable, their actual functions are still different. Specifically, taking the two clamping arms 2 in the same clamping mechanism J as an example: The axial movement of the clamping block 21 in the upper clamping arm L1 is to press the workpiece by its own axial sliding, that is, to press the workpiece onto the clamping block 21 of the lower clamping arm L2.

[0050] In the lower clamping arm L2, the purpose of the axial movement of its clamping block 21 is to adjust the levelness of the workpiece. It can be understood that the workpiece is jointly supported or carried by all the clamping blocks 21 of the lower clamping arm L2, or it can also be understood that the workpiece is placed on the top surface of the clamping block 21 of the lower clamping arm L2. The top surface of the clamping block 21 of the lower clamping arm L2 is equivalent to the supporting surface for carrying the workpiece.

[0051] Assume that the clamping block 21 of the lower clamping arm L2 cannot be axially adjusted. In an ideal situation, as long as the top surfaces of the clamping blocks 21 of each lower clamping arm L2 are set on the same horizontal plane at the beginning, the workpiece can be ensured to be horizontal. However, it is difficult to achieve the ideal situation in actual applications. For example, in actual use, the slider 20 may be deformed, resulting in the top surfaces of the clamping blocks 21 of each lower clamping arm L2 not being on the same horizontal plane, and thus the levelness of the workpiece cannot be ensured.

[0052] Based on this, in this solution, the clamping block 21 of the lower clamping arm L2 is designed to be axially movable. In this way, even if the slider 20 is deformed, the axial adjustment of the clamping block 21 of the lower clamping arm L2 can be used to make the workpiece in a horizontal state after being placed on the clamping block 21 of the lower clamping arm L2, ensuring the levelness of the workpiece.

[0053] When clamping the workpiece, after placing the workpiece on the lower clamping arm L2, axially move the clamping block 21 of the lower clamping arm L2, and cooperate with the levelness detection device to detect whether the workpiece is horizontal; when the workpiece is in a horizontal state, stop adjusting the clamping block 21 of the lower clamping arm L2, and then axially move the clamping block 21 on the upper clamping arm L1 to press it against the upper surface of the workpiece.

[0054] In addition, in this embodiment, the radial sliding of the slider 20 is achieved by a hydraulic drive method or a pneumatic drive method; and the axial sliding of the clamping block 21 can be achieved by either a hydraulic drive method or a pneumatic drive method.

[0055] In this embodiment, the following takes the case where the sliding of the slider 20 and the sliding of the clamping block 21 are both realized by hydraulic drive as an example for specific description. The hydraulic oil generates hydraulic driving force to push the slider 20 and the clamping block 21 to act.

[0056] In order to achieve hydraulic drive or pneumatic drive, in some embodiments, such as Figure 5 shown, a first sliding cavity 2A extending radially is provided in the slider 20. In some embodiments, the radial cross-section of the first sliding cavity 2A is substantially circular. Of course, it can also be other shapes, and no specific limitation is made here.

[0057] Such as Figure 5 shown, a first sliding part 30 is provided in the first sliding cavity 2A. Along the radial direction, the first sliding cavity 2A is divided into a first chamber 201 and a second chamber 202 by the first sliding part 30. Specifically, the second chamber 202 is closer to the center of the fixture body 1 than the first chamber 201. At this time, the first chamber 201 and the second chamber 202 are equivalent to the spaces for the hydraulic oil to enter.

[0058] The first sliding part 30 is kept positioned relative to the fixture body 1, that is, the first sliding part 30 remains stationary relative to the fixture body 1.

[0059] The first sliding part 30 can slide radially and sealingly in the first sliding cavity 2A relative to the slider 20; that is, in actual work, the first sliding part 30 remains stationary, while the slider 20 slides radially relative to the first sliding part 30.

[0060] In addition, it is worth noting that the "sliding sealingly" and "sliding and sealingly cooperating" claimed in this embodiment can be understood as that two components can slide relative to each other and can also ensure the sealing between the two.

[0061] For example, in this embodiment, as Figure 5 shown, one or more first sealing rings 301 are provided on the outer peripheral wall of the first sliding part 30. The first sealing rings 301 are extruded between the outer peripheral wall of the first sliding part 30 and the inner peripheral wall of the first sliding cavity 2A and can slide relative to the inner peripheral wall of the first sliding cavity 2A. In this way, when the first sliding part 30 slides in the first sliding cavity 2A, the sealing between the first sliding part 30 and the inner peripheral wall of the first sliding cavity 2A can be ensured, so that the first chamber 201 and the second chamber 202 are isolated from each other.

[0062] Such as Figure 5 shown, the fixture further includes two independent first flow channels 31. The first flow channels 31 are mainly used as flow channels for conveying hydraulic oil; the so-called independent here means that the two first flow channels 31 are isolated from each other and do not communicate.

[0063] Two first flow channels 31, one of which is in communication with the first chamber 201 for conveying hydraulic oil into / out of the first chamber 201. The other first flow channel 31 is in communication with the second chamber 202 for conveying hydraulic oil into / out of the second chamber 202.

[0064] That is to say, the first end of the first flow channel 31 is in communication with the hydraulic system, and the second end of the first flow channel 31 is in communication with the corresponding chamber; the hydraulic oil is conveyed to the corresponding chamber through the first flow channel 31 by the hydraulic system.

[0065] Specifically, taking Figure 5 the shown perspective as an example, when the hydraulic system conveys the hydraulic oil into the first chamber 201 through the first flow channel 31, a hydraulic driving force will be generated in the first chamber 201. Since the first sliding part 30 remains stationary, under the action of this hydraulic driving force, the slider 20 will be pushed to slide leftward (i.e., the slider 20 slides radially away from the center side of the fixture main body 1); conversely, when the hydraulic system conveys the hydraulic oil into the second chamber 202 through the other first flow channel 31, a hydraulic driving force will be generated in the second chamber 202, thereby pushing the slider 20 to slide rightward (i.e., the slider 20 slides radially toward the side close to the center of the fixture). In this way, the purpose of realizing the radial sliding of the slider 20 in a hydraulic driving manner is achieved. It can be understood that the principle of the pneumatic driving method is basically the same as that of the hydraulic method. The difference is that the hydraulic pressure uses liquid to generate pressure to drive the slider 20 to act, while the pneumatic driving uses gas to generate pressure to drive the slider 20 to act.

[0066] In order to not only keep the first sliding part 30 stationary relative to the fixture main body 1 but also ensure the communication between the two first flow channels 31 and the two chambers, in some embodiments, as Figure 5 shown, a shaft body 3 extending radially is provided in the fixture main body 1. As Figure 7 shown, one end of the shaft body 3 is fixed to the fixture main body 1 to form a fixed end. Specifically, the fixed end of the shaft body 3 is fixed on the end wall of the sliding cavity away from the clamping block 21, so that the shaft body 3 is suspended in the first sliding groove 12. Correspondingly, as Figure 5 shown, the other end of the shaft body 3 passes through the end of the first sliding cavity 2A and movably penetrates into the first sliding cavity 2A to form the first sliding part 30. That is to say, the first sliding part 30 can either be an integral structure with the shaft body 3 or two non-integral components fixedly connected to each other.

[0067] It should be noted that the shaft body 3 is basically coaxially arranged with the first sliding cavity 2A, and there is a gap between the outer peripheral wall of the shaft body 3 and the inner peripheral wall of the first sliding cavity 2A to form the first chamber 201.

[0068] In addition, the shaft body 3 is in relatively sliding and sealing cooperation with the slider 20. As Figure 5As shown, for example, one or more second sealing rings 32 are fixed at the part where the shaft body 3 penetrates into the end of the slider 20; the inner side of the second sealing ring 32 abuts against the shaft body 3 and is in sliding fit; in this way, the second sealing ring 32 ensures the sealing performance at the position where the shaft body 3 and the slider 20 intersect.

[0069] In some embodiments, such as Figure 5 As shown, the two first flow channels 31 basically extend along the axial direction of the shaft body 3. One end of the first flow channel 31 connected to the first chamber 201 is connected to the hydraulic system, and the other end away from the hydraulic system is formed on the peripheral wall of the shaft body 3 near the first sliding part 30 to form a first communication hole 311 for communicating with the first chamber 201.

[0070] Correspondingly, one end of the first flow channel 31 connected to the second chamber 202 is connected to the hydraulic system, and the other end penetrates through the first sliding part 30 and then communicates with the second chamber 202.

[0071] In addition, in order to be able to monitor the radial sliding distance of the slider 20, in some embodiments, a displacement detector for detecting the radial sliding distance of the slider 20 is provided between the fixture body 1 and the slider 20.

[0072] As an alternative implementation, such as Figure 3 and Figure 7 As shown, the displacement detector mainly includes a strip-shaped conductive sheet 61 and a conductive terminal 62; the conductive sheet 61 is fixed on the outer wall of the slider 20 along the radial direction; the conductive sheet 61 is fixed in the groove wall of the first chute 12, and the conductive terminal 62 is in electrical contact with the conductive sheet 61 and can slide relative to each other in a contacting state; in addition, the conductive terminal 62 and the conductive sheet 61 are connected in a detection circuit; at this time, the conductive sheet 61 and the conductive terminal 62 form a structure of a sliding rheostat; when the slider 20 slides radially, it will drive the conductive sheet 61 to slide radially relative to the conductive terminal 62, thereby changing the length of the conductive sheet 61 inserted into the detection circuit, so that the resistance changes, and through the change value of the resistance, it is converted into the sliding distance of the slider 20 after processing.

[0073] In order to realize the axial sliding of the driving clamp 21 by hydraulic driving, in some embodiments, such as Figure 11 As shown, a second sliding cavity 2B extending along the axial direction is provided in the clamp 21; as Figure 8 As shown, a second sliding part 41 is provided in the second sliding cavity 2B, and the second sliding cavity 2B is axially divided into an upper third chamber 211 and a lower fourth chamber 212 by the second sliding part 41.

[0074] Among them, the second sliding part 41 is relatively positioned with the slider 20, that is, the second sliding part 41 is relatively fixed with the slider 20. For example, a sliding head 4 extending axially is provided in the slider 20, and the cross-section of the sliding head 4 is circular; and the upper end of the sliding head 4 is fixed on the slider 20, and the lower end movably penetrates into the second sliding cavity 2B from the end of the clamping block 21 to form the second sliding part 41.

[0075] The diameter of the sliding head 4 is smaller than the diameter of the second sliding cavity 2B, and the two are arranged substantially coaxially, so as to form a third chamber 211 between the outer peripheral wall of the sliding head 4 and the inner peripheral wall of the second sliding cavity 2B.

[0076] The second sliding part 41 can slide axially and sealingly relative to the slider 20 in the second sliding cavity 2B. For example, as Figure 8 shown, one or more third sealing rings 411 are sleeved and fixed on the outer peripheral wall of the second sliding part 41, and the outer peripheral wall of the third sealing ring 411 abuts against the inner peripheral wall of the second sliding cavity 2B, so that the second sliding part 41 can slide axially and sealingly relative to the slider 20 in the second sliding cavity 2B.

[0077] In addition, the sliding head 4 is slidably and sealingly matched with the second sliding cavity 2B, that is, one or more fourth sealing rings 412 are fixedly connected to the clamping block 21 at the position where the sliding head 4 penetrates, and the inner side of the fourth sealing ring 412 abuts against the outer peripheral wall of the sliding head 4 for sealing.

[0078] The jig further includes two independent second flow channels 42, and the two second flow channels 42 are respectively communicated with the third chamber 211 and the fourth chamber 212.

[0079] Specifically, for the second flow channel 42 communicated with the third chamber 211, one end thereof forms a second communication hole 420 at the position where the sliding head 4 is close to the second sliding part 41, and is communicated with the third chamber 211 through the second communication hole 420, and the other end is communicated with the hydraulic system.

[0080] Correspondingly, for the second flow channel 42 communicated with the fourth chamber 212, one end thereof penetrates through the second sliding part 41 and is communicated with the fourth chamber 212, and the other end is communicated with the hydraulic system.

[0081] Thus, in order to Figure 8Taking the shown perspective as an example, when the hydraulic system inputs hydraulic oil into the third chamber 211 through one of the second flow channels 42, since the second sliding part 41 remains stationary, under the hydraulic action in the third chamber 211, the clamping block 21 will be pushed upward relative to the slider 20 (i.e., move axially away from the workpiece side); conversely, when the hydraulic system inputs hydraulic oil into the fourth chamber 212 through the other second flow channel 42, under the hydraulic action in the fourth chamber 212, the clamping block 21 will be pushed downward (i.e., move axially toward the workpiece side). Thus, the purpose of axially sliding the chuck in a hydraulic manner is achieved.

[0082] As a specific implementation manner, the main structures of the two second flow channels 42 are basically the same. Taking one of them as an example, as Figure 10 shown, the second flow channel 42 includes a first flow segment 421 and a second flow segment 422 that are connected and communicate with each other; the first flow segment 421 is arranged radially in the slider 20; as Figure 8 shown, the second flow segment 422 is arranged axially in the sliding head 4; as Figure 7 shown, two conduits 5 corresponding to the two second flow channels 42 are fixedly connected in the fixture main body 1, and the conduit 5 is a rigid pipe fitting; specifically, the conduit 5 is arranged in the first chute 12, and one end of it is fixed on the end wall of the first chute 12, so that the conduit 5 is suspended in the first chute 12.

[0083] In addition, as shown in Figure 10 shown, at least a part of the conduit 5 penetrates into the first flow segment 421 radially and is slidably and sealingly fitted with the first flow segment 421 in the radial direction. For example, one or more fifth sealing rings 51 are fixedly sleeved on the outer peripheral wall of the front end of the conduit 5; the outer peripheral wall of the fifth sealing ring 51 abuts against the inner peripheral wall of the first flow segment 421, so as to achieve the slidable and sealing fit.

[0084] That is to say, the purpose of setting the first flow segment 421 is to enable the second flow channel 42 as a whole to not only achieve the connection between the hydraulic system and the chamber in the sliding head 4, but also adapt to the sliding of the slider 20.

[0085] In some embodiments, as shown in Figure 8 shown, a second chute 204 is opened in the slider 20, and the clamping block 21 is slidably arranged axially in the second chute 204. In order to guide the axial sliding of the clamping block 21, an axially extending guide rod 214 is fixed on the side of the clamping block 21. Correspondingly, a guide plate 215 fixed to the slider 20 is arranged in the second chute 204, and the guide rod 214 axially slides through the guide plate 215, and the axial sliding of the slider 20 is guided through the cooperation of the guide rod 214 and the guide plate 215.

[0086] It can be understood that in some other alternative embodiments, the positions of the guide plate 215 and the guide rod 214 can be interchanged. For example, the guide plate 215 is provided on the clamping block 21, and the guide rod 214 is provided on the slider 20.

[0087] One side of the clamping block 21 facing the workpiece is provided with a pressing plate 213. The side of the pressing plate 213 away from the workpiece constitutes a flat pressing surface. The pressing plate 213 can at least flip to both sides relative to the clamping block 21 in the radial direction. That is to say, the clamping block 21 directly presses the workpiece by using the pressing plate 213.

[0088] The reason for setting the pressing plate 213 to be able to flip slightly to both sides is as follows: Suppose there is no flipable pressing plate 213, but the clamping block 21 directly presses the workpiece. When the slider 20 is deformed so that the end of the slider 20 facing the center of the fixture body 1 warps or sinks, tilt will also occur at this time, resulting in a line contact state between the clamping block 21 and the workpiece, which is not conducive to the clamping stability.

[0089] After the pressing plate 213 is provided, even if the slider 20 is deformed, after the pressing plate 213 contacts the workpiece, it can flip adaptively to fit the surface of the workpiece. At this time, the contact between the pressing plate 213 and the workpiece is equivalent to surface contact, which is more stable than line contact.

[0090] The specific structure of the flipable pressing plate 213 can be, as Figure 12 shown, an accommodating cavity 210 with an arc-shaped cross-section is provided in the clamping block 21, that is, the top wall and the bottom wall of the accommodating cavity 210 are arc-shaped; an active block 2101 that is adapted to the accommodating cavity 210 and can move in the accommodating cavity 210 is provided in the accommodating cavity 210. The top wall and the bottom wall of the active block 2101 are arc-shaped that are adapted to the accommodating cavity 210, so that the active block 2101 can flip slightly left and right in the accommodating cavity 210; in addition, the active block 2101 is fixed to the pressing plate 213, so that the pressing plate 213 can be flipped.

[0091] Of course, in some other alternative embodiments, it can also be, as Figure 13 shown, the pressing plate 213 is hinged to the clamping block 21. In this way, the flipping of the pressing plate 213 can also be realized.

[0092] It should be understood that the various forms of processes shown above can be used, resequenced, steps added or deleted. For example, the steps described in this application can be executed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in this application can be achieved. This is not limited herein.

[0093] Furthermore, the terms "first" and "second" are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In the description of this application, "a plurality of" means two or more unless specifically defined otherwise.

[0094] As described above, it is only the specific implementation manner of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art can easily conceive of changes or substitutions within the technical scope disclosed in this application and should be covered by the protection scope of this application. Therefore, the protection scope of this application shall be subject to the protection scope of the claimed rights.

Claims

1. A universal fixture for automatically clamping micro-hole double-sided processing, characterized in that: include: A fixture body, wherein the middle of the fixture body has an axially penetrating clamping space; A plurality of assembly clamping mechanisms, each of which is sequentially arranged along the circumference of the clamping space for clamping the edge of the workpiece; each group of the clamping mechanisms comprises two clamping arms, one of which is used to support the workpiece to form a lower clamping arm, and the other constitutes an upper clamping arm; Each of the clamping arms comprises a slider and a clamping block, wherein the slider is arranged on the fixture body and can be driven to slide in the radial direction, and the slider at least partially extends into the clamping space to form an extension section; the clamping block is arranged on the inner side of the extension section, and the clamping block can slide in the axial direction relative to the slider; the slider of the upper clamping arm and the slider of the lower clamping arm are arranged opposite to each other in the axial direction, and in the assembled state, the workpiece is clamped between the clamping block of the upper clamping arm and the clamping block of the lower clamping arm; The radial sliding of the slider and the axial sliding of the clamping block are performed by hydraulic drive or pneumatic drive.

2. The universal jig for automatically clamping micro-hole double-sided processing according to claim 1 is characterized in that: A first sliding cavity extending radially is provided in the slider, a first sliding portion is provided in the first sliding cavity, and the first sliding cavity is divided into a first chamber and a second chamber by the first sliding portion; the first sliding portion is positioned relative to the fixture body, and the first sliding portion can slide radially and sealedly in the first sliding cavity relative to the slider; the fixture also includes two independent first flow channels, and the two first flow channels are respectively connected to the first chamber and the second chamber.

3. The universal jig for automatically clamping micro-hole double-sided processing according to claim 2 is characterized in that: A shaft body extending radially is provided in the fixture body, one end of the shaft body is fixed to the fixture body to form a fixed end, and the other end penetrates into the first sliding cavity to form a first sliding portion; the shaft body and the sliding block are relatively slidably and sealedly matched, and two first flow channels are provided in the shaft body.

4. The universal jig for automatically clamping micro-hole double-sided processing according to claim 3 is characterized in that: The fixture body is provided with a first sliding groove extending radially, and the sliding block is radially slidably connected in the first sliding groove; the shaft body is suspended in the first sliding groove, and the fixed end of the shaft body is fixed on the end wall of the sliding cavity away from the clamping block.

5. The universal jig for automatically clamping micro-hole double-sided processing according to claim 1 is characterized in that: A second sliding cavity extending axially is provided in the clamping block; a second sliding portion is provided in the second sliding cavity, and the second sliding cavity is divided into a third chamber and a fourth chamber by the second sliding portion; the second sliding portion is relatively positioned with the slider, and the second sliding portion can slide axially in the second sliding cavity relative to the slider in a sealed manner; the fixture also includes two independent second flow channels, and the two second flow channels are respectively connected to the third chamber and the fourth chamber.

6. The universal jig for automatically clamping micro-hole double-sided processing according to claim 5 is characterized in that: The slider is provided with a slider extending in the axial direction, one end of the slider is fixed on the slider, and the other end penetrates into the second sliding cavity to form a second sliding part; the slider and the second sliding cavity are slidably and sealedly matched; the second flow channel includes a first flow segment and a second flow segment that are connected; the first flow segment is radially arranged in the slider; the second flow segment is axially arranged in the slider; two conduits corresponding to the two second flow channels are fixedly connected to the fixture body, and the conduits at least partially penetrate into the first flow segment in the radial direction, and are relatively slidably and sealedly matched with the first flow segment in the radial direction.

7. The universal jig for automatically clamping micro-hole double-sided processing according to claim 1 is characterized in that: A concave step is formed on the side end of the sliding block facing the workpiece, and the concave step includes a base surface and a blocking surface arranged perpendicular to the base surface for resisting the peripheral wall of the workpiece; the clamping block is arranged at the base surface position.

8. The universal jig for automatically clamping micro-hole double-sided processing according to claim 1 is characterized in that: A pressure plate is provided on the side of the clamping block facing the workpiece, and a side surface of the pressure plate away from the workpiece forms a clamping surface of a planar structure. The pressure plate can be turned over at least on both sides relative to the clamping block in a radial direction.

9. The universal jig for automatically clamping micro-hole double-sided processing according to claim 7, characterized in that: A receiving cavity with an arc-shaped cross section is provided in the clamping block; a movable block adapted to the receiving cavity and movable in the receiving cavity is provided in the receiving cavity; the movable block is fixed to the pressing plate; or the pressing plate is hinged on the clamping block.

10. The universal jig for automatically clamping micro-hole double-sided processing according to claim 1, characterized in that: A displacement detector for detecting the radial sliding distance of the slider is provided between the jig body and the slider; and / or the jig body can be rotated and switched between a horizontal state and a vertical state.

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